Romaric

Products & Services

Overview

January 24, 2013

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Corporate Overview

� Founded 2001� Headquarters: Salt Lake City, Utah� Employees: 7� ISO Compliant since 2003� Strategic Partnership with Systema

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Where is SLC,UT?

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Core Competencies

� Material Control System (“MCS”)

� MES Integration

� AMHS, Equipment and PV Emulation

� SECS/GEM Equipment Interfaces

� FAB Optimization Assessments & Services

� Low Level AMHS Controls

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Products

Production Products

� Roma MD™ (Material Control System)

� RACE Track™ (Vehicle Controller)

� R-SPC™ (Stocker Purge Controller)

Test Environment Product

� RES-Q™ (Equipment & Factory Emulation)

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RACE™“Romaric Automation Control Engine”

NODEManager

CACHEManager

LOGManager

TRANSACTManager

EVENTManager

ACCESSManager

STATSManager

CYCLEManager

SCHEDManager GUI

HIGH THROUGHPUTJAVA 6 FRAMEWORK

DB

CARRIERManager

HOST I/F

Device Managers / Communication Drivers

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RACEThroughput Testing

� Supported 200K AMHS MPH� Roma MD with RES-Q

� Nearly 10x throughput capacity of the busiest semiconductor fabs in the world

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R A C E ™

Application LogicMCS Logic

R O M A M D ™R E S - Q ™

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Roma MD™

� “Romaric Material Dispatcher”� Full-featured MCS

� IBSEM Interface (E82)

� Stocker SEM Interface (E88)

� Upgrade path for older MCS systems

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RACE Track™

� Vehicle Controller

� Upgrade for Daifuku MPC & PRI AeroTrak� Improved visibility to material movement

� Vehicle selection / control optimizations

� Enhanced statistical reporting

� Centralized control

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R-SPC™

� “Romaric’s Stocker Purge Controller”� Nitrogen or Clean Dry Air

� Reticle Stockers

� PLC Interface and controls

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RES-Q™

� “Romaric Emulation System for Quality”� Factory-In-A-Box

� AMHS Equipment

� Process / Metrology Equipment

� Manufacturing Execution System (MES)

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RES-Q™

Advantages of Equipment Emulation

� Pre-Installation Validation / Testing

� Parameter / Configuration Tuning

� Off-Line Troubleshooting

� Throughput Testing

� Reliability Testing

� “What If” Scenarios

� Training

Romaric

Case Study #1

AMHS Assessment

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200mm Factory

� Daifuku AMHS Equipment

� ~ 35 Stockers

� ~ 50 Vehicles

� MCS from Auto-Soft / Brooks/ AMAT

� Max Throughput: 450 MPH

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Problem – 600 MPH Needed

� Currently 93% vehicle utilization at 450MPH

� Need to increase throughput to 600 MPH (33%)

� Desire normal vehicle utilization of 70%

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Solution Options

� Find means to decrease vehicle utilization to 53% at 450 MPH (43% improvement)

OR� Invest $$MM in additional AMHS

equipment

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Software Optimization Areas

� Route Selection

� Route Priority Settings

� Input to Track Port Direct Moves

� Shelf Selection

� Stocker Robot Efficiency

� Command Buffering

� Alternate Storage

� Fewer Error Conditions, Bug Fixes

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Anatomy of Stocker-Stocker Move

OperatorPick/Place

Index onConveyor

Input PortMove Queue

RM Moveto Shelf

Idle onShelf

Shelf MoveQueue

RM Moveto TFE

Wait forVehicle

TFETransfer

VehicleTravel

Wait for TFEDouble Switch

TFETransfer

TFE MoveQueue

RM Move toShelf/Output

1 2 3 4 5 6 7

8 9 10 11 12 13 14

Red indicates optimization through MCS software is possible

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Current Average Move Times(Fully Loaded, 450 MPH)

0 5 10 15 20 25 30 35

MINUTES

Average Move Time: 32.2 Minutes

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Observation

� No Statistical Reports Available

� Wrote Utilities to Read Log Files

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Actions Taken

� Reviewed AMHS Configuration in MCS Software and Made Modifications

� Reviewed MCS Parameter Settings and Made Modifications

� Wrote Some Utilities

� Made Suggestions to AMHS and MCS Vendors (not included in results)

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Improvement in AvgMove Time

0 5 10 15 20 25 30 35

MINUTES

Average Move Time: 19.8 Minutes

Savings: 39%

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Other Notables

� 640 MPH at 93% Vehicle Utilization (42% Improvement)

� 587 MPH at Desired Operating Level of 70% Vehicle Utilization

� About $1500 per each % Improvement

� Could Still Look at Specific Stocker-Stocker Movements

Romaric

Case Study #2

RACE Track

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200mm Factory

� IBSEM Track Controller (MCP7)

� Increased Throughput by 46% by replacing MCP7 with RACE Track

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Wait Time Waste

� Participation with ISMI

� Many areas of waiting and waste when transporting and storing wafers, especially in older fabs

� Romaric can help identify areas of improvement and the solutions

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Questions / Answers