proton transport through two-dimensional materials

119
Proton transport through two-dimensional materials A THESIS SUBMITTED TO THE UNIVERSIY OF MANCHESTR FOR THE DEGREE OF DOCTOR OF PHILOSOPHY IN THE FACULTY OF ENGINEERING AND PHYSICAL SCIENCES Sheng Hu SCHOOL OF PHYSICS AND ASTRONOMY 2014

Upload: others

Post on 01-Jan-2022

7 views

Category:

Documents


0 download

TRANSCRIPT

Page 1: Proton transport through two-dimensional materials

Proton transport through

two-dimensional materials

A THESIS

SUBMITTED TO THE UNIVERSIY OF MANCHESTR

FOR THE DEGREE OF DOCTOR OF PHILOSOPHY

IN THE FACULTY OF ENGINEERING AND PHYSICAL SCIENCES

Sheng Hu

SCHOOL OF PHYSICS AND ASTRONOMY

2014

Page 2: Proton transport through two-dimensional materials

`

2

Page 3: Proton transport through two-dimensional materials

`

3

CONTENT

List of Figures 5

List of Tables 9

Abstract 11

Declaration 13

Copyright 15

Acknowledgements 17

Introduction 19

1 Fundamentals of graphene and 2D materials............................................................................24

1.1 Fundamentals of graphene .......................................................................................................... 24

1.1.1 Carbon materials ................................................................................................................... 24

1.1.2 Graphene lattice and band structure ................................................................................... 26

1.1.3 Basic electronic properties in graphene ............................................................................... 29

1.2 Two dimensional materials beyond graphene ............................................................................ 32

1.2.1 Boron nitride ......................................................................................................................... 33

1.2.2 Molybdenum disulfide .......................................................................................................... 34

1.3 Matter transport properties of 2D materials ............................................................................... 36

2 Experimental techniques and device fabrication .......................................................................38

2.1 Fabrication of layered materials by mechanical cleavage ........................................................... 38

2.2 Assembly of 2D membranes based proton conductive devices .................................................. 45

2.2.1 Substrate fabrication ............................................................................................................ 46

2.2.2 Transfer techniques .............................................................................................................. 53

Page 4: Proton transport through two-dimensional materials

`

4

2.3 Proton transport device fabrication ............................................................................................ 56

3 Proton transport through 2D materials in Nafion based solid systems ...................................... 59

3.1 Introduction ................................................................................................................................. 59

3.2 Solid proton medium and source ................................................................................................ 60

3.3 Sample fabrication and measurement system ............................................................................ 62

3.4 Results.......................................................................................................................................... 64

3.5 Conclusion ................................................................................................................................... 70

4 Pt catalyzed proton transport through 2D materials ................................................................. 71

4.1 Introduction ................................................................................................................................. 71

4.2 Device fabrication ........................................................................................................................ 72

4.3 Results.......................................................................................................................................... 74

4.4 Proton transport introduced H2 flow ........................................................................................... 79

4.5 Conclusion ................................................................................................................................... 83

5 Proton transport through 2D materials in liquids ...................................................................... 85

5.1 Introduction ................................................................................................................................. 85

5.2 Liquid/liquid interface method .................................................................................................... 86

5.2.1 Immiscible interface ............................................................................................................. 86

5.2.2 Bipolar cell ............................................................................................................................ 88

5.3 Sample fabrication and measurements ....................................................................................... 89

5.4 Results.......................................................................................................................................... 92

5.5 Conclusion ................................................................................................................................. 102

5.6 Supplementary experiments ..................................................................................................... 102

6 Summary .............................................................................................................................. 106

6.1 Conclusion ................................................................................................................................. 106

6.2 Outlook ...................................................................................................................................... 107

Reference 110

Page 5: Proton transport through two-dimensional materials

`

5

LIST OF FIGURES

1 Carbon allotropes of different dimensionalities .......................................................................... 21

1.1 Graphene orbital hybridization .................................................................................................... 25

1.2 Graphene lattice and Brilouin zone .............................................................................................. 25

1.3 Electronic band structure of graphene ........................................................................................ 28

1.4 Electric field effect in graphene ................................................................................................... 30

1.5 Boron nitride lattice structure...................................................................................................... 34

1.6 Lattice and band structure of molybdenum disulfide .................................................................. 35

2.1 Procedures of producing graphene flakes ................................................................................... 39

2.2 Optical image of thin graphene flakes ......................................................................................... 40

2.3 Large scale graphene production methods .................................................................................. 42

2.4 Optical images of boron nitride and molybdenum disulfide ....................................................... 43

2.5 AFM images of various 2D materials ........................................................................................... 44

2.6 Raman spectra of graphene ........................................................................................................ 45

2.7 Process of photolithography and development ........................................................................... 48

2.8 Reactive ion etching process ........................................................................................................ 50

2.9 KOH wet etching ........................................................................................................................... 52

2.10 Polymer based wet transfer ......................................................................................................... 54

2.11 Procedures of dry transfer ........................................................................................................... 55

2.12 Proton transport device fabrication procedures ......................................................................... 58

3.1 Nafion and its proton conductive mechanism ............................................................................. 60

3.2 Unit cell of metallic palladium with octahedral sites occupied by H atoms ................................ 61

3.3 Diagrams of Nafion contacted proton transport devices ............................................................ 63

3.4 Schematics of experimental system and proton transport mechanism in Nafion sample .......... 64

Page 6: Proton transport through two-dimensional materials

`

6

3.5 Proton transport I-V characteristics of 2D materials ................................................................... 65

3.6 Electron density within 2D materials hexagonal rings before and during proton transition ...... 66

3.7 Proton conductance across thin BN flakes .................................................................................. 67

3.8 Proton conductance histogram of various 2D materials ............................................................. 68

3.9 Nafion proton conductivity on 2µm-in-diameter hole ................................................................ 69

4.1 Electron beam evaporation system ............................................................................................. 73

4.2 Diagrams of Pt catalyzed devices ................................................................................................. 74

4.3 Proton conductance histogram of various 2D materials with Pt catalyst.................................... 75

4.4 Proton conductive I-V characteristics of BN thin flakes with Pt catalyst ..................................... 76

4.5 Ar blister AFM on single layer graphene with and without Pt catalyst ....................................... 77

4.6 Ar leak rate of single layer graphene with and without Pt catalyst ............................................. 79

4.7 Optical images of H2 bubbles trapped between metal film and graphene flakes ....................... 80

4.8 Metal contact deposition and lift off ........................................................................................... 81

4.9 Diagrams of hydrogen flow measurements: devices fabrication and measurement system ..... 81

4.10 Hydrogen flow rate as a function of current across graphene flakes .......................................... 82

5.1 Proton transport current across DCE/aqueous immiscible interface .......................................... 87

5.2 Diagrams of bipolar cell system ................................................................................................... 88

5.3 Procedures of PDMS mask fabrication......................................................................................... 90

5.4 Mechanical transfer of PDMS mask ............................................................................................. 91

5.5 Schematic diagram of proton transport through 2D materials at L/L interface .......................... 92

5.6 Histogram of proton conductance through various 2D materials in HCl aqueous interface ...... 93

5.7 Graphene proton transport devices geometry and images......................................................... 94

5.8 I-V characteristics of various thicknesses graphene at the aqueous/aqueous interface ............ 96

5.9 Chemical structure of 1,2-DCE and 1-[Bis(trifluoromethanesulfonyl)methyl]-2,3,4,5,6-

pentafluorobenzene. ................................................................................................................... 98

5.10 Proton transport I-V characteristics of graphene at the DCE/aqueous interface with various

acid concentration ...................................................................................................................... 98

5.11 I-V characteristics of various thicknesses graphene flakes at the DCE/aqueous interface ......... 99

5.12 I-V characteristics of single layer MoS2 at both aqueous/aqueous and DCE/aqueous

interface .................................................................................................................................... 100

Page 7: Proton transport through two-dimensional materials

`

7

5.13 I-V characteristics of various thicknesses BN flakes in HCl solution .......................................... 101

5.14 Water electrolysis at various thicknesses graphene flakes ....................................................... 102

5.15 Proton transport through single layer graphene at the DCE/aqueous interface with H+ at the

aqueous phase ........................................................................................................................... 103

5.16 Proton transport I-V of single layer graphene at acetonitrile/aqueous miscible interface ....... 104

6.1 Electron transport through graphene in bipolar cell system ..................................................... 108

Page 8: Proton transport through two-dimensional materials

`

8

Page 9: Proton transport through two-dimensional materials

`

9

LIST OF TABLES

Table 2.1 Spin coating parameters of photoresist 48

Table 2.2 Parameters of RIE etching recipes 50

Page 10: Proton transport through two-dimensional materials

`

10

Page 11: Proton transport through two-dimensional materials

`

11

ABSTRACT

Two-dimensional (2D) materials, referring to materials being just one atom thick, prove to

be attractive not only in fundamental research but also in applications. Graphene, a single

layer of carbon atoms arranged in hexagonal rings, is just the first among other materials

(including hexagonal boron nitride and molybdenum disulfide) that could be isolated into

mono-atomic layers.

The presented thesis investigates proton transport through atomically thin two-dimensional

materials. While the electronic, optical and mechanical properties of graphene and other 2D

materials have been intensely researched over the past decade, much less is known on the

interaction of these crystals with protons. It has been reported that most of the defect free

two dimensional materials are impermeable to nearly all gases, molecules and ions.

Whether proton, the smallest positively charged ion, could transport through two

dimensional materials at a low energy level remains unknown.

This work investigates proton transport through 2D materials, including graphene,

hexagonal boron nitride and molybdenum disulfide, in two different systems: Nafion/Pd

solid system and liquid/liquid interface system, both of which provided consistent results.

Our results suggest that proton can transport through the interatomic spacings in the lattice

of single layer BN and graphene, while single layer MoS2 is impermeable to protons. Single

layer BN is the most conductive to protons among the 2D materials investigated in this

thesis. Lower proton conductance of graphene is due to its delocalized π electrons while

proton impermeability of MoS2 is due to the three atomic layers structure.

Page 12: Proton transport through two-dimensional materials

`

12

Moreover, proton transfer is greatly facilitated by the deposition of platinum nanoparticles

on the proton conductive 2D membranes to such a degree that platinum decorated BN

seems to present negligible resistance to the transfer of protons through its lattice.

Page 13: Proton transport through two-dimensional materials

`

13

DECLARATION

The University of Manchester

PhD by published work Candidate Declaration

Candidate Name: Sheng Hu

Faculty: Engineering and Physical Science

Thesis Title: Proton transport through two dimensional materials

Declaration to be completed by the candidate:

I declare that no portion of this work referred to in this thesis has been submitted in

support of an application for another degree of qualification of this or any other university

or other institute of learning.

Signed: Date:

Page 14: Proton transport through two-dimensional materials

`

14

Page 15: Proton transport through two-dimensional materials

`

15

COPYRIGHT

The author of this thesis (including any appendices and/or schedules to this thesis)

owns any copyright in it (the "Copyright")1and s/he has given The University of Manchester

the right to use such Copyright for any administrative, promotional, educational

and/or teaching purposes.

Copies of this thesis, either in full or in extracts and whether in hard or electronic

copy, may be made only in accordance with the Copyright, Designs and Patents Act 1988

(as amended) and regulations issued under it or, where appropriate, in accordance with

licensing agreements which the University has from time to time. This page must form

part of any such copies made.

The ownership of certain Copyright, patents, designs, trade marks and other intellectual

property (the “Intellectual Property”) and any reproductions of copyright works in

the thesis, for example graphs and tables (“Reproductions”), which may be described in

this thesis, may not be owned by the author and may be owned by third parties. Such

Intellectual Property and Reproductions cannot and must not be made available for use

without the prior written permission of the owner(s) of the relevant Intellectual Property

and/or Reproductions.

Further information on the conditions under which disclosure, publication and

commercialization of this thesis, the Copyright and any Intellectual Property and/or

Reproductions described in it may take place is available in the University IP Policy (see

http://documents.manchester.ac.uk/DocuInfo.aspx?DocID=487), in any relevant Thesis

restriction declarations deposited in the University Library, The University Library’s

regulations (see http://www.manchester.ac.uk/library/aboutus/regulations) and in The

University’s policy on Presentation of Theses.

Page 16: Proton transport through two-dimensional materials

`

16

Page 17: Proton transport through two-dimensional materials

`

17

ACKNOWLEDGEMENTS

First of all, I would like to acknowledge my supervisor Prof. Sir Andre Geim for accepting me

as his student and giving me a chance of working in his world class Lab and research group. I

have learnt a lot from him. He is kind to give his expert opinion to help with any problems I

have faced during my three years PhD study while his unique ideas and wide knowledge

have inspired me a lot.

I am thankful to my Advisor Dr. Fredrik Schedin who provided me with tremendous help of

operating clean room facilities and suggestions for sample fabrication. I also thank Prof.

Robert Dryfe for his help in introducing me into a deep insight to electrochemistry with

patience.

Sincere thanks goes to Dr Artem Mishchenko, Dr. Thanasis Georgiou, Dr. Matěj Velický for

proof reading this thesis. I want to give my special acknowledgements to Danil Bukhvalov

and Mikhail. I. Katsnelson for their help with electron density simulation.

Many thanks to all my group members especially Dr. Rashid Jalil, Dr. Alexander Zhuhov,

Marcelo Lozada-Hidalgo, Dr. Yang Cao, Dr Axel Ackman, Tu Jhih-Sian, Dr Branson Belle, Dr.

Ernie Hill, Dr Pete Blake, Yu Geliang, for their help and sharing their experimental skills.

Page 18: Proton transport through two-dimensional materials

`

18

Page 19: Proton transport through two-dimensional materials

`

19

INTRODUCTION

Proton transport through membranes is fundamental to many biological and technical

processes ranging from ATP synthesis [1] to proton exchange membrane fuel cells (PEMFC)

[2]. The concept of proton transport in water by hopping from one water molecule to the

next via the Grotthuss mechanism [3] has got theoretical and simulation supports [4, 5, 6].

Inspired from this, artificial materials such as Nafion [7], in which protons hopping along a

sulfur chain, were made and they are widely used in PEMFCs – in fact PEMFCs is the most

important application of a proton exchange membrane. After first being applied in USA’s

space craft in 1960s, PEMFCs were quickly applied as the main power for cars, submarines,

and even power plants. Due to its pollution free and friendly working environment

properties, PEMFCs becomes competitive in the area of future energy. The global PEMFC

market is predicted to be 16 billion by 2016 [8]. However, as proton conductors based on

the Grotthuss or “vehicle” mechanism [9, 10], these materials have to work in aqueous

phase. The high cost of membrane fabrication is a problem as well. The limitations spark a

run of looking for new materials and new proton transport mechanisms.

In 2004, Novoselov et.al from the University of Manchester shocked the scientific world. An

atomically thin carbon sheet with carbon atoms arranging themselves in hexagonal rings,

called graphene, was mechanically exfoliated from bulk graphite and electrically

characterized [11]. As the first truly isolated two dimensional material, graphene made the

last missing piece of the carbon materials family: three dimensional graphite known as a

conductive material for centuries, while zero-dimensional fullerenes and one-dimensional

carbon nanotubes were synthesized in 1980s and 1990s, respectively [12, 13] – actually

graphene can be wrapped up into 0D fullerense, rolled up into 1D carbon nanotubes or

Page 20: Proton transport through two-dimensional materials

`

20

stacked into 3D graphite, from a sense of which graphene is a fundamental building block of

all the graphitic materials [14].

Mechanical exfoliation of graphene with a piece of adhesive tape [11] facilitated graphene

research as it is an easy accessible approach of fabricating graphene, promoting researchers

to investigate this new and amazing material. This leads graphene to be the new star in the

2010 Physics Noble Prize competition. During years after graphene’s first isolation, unveiling

its properties has been one of the focuses in the scientific world: graphene has unique

electronic properties because of its two dimensional nature [11, 14-19]; it is the strongest

material ever measured in the Universe [20] but still remains to be highly stretchable [21,

22]; it has extraordinary thermal [23] and electrical [24] conductivity; it adsorbs 2.3% light

[25] while being just one atom thick. The study of electronic properties of graphene reveals

that it has linear energy dispersion near the charge neutrality point and its carriers can be

described as massless Dirac fermions [15, 26]. Graphene shows an ambipolar field effect,

that its carriers can be tuned continuously from electrons to holes by applying an electric

field, and the carrier concentration can be tuned up to 1013cm-2 by varying gate voltage [15].

All of these fascinating properties make graphene a promising and interesting material for

future technology applications.

Perhaps the most intriguing feature of graphene is its transport properties. Electronic

transport in graphene, both planar and vertical, attracted much of the initial interest due to

graphene’s unique conical electronic dispersion [17, 27]. In line with miniaturization

requests in modern electronic fabrication, graphene’s unusual electronic properties paved

the way for using it in sub-micron electronic devices fabrication.

