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Standard Operating ProcedureKeyence 3D Laser Confocal

Microscope

ContentsOverview.....................................................................................................................................................2

Operations...................................................................................................................................................2

Start-up....................................................................................................................................................2

Sample Measurements............................................................................................................................4

Shutdown................................................................................................................................................6

Troubleshooting/FAQs.................................................................................................................................6

Contact........................................................................................................................................................6

About this document...................................................................................................................................6

Keyence Laser Microscope v1.0 05/23/2017

OverviewThe Keyence VK-X Series 3D Laser Scanning Confocal Microscope provides non-contact, nanometer-level profile, roughness, and film thickness data on any material. The lateral resolution of the microscope is 120 nm using the 408 nm Violet laser light. The microscope scans the surface using a 16-bit photomultiplier to receive the reflected laser light. The instrument is able to provide highly accurate 3D measurement data over any shape of materials and steep angles (up to 88 Degree angle of detection). High-resolution optical images can be acquired with resolutions up to 21.6 million pixels through 3CCD pixel shifting technology. High dynamic range (16-bit resolution color gradation) function automatically recognizes bright and dark areas as well as low contrast areas. Standard lens in the microscope is 10x, 20x, 50x, 150x.

Operations

Start-up1. Enable the tool in the Badger2. Press the power button on the VK Controller to turn the LASER ON (Red light on the power

button will turn Green). Red indicates the system is ON, Green indicates Laser is ON


Microscope

VK ControllerPC to interface the system

Automatic Stage

Vibration Isolation Table

3. Make sure the objective is at 10X, the z height will adjust automatically when you open the software, so to avoid crashing the stage always make sure to start at 10x objective

4. Place the sample on the stage

5. Open the VK Viewer software on the computer this establish connection to the controller (The red light on the ACCESS turns ON)


6. Click yes to Return the XY stage to origin

Sample Measurements

1. Click the menu to see your image

2. Use the dial knob or use the Auto focus (in the VK Viewer software) to focus the image.

3. Click menu to choose the measurement mode.4. Use Easy or Expert mode to start measurement

5. Easy mode – after adjusting the focus, click Start Measurement

6. Expert mode a) First select the laser modeb) Set Upper & Lower positionc) Click Auto Gain (this will find the best brightness of your sample)d) If you need double scan then check thise) Choose the measurement settings based on your preferences and sample type


7) After measurement complete, save the measurement data

8) Open the Multifile Analyzer software

9) Click Add data and choose the file to analyze10) Follow the step-by step Operation Guide instruction to analyze the data.


ShutdownAfter your measurements are completed, shut down the instrument by following this procedure.

1. Leave the objective at 10X and then remove the sample from the stage2. Close the Multifile Analyzer and VK Viewer software3. Turn off the power button on the controller4. Log your usage on the Log book5. Disable the tool on Badger

Troubleshooting/FAQsIf encountering a problem, report it on Badger and send an email to Shiva.

If you want to know more measurement and analyzing the data, please contact Shiva.

ContactShiva Bhaskaran [email protected] list [email protected]

About this document1.0 05/23/2017 Shiva Bhaskaran Initial Document

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overview - stanford nano shared facilities web viewhigh-resolution optical images can be acquired...

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