pimenoff joe 4808
DESCRIPTION
flexible electronicsTRANSCRIPT
Flexible electronics – a thin film approach
Joe PimenoffBeneq
“Thin films are thin material layers ranging from fractions of a nanometre to several micrometres in thickness.
Electronic semiconductor devices and optical coatings are the main applications benefiting from thin film
construction.”1
1 http://en.wikipedia.org/
Severe semantics
11.12.2013 Functional Materials. Tekes 2
Thin Film Equipment Lumineq DisplaysThin Film
Coating Services
www.beneq.com11.12.2013 Functional Materials. Tekes
3
11.12.2013 Functional Materials. Tekes 4
Company in brief
Established: 2005
Business units: - Thin Film Equipment- Thin Film Coating Services- Lumineq Displays
Markets addressed: All emerging and growing thin film markets,including solar photovoltaics, organic andflexible electronics and flat glass coating
Personnel: 140
Main office: Vantaa, Finland
Coating center: Espoo, Finland
Sales: China, Germany, USA and Russia
Sales network: 30+ sales representatives worldwide20+ distributors worldwide
Equipment for thin film coating
For industry and research
~ 9.5 s
11.12.2013 Functional Materials. Tekes 5
TFS 200
Thin films, why the big fuss?
Beneq markets
Market growth of thin film-enabled industries
Sourc
e:
IDTechEx,
Dre
sden, April, 2
008
11.12.2013 Functional Materials. Tekes 6
11.12.2013 Functional Materials. Tekes 7
Our strategy
Identifying your opportunity
Beneq – Turning Innovations into Success.
Finding the solutions Building the equipment
11.12.2013 Functional Materials. Tekes 8
New equipment project
New Equipment Project
Identify! Understand! Commercialize!
Customer A
Patent Patent
PatentPatent
$$$
Customer C
Customer B
Customer A
11.12.2013 Functional Materials. Tekes 9
Atomic layer deposition
ALD sequential (digital) deposition of Al2O3.
Properties
• Sequential deposition• Vapor phase
Benefits (e.g.)
• Conformal• Pinhole-free• Nanoscale accuracy
Goal: commercialize Roll-to-Roll ALD
Markets: OLED (display and lighting) and flexible PV
Driver 1 (OLED): encapsulation and barrier films needed to enable longer device lifetime
Driver 2 (OLED): reduce cost of ultra barrier films
Solution 1 (OLED): ALD, some 10’s of nm’s of Al2O3
Solution 2 (OLED): Roll-to-Roll ALD, based on spatial ALD concept
11.12.2013 Functional Materials. Tekes 10
Enter Functional Materials
11.12.2013 Functional Materials. Tekes 11
Milestones in scaling
Large area
Roll-to-roll
Batch
Large-areaALD
Large batch
> 10 m2/min> 0.5 m2/min> 0.05 m2/min
Functional Materials. Tekes 12
Key system features
11.12.2013
1. Vacuum R2R process
2. Web tensioned on drum
3. Proprietary ALD coating head
• Web 500 mm wide• Web speed 2 m/min
Film thickness uniformity target +/-5% reached
WVTR ≤ 5 • 10-4 g/(m2 day) @ 0.25 m/min (non-optimized process)
Functional Materials. Tekes 13
Al2O3 film performance
Position (cm)
Thickness(nm)
2 52,8
10 54,1
20 53,4
30 52,1
40 54,2
48 54,0
Uniformity: +/- 2%
11.12.2013
September 2012: ALD system sold to leading OLED customer for development of flexible OLED products
April 2013: ALD R&D system sold to Fraunhofer COMEDD for OLED thin film encapsulation (del. Q3/2013)
February 2013: World’s first scale-up Roll-to-Roll ALD system delivered to Advanced Surface Technology Research Laboratory (ASTRaL, Lappeenranta Univ. of Techn.)
July 2013: Roll-to-Roll ALD system sold to CPI in UK for demanding moisture barrier applications. (del. Q2/2014)
CPI: UK-based technology innovation hub and part of the High Value Manufacturing Catapult.
first goal: flexible barrier encapsulation
second goal: flexible plastic electronics
Q4/2013: Third Roll-to-Roll unit sold. Currently in build phase.
11.12.2013 Functional Materials. Tekes 14
Commercial outcome
11.12.2013 Functional Materials. Tekes 15
Technology outlook
Scaling to 1+ meter widths
Second generation system currently under construction
Collaboration with the Centre for Process Innovation (UK)
Facilitates rapid technology engagement with industry
Roadmap for R2R ALD
Growing beyond 500 mm, line-integration
Further web speed improvement
11.12.2013 Functional Materials. Tekes 16
Thank you!