Page 21: Proton transport through two-dimensional materials

`

21

Fig.1 Graphene is the basic building block of graphitic materials. It can be wrapped into 0D fullerene,

rolled up into 1D carbon nanotube or stacked into 3D graphite. Adapted from [14].

Soon after, molecular, ionic and gas transport were all investigated, revealing that despite

just being one atom thick, graphene’s hexagonal lattice is fully populated with delocalized

electrons, making such particles, including helium, transport through graphene membrane

impossible. This allowed ways of applying graphene of acting as compliant membrane

pressure sensors and barriers of two or more distinct phases [22].

On the other hand, there are efforts concentrating on utilizing graphene’s impermeability by

defining nano-pores on its surface. Such nano-pores have been investigated to transport

gases, ions, and even translocate DNA molecules through them [28, 29, 30, 31].

Page 22: Proton transport through two-dimensional materials

`

22

While graphene is the first isolated two-dimensional material, there are other layered

materials with van-der-Waals force in between layers. As a direct consequence, they can be

mechanically exfoliated from their bulk crystals to have thin, even monolayer, membranes,

showing intriguing properties quite different from their bulk materials. These materials

include hexagonal boron nitride (h-BN) [33] and molybdenum disulfide (MoS2) [34], each

having its own unique features: BN is a wide gap insulator while MoS2 is a semiconductor.

Such two dimensional materials, although different from graphene, show interesting

properties that can be used in competitive applications. While boron nitride is widely used

as substrate for high mobility heterostructures fabrication because of its insulating nature

and atomic flatness [35], molybdenum disulfide single layer transistors show promising

characteristics in digital electronics [36-38], sensors [39, 40] and photocatalysts [41].

The basic but amazing character of two dimensional materials being in atomic thickness has

been somewhat neglected by initial researches. This result in the fact that other than

electrons, particles have received less attention as regards transport through 2D membranes

– especially 2D materials other than graphene . While thinner materials could effectively

lower the transport barrier, two dimensional materials become promising in transporting

matters selectively through them without damaging their lattice – if the particles are smaller

than their hexagonal rings.

Transport of protons, the smallest positively charged ions with bare size of 0.8fm (isolated)

[42], along one dimensional water chain through water filled one dimensional carbon

nanotubes was reported [43]. High proton conductivity in bulk graphite oxide, graphene

oxide/proton hybrid, and graphene oxide has been proved recently, with the mechanism

that, rather than protons penetrating through, water associated protons flow through

tunnels between layered materials [44]. Though protons transport directly through

graphene has been researched both theoretically [45, 46] and experimentally of high energy

(several mega electron volts) protons irradiation [47, 48], low energy of protons transferring

through two dimensional materials without damaging their lattices has not been

systematically studied.

Page 23: Proton transport through two-dimensional materials

`

23

Indeed, protons transporting through graphene and other two dimensional materials, as we

will see later in this thesis, is possible after overcoming the electron cloud introduced barrier,

and protons physically penetrate through atomically thin 2D sheets. Here the mechanism is

completely different compare to other proton conducting materials. This highlights two

dimensional materials’ new unique physical property which has not yet been studied and it

paves the way for them to be incorporated in fields where a proton semi-permeable

membrane is required.

The outline of the thesis is as follows:

In Chapter 1, we discuss fundamentals of graphene, including its electronic properties and

mass transport properties. We then proceed to present other two dimensional materials,

mainly h-BN and MoS2.

In Chapter 2, we present the experimental techniques used in this thesis, the mechanical

transfer methods and device fabrication procedures.

In Chapter 3, we demonstrate proton conductivity measurement in Nafion based solid

system. We show evidence of proton transport through two dimensional materials including

thin graphene and h-BN.

In Chapter 4, we show the performance improvements of proton conductivity with the Pt

catalyzed 2D materials. Proton transport introduced H2 gas flow through 2D materials

experiment is presented as well.

In Chapter 5, we introduce the liquid/liquid interface method as another method of

investigating proton transport through two dimensional materials.

In Chapter 6, we provide conclusions and view for future work.

Page 24: Proton transport through two-dimensional materials

`

24

Fundamentals of graphene and

2D materials

In this chapter we discuss fundamental properties of graphene, starting from its atomic

structure and band structure, then continuing talking about its mass transport properties.

We also discuss properties of other 2D materials, namely h-BN and MoS2.

1.1 Fundamentals of graphene

1.1.1 Carbon materials

Graphene’s remarkable properties, particularly electronic properties, are the results of its

atomic structure. Carbon atoms form a 2D plane hexagonal lattice structure with each

carbon atom 1.42 apart from its three nearest neighbors. Free carbon atoms have four

outer electrons, namely 2s, 2px, 2py, 2pz (Fig 1.1a, top). In graphene, a carbon atom’ one 2s

orbit interacts with its two in plane p orbits, 2px and 2py (Fig 1.1a, bottom), forming strong

sp2 covalent bond, planar σ bond, with its three nearest neighbors that provide strength to

graphene honeycomb lattice. The fourth orbital is a π orbital, oriented in the z-direction,

perpendicular to the σ bond plane (Fig 1.1b). As electrons in z-direction are not paired, they

are responsible for the high electric conductivity in graphene.

Chapter ONE

Page 25: Proton transport through two-dimensional materials

`

25

Fig 1.1 (a) Electronic orbital occupation in carbon element (top) and in graphene (bottom). (b)

Graphene orbital hybridization. Three σ bonds in plane with perpendicular π bond.

Fig 1.2 (a) Graphene honeycomb lattice structure. Unit cell consists of two non-equivalent sublattice

sites A and B. The lattice unit vectors are presented as and . , and are the three

nearest neighbors with lattice constant 1.42 . (b) Reciprocal lattice vectors b1 and b2 of the first

Brillouin zone of graphene with Γ as the center while K and K’ as corners.

a b

a b

Page 26: Proton transport through two-dimensional materials

`

26

1.1.2 Graphene lattice and band structure

The structure of graphene can be seen as a hexagonal lattice with a basis of two carbon

atoms, A and B, per unit cell. The basis vectors and in real space can be used to

represent any lattice point in graphene structure as the lattice translation symmetry (Fig

1.2a).

The lattice vectors can be written as

where = = = ≈ 2.46Å. = 1.42Å is the length of C-C σ bond. Each carbon

atom’s three nearest neighbors can be given by:

with = = = .

The basis vectors of reciprocal lattice and (Fig 1.2b) can be represented as:

(1.1)

(1.2)

(1.3)

(1.4)

(1.5)

Page 27: Proton transport through two-dimensional materials

`

27

Where = = b =

The first Brillouin Zone (BZ) is shown in Fig 1.2b. The center of the BZ is the Г point while K

and K’ are two non-equivalent points among the six corners of the BZ. M is the middle point

of the sides. Their positions in reciprocal space are given by

The graphene electronic band structure can be derived and described by applying the tight

binding model to the π orbital formed from the pz orbit electrons. As mentioned before pz

electron is responsible for graphene’s electronic transport properties, this approximation

works well by considering only a carbon atom and its three nearest neighboring atoms wave

functions. In 1947 P. R. Wallace [49] has used the tight binding approach and obtained the

energy dispersion relation of graphene, which is given by

(1.6)

(1.7)

(1.8)

(1.10)

(1.9)

Page 28: Proton transport through two-dimensional materials

`

28

where is the hopping energy between nearest neighbors with a typical value 2.9eV [17]. kx

and ky are the x and y component of the electronic momentum. The plus and minus sign in

the expression represent the valence band π and conduction band π*, respectively.

By expanding above equation near the K or K’ points, one obtains

where is the momentum taken at the K or K’ point, ћ is the reduced Planck constant, is

the Fermi velocity with ≈ 106 m/s for the charge carriers in graphene [15]. This equation

reveals that near the points where valence and conduction band meets (often referred to as

Dirac point), there is a linear dependence of energy on momentum (Fig 1.3). The linear

energy dispersion relation near the low energy range reveals that charge carriers in

graphene behave as ultrarelativistic particles with zero effective mass, obeying the Dirac

relation.

Fig 1.3 Electronic band structure of graphene. Full band structure with zooming in near Dirac point.

Adapted from [17].

(1.11)

Page 29: Proton transport through two-dimensional materials

`

29

In graphene, the Fermi energy locates at where the valence and conduction band meets and

the density of states vanishes. Graphene is not the same as traditional semiconductors

which have a finite band gap where the Fermi level lies in between conduction and valence

bands.

It is worth noting that graphene has a quite different band structure compared to its bilayer

and trilayer counterparts. Bilayer graphene is a zero gap semiconductor with a parabolic

energy dispersion relation near the K/K’ point. In graphene the electronic structure varies

rapidly with the number of layers, approaching the 3D graphite limit at around 10 layers [14].

1.1.3 Basic electronic properties in graphene

One of the landmark characteristics of graphene is its possibility of tuning charge carriers

continuously between electrons and holes, which is known as ambipolar field effect [11, 15].

Undoped graphene has its Fermi level exactly located at the Dirac point where density of

states vanishes.

In a typical graphene device, graphene is separated by a thin dielectric layer (usually several

hundreds of nanometers silicon oxide) from its conductive substrate which enables gate

voltage to be applied (Fig 1.4a). Fig 1.4a can be simplified to a parallel plane capacitor. With

gate voltage Vg applied, the capacitance can be deduced:

So that

1.12

1.13

Page 30: Proton transport through two-dimensional materials

`

30

where , d represents permittivity of free space and relative permittivity, and the

dielectric spacer thickness, respectively. and for a silicon oxide spacer,

. n is carrier concentration.

Fig 1.4 Electric field effect of graphene. (a) Schematic of applying electric field on graphene. (b)

Optical image of graphene Hall bar device. Adapted from [15]. (c) Ambipolar field effect in single

layer graphene. Insert of the figure shows graphene conical electron spectrum with Fermi level

changes at different gate voltage. Adapted from [14]. (d) Graphene conductance as a function of gate

voltage at 10K. Adapted from [15].

(a) (b)

(c) (d)

Page 31: Proton transport through two-dimensional materials

`

31

Carriers’ type corresponds to gate voltage sign so that positive Vg induce electrons while

negative Vg induce holes.

Noting that equation 1.13 refers to ideal graphene, in real devices graphene is easily doped

from environment [50] so that its Ef shifts into either the valence or conduction band, in

which case one must subtract the voltage V0 to reach its neutrality point:

In order to investigate graphene’s electronic properties, graphene based devices need to be

designed in a well-defined geometry to simplify the physics picture. A typical graphene

device is etched into a multi-terminal Hall bar geometry (Fig 1.4b), according to which

resistivity can be deduced:

where w and l are the width and length of Hall bar channel, respectively, while R is

measured from device IV characteristics. The conductivity . The carrier mobility, μ,

defined as how fast a charge carrier can move through its media in an electric field, can be

determined by the Drude model in which charges are treated classically:

where n is the charge carrier density and e is the charge of electron. Using this relation

mobility of both electrons and holes can be determined. The resistivity of graphene changes

with applied electric field applied and reaches the maximum where as conductivity reaches

its minimum (Fig 1.4c). The conductivity changes linearly with gate voltage Vg and reaches its

minimum at zero Vg with undoped graphene (Fig 1.4d).

1.14

Page 32: Proton transport through two-dimensional materials

`

32

When a non-quantizing magnetic field is applied to graphene devices, the Hall coefficient

is inversely proportional to gate voltage with

. The mobility can also be

deduced from the Hall coefficient:

Defects, impurities and ripples in graphene limit the mobility [51, 52, 53].The mobility μ is

found to be weakly dependent on temperature showing that the scattering from surface

charge impurities [54], phonons [55] and surface roughness [56] are the main reasons

limiting the charge carriers’ mobility. Graphene mobility on SiO2 at room temperature

ranges from 5,000 to 15,000 cm2/Vs [14]. While mobility limiting factors originate from the

substrate, suspended graphene devices are fabricated with mobility reaching up to

1,000,000 cm2/Vs [57]. Recently on boron nitride substrates, as a consequence of BN’s inert

nature and atomic flatness, the mobility of graphene exceeds 100,000 cm2/Vs [35, 58].

The study of electronic transport also reveals other interesting character of graphene: it has

quantum Hall effect even at room temperature [59]; it exhibits a minimum conductivity in

the limit of vanishing carrier concentration [15]; it exhibits Klein tunneling through potential

barriers [60, 61].

1.2 Two dimensional materials beyond graphene

Although graphene is the first isolated two-dimensional material, there are plenty of layered

materials that can be mechanically exfoliated. Indeed, these layered materials are stacked

up from their single layer counterparts with van-der-Waals forces in between layers. This

gives these materials the possibility to be isolated into two dimensional individual sheets.

The simplest layered materials are atomically thin hexagonal sheets of graphene and

hexagonal boron nitride (h-BN), while other layered materials, for example transition metal

dichalcogenides (TMDs), have more complicated crystal structures. Their electric properties

Page 33: Proton transport through two-dimensional materials

`

33

vary from insulating (e.g. hexagonal boron nitride) to semiconducting (e.g. MoS2). In addition

to graphene, these other two dimensional nano sheets also need further investigation. In

this section we discuss fundamentals of layered materials boron nitride (BN) and

molybdenum disulfide (MoS2).

1.2.1 Boron nitride

Boron nitride does not exist naturally but can be chemically synthesized typically from boric

acid or boron trioxide. Its single layer shares the same hexagonal lattice structure with

graphene but with a lattice constant 1.7% larger than graphene and it contains one boron

atom and one nitrogen atom in its unit cell. Boron nitride is AA stacking (Fig 1.5) with same

atoms from different layers exactly aligned on top of each other.

The lack of interest in a few layers of boron nitride down to a single layer is due to the

unavailability of high quality bulk boron nitride, until recently the synthesis methods enables

high grades boron nitride [62, 63]. A high temperature, high pressure growth was reported

where millimeter sized single crystal boron nitride can be obtained. CVD growth of single

and few layers boron nitride has also provoked researchers’ interests in this material [64, 65].

The TEM and conductive AFM studies suggest that there are no pinholes in this material that

boron nitride is ideally used as insulators [66].

Though single layer boron nitride is sp2-bonded, it is a wide band gap semiconductor with

energy gap of 5.97eV [63], resulting from the fact that pz orbitals in boron atoms are vacant

while in nitrogen atoms they are occupied by paired electrons. As electrons are localized in

boron nitride, one can expect that compare to graphene, electron density is lower within

boron nitride hexagonal rings. The importance will be clear later in this thesis.

Page 34: Proton transport through two-dimensional materials

`

34

Fig 1.5 Boron nitride planar and crystal structure.

Boron nitride is an ideal dielectric substrate that can be used to improve the quality of

graphene based devices. As it is inert, h-BN is expected to be free of dangling bonds and less

surface charges [35]. An atomically planar substrate surface could avoid rippling in graphene

[56, 67], while BN has similar dielectric constant with that of silicon dioxide which allowing

BN to be applied as an alternative gate dielectric [68]. Planar electric transport in BN can not

be measured with typical transport measurements, but with BN on a conductive substrate or

sandwiched in between two single layers of graphene, transport properties through thin BN

have been reported [27, 66, 69].

1.2.2 Molybdenum disulfide

Molybdenum disulfide belongs to TMDs family consisting of a plane of molybdenum atoms

sandwiched between two planes of sulfur atoms (Fig 1.6c). MoS2 crystals are naturally

Page 35: Proton transport through two-dimensional materials

`

35

appearing as centimeter sized crystalline materials similar to graphite. It is traditionally used

as lubricant and surface protectors [70, 71].

Fig 1.6 Band structure and lattice structure of MoS2. (a) Single layer MoS2 with its direct band gap

and (b) bulk MoS2 with its indirect band gap. Adapted from [73] (c) Lattice structure of MoS2. The

distance between layers is 6.5 . Adapted from [38].

Bulk MoS2 turned out to be an in-direct gap semiconductor (Fig 1.6b) from bulk of 1.29eV up

to 1.9eV with thickness decreasing [72] while its single layer sheet is theoretically shown

(c)

Page 36: Proton transport through two-dimensional materials

`

36

transferred to be a direct gap semiconductor (Fig1.6a) [73]. It gives MoS2 new possibilities

for photo-current devices [74]. As sulfur atoms stay above and below molybdenum atoms,

when referred as single layer MoS2, it contains three atomic layers.

1.3 Matter transport properties of 2D materials

Graphene’s electronic transport properties have firstly attracted researchers’ attention. But

as graphene is the ultimate limit of a membrane – it is only one atom thick – an interesting

question is whether such a thin membrane would be permeable to particles other than

electrons – such as ions, molecules including gases and liquids.

In order to probe its matter transport properties, J. S. Bunch et al [22] prepared suspended

graphene over predefined wells. By applying a pressure difference between the input and

output of a micro-chamber, it was found that the gas leaking rate is independent on

graphene thickness, between 1 and 75 layers, suggesting that gases including helium cannot

go through graphene. It has been further investigated that for graphene with defects,

helium transport barrier reduced exponentially with defect size [75]. Graphene’s

impermeability to ions in liquids has been reported as well [31]. Although it is only one atom

thick, graphene’s π-orbital forms a dense, delocalized electron cloud that blocks the gap

within its hexagonal rings [76].

