presented by: jung cho flex-e materials - aimcal€¦ · flex-e materials . introduction. curved...
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![Page 1: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple](https://reader031.vdocuments.net/reader031/viewer/2022013003/5f2c44e4d5b9de0bc5664613/html5/thumbnails/1.jpg)
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
![Page 2: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple](https://reader031.vdocuments.net/reader031/viewer/2022013003/5f2c44e4d5b9de0bc5664613/html5/thumbnails/2.jpg)
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Contents
Introduction
Markets
OLED Structures
Technology
Fabrication Process
Evaluation (Microstructure & etc)
Summary
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Foldable Rollable
[OLED Display : Rigid Flexible ]
• Light & unbreakable materials
• Easy to handle (folding & rolling)
• Free shape (rounding type)
Introduction
[Merit of Rigid OLED Display]
• Cheap product cost
• Mass production
• Free size & Large area display
![Page 4: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple](https://reader031.vdocuments.net/reader031/viewer/2022013003/5f2c44e4d5b9de0bc5664613/html5/thumbnails/4.jpg)
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Introduction
Curved & Bendable Foldable & Rollable Stretchable
Terms
Applications
Benefits
- Simple structure- Large area shaping
- Periodically transformation- Easy displacement
- Random change- Bio-medical insertion
- Exclusive design- Increased visible immersion- High reslolution
- High portability- Unlimit from phone to tablet- Simple installation (rollable)
- Realized free form-factor- Multi-folding - Customized display
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Market trends of Display Type
• Galaxy X series : 8.94 inch out-folding type
• Huawei Mate X : 8.4 inch 4K in-folding type
(dual display, fingerprint)
• Apple : plastic display (under testing)
Y2016 ~ Launch to Curved (LG signature TV)
Y2020 ~ Dominant market to Foldable Display (12 ~ 14 inch Tablet)
Y2025 ~ established to Rollable Display (Signage & Public Display)
(Citation : HIS Market 2016)
Foldable
Markets
Rollable
Market size of foldable phone
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
[Requirements of Products]
• Degrees of Water vapor transport ratio as same as glass(OLED+O2 = Degradation) : 10-4 ~ 10-6 g∙cm/day
• Degrees of transmittance as same as glass : PET 90% ↑, COP 92% ↑
• Degrees of Anti-reflection ratio : reflectance 1.0% ↓
Anti-reflection
Film Substrate
Sputter layer
Sputter layer
Monomer layer
Protection layer
Encapsulation Barrier Film
WOLED + MOx TFT
Flexible Color Filter
Touch Film
Substrate (PI Film)
Cover Plastic
Carrier Film
FEMFront Glass
OLED (RGB)
Color Filter
Oxide TFT
Cover Plastic
Back Glass
Flexible OLED Structure
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Barrier Encapsulation
Glass
Polyimide
Oxide TFT
OLED
PET
Adhesive (weak)
PC, COP or PET film
SiO2ITO
- Curl protection films before lift off glass- 188 micro PET film - 3 ~ 10 g adhesive properties
- Enhanced barrier properties after glass remove- Transparent EMI shield properties- Properly adhesiveness between PI and ITO layer
weak to attack from water vapor or oxygen
Flexible OLED Process
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
[R2R sputter system]
▶ Main : SIO2 and other various oxides sputtering of single or mulyi-layer using plasma & vacuum technology
▶ Key technology :
- Low temperature sputtering (Polymer Film base)
- Gas distribution system (Optical & electrical properties decides)
- Detail thickness Uniformity Controls (Max 1,600mm width within 3%)
- Roll to Roll tension control (minimize film damage )
- Adhesion promotion between substrate film and coating layer
- Optical design and simulation technology by Mclaud
Key Technology
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Conventional Process FEM Process
CoatingDrying
Repeat
Vacuum
wetInclusion
Defect
Scratch
Under coatingPET film
Oxide/Nitride
Under coatingPET film
Oxide/Nitridemonomer
Under coatingPET film
Oxide/Nitridemonomer
Oxide/Nitride
Vacuum
Cover coat
Key process
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
High Barrier structure
