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Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

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Page 1: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

Plasmafysica & Stralingstechnologie

Elementary Processes in GasdischargesPlasma & Materials ProcessingCoherence & Quantum Technology

Page 2: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

• Plasma medium: common interest to the PPRT thrust area

• Same fundamental knowledge reservoir

• Plasmas investigated vary in density and temperatures

• Intrinsic nonequilibrium medium

• Utilize fundamental knowledge in various applications

• Very good example of applied science

Plasma Physics and Radiation Technology

Experiments and modeling approach

Page 3: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

Plasma Physics and Radiation Technology

• Physics and chemistry on short time and length scales

• Use of high power lasers for in situ and real time plasma and surface diagnostics

• Two groups:

Research on plasma-surface interactionPlasma & Materials Processing (PMP)

Research on homogeneous plasma processesElementary Processes in Gasdischarges (EPG)

Page 4: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

Plasma Physics and Radiation Technology

Tkm BeT

22 CQT

High phase space density plasmasCoherence & Quantum Technology

DeBroglie wavelength:

Phase space density:3Ten

Quantum Effects become important

Page 5: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

Plasma Physics and Radiation Technology

Science & Technology of Nuclear fusion

• High temperature, magnetically confined plasmas

• Group will have experimental focus

• Strong collaboration with national and international facilities world wide

Fusion courses as electives in Plasma track, but also:

Independent / interdisciplinary master

More details in separate presentation

Page 6: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

General compulsory courses: 3 courses (10 ECTS):- Electrodynamics- Computational physics- Complex Analysis

Compulsory track courses: 2 courses (8 ECTS):- Introduction to plasma physics- Lasers & Optics

Elective track courses: 3 courses (9 ECTS)

Technical and free elective courses: 4-5 courses (14 ECTS)

External traineeship project of 12 weeks usually outside TU/e (19 ECTS)

Master project 1 year (60 ECTS )

Plasma Physics and Radiation Technology

Page 7: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

General compulsory courses: 3 courses (10 ECTS):- Electrodynamics- Computational physics- Complex Analysis

Compulsory track courses: 2 courses (8 ECTS):- Introduction to plasma physics- Lasers & Optics

Elective track courses: 3 courses (9 ECTS)

Technical and free elective courses: 4-5 courses (14 ECTS)

External traineeship project of 12 weeks usually outside TU/e (19 ECTS)

Master project 1 year (60 ECTS)

Plasma Physics and Radiation Technology

Page 8: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

• Staff:• Prof.dr.ir. Gerrit Kroesen• Dr.ir. Eddie van Veldhuizen• Dr.ir. Sander Nijdam• Dr.ir. Jan van Dijk• Dr.ir. Job Beckers• Dr.ir. Ana Sobota• Prof.dr. Ute Ebert (CWI)• Prof.dr. Marco Haverlag

(Philips)• Prof.dr. Vadim Banine (ASML)

Elementary Processes in Gas Discharges (EPG)

• Light and photons: Efficient lamps and EUV sources• Environmental technology: using plasmas for air / water cleaning• Biomedical technology: sterilisation; new medical treatments

Page 9: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

Plasmas in lab and industry (1)

Elementary Processes in Gas Discharges (EPG)

Page 10: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

Plasmas in lab and industry (2)

Plasmas in lab and industry (2)

Elementary Processes in Gas Discharges (EPG)

Page 11: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

Stereo-photography of Corona discharges

S. Nijdam et al., Appl. Phys. Lett. 92 101502 (2008)

Page 12: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

Coherence & Quantum Technology (CQT)

• Extreme states of matter: Ultra-cold & ultra-hot, plasmas & gases;• Laser manipulation of atoms, electrons and ions;• Atom, electron & ion beams for femto-nano science & engineering.

• Staff:• Prof. Jom Luiten• Prof. Ton van Leeuwen • Dr. Servaas Kokkelmans • Dr. Peter Mutsaers• Dr. Edgar Vredenbregt• Dr. Seth Brussaard

Page 13: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

Coherence & Quantum Technology (CQT)

Ultra-Cold Electron & Ion Beams:

• Laser cooling & trapping;• Femtosecond (10-15 s) laser physics;• Ultra-low temperature

(0.001 - 10 kelvin) plasmas;• Femtosecond electron microscopy;• Sub-nanometer ion beam drilling &

milling.Edgar Vredenbregt, Jom Luiten, Peter Mutsaers

Page 14: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

Ultracold electron & ion beams

15 K

Electron temperature

e-

ions

V

I I

Taban et al., to be published

Ultracold plasmas

Taban et al., Phys. Rev. Special Topics, 11, 050102 (2008)

Page 15: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

Theory of Quantum Gases:

• Atoms trapped in an optical lattice;• Superfluidity of ultra-cold (nano-kelvin)

Fermi and Bose gases;• Quantum Plasmas & Beams.

Servaas Kokkelmans

Coherence & Quantum Technology (CQT)

Page 16: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

Femtosecond structural dynamics“The (bio)molecular movie...”

The poor man’s X-ray Free Electron Laser

Femtosecond electron imaging

Phase space density = Beam Brightness

Page 17: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

Plasma & Materials Processing (PMP)

• Staff:• Prof.dr.ir. Erwin Kessels • Dr. Ageeth Bol• Dr. Adriana Creatore• Dr. Richard Engeln• Prof.dr. Ruud Schropp (part-time, ECN)• Prof.dr. Fred Roozeboom (part-time, TNO)• Prof.dr.ir. Richard van de Sanden (part-time,

DIFFER)• Understanding of plasma-surface interaction• Nanoscale processing of materials• Renewable energy technologies & nanoelectronics

Page 18: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

Plasma & Materials Processing (PMP)

Processing technologies Application areas• Atomic layer deposition• Plasma-enhanced CVD• Plasma etching• Atmospheric plasma

processing

• Nanoelectronics• Solar cells & solar fuels• Flexible electronics• Sensors, batteries & fuel cells

Expertise• Ultrathin film technologies• Nanoscale processing• Plasma surface interaction• Plasma & surface diagnostics• Advanced spectroscopy

Page 19: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

Atomic-scale deposition for solar cells

Ultrathin films by (plasma-enhanced) atomic layer deposition (ALD)

Q-cells Q.ANTUM solar cell

Excellent surface passivation of high-efficiency solar cells

Novel nanotechnology Implementation in industry

Page 20: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

P(w, 2w) = e0c(1)E(w) + e0c(2):E(w) E(w) + e0c(3):E(w) E(w) EDC +...

Nonlinear surface spectroscopy

Ultrafast high-intensity laser system

Electric field-induced second harmonic generation

Polarization with non-linear contributions:

Page 21: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

Waar komen onze afstudeerders terecht?

• Lokale industrie (ASML, Philips, NXP, FEI)

• Instituten (TNO, ECN, etc.)

• Promotieplaatsen bij diverse universiteiten (ook buitenland via de verschillende zeer internationaal georienteerde groepen)

/ Applied Physics

Page 22: Plasmafysica & Stralingstechnologie Elementary Processes in Gasdischarges Plasma & Materials Processing Coherence & Quantum Technology

/ Applied Physics

• Plasma medium: common interest to the PPRT thrust area

• Same fundamental knowledge reservoir

• Plasmas investigated vary in density and temperatures

• Intrinsic nonequilibrium medium

• Utilize fundamental knowledge in various applications

• Very good example of applied science

Plasma Physics and Radiation Technology

Experiments and modeling approach