While by utilizing its impermeable properties, graphene, with an electron beam drilled nano-

size pore through it, is an ideal substrate for a nanopore based single DNA molecule detector

[77, 78]. With chemically modified nanopores, it is possible to realize selective passage of

specific ions and molecules in graphene [28, 79, 80]. Graphene microchamber for TEM

imaging [81] and graphene protective coating [82, 83] has been reported as well due to its

impermeability.

On the other hand, research on graphene derivatives – graphene oxide paper shows

permeation of water through it [32]. Water molecules are driven by capillary force and

Page 37: Proton transport through two-dimensional materials

`

37

transport through pathways between graphene oxide layers. Gas and ionic transport

through one-dimensional carbon nanotube has also been reported [84, 85].

When ion irradiation is applied to a graphene sheet, ions can easily travel through graphene,

which is reasonable since ions are accelerated to several MeVs energy [86]. Interestingly,

proton, the smallest positively charged ion, is the only one that can go through single layer

graphene from irradiation without damaging graphene’s lattice [47, 48].

Besides graphene, salt rejection and water transport through nano-size boron nitride

nanotubes using molecular dynamics simulations has been reported recently [87, 88], while

mass transport through other 2D materials were barely investigated.

2D materials have fascinating unique properties all of which mainly due to their electronic

structures. As we will examine later in this thesis, electron cloud distribution within 2D

materials lattices strongly affects the barrier of mass transport through 2D materials.

Page 38: Proton transport through two-dimensional materials

`

38

Experimental techniques and

Device fabrication

In this chapter we review the experimental procedures for producing few layers 2D

materials from their bulk crystals, followed by introducing reactive ion dry etching and KOH

wet etching techniques for drilling through-holes on Si/SiNx substrate. The flake transfer

methods will be discussed as well.

2.1 Fabrication of layered materials by mechanical cleavage

Substrate cleaning

2D flakes are usually produced on a oxidized silicon substrate. The reason for using a silicon

oxide covered wafer as a substrate (which will be referred as SiO2/Si later) is to easily enable

the identification of graphene flakes with an optical microscope. While graphene absorbs

only small amount of light (2.3%), oxidized silicon layer works as an extra reflection layer,

enhancing the contrast up to 18% for single layer graphene [89].

Chapter Two

Page 39: Proton transport through two-dimensional materials

`

39

The SiO2/Si wafer used in this thesis is purchased from IDB Technologies Ltd. arrived in 4

inches wafers. The thicknesses of the silicon oxide layers are 70nm, 90nm or 290nm. After

wafers being cut into a suitable size (typically 1 inch square), they are cleaned with acetone

and isopropanol in an ultrasonic bath for 10 minutes each, followed by blowing them dry

with filtered nitrogen. This cleaning step is to remove particles and chemicals adsorbed on

wafer surface.

Subsequently, SiO2/Si substrate is exposed to oxygen plasma at low pressure as oxygen

plasma reacts with hydrocarbons and contaminants adsorbed on the surface. After plasma

cleaning, the plasma chamber is filled with pure nitrogen to avoid recontamination from the

air. Typical time for plasma cleaning is 10 minutes.

Fig 2.1 Procedures of producing thin graphene flakes. (a) Graphite on a sticky tape. (b) Bulk graphite

repeatedly peeled on the tape. (c) Thin graphite pressed on a pre-cleaned substrate. (d) Tape

removed, with thin graphene flakes on the substrate.

(a) (b) (c) (d)

Page 40: Proton transport through two-dimensional materials

`

40

Graphene exfoliation

Mechanical cleavage of graphene starts with natural graphite. A piece of natural graphite

(single crystal) is pressed onto a piece of adhesive tape (Fig 2.1a) and then peeled repeatedly

(Fig 2.1b). Due to the layered structure of graphite, the repeatedly peeling produces thinner

graphite flakes on the adhesive tape. Thin graphite flakes are then pressed on a SiO2/Si

substrate as soon as the substrate is removed from oxygen plasma treatment (Fig 2.1c). The

adhesive tape is then chemically removed from the substrate (Fig 2.1d). After tape removal,

the substrate is treated in isopropanol to minimize contamination from the tape, followed

by baking on a hotplate at 130⁰C for 10 minutes to give better adhesion between graphite

and substrate. A second peeling is applied afterwards by pressing a piece of adhesion tape

on the substrate and then peeling it off with an angled peeling method to remove thick

graphite and leave only thin graphene behind.

Fig 2.2 Optical image of single layer graphene combined with two layers, three layers and four layers

thin flakes. The scale bar is 50um.

two layers

three layers

single layer

four layers

Page 41: Proton transport through two-dimensional materials

`

41

Accurate identification of the thicknesses of graphene is critical in this thesis. Optical

microscopy is a frequent and quick method to identify graphene flakes.

Other methods of producing graphene

Mechanical exfoliation is the primary method of producing graphene flakes for scientific

research. While limited by graphite crystal size, it’s not suitable for large scale and mass

production. Instead, there are some other ways of producing graphene each of which has its

specific application.

Chemical vapor deposition (CVD)

CVD is a very important and perhaps the most investigated method of producing large scale

graphene. During the CVD process, gas species (e.g. CH4) as carbon source pass through a

hot zone (up to 1000⁰C), where hydrocarbons decompose to carbon radicals at a metal

substrate surface, then forming graphene. The thickness of graphene could be controlled by

the growth environment [90]. In 2009, Li et al. reported large area CVD graphene growth up

to a centimeter size on copper foil [91]. Though recently developed, CVD graphene can be

produced as large as a square meter size based on roll-to-roll basis (Fig 2.3a) [92]. CVD

graphene is expected to have commercial value, especially be promising in application area

for flexible, transparent electronic devices such as touch screens.

Liquid exfoliation

This method belongs to physical exfoliation while the key is to choose a suitable liquid

whose surface tension is prefers to extend graphite crystallites into larger surface area. With

proper solution, liquid exfoliation can be used to exfoliate not only graphene [93], but also

many other 2D materials (Fig 2.3b) [94]. It can reach mass production up to grams. Though

isolated flakes size are relatively small (few microns), liquid exfoliation is a promising

candidate in conductive ink and ink printable electronic circuit applications.

Page 42: Proton transport through two-dimensional materials

`

42

Epitaxial growth

Epitaxial growth of graphene based on high temperature and low pressure at which silicon

carbide (SiC) substrate reduces to graphene. It was first reported by Berger et al. [95].

Fig 2.3 (a) CVD graphene transferred on to PET substrate with size exceeding 30 inch. Adapted from

[92]. (b) Liquid exfoliated a variety of layered materials. Adapted from [94].

Exfoliation of other 2D materials

Boron nitride

BN thin flakes are mechanically exfoliated and identified on substrates of 70nm silicon oxide

coated silicon wafers, since 70nm silicon dioxide would give the best contrast for single layer

BN [96]. Limited by the bulk crystal size (Fig 2.4a), the lateral size of single layer BN is

typically 10μm (Fig 2.4b).

Molybdenum disulfide

MoS2 flakes are prepared on PMGI (Polymethylglutarimide)/PMMA (Polymethyl

methacrylate) double layer resists substrate. The resists are spin coated on a plain silicon

(a) (b)

Page 43: Proton transport through two-dimensional materials

`

43

wafer. This double layer is used in a dry transfer technique which will be introduced later in

this chapter. Typical spin coating speed is 4000rpm and 7000rpm for PMGI and PMMA,

Fig 2.4 Optical images of (a) bulk hexagonal BN, (b) single layer BN on 70nm silicon oxide wafer with

its bilayer and trilayer counterparts, (c) bulk MoS2, and (d) single layer MoS2 on PMMA/PMGI double

layer substrate. The scale bar is (a) 100μm, (b) 10μm (c) 1cm and (d) 50μm, respectively.

respectively. PMGI/PMMA dual layer resists is baked on a hotplate for 10 minutes at 130⁰C.

Subsequently, thin MoS2 crystal on a piece of adhesive tape is pressed onto the resists

substrate. Tape is subsequently peeled off with an angled peeling method.

1L

3L 2L

(a) (b)

(d)

1L

(c)

Page 44: Proton transport through two-dimensional materials

`

44

MoS2 thin flakes could be produced on the SiO2/Si substrate as well, while lateral size of

single layer MoS2 produced on the resists substrate (typically 50μm, Fig 2.4c and d) is

generally larger than produced on the SiO2/Si substrate.

Characterization techniques for 2D materials identification

In order to distinguish between graphene single layer and its few layers counterparts, atomic

force microscope (AFM) could be used to measure the step height of these flakes from the

Fig 2.5 AFM images of various single layer 2D materials. (a) Single layer graphene. Adapted from [11].

(b) Single layer BN and its few layers. Adapted from [96]. (c) Single layer MoS2. Adapted from [38].

(a) (b)

(c)

Page 45: Proton transport through two-dimensional materials

`

45

substrate (Fig 2.5a). The step height for single layer graphene is usually different (higher)

from the expected inter layer spacing of graphite (0.334nm). This is due to the roughness

from the substrate (e.g. 290nm SiO2/Si substrate roughness about 1nm). Therefore, the step

height between a monolayer and bilayer on the same substrate is checked as well.

AFM step height analysis is equally applicable for other 2D materials as well (Fig 2.5b and

2.5c). Apart from AFM, Raman spectroscopy is widely used as a quick characterization

technique to distinguish between single and few layers graphene.

Fig 2.6 Raman spectroscopy of graphene. (a) Raman spectra of bulk graphite and single layer

graphene at 514nm. (b) Evolution of the Raman spectra at 633nm with the number of layers.

Adapted from [160].

Raman spectroscopy of graphite and graphene consist of two main peaks, namely G peak at

~1580 cm-1 and 2D peak at ~2700 cm-1. Fig 2.6a shows the Raman spectroscopy of graphene

and graphite in which the 2D peaks of the two are rescaled to be the same height. The

relative height of G and 2D peak is one clue of distinguishing thin graphene membranes. The

Page 46: Proton transport through two-dimensional materials

`

46

other feature from graphene Raman spectra is that the line shape of its 2D peak varies with

the number of graphene layers. Fig 2.6b shows the 2D peaks of different number of

graphene layers. For monolayer graphene, its 2D peak is a single Lorentzian peak while with

the number of layer increasing from 2 layers to graphite, the shape of 2D peak becomes

broader and is finally split into two components. The position of bilayer graphene 2D peak is

upshifted compare to single layer and split into four small features. Therefore, Raman

spectroscopy of graphene layers can be successfully used to identify single layer graphene to

its bilayer and few layers.

2.2 Assembly of 2D membranes based proton conductive

devices

The availability of two dimensional materials production with mechanical peeling method

and microscope identification provides an easy way to have 2D materials thin flakes. As to

investigate the possibility of protons going through 2D materials: (1) the final device has to

have a substrate with a straight through hole that protons with its medium can access at the

surface of 2D flakes from both sides, and (2) 2D flakes have to be transferred from the

original substrate (where they were produced) to the device substrate. The methodology

consists of two parts: substrate fabrication and flake transfer techniques.

2.2.1 Substrate fabrication

The main method of defining micro size holes is photolithography while a combination of

reactive ion etching and KOH wet etching is used to drill holes straight through on a 500μm

silicon substrate with a polished layer of 500nm silicon nitride coating on both sides.

Page 47: Proton transport through two-dimensional materials

`

47

Photolithography

Photolithography is a technique transferring a geometric pattern from photo mask to light

sensitive chemical, usually called photoresist. Initially, photolithography had depended on

photo masks to transfer pre-designed pattern, until 1987, when the first laser writing system

came out [97]. This technique is based on a focused laser shining directly onto target

photoresist with a software designed pattern. This direct laser writing system provides quick

and accurate exposure with sub-micron resolution.

A Microtech LW405 laser writer with a 405nm GaN laser is used for doing photolithography

for devices fabrication presented in this thesis. The resolution of the LW405 is 500nm.

A layer of Microposit S1813 (positive tone optical resist) is spun onto a SiNx/Si wafer with a

spin speed of 3000rpm, followed by hotplate baking at 115˚C for 3 minutes. The thickness of

S1813 resist is about 1.3μm.

After exposure with the LaserWriter, the samples are developed in Microchem MF319 (a

solution of 2.5% Tetramethylammonium hydroxide in water) for 1 minute in order to

remove resists from exposed regions (Fig 2.7). De-ionized water rinse is required afterwards

to stop further development.

Page 48: Proton transport through two-dimensional materials

`

48

Fig.2.7 Process of photolithography with laser writing and development.

Table 2.1 Spin coating parameters of photoresist used in this thesis

Photoresist Frequency

(Revolutions

per minute)

Time

(s)

Soft baking

Temperature

(˚C)

Baking Time

(s)

Thickness

@3000rpm

(µm)

S1813 3000 60 115 180 1.3

S1805 3000 60 110 60 0.5

Su-8 2025 3000 60 95 300 25

Page 49: Proton transport through two-dimensional materials

`

49

Etching techniques

In order to etch through double sides polished, 500nm silicon nitride layer coated Si

substrate, a combination of reactive ion etching and potassium hydroxide wet etching is

used.

Reactive Ion etching

Reactive Ion etching (RIE) is a micro-fabrication technique using plasma to remove materials

presented on a target wafer. It has been rapidly developed due to (1) achievement of

directional etching without depending on crystal orientation unlike the case of silicon wet

etching which will be discussed later; (2) good transferring of a photolithographically defined

pattern into underlying layer and (3) easy cleanliness with gas pumping processes [98].

RIE usually uses fluorine gas plasma to etch the target substrate. During the RIE process,

high energy gas species from plasma, which is generated at low pressure by an

electromagnetic field, attack the wafer surface, and react with the surface material to

generate gas products.

A silicon nitride RIE etching recipe with sulfur hexafluoride, SF6 [99], is used in this thesis.

With this recipe, a glow discharge from SF6 is generated to have an etching environment

containing neutrals, electrons, photons, radicals (F*), positive (SF5+) and negative (F-) ions.

Radicals diffuse from the bulk plasma while positive ions are driven by DC bias to the wafer

surface to assist the etching:

Si3N4 (s) + 3 SF6 => 3 SiF4 (g) +3 SF2 (g) + 2 N2 (g)

Gas products are pumped out.

RIE etching rate of SF6 silicon nitride recipe is 200nm per minute. In order to completely

remove a 500nm silicon nitride layer, typical etching time is 3 minutes. Unexposed S1813

photoresist works as an etching mask. RIE etching selectivity, defined as etch rate ratio of

etch mask compared to target material, of S1813 and silicon nitride is 1:30 (Fig 2.8). After

RIE etching, S1813 photoresist is removed in acetone.

Page 50: Proton transport through two-dimensional materials

`

50

Fig 2.8 The RIE etching process. S1813 works as an etch mask and is being etched simultaneously

with silicon nitride layer requiring sufficient thickness of the S1813 layer.

Table 2.2 Recipes of RIE etching recipes used in this thesis

Recipe Plasma gases Target material Etching rate

(nm/s)

Selectivity

(target : S1813

mask)

SiNx recipe SF6 Silicon nitride 4 1:15

Bosch process

recipe

SF6/CHF3 Si 45 1:30

SiO2 recipe CHF3/Ar Silicon dioxide 1 1:20

Page 51: Proton transport through two-dimensional materials

`

51

KOH wet etching

Wet etching is a fabrication method eliminating material by its dissolution in an aqueous

etching solution. To etch a material there is a variety of chemical agent available. It is worth

considering that, however, the solution used in the etching process must be etching

selectively, without affecting the etch mask and underlying materials. Hence, etching

chemical chosen must have a high selectivity, defined as the etching rate ratio of target

materials and each mask in the same solution.

Generally, wet etching provides a higher etch rate compared to the RIE etching. (etching rate

of silicon: 2.7µm per minute for RIE dry etching, 6µm per minutes for wet etching at 90˚C,

measured in this thesis). Modification of etchant can affect selectivity as well. The etch rate

highly depends on reactant diffusing to the material surface, surface reaction, and products

diffusing away from the surface, all of which can be speed up by increasing the reaction

temperature. Other effects for example gas products trapped at the surface could affect the

reaction as well.

There are two different types of etching: (1) isotropic etching, while etching rate is the same

at all directions, and (2) anisotropic etching, when etching rate has a preference in one or

some directions (usually crystal orientation). In this thesis, potassium hydroxide (KOH) is

used for anisotropic wet etching of the silicon substrate:

Si + 2OH- + 2H2O => Si(OH)4 2- + 2H2(g)

Silicon has a diamond cubic crystal structure. The etching rate of KOH strongly depends on

the crystallographic orientation [100]. The KOH etching process is much slower on {111}

planes compared to {100} and {110} surface with an etching rate ratio up to 1:500 (Fig2.9a).