Over-all Structure
Layer 1
Layer 2
Layer 3
Layer 4
Layer 5H/C
PET
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
High Barrier Structure
FEM Inorg./Org./Inorg. Competitor Barrier Film
Structure(SEM)
OTR*(cc/㎡day) below 5 X 10-5 5 X 10-3
WVTR*(g/㎡day) 5 X 10-4 5 X 10-2
PET(12㎛)+Al(30㎚)
PET(12㎛)+Al(30㎚)
PET(12㎛)+Al(30㎚)
LLDPE (50㎛)
K-PET (12.5㎛)
AL foil (7㎛)
Ny (25㎛)
LLDPE (50㎛)
* OTR (Oxygen Transmission Rate), WVTR (Water Vapour Transmission Rate)
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
1. Spikes : plastic & handling2. Scratches : handling3. Pits – arcing, possible contamination
of plastics4. Barrier cracking : local adhesion
issues (pre-contamination
Reliability Test Results
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials A
R
TOUCH
SUBSTRATE
BARRIER
Out
Structure of multi-functional barrier
encapsulation films
PETOxide layer
Nanostructuredoxide
oxide
multi layer barrier film
polymer
Transparent Flexible OLED (under development)
Permeation barrier degree : 10-2~10-5 g/m2/day (encapsulation properties)
Silver nanowire type capacitive touch panel systems with COP substrates
Anti-reflection layers by multi-layer sputter coating (5 or 7-layers)T: 94.5%, R: 0.13%, Haze 0.65% (substrates : PET)
Additional anti-finger, anti-smuggles or anti-corrosion coatings
Functional Layers for Flexible OLED
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Water or Oxygen transportation mechanism
Vacuum coating
Environmental Test
50 nm
Inorganic
Inorganicmonomer
Monomer
Wet coating
Inorganic
Inorganic
Inorganic
Inorganic
Competitor
FEM
<Competitor> <FEM>
Water penetration
Permeation Blocking Mechanism
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Slide HeaderPET PC/PMMA COP
T
T (%) 90.2 89.46 91.6L* 96.1 95.77 96.6a* -0.02 -0.01 0.01b* 0.26 0.49 0.13
Haze 0.46 0.14 0.32
R
R (%) 9.41 10.93 9.21L* 36.7 39.46 36.3a* -0.78 -0.5 -0.49b* 0.43 -1.7 -0.7
WVTR (g/m2·day) OTR (g/m2·day)
PET 5.6 14.1
PC/PMMA 4.2 13.6
COP 2.1 12.0
400 450 500 550 600 650 7005
10
15
80
90
Tran
smitta
nce &
Refl
ectan
ce (%
)
Wavelength (nm)
PET Isotropic PC COP
Optical properties
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Barrier Properties
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Slide HeaderFlexibility & Mechanical properties
Tensile strength : 231 MPaElongation : 65 %
Tensile strength : 159.3 MPaElongation : 82 %
ITO Film
Bending/Rolling Axis
ITO Film
Bending Axis
ITO Film
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Inorganic layer Configuration
Sample No. SiOx (1) SiOx (2) SiOx (3)
투과율
T (%) 90.04 90.77 89.15L* 96.01 96.32 95.64a* 0.49 1.07 0.91b* 0.41 1.22 2.33
반사율
R (%) 10.45 9.57 9.86L* 38.64 37.06 37.6a* -2.51 -5.49 -5.39b* 1.57 -0.5 2.74
400 450 500 550 600 650 700
5
10
15
70
80
90
Tran
smitt
ance
& R
eflec
tanc
e (%
)
Wavelength (nm)
SiOx (1) SiOx (2) SiOx (3)
< SiOx (1) > < SiOx (2) > < SiOx (3) >
Thickness Control od Silicone Oxide for low surface roughness
Optical Properties of Silicone Oxide
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Surface roughness
Surface Characteristics : Normal
Surface Characteristics : After Treatment
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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Summary
1. Roll-to-Roll coating Barrier Film by 500 mm wet & dry coating systems
- Formation of Inorganic / Organic / Inorganic multi-layer with vacuum conditions
- Surface roughness control and hydrophilic multi-layer condition of substrate to enhance moisture barrier property
2. Improvement of transmittance and optical characteristics
- Since it is difficult to secure the optical characteristics as a basic process, it is possible to lower the reflectance
Improved transmittance and other optical properties by coating the optical control layer on the opposite side of the
barrier film
- Developed non-yellowish barrier film by improving colors such as a * and b *
3. Development of multi-layer process technology
- Monolayer high density thin film conditions to replace common wet organic coatings
- Development of facility concept to coat wet and dry on-line at one time
- Establishment of process to impregnate nano-particles finally after implementing multilayer film by dry process