nt™ pressure transducer for vacuum applicationsproduct configurations code base model 4250...

NT® PRESSURE TRANSDUCERFOR VACUUM APPLICATIONS

User Guide

ENTEGRIS, INC.Corporate Headquarters3500 Lyman BoulevardChaska, Minnesota 55318 USACustomer Service Tel. 763-502 - 02 0 0Toll Free 877-503-02 0 0Customer Service Fax 763-502-0300w w w. e n t e g r i s . c o mw w w. e n t e g r i s f l u i d h a n d l i n g . c o m

Entegris® and Flaretek® are registered trademarks of Entegris, Inc.NT® is a registered trademark of NT International, an Entegris Company .Kalrez® and Viton® are registered trademarks of DuPont Dow Elastomers.

The materials integrity manage ment company

ENTEGRIS, INC. Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 1

NT® PRESSURE TRANSDUCER USER GUIDE

Table of ContentsIntroduction .................................. 2

Ordering Information .................. 3

Identifying NonstandardProduct Configurations .......... 5

Installation .................................... 6

Mechanical Installation ............. 6

Electrical Installation ................ 7

Power Supply Requirements ..... 8

Load Resistance:Current Output ....................... 9

Unit Operation ............................ 10

Operating Environment ........... 10

Process Connections ................ 10

Pressure Transducer Cover Assembly ..................... 10

Temperature Requirements .... 10

Pressure Limits ......................... 10

Pressure ReferenceAccuracy ................................ 10

Linear Output Signal ............... 11

Troubleshooting .......................... 12

Reference ..................................... 13

Physical Specifications ............ 13

Electrical Specifications ......... 13

Performance Specifications .... 13

Certifications .............................. 14

CE Compliance ......................... 14

Dimensions .................................. 15

Repair and Warranty Service . . . . 2 1

NT® PRESSURE TRANSDUCER USER GUIDENT® PRESSURE TRANSDUCER USER GUIDE

2 Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 ENTEGRIS, INC.

Introduction

This manual is for use with NT®

Pressure Transducers for vacuumapplications, single-port and flow-through models 4150 and 4250.These instruments have been designed for use in high purity applications in the semiconductorindustry and are compatible withhighly corrosive processes.

These products feature no movingparts and no filled cavities, whichreduces the possibility of a contami-nated process. The wetted parts ofthese nonmetallic transducers areconstructed with PTFE, sapphireor other similar high purity inertmaterials.

Ordering Information

CODE BASE MODEL

4150 Single-Port Vacuum Pressure Transducer

CODE PRESSURE RANGE

030V -12 to 30 PSIG (-83 to 207 kPa)060V -12 to 60 PSIG (-83 to 414 kPa)100V -12 to 100 PSIG (-83 to 690 kPa)

CODE INLET/OUTLET PORT CONNECTION TYPE

F02 1/4″ Flaretek®F03 3/8″ Flaretek®F04 1/2″ Flaretek®N02 1/4″ FNPT N04 1/2″ FNPT M02 1/4″ MNPT

CODE ELECTRICAL CONNECTOR TYPE

B06 FEP-jacketed 6′ pigtail electrical cableB12 FEP-jacketed 12′ pigtail electrical cableB30 FEP-jacketed 30′ pigtail electrical cableD00 3-pin polypropylene connectorD06 3-pin polypropylene connector and 6 ′ PVC-jacketed mating cableD12 3-pin polypropylene connector and 12 ′ PVC-jacketed mating cableD30 3-pin polypropylene connector and 30 ′ PVC-jacketed mating cable

CODE ELECTRICAL OUTPUTS

A 4-20 mA (12-28 VDC input)

CODE PRIMARY/SECONDARY SEAL

U1 Kalrez® 4079/Viton® (default)U2 Kalrez® 1050/Viton®U3 Kalrez® 6375 UP/Viton®S1 Kalrez® 4079/Kalrez® 4079S2 Kalrez® 1050/Kalrez® 1050S3 Kalrez® 6375 UP/Kalrez® 6375 UP

Introduction

This manual is for use with NT®

Pressure Transducers for vacuumapplications, single-port and flow-through models 4150 and 4250.These instruments have been designed for use in high purity applications in the semiconductorindustry and are compatible withhighly corrosive processes.

These products feature no movingparts and no filled cavities, whichreduces the possibility of a contami-nated process. The wetted parts ofthese nonmetallic transducers areconstructed with PTFE, sapphireor other similar high purity inertmaterials.