The dependence of the etching rate on the crystal orientation could be explained as the

differences of the atomic lattice packing density and available bonds in the crystallographic

planes [101]. However, the mechanism of the dependence remains inconclusive.

Page 52: Proton transport through two-dimensional materials

`

52

Fig 2.9 KOH wet etching with a SiNx mask. The Zetch is proportional to the Wmask. (b) Etching goes

straight through the whole Si substrate. (c) Etching stops with a sharp triangular profiler.

Due to the slow etching rate at the silicon {111} surface, if considering plane {111} as a non-

etching plane, the final width can be calculated as (Fig 2.9b)

where is the angle between the planes {111} and {100}.

20% weight percentage KOH water solution is used in this thesis. At temperature 90°C, the

etching rate is about 6μm/min. The etching process lasts about 1.5 to 2 hours to etch

through 500μm silicon substrate. After KOH wet etching, repeated cycles of de-ionized water

rinses are required to minimize KOH residues.

(a) (b)

(c)

{100} {111}

Page 53: Proton transport through two-dimensional materials

`

53

2.2.2 Transfer techniques

Flakes from the original SiO2/Si wafer have to be transferred on to target substrate with

transfer techniques discussed here. Transfer methodology consists of mechanically lifting

flakes up with polymer support and aligning them to a target substrate. Two different

transfer techniques are used in this thesis, each has its benefits.

Etching based wet transfer

The so called wet transfer [102] is the mostly used transfer method in this thesis. This

transfer technique works with potassium hydroxide etchant to etch away silicon and its

oxide which was originally the substrate for mechanical exfoliation of layered materials. The

flakes to be transferred are firstly spin coated with PMMA at spin speed 3000rpm, followed

by hotplate baking at PMMA glass transition temperature of 130˚C for 10 minutes (Fig 2.10a).

Subsequently the wafer is immersed into low concentration KOH solution (0.1mol/L) to etch

away silicon oxide and silicon slowly (Fig 2.10b) until the PMMA membrane with flakes

attached is floating in the solution (Fig 2.10c). Typical etching time for this process is four

hours.

The floated PMMA membrane is carefully washed with de-ionized water and then ready to

be transferred to a target substrate. It is worth noting that one can accelerate KOH etching

process by using higher concentrated KOH solution at higher temperature (but less than

50˚C to avoid tape melting). Although flake-PMMA bilayer can float up in 10 minutes, this

condition is typically avoided due to the more KOH contamination and more stress flakes

experienced in this condition. This process is called wet transfer as flakes are in touch with

solution during the etching process.

Page 54: Proton transport through two-dimensional materials

`

54

Fig 2.10 Procedure of polymer based wet transfer. (a) PMMA is spin onto graphene, and then (b)

immersed into KOH solution to etch SiO2 underneath to have (c) free standing graphene/PMMA layer.

The graph uses graphene as an example, but also available for other 2D membranes.

Dry transfer

Dry transfer [103], as referred by its name, is a technique by which the side of the flake to be

transferred doesn't get wet before it contacts with target substrate. This method depends

on a bilayer resist substrate system. First, a PMGI/PMMA dual layer resist is spin on a

chemical cleaned Si wafer with spin speed 4000rpm and 7000rpm, respectively, followed by

hotplate baking at 130˚C for 10 minutes. Thickness of the double layer is a few hundred of

nanometers. 2D crystals on the adhesive tape are then pressed onto double resists layer to

exfoliate thin flakes (Fig 2.11a).

As PMGI/PMMA double layer is an extra layer to reflect light, similar as for silicon oxide, the

contrast of flakes can be modified by the thicknesses of the resist layer which is controlled

by the resists spin speed. This enables identification of graphene and other materials

exfoliated on PMMA.

After identifying flakes to be transferred, a scratch circle of about 5mm in diameter on

bilayer resist is made, with flakes in the middle. PMGI layer is subsequently dissolved by its

developer MF-319, leaving the PMMA layer unaffected (Fig 2.11b). The PMMA – flake

(a) (b) (c)

Page 55: Proton transport through two-dimensional materials

`

55

bilayer is then carefully transferred into de-ionized water (Fig 2.9c). Due to PMMA’s

hydrophobic property, PMMA membrane floats in the water, with flakes non-wet on top of

PMMA, while MF-319 residue underneath PMMA can be cleaned away.

Fig 2.11 Procedures of dry transfer. (a) PMGI/PMMA double-layer is spin on to substrate with

mechanical exfoliated graphene on top. After (b) PMGI dissolved with MF319, (c) graphene/PMMA

layer is cleaned in DI water, followed by (d) optical alignment and then transferred onto target

substrate.

Optical alignment

The PMMA- flake membrane, from both wet and dry transfer techniques, is carefully stuck

onto a micromechanical stage allowing independent motion control in x, y, and z directions.

Target substrate is fixed by vacuum on a bottom stage with temperature control (Fig 2.9d).

(a) (b)

(c) (d)

Page 56: Proton transport through two-dimensional materials

`

56

After optical microscope alignment, the top stage with PMMA moves down until PMMA and

target substrate has intimate contact. Target substrate warming up could enhance the

PMMA/substrate adhesion.

2.3 Proton transport device fabrication

The proton transport devices were fabricated with a combination of the techniques

described above. Double sides polished, 500nm silicon nitride coated 500μm silicon wafer

was cut into 16.5mm by 16.5mm size. Noting that silicon nitride KOH wet etching rate is

negligibly slow, it works as a silicon wet etching mask.

After cleaning in acetone and isopropanol, the SiNX/Si substrate was spin coated with

MicroPosit S1813 at 3000 rpm on both sides of the substrate, then hot plate soft baked at

115˚C for 3 minutes. Subsequently, the bottom side (could be either side from the two,

defined as bottom while the other one is top) S1813 was exposed by LW 405 laser writer

and developed to open a 1000 microns square window on the S1813 layer in the center of

substrate (Fig 2.12a). This was followed by RIE silicon nitride SF6 etching for 3 minutes to

completely remove the bare silicon nitride (Fig 2.12b). The bottom layer S1813 acted as a

dry etching mask to etch the silicon nitride layer, while top S1813 layer was to protect the

top side silicon nitride from scratching during the whole process.

The S1813 layers were removed on both sides in acetone for 10 minutes after RIE etching.

The cleaned substrate was immersed into 20% weight percentage potassium

hydroxide/water solution at 90⁰C. Etching starts at the silicon that is unprotected by the

silicon nitride mask, with etching rate 6μm per minutes. This process stops when the KOH

etchant reaches the top side silicon nitride stop layer and leaves a 300μm x 300μm silicon

nitride (500nm thick) suspended membrane (Fig 2.12c). De-ionized water is used to remove

KOH residue afterwards, followed by isopropanol rinse and filtered nitrogen blow dry.

Page 57: Proton transport through two-dimensional materials

`

57

Again, with a combination of photolithography and RIE, a straight through hole with

designed micron-size is drilled on the suspended top side silicon nitride membrane (Fig

2.12d and e).

The flakes of 2D materials with PMMA support are then transferred to cover the through

hole (Fig 2.12f), followed by hotplate baked at 130˚C for 10 minutes to have better adhesion

between flakes and SiNX/Si substrate. PMMA is removed in acetone. The next step is rinse in

hexane. Hexane is reported to have a low surface tension so that suspended 2D membranes

will not be ruptured when removed from liquids [104].

Fig 2.12a to f demonstrated the whole procedures, while Fig 2.12g shows the device diagram

of a transferred 2D membrane on SiNX/Si substrate with a straight through hole. Although it

is not yet a measureable device, all samples are further fabricated from this structure. As

there are a few different types of devices, further device fabrication steps will be specified in

each chapter.

Page 58: Proton transport through two-dimensional materials

`

58

Fig 2.12 (a-f) Processes of device fabrication and (g) prepared sample geometry.

a b

c d

e f

g

Page 59: Proton transport through two-dimensional materials

`

59

Proton transport through 2D materials in

Nafion based solid systems

Proton transport through 2D materials is barely investigated previously. Therefore, new

device fabrication procedure and measurement methods need to be developed. In this

chapter we review fabrication of devices for proton transport through Nafion based solid

systems. We then demonstrate proton conductivity of various 2D materials including BN,

graphene and MoS2.

3.1 Introduction

Matter transport through two dimensional materials has attracted much interest. Electronic

transport in graphene, both planar and vertical, attracted much of the initial attention due

to graphene’s unique conical electronic dispersion [17, 27]. Soon after, molecular, ionic and

gas transport were all investigated [21, 22, 31]. Despite being just one atom thick,

graphene’s hexagonal carbon lattice is densely populated by delocalized electrons, making

transport of such particles impossible [22].

Chapter Three

Page 60: Proton transport through two-dimensional materials

`

60

Instead, there are efforts concentrated on utilizing graphene’s impermeability by defining

nano-pore on its surface. Such nano-pores have been reported to transport chemicals, ions,

and even translocate DNA molecules through it [28,29,31].

In this work, we study transport of protons, the smallest positively charged ions, through a

mechanically exfoliated pristine monolayer graphene and other 2D materials, namely

hexagonal boron nitride and molybdenum disulfide. While there are studies reporting

proton transport through graphene with proton irradiation (proton source with energy level

several MeV) [47, 48], low energy proton transport through 2D materials without damaging

their lattices has not been systematically studied.

3.2 Solid proton medium and source

Proton conductive medium – Nafion

Nafion refers to a positive charged ion (cation) conducting polymer that was first developed

in the late 1960s by DuPont. It consists of a tetrafluoroethylene backbone with

perfluorovinyl ether groups terminated with sulfonate groups incorporation (Fig 3.1a).

Nafion has been paid a considerable amount of attention as a highly conductive proton

Fig 3.1 (a) Nafion chemical structure and (b) proton conductive mechanism in Nafion

a b

Page 61: Proton transport through two-dimensional materials

`

61

conductor in proton exchange membrane fuel cells, owing to its good thermal and

mechanical stability [105].

Nafion exhibits excellent proton conductivity, but only when soaked with water which works

as proton transport medium. In Nafion, the proton conduction mechanism could be easily

described as protons on the sulfonic acid (SO3H) group “hopping” from one acid site to

another. Water is confined into nanometer dimensions domains in Nafion polymer [106]. In

one proton hopping, proton dissociates from the acidic site, followed by transferring into the

confined water medium (Fig 3.1b).

The proton diffuses in the water domain until it associates with another acid site. In this way,

protons transports through the polymer matrix with the help of water. With an external

potential (electric field), the protons can move in a certain direction.

Fig 3.2 Unit cell of metallic palladium with octahedral sites occupied by hydrogen in β palladium

hydride, with Pd: H = 1: 1. Note that the same sites are occupied by hydrogen in its α form but with

lower Pd: H ratio. Adapted from [107].

Page 62: Proton transport through two-dimensional materials

`

62

Proton source – palladium hydride

Despite its name, palladium hydride (PdHx, where x is the H: Pd ratio) is not an ionic hydride

but a palladium metal with hydrogen molecules adsorbed inside the palladium crystal lattice

with an expanded lattice constant (Fig 3.2).

At room temperature, there are two phases in the PdHx system. With x<0.03, it is the so

called α phase at which the lattice constant is close to palladium metal. As more hydrogen

dissolves in palladium, the lattice constant continuously increase until the β phase where x is

approximately 0.6 and the lattice constant expansion about 6%. It is worth noting that the

same sites are occupied by hydrogen in both the α and β phases but as the lattice expands,

more vacancies are created, thus providing more available adsorption sites [107].

Hydrogen atoms can be injected into the Pd lattice either by immersing Pd in hydrogen gas

[108,109] or electrically charged in acidic solution [110,111]. Hydration of palladium is

reversible and therefore it has been investigated as a possible material for hydrogen storage

[112].

3.3 Sample fabrication and measurement system

Sample fabrication

Graphene and boron nitride are mechanically exfoliated on 290nm and 70nm silicon oxide

coated silicon wafers, respectively, while MoS2 is peeled on a PMGI/PMMA dual layer

substrate. Subsequently flakes are transferred onto silicon nitride substrate with a 2μm

straight through-hole by the wet transfer technique for graphene and BN and by dry transfer

for MoS2.

Palladium foil (99.9%, 0.5mm thickness from Sigma-Aldrich) was cut into 2mm by 8mm

pieces, followed by immersion into NaBH4 water solution (3mol/L), and stirred overnight (>8

Page 63: Proton transport through two-dimensional materials

`

63

hours) to achieve hydration [113]. A rinse in de-ionized water of the palladium hydride is

required to minimize chemical residue.

Fig 3.3 (a) Three dimensional presentation and (b) vertical profile of solid Nafion proton transport

sample.

Droplets of Nafion 117 solution (~5% in a mixture of lower aliphatic alcohols and water, from

Sigma-Aldrich) were applied on both sides of suspended two dimensional material

membrane, followed by oven baking at 130⁰C for 20 minutes in a water vapor environment

to allow water soaked into the Nafion membrane. Pre-hydrated palladium film strips were

attached onto both sides of the Nafion solid membrane before the Nafion had completely

dried (Fig 3.3a and b).

Measurement system

The technique of injecting protons directly from a hydrated palladium electrode into a solid

membrane was used [114]. The measurement was performed in a pre-pumped vacuum

a b

Page 64: Proton transport through two-dimensional materials

`

64

chamber (10-3 mbar) followed by insertion of a gas mixture of hydrogen (10% H2, 90% Argon)

and water vapor (in order to keep the Nafion wet during measurements) (Fig 3.4a). While

the hydrogen concentration is not strictly controlled, this is not a limiting part to proton

transport in this thesis, which will be discussed later.

A Keithley 2636 SourceMeter was used for the measurements. Voltage bias was applied

between two PdHX electrodes (Fig 3.4b). All the results were measured at room temperature.

Fig 3.4 (a) Schematics of experimental system and (b) mechanism of proton transfer in solid Nafion

samples measurements.

3.4 Results

When dissolved in the palladium lattice, the hydrogen is almost completely ionized, with its

electron going into the Pd d shell [115]. According to reaction [116]:

3.1

a b

Page 65: Proton transport through two-dimensional materials

`

65

-2 0 2

-15

0

15 S-BN

S-Gr

S-Mo

Curr

ent

(nA

)

Bias voltage (V)

linear region

During measurement, a hydrogen atom loses one electron at the Pd electrode to produce a

proton. With electric field applied, the proton transports through Nafion and through the 2D

sheet to the other Pd electrode where it is re-combined with an electron to generate a

hydrogen atom. The hydrogen atom is subsequently absorbed by the palladium (Fig 3.4b).

Fig 3.5 Proton transport I-V characteristics of 2D membranes. The proton conductive current curves

as a function of bias voltage for single layer boron nitride (S-BN, red), single layer graphene (S-Gr,

blue), and single layer MoS2 (S-Mo, green) are recorded at voltages from -2V to +2V. The curves are

linear at low biases.

Page 66: Proton transport through two-dimensional materials

`

66

Fig 3.5 shows the current-voltage measurements for three different materials used as a

barrier: single layer BN (S-BN), single layer graphene (S-Gr), and single layer MoS2 (S-Mo).

Here voltages within ±1V is defined as linear region since out of this region, the I-V curve

responds in a non-linear behavior, which is possibly due to chemical reaction in Nafion. The

performance of devices will decrease if they are kept in the non-linear region for a long time

(typically 30 minutes), hence all measurement results will from this point be presented in

the defined linear region.

Fig 3.6 (a) Electron density of single layer BN (S-BN), single layer graphene (S-Gr) and single layer

MoS2 (S-Mo) from top view. Electron density decreases from black to white. (b) Electron density of

proton transport for single layer graphene, adapted from [46]. Left: initial state. Right: transition

state. Red indicates electron accumulation while blue indicates electron depletion.

S-BN S-Gr S-Mo

a

b

Page 67: Proton transport through two-dimensional materials

`

67

0 5 10 150

10

20

30

Con

du

cta

nce

(nS

)

Hole size in area (m2)

-1 0 1

-20

0

20

1m

2m

3m

4m

Curr

ent

(nA

)Voltage (V)

-1.0 -0.5 0.0 0.5 1.0

-5

0

5

Cu

rre

nt

(nA

)

Bias voltage (V)

S-BN

Bi-BN

Tr-BN

-1 0 1

-0.5

0.0

0.5

Cu

rre

nt

(nA

)

S-Gr

S-BN

Voltage (V)

S-BN and S-Gr displays a linear proton conductive current response at low bias while S-BN is

one order of magnitude more conductive to protons compared to S-Gr. Single layer MoS2

exhibits a current which remains indistinguishable above the noise current level (pA). The

result is not surprising, since as shown in Fig 3.6a, electrons in single layer BN are localized

so that S-BN has a lower electron density within its hexagonal ring which provides easier

proton transport through it. Protons were found not transport through S-Mo, which is

consistent with its three atomic layers structure.

