pdf, 40 mb, 06.07.2016
TRANSCRIPT
2016
PPG-based algorithm dedicated to wellness & health
Business Potential
Scientific Innovation
established in November 2012 is a
Finnish high-tech company which
develops and manufactures optical
heart rate (OHR) based consumer
devices and applications to the sports & fitness and
wellness markets. PulseOn established a Swiss
subsidiary (PulseOn SA) in October 2014 to further
strengthen and facilitate strategic partnership.
Key people: Ilkka Korhonen, Jari Nousiainen.
set up in the 1980s, Biwi SA is
a Swiss family firm with a staff
of 120, located in the heart of
the Jura canton. Making the most of its expertise in
molding, over molding and injection techniques for
standard or specially developed polymers.
Key people: Thierry Sommer and Alexandre
Bestagne.
’s mission is to generate high-
tech business in collaboration
with the Swiss industry and to innovate from concept
to industrial pre-series.
Key people: Ricard Delgado Gonzalo, Philippe
Renevey and Patrick Theurillat.
First stage: Increase the value proposition of the current smartwatch products
through new health related parameters (HRV, respiration, sleep, see other
SWW poster).
Second stage: Production of miniaturized stand-alone OHR monitoring
module, which will allow to extend OHR offering to yet smaller and lower power
consumption devices.
Project title: Swiss Wellness Watch (SWW)
CTI-project: 17999.1 PFNM-NM
Main applicant: CSEM SA
Resp.: Mathieu Lemay (project manager) and
Andreas Hutter (research leader)
Main industrial partner: PulseON SA
Resp.: Adrian Tarniceriu (commercial development)
Industrial partner: Biwi SA
Resp.: Sébastien Dubail (commercial development)
Starting date: October 2015
Duration: 18 months
- Main applicant -
- Main industrial partner -
- Industrial partner -
The SWW project aims at implementing a 24/7
health and fitness smartwatch, integrating a low-
cost stand-alone sensor, processing module for
the ODM market and dedicated elastic strap.
- Project goal -- General information -
Foreseen smartwatch product
- Key findings/results -
During the first months (M7), the following software
result have been obtained:
• Development/validation of HRV, speed and
distance, respiration and sleep toolboxes.
• Improvement of software consumption.
PulseOn history and business roadmap
Based on its assets and position in the standard watch
market Biwi wants to become the number one supplier
for premium smart watch straps with superior design and functionality. Biwi will
supply the wrist strap for the PulseOn Premium and target annual sales of
500k to 1M smart watch straps by 2017.
aims at becoming a world class player in fitness, wellness and
health sensor market via continuous and accurate OHR
measurement technology.
- Wellness - - Optimization -
The algorithm have been optimized to run in an ARM
Cortex-M0 processor by using fixed-point arithmetic.
Two operation frequencies are available, 25 Hz and
12.5 Hz. See Table I for the minimum accelerometer
requirements.
Algorithm specification Value
operation frequencies 12.5 and 25 Hz
acceleration resolution 10 bits
acceleration range [-8g …8g]
VersionMemory (bytes) Exec. time
/ sample
Power
consumptionFlash RAM
10/2015 22652 3470 2.457 ms 245.7 uA
06/2016 26040 4304 1.797 ms 179.7 uA
Table I - 3D accelerometer requirements
Table II shows the memory consumption of algorithm
versions as well as the execution time of the 25Hz
mode during most demanding activities (running).
Table II - Algorithm specifications
Heart rate variability
HRV toolbox has been developed
including cardiac beat detection on
PPG and artifact correction.
HRV specification (N=10) Value
Detected hear beats 99.57 %
Mean absolute error 5.94 ms
Mean RMSSD error 3.1 msBland-Altman plot comparing RR
intervals (ECG and PPG)
Speed and distanceA leg-and-arm dynamic motion
model has been developped. This
motion model requires simple
calibration (known distance or
constant speed. Validated on
speed range of [1.8…19.8km/h].
Speed/distance
specification (N=11)Value
Relative error (µ±σ) 0.2±0.9 %
Box-and-whisker of speed relative
error (N=11)
Respiration
A first version of the respiration
toolbox which benefits from the
accurate HRV has been developed.
The iterative validation and
development process is on-going.
Respiration target
specificationValue
Overall rate mean error < 8%
Respiration rate tracking during
night compared to spectral
analysis
- Health -
Sleep analysis
A sleep analysis has been
developed based on HRV features
only. It has been validated against
polysomnograph. Coming impro-
vement: add features from 3D
accelerometer.
PSG- and PPG-based
hypnograms (upper and lower
panels, resp.)
Sleep specification Value
NREM good classification 90%
REM good classification 44-72%
2016
Development of Swiss Wellness Watch prototype
Business Potential
Scientific Innovation
established in November 2012 is a
Finnish high-tech company which
develops and manufactures optical
heart rate (OHR) based consumer
devices and applications to the sports & fitness and
wellness markets. PulseOn established a Swiss
subsidiary (PulseOn SA) in October 2014 to further
strengthen and facilitate strategic partnership.
Key people: Ilkka Korhonen, Jari Nousiainen.
set up in the 1980s, Biwi SA is
a Swiss family firm with a staff
of 120, located in the heart of
the Jura canton. Making the most of its expertise in
molding, over molding and injection techniques for
standard or specially developed polymers.
Key people: Thierry Sommer and Alexandre
Bestagne.
’s mission is to generate high-
tech business in collaboration
with the Swiss industry and to innovate from concept
to industrial pre-series.
Key people: Ricard Delgado Gonzalo, Philippe
Renevey and Patrick Theurillat.
First stage: Increase the value proposition of the current smartwatch products
through new health related parameters (HRV, respiration, sleep, see other
SWW poster).
Second stage: Production of miniaturized stand-alone OHR monitoring
module, which will allow to extend OHR offering to yet smaller and lower power
consumption devices.
Developed ODM OHR-module including LEDs (red,
green (2x), IR), photodiode, Ti AFE4404 analog front-
end, µC / quartz for acquisition and processing, 3D
accelerometer, analog power supplies.
ODM specification Value
Dimensions ø10mm x 2.5mm
Waterproof integration level IP67
Integrated algorithms optionally run on host
Electrical interface SPI or I2C
Power supply 2.5 to 6.0V
Power consumption idle mode <1uW
Power consumption activity
monitoring mode (no HR)400uW
- Target specifications for the ODM module -
Strap/buckle specification Value
Elasticity 20% at 1.0N
Max. tear strength 100.0N
Reach-FDA required
Comfort and esthetics NPS > 0
Target specifications for the strap
ODM fully integrated in a smartwatch
Project title: Swiss Wellness Watch (SWW)
CTI-project: 17999.1 PFNM-NM
Main applicant: CSEM SA
Resp.: Mathieu Lemay (project manager) and
Andreas Hutter (research leader)
Main industrial partner: PulseON SA
Resp.: Adrian Tarniceriu (commercial development)
Industrial partner: Biwi SA
Resp.: Sébastien Dubail (commercial development)
Starting date: October 2015
Duration: 18 months
- Main applicant -
- Main industrial partner -
- Industrial partner -
The SWW project aims at implementing a 24/7
health and fitness smartwatch, integrating a low-
cost stand-alone sensor, processing module for
the ODM market and dedicated elastic strap.
- Project goal -- General information -
Foreseen smartwatch product
- Key findings/results -
During the first months (M7), the following hardware
result have been obtained:
• Design of fully integrated OHR which includes
multiple LEDs, photodiode, analog front-end, µC,and 3D accelerometer in ø10mm x 2.5mm.
Smartwatch - integration the ODM module
←fixation screws
←back case
←fixation tape
←OHR-module back support
←ODM OHR-module
←battery
←stack and insertion support
←watch movement (main board)
←watch face
←bezel insert
←hands
←watch case
- Strap and buckle (to be developed) -
PulseOn history and business roadmap
Based on its assets and position in the standard watch
market Biwi wants to become the number one supplier
for premium smart watch straps with superior design and functionality. Biwi will
supply the wrist strap for the PulseOn Premium and target annual sales of
500k to 1M smart watch straps by 2017.
aims at becoming a world class player in fitness, wellness and
health sensor market via continuous and accurate OHR
measurement technology.
2016
SunTracker – High Accuracy Sun Sensor CTI Project SUNTRACKER - 16853.1 PFNM-NM Main applicant CSEM SA – Edo. Franzi Main industrial partner VECTRONIX AG – Dusan Zadravec Starting date July 2014 – 18 months The SunTracker is a device able to measure the azimuth and elevation of the Sun with high precision and accuracy.
Innovation principle The SunTracker is based on the spaceCoder technology developed at CSEM
§ The Sun projects the shadow of a particular pattern onto a sensor. § This shadow carries information about the Sun angular position. § A processing of the shadow image assesses the azimuth and elevation angles of the Sun with high accuracy in real time.
Performances
Field of view 150° Update rate 30Hz Power consumption 80mW Power supply 3.5V – 60V Communication RS422 , RS232 Operating temperature -40°C to +60°C Size 24 x 27 x 6 mm3 Weight 4 g
Accuracy FOV Conditions Temperature
1E-3 ° 120° Laboratory Ambient 3E-3 ° 150° Laboratory Ambient
30E-3 ° 120° Laboratory [-40°C to +50°C] 46E-3 ° 120° Outdoor sunny Ambient
Business Potential
SunTracker boards
SunTracker device
GonioLight with SunTracker
The Vectronix GonioLight Goniometer uses SunTracker to measure the direction towards sun. Using this direction as well as the GPS position and time, GonioLight calculates direction towards Geographic North. This SunTracker is used as a check/alternative for a digital magnetic compass which can be disturbed by magnetic fields from the surroundings. Vectronix received very positive feedbacks from customers. Safran Vectronix (Heerbrugg, St. Gallen) Number of employees: 178 (2016) Sales: 103 Mio. CHF (2014)
spaceCoder principle
2016
High precision inductive touch probe
CTI Project Nr 16113.1 PFNM-NM: DTN Digital Transducer Network
Main applicant: Guido Keel, HSR Hochschule für Technik Rapperswil
Main industrial partner: Daniel Hirt, Peter Hirt GmbH
Project start: November 2013
Duration of project: 3 years
Scientific InnovationInductive touch probes use complex and expensive analog
signal conditioning for measurement accuracies of ~1µm
(e.g. using the AD698).
In this project sigma-delta converters and digital signal
conditioning is used to reduce the circuit complexity, size and
cost while increasing measurement precision by a factor 10.
Measurement precision is less than 100nm, Repeatability is
better than 10nm.
The entire electronics containing an ASIC and a microcontroller
for calibration and communication will finally fit in the 8mm
industry standard shaft.
Business PotentialInductive touch probes are widely used in the industry. They
are robust, accurate and cost effective.
