plasma diagnostics using spectroscopic techniques timo gans york plasma institute
TRANSCRIPT
YPI – Low temperature plasma
activities• Plasma dynamics
& chemical kinetics• Advanced plasma diagnostics• Special emphasis on optical
diagnostics & laser spectroscopy
• Modelling & numerical simulations
• Technological exploitations
• Special emphasis on plasma medicine, plasma
etching, plasma deposition
Plasmas & other disciplines
• Optics• Atomic & Molecular Physics• Laser Physics• Surface Science• Electro Dynamics• Statistics• Numerical Simulations
• Electrical Engineering• Chemistry• Bio-medical Sciences
What is a plasma? ionised gas with variety of particles electrons positive and negative ions neutral particles
(atoms, molecules, radicals) excited species dust particles
What do we like to measure? densities distribution functions (temperatures) electric and magnetic fields
electrons
ionsradicals
neutralsbulkplasma
sheath
chemistry
synergisms
physics
po
we
r
electrons
ionsradicals
neutralsbulkplasma
sheath
chemistry
synergisms
physics
electrons
ionsradicals
neutralsbulkplasma
electrons
ionsradicals
neutralsbulkplasma
sheath
chemistry
synergisms
physics
po
we
rp
ow
er
Plasma – Complex Multi-Particle System
Multiphase interfaces:
Plasma – gas – liquid – surface (solid)
Multispecies:
Electrons, pos. ions, neg. ions, neutrals, radicals, excited species, photons
Multiscale problem – time:
Electron dynamics: ps – ns
Ion dynamics: 100 ns – μs
Plasma chemistry: 100 μs – ms
Surface chemistry: s – min
Multiscale problem – space:
Surface structures: nm – μm
Charged particle gradients: μm – m
Neutral particle gradients: 10 μm – m
Challenges & opportunities
Electrical diagnostics charged particles and fields
external current and voltage measurements+ simple+ non-intrusive– indirect– model based– global information only
probe measurements+ simple+ local information+ direct– model based– reactive environment (gases)– intrusive
How do we measure plasma quantities?
Mass spectrometry
neutral particles and ions
energy distribution functions
+ non-intrusive
+ direct
How do we measure plasma quantities?
– complicated in detail
– external measurement
– reactive gases
Optical diagnostics
in principle all plasma parameters+ non-intrusive
+ high temporal and spatial resolution
Plasma physics
Atomic & molecular physics
Optical diagnostics
How do we measure plasma quantities?
Emission spectroscopy+ passive+ simple+ robust– indirect– model based– data needed
Laser spectroscopy
+ direct+ highly reliable– active– involving– expensive
Combination of passive and active methods
Optical Diagnostics
line emission which emission lines (qualitative)
® species absolute intensities (calibration difficult)
® density of excited species line ratios
® robust model based analysis (this lecture!) line shapes (high experimental requirements)
® temperatures, fields, densities temporal variations
® plasma dynamics
continuum radiation spectral distributions absolute intensities
Optical Emission Spectroscopy (OES)
Complete thermodynamic equilibrium (CTE) homogeneity
unique temperature (Te = Ti = Tgas)
black body radiation
Maxwell – Boltzmann distribution
1
2 :Planck
3
2
Tkh
Bec
hI
Plasma concepts - CTE
Maxwell – Boltzmann distribution
population distributions
Tk
EE
g
g
n
n
B
jk
i
k
j
k exp
:Boltzmann
® Spectroscopy: line intensities and ratios
velocity distribution
Tk
mv
m
Tk
vn
dv
vdn
BB2
exp2
4)(
:Maxwell2
23
2
® Spectroscopy: line shape, e.g. Doppler effect
Plasma concepts - CTE
Main constraints and limitations
inhomogeneities
Planck
® Local thermodynamic equilibrium?
Plasma concepts - CTE
Local thermodynamic equilibrium (LTE) local parameters collision dominated
® equilibrium of collisions® no equilibrium of radiation
requirement
example (hydrogen arc)
ne = 1016 cm-3, Te 104 K
® (Ek - Ei)LTE 4 eV
® Partial LTE
312106.1 ikee EETn
Plasma concepts - LTE
Partial local thermodynamic equilibrium (PLTE)
over population of the ground state
LTE for excited states
constraints and limitations low electron densities
® Corona model
® collisional radiative models
Plasma concepts - PLTE
Corona model
model for plasmas with "low" electron densities (ne < 1013 cm-3)
applicable to most technological plasmas
far from thermodynamic equilibrium
most particles are in the ground state
electron impact excitation=
relaxation by radiation
(spontaneous emission)
Plasma concepts - Corona
iiki,Ph nAn
ni : population density of state i
Aik : spontaneous emission rate
nPh,i : photons per unit volume and time
Plasma concepts - Corona
Electron impactexcitation
Ground state n0
i
k
ik
Corona model
electron impact excitation=
relaxation by radiation
(spontaneous emission)
k
ikieeii AnTnEndt
dn,0
n0 : ground state density
Ei : electron impact excitation rate of state i,
(depending on ne and Te)
ikikA
1
i : radiative lifetime
Plasma concepts - Corona
dEEfm
EEnvnE
eieiei
2
0
i : electron impact excitation cross-section of state i
f(E): normalised EEDF
kik
ikik
i0iki0
kik
ikiiki,Ph
A
Aa
EnaEnA
AnAn
aik : branching ratio
RF - discharges
iRFT
1
(later) OES Resolved Phase 0 dt
dni
steady state of excited states
kik
ii
i
A
Enn
dt
dn 0 0
Plasma concepts - Corona
Additional excitation and de-excitation processes
Þ applicable to most technological plasmas
cascades from higher electronic states
one dominating or effective cascade state
ccii
ii0
i nAn
Endt
dn
Aci : transition rate from the cascade state c
nc : population densities of the cascade state c
nc = ?
Corona: cascade transitions
Electron impactexcitation
Ground state n0
i
k
ik
neglecting second order cascades:
ccii0iii
i
icc0cii0
i
cc0cc
c
cc0
c
EaEnn0dt
dn
nEnAEn
dt
dn
Enn0dt
dn
nEn
dt
dn
Determination of Ec is difficult(reabsorption!)
Corona: cascade transitions
Electron impactexcitation
Ground state n0
i
k
ik
excitation out of metastable states
?
,0
m
mimi
iccii
i
n
Enn
nAEndt
dn
long lifetimes of metastable states transport problem plasma wall interaction
Þ complex® avoid through proper choice of state i with small cross-
sections for excitation out of metastable states (small Ei,m)
® turn into diagnostics of metastable states by comparing with states excited out of metastable levels
Corona: stepwise excitation
collisional de-excitation (quenching)
A* + Q ?
especially important at high pressures!
qik
ikimimcciii knnAnEnnAEndt
dn ,0
qk
iki nkAA
kq : quenching coefficient with species Q
nq : density of species Q
Corona: collisional de-excitation
q : quenching cross-section, Tgas indepedent
Tgas : gas temperature
<v> : mean velocity
: reduced mass
gasBqqgasq
TkvTk
8
® Importance of Tgas
® Which quenching partners are present?
® What are the densities?
Corona: collisional de-excitation
selection rules for emission lines good quality of electron impact excitation cross-sections
(same source!) negligible excitation out of metastables small cascade contribution short lifetimes
competition with quenching high intensities high temporal resolution
known quenching coefficient (better small) no excitation transfer with other species no spectral overlap with other emission
Which emission line should I analyse?
N Knake, et al., APL, 93 (2008) 131503
Comparison with laser spectroscopy
K NIEMI, et al., Appl. Phys. Lett. 95 (2009) 151504