Fig 3.7 (a) Proton conductive I-V characteristics of single layer BN (S-BN, red), two layers BN (Bi-BN,

green), and three layers BN (Tr-BN, blue). Insert: comparison of proton conductive current for single

layer graphene (S-Gr, red) and Bi-BN (blue). Their respective proton conductance is comparable. (b)

Conductance as a function of hole sizes in linear region. Single layer flakes of BN covering holes sizes

of 1µm (blue), 2µm (pink), 3µm (green), 4µm (yellow) in diameter were measured. Insert: Linear IV

characteristic of single layer BN for different hole-diameters.

S-BN

a b

Page 68: Proton transport through two-dimensional materials

`

68

0.1

1

0.02

Tr-BNS-MoBi-BNS-Gr

Conducta

nce(nS

)

bare hole

S-BN

150

Fig 3.6b shows the electron density for the initial (Fig.2b left) and transition state (Fig.2b

right) of proton penetration in the single layer graphene system. In the initial state with one

proton on top of the graphene lattice, graphene has a trend of screening the positive charge

in the proton by depleting electrons from the unit cells around it (Fig.2b left). In the

transition state, the proton interacts differently with each carbon atom that it is closer to

one of the carbon atoms than the others (Fig.2b right). This indicates that instead of

penetrating from the center of the hexagonal ring, the proton experiences bond formation

and breakage with the carbon atoms [44].

Fig 3.8 Proton conductance statistics of single layer BN (red), single layer graphene (green), bi-layer

BN (blue) and their few layers counterparts. Single layer MoS2 (cyan) and tri-layer BN (pink)

conductance are under noise level (shadowed area). Nafion covered 2µm in-diameter hole

conductance is about 150nS, noted as bare hole in the graph. Insert: SEM image of single layer

graphene covering a 2μm through hole. Scale bar: 500nm.

Page 69: Proton transport through two-dimensional materials

`

69

-2 0 2

-200

0

200

Curr

ent (n

A)

Bias voltage (V)

Bare hole

S-BN

Proton conductivity of single layer BN and graphene and their few layers are shown in Fig

3.7a. As BN is AA stacking, bi-layer BN (Bi-BN) has a proton conductivity comparable with

single layer graphene (Fig 3.7a insert). Fig 3.7b shows linear proton conductance as a

function of through-hole’s area with single layer BN covering the holes.

The conductance statistics presented in Figure 3.8 confirms the result that single layer boron

nitride has a proton conductance of more than 5nS, one order of magnitude higher than for

single layer graphene. Noting that bi-layer BN has comparable proton conductivity with S-Gr,

it follows that even in bilayer BN, electron clouds allow space for protons travelling through.

Fig 3.9 I-V behavior of Nafion membrane over a 2μm diameter hole (blue curve). The conductance is

two orders of magnitude greater than for single layer BN (red curve).

Page 70: Proton transport through two-dimensional materials

`

70

The proton conductance of a Nafion membrane on a bare 2µm hole was measured and the

result is presented in Fig 3.9, showing that compared with Nafion, S-BN is two orders of

magnitude less conductive and that 2D materials proton conductivity is not comparable with

a commercialized Nafion membrane.

3.5 Conclusion

In conclusion, the existence of a new, unique property has been added to the range of

unusual physical properties of two dimensional materials. It was shown that single layer

graphene and boron nitride is permeable for protons with low energy. Monolayer boron

nitride was found to be the most conductive one due to its localized electronic structure.

Graphene is less conductive than BN due to its delocalized π electrons, while MoS2 was not

found to conduct as a result of its three atomic layers structure.

Page 71: Proton transport through two-dimensional materials

`

71

Pt catalyzed proton transport through

2D materials

For the purpose of improving the performance of 2D materials proton conductance, in this

chapter we investigate the effect of a Pt catalyst on the proton transport conductivity of 2D

materials. A Pt evaporation technique and sample fabrication procedures are reviewed,

followed by presenting electrical measurements of proton transport through Pt catalyzed 2D

membranes. We also demonstrate proton transport introduced hydrogen gas flow through

2D materials.

4.1 Introduction

Proton transport through various 2D materials, namely single layer BN and graphene, has

been observed in a solid Nafion system. It not only reveals a new, unique property of 2D

materials, but also opens up the possibility of 2D materials being used in the field of proton

selective membrane. However, 2D materials proton conductivity is orders of magnitudes

lower than commercialized Nafion, making them less attractive.

On the other hand, platinum is widely used as catalyst in chemical reactions, especially in

hydrogen oxidization in fuel cells. Platinum nanoparticles with porous carbon support (Pt/C)

electrodes are widely applied in Nafion based proton exchange membrane fuel cells (PEMFC)

Chapter Four

Page 72: Proton transport through two-dimensional materials

`

72

[117]. Pt/C electrode could not only enlarge surface areas of electrode, in the sense that Pt

could adsorb hydrogen on its surface [118], and nanoparticles have larger surface area, but

also catalyze both hydrogen oxidization and oxygen reduction.

Pt catalyst supported by carbon nanotubes [119, 120] as well as single wall carbon

nanohorns [121] for fuel cell applications were investigated and have displayed reasonable

performance. The high proton conductive performance of a fuel cell system with a Pt

catalyst layer sandwiched between two Nafion layers has been reported as well [122, 123].

Since Pt works as a catalyst in Nafion based proton transport fuel cells, the effect of Pt on

proton transport through 2D materials are investigated in this chapter.

4.2 Device fabrication

Metal evaporation and lift-off

Electron beam evaporation techniques were used for depositing metal films with controlled

thicknesses on a target surface, here either 2D materials flakes or the silicon oxide surface.

As the name indicates, a focused electron beam was used to evaporate target metal. The

electron beam is emitted from a hot e-gun filament via an applied high voltage, followed by

magnetic deflection and acceleration to be focused on the target metal. The metal vaporizes

as a result of the energy delivered by the electron beam. The evaporation procedure was

performed in high vacuum so that the evaporated metal particles can reach the target

substrate directly with minimized collisions with background gases (Fig 4.1a).

In order to evaporate platinum, chromium and gold by electron beam evaporation, the

Moorfield MiniLab e-gun evaporation system (Fig 4.1b) was used in this thesis. Typical

acceleration DC voltage was 9kV and the vacuum in the evaporation chamber was 10-8 mbar.

Page 73: Proton transport through two-dimensional materials

`

73

Fig 4.1 (a) Schematic view of e-beam evaporation system. (b) Moorfield e-beam deposition system.

Sample fabrication

Graphene and boron nitride flakes were mechanically exfoliated on 290nm and 70nm silicon

oxide coated silicon substrates, respectively. Subsequently, flakes were transferred onto a

2µm (in diameter) straight through hole on the SiNX/Si substrate with a wet transfer

technique.

2nm platinum was e-beam evaporated on suspended graphene or BN flakes, followed by

Nafion 117 solution drops applied on both sides. After an oven bake in a water vapor

environment at 130˚C for 20min, PdHX films are formed onto both sides of the Nafion (Fig

4.2a). Fig 4.2b illustrates Pt directly evaporated on Nafion, which will be referred as a bare

hole in this chapter.

a b

Page 74: Proton transport through two-dimensional materials

`

74

Fig 4.2 (a) Profiler of Pt evaporated solid Nafion device. (b) Pt evaporated directly on Nafion, referred

as “bare hole:” in this chapter.

4.3 Results

Proton transport I-V characteristics

Measurements are basically the same as in Chapter 3. Briefly, measurements were

performed in a H2 (10% H2 and 90% Ar) and H2O mixed gas environment. Water vapor was

introduced to keep the Nafion film wet and conductive to protons while PdHX films worked

as a proton source due to adsorption of H atoms (from H2). Bias potential was applied

between two PdHX electrodes. All the measurements were performed at room temperature.

The proton conductive behavior of 2D materials with 2nm Pt film catalyst has a linear I-V

characteristic at low bias (Fig 4.3 insert). Interestingly, single layer BN with Pt has

comparable proton conductance to Nafion (Fig 4.3). It is worth noting that S-Gr and Bi-BN

has similar proton conductivity, which is consistent with the previous experiment result in

Chapter 3.

a b

Page 75: Proton transport through two-dimensional materials

`

75

1

10

Conducta

nce (

nS

)

Nafion

S-BN S-Gr Bi-BN

20

-0.2 0.0 0.2-5

0

5 Nafion

S-BN

S-Gr

Bi-BN

Bias voltage (V)

Cu

rre

nt

(nA

)

0.2

Fig 4.3 Proton conductive histogram of single layer BN (S-BN, red), single layer graphene (S-Gr, blue)

and two layers BN (Bi-BN, green). Single layer BN has a comparable conductivity with Nafion. Insert:

linear I-V characteristic of 2D materials.

With 2nm Pt evaporated, the proton transport current of single layer BN is significantly

increased (Fig 4.4a) than S-BN without Pt by a factor of 5. The Pt modifies the proton

transport system by lowering the 2D materials’ proton transport barrier. Both S-BN and S-

graphene have less proton resistivity with Pt evaporated.

Pt exhibits a strong interaction with graphene [124, 125, 126]. As the pz orbital in graphene is

hybridized with the Pt d-orbital, the π electrons are localized to Pt, effectively lowering the

proton transport barrier through the hexagonal lattice of graphene. A similar interaction

between Pt and boron nitride has been reported as well [127].

Page 76: Proton transport through two-dimensional materials

`

76

-1 0 1

0

1

Cu

rre

nt

(A

)

Bias voltage (V)

Nafion

S-BN

Bi-BN

-0.2 -0.1 0.0 0.1 0.2

-5

0

5

Cu

rre

nt

(nA

)

Bias voltage (V)

no Pt

with Pt

S-BN on 2m hole

Fig 4.4 (a) I-V characteristic of single layer BN on a 2µm hole with Nafion/Pd contacts on both sides.

With 2nm Pt evaporated (red), the proton transport current is greatly increased compared to S-BN

without Pt (black). (b) I-V characteristics of 2nm Pt evaporated on a 2µm hole covered with Nafion

membrane (black), single layer BN (red), and two layers BN (blue). With the bias voltage further

being increased to ±2V, the I-V curve shows a nonlinear behavior while the current of S-BN and

Nafion is comparable.

With the applied voltage further increased (Fig 4.4b), the Nafion I-V curve presents nonlinear

behavior even without graphene (Fig 4.4b, black), a behavior which is different with the

linear characteristics described in Chapter 3. At higher voltage, the proton current of a

Nafion bare hole, single- and two layers BN, remains in the same orders of magnitude,

indicating that conductivity of the system is limited by Nafion.

It is important that the evaporated Pt film is discontinuous as a continuous film has trapped

H2 bubbles between flakes and Pt, preventing further transport (Fig 4.7).

a b

Page 77: Proton transport through two-dimensional materials

`

77

Fig 4.5 (a) Inflated pristine single layer graphene across over a micro-well, (c) its AFM image, and (e)

its curvature reduction as a function of time. (b) Inflated 2nm Pt deposited single layer graphene

across over a micro-well and (d) its AFM image. Scale bar: 500nm.

a b

c d

e

Page 78: Proton transport through two-dimensional materials

`

78

In order to exclude the possibility that defects were introduced into 2D materials during Pt

evaporation processes, a pressured blister test [128] with atomic force microscope (AFM) is

used to measure the leak rate of Ar gas transport through graphene with 2nm Pt catalyst

film.

2µm in diameter, 200nm in depth wells were etched into 290nm SiO2/Si substrate with a

combination of photolithography and RIE dry etching. The etching rate of SiO2 is 1nm/s.

Suspended single layer graphene were fabricated by mechanical exfoliation and were wet

transferred onto predesigned micro-wells. Suspended graphene flakes are impermeable to

standard gases [22] and were clamped on the SiO2 substrate with surface forces [129].

However, gas molecules were able to enter and exit through micro-cavity in the substrate by

slow diffusion.

On the other hand, it has been reported that gas leaking rate is significantly increased

through defected single layer graphene than through pristine single layer graphene [28, 130].

With single layer graphene covered micro-well filled with pressed Ar, gas diffused through

defected single layer graphene within a minute, while for pristine graphene, Ar blister were

sustained for more than 1 day [128].

Here, suspended graphene covered micro-wells were filled with Ar by placing the sample in

a chamber pressurized with 2bar Ar above atmosphere pressure for 4 days. After being

removed from the pressed chamber, due to pressure difference in and out of the wells, the

graphene bulged up , which curvature could be monitored with AFM.

After being removed from the Ar pressed chamber, mechanical peeled pristine single layer

graphene was inflated to be a balloon with maximum height 120nm (Fig 4.5a and c). After

evaporated with 2nm Pt film, the sample was put back into the Ar pressurized chamber for 4

days. Inflated graphene was observed once more on Pt evaporated samples (Fig 4.5 b and d).

Comparable Ar leaking rate (slope in Fig 4.6) indicates that Pt evaporation did not introduce

extra defects into pristine graphene.

Page 79: Proton transport through two-dimensional materials

`

79

Fig 4.6 Maximum deflection of single layer graphene blister with 2nm Pt (blue, pink and green) and

pristine single layer graphene blister (black and red). Different color represents different sample.

Noting that the maximum height of the balloon for Pt evaporated sample is lower than for

pristine graphene, we attribute this as that Pt particles block the micro-cavities for gas

diffusion on SiO2.

4.4 Proton transport introduced H2 flow

Proton transport through 2D materials has been well investigated above, and with Pt

working as a catalyst, the proton conductivity of single layer BN is comparable with, if not

better than, Nafion. All experiments described depend on the reaction:

Page 80: Proton transport through two-dimensional materials

`

80

where two H atoms combine to form a H2 molecule.

With a continuous metal film covering the 2D flakes, after applying high bias potential (up to

2V), bubbles could be observed clearly under an optical microscope, indicating H2 gases

formation (Fig 4.7).

Fig 4.7 Single layer graphene covered with continuous Pt/Au film (5nm Pt + 40nm Au). (a) Before

proton transport measurements. (b) After measurements. H2 bubbles were produced between

graphene and metal film. Scale bar: 10µm.

As the proton transport current is stable, the H2 flow should also be continuous and possible

to be detected with a leak detector.

Sample preparation and measurement system

To detected H2 molecules, the 2D membranes were contacted with Nafion/Pd on one side

while a chromium (Cr) /gold (Au) contact provided the contact on the other side. A Cr/Au

contact was fabricated as shown in Fig 4.8. After photolithography (Fig 4.8a), Cr/Au is

deposited over the entire substrate by e-beam evaporation, including the area masked by

photoresist and areas where exposed photoresist is removed during development. In order

to achieve the metal contact only in the developed area, the remaining metal deposited on

a b

S-Gr

Page 81: Proton transport through two-dimensional materials

`

81

top of the photoresist mask has to be removed by dissolving the underlying photoresist (Fig

4.8b).

Fig 4.8 Fabrication of Cr/Au contact. (a) Substrate is masked with S1813. Contact area is opened by

photolithography and development. Scale bar: 300μm. (b) Cr/Au contact evaporated on developed

area. Scale bar: 300μm.

Fig 4.9 H2 flow sample diagram and measurement system. (a) Single layer graphene is over a 50µm

in-diameter through hole, separating chamber A filled with H2/H2O and chamber B connected to H2

leak detector. (b) Measurement system image.

a b

Chamber A Chamber B

a b

Page 82: Proton transport through two-dimensional materials

`

82

0.0 0.1 0.2 0.3

0

2

4

6

8

H2 flo

w r

ate

(10

-5b

ar

cm

3/s

)

Current (mA)

s1

s2

s3

theory

0 500 1000 1500 2000

6

8

10

12

H2 flo

w r

ate

(10

-5b

ar

cm

3/s

)

Time (s)

A typical recipe for Cr/Au contact is 3nm Cr and 40nm Au where Cr is used for better

adhesion on the SiNX/Si substrate. After evaporation, the sample is left in acetone until most

of the metal in masked area has been removed. Blowing with a pipette can be used to

accelerate this process. Subsequently, the sample is rinsed in IPA for 5 minutes before drying

in filtered N2.

Single layer graphene was transferred over a 50µm (in diameter) hole through the SiNX/Si

substrate, and 2nm Pt was evaporated on top (Fig 4.9a). The measurement was done in a

helium tight system (He leaking rate less than 1 x 10-8 bar·cm3/s, Fig 4.9b).

Fig 4.10 H2 flow rate through graphene flakes with Pt catalyst. (a) H2 flow rate with various bias

applied: a potential bias from 0V to 20V was applied. H2 flow rate could be controlled with voltage

applied between Au and PdHX electrodes. (b) Flow rate as a function of current across the graphene.

Red line: theoretical calculation. S1 to S3 represents different samples.

a b

0V

3V

10V

15V

20V

15V

10V

3V

0V

Page 83: Proton transport through two-dimensional materials

`

83

After the whole system is pumped down, chamber A (Fig 4.9a) is filled with a H2 + H2O gas

mixture up to 600mbar pressure while chamber B remains under vacuum (H2 leak rate < 1 x

10-6 bar·cm3/s).