The new smart sensor with auto-calibration and self checking
features can be easily used in various measurement systems
like SPC, PLCs and measuring computers.
Special applications such as bore or inner shape
measurements also can be implemented based on this new
technology.
This new sensor not only allows to improve existing
applications but also serves to enter the markets of
high performance applications.
z
Sigma-Delta
Modulator
TP-Filter
Demodulation
Averaging
Sigma-Delta
Modulator
TP-Filter
Demodulation
Averaging
Divider
Sigma-Delta
Modulator
Sine generation
SwitchesDigital control/
Interface
Micro-controll
er
Control unit(e.g. SPS )
RS-485
ASIC DTNA
Previous system
Block diagram
ASIC LayoutCurrent prototype
2016 Ultra Low Latency Wireless Video Streaming System for Medical Endoscopes ZHAW, Institute of Embedded Systems: Dr. Matthias Rosenthal, Tobias Welti Brütsch Elektronik AG: Oliver Brütsch, Stefan Beetschen Duration: February 1st 2015 until August 31st 2016 Project: 17437.1 PFNM-NM
Scientific Innovation Disabling retransmission of WiFi frames improves transmission latency but reduces transmission reliability. Two separate reliability layers were developed in this project. 1. Forward error correction (FEC) provides an efficient method of restoring the content of lost network frames up to a certain limit. In addition, the
stability of the communication channel can be quantified. 2. A new image reconstruction concept using a second, highly compressed low-quality video stream was developed. This backup stream is
transmitted interleaved with the main video stream. Data from this second stream can be used to reconstruct image parts that were unrecoverable by FEC. Different methods of image reconstruction are compared below. Our new reconstruction algorithm provides significantly better image quality with a reasonable computational effort.
Business Potential Brütsch Elektronik AG developes and manufactures video endoscopes for office-based applications (ENT, urology, gynaecology, anaesthesiology) for a market leading brand. This market has an annual growth rate of 15%. Market analysis have shown a clear need for wireless low latency endoscopes with user friendly display devices such as tablet PCs or smartphones. A yearly production of sereval thousand units of the new wireless endoscope is anticipated 5 years after product introduction.
Project goals - Video transmission unsing WiFi (IEEE 802.11) - Use consumer device as receiver/display - Very low end-to-end latency < 80ms - No loss (full or partial) of images
Innovation - Fast compression in FPGA - Image reconstruction in GPU - No frame retransmission - Forward Error Correction
Previous frame
Current frame
Missing parts of the image are replaced with the content from the previous image + high quality image + no extra data required - image out of date - not suitable for interactive
application
Replace w/ previous content
Missing parts of the image are replaced with content from backup image stream + up to date image - low quality image - secondary image stream
required
Replace w/ low-quality content
Image is reconstructed with information from both streams + up to date image + good quality image - secondary image stream
required
Selective reconstruction
Endoscope iPad used as Display
Low Latency WiFi Connection
2016
Nanoporous diaphragms for electrochemical
sensors (NanoDiaS) 16851.1 PFNM-NMZHAW, IMPE Institute of Materials and Process Engineering and ICP Institute of Computational Physics
Technikumstrasse 9, CH-8401 Winterthur
Prof. D. Penner, Dr. L. Holzer, Dr. G. Boiger
Mettler-Toledo AG, Process Analytics, Im Hackaker 15, CH-8902 Urdorf
R. Cervera
Project start: 01.08.2014
Project Duration (in months): 24
Scientific InnovationWe established a process of ‘knowledge-based material
design’ by using cycles of material development. The iteration cycles include the following steps:
● Development of a robust up-scalable shaping process for ceramic micro-parts via cold extrusion, design of pore structure of ceramics● 3D Microstructure characterization by FIB SEM and image analysis in order to quantify porosity, tortuosity, constrictivityand hydraulic radius● 3D modeling of charge and mass transport in the pores● Determination of effective properties (conduction, flow, pH errors)● Comparison of model predictions and analytical results● Suggestions for next improvement cycle (Design guidelines)
Details of the work are published in:L. Holzer; et al.; Fundamental relationships between 3D pore topology, electrolyte conduction and flow properties: Towards knowledge-based design of ceramic diaphragms for sensor applications, Materials and Design, 99 (2016) 314–327
Business PotentialpH Sensors are used in numerous industrial applications as standard tools for process control and monitoring, e.g. chemical andpharmaceutical industries, nutrition industry, pulp and paper industries.
● The main project outcome is a new diaphragm with a tailored and performance optimized microstructure● Aim to introduce a new electrode with the new diaphragm to market ● Future production target has an increase of 15 % over 5 – 6 years● Just 50 mL of ceramic material covers annual electrode production● Production costs will be reduced by almost 50 % due to the new process technology● Customers will benefit from excellent performance and reproducibility
In the framework of the present project we developed a ceramicdiaphragm for electrochemical sensors, especially pH electrodes, withoptimized pore structure for controlled properties. The porousdiaphragm represents the liquid junction of a pH-electrode whichmeasures in low-pressure and moderate temperature but performs wellin low conducting media with an excellent accuracy over the whole pH-range.
Ceramic material
development
Characterization of
microstructure
Mathematical
approach
Modelling
Measurement of
analytical
performance
validationm
ate
ria
l pa
ram
ete
r
material
pH probe with ceramic junction
2016
Development of optical coatings with minimal
losses for laser applications
Scientific Innovation
Business Potential• Ring laser gyroscopes are ideally suited for tactical applications, due to having the
highest stability and precision.
• The total market for gyroscopes in 2014 was approximately 1.4 billion US$[2]
• About 60% of this are ring laser gyroscopes, making up 840 million US$ of the market.
• Achieving ultra-low-loss coatings of optical components gives manufacturers a unique
selling proposition, enabling them to capture an additional share of the market.
• It is also of key importance for manufacturing further laser components such as
resonator mirrors or coatings for crystals. In doing so, further markets can be opened.
[1] Photo courtesy of the Leibniz Institute of Photonic Technology (IPHT), Jena
[2] de.slideshare.net/Yole_Developpement/yole-high-endgyrojanuary2015sample
An important requirement for good laser gyroscopes is having minimal losses in the ring resonator. This project deals with the development of the
necessary ultra-low-loss optical components with optimized coatings for application in laser gyroscopes. In order to achieve this, the coating processes
for these components have to be developed and optimized. To demonstrate the performance and reliability of the low-loss optical components under
industrial conditions, it is also necessary to improve the required measuring instruments for quality control. For this purpose, a second part of the project
focusses on improving the Cavity Ring-Down (CRD) measurement technique for determining the total losses of the optical components.
Contact persons:
Dr. Carsten Ziolek
+41 (0)81 755 34 41
Dr. Roelene Botha
+41 (0)81 755 33 41
CTI Project number:
Main applicant:
Main industrial partner:
Starting date:
Duration:
18326.1 PFNM-NM
NTB University of Applied Sciences and Technology Buchs, Dr. Carsten Ziolek
Schott Suisse SA, Yverdon, Dr. Ulf Brauneck
1st April 2016
24 months
Project Goals
Extending the Cavity Ring-Down measurement system for enhanced sensitivity and improved repeatability
Design and manufacture of high reflectivity mirrors for laser gyroscope applications
The total optical losses in these components must be smaller than 17 ppm (transmission, absorption and scatter losses combined)
Principle of operation of a ring laser gyroscope
Institut für Produktionsmesstechnik, Werkstoffe und Optik
Acknowledgement
A Cavity Ring-Down system has been made available for the project by RhySearch. This system is being
extended as part of this project. Operation of the system and the offering of test services will be carried out by
RhySearch after the end of the project.
Cavity Ring-Down measurement set-up[1]Schematic of optical arrangement for high reflectance CRD measurement
2016
Development of ultra low temperature NMR
probe head for high speed Magic Angle
Spinning employing Computational Fluid
Dynamics (CFD) simulations, KTI-Nr. 17247.1 Main applicant:
Dr. Dirk Wilhelm, ZHAW, Institute of Applied Mathematics and Physics, 8400 Winterthur
Dr. Nicoleta Herzog, ZHAW, Institute of Energy Systems and Fluid Engineering, 8400 Winterthur
Main industrial partner:
Dr. Klemens Kessler, Bruker BioSpin, 8117 Fällanden
Dr. Frank Engelke, Bruker BioSpin
Dr. Armin Purea, Bruker BiosSpin
Starting date: 1.1.2015, duration: 24 months CFD simulation of micro turbine
Project goal:
Goal of the project is to develop a Magic Angle Spinning (MAS) probe head for Nuclear Magnetic Resonance (NMR) applications at low temperature
(T<100K). The probe encompassing the NMR sample is operated at high rotation speed of up to 100 rotations per second (100kHz), driven by a micro
turbine of 1.3mm and 0.7mm diameter. Design, optimization and testing of this micro turbine is the main task of the present CTI project.
Scientific Innovation The MAS rotor stator system has been analyzed by Computational Fluid Dynamic (CFD) simulations with
1.3mm-rotor diameter for spinning rates between 23kHz and 67kHz.
− Fabrication tolerances have been studied in a sensitivity analysis of nozzle diameter and nozzle position
− CFD analysis of local fluid flow values like velocity, temperature, pressure and Mach number and global
quantities like forces, driven torques and turbine efficiency have been performed.
− Comparison with experimental results show good agreement of micro turbine efficiency
Optimization potential is revealed for smaller nozzle diameter and an increasing number of turbine
blades.
.
Business Potential Two new products has been developed and introduced into the market during this CTI project: 1.3mm
MAS probe head and 0.7mm probe head.
− The 1.3mm probe head has been optimized for stability
− The first 0.7mm probe head has been delivered to customer reaching a rotation frequency f>100kHz
− This probe head is competitive to a recent product introduction by the main competitor of Bruker BioSpin
− The target revenue of the new products is between 1 and 2 MCHF per year
Next steps:
Design optimization of low temperature MAS probe head at 100K (driven with nitrogen) and 40K (driven with
Helium)
velocity stream lines in NMR turbine rotor temperature distribution
turbine cap
rotor
MAS rotor stator system
axial cap
turbine cap
rotor
radial gas bearing
stator
outlet
outlet
drive inlet
𝜔
𝑧
2016
Project no 17705.1 PFNM-NM – Start: 01.07.2015 – Duration: 24 months
PUNCH: ProdUction-ready, Next generation back-Contacted silicon
Heterojunction solar cells and modules
Scientific Innovation
Business Potential
Efficient BC-HJT devices Innovative module design
using SmartWire® technology
Simplified & cost-effective process flow
Development of high-efficiency back-contacted
silicon heterojunction solar cells (BC-HJT) with a
simplified structure & processing
Development of a module encapsulation scheme
for BC-HJT devices
Efficiency targets: 24.5 % (cells), 22.0 % (modules)
Dr. Bertrand Paviet-Salomon
Deputy project manager
CSEM S.A.
