november 4, 2013 [email protected] sawyes/courses.html 1 ecse-6230 semiconductor devices and models i...
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April 10, 2023 [email protected] www.rpi.edu/~sawyes/courses.html 1
ECSE-6230Semiconductor Devices and Models I
Lecture 4 Prof. Shayla Sawyer
Bldg. CII, Rooms 8225Rensselaer Polytechnic Institute
Troy, NY 12180-3590Tel. (518)276-2164Fax. (518)276-2990
e-mail: [email protected]@rpi.edu www.rpi.edu/~sawyes/c
ourses.html April 10, 2023
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Outline
• Carrier Concentration at Thermal Equilibrium– Introduction– Fermi Dirac Statistics
• Donors and Acceptors• Determination of Fermi Level• Dopant Compensation
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Carrier Concentration Introduction• One of most important properties of a
semiconductor is that it can be doped with different types and concentrations of impurities
• Intrinsic material-no impurities or lattice defects• Extrinsic-doping, purposely adding impurities
– N-type mostly electrons– P-type mostly holes
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Carrier Concentration Introduction• To calculate semiconductor electrical properties,
you must know the number of charge carriers per cm3 of the material
• Must investigate distribution of carriers over the available energy states
• Statistics are needed to do so
Fermi-Dirac statistics• Distribution of electrons over a range of allowed
energy levels at thermal equilibrium
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Fermi-Dirac DistributionProbability that an available energy state at E will be occupied by an electron at absolute temperature T
Mathematically,EF (Fermi Energy) is the energy at
which f(E) = 1/2The transition region in (E - EF)
from f(E) =1 to f(E) = 0 is within3 k T.
When T 0, E is discontinous at E = EF.
F E( )1
1 expE EF kT
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Fermi-Dirac Distribution
• To apply the Fermi-Dirac distribution, we must recall that f(E) is the probability of occupancy of an available state at E.
• Where can we find available states?
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Carrier ConcentrationAt Thermal Equilbrium
• Number of electrons (occupied conduction band levels) given by:
• Density of states g(E) can be approximated by the density near the bottom of the conduction band
nE C
E TOP
Eg E( ) f E( )
d
g E( ) M C2
2
mde
3
2E EC
1
2
3 where
MC is the number of equiv. minima
mde m1*m2
* m3*
1
3
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Carrier ConcentrationAt Thermal Equlibrium
• The integral can be evaluated as
n N c2
F 1/2
EF EC
kT
NC 22mde kT
h2
3
2
M C
Where NC is the effective density of states in the conduction band given by:
For the valence band, consider light and heavy holes for the density of states effective mass for holes (mdh)and use similar equation
NV 22mdh kT
h2
3
2
mdh m lh
*
3
2mhh
*
3
2
2
3
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Carrier ConcentrationAt Thermal Equlibrium: Intrinsic
• For intrinsic material lies at some intrinsic level Ei
near the middle of the band gap, electron and hole concentrations are
• Law of mass action: product of maj. and min. carriers is fixed
n p N c N v e
E g
kT n i2
n ni expEF Ei
kT
p ni expEi EF
kT
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Donors and Acceptors• Doping by substituting Si atoms with Column III or V of
the Periodic Table.• Very dilute doping level, typical 1014 to 1018 cm-3, results
in discrete energy levels.
Donor level is neutral if filled with e-,positively charged if empty.e.g., P, As, and Sb in Si.
Acceptor level is neutral if empty,negatively charged if filled with e-.e.g., B and Al in Si.
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Donors and Acceptors“Hydrogen-like” Model to describe
dopant atom ionization.Hydrogen Atom
• Ground state (n=1) ionization energy of hydrogen is 13.6 eV.
• To estimate ionization energy of donors, replace m0 with m* and0 and S (e.g., 11.70 for Si).
ED = (0 /S )2 ( m*/ m0 ) EH ~ 0.006 eV for Ge, 0.025 eV for Si, 0.007 eV for GaAs
EA ~ 0.015 eV for Ge, 0.05 eV for Si, 0.05 eV for GaAs
EH
mo q4
32 2
02
213.6eV
http://gemologyproject.com/wiki/index.php?title=The_Chemistry_of_Gemstones
kT~0.026eV
Comparable to thermal energies so ionizationis complete at room temperature
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Donors and Acceptor Levels
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Determination of Fermi LevelIntrinsic Semiconductor - EF ~ Eg / 2Extrinsic Semiconductor - EF adjusted to preserve
space charge neutralitySpace Charge Neutrality
n0 + NA- = ND
+ + p0 Total Neg. Charges = Total Positive Charges
electrons and ionized acceptors=holes and ionized donors100% ionization assumed.
Ionized Concentration of DonorsWhen impurities are introduced:
where gD is the ground state degeneracy of donor impuritygD = 2 (i) electrons with either spin
(ii) no electrons at all
ND+ ND
1 g D expEF ED
kT
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Determination of Fermi LevelIonized Acceptors
where gA is the ground state degeneracy of acceptor impurity
gA = 4 for Ge, Si, and GaAs because
(i) Acceptor levels can receive electrons with either spin and (ii) Valence band double degeneracy.
Space Charge NeutralityN-type Semiconductor is assumed.n=ND
++p ~ ND+ therefore
NA- NA
1 g A expEA EF
kT
NC expEC EF
kT
ND
1 2 expEF ED
kT
Charge Neutrality• Since the material must balance
electrostatically, the Fermi level must adjust such that charge neutrality remains.
• The Fermi level therefore can be calculated for a set given ND, ED, NC, and T
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Dopant CompensationWhen both n- and p-type (donor and acceptor) impurities are present,the space charge neutrality condition n0 + NA
- = ND+ + p0
holds, even when the impurities are deep levels.In an n-type semiconductor where ND>>>NA
Fermi level can be obtained from
nno1
2ND NA ND NA 2 4ni
2
p no
n i2
n no
n i2
ND
n no ND NC expEC EF
kT
n i expEF E i
kT
nno1
2ND NA ND NA 2 4 ni
2
~ND if ND NA >>> ni or ND>>NA
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Dopant Compensation
In an p-type semiconductor where NA>>>ND
Fermi level can be obtained from
NA ND >>> ni or NA>>NDppo1
2NA ND NA ND 2 4 ni
2
~NA if
npo
ni2
NA
p po N A NV expEF EV
kT
n i expE i E F
kT
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Example Problem
A hypothetical semiconductor has an intrinsic carrier concentration of 1.0 x 1010 cm-3 at 300 K, it has a conduction and valence band effective density of states NC and NV both equal to 1019 cm-3.
a) What is the band gap Eg?b) If the semiconductor is doped with Nd = 1x1016
donors/cm3 , what are the equilibrium electron and hole concentrations at 300K?
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Example Problem
A hypothetical semiconductor has an intrinsic carrier concentration of 1.0 x 1010 cm-3 at 300 K, it has a conduction and valence band effective density of states NC and NV both equal to 1019 cm-3.
c) If the same piece of semiconductor, already having Nd
= 1x1016 donors/cm3, is also doped with Na= 2x1016 acceptors/cm3 , what are the new equiliblrium electron and hole concentrations at 300 K?
a) Consistent with your answer to part (c), what is the Fermi level position with respect to the intrinsic Fermi level, EF – Ei?