Ordering Information

CODE BASE MODEL

4150 Single-Port Vacuum Pressure Transducer

CODE PRESSURE RANGE

F02 1/4″ Flaretek®F03 3/8″ Flaretek®F04 1/2″ Flaretek®N02 1/4″ FNPT N04 1/2″ FNPT M02 1/4″ MNPT

Identifying NonstandardProduct Configurations

CODE BASE MODEL

4250 Flow-Through Vacuum Pressure Transducer

CODE PRESSURE RANGE

F02 1/4″ Flaretek®F03 3/8″ Flaretek®F04 1/2″ Flaretek®F06 3/4″ Flaretek®F08 1″ Flaretek® (030G, 060G types only)

This User Guide applies to productmanufactured as standard NT®

Pressure Transducers single-port and flow-through models 4150 and4250. Entegris also manufacturesnonstandard product to meet theneeds of specific applications.Nonstandard product may havedifferent materials of construction,accuracy specifications, performanceand other specifications that differ-entiate the nonstandard productfrom the standard offering.

NOTE: Nonstandard pressuretransducers may be identified bythe model number found on theproduct label.

Nonstandard single-port pressuretransducers, model 4150 productline, are identified with a “P” fol-lowed by a number code.

For example, part number 4150-030V-F02-B06-A-P04

the “P04” designates the product as anonstandard product manufacturedto certain specifications designatedunder the “P04”code.

Nonstandard flow-through pressuretransducers, model 4250 productline, are identified with a “T” fol-lowed by a number code.

For example, part number 4250-030V-F02-B06-A-T02

the “T02” designates the product as anonstandard product manufacturedto certain specifications designatedunder the “T02” code.

Identifying NonstandardProduct Configurations

CODE BASE MODEL

4250 Flow-Through Vacuum Pressure Transducer

CODE PRESSURE RANGE

F02 1/4″ Flaretek®F03 3/8″ Flaretek®F04 1/2″ Flaretek®F06 3/4″ Flaretek®F08 1″ Flaretek® (030G, 060G types only)

This User Guide applies to productmanufactured as standard NT®

Pressure Transducers single-port and flow-through models 4150 and4250. Entegris also manufacturesnonstandard product to meet theneeds of specific applications.Nonstandard product may havedifferent materials of construction,accuracy specifications, performanceand other specifications that differ-entiate the nonstandard productfrom the standard offering.

NOTE: Nonstandard pressuretransducers may be identified bythe model number found on theproduct label.

Nonstandard single-port pressuretransducers, model 4150 productline, are identified with a “P” fol-lowed by a number code.

For example, part number 4150-030V-F02-B06-A-P04

the “P04” designates the product as anonstandard product manufacturedto certain specifications designatedunder the “P04”code.

Nonstandard flow-through pressuretransducers, model 4250 productline, are identified with a “T” fol-lowed by a number code.

For example, part number 4250-030V-F02-B06-A-T02

the “T02” designates the product as anonstandard product manufacturedto certain specifications designatedunder the “T02” code.

6 Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 ENTEGRIS, INC. ENTEGRIS, INC. Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 7

CAUTION!The NT® Pressure Transducer has been factory sealed. Do notattempt to remove the coverof the pressure transducer. Anyattempt at removal of the pressure transducer cover willvoid the warranty and damagethe unit.

CAUTION!Do not tighten the nuts thatprotect the process connectionsduring shipment. Do not tightenthe nuts unless the propertubing has been installed.Tightening these nuts may resultin damage to the pressure trans-ducer process connections.

Installation Electrical Installation The pressure transducer provides an analog (4-20 mA) electricaloutput proportional to the pressuremeasured.

NOTE: The white wire is not required, please refer to the wiring diagram below.

Pressure transducer4-20 mA output version

+24 VDC GND

BLACK4-20 mA pressure signal

no connection

display or PLC

Mechanical InstallationNT® Pressure Transducers utilizeFlaretek® flared tube connectionsand must be used with the propertubing size and coupling nut.

When installing flared tubing to thepressure transducer, the flared tubeis pushed over the transducer’sfitting until the fitting reaches thesmaller tube diameter. The amountof torque required to tighten thecoupling nut is dependent upon thesize of the fitting.

Care should be taken when installingflared tubing onto the pressuretransducer. Do not use excessivetorque or subject the transducer tohigh heat during installation. Thetransducer should be firmly mountedto a solid surface to ensure stability.Verify that the pressure transducerand the signal cable are free frommechanical stress or excessive bend-ing from the surrounding equipment.

FITTING SIZE 1/4˝ 3/8˝ 1/2˝ 3/4˝ 1˝

Torque (in•lbs) 5 8 11 14 30

CAUTION!The NT® Pressure Transducer has been factory sealed. Do notattempt to remove the coverof the pressure transducer. Anyattempt at removal of the pressure transducer cover willvoid the warranty and damagethe unit.

CAUTION!Do not tighten the nuts thatprotect the process connectionsduring shipment. Do not tightenthe nuts unless the propertubing has been installed.Tightening these nuts may resultin damage to the pressure trans-ducer process connections.

Installation Electrical Installation The pressure transducer provides an analog (4-20 mA) electricaloutput proportional to the pressuremeasured.

NOTE: The white wire is not required, please refer to the wiring diagram below.