Rue Jaquet-Droz 1, CH-2002 Neuchâtel
+41 32 720 54 71
Dr. Damien Lachenal
Project manager
Meyer Burger Research AG
Rouges-Terres 61, CH-2068 Hauterive
+41 32 566 15 25
Aim of the project
Former CTI project 13348.1
(2012 – 2014)
This CTI project
(2015 – 2017)
Contact persons:
Full-area process
Localized process
Robust & scalable process flow;
2 patents pending.
Legend:
European record for BC-HJT cells;
Roadmap to 24.5 % established.
High reliability against micro and macro-cracks;
Easy-to-adapt wires number and spacing.
Main research partner: CSEM S.A., Neuchâtel, Switzerland, website: www.csem.ch
Main industrial partner: Meyer Burger Research AG, Hauterive, Switzerland, website: www.meyerburger.com
Additional research partner: EPFL, IMT, PV-Lab, Neuchâtel, Switzerland, website: www.pvlab.epfl.ch
Expected market share: strong development
for both HJT and BC technologies;
Target: 350 W modules at < 0.55 $/W;
Opportunity for Meyer Burger to sell a
unique and new tool for the
n- & p-type a-Si:H combs;
Selling complete BC-HJT lines and capacity
to upgrade existing HJT lines;
> 500 MCHF new business opportunity for ultra high performance photovoltaic
modules.
Gen1 BC-HJT device Gen2 BC-HJT deviceStandard HJT device
Already industrialized
2016
Spectral characterization of 894 nm DFB laser diodes and development of a Cs atomic clockProject title: Cesium Optique Sol, no. 14750.1 PFNM-NM
Main applicant: Université de Neuchâtel – Prof. Gaetano Mileti
Main industrial partner: Oscilloquartz S.A. – Dr. Patrick Berthoud
Project start: 01.01.2014 – Duration: 36 months
Authors: F. Gruet, C. Affolderbach, N. Almat, R. Matthey, P. Berthoud, G. Mileti
Business Potential• New business opportunities open up:
• Metrology (time scales, fundamental units measurement …)
• Science (astronomy, nuclear and quantum physics …)
• Defense (secured telecom, inertial navigation …)
• Space (satellite mission tracking, global navigation satellite systems …)
• Telecommunication (backbone synchronization, next generation 5G telecom)
• With the unprecedented high performance Cesium beam clocks, Oscilloquartz can
become Nr 1 worldwide manufacturer.
Goals: - Commercial high performance Cs beam clock
- Unprecedented short and long-term frequency stability
- No reduction of lifetime, ≥ 10 years
-1.05
-1.00
-0.95
-0.90
-0.85
-0.80
Sig
nal
[V
]
1.81.51.20.90.60.30.0-0.3-0.6
Frequency Detuning [GHz]
no feedback -52.8 dB (threshold) -47.1 dB
Laser power = 40 mWDistance laser-mirror = 30 cm
Sensitivity to opticalfeedback
(N++) GaInP-GaAs
(N+) AlGaInP Cladding
(N) GaInP Optical CavityGaInAsP Quantum Well
(P) GaInP Optical Cavity
(P+) GaInAsP Grating Layer
(P+) AlGaInP Cladding
(P++) GaInP-GaAs
3.5 µm
Contact
Contact The DFB lasers for this
project are developed by III-V
Lab in the framework of an
Euripides project.
2.710-12 -1/2
Clock frequency stability.
Illustration of the effect of optical feedback on the Cesium spectrum.
Laser diodes characterization test bench.
DFB structure (1)
(1) R. Matthey, F. Gruet, C. Affolderbach, G. Mileti, N. Von Bandel, M. Garcia, M. Krakowski, P. Berthoud, “Development and spectral characterisation of ridge DFB laser diodes for Cs optical pumping at 894 nm”, Proceedings of the EFTF (European Frequency and Time Forum), 2016.
Linewidth of the beat between two DFBs. The beat width is 1.9 MHz ± 0.2 MHz.
500
400
300
200
100
0
Be
at
sig
nal
[µV
]
5.4885.4865.4845.4825.4805.4785.4765.4745.472
Beat frequency [GHz]
Beat signal Lorentzian fit
Beat linewidth = 1.9 MHz = 894.05 nmPOpt = 40 mW(average over 20 fits) Laser linewidth <= 1 MHz
Scientific Innovation• Optical pumping with a single laser diode instead of magnetic selection.
• Simplified clock architecture and operation by using 894 nm laser wavelength.
• First clock of its kind on the market.
• Develop expertise in laser diode linewidth and sensitivity to optical feedback.
Project objectives
• Commercial high performance Cs beam clock, in standard industrial package.
• Unprecedented short and long-term frequency stability, 10 times better.
• No reduction of lifetime, ≥ 10 years.
• Assemble an automated laser diodes characterization bench in order to deeply
characterize a large number of laser diodes and modules.
2016
LIDT and Degradation Inspection Technique
for Industrial Applications
Scientific Innovation
Business PotentialBy offering a world wide first set-up for degradation testing and comprehensive measurement services for determining the LIDT and ageing
characteristics of optical components, the competitiveness of the Swiss optical industry is improved through rapid, targeted and qualified support in the
qualification of coatings and coating processes. Investigation possibilities to optimize processes are provided, as well as training highly qualified
personnel for the optical industry in Switzerland. This ensures innovation development and transfer in the optical industry. The system is being developed
by NTB, RhySearch and 10 industry partners. Operation and offering of test services will be carried out by RhySearch after the end of the project.
Eastern Switzerland has a strong concentration of companies involved in manufacturing optical coatings for laser applications or use such optical
components in their devices. In this project, 10 of these industry partners, supported by RhySearch, have come together to develop a state-of-the-art
Laser Induced Damage Threshold (LIDT) measurement facility at the NTB University of Applied Sciences and Technology Buchs, SG. The aim of the
project is to extend this system to allow for degradation testing of optical components under a controlled environment. This new metrology equipment is
of key importance for supplying optics manufacturers with recommendations on how to efficiently develop, produce and assess the quality of new
optical high-performance coatings.
Contact persons:
Dr. Carsten Ziolek
+41 (0)81 755 34 41
Dr. Roelene Botha
+41 (0)81 755 33 41
CTI Project number:
Main applicant:
Main industrial partner:
Starting date:
Duration:
16871.1 PFNM-NM
NTB University of Applied Sciences and Technology Buchs, Dr. Carsten Ziolek
SwissOptic AG, Dr. Clau Maissen
1st October 2014
35 months
• A novel degradation system allows for the long-term stability
testing of optical components
• The ageing of optical components can be investigated under
controlled temperature (up to 250°C) and different gas
environments. This allows simulating the conditions the optical
components are exposed to in laser applications
• LIDT measurements according to ISO Standard 21254 are now
available in Switzerland
• Damage behaviour at various wavelengths and for different
pulse duration regimes can be investigated
Above: Example of a sample divided into a matrix of test
sites, with each position exposed to different energy density levels (red: damaged, green: undamaged)
Degradation system
Typical laser induced damage sites
2016
MEASOS – Measurement system
for a mechanical watch oscillatorMain applicant : CSEM SA, Steve Lecomte
Main industrial partner : Witschi Electronic AG, Daniel Hug
Timeline:14273.2 PFNM-NM - MEASOS feasibility study (01.11.2012 for 6 months)
15862.1 PFNM-NM-MEASOS_2 (01.10.2013 for 24 months)
Scientific Innovation- Uses a mix of optical techniques for direct amplitude
and frequency measurement of the oscillator
- Miniaturized measurement head including camera and
automatically aligned eye-safe laser beam
- Robust algorithm for rate and amplitude measurement
using the laser signal, and allowing results for arbitrary
periodic signals (i.e. not watch caliber specific)
- Image processing algorithms for the detection of the
position of the balance wheel (automatic alignment)
and for the measurement of the oscillation amplitude
- Ease of use – in the laboratory, in the watch production
and in the service centers
Business PotentialThe prototypes were successfully tested on traditional and state-of-the-art oscillators, both noiseless
and high frequencies (50 Hz).
The industrialization phase has started and the market potential is considered to be 100 pieces /
year in a first phase.
It is expected to enable the development of novel and innovative mechanical watch oscillators
by watchmakers, and accompany their deployment worldwide through their after-sales service.
So far, one prototype version of the device is currently used by Vaucher Manufacture Fleurier in the
development of the non-conventional Genequand escapement system, and several other
manufactures showed a strong interest in the industrialized version of the device.
MotivationMechanical watches need to be adjusted.
The limitations of the traditional method,
relying on acoustic measurement, are:
- Indirect measurement of the oscillator
amplitude (caliber dependent parameter)
- Limited to low frequencies (<10Hz)
- Does not work on noiseless movements
Cam
era
obje
ctive
Laser steering
2016
Non columnar PVD coatings made by HIPIMS
for enhanced corrosion resistance
Project name : HIPIMS 15414.1 PFIW-IW
Partners : Haute Ecole ARC-Ingénierie – Raymond Constantin
Positive Coating S.A – Pierre-Albert Steinmann
Timeline : Start 01.01.2014, duration 16 months
Scientific and economic goals:The aim of the project is to develop PVD non-columnar coatings by using HIPIMS (High Power Impulse Magnetron Sputtering) technique for
applications where corrosion resistance is paramount.
Thank to extremely dense microstructure, HIPIMS coatings can efficiently protect corrosion-sensitive substrates (e.g. brass) and, therefore, suppress the
use of electrochemical Ni-based under-layers.
This represents a considerable advantage in terms of cost and time reduction, and reduces environmental impact.