The bias voltage was applied between the PdHX and Cr/Au electrodes. Both the current

across the two electrodes and the H2 leak rate were recorded.

With bias voltage applied from 0V to 20V, the H2 flow rate is controlled (Fig 4.10a) and

proportional to proton transport current (Fig 4.10b).

The Red line in Fig 4.10b is the theoretical values calculated according to the following

equation,

where is the H2 leak rate, i is the current through Pd and Cr/Au electrodes, NA is the

Avogadro constant. T is the temperature. Factor 2 arises because the two H atoms in one H2

molecule. Here we assume that all the current measured was from proton transport:

Experimental results match well with the theory calculation in Fig 4.10b, indicating that the

current measured is mainly from proton transport.

As a reference, 2nm gold was evaporated on graphene. The corresponding H2 leak rate was

below the noise level.

4.5 Conclusion

In summary, with a discontinuous Pt catalyst layer evaporated onto the 2D flakes, the

proton conductivity is greatly increased. Single layer BN is unique in the sense that it has

comparable proton conductivity with Nafion, while two layers BN and single layer graphene

Page 84: Proton transport through two-dimensional materials

`

84

conduct protons as well, which is consistent with results from Chapter 3. Further

investigation is limited by the Nafion conductivity. Proton transport introduced H2 gas flow

was measured as well and the flow rate could be controlled with a potential bias across the

2D membranes.

Page 85: Proton transport through two-dimensional materials

`

85

Proton transport through 2D materials

In liquids

In this chapter we review fabrication procedures of 2D materials devices that are suitable for

proton transport measurements in liquids. We start measuring proton transport through 2D

materials’ I-V characteristics at aqueous/aqueous interface, with 2D membranes separating

two aqueous phases at the interface. We also applied organic/aqueous interface, including

1,2 – dichloroethane (DCE)/aqueous immiscible interface and acetonitrile/aqueous miscible

interface, with graphene separation at the interface.

5.1 Introduction

The liquid/liquid (L/L) interface method of investigating charge transfer, including transport

of ions and electrons between species in solution, is well investigated since many important

phenomena in chemistry and biology involve processes that occur at L/L interfaces [131].

Among these processes, the proton is important as many reactions in organic chemistry

have acidic catalysts. Similarly, enzymes and proteins also utilize proton exchange processes

at various interfaces [132]. So proton transfer through the L/L interface has been reported

extensively [133, 134, 135].

Chapter Five

Page 86: Proton transport through two-dimensional materials

`

86

Since proton transport through 2D materials has been discussed in previous chapters, the

investigation of proton transport through L/L interface with 2D membranes separation could

be interesting not only as it could confirm proton transport through 2D materials, but also

give information about the liquid/2D materials interface.

5.2 Liquid/liquid interface method

In contrast to conventional electrochemical methods, where a solid electrode is immersed

into an electrolyte solution and charge transfer across the solid/liquid interface is studied,

liquid/liquid electrochemistry employs another liquid phase to replace the solid electrode.

Therefore the charge transfer occurs across the liquid/liquid interface. The two liquids must

be immiscible, or at least have restricted miscibility, or be separated physically, and suitable

electrolyte must also exist for both liquids in order to support the current flow in both

phases. This results in a system with a polarizable Interface between Two Immiscible

Electrolyte Solutions (ITIES) [136, 137, 138].

5.2.1 Immiscible interface

Typically, a liquid/liquid system contains an aqueous phase and an organic solution phase.

The most commonly used system is the water/1,2-dichloroethane interface system. It is

widely used in investigating electron transfer and ion transfer (including proton) across the

ITIES [135, 139, 140].

To carry out electrochemistry in a L/L system, electrolytes are needed in both liquid phases

to facilitate charge transport. LiCl or MgSO4 is commonly used as the aqueous phase

electrolyte due to their high conductivity in aqueous solution and their high hydrophilic

nature. However, in the organic phase, since the organic solution is a non-polar phase, an

organic electrolyte with a high dissociation constant is needed to provide conduction in the

organic phase. Generally, bis(triphenylphosporanylidene) ammonium (BTPPA+) is applied as

Page 87: Proton transport through two-dimensional materials

`

87

-0.5 0.0

-5

0

5

10

Cu

rre

nt (n

A)

Bias voltage (V)

without H+

5mM H+

the cation and tetraphenylborate (TPB-) or tetrakis(4-chlorophenyl) borate (TPBCl4-) as the

anion in the organic electrolyte.

An electric double layer can be established near the L/L interface, similar to the solid/liquid

interface case. The layer is usually a few nanometers thick, and contains ions (cation or

anion) in two phases depending on the polarity of the external electric field. Each ion has a

certain transfer potential for transfer across the L/L interface, which dictates the choice of

electrolyte. For a highly hydrophilic electrolyte in the aqueous phase and a highly lipophilic

electrolytes in the organic phase, respectively, there is a potential region without any

electrolyte ion transport; hence no net current flows across the interface. In this region

Fig 5.1 I-V characteristic of protons transporting through the 1,2-dichloroethane/water interface.

5mM H+ was introduced into the organic phase (Red curve). Blue curve: blank potential window.

H+ current

Page 88: Proton transport through two-dimensional materials

`

88

defined as a potential window, one can therefore analyze other processes, for example ion

transfer. As indicated above, different electrolytes yield different potential windows [141].

Transport of an ion, whose transport potential lies within the potential window, results in

the detection of current corresponding to the ion transferring from one phase to the other.

A comparison between Current-Voltage (CV) measurements of a blank potential window

(only organic/aqueous solution with their electrolytes) and proton (H+) transfer across the

interface is presented in Fig 5.1.

5.2.2 Bipolar cell

A bipolar electrode system employs a middle electrode separating two redox couples

located in separate phases. The electrical connection, or electron transfer, is controlled by a

potential bias across the two compartments of a cell. As two phases are physically not in

direct contact, mass transport is prevented while electron transport dominates the current

Fig 5.2 (a) Bipolar cell electron change system and (b) bipolar cell equilibrium single cell system. The

dashed square in (a) can be considered as a single electrode in (b).

a b Central electrode

Page 89: Proton transport through two-dimensional materials

`

89

response (Fig 5.2a) [142]. In this system, the potential drops almost entirely at the two

interfaces between solution and bipolar electrode when two ideal non-polarized electrodes

(the potential of which will not change from its equilibrium potential with a large current

density. The reason for this behavior is that the electrode reaction is extremely fast) are

used. To simplify the electron transfer at the interface, the concentration of redox couple in

one phase is in excess compared to the other phase so that charge transfer can be treated as

being limited by the low concentration phase only while the excess phase works as a solid

electrode (Fig 5.2b).

5.3 Sample fabrication and measurements

Fabrication of proton transport devices in liquids has to take liquid leakage into

consideration. The measurement system is a combination of immiscible L/L interface and

bipolar cell system.

PDMS mask fabrication

To avoid liquid leakage between the 2D flakes and the Si/SiNX substrate,

polydimethylsiloxane (PDMS) mask was designed and used for appropriate sealing.

PDMS is a soft and transparent solid organic polymer which is widely used in chemical and

biological micro-fluidic cells for adequate sealing [143, 144] due to its hydrophobic nature

and suitable mechanical properties [145]. PDMS can stick onto polished SiNx surface to avoid

liquids leakage while its transparency makes it possible to be transferred onto graphene

using optical alignment.

Page 90: Proton transport through two-dimensional materials

`

90

Fig 5.3 Procedures of PDMS mask fabrication. (a) Si plasma etching with a Su-8 photoresist mask. (b)

After etching, a 50µm tall pillar is etched on the Si substrate. (c) PDMS is spun onto the silicon

substrate, with the PDMS layer thickness less than the pillar height to generate a 30µm hole in the

PDMS. (d) Typical PDMS mask geometry.

To make the PDMS mask, a plain silicon wafer was spin coated with Su-8 2025 (negative

tone photoresist from MicroChem) at 2000rpm (resist thickness about 25μm) and prebaked

at 95⁰C for 5 minutes. After photolithography with a laser writer, the resist was softbaked at

95⁰C for 5 minutes and developed in Microposit EC solvent for 5 minutes, followed by RIE

silicon Bosch etching recipe for 20 minutes (2.7μm per minutes, Fig 5.3a), to have a 30μm in

a b

c d

Page 91: Proton transport through two-dimensional materials

`

91

diameter and 50μm tall pillar on the silicon wafer which will later be referred to as the

silicon master (Fig 5.3b).

Sylgard 184 PDMS (viscous liquid) was mixed with its curing agent (liquid) at a ratio of 10:1.

Subsequently, the mixture was placed into a desiccator for 20 minutes to free air bubbles

trapped in PDMS during mixing. Next, PDMS was spin coated onto silicon master at a spin

speed of 3000 rpm, at which speed the thickness of the PDMS layer is thinner than silicon

pillar (Fig 5.3c). A nitrogen blow technique could be used at this step [146] to blow the

PDMS prepolymer away from the Si pillars. After cure baking at 150⁰C for 15 minutes, the

PDMS was peeled off from the silicon master to produce a 10μm-thick PDMS membrane

with a 30μm diameter through hole (which is the size of the silicon pillar, Fig 5.3d).

Sample fabrication and measurements

Graphene and BN flakes were prepared by standard mechanical exfoliation on 290nm and

Fig 5.4 (a) Optical transfer of the PDMS mask on to 2D flakes. (b) Transferred sample.

70nm SiO2/Si wafer, respectively, while MoS2 flakes were prepared on a PMGI/PMMA

bilayer resist substrate. We use the “wet transfer” technique to transfer graphene and BN

a b

Page 92: Proton transport through two-dimensional materials

`

92

flakes and “dry transfer” to transfer MoS2 flakes onto straight through holes. The PDMS

mask was optically aligned and mechanically transferred on top of the flakes (Fig 5.4).

Fig 5.5 (a) Measurement fluidic cell and (b) schematic diagram.

Measurements were performed using an in-house made fluidic cell (Fig 5.5a). The potential

bias was applied by a Kelthley 2636 SourceMeter between the two Ag/AgCl electrodes in the

two phases. Samples were amount into the cell to separate two liquid phases (Fig 5.5b). All

the measurements were done with-in a Faraday cage.

5.4 Results

In the liquid-liquid experiments, the results are consistent with previous experiments, that

BN is the most conductive for protons among the 2D materials investigated in this thesis,

while single layer graphene and two layers BN are conductive to protons as well (Fig 5.6).

Interestingly, the different materials behave differently in liquid environment. So in this

Chapter, graphene, BN and MoS2 will be presented separately.

Page 93: Proton transport through two-dimensional materials

`

93

0.01

0.1

1

Conducta

nce (

nS

)

S-BN S-Gr Bi-BN Bi-Gr S-Mo Tr-Gr

0.02

Fig 5.6 Proton transport in liquids. Histogram of the proton conductivity of various 2D materials in

0.1M HCl aqueous solution. Single layer BN (S-BN, red) is the best proton conductor while single layer

graphene (S-Gr, green) and two layers BN (Bi-BN, blue) have a comparable conductivity. Current

responses of two layers graphene (Bi-Gr, cyan), single layer MoS2 (S-Mo, pink) and three layers

graphene (Tr-Gr, yellow) stay within the noise level (shadowed area in the figure). All the 2D flakes

are over 2µm in diameter straight through hole in silicon nitride substrate.

Graphene

The lateral size of typical graphene flakes is above 100µm. To better investigate graphene’s

behavior in liquids, the sample geometry is modified with graphene flakes over a 10µm (in

diameter) straight through hole, as shown in Fig 5.7a.

0.1M HCl 0.1M HCl

Page 94: Proton transport through two-dimensional materials

`

94

Fig 5.7 Sample geometry and images. (a) Structure and geometry of a graphene sample. (b) Optical

microscope image of a graphene device at 20x magnification. Insert: 10x magnification (top left) and

5x magnification (top right). (c) SEM imaging of suspended single layer graphene. (d) Stressed

suspended single layer graphene with a nano-hole on the edge. The spikes in the middle are

contamination spots burnt by the electron beam. Insert: Zoom in of the graphene hole on the edge

(dashed circle area).

Aqueous/aqueous interface

To determine the height of the activation barrier for proton transport through graphene,

two aqueous 0.1M HCl (H+ as proton source) symmetric environment separated by graphene

were initially described.

a b

c d

Page 95: Proton transport through two-dimensional materials

`

95

A symmetric system is important since the open circuit potential difference depends on the

proton concentration gradient, which is 59 mV per unit pH according to the Nernst equation

at room temperature:

Where E0 is the standard cell potential at room temperature, z is the number of moles of

charges transferred, aRed and aOx is the chemical activity of the reduced and oxidized species,

respectively.

A bias voltage was applied between the two compartments in the cell and the current was

measured. Typically the current was left to stabilize over a few minutes (Fig 5.8 insert) in

order to establish a steady state across the diffusion layer, which refers to the proton

concentration gradient between the graphene surface and the bulk solution.

Figure 5.8 shows the current response as a function of bias voltage for graphene and its few

layer counterparts. As the experiment was performed in a symmetric system, only a positive

potential window of 0V to 2V is presented. With single layer graphene, no net current more

than the leakage level was observed until 0.5V was applied, where a pronounced increase in

current starts to occur (Fig 5.8 blue curve). As the graphene blocks direct mass transport

between the two compartment, no ion transfer and hence no current should be observed.

Therefore the current which significantly rises at 1.2V, is attributed to proton transport

through graphene.

In order to exclude the possibility of nanometer sized holes in single layer graphene allowing

ion transport, flakes were characterized using Raman spectroscopy and SEM. No holes or D

peak were observed, indicating that graphene remains continuous and rigid after the

measurements.

Page 96: Proton transport through two-dimensional materials

`

96

0 1 2

0.0

0.5

Curr

ent

(nA

)

Bias voltage (V)

monolayer

bilayer

trilayer

graphite

Fig 5.8 Proton transport through various thicknesses graphene at the aqueous/aqueous interface. A

typical potential window of 0V to 2V is demonstrated, with the voltage stepped in increments of 0.1

V. The steady current (Insert) were plotted with its bias voltage. Proton conductive current was

measured within 0.1M HCl with the separation of single layer graphene (blue), unique compared

against the response seen for bilayer (green), trilayer (red), and thick graphite (black). Insert: Steady-

state current measured as a function of applied bias voltage.

To further examine the transport through graphene, we calculated the diffusion current

limited by the 10μm hole. This is given by [147]:

0 50 100 150 200

0.0

0.5

1.0

1.5

Cu

rre

nt (n

A)

Time (s)

0.7V

1V

1.2V

1.5V

1.8V

(1)

Page 97: Proton transport through two-dimensional materials

`

97

where n is the charge number of the transferring species (1 in the case of proton), F is the

Faraday constant, D and C0 are the diffusion coefficient (9.31 x 10-9 m2/s) and the bulk

concentration of H+ in water, respectively, and r is the radius of the membrane which here is

the size of the graphene exposed to solution.

According to Equation (1), the diffusion-limited current should be 100nA, more than two

orders of magnitude larger than the limiting current measured from the experiment. This

indicates that the current is not limited by the diffusive flux of protons, rather by graphene.

We suggest that the current reduction is due to graphene being covered with adsorbed

organic contamination making the effective area much smaller than the area exposed in the

solution. These adsorbates are sufficient to block the proton transfer. Poor contact of

associated protons (H3O+) with the graphene surface is another problem since the proton is

separated by its water shell, about 0.6nm away from graphene surface [148].

The result in Fig 5.8 shows that a single layer membrane was unique since bilayer and

thicker samples displayed a current response which remained within the leakage current

level over the same potential range. Noting that as all thicknesses graphite are good electron

conductors, the result indicates there is no distinguishable electron transport current

through our samples in the potential window we applied, and monolayer graphene is the

only proton conductor among its few layer counterparts.

1,2-Dichloroethane (DCE)/aqueous interface

To investigate the proton transport in more details, the 1,2-Dichloroethane(DCE, Fig

5.9a)/aqueous interface was used. This immiscible solvent system has been very well

investigated for proton transport [135]. Here, 1-[Bis(trifluoromethanesulfonyl)methyl]-

2,3,4,5,6-pentafluorobenzene (H+A- , Tokyo Chemical Institute, 95%, 100mg, Fig 5.9b) was

used as the organic phase proton source since it has a high proton dissociation constant (pKa

about -14) in DCE [149]. 0.1mM LiCl and 0.1mM BTPPA+TPBCl4- are the electrolytes in

aqueous and organic phase, respectively.

Page 98: Proton transport through two-dimensional materials

`

98

0 1

0

1

2

Curr

ent

(nA

)

Bias voltage (V)

5mM H+

2mM H+

1mM H+

DCE only

Fig 5.9 Chemical structure of (a) 1,2-Dichloroethane and

(b) 1-[Bis(trifluoromethanesulfonyl)methyl]-2,3,4,5,6-pentafluorobenzene.