Pressure transducer4-20 mA output version

+24 VDC GND

BLACK4-20 mA pressure signal

no connection

display or PLC

Mechanical InstallationNT® Pressure Transducers utilizeFlaretek® flared tube connectionsand must be used with the propertubing size and coupling nut.

When installing flared tubing to thepressure transducer, the flared tubeis pushed over the transducer’sfitting until the fitting reaches thesmaller tube diameter. The amountof torque required to tighten thecoupling nut is dependent upon thesize of the fitting.

Care should be taken when installingflared tubing onto the pressuretransducer. Do not use excessivetorque or subject the transducer tohigh heat during installation. Thetransducer should be firmly mountedto a solid surface to ensure stability.Verify that the pressure transducerand the signal cable are free frommechanical stress or excessive bend-ing from the surrounding equipment.

FITTING SIZE 1/4˝ 3/8˝ 1/2˝ 3/4˝ 1˝

Torque (in•lbs) 5 8 11 14 30

Power Supply Requirements

Figure 1. Power Required for a 4-20 mA Loop

Load Resistance: Current Output (4-20 mA Configuration)

If a load resistor, RLoad, is used inseries with the current output, thevalue of RLoad is dependent on thesupply voltage and the meter resis-tance and is calculated from the following formula.

where:

RLoad = maximum load resistance (ohms)

VPS = power supply voltage (volts)

Rmeter = meter resistance (ohms)(typically not used, therefore Rmeter = 0)

Rwire = resistance of interconnecting wire

RLoad = - (Rmeter + Rwire)VPS - 12 V

0.020A

Operating region

Power Supply Voltage(VPS)

12 24 28

The pressure transducer requires a12-28 volt DC power supply with lessthan 2% ripple at 100 or 120 Hz. Therequired power supply voltage varieswith the load resistance (RLoad),please refer to the diagrams belowand the formulas on page 9.

The power supply must provideclean power and must be used onlyto power similar measurement-typedevices. The power supply must notbe used to power inductive loads,such as motors, relays or solenoids.These devices may produce tran-sients that may affect the pressuretransducer measurements when theinductive device is powered-up orpowered down.

NOTE: Be sure to ground theshield of the cable to local ground.

Power Supply Requirements

Figure 1. Power Required for a 4-20 mA Loop

Load Resistance: Current Output (4-20 mA Configuration)

If a load resistor, RLoad, is used inseries with the current output, thevalue of RLoad is dependent on thesupply voltage and the meter resis-tance and is calculated from the following formula.

where:

RLoad = maximum load resistance (ohms)

VPS = power supply voltage (volts)

Rmeter = meter resistance (ohms)(typically not used, therefore Rmeter = 0)

Rwire = resistance of interconnecting wire

RLoad = - (Rmeter + Rwire)VPS - 12 V

0.020A

Operating region

Power Supply Voltage(VPS)

12 24 28

The pressure transducer requires a12-28 volt DC power supply with lessthan 2% ripple at 100 or 120 Hz. Therequired power supply voltage varieswith the load resistance (RLoad),please refer to the diagrams belowand the formulas on page 9.

The power supply must provideclean power and must be used onlyto power similar measurement-typedevices. The power supply must notbe used to power inductive loads,such as motors, relays or solenoids.These devices may produce tran-sients that may affect the pressuretransducer measurements when theinductive device is powered-up orpowered down.

NOTE: Be sure to ground theshield of the cable to local ground.

Operating EnvironmentThe pressure transducer is to bemounted in a well vented and con-trolled environment. Refer to theReference section on page 13 foradditional specifications.

Process ConnectionsTo avoid possible pressure leaks,make sure all process connectionshave been performed in accordancewith the Mechanical Installationguidelines on page 6.

Pressure Transducer Cover AssemblyNT® Pressure Transducer covers are factory sealed and should not betampered with or opened. Openingthe cover shall void the product warranty.

NOTE: Any attempt to remove ortamper with the transducer coverwill void the warranty and damagethe unit.

Temperature RequirementsThe pressure transducer is rated for use with fluids at processtemperatures between 50° to 95°F(10° to 35°C) under normal operating conditions.

Pressure LimitsTRANSDUCER MAX. PRESSURE LIMITRANGE @73°F (23°C)

-12 to 30 PSIG 45 PSIG(-83 to 207 kPa) (310 kPa)

WARNING!The pressure limits for NT®Pressure Transducers models4150 and 4250 decrease sig-nificantly for temperaturesabove 95°F (35°C) Please consult the factory.

Pressure Reference AccuracyThe accuracy of the pressure trans-ducer output is ±1% of span. Forexample, a -12 to 30 PSIG rangedpressure transducer has a span of 42 PSIG and an accuracy of ±0.42PSIG. This accuracy includes theeffects of linearity, hysteresis and repeatability, measured at room temperature.

Unit Operation Linear Output SignalThe output signal of the NT® PressureTransducer is a linear function pro-portional to the applied pressure.

Pressure measurement-12 PSIG Full scale