Characteristics of PVD HIPIMS coatings
Corrosion resistance : tropical climate chamber test on 100Cr6 steel substrate according to NIHS 96-50, 40°C for 14 days
HV = 1500HV = 2530
Typical microstructure of a standard PVD (DCMS)
coating
Microstructure of a PVD HIPIMS coating
Uncoated steelDCMS Ta-coated steel HIPIMS Ta-coated steel
• Possible change of the crystallography:
tetragonal β-Ta phase in DCMS mode to α-Ta
cubic (bcc) phase in HiPIMS mode
• Measured by RBS density close to Ta bulk
values
• Strong dependence between microstructure
and corrosion barrier performances
• Total change of the microstructure :
open columnar dense non-columnar
Microstructure:
Using dense HIPIMS thin films allows to suppress Ni-electroplating corrosion barrier underlayer used primary to a standard PVD coating
Reducing overall coating thickness
Reduction of the deposition steps: “2 in 1 solution”
Compliance with the regulations related to the use of toxic Ni baths
Further research is still needed for complete replacement of electroplated coatings in severe corrosion environments
Conclusions:
2016
Highly Luminescent Perovskite Nanocrystals for Next-Generation DisplaysProf. Maksym V. Kovalenko (ETH Zurich), Dr. Stefan Loher (Nanograde AG)Cost-efficient Nanocrystals for Light emmitting Devices (CTI-No. 18614.1 PFNM-NM) Started: 1.4.2016 (39 months)
Franziska Krieg, Dr. Dimitry Dirin, Dr. Sergii Yakunin, Dr. Marek Oszajca, Dr. Stefan Loher, Dr. Norman Lüchinger,
Scientific Innovation
Business Potential
Characterisationand Device Fabrication
Anion Exchange
Prof. Maksym V. Kovalenko
Yields
anion
Exchange can occur
of
mid-price
Colloidal Synthesis
Termocouple
Precursors
CsPbBr3
CsPb(Cl/Br)3
400 450 500 550 600 650 700 750
CsPb(I/Br)3
CsPbI3
Nor
m. P
L
CsPbCl3
Wavelength (nm)
R
RR R
R
R
R
R
R
R
I-
Br-Cl-
CsPb(Br/Cl)3
CsPb(Br
/I) 3
No Solid Solution
CsPb
(Br/I
) 3
Particle Functionalisation CsPbX nanocrystals can be synthesizedby a simple hot injection approach
They show Fluorescence Quantum of up to 80% as Synthesised
Emmision colour halide composition either in or postsynthetically by
Shape and quantum yield are preservedin anion exchange
Anion particles of different halide composition between particles and free halide ions
Native Ligands are in fast exchange ligands in solution
These Ligand Dynamics could be slowedor even eliminated by use of polydentateLigands
3
tuned by thecan be Synthesisexchange
the
betweenor
with
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
0.1
0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8380 nm
700 nm
620 nm
600 nm
580 nm
560 nm
540 nm
520 nm
500 nm
490 nm
480 nm
460 nm
y
x
Color gamut of CsPbX3 NCs (black dots)
LCD TV
NTS
C T
V C
olou
r Sta
ndar
d
UH
DTV
std
.202
0
Protesescu L, Yakunin S, Bodnarchuk MI, Krieg F, Caputo R, Hendon CH, et al. Nanocrystals of Cesium Lead Halide Perovskites (CsPbX , X = Cl, Br, and I): Novel Op toelectronic Materials Showing Bright Emission with Wide Color Gamut. Nano Lett. 2015;15(6):3692-6. Nedelcu G, Protesescu L, Yakunin S, Bodnarchuk MI, Grotevent MJ, Kovalenko MV. Fast Anion-Exchange in Highly Luminescent Nanocrystals of Cesium Lead Halide Perovskites (CsPbX , X = Cl, Br, I). Nano Lett. 2015;15(8):5635-40. De Roo J, Ibáñez M, Geiregat P, Nedelcu G, Walravens W, Maes J, et al. Highly Dynamic Ligand Binding and Light Absorption Coefficient of Cesium Lead Bromide Perovskite Nanocrystals. ACS Nano. 2016;10(2):2071-81.
3
3
Only one year after the first publication reporting colloidal synthesis of cesium lead halide perovskite nanocrystals (CsPbX3, X= Cl, Br, I)by the Kovalenko Group in February 2015, these highly luminescent nanomaterials have already shown great potential for applicationsin optoelectronic devices. Since they exhibit high luminescence quantum yields as well as a narrow emission line width with a widecolour gamut, they are ideal candidates for application as green and red emitters in LCD displays. We find that CsPbX3 emitters mayhave a unique placement with respect to their main competitors already in use in commercial displays since 2014 - cadmium selenideand indium phosphide based quantum dots. With respect to both, CsPbX3offer better color gamut, especially compared to broad greenemission of In-based material. CsPbX3 also better conform with the RoHS directive of the European Union, that regulates the use ofheavy metals in commercial products. In this project, we aim to develop a large-scale process for fabricating free-standing polymer filmsincorporating these novel emitters, while retaining their efficient luminescence. These films are planned to be ready for integration intoLCD displays by 2018, where they will down convert the light of a blue emitting LED to defined wavelengths in order to give afinal imagewith high resolution and wide colour gamut, with superior brightness and energy saving.
Advantages of Perovskite Nanocrystals
The corresponding backlight films comply with environmental Standards European Union “Restricion of Hazardous Substances” (RoHS)
Lower cost because of easier fabrication methods and inexpensive enabeling expansion of the adressable LCD Market to the
Better colour range covering >95% of the colours to InP with 70% and current LCD TVs with 50%
Cadmium free Technology
comparedby UHDTV std. 2020required
the
precursors segment
Project number: 17046.1 PFNM-NM
Main applicant: Miguel Llera2, Kenny Hey Tow1, Sébastien Le Floch2, Yves Salvadé2 and Luc Thévenaz1
1EPFL Swiss Federal Institute of Technology, Group for Fibre Optics, SCI-STI-LT, Station 11, CH-1015 Lausanne2Haute Ecole Arc Ingénierie, Groupe de métrologie et vision industrielle, Rue de la Serre 7, CH-2610 Saint Imier
Main industrial partner: Bert Willing, Rüeger SA, Ch. de Mongevon 9, CH1023 Crissier
Duration of project: 15.11.2014 – 15.11.2015 (12 months)
Scientific Innovation
Business Potential
Drilling is nowadays a widely used operation, whether it is to make holes for the manufacturing of mechanical and electrical
components or for modern surgery procedures to drill bones in orthopedics/traumatology and dentistry. Temperature rise
during drilling may result in damages such as rapid tool wear and diametrical errors, drill smear, or irreversible
osteonecrosis if the temperature is above 47°C during bone drilling. To reduce these risks, thermo-couples, infra-red
thermometers and infra-red cameras can be used for temperature monitoring of drill bits. Our proposed technique is based
on Fibre Bragg gratings that can potentially be used to optimize any drilling process, requiring the use of small drill bits,
through direct temperature measurement at the drill bit instead of relying on indirect measurements.
Fibre Bragg grating-based thermometer for on-line temperature monitoring of drill bits
Failed dental implants
Free space optical coupling between the rotating FBG and a
fixed lead to bring incident light to the FBG and route the
back-reflected light to the interrogation system.
Interrogation technique inspired from wavelength modulation
spectroscopy for laser stabilisation on a frequency discriminator.
0 50 100 150 200 250
0
20
40
60
80
100
Hole 3
Hole 2Hole 1
Te
mp
era
ture
ch
an
ge
(K
)
Time (s)
Wood
Polystyrene
Cork plug
Initial temp = 22.9 °C
Temperature change measured
during drilling test in
1. Wood
2. Cork plug
3. Polystyrene.
Performance Achieved values Limiting factor
Range Temperature changes of > 50 K from the initial temperature
Tuneability of the DFB laser
Resolution < 1 K (σ = 0.4 K) Interferometric noise and loss of signal
Refresh rate < 0.5 s Integration time of the lock-in detection
Avoiding osteonecrosis during bones drilling can have a huge economical impact in orthopedics and dentistry. For the last, the total annual cost of
heating-induced necrosis can be estimated to be CHF 0.9-1.4 billion worldwide. In order to overcome necrosis by using our proposed technology, a
added cost of CHF 7 million has to be invested which thus give a more than significant reduction on heating induced costs that are shared today by
implant manufacturers, dentists and patients.
2016
Scientific Innovation
Business Opportunity
CLR-LIGA 2.0 (n°15607)
Development of advanced Diffractive Optical Elements for
anti-counterfeiting purpose HE-Arc Ingénierie - Yves Salvadé, Maxime Bergamin, Jérôme Borboën
Mimotec - Grégoire Genolet, Hubert Lorenz, Thomas Bagnoud / Richemont - Anthony Serpry
01.02.2014 / 25 months
Worldwide, counterfeiting market is estimated at 400 billion USD per year. In Switzerland, 30 millions of genuine watches are produced
each year against 40 million of counterfeited. CLR-LIGA (Covert Laser Readable – LIGA) is a diffractive optical element (DOE) which
reveals authenticity of a component by pointing a laser beam on it. Thanks to the LIGA process, the diffractive microstructure can be
integrated directly on any micro-mechanical parts, enabling the protection of key components of the watch movement. So far, the
diffractive structures are designed on two levels, which could eventually result to a replication with the use of a microscope, or by
mechanical embossing.
The goals of the project are the development of new technologies in order to increase the security level of these CLR-LIGA 1.0 by
encapsulating the DOEs (i), by machining it on four-level (ii) and by hiding the diffractive pattern and revealing it with an optical key (iii).
Fabrication & replication of multilevel structures
Master machined by e-beam writing
Replication of master by Nano-Imprint Lithography
Personalized logo possibility
Genuine components protected with unique technology
Possibility of modulating different technics (optical key only, optical key with 4-levels structures, encapsulated 4-
level DOE,…)
Optical key
Diffraction pattern only revealed with an optical key (used by customs offices and after-
sales services)
Two alternatives:
-Design the DOE for a specific wavefront
-Combination of two DOEs, one revealing the opposite pattern of the other. Illumination of
the whole structure diffracts a uniform square pattern. Only a structured beam would
reveal one of two patterns
Hiding the structure
DOE hidden with coatings in order to prevent mechanical embossing.
Two alternatives:
-Silicon polished layer deposited by PVD. Structure visually invisible. Only IR beam
reveals the diffractive pattern.
-Encapsulation of UV glue with a layer of parylene on SiOx deposited by CVD.
IR BeamVisible spectra
beam
DOE
Polished silicon layer
2016
Results The first calibration technique, called "ratio method" is
based on noise power and noise bandwidth
measurements, and the second technique, called
"absolute method" is based on noise temperature
measurements.
Both techniques show comparable results, with an
expanded uncertainty (k=2) of 0.4 dB, which
corresponds to the state-of-the-art in this field.
Uncertainty budget of the PNS prototype
This uncertainty is currently limited by the cross-talk
between the noise and the carrier in the PNS
prototype.
Calibration values of the PNS prototype and
comparison of the two calibration methods
Phase noise standard for
traceable measuring instruments
Project name: Traceable Phase Noise Standards, Nr. 17254.2 PFNM-NM
Main applicant: Federal Institute of Metrology METAS, Dr. L-G. Bernier, D. Stalder, Dr. J. Morel, Dr. R. Thalmann
Main industrial partner: Anapico AG, Dr. J. Kucera, S. Dahinden, R. Pfiffner
Timeline: Start: 01. April 2015, duration: 14 months
Scientific Innovation
Business Potential The compact and turnkey phase noise calibration standard that was successfully developed in this project offers a decisive advantage to the industrial partner Anapico
compared to the other competitors, since it allows providing the end-customers with a traceable reference for the on-site check of their measuring instruments with very limited
down-times, which is a critical requirement for many industries active in the high volume production market.
