PIFOC® Objective Scanner SystemsImage Faster

� Ultra-Fast Z-Steps with Patented Piezo Ceramic Drives

� 7 msec Step Time for Typical high-NA Immersion Objective

� System Includes Everything You Need:

Piezo-Mechanics, Controller, Adapters

� Compatible with all Major Image Acquisition Packages

� Legendary PI Performance, Reliability & Robustness

� Capacitive Position Feedback as used in

NIST Reference Class Nanometrology Systems

� Moving Objective does not Disturb Sample

� From the Inventor of Piezo-Z Scanners

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Fast Piezo Focus Systems: 100 µm - 400 µm PIFOC®

Affordable High Performance: With Digital Controller & Software

The PIFOC® piezo objectivescanner systems include a highprecision piezo mechanism anda custom-tuned compact digitalcontroller. This combinationprovides higher performance atreduced costs. The integrated,frictionless and stiff piezo flex-

ure drive ensures high stiffnessand fast settling times, as wellas an exceptional guiding accu-racy and response.The settling time of less than10 ms increases the throughputand allows rapid Z-stack acqui-sition.

Position Measurement

with Highly Accurate

Capacitive Sensors or Lower-

Priced Strain Gauge Sensors

Capacitive sensors measure theposition directly and withoutcontact, they offer therefore aposition resolution of far belowone nanometer and excellentvalues in linearity.As an alternative, compact andlower-priced strain gauge sen-sors (SGS) with nanometer-

level resolution can be usedwhich are applied to appropri-ate places on the drive train andthus measure the displacementof the moving part of the stage.The linearity is improved con-siderably with the digital con-troller provided.

Simple Installation with

QuickLock Thread Options

The PIFOC® is mounted be-tween the turret and the objec-tive with the QuickLock threadadapter. After threading theadapter into the turret, theQuickLock is affixed in the de-sired position. Because thePIFOC® body need not to be ro-tated, cable wind-up is not anissue. For applications whichrequire a particularly large opti-cal aperture a version with a 29mm diameter threaded insertsis available.

Digital Controller for

Automated Scans

Included in the delivery is a dig-ital controller which opens upthe possibilities of digital con-trol for piezo-driven nanoposi-tioning systems for the sameprice as analog controllers. Theadvantage: higher linearity,simple operation and access toadvanced features.

Application Examples

� Microscopy

� Confocal microscopy

� 3D Imaging

� Screening

� Autofocus systems

� Surface analysis

� Wafer inspection

� Complete System with Controller: Fast Digital Controller,

Software-Configurable Servo Parameters

� Travel Ranges to 400 μm

� Scans and Positions Objectives with Sub-nm Resolution

� Frictionless, High-Precision Flexure Guiding System for Better

Focus Stability

� Choice of SGS Sensor (Lower Cost) and Capacitive Feedbackwith Direct Metrology for highest Stability and Linearity

� Clear Aperture up to 29 mm Ø, QuickLock Adapter for Easy

Attachment

� Interfaces: USB, RS-232 and analog

� Comprehensive Software Package, Compatible with

MetaMorph Imaging Software

Ordering Information

PD72Z1CAA

Fast PIFOC® Piezo NanofocusingZ-Drive, 100 µm, Capacitive Sensor,M32 Large Aperture QuickLockThread Adapters, Digital Controllerwith USB, RS-232

PD72Z1CAQ

Fast PIFOC® Piezo NanofocusingZ-Drive, 100 µm, Capacitive Sensor,M25 QuickLock Thread Adapters,Digital Controller with USB, RS-232

PD72Z1SAA

Fast PIFOC® Piezo NanofocusingZ-Drive, 100 µm, SGS Sensor, M32Large Aperture QuickLock ThreadAdapters, Digital Controller withUSB, RS-232