Fig 5.10 Current response as a function of applied bias with graphene separating DCE/aqueous

interface for various acid concentration. Insert: sub-linear dependence of saturating current and acid

concentration.

0 2 4

0

1

Sa

tura

tio

n C

urr

en

t (n

A)

Acid concentration (mM)

Page 99: Proton transport through two-dimensional materials

`

99

0 1

0

1

2

Curr

ent

(nA

)

Bias voltage (V)

5 layers

bilayer

single layer

Fig 5.10 shows the limiting current as a function of proton concentration in DCE/water with

graphene separating the two liquids at the interface. Protons transport from DCE phase into

aqueous phase. As the response current with negative bias voltage applied was within the

noise level, only I-V curves at positive bias voltage are presented in Fig 5.10. Graphene is

sensitive to H+A- concentration down to 1mM.

By applying Eq (1), with the 1 mM proton concentration, the diffusion limited current is 1nA,

comparable with the saturated current experimentally measured (Fig 5.10). The insert of Fig

5.10 shows the limiting currents as a function of acid concentrations. The linear dependence

implies that in the low H+ concentration range, the current is limited by the proton diffusion.

At the DCE/aqueous interface, bilayer or thicker graphene flakes could not transport protons

across (Fig 5.11), which is consistent with our previous experiment.

Fig 5.11 Proton transport current response with various thicknesses of graphene flakes in the

DCE/water system.

Page 100: Proton transport through two-dimensional materials

`

100

0 1 2

0.0

0.5

Bias voltage (V)

Cu

rre

nt

(nA

)

Graphene

MoS2

Aqueous/aqueous

0 1 2

0

1

2

Cu

rre

nt

(nA

)

Bias voltage (V)

Graphene

MoS2

DCE/aqueous

Molybdenum disulfide and Boron nitride

Single layer molybdenum disulfide (MoS2) and single layer boron nitride (BN) were studied in

liquids as well, as they are also mechanically stable to be measured in liquids. However, with

MoS2, the current response deviated from the behavior seen with single layer graphene in

the same potential window, in both aqueous/aqueous (Fig 5.12a) and DCE/aqueous (Fig

5.12b) cases.

Fig 5.12 Proton transport current responses of single layer MoS2 and single layer graphene. (a) 0.1M

HCl aqueous/aqueous interface. (b) DCE/aqueous interface with 5mM H+A- in DCE phase.

Boron nitride as a proton conductor was well investigated in the previous chapters, but its

proton conducting behavior is investigate in an aqueous/aqueous interface system with BN

separation as well. Limited by the lateral size of single layer BN flakes (typically 10µm,

occasionally up to 30µm), the sample geometry is modified so that the through hole size is

2µm in diameter while the PDMS mask hole size is 20µm.

a b

Page 101: Proton transport through two-dimensional materials

`

101

0 1

0

4

Curr

ent

(nA

)

Bias voltage (V)

S-BN

Bi-BN

Tr-BN

0 1 2

0.0

0.2

0.4 Bi-BN

S-Gr

Cu

rre

nt (n

A)

Potential(V)

Boron nitride proton conductivity measurements were carried out in two 0.1M HCl aqueous

solutions separated by a BN membrane. The current response of single layer BN and its few

layers counterparts as a function of applied bias voltage is presented in Figure 5.13. Thin BN

membranes demonstrate a significant proton current, with a single layer BN proton

conductance of 5nS, one order of magnitude better than its double layer, while flakes

thicker than three layers have current response within the noise level.

Fig.5.13 I-V characteristics of single layer boron nitride (black plots) and its counterparts bilayer

BN(red plots) and three layers BN (green plots) in 0.1M HCl. Insert: zoom in of bilayer and trilayer BN.

Noting that BN exhibits a linear proton current vs voltage dependence, which follows Ohm’s

law, the result indicates that the transport barrier for protons penetrating through BN in

Page 102: Proton transport through two-dimensional materials

`

102

liquids is kept at the thermal turbulence level. Since hexagonal boron nitride is AA stacking,

bilayer BN shows same current trend.

5.5 Conclusion

In conclusion, in L/L experiments, the proton conductance results are consistent with the

solid Nafion experiments described in previous chapters in that single layer BN is the most

conductive material among the 2D materials investigated. Single layer graphene is

conductive to protons in liquids but presents different I-V behaviors in aqueous/aqueous

and DCE/aqueous systems.

We attribute difference of proton transport behavior in liquids than in solid Nafion to

medium effects on transport barrier. Though, liquid behavior of graphene is not completely

clear at this stage. Further investigation is needed.

5.6 Supplementary experiments

0 1 2

0

1

2

Curr

en

t (n

A)

Bias voltage (V)

2.4 0 1 2

0.0

0.5

1.0

Curr

en

t (n

A)

Bias voltage (V)

2.4 0 1 2

0.0

0.5

Curr

en

t (n

A)

Bias voltage (V)

2.4

a b c

Page 103: Proton transport through two-dimensional materials

`

103

0 1

0

1

Curr

ent

(nA

)

Bias voltage (V)

10mM

2mM

1mM

Fig 5.14 Water electrolysis at various thicknesses graphene membranes. (a) Single layer graphene. (b)

Double layers graphene. (c) Three layers graphene. Potential of water electrolysis are at 2.4V.

In the aqueous/aqueous interface system (0.1M HCl/Graphene/0.1M HCl system with Pt

electrodes), graphene behaves as a centre electrode, like in a bipolar cell system in which

water electrolysis would occur at a potential of 2.4V, and chlorine oxidation 2.6V. This can

be compared with the single cell potential for water electrolysis of 1.23V and chlorine

oxidation of 1.3V, respectively.

Fig 5.14 shows that water electrolysis occurs for various graphene thicknesses at around

2.4V, indicating that our graphene works quite well as a centre electrode in the double cell

system. Potential window is ±2.4V.

.

0 5 100.4

0.8

Satu

ration c

urr

ent (n

A)

HCl concentration (mM)

Page 104: Proton transport through two-dimensional materials

`

104

0 1

0.0

1.5

3.0

Curr

ent

(nA

)

Bias voltage (V)

5mM

2mM

1mM

Fig 5.15 Current response at various acid concentrations as a function of applied bias for the

DCE/aqueous interface with protons on the aqueous side. Na+ A- was as electrolyte in DCE since A-

behaves as proton accepter.

Transport of protons from the aqueous phase to the organic phase (DCE, with Na+A- as the

organic phase electrolyte) phase was measured and is shown in Fig 5.15. Since protons are

preferentially solvated by the water phase, the transport potential (around 1V) is higher

than the transport potential of protons from DCE to water (see Fig 5.8, about 0.5V).

Fig 5.16 Current response at various acid (H+A-) concentrations as a function of applied bias at the

acetonitrile/aqueous interface with graphene separation. H+ was in the organic phase. Insert: limiting

current as a function of acid concentration.

2 4

0

1

2

Sa

tura

tio

n C

urr

en

t (n

A)

Acid concentration (mM)

Page 105: Proton transport through two-dimensional materials

`

105

Since DCE and water separated into two mutually-saturated phases, there is an interface

even without introducing graphene. To avoid the possibility that recorded data are due to

proton transport through the DCE/water interface with broken graphene membranes, a

miscible interface was investigated as well. Fig 5.16 shows the results obtained from the

acetonitrile/aqueous miscible interface with graphene separation. The same chemicals were

used as in the DCE/aqueous experiments. H+A- was in acetonitrile phase. Proton transport

current with a linear proton concentration dependence were observed for this system as

well. It is worth noting that without introducing graphene at the acetonitrile/aqueous

interface, no regular I-V characteristics could be measured since the two phases are miscible

with each other.

Page 106: Proton transport through two-dimensional materials

`

106

Summary

6.1 Conclusion

This thesis presents a study of proton transport through two dimensional materials: boron

nitride, graphene and molybdenum disulfide. Proton conductivity is investigated in both a

Nafion based solid system and a liquid/liquid interface based system. By electrically

measuring the I-V characteristics, single layer boron nitride is proved to be the best proton

conductor among the two dimensional membranes studied in this thesis as a consequence

of its localized electron density. Single layer graphene and bilayer boron nitride are

conductive to protons as well and have comparable proton conductivity to each other. Other

thin membranes including single layer MoS2 and thicker graphene and BN flakes are not

permeable to protons.

The proton transport efficiency is greatly increased with a Pt catalyst evaporated on the two

dimensional membranes. Single layer boron nitride reaches a proton conductance as good

as, if not better than, Nafion, while the performance of other two dimensional membranes is

improved as well. Proton transport introduced hydrogen flow through graphene was

Chapter Six

Page 107: Proton transport through two-dimensional materials

`

107

detected and the flow rate could be controlled by the voltage applied, yet another evidence

of proton transport.

Graphene is specially studied at the liquid/liquid interface since it behaves differently

compared to the Nafion system as a result from a different proton diffusion mechanism. An

aqueous/aqueous symmetric interface and an 1,2-dichloroethane/aqueous immiscible

interface were studied, showing that graphene is sensitive to proton concentration down to

1mM. However, further investigations are necessary in the liquid/liquid interface

experiment.

The study in this thesis reveals a new, unique property of two dimensional materials, namely

that 2D materials including single layer BN and single layer graphene are permeable to

protons. This paves the way for them to be incorporated in fields where a proton semi-

permeable membrane is required.

6.2 Outlook

Electron transport through graphene in liquids

As the liquid/liquid interface measurement system for investigating charge transfer through

graphene has been set up, one extension is studying electron transfer between two redox

species in solutions separated by graphene. The electron transfer rate with various

thicknesses of graphene could be investigated as well.

Graphite has been used as a battery electrode material for ages – weather in normal AA

batteries or Li-ion batteries. With a high conductivity comparable with metal, graphite is

more stable, both chemically and thermally, which makes it a more useful electrode than

metals in applications. Recently, graphite has been reported as an alternative electrode

material in electrochemical capacitors [150,151] and in various sensors in solar cells [152,

153]. Nanostructuring of electrodes with carbon nanotubes have been reported as well

[154,155].

Page 108: Proton transport through two-dimensional materials

`

108

1.2 1.4 1.6

0.4

0.6

0.8

Curr

ent

(nA

)

Voltage (V)

Graphene, as graphite’s single layer counterpart, attracted enormous interests because of its

unique transport properties. With its faster electron exchange rate compared to graphite,

graphene is considered as an electrode material as well, including graphene based

supercapacitors[156], and the use of graphene as a transparent electrodes in solar cells

[157]. Optimization of such applications needs a complete understanding about electron

transport properties of graphene. Planar electrochemical electron transfer kinetics of

graphene has been reported recently [158, 159] while vertical electron transport properties

were barely investigated.

With liquid measurement system established in Chapter 5, 0.5mM (NH4)2IrCl6 and 5mM

(NH4)2IrCl6 and 5mM (NH4)3IrCl6, both of which were buffed in 0.1M NaCl aqueous solution,

was separated into two phases with single layer graphene supported with 10μm in diameter

through hole Si/SiNX substrate. PDMS mask was applied to avoid liquids leaking (Fig 6.1a).

Fig 6.1 Electron transport through graphene. (a) Measurement geometry and mechanism. (b) IV

characteristic of electron transport between Ir3+ and Ir4+.

a b

Page 109: Proton transport through two-dimensional materials

`

109

Fig 6.1b shows initial experiment result of electron transport (bias voltage scan rate:

10mV/s). At bias voltage 1.3V, a significant current rise occurred indicating electron

transport current is measurable. According to Eq. (1) in Chapter 5:

where Irn+ diffusion constant D=9 x 10-10 m2/s, diffusion limiting current is 0.8nA against

0.4nA measured experimentally. Noting that as in double cell system, Iridium

oxidization/reduction potential was doubled from 0.8V against standard hydrogen electrode

to 1.3V.

Further experiments, including graphene thickness and scan rate influences to electron

transport rate, will be performed to have more information of electron transport efficiency

in electrochemistry.

Proton permeable membrane

Another obvious extension is employing two dimensional materials as proton permeable

membranes. But limited by the 2D membrane size and mechanical stability, it is not yet

competitive in areas such as fuel cells and so on where a macro –size membrane is required.

Though, two-dimensional materials are competitive in proton exchange between protein,

where the proteins need to be separated by membranes of suitable size and thickness

without the membrane being chemically or physically damaged.

Hydrogen collection is another interesting area of future research. As demonstrated in

Chapter 4, hydrogen was collected from a 10% hydrogen and 90% argon gas mixture.

Weather we can harvest hydrogen from other gas mixtures, even air, with adequate

efficiency is a big challenge ahead.

Page 110: Proton transport through two-dimensional materials

`

110

References

[1] M. Wikström, Current Opinion in Structural Bio. 8, 480-488 (1998).

[2] Klaus-Dieter Kreuer, Chem. Mater. 8, 610-641 (1996).

[3] N. Agmon, Chem. Phys. Lett. 244, 456 (1995).

[4] Udo W. Schmitt and G. A. Voth, J. Chem. Phys. 111, 9361 (1999).

[5] T. J. F. Day et al., J. Am. Chem. Soc. 122, 12027 (2000).

[6] A. A. Kornyshev et al., J. Phys Chem. B 107, 3351 (2003).

[7] S. J. Paddison, Annu. Rev. Mater. Res 33, 289 (2003).

[8] Fuel cell today, The fuel cell industry review 2012 (2012).

[9] K. D. Kreuer, J. Memberane Sci. 185, 29 (2001).

[10] K. D. Kreuer, S. J. Paddison, E. Spohr and M. Schuster, Chem. Rev. 104, 4637 (2004).

[11] K. S. Novoselov, A. K. Geim, S. V. Morozov, D. Jiang, Y. Zhang, S. V. Dubonos, I. V.

Grigorieva and A. A. Firsovet, Science 306, 666 (2004).

[12] H. W. Kroto, J. R. Heath, S. C. O’Brien, R. F. Curl and R. E. Smalley, Nature 318, 162

(1985).

[13] S. Iijima, Nature 354, 56 (1991).

[14] A. K. Geim and K. S. Novoselov, Nature Materials 6, 183 (2007).

[15] K. S. Novoselov, A. K. Geim, S. V. Morozov, D. Jiang, M. I. Katsnelson, I. V. Grigorieva, S.

V. Dubonos and A. A. Firsov, Nature 438, 197 (2005).

[16] Y. Zhang, Y. W. Tna, H. L. Stormer and P. Kim, Nature 438, 201 (2005).

[17] A. H. Castro Neto, F. Guinea, N. M. R. Peres, K. S. Novoselov and A. K. Geim, Rev. Mod.

Phys. 81, 109 (2009).

Page 111: Proton transport through two-dimensional materials

`

111

[18] S. D. Sarma, S. Adam, E. H. Hwang and E. Rossi, Rev. Mod. Phys 83, 407 (2010).

[19] A. K. Geim, Science 324, 1530 (2009).

[20] C. Lee, X. Wei, J. W. Kysar, J. Hone, Science 321, 385 (2008).

[21] J. S. Bunch, A. M. Zande, S. S. Verbridge, A. W. Frank, D. M. Tanenbaum, J. M. Parpia, H.

G. Craighead and P. L. McEuen, Science 315, 490 (2007).

[22] J. S. Bunch, S. S. Verbridge, J. S. Alden, A. M. Zande, J. M. Parpia, H. G. Craighead and P.

L. McEuen, Nano. Lett. 8, 2458 (2008).

[23] A. Balandin, S. Ghosh, W. Bao, I. Calizo, D. Teweldebrhan, F. Miao and C. N. Lau, Nano.

Lett. 8, 902 (2008).

[24] I. Meric, M. Y. Han, A. F. Young, B. Ozyilmaz, P. Kim and K. L. Shepard, Nature

Nanotechnology 3, 654 (2008).

[25] R. R. Nair, P. Blake, A. N. Grigorenko, K. S. Novoslov, T. J. Booth, N. M. R. Peres and A. K.

Geim, Science 320, 1308 (2008).

[26] Y. Zhang, J. P. Small, M. E. S. Amori and P. Kim, Phys. Rev. Lett. 94, 176803(2005).

[27] L. Britnell, R. V. Gorbachev, R. Jalil, B. D. Belle, F. Schedin, A. Mishchenko, T. Georgiou,

M. I. Katsnelson, L. Eaves, S. V. Morozov, N. M. R. Peres, J. Leist, A. K. Geim, K. S.

Novoselov and L. A. Ponomarenko, Science 335, 947 (2012).

[28] D. Jiang, V. R. Cooper and S. Dai, Nano Lett. 9, 4019 (2009)

[29] K. Sint, B. Wang and P. Král, J. Am. Chem. Soc. 130, 16448 (2008).

[30] D. Cohen-Tanugi and J. C. Grossman, Nano. Lett. 12, 3602 (2012).