The developed calibration techniques will allow METAS providing new calibration services to the microwave industry in a domain where the demand is growing rapidly, and
were only a few national metrology institutes are able to compete.
Overview
Phase noise is a quantity which measures the
contribution to the RF spectrum arising from the
random phase modulation of a given signal.
It is usually specified by calculating L(f), defined as
the noise-to-carrier ratio measured in a 1 Hz
bandwidth.
Relevance
The inter-operability, capacity and quality of Telecom
and SatCom systems critically depend on phase noise
performances.
Accurate and internationally comparable phase noise
measurements are only possible when the measuring
instruments are made traceable to the corresponding
units of the Si system.
High performace phase noise standards need to be
developed in order to achieve these goals.
Achievements
We successfully developed in this project a fully
traceable phase noise standard, offering state-of-the-
art performances in terms of measurement
uncertainty and allowing to calibrate high performance
phase noise measuring instruments such as those
fabricated by the industrial partner Anapico.
Phase noise standard The phase noise standard (PNS) developed in this
project consists in a device which combines a band-
limited white noise source and a carrier frequency in
order to create a reference signal with a traceable
amount of phase noise.
The fundamental principle relies on the fact that a
carrier at frequency o modulated by a band-limited
white-amplitude-noise e(t) of density Ne and by a
band-limited white-phase-noise (t) of density N
cannot be distinguished from the sum of a carrier of
power Pc and of a band-limited additive noise of
power spectral density No centered at the carrier
frequency.
It can be demonstrated that the equivalent Ne and N
are equal to half the noise-to-carrier ratio in a 1 Hz
bandwidth, No/Pc, which defines L(f).
Calibration and traceability
Calibration of the PNS requires accurate and
traceable measurements of the carrier power level
and of the power spectral density of the noise source.
Impedance mismatches and crosstalk between the
noise and carrier sources need to be kept at a
minimum. S-Parameters of all critical interfaces and
components were measured using a reference vector
network analyzer in order to evaluate their
contribution to the uncertainty budget of the PNS.
Traceability to the relevant primary standards was
established by using a chain of references as shown
here below.
Based on that structure, two independent calibration
methods were developed, each one including a full
determination of the uncertainty budget using
dedicated numerical error propagation techniques in
the complex plane, based on the UncLib tool
developed at METAS.
e NNP
Nf
c
0
2
1L
Fully traceable noise standard and corresponding
spectrum measured on a spectrum analyzer. The
carrier frequency is selectable between 1 GHz and
3 GHz and both the carrier and noise power levels
are adjustable
Reference Spectrum
Analyzer
Ref. RF
powermeter Ref. Noise
source
PNS
Phase Noise
Standard
StabIilized
Laser
Cs clock
Coaxial
Standard
Frequency
Standard
Josephson voltage standard
Reference Vector
Network Analyzer
Substitution
calorimeter
Temperature
Primary standard
Traceability chain for PNS calibration
)(fSn
c
n
P
fSf
)()( LcP
f
P
Source of uncertainty Uncertaint
y
Distribution Standard
uncertainty
RF measurements 0.05 dB normal 0.05 dB
Cross-talk 0.3 dB uniform 0.17 dB
Temperature sensitivity 0.08 dB uniform 0.04 dB
Combined standard
uncertainty
0.2 dB
Expanded uncertainty,( k=2) 0.4 dB
-132.4
-132.2
-132.0
-131.8
L(f
) in
dB
c/H
z
100806040200Fourier frequency in MHz
Ratio method Absolute method
Anapico PNSfc=1 GHz
Pc=5 dBm
(t)
e(t)
2016
Protective laminates for flexible barriers R. Schneider*, J. Heier*, P. Wehrmann#, L. Baumann# LAMBAR (Project-Nr. 17253.1 PFIW-IW) Main applicant: Empa*; Prof. Dr. Frank Nüesch Main industrial partner: Folex AG#; Adrian Meile, Starting date: 01.01.2015 Duration: 24 month Project Goals: Development of a protective layer for ultra-thin-glass foils and production of ultra-thin-glass laminates which act as a superior barrier against water and oxygen. In addition the laminates are flexible and have a very high transparency. Applications are in the field of technical products, where functional layers like semiconductors, organic dyes, conductive polymers etc. need to be protected. Here, OLED-, or thin (organic) solar cells manufacturers, as well as research laboratories are possible customers.
Scientific Innovation
Business Potential The unique properties make ultra-thin-glass a versatile substrate, but due to its brittleness the use and handling is difficult. Lamination improves the mechanical properties and facilitates or even enables the use and handling. Typical important, but yet critical, industrial processing steps can be realized easily:
Evaluation/testing of adhesives T-peel test with > 25 different laminates 4 are useable (2 commercially available) cohesive failure of the PET foil.
Development lamination process Processing steps are confidential Processing conditions are confidential High transparent and homogeneous laminate.
Glass Adhesive PET foil
Testing mechanical stability One- and two-sided laminates achieve bending-radii of 15 mm @ > 1000 cycles; failure rate: 0%.
Conductive Ag ink
Laser Cutting Gravure Printing Pilot Line @ CCC (Empa’s Coating Competence Center)
2016
Processing of low power integrated gas sensors
with functionalized carbon nanotubes as sensitive
layers deposited by a laser based technique
Project no. 16713.1 PFNM-NM Main applicant: Paul Scherrer Institut (PSI)
Responsible persons: Thomas Lippert and Alexandra Palla Papavlu
No implementation partner
Starting date: 1.04.2015
Duration of project: 18 months
Project goals:
The main goal of this project is to develop the process of depositing sensing materials, based on carbon nanotubes, to a level
that it can be applied for commercial low temperature sensors on economical substrates.
Key findings:
i. Successful laser printing of carbon nanotubes onto different substrates: rigid (glass) and flexible (ex. polyimide).
ii. Fabrication by laser direct writing (LIFT) of gas sensors (for the detection of ammonia, ethanol, and acetone).
iii. Characterization of the new sensors: stable baseline, high sensitivity for very short response times (sensors operating close
to room temperature, stability and reusability).
Scientific Innovation
Business Potential
Qualification of the laser direct writing process (LIFT) for industrial chemical sensor manufacturing.
Single walled carbon nanotubes in the form of freestanding films can be successfully
transferred onto metal electrodes.
The as-fabricated sensors has a stable baseline for over more than 14 hours.
The sensors could be repeatedly used over multiple cycles, without observable loss of
response.
Theoretical detection limit: ~ 100 ppb for the detection of ammonia, and 500 ppb for
methanol.
Sensors printed on flexible PET are functional and robust:
after ~ 300 bending cycles the response is ~ 30% less than
the response of the sensors when flat.
Humidity does not interfere significantly in the functionality of
the sensors.
Evaluation of sensor lifetime: the sensors were exposed to light, humidity, and dust, and
then re-measured after ~ 1 year. After 1 year the analyte concentrations measured are 5
times lower, however, the sensor response still increases by increasing the analyte
concentration.
• Current gas sensor unit cost: 2.75 CHF
• 25% reduced with LIFT
• Processing cost: from 16% to 14%
• Cost reduction also from substrate+needed material
Highly flexible and roll-to-roll compatible
processing. As soon as the donor substrates
have been prepared, the entire device can be
fully computer-controlled and printed from the
specified design.
• Competes with screenprinting, inkjet
printing, xerography;
• Daetwyler AG (Switzerland)
• Flexible electronics:
• OLED, TFT, etc.
• High area printing
• High speed printing
• Allows the transfer of inexpensive inks
• No limitation for the substrate
2016
Portable Scanning Probe Microscope in
a UHV-SuitcaseCTI Project Nr. 16465.1 PFNM-NM
Start: April 1. 2014, Duration: 24+12months
S.F. Mousavi, T. Nijs, M. Martina, D. Rechtsteiner, S. A. Köster, U. Maier, T. Jung
Scientific Innovation
Business PotentialThe compact, modular and configurable SPM is a part of a UHV suitcase. The STM
is exceptionally cost-efficient and can be retro-fitted to existing UHV systems with
little effort. In combination with a UHV suitcase transfer system, the microscope
forms a truly portable, fully featured UHV scanning probe microscope which can be
used with multiple instruments.
Au(111) (40 nmx40 nm) Au(111), 35nmx35 nm
22 × √ 3 herringbone
reconstructed surface.
The herringbone
reconstruction’s height is known
to be in sub-Angstrom scale.
HOPG (1.5 nmx1.5 nm)
Project goalsA Scanning Probe Microscope (SPM), implemented into an ultra
high vacuum suitcase, is under development. It allows for spectro-
microscopy correlation experiments to be performed in the
suitcase when attached to dedicated photon spectroscopy
systems at synchrotron end-stations and in surface science
laboratories. The modular installation and portability of this SPM
makes spectro-microscopy investigations highly economical
compared to the installation of a dedicated SPM at every hosting
system.
A portable SPM as fully functional
UHV device. Key features:
compact 43mm OD head
standard DN40CF flange
spring suspension
common flag style sample plates
xy coarse positioning 5x5 mm
z coarse motion 5 mm
In-situ exchangeable scan unit and
sensor
The integrated SPM Instrument
The system includes a sample transfer and gate valve for attachment to any
beamline endstation or other existing UHV systems via a turbo-pump T-piece or
load lock.
Fetch the sample, place it into the SPM using the transfer manipulator of the
suitcase and start taking SPM images. If the environment is noisy just detach the
SPM suitcase and place it on a table in a calm place.
First test measurements show the potential of the STM:
The images were taken by open source software
GXSM [P. Zahl et al, Rev. Sci. Instr. 74 (2003) 1222, P. Zahl et al. J. Vac. Sci. Technol. B 28 (2010)] Gwyddion [www.gwyddion.net].
2016
Micromechanical Testing Instrument for the
MEMS Industry
Project Number: 16677.1, Starting Date: 1. September 2014, Duration: 24 Months
F. Beyeler1), S. Muntwyler1), C. Bolliger1), V. Straessle2), A. Mocker2), M. Gutsche2), D. Beyeler3), D. Frost3), B. Nelson3),
S. Russi4), M. Aeschbacher4), H. Feth5), P. Reith5)
1) FemtoTools AG - main industrial partner 2) Hochschule Für Technik Buchs (NTB) – main academic partner 3) ETH Zürich, Multi-Scale Robotics Laboratory 4) Eidgenössisches Institut für Metrologie (METAS) 5) Truedyne Sensors AG
Please visit booth nr. 21 by FemtoTools AG to see the prototype of the MEMS testing system and to learn more
about the project!