PD72Z1SAQ

Fast PIFOC® Piezo NanofocusingZ-Drive, 100 µm, SGS Sensor, M25QuickLock Thread Adapters, DigitalController with USB, RS-232

www.microscopestage.net

PD72Z2CAA

Fast PIFOC® Piezo NanofocusingZ-Drive, 250 µm, CapacitiveSensor, M32 Large ApertureQuickLock Thread Adapters,Digital Controller with USB, RS-232

PD72Z2CAQ

Fast PIFOC® Piezo NanofocusingZ-Drive, 250 µm, CapacitiveSensor, M25 QuickLock ThreadAdapters, Digital Controllerwith USB, RS-232

PD72Z4CAA

Fast PIFOC® Piezo NanofocusingZ-Drive, 400 µm, Capacitive Sensor,M32 Large Aperture QuickLockThread Adapters, Digital Controllerwith USB, RS-232

PD72Z4CAQ

Fast PIFOC® Piezo NanofocusingZ-Drive, 400 µm, CapacitiveSensor, M25 QuickLock ThreadAdapters, Digital Controller withUSB, RS-232

Settling time of the system PD72Z1CAQ with 150 g objective

Several PIFOC® piezo objective scanners (fast focus mechanisms) with QuickLockthread adapter and digital controller (objective not included)

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Image Faster

PIFOC® Objective Scanner Systems

� From the Inventor of Piezo-Z Scanners for Fast Z-Stack / Focus Control

� Choice of Travel Ranges / Controllers

• 100 µm or 400 µm

• Display Controller or Compact Controller

� Custom Tuning for Fastest Possible Speed (to 7 msec per Step)

� System Includes Everything You Need:

Mechanics, Controller, Adapters, Distance Cases

� Legendary PI Performance, Reliability & Robustness

� Compatible w/ all Major Image Acquisition Packages

� Capacitive Feedback as used in NIST Reference Class Nanometrology Systems

� ISO 9001 Quality from the Global Leader in Nanopositioning

� UL and CSA Certified

Z-Stack Imaging & Focusing:

Faster with Piezo Z-Scanners

PIFOC® piezo-actuated Z-scan-ners achieve typically 10 timeshigher focusing speed & preci-sion than motorized drives and

thus provide higher-qualityimages faster.

Scanning the Objective

The compact, light and stiffobjective scanner design pro-

face for extremely fast re-sponse and compatibility withall major image acquisitionpackages.

About PI

PI, the global leader in nanopo-sitioning, has been ISO 9001certified since 1994 andemploys more than 400 peopleworld wide. PI’s patented piezotechnology provides longerlifetime and higher perform-ance than any other piezodevice on the market. PIFOC®

was invented by PI 15 yearsago and has since become theglobal standard in objectivescanners, with thousands ofunits installed in the field.

Display Controller

Full featured E-665 PIFOC®

controller with display and additional manual control.36W piezo power.

PIFOC® 100D System PIFOC® 400D System

PIFOC® Objective Scanner

System Configurations:

Compact Controller

E-625 PIFOC® economical controller. 14W piezo power.

100 µm Scanning Range

P-721 PIFOC® scanner for ultra-fastZ-Stack imaging / focusing

400 µm Scanning Range

P-725 PIFOC® scanner for fastfocusing / Z-stack imaging

PIFOC® 100 System PIFOC® 400 System

All PIFOC® systems include the piezo objective scanner, a controller and two distance cases.To order, specify part number and objective thread (e.g. PIFOC® 100D, M25 x 0.75)

PI (Physik Instrumente) L.P.

East:

16 Albert Street Auburn, MA 01501Tel. +1 (508) 832 3456Fax +1 (508) 832 0506Email: info@pi-usa.ushttp://www.pi-usa.us

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vides very fast response anddoes not disturb the sample.

Compatible with Imaging Software

PIFOC® controllers come with ahigh-bandwidth analog inter-

West:

5420 Trabuco RoadSuite 100Irvine, CA 92620-5743Tel. +1 (949) 679-9191Fax +1 (949) 679-9292Email: info@pi-usa.ushttp://www.pi-usa.us

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