pactec 2nd source - metrology equipment argon laser tube replacement

Alternative for Consumables Used on Semiconductor Equipment

3/9/2017Pactec 2nd Source, Inc. - Confidential

Laser Replacement

Consumables Metrology Equipment


2PacTec 2nd Source

PacTec 2nd Source


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Rebuild of air cooled argon lasers for use in metrology systems.

JDS Uniphase and Spectra Physics:

Lasers are rebuilt using a new laser plasma tube.

The new plasma tubes are manufactured in a controlled cleanroom environment using standards commonly used in the semiconductor industry for component manufacturing.

Once built, the laser tube is tested to verify compliance with manufacturer’s specifications.

During the manufacturing process the tube specifications are tracked and documented.

New Plasma Tube4

Confidential: Internal Distribution Only

ALTERNATIVE FOR CONSUMABLES USED ON SEMICONDUCTOR EQUIPMENT

Old Tube: The returned laser head assembly is inspected and

when possible tested to verify cause of failure.

The laser head is disassembled and old tube removed.

Laser head prepared for new tube installation.

New Tube: Several new optics are installed and aligned on new

tube.

New tube is pressurized and tested.

New tube is burned in for several hours.

New tube is installed in laser head.

Laser Verification and Laser Tube Assembly5



Several stages of alignment required during the rebuild process of a replacement laser:

New optics to laser tube.

Laser body to laser head assembly.

Alignment of beam for near field and far field for tube to laser head positioning.

Laser Alignment6



Laser stabilization and calibration:

All final alignments are made once the laser is stabilized.

Laser stability is achieved when the manufacturers system power requirements and beam profile specifications are established.

Calibration specification is started by verifying the power and voltage output required by the system is correct.

Final calibration is accomplished once the proper tube voltages, current and power output of the laser head are obtained.

Total burn-in time for tube as standalone and once installed in laser head is over 24 hours.

Laser Final Test7



Laser Certification 8



Protecting the alignment for both the optics in the laser, as well as the tube alignment to the main body, is critical. The rebuilt laser is shipped in a custom built box made specifically for the JDS laser assembly.

Laser Packaging9



PacTec warranty:

Warranty terms cover all argon lasers we sell.

Laser to be free from defects in materials or workmanship.

Warranty period for 30mW laser is 5,000 (five thousand) hours or 12 (twelve) months from the date of shipment, whichever first occurs.

Warranty period for 75mW laser is 5,000 (five thousand) hours or 10 (ten) months from the date of shipment, whichever first occurs.

Warranty returns for 2016 were <5% of total shipped.

Laser Warranty10



Argon Laser Shipments11



Laser support:

PacTec has several model lasers available for exchange.

Our spare lasers when available can ship ASAP.

Our standard lead-time is 3-4 weeks.

For quick turnaround, we have forecasted “on the shelf” laser tube availability for both the 30mW and 75mW lasers. New tubes can be installed in a customer owned laser and shipped within 5 days once laser is received.

Laser Availability12



Model OEM JDS KLA/TencorPart

DescriptionPart Number Part Number

2500KT

JDSUJDS Controller PS Controller

Surfscan 62XXKT

JDSU

2214-30SLQT2214-30SLQTA2214-30SLQTC

0105128-000 30mw Laser

Surfscan 64XXKT

JDSU

2214-30SLQT2214-30SLQTA2214-30SLQTC

0105128-0000158290-000

30mw Laser

Surfscan 76XXKT

JDSU2214-30SLQTT 366153 30mw Laser

Surfscan 77XXKT

JDSU2214-30SLQTT 366153 30mw Laser

SP1KT

JDSU2214-30SLQTA2214-30SLQTC

0224471-001365998

30mw Laser

AIT 1KT

JDSU2214-30SLQRT 364479 30mw Laser

Laser: 30mW New Tube Rebuilds13



Laser: 75mW New Tube Rebuilds

Model OEM JDSAMAT or

KLA/TencorPart

DescriptionPart Number Part Number

AMAT Orbot

WF 720WF 736

AMATJDSU

2213-75SLRAM 21104844 75mW Laser

ADE CR KTTJDSU 2213-75SLT 75mW Laser

SP1 DLSKT

JDSU2213-75TSLKTB

With Rings0278424-000 75mw Laser

SP1 DLSKT

Spectra Physics185P-F1209 0278424-000 75mW Laser

AIT,AIT 2, XP

KTJDSU

2213-75TSLKTA2213-75TSLKTB2213-75TSLKTD

0106301-00121171804

75mw Laser

AIT 3KT

JDSU2213-75TSLKTB 0106301-001 75mw Laser

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Various Laser Head New Tube Rebuilds

Model OEMJDS

Part NumberPart Number

Part Description

Thermawave420

ThermawaveJDSU

2211-20SLAT 20mw Laser

EstekEstekJDSU

2214-20SL 20mw Laser

UltrapointeUltrapointe

JDSU2214-25MLUP 25mw Laser

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Repaired Argon Laser Power Supplies

Model OEM Model Number Part NumberPart

Description

KLA Tencor JDSU 2114B-30SLT 16880730mW Laser Power Supply

KLA Tencor JDSU 2113-75SLT75mW Laser Power Supply

KLA Tencor Spectra Physics 285-FA01 0029941-00175mW Laser Power Supply

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Repaired Argon Laser Power Supplies


Model OEM Model Number Part NumberPart

Description

KLA Tencor JDSU 2114B-30SLT 16880730mW Laser Power Supply

KLA Tencor JDSU 2113-75SLT75mW Laser Power Supply

KLA Tencor Spectra Physics 285-FA01 0029941-00175mW Laser Power Supply

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Thank you

Contact Information:

Ed WestPacTec 2nd Source, Inc.cell: 949 735-2567office: 360 719-1822email to: [email protected]: www.PacTec2ndSource.com

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pactec 2nd source - metrology equipment argon laser tube replacement

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