Scientific Innovation We have developed an instrument for the combined electrical and mechanical
testing of MEMS (microelectromechanical systems) directly on the wafer. The core
technology of the system is a microforce sensor that can apply and accurately
measure forces in the range from single nanonewtons up to hundreds of
millinewtons. For the accurate sensor-to-sample alignment, a vision system with a
topview and a sideview microscope camera has ben implemented. The control
electronics and software allow for user-friendly MEMS testing such as:
• stiffness and Young’s modulus
• creep
• cyclic load
• fracture toughness, compression and tensile strength
• topography and stiffness mapping
• microsensor calibration (electrical sensitivity vs. mechanical stimulation)
• microactuator testing (actuator force, actuation range and response time)
Business Potential MEMS are miniaturized, microchip-based sensors and actuators that are widely
used in many fields such as consumer electronics, medical devices or in process
control. By definition, MEMS (microelectromechanical systems) include both
mechanical and electrical components. These components require testing during
R&D and production.
In this project we have developed a stand-alone measurement system focusing on
quality control during product development and series production of MEMS
products. Typical customers are low-volume high-margin MEMS producers,
MEMS foundries, fabless MEMS integrators, MEMS test service companies as
well as the product development divisions of large-scale MEMS producers.
In June 2016 FemtoTools started the 0-series production of this instrument.
2016
Micromechanical Testing Instrument for the
MEMS Industry
Project Number: 16677.1, Starting Date: 1. September 2014, Duration: 24 Months
F. Beyeler1), S. Muntwyler1), C. Bolliger1), V. Straessle2), A. Mocker2), M. Gutsche2), D. Beyeler3), D. Frost3), B. Nelson3),
S. Russi4), M. Aeschbacher4), H. Feth5), P. Reith5)
1) FemtoTools AG - main industrial partner 2) Hochschule Für Technik Buchs NTB – main academic partner 3) ETH Zürich, Multi-Scale Robotics Laboratory 4) Eidgenössisches Institut für Metrologie METAS 5) Truedyne Sensors AG
Please visit booth nr. 21 by FemtoTools AG to see different microforce sensor prototypes and to learn more
about the project!
Scientific Innovation Mechanical testing often requires the measurement of forces in multiple
axes, such as the horizontal and vertical MEMS testing. The exact geometry
of the tip of the microforce sensing probe is often of great importance to
obtain accurate data for the mechanical properties of the sample.
In this project we have developed a two-axis capacitive microforce sensor.
The silicon-based sensor chips have been fabricated in the cleanrooms at
NTB. Low-noise multi-channel readout electronics have been developed for
interfacing the sensor chips.
FemtoTools is collaborating with METAS for Si-traceable calibration of the
sensors for true quantitative measurements in the nanonewton to
millinewton range. The measurement uncertainty that has been achieved
outperforms other technologies such as atomic force microscopes (AFM).
Business Potential The MEMS-based microforce sensors are the core technology of
FemtoTools AG. The disruptive technology gives the company the
possibility to measure the mechanical properties of microscopic samples.
Currently, the products of Femtotools are mainly used for academic
purposes and for R&D in the industrial sector. The results of this project
enable FemtoTools to additionally enter the industrial quality control
market. Due to the ongoing trend towards miniaturization, this segment is
growing very fast.
The unbroken, SI-traceable calibration chain that has been developed in
the project enables the accurate calibration of the FemtoTools microforce
sensors. This is unique in the market and therefore gives the company the
credibility required in the industrial market and also a competitive
advantage against future competitors.
500µm
2016
PASS: Particles Free Sealing SystemM. Dadras1, N. Blondiaux1, M. Leboeuf1, V. Monnier1,, Ph. Buechel2, M. Zickar2
- project number: 1618.1 PFNM-NM
- main applicant: M. Dadras, CSEM, Jaquet-Droz 1, 2000 Neuchâtel(1)
- main industrial partner: M. Zickar, VAT Vakuumventile AG, Seelistr. 1, 9469, Haag(2)
- starting date: 01.01.2014, 22 months
Scientific Innovation
Business Potential
The node size for microelectronics is following Moore’s law leading to smaller gates on the
wafers. One of the main sources of defects is the presence of fine particles. In 2012, no
particle having the size more than 50nm was permitted. In 2014, this value decreased to
particle size of 15nm. At present the particles having the size more than 10nm are prohibited.
These evolutions increase the requirements of low defects present in semiconductor
processes. In accordance to decreasing node sizes, the requirements to smaller defect rates
on wafers are increasing.
The detection of nanoparticles having sizes < 100 nm is a high technological challenge.
Especially particles on industrial (grinded or turned) surfaces are difficult or in some cases not
possible to detect.
Source: http://en.wikipedia.org/wiki/Semiconductor_device_fabrication
Progress of miniaturization, and
comparison of sizes of semiconductor
manufacturing process nodes with some
microscopic objects and visible light
wavelengths SourceThe project had the aim to explain the nano particles formation, their sources and
improvement of materials for achieving the standards need in semi conductor industries.
Miniaturising of elastomer-sealing surface interface
Y-axis
Actuator
Force Detector
Elastomer
Test Bodies
X-axis
actuator
Results application to production
Elastomer
Counterpart
Crack Initiation
The rolls shear and smear on the
surface of counterpart
Rolle formation Transfer wear Particle formationRolle formation
EUV lithography and metrology is a growing high end market, which is extremely sensitive to particles. In order to serve this
market improvement of today’s valve technology is mandatory. VAT is currently the preferred supplier for high end applications.
If the challenging specifications coming from these markets are not met the competitors may obtain the whole market.
In other semi processes (deposition, etch) the transition from 300 mm to 450 mm wafer will generate an additional demand for
low particle vacuum valves as a large number of new equipment will be installed in the new wafer-fabs. Here the development
for low particle vacuum valves is beneficial in order to extend the market position compared to VAT’s competitors
2016Phase Analysis Of Amplitude Binary Mask StructuresProject number - 12782.1 PFNM-NMKrishnaparvathy Puthankovilakam*a, Toralf Scharf a, Hans Peter Herzig a, Uwe Vogler b, Arianna Bramati b ,
Reinhard Voelkel baOptics & Photonics Technology Laboratory, Ecole Polytechnique Fédérale de Lausanne (EPFL), CH-2000 Neuchâtel, Switzerlandb SUSS MicroOptics SA, , Rouges-Terres 61, CH-2068 Neuchâtel, Switzerland
Scientific Innovation
Business Potential
Experimental analysis of light propagation (the evolution of intensity
and phase) through the amplitude mask.
Study the tolerances against various correction features and phase
shifts during the propagation of light.
To check, Can small amplitude correction features (OPC features)
creates phase shifts or zero intensity regions during the propagation
to get the desired pattern??
Goal of the project
• The instrument
is working in
transmission
mode.
• Numerical
methods are
used for
getting the
intensity and
phase
information
from the
recorded
interferograms.
Experimental setupAbstract
The importance of intensity distributions for getting the desired
pattern at printing level has been known to the lithography industry
for some time. However, the significant role played by phase for
shaping the light to get the desired pattern for amplitude structures
was not recognized. Our aim is to analysis the role of phase
modulation or zero intensity regions created by small amplitude
correction features to print the pattern at exact proximity gap (30 µm).
Structure
( A )
( B )
( C )
XZ Propagation –(A)Intensity images are normalized ( 1 to 0) andphase images are plotted in radians ( –π to π).
XZ Propagation
through blue line.
In phase image,
after 25 µm of
propagation, there
is an abrupt change
in the phase
visualized by blue
dashed line
rectangle.
The phase image
shows the
propagation
difference between
both corners.
Yellow represents
Open areas and
black represents
chromium.
XZ Propagation – (B)
XZ Propagation
through blue line.
Here, The phase
change starts at 20
um and propagates.
The change is
visualized by blue
dashed line
rectangle.
For normal corners,
Single phase
continues through
out the propagation.
Intensity images are normalized ( 1 to 0) andphase images are plotted in radians ( –π to π).
XZ Propagation – (C) Intensity images are normalized ( 1 to 0) andphase images are plotted in radians ( –π to π).
XZ Propagation
through blue
marked line.
At 10 µm, the
obstacle (negative
square) creates the
focal point with
sharp intensity and
a phase fluctuation
(represented by
blue dashed
rectangles on the
images).
Printing of high contrast structure at desired proximity gap can be achieved by small amplitude
correction features because of the creation of sharp phase changes and zero intensity regions.
The mask are placed in a distance with the wafer (proximity gap) which will reduce the mask
damage, mask cleaning and higher throughput.
New small features for the correction structure will increase the resolution and give new
applications strategies to the industry.
The new designs will increase the application portfolio of existing machines.
2016
Rudolf Thalmann
Michael Marxer
Thomas Jordi
Markus Ritter
Walter Vetter
Manufacturing micro-spheres with rough surfacesThe goal was to find an optimal optically cooperative surface on smallest possible
spheres. Based on its knowledge on sphere polishing Saphirwerk applied various
methods to achieve specific surface textures (Ra, Rz) while maintaining low form
deviations.
Saphirwerk produced several lots of nominally Ø 0.4 mm Si3Ni4 ceramic micro-
spheres having different surface parameters. The following measurements show
their suitability for optical 3D microscope calibration.
Table with results
Preparation of measurement lotsFrom each production lot, five samples were glued on a gauge block by
Cyanoacrylate adhesive. The upper hemisphere was freely accessible for all
measurement instruments.
Measurement of diameter and form deviationThe diameter and form deviation were measured using the METAS µCMM using
a Ø 125 µm ruby probe and scanning the equator and two perpendicular profiles
over the pole of the micro-spheres with a point density of 300 pts/mm.
Measured profiles on a sample micro-sphere for determining the diameter and form deviation.
Lot # Ø / µm Form / µm Ra / nm Rz / nm α / °
1 402.0 ± 0.1 0.15 ± 0.05 5 ± 1 49 ± 1 50 ± 4
2 381.0 ± 1.0 0.57 ± 0.13 102 ± 15 640 ± 79 65 ± 4
4 402.0 ± 0.1 0.58 ± 0.21 37 ± 8 333 ± 100 62 ± 4
6 359.7 ± 0.3 0.28 ± 0.06 10 ± 1 76 ± 25 55 ± 4
Applications of micro-spheres on optical µCMMs3D measurement of micro-sphere surface with a focus variation microscope
Alicona InfiniteFocus (scale ±1 µm, best fit sphere removed).
Lot 1
Lot 6Lot 4
Lot 2
Maximum measurable slope angleThe maximum slope angle α was determined on an
focus variation microscope (Alicona InfiniteFocus)
using a lens with a magnification of 50. The
criterion for the maximum measurable angle
was at the zone where the detectable point
density decreased to 50% compared to the point
density detected at the sphere apex.
