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1 OEIC LAB National Cheng Kung University Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University Integrated LiNbO 3 Electrooptical Electromagnetic Field Sensor

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Page 1: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

1OEIC LAB

National Cheng Kung University

Ching-Ting Lee

Institute of Microelectronics,

Department of Electrical Engineering,

National Cheng Kung University

Integrated LiNbO3 Electrooptical Electromagnetic Field Sensor

Page 2: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

2OEIC LAB

National Cheng Kung University

Outline

• Introduction

• Principle and Configuration

• Experiments and Discussions

• Conclusions

Page 3: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

3OEIC LAB

National Cheng Kung University

Application of electromagnetic waveApplication of electromagnetic wave

IntroductionIntroduction

Page 4: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

4OEIC LAB

National Cheng Kung University

Integrated LiNbO3 Electrooptical Electromagnetic Field Sensor with Micro Multi-antenna

Multi-annular antenna

Laserdiode

Spectrum analyzer

xyz

Photodetector

LiNbO3

crystalSingle-mode fiber

Matching resistance

SiO2

buffer layer

Polarizationmaintainingfiber

AZ4260buffer layer

Mach-Zehnder modulator

Page 5: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

5OEIC LAB

National Cheng Kung University

Mach-Zehnder modulatorMach-Zehnder modulator

LiNbO3 substrate

Modulator electrode

Output waveguide

Input waveguide

PrinciplePrinciple

Page 6: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

6OEIC LAB

National Cheng Kung University

Ti-diffusionWaveguide

Modulator electrode

Z-cut LiNbO3 substrate

zeeeez Enrnnnn 3332

1

r33 = 3110-12 m/V

Lnz

2

zz EL

rn

333

: optical phase L: length of electrode: wavelengthd: gap between electrodes

Y

Z

X

Bufferlayer

dEV dLrn

Vz

333

LiNbOLiNbO3 3 Crystal’s Electro-optic effectCrystal’s Electro-optic effect

Page 7: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

7OEIC LAB

National Cheng Kung University

Vi

V

optical output intensity

½

Amplitude modulationAmplitude modulation

applied voltage

modulator voltage

t

optical output signal

electrical signal

optical signal

Page 8: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

8OEIC LAB

National Cheng Kung University

ResultResult

4V

• On-off extinction ratio is 25.6dB• V is about 4V

Page 9: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

9OEIC LAB

National Cheng Kung University

Integrated LiNbO3 Electrooptical Electromagnetic Field Sensor with Micro Multi-antenna

Multi-annular antenna

Laserdiode

Spectrum analyzer

xyz

Photodetector

LiNbO3

crystalSingle-mode fiber

Matching resistance

SiO2

buffer layer

Polarizationmaintainingfiber

AZ4260buffer layer

Mach-Zehnder modulator

Page 10: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

10OEIC LAB

National Cheng Kung University

load

30mm

20mm

12mm 14mm

10mm

10mm

0.2mm

Experiments and DiscussionsExperiments and Discussions

Configuration of multi-annular antennaConfiguration of multi-annular antenna

H E

S

Page 11: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

11OEIC LAB

National Cheng Kung University

Simulated resonant frequencySimulated resonant frequency of multi-annular antennaof multi-annular antenna

S11

1.34

5.022.73

Frequency (GHz)

Return loss (dB)

0 1 2 3 4 5 6

0

-5

-10

-15

Page 12: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

12OEIC LAB

National Cheng Kung University

AdvantagesAdvantages

To obtain the frequency information

To avoid the influence of the coaxial cable

Microminiaturize

Page 13: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

13OEIC LAB

National Cheng Kung University

Emitter (Horn antenna)

E

D=3m

Test sensor

Anechoic chamber (500MHz to Anechoic chamber (500MHz to 6GHz)6GHz)

Laser diode

Photodetector

Spectrum analyzer

Signal generator

Page 14: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

14OEIC LAB

National Cheng Kung University

load

30mm

20mm

12mm 14mm

10mm

10mm

0.2mm

Experiments and DiscussionsExperiments and Discussions

Configuration of multi-annular antennaConfiguration of multi-annular antenna

H E

S

Page 15: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

15OEIC LAB

National Cheng Kung University

Simulated resonant frequencySimulated resonant frequency of multi-annular antennaof multi-annular antenna

S11

1.34

5.022.73

Frequency (GHz)

Return loss (dB)

0 1 2 3 4 5 6

0

-5

-10

-15

Page 16: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

16OEIC LAB

National Cheng Kung University

Sensitivity factor SSensitivity factor Sff

E(V/m) Sf Voutput(V)

0 1 2 3 4 5 670

80

90

100

110

120

Sen

siti

vit

y f

act

or (d

B)

Frequency (GHz)

1.42.8 5.2

Page 17: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

17OEIC LAB

National Cheng Kung University

The sensitivity of the sensorThe sensitivity of the sensor

Average minimum detectable

field intensity 2.24mV/m

-70 -60 -50 -40 -30 -20 -10 0-70

-60

-50

-40

-30

-20

-10

0 1.4 GHz 2.8 GHz 5.2 GHz

Normalized electric field intensity (dB)

Nor

mal

ized

indu

ced

volt

age

(dB

)

0

1

2

3

4

5

6

7

8

Ele

ctri

c fi

eld

inte

nsit

y (V

/m)

Load

H

E-nullconfiguration

E

Page 18: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

18OEIC LAB

National Cheng Kung University

Experimental Measurement of Electromagnetic Source Azimuth Using Electrooptical

Electromagnetic Field Probe

Vertical view

90o

60o

60o

60o

Y

X

Z

Axis of sensor probe

Lateral view

60o

60o

60o

Sensor

Page 19: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

19OEIC LAB

National Cheng Kung University

Probe

Sensor 2

Sensor 3

Schematic diagram of the electrooptical Schematic diagram of the electrooptical electromagnetic field probe systemelectromagnetic field probe system

Spectrum analyzer

Photodetector

Photodetector

Photodetector

Sensor 1

Laser diode

Page 20: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

20OEIC LAB

National Cheng Kung University

Signal intensity (dBm)

Directional sensitivity pattern at 2.8 GHzDirectional sensitivity pattern at 2.8 GHz

E

H

S

H

0

30

60

90

120

150

180

210

240

270

300

330

-64

-62

-60

-58

-56

-64

-62

-60

-58

-56

Page 21: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

21OEIC LAB

National Cheng Kung University

The response bandwidth of electromagnetic field sensor is successfully superposed by integrating micro multi-antenna. This is demonstrated that the center frequencies of response spectrum can be controlled by designing micro multi-antenna.

When the sensor probe axis was pointed toward the electromagnetic radiation source, the highest sensitivity was obtained. The variation of the sensitivity is within about 0.4 dB with rotating the probe around its axis. By using the electrooptical electromagnetic field probe system, the azimuth of the electromagnetic radiation source can be measured.

ConclusionsConclusions

Page 22: OEIC LAB National Cheng Kung University 1 Ching-Ting Lee Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

22OEIC LAB

National Cheng Kung University

Thank you!