Optiv Performance 443, Hexagon, Germany
Spherical standards for optical CMMs
Performance test
Performance test
0.4 mm
10 mm
InfiniteFocus, © Alicona Imaging GmbH, Austria
Traceability chainNational standard
U = 0.000’000’000’02 m
Workpiece
U = 0.000’002 m
Artefact
U = 0.000’000’2 m
Reliable and efficient measurement technique
for manufacturing micropartsKTI-Project No. 16744.1 PFNM-NM / start 1st September 2014 / duration 24 months
2016
ProtEcted And Reusable nano-immobilized Lactases for dairy
applicationS [PEARLS] CTI Project 16437 PFNM-NM
Main applicant: Prof. Dr. Patrick Shahgaldian – University of Applied Sciences and arts Northwestern Switzerland
Main Industrial partner: Dr. Yves Dudal, INOFEA AG
Starting date: 01.05.14, duration 1 year
Scientific Innovation In the frame of the PEARLS project, the partners have developed a novel class of nanobiocatalyst that, without manipulation of the protein sequence by
genetic engineering or structural manipulation of the enzyme, allows the protection of the natural biocatalyst against chemical and biological stresses.
The novel biocatalytic nanomaterial consists of enzymes immobilized on a solid carrier, namely silica nanoparticles (SNPs) and protected by an
organosilica shell. We used among others β-galactosidase as model enzyme. Compared to the native enzyme, the so-produced biocatalytic-
nanomaterial showed drastically improved resistance to temperature stress, pH variation, protease digestion and to urea treatment. We have
demonstrated that this material efficiently catalyses the hydrolysis of lactose in milk and whey.
Business Potential Milk and dairy products (butter, cream, whey, cheese and yogurt) belong to the largest and most dynamic world agricultural industry. Globally, one
third of the total quantity of milk is consumed as fluid milk while the remaining two thirds are mainly processed for the production of cheese (50%) and
butter (30%). Because of advertising, trade liberalization and continuing population growth, the global dairy market is undergoing a fast-pace growth and
is expected to reach USD 494 billion by 2015. In emerging world areas such as Asia, South Africa and South America, 90% of the population is lactose-
intolerant while in India, Middle East, North Africa and Central America 70% of the population suffers from this intolerance.
The technology developed in the frame of the PEARLS project allows for a fast and efficient degradation of lactose in milk and whey.
A broader potential- Besides the initial target of this proof of concept project, INOFEA is developing a wealth of applications from this new platform
technology in both Pharma and Consumer Healthcare market segments. We can either formulate enzymes as drugs efficient in in vivo conditions
(digestive health products, pancreatic enzyme products, personal care products, medical textiles, etc.) or improve industrial biocatalytic processes.
0
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knes
s (n
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c b d
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1 2 3
Figure 1. Schematic representation of the synthetic strategy developed (a); layer growth kinetics and representative scanning electron micrographs of the nanoparticles produced (c, d). Scale bars represent 100 nm.
Figure 2. Physical, chaotropic, and biochemical stress tests
2016
Stable dyes for the colour palette of the PV-
activated building envelope
Project number: CTI no. 17622.1 PFNM-NM
Main Applicant: Prof. Michael Grätzel, École Polytechnique Fédérale de Lausanne.
Main inductrial partner: Mr. Asef Azam, glass2energy SA
Starting date: 1 April 2015
Project duration: two years
The goals of this project are to develop sensitizers (green and blue), electrolytes (ionic liquid, gel, or solid state) and high quality TiO2 films to achieve
highly performed and long-term stable dye-sensitized solar cells in order to meet the criteria for outdoor applications in building integrated photovoltaic
(BIPV) products.
In the past one year, we designed green dyes with novel anchoring groups that can strongly bind to the surface of TiO2. We synthesized green dye
Y351-S with hydroxamic acid anchoring group which shows PCE of 8.1% under half sun in an ionic liquid electrolyte and over 9% under half sun in a
cobalt electrolyte. In collaboration with China, we studied a green dye with two carboxylic acid anchoring groups which shows PCE of 8.6% under half
sun in a cobalt electrolyte; we studied a stable blue dye R2. The R2-sensitized TiO2 film in a cobalt electrolyte displays blue and shows PCE of 10.7%
under half sun; on the other hand, in an iodide ionic liquid electrolyte, R2-sensitized TiO2 film displays green and shows PCE of 8.0% under half sun.
This finding drives us to develop electrolyte-induced colour cells with a sensitizer. We also transferred the red and blue dyes from laboratory cell to
modules in glass2energy SA.
Scientific Innovation
Business Potential
0 200 400 600 800 1000 12004
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10
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12
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600
800
0 200 400 600 800 1000 12000.4
0.6
0.8
1.0
PC
E (
%)
Jsc (
mA
cm
2)
Voc (
mV
)F
F
Time (h)
0.0 0.2 0.4 0.6 0.80
2
4
6
8
10
J (
mA
cm
2)
V (V)
First DSC demo Solar-charging installation
at Villaz St-Pierre. This installation consists
of 15 modules with red dye and 12 modules
with green dye.
We transferred the best-identified materials from
laboratory scale cells, 0.25 cm2, to big modules,
0.6 m2, of 1000 X 600 mm.
We will use the newly developed green dye Y351-S
and R2, result of this CTI project, for the demanded
green panels. R2 dye can be used also for blue
panels with a different electrolyte.
N
N
COOH
NaOOC
N
N
S
S
Ru
N
C
S
NC
S
C101
C6H13
C6H13
Innovation 1:
We synthesized a green dye
Y351-S with an anchoring
group of hydroxamic acid
which can bind strongly on
the surface of TiO2.
N
N N
N
ZnN
C6H13S
C6H13S
OC8H17C8H17O
C8H17O OC8H17
O
HN OH
Y351-S
N
C6H13O
C6H13O
S
S
NS
N
COOH
C6H13
C6H13
C6H13
C6H13
R2
Innovation 2:
Collaborating with China,
we used R2 dye with a
cobalt complex (blue)
and an iodide ionic liquid
electrolyte (green).
Performance of C101 dye with an iodide ionic liquid
electrolyte in different size of modules (right).
[email protected] sun: 8.1%
in ionic liquid electrolyte
PCE@ 0.5sun: 9.5%
in cobalt electrolyte
Stable 10%@half sun with a cobalt
electrolyte under light soaking. Stable 8%@half sun with an ionic
liquid electrolyte under light soaking
Z.I. du Vivier 16, CH-1690 Villaz-St-Pierre,
Swiss
www.g2e.ch
T : +41 24 441 99 53
2016
White photovoltaic module technology
development for building integration
G. Bugnon1,2, J. Escarre1, G. Cataneo1, U. Fuerholz1, L-E. Perret1, C. Ballif1, S. Eberhard2
1 CSEM (Swiss Center for Electronics and Microtechnology), Rue Jaquet-Droz 1, Neuchâtel (main applicant)2 Solaxess SA, Rue de la Maladière 71c, Neuchâtel (founded in January 2015, main industrial partner)
CTI Project 18088.1 PFNM-NM – Nanowhite “Process development and reliability of white solar module for BIPV”
Project period: 01.09.2015 – 31.08.2016
Seamless architectural integration of PV
Business Potential
Solaxess’ project activity is the development and fabrication of an innovative nanotechnology film allowing
greater social acceptance of renewable building-integrated photovoltaic (BIPV) power plants.
The project aims at making PV modules active building elements, meant to replace conventional passive
facades, in a way which respects both the architectural environment and building traditions.
The main objective is to scale up the technology to an industrial level and to ensure of its reliability.
Efficient spectral selectivity
Over 90% of the market is based on crystalline silicon solar cells module. These solar cells have the capability to
harvest the solar energy both in the visible (390–700 nm) and near IR (700–1200 nm) regions.
The principle is to select the amount of energy capable of going through our film in both of these regions.
By doing this we can completely hide the internal components of PV modules while retaining a sufficiently good
amount of the incoming visible and near-IR energy allowing excellent power output of the façade element.
The project spurs economic growth while mitigating the negative impact of
energy supply, offering a solution for the current need of energy transition.
The market potential is considerable and the market demand in developed countries
promoting sustainable energy policies is very high in particular.
The product allows PV penetration in the built environment in a satisfying esthetic
way, only requiring a higher initial investment, providing a solution for facilitating the
energy transition.
Best visual / performance trade-off
Depending on the amount of the visible energy we reflect we can achieve different white and shade colors.
For the most vivid white, most of the visible energy needs to be reflected in a neutral way: 100-110 W/m2
Slightly darker tones (light gray, medium grays, etc.) allow to retain a higher performances: 120-130 W/m2
Our film is simply to be assembled at the lamination step at the PV module manufacturing plant.
Reduced PV module operating temperatures, but also at its back, are additional advantages of this approach.
Old administrative Post office site at Ouchy-Lausanne fully renovated in 2013
Visible range Near IR-range
Filter transmission
If this building was done in 2016, it could produce 132 MWh per year.
This corresponds to the energy consumption of 35 homes.
EQEs of typical c-Si based solar cell technologies
2016
All-in-one integrated characterization platform for OLED and solar cell R&D
Zurich University of Applied Sciences ZHAW, Dr. K. Pernstich Fluxim AG, Prof. B. Ruhstaller
15889.2 PFNM-NM, 1.2014 – 10.2015
Project goals • Improve Fluxim’s PAIOS measurement hardware for advanced characterization of solar cells and OLEDs
• Integrate Fluxim’s SETFOS simulation software in PAIOS measurement system
Analytical
solution
Improved PAIOS Measurement Hardware
Improved Measurement Range
Impedance from 1 to 107 Hz, 10 to 108 Ω
Currents from <10 pA to 100 mA
Low Temperature Probe Station
Temperature from -150 to 200°C
Homebuilt cryostat to lower costs
SETFOS-PAIOS Integration
The seamless integration of SETFOS simulation software into the user interface of the PAIOS measurement hardware
enables the user to define, run, and compare simulations directly with the measurements.
Improved Workflow inside PAIOS user interface
• Define a set of measurements
(IVL, transient, impedance, CELIV, …)
• Define OLED/OPV stack
• Perform measurements
• Optimize model parameters and see simulation
results right where you see the measurements
Additional Improvements
+ Multi-layer Drift-Diffusion algorithm
+ Faster Transient Solver
Business exploitation and potential • One of a kind combination of measurement instrument
and simulation software
• PAIOS system provides an excellent base for further
measurement modules
• Updated product releases already during the project
• Significant cross selling potential between SETFOS and
PAIOS customers
• Developments for SETFOS-PAIOS integration also
benefit SETFOS customers
_IMT_Institut de microtechnique
Project objective:
We develop new and innovative Diffractive Optical Elements (DOE) that are realized with precision glass molding technology for advancedimaging and high power flux optics. We use Glassy Carbon as master material due to its high thermal stability (T<2000°C), high hardness and lowadhesion to glass. A dry etching process for structuring Glassy Carbon with a silicon hard mask has been developed, leading to a smooth surface(Ra < 5nm). Some test samples for beam splitting applications are processed with precision glass molding technology at our partner facilities. Withthis technology we fabricated 2-level DOEs, 8-level DOEs and high resolution DOEs based on e-beam lithography.
Microstructured Glassy Carbon for Glass Molding of Diffractive Optical Elements
K. Prater, L. E. Hans, T. Scharf and H.-P. HerzigOptics & Photonics Technology Laboratory, Ecole Polytechnique Fédérale de Lausanne (EPFL), CH-2000 Neuchâtel, Switzerland
High Resolution Fabrication
With an appropriate control of the temperature-pressure-profile, highly precise glasselements for applications in the field of fine optics and photography can be manufactured([2,3]).
Presicion Glass Molding
3. ICP plasma etchingof silicon
4.1 ICP plasma etching of GC
4.2 silicon stripping
1. sputtering of hard mask layer: 70nm Si
2. Photolithogaphy
CHF3/SF6
O2 /SF6
Fabrication of the GC Mold
4mm
692nm
[1] L. E. Hans, K. Prater, C. Kilchoer, T. Scharf, H. P. Herzig, and A. Hermerschmidt, “Wafer-level microstructuring of glassy carbon,” 2014, p. 89740Y.[2] Frauenhofer IPT: http://www.simuglass.com/en/InitialSituation.html [3] Y Chen et al., “A reflow process for glass microlens array fabrication by use of precision compression molding”, (2008), J. Micromech. Microeng. 18 055022.ERANET-MNT-Guide4Diffractive partners: Fisba OPTIK, Fraunhofer IPT, HoloeyeFunding: Commission for Technology and Innovation, under project 12824.1 PFNM-NM
2. Pressing
Molded Glass StructureMaterial: L-BAL42Temperature 555°C
Glassy Carbon master (690nm etching depth);
Design by Holoeye: Binary Elements beam splitter 1:11x11
Diffraction pattern of glass:meas. efficiency: 63.1% theo. efficiency: 64.4%
Process Chain for Replication Technology
Hologram of project partners:Image with mold in reflection
Multilevel Element Examples:
1. Heating (450-1400°C) 3. Cooling
Glassy Carbon mold replication in L-BAL42
microstructured mold (GC)glass preformflat mold (GC)
4. Unloading
Forming Force Holding Force
• E-beam lithography: feature size down to 250nm were
mold
glass
glass
0.2
0.25
0.3
0.35
0.4
0.45
0.5
0.55
0.2 0.4 0.6 0.8 1
hei
ght
in µ
m
linewidth in µm
L05 T=565°C t=240sL08 T=565°C t=360sL07 T=568°C t=240sGC mold
Comparison of replication accuracy for different molding conditions:• temperature T influences viscosity of
glass during mold filling
lines with 1mm width, 0.485mm depth and 3mm length
2016
MultiTip NanoFrazor: Robust Packaging for
Multiple CantileversDietmar Bertsch1, Emine Cagin1, Mathias Mächler1, Regula Roffler1, Philip Paul2, Simon Bonanni2, Kartik Buddha2, André Bernard1
1 Institute for Micro- and Nanotechnology, NTB Interstate University of Applied Sciences, Buchs 2 SwissLitho AG
CTI Project 17500.1 PFNM-NM «Multi-Tip NanoFrazor: Nanolithography goes from research to industry»
Project period: 1.2.2015 – 31.1.2017
A reliable and industry-compatible write head for thermal scanning probe lithography
machines is the main goal of this project. The NanoFrazor from SwissLitho AG can write
3D structures down to tens of nanometers in a single step. A heated cantilever sweeps a
resin-covered surface in a raster fashion, writing pre-determined features. The
throughput of this process will be increased by using multiple cantilevers in parallel. In
this project, a disposable multi-tip cartridge holding up to 10 cantilevers, and the interface
to the NanoFrazor machine are developed.
Business PotentialThis work plays a crucial role in the successful launch of the next products from SwissLitho, namely
the NanoFrazor Explore 200TS and the NanoFrazor Industrial. In combination with the development
achieved in project NanoBridge, the multi-tip capability will allow thermal nanolithography to be
realistically introduced to industry research settings. The large area stage achieved in NanoBridge
will be combined with the reliable cantilever handling in MultiTip, in order to reach the specifications
for endurance, throughput and reliability for new customers out of the precision manufacturing
market.
Bond Height
The wire bond height should be under 150 µm to allow the
approach to user-defined substrates without a crash. Bond heights
between 95 and 115 µm are achieved reproducibly for both AlSi
and Au bonding.
Roll Angle Correction
Manual correction of the roll angle achieved through direct
adjustment on the holder. WLI studies on die-bonded samples
show the built-in error and the adjustment limits.
Image carrier Level carrier Image chip
• Built-in errors are consistently Χ ≤ 0.08⁰• With first holder, adjustment yielded down to Χ = 0.03⁰• With improved holder, adjustment down to Χ ≤ 0.001 ⁰• Automated adjustment to replace manual adjustment in future
Carrier Board Design
Silicon chips featuring 10 cantilevers are mounted on a carrier
board, which must:
• Be lightweight, stiff, and flat
• Provide 32 electrical connections between the cantilevers and
the write head of the NanoFrazor• Be fabricated on commercially available substrates with
standard processes
Chip
Carrier
Bond pads for die-and wire-bonding
Holder Design
The carrier board should be mounted on a holder, which must:
• Provide a lightweight, yet robust mechanical interface
between the cantilevers and the write head of the NanoFrazor• Integrate the manual adjustment of roll and pitch angles on
the cantilever chip, via the carrier board
2016
Flexible printed batteries-18926.2- main applicant: Oussama El Baradai, Sören Fricke , Christian Bosshard- main industrial partner: Renata AG (Stephan Pfrommer, Pascal Häring) - starting date: 2 May 2016 ; duration of project: 18 months
At present batteries represent the best
compromise in terms of specific energy (the
amount of energy stored in a given system per
unit volume or weight) and autonomy respect with
other systems as capacitors or fuel cells.
Printed and thin batteries are nowadays the
best solution to satisfy the demand of new
emerging markets in terms of flexibility,
thickness and form factor for a large
spectrum of products:
Scientific Innovation
Printing of the full cell on the
separator
Screen printing of
current collectors
No toxic components
Free formfactor
Easily customizable
Flexible
Easily recyclable
Rechargeable
ThinBusiness Potential Introduction in the market of a new printed and flexible rechargeable battery having an energy
density in line with competiting technologies.
Fulfilling the requirements of new emerging markets as well as wearable technologies in terms
of flexibility and form factors.
Supporting Swiss companies by bringing breakthrough and Swiss made technologies closer to
the market.
At the end of the feasibility study a qualifiable
prototype will be manufactured compatible
with industrial scale production having the
following characteristics:
The innovative and scientific content of this project
are:
Screen
Squeegee
Separator
Electrode
Current collector
FRONT
BACK
42%
34%
23%1%
THIN AND PRINTED GLOBAL SALE*
North America
Europe
Asia-Pacific
Rest of the world
* N. T. Vishal, S. Suchitra, and K. Ravi, “Global Thin - film Batteries (TFB) Market.” Frost & Sullivan,Dec-2013.
Screen
Separator
Squeegee
2016
Large-area Light Collecting Foils for solar light
concentration in photovoltaic devices (LICOFO)
Project Nr. 17508.1 PFNM-NM
Starting date: January 1st, 2015
Duration of project: 21 months
Research partner: CSEM (R. Ferrini, B. Gallinet, J. Levrat, F. Lütolf, A. Luu-Dinh)
Industrial partner: BASF Schweiz AG (A. von Mühlenen, P. Bujard, F. Dafflon, J. Gebers, A. Hafner)
Scientific Innovation
Business Potential
Product vision • Smart window
• Activated façade
• Building integrated photovoltaics
Requirements • Large area (km2)
• Foil-based (thickness<6mm)
• No tracking of sun position
Glass
Encapsulant
Bi-facial silicon
photovoltaic cell
Bi-facial silicon
photovoltaic cell Light collecting
foil
Application
Current status: efficiency 6.5%
Nano-optics
• Efficient broadband diffraction
(50% @500nm-800nm)
• Coupling in light guide
Materials
• UV varnish
• High refractive index (1.7-2.3)
• Nanoporous cladding: low
refractive index (1.2)
Micro-optics
• Array of microlenses
• Concentration of sunlight
towards nano-optical coupler
• Alignment with couplers
Microlenses
Nanoporous
cladding
Nanostructured
couplers Collection
Harvesting
30% Facades
9%
Windows
61% Roofing
BIPV Application Shares Source Lux Research Inc. Report LRGI-R-11-3
“Will BIPV market stay limited to aesthetics-limited buyers?”
Drivers
Aesthetics
Regulations / Certification
Awareness Daylighting
LEED
DGNB
Net Zero Energy House
Human Centric Lighting
Daylighting
Translucent Façade
1.2 GW BIPV installation
Market Forecast for 2016
2016
Daylight Redirection
Scientific Innovation Seasonal Heat Management Film
Daylight and Heat Management foil for high
Quality Illumination in Buildings (DayGlazing) Project Number: 17507.1 PFEN-NM
Starting Date: January 1st, 2015
Duration of Project: 18 Months
Research Partner: CSEM (R. Ferrini, M. Stalder, and B. Gallinet)
Industrial Partner: BASF Schweiz AG (A. Hafner, and A. v. Mühlenen)
EgoKiefer AG (M. Kappel)
Business Potential
Product vision • Smart Windows
• Daylight Redirection
• Seasonal Heat Management
Requirements • Large area (km2)
• Foil-based (thickness<1mm)
• Integration into existing products
Messe Basel
Figure of merit:
DIN EN 410 standard
g-value Total Solar Energy Transmittance
τν Light Transmittance
Angle dependence Factor γ = g(0°) / g(60°) Benchmark 3M γ = 1.25 target γ = 1.30
Figure of merit:
redirection efficiency ηrd
𝜂𝜂rd = ∫𝐼𝐼𝜃𝜃𝑑𝑑𝑑𝑑
+90°0°
∫ 𝐼𝐼𝜃𝜃𝑑𝑑𝑑𝑑+90°−90°
Light Redirection with Diffraction
Gratings ηrd 30%
Light redirection with
micro-optics André Kostro, Thesis EPFL n° 6465 (2015)
Other markets: e.g. furniture, transportation
Source Fredonia “Flat Glass”, 2009
60 bn€
AAGR ~ 6% Drivers
Architecture / Aesthetics
Building Value (Certification)
Daylighting
LEED
DGNB
Net Zero Energy House
Minergie
Interact with the Outside
Health of Building User
Natural Daylight
Other
26%
Automotive
29%
Architecture
45%
“How to optimize interaction, Daylight, and Solar Gains?”
Flat Glass Market