[31] S. Garaj, W. Hubbard, A. Reina, J. Kong, D. Branton and J. A. Golovchenko, Nature 467,

190 (2010).

[32] R. R. Nair, H. A. Wu, P. N. Jayaram, I. V. Grigorieva and A. K. Geim, Science 335, 442

(2012).

[33] K. S. Novoselov, D. Jiang, F. Schedin, T. J. Booth, V. V. Khotkevich, S. V. Morozov and

A. K. Geim, Proc. Natl. Acad. Sci. USA 102, 10451 (2005).

[34] J. N. Coleman et al., Science 331, 568 (2011).

Page 112: Proton transport through two-dimensional materials

`

112

[35] C. R. Dean, A. F. Young, I. Meric, C. Lee, L. Wang, S. Sorgenfrei, K. Watanabe, T.

Taniguchi, P. Kim, K. L. Shepard and J. Hone, Nature Nanotechnology 5, 722 (2010).

[36] Y. Zhang, J. Ye, Y. Matsuhashi and Y. Iwasa, Nano. Lett. 12, 1136 (2012).

[37] D. Lembke and A. Kis, ACS Nano 6, 10070 (2012).

[38] B. Radisavljevic, A. Radenovic, J. Brivio, V. Giacometti, and A. Kis, Nature

Nanotechnology 6, 147 (2011).

[39] D. J. Late et al., ACS Nano 7, 4879 (2013).

[40] F. K. Perkins, A. L. Friedman, E. Cobas, P. M. Campbell, G. G. Jernigan and B. T. Jonker,

Nano Lett. 13, 668 (2013).

[41] Y. Li, Y. Li, C. M. Araujo, W. Luo and R. Ahuja, Catal. Sci. Technol. 3, 2214 (2013).

[42] R. Pohl et al., Nature 466, 213 (2010).

[43] C. Dellago, M. M. Naor and G. Hummer, Phys. Rev. Lett. 90, 105902 (2003).

[44] M. R. Karim et al., J. Am. Chem. Soc. 135, 8097 (2013).

[45] W. L. Wang and E. Kaxiras, New J. Phys. 12, 125012 (2010).

[46] M. Miao, M. B. Nardelli, Q. Wang and Y. Liu, Phys. Chem. Phys. 15, 16132 (2013).

[47] E. Stolyarova et al., Nano Lett. 9, 332 (2009).

[48] S. Mathew et al., Carbon 49, 1720 (2011).

[49] P. R. Wallace, Phys. Rev. 71, 622 (1947).

[50] F. Schedin, A. K. Geim, S. V. Morozov, E. W. Hill, P. Blake, M. I. Katsnelson and K. S.

Novoselov, Nature Materials 6, 652 (2007).

[51] J. –H Chen, W. G. Cullen, C. Jang, M. S. Fuhrer and E. D. Williams, Phys. Rev. Lett. 201,

236805 (2009).

[52] J. –H. Chen, C. Jang, S. Adam, M. S. Fuhrer, E. D. Williams and M. Ishigami, Nature

Physics 4, 377(2008).

[53] M. I. Katsnelson and A. K. Geim, Philosophical Transaction of the Royal Society A-

Mathematical Physical and Engineering Science 366, 195 (2008).

Page 113: Proton transport through two-dimensional materials

`

113

[54] J. –H. Chen, C. Jang, S. Xiao, M. Ishigami and M. S. Fuhrer, Nature Nanotechnology 3,

206 (2008).

[55] K. I. Bolotin, K. J. Sikes, J. Hone, H. L. Stormer and P. Kim, Phys. Rev. Lett. 101, 096802

(2008).

[56] M. Ishigami, J. H. Chen, W. G. Cullen, M. S. Fuhrer and E. D. Williams, Nano Lett. 7, 1643

(2007).

[57] A. S. Mayorov, D. C. Elias, I. S. Mukhin, S. V. Morozov, L. A. Ponomarenko, K. S.

Novoselov, A. K. Geim and R. V. Gorbachev, Nano Lett. 12, 4629 (2012).

[58] A. S. Mayorov, R. V. Gorbachev, S. V. Morozov, L. Britnell, R. Jalil, L. A. Ponomarenko, P.

Blake, K. S. Novoselov, K. Watanabe, T. Taniguchi and A. K. Geim, Nano Lett. 11, 2369

2011).

[59] K. S. Novoselov, Z. Jiang, Y. Zhang, S. V. Morozov, H. L. Stormer, U. Zeitler, J. C. Maan, G.

S. Boebinger, P. Kim and A. K. Geim, Science 315, 1379 (2007).

[60] M. I. Katsnelson, K. S. Novoselov, A. K. Geim, Nature Physics 2, 620 (2006).

[61] A. F. Yong and P. Kim, Nature Physics 5, 222 (2009).

[62] K. Watanabe, T. Taniguchi and H. Kanda, Nature Materials 3, 404 (2004).

[63] Y. Kubota, K. Watanabe, O. Tsuda and T. Taniguchi, Science 317, 932 (2007).

[64] Y. Shi, C. Hamsen et al., Nano Lett. 10, 4134 (2010).

[65] L. Song, L. Ci et al., Nano Lett. 10, 3209 (2010).

[66] L. Britnell, R. V. Gorbachev et al., Nano Lett. 12, 1707 (2012).

[67] C. Lui, L. Liu, K. F. Mak, G. W. Flynn and T. F. Heinz, Nature 462, 339 (2009).

[68] A. F. Young, C. R. Dean, I. Meric, S. Sorgenfrei, H. Ren, K. Watanabe, T. Taniguchi, J.

Hone, K. L. Shepard and P. Kim, Phys. Rev. B 85, 235458 (2012).

[69] G. H. Lee, Y. J. Yu, C. Lee, C. Dean, K. L. Shepard, P. Kim and J. Hone, Appl. Phys. Lett. 99,

243114 (2011).

[70] H. E. Sliney, Tribology International 15, 303 (1982).

[71] S. Cohen, L. Rapoport, E. A. Ponomarev, H. Cohen, R. Tenne and C. L. Clement, Thin Solid

Films 324, 190 (1998).

Page 114: Proton transport through two-dimensional materials

`

114

[72] A. Splendiani, L. Sun, Y. Zhang, T. Li, J. Kim, C. Y. Chim, G. Galli and F. Wang, Nano Lett.

10, 1271 (2010).

[73] J. K. Ellis, M. J. Lucero and G. E. Scuseria, Appl. Phys. Lett. 99, 261908 (2011).

[74] Z. Yin, H. Li, H. Li, L. Jiang, Y. Shi, Y. Sun, G. Lu, Q. Zhang, X. Chen and H. Zhang, ACS Nano

6, 74 (2012).

[75] O. Leenaerts, B. Partoens and F. M. Peeters, Appl. Phys. Lett. 93, 193107 (2008).

[76] V. Berry, Carbon 62, 1 (2013).

[77] G. F. Schneider, S. W. Kowalczyk, V. E. Calado, G. Pandraud, H. W. Zandbergen, L. M. K.

Vandersypen and G. Dekker, Nano Lett. 10, 3163 (2010).

[78] C. A. Merchant et al., Nano Lett. 10, 2915 (2010).

[79] U. F. Keyser, J. R. Soc. Interface 8, 1369 (2011).

[80] B. M. Venkatesan and R. Bashir, Natore Nanotechnology 6, 615 (2011).

[81] N. Mohanty, M. Fahrenholtz, A. Nagaraja, D. Boyle and V. Berry, Nano Lett. 11, 1270

(2011).

[82] F. Guo, G. Silverberg, S. Bowers, S. Kim, D. Datta, V. Shenoy and R. H. Hurt, Environ. Sci.

Technol. 46, 7717 (2012).

[83] N. T. Kirkland, T. Schiller, N. Medhekar and N. Birbilis, Corrosion Sci. 56, 1 (2012).

[84] J. K. Holt, H. G. Park, Y. Wang, M. Stadermann, A. B. Artyukhin, C. P. Grigoropoulos, A.

Noy and O. Bakajin, Science 312, 1034 (2006).

[85] B. J. Hinds, N. Chopra, T. Rantell, R. Andrews, V. Gavalas and L. G. Bachas, Science 303,

62 (2004).

[86] G. Compagnini, F. Giannazzo, S. Sonde, V. Rainen and E. Rimini, Carbon 47, 3201 (2009).

[87] T. A. Hilder, D. Gorden and S. H. Chung, Small 5, 2183 (2009).

[88] C. Y. Won and N. R. Aluru, J. Am. Chem. Soc 129, 2748 (2007).

[89] P. Blake, E. W. Hill, A. H. Castro Neto, K. S. Novoselov, D. Jiang, R. Yang, T. J. Booth and A.

K. Geim, Appl. Phys. Lett. 91, 063124 (2007).

[90] Y. Zhang, L. Zhang and Z. Zhou, Acc. Chem. Res. 46, 2329 (2013)

Page 115: Proton transport through two-dimensional materials

`

115

[91] X. Li, W. Cai et al., Science 324, 1312 (2009).

[92] S. Bae, H. Kim et al., Nature Nanotechnology 5, 574 (2010).

[93] Y. Hernasndez, V. Nicolosi et al., Nature Nanotechnology 3, 563 (2008).

[94] R. J. Smith, P. J. King et al, Adv. Mater. 23, 3944 (2011).

[95] C. Berger, Z. Song et al., Science 312, 1191 (2006).

[96] R. V. Gorbachev, I. Riza R. R. Nair, R. Jalil, L. Britnell, B. D. Belle, E. W. Hill, K. S. Novolelov,

K. Watanabe, T. Taniguchi, A. K. Geim and P. Blake, Small 7, 465 (2011).

[97] M. Engineering, Microelectronic Engineering 6, 77 (1987).

[98] H. Jansen, H. Gardeniers, M. Boer, M. Elwenspoek and J. Fluitman, J. Micromech.

Microeng. 6, 14 (1996).

[99] F. R. de Almeida, R. K. Yamamoto and H. S. Maciel, J. Nuclear. Mater. 200, 371 (1993).

[100] H. Seidel, L. Csepregi, A. Heuberger and H. Boumgartel, J. Electrochem. Soc. 137, 3612

(1990).

[101] K. E. Bean, IEEE Transactions on electron devices 25, 1185 (1978).

[102] R. R. Nair, P. Blake, J. R. Blake, R. Zan, S. Anissimova, U. Bangert, A. P. Golovanov, S. V.

Morozov, A. K. Geim, K. S. Novoselov and T. Latychevskaia, Appl. Phys. Lett. 97, 153102

(2010).

[103] L. A. Ponomarenko, A. K. Geim, A. A. Zhucov, R. Jalil, S. V. Morozov, K. S. Novoselov, I.

V. Grigorieva, E. H. Hill, V. V. Cheianov, V. I. Fal’ko, K. Watanabe, T. Taniguchi and R. V.

Gorbachev, Nature Phys. 7, 958 (2011).

[104] N. Tombros, A. Veligura, J. Junesch, J. J. Berg, P. J. Zomer, M. Wojtaszek, I. J. V. Marun,

H. T. Jonkman and B. J. Wees, J. Appl. Phys 109, 093702 (2011).

[105] S. J. Paddison, Annu. Rev. Mater. Res. 33, 289 (2003)

[106] P. Chio, N. H. Jalani and R. Datta, J. Electrochem. Soc 152, E123 (2005).

[107] L. L. Jewell and B. H. Davis, Appl. Catalysis A: General 310, 1 (2006).

[108] L. J. Gillespie and F. P. Hall, J. Am. Chem. Soc. 48, 1207(1926).

[109] L. J. Gillespie and L. S. Galstaun, J. Am. Chem. Soc. 58, 2565(1936).

Page 116: Proton transport through two-dimensional materials

`

116

[110] J. P. Hoare and S. Schuldiner, J. Electrochem. Soc. 102, 485 (1955).

[111] S. Schuldiner and J. P. Hoare, J. Chem. Phys. 23, 1551 (1955).

[112] S. Kishore, J. A. Nelson, J. H. Adair and P. C. Ekluna, J. Alloys and Compounds 389, 234

(2005).

[113] D. W. Murphy, S. M. Zahurak, B. Vyas, M. Thomas, M. E. Badding and W. C. Fang, Chem.

Mater. 5, 767 (1993).

[114] H. Morgan, R. Pethig and G. T. Stevens, J. PHYS. E: Sci. Enstrum 19, 80(1986).

[115] J. R. Lacher, Proc. R. Soc. A 161, 525(1937).

[116] S. Schuldiner, G. W. Castellan and J. P. Hoare, J. Chem. Phys. 28, 16 (1965).

[117] H. A. Gasteiger, S. S. Kocha, B. Sompalli and F. T. Wagner, Applied Catalysis B:

Environmental 56, 9 (2005).

[118] F. G. Will, J. Electrochem. Soc. 112, 451 (1965).

[119] W. Li, C. Liang, W. Zhou, J. Qiu, Z. Zhou, G. Sun and Q. Xin, J. Phys. Chem. B 107 (26),

6292 (2003).

[120] W. Li, C. Liang, J. Qiu, W. Zhou, H. Han, Z. Wei, G. Sun and Q. Xin, Carbon 40, 787

(2002).

[121] T. Yoshitake, Y. Shimakawa, S. Kuroshima, H. Kimura, T. Ichihashi, Y. Kubo, D. Kasuya, K.

Takahashi, F. Kokai, M. Yudasaka and S. Iijima, Physica B: Condensed Matter 323, 124

(2002).

[122] C. Boyer, S. Gamburzev, O. Velev, S. Srinivasan and A. J. Appleby, Electrochimica Acta

43, 3703 (1998).

[123] Z. Qi and A. Kaufman, J. Power Source 113, 37 (2003).

[124] G. Ramos-Sanchez and P. B. Balbuena, Phys. Chem. Chem. Phys. 15, 11950 (2013).

[125] K. Okazali-Maeda, Y. Morikawa, S. Tanaka and M. Kohyama, Surface Sci. 604, 144

(2010).

[126] T. Kondo, Y. Iwasaki, Y. Honma. Y. Takagi, S. Okada and J. Nakamura., Phys. Rev. B 80,

233408 (2009).

[127] X. Wu, J. L. Yang and X. V. Zeng, J. Chem. Phys. 125, 044704 (2006).

Page 117: Proton transport through two-dimensional materials

`

117

[128] S. P. Koenig, L. Wang, J. Pellegrino and J. S. Bunch, Nature Nanotech. 7, 728 (2012).

[129] S. P. Koenig, N. G. Boddeti, M. L. Dunn and J. S. Bunch, Nature Nanotech 6, 543 (2011).

[130] S. Blankenburg, M. Bieri, R. Fasel, K. Mullen, C. A. Pignedoli and D. Passerone, Small 6,

2266 (2010).

[131] I. Benjamin, Annu. Rev. Phys. Chem. 48, 407 (1997).

[132] J. F. Nagle and H. J. Morowitz, Proc. Natl. Acad. Sci. USA 75, 298 (1978).

[133] M. Senda, T. Kakiuchi and T. Osakai, Electrochimica. Acta. 36, 253 (1991).

[134] A. G. Volkov, M. I. Gugeshashvili and D. W. Deamer, Electrochimica. Acta. 40, 2849

(1995).

[135] A. Uehara et al., J. Elertro. Chem. 563, 257 (2004).

[136] L. Q. Hung, J. Electroanal. Chem. 115, 159 (1980).

[137] L. Q. Hung, J. Electroanal. Chem. 149, 1 (1983).

[138] Z. Samec, Chem. Rev. 88, 617 (1988).

[139] Y. Cheng and D. J. Schiffrin, J. Chem. Soc., Faraday Trans. 92, 3865 (1996).

[140] G. Geblewicz and Z. Koczorowski, J. Electroanal. Chem. 158, 37 (1983).

[141] A. J. Olaya, M. A. Mendez, F. C. Salazar, H. H. GiraultJ. Electroanal. Chem. 644, 60

(2010).

[142] D. Plana, F .G. E. Jones and R. A. W. Dryfe, J. Electro. Chem. 646, 107 (2010).

[143] M. Belanger and Y. Marois, J. Biomed. Mater. Res. (Appl. Biomater.) 58, 467 (2001).

[144] B. Xu et al., Sensor and Actuators A 116, 219 (2011).

[145] M. Liu et al., J. Micromech. Microeng. 19, 035028 (2009).

[146] J. H. Kang, E. Um and J. K. Park, J. Micromech. Microeng. 19, 045027 (2009).

[147] Y. Saito, Review of Polaragraphy (Japan) 15, 177 (1968).

[148] E. M. Suk and N. R. Aluru, J. Phys. Chem. Lett 1, 1590 (2010).

[149] A. Trummal, A. Rummel, E. Lippmaa, I. Koppel and I. A. Koppel, J. Phys. Chem. A 115,

6641 (2011).

Page 118: Proton transport through two-dimensional materials

`

118

[150] S. Mitra and S. Sampath, Electrochem. Solid-State Lett. 7, A264-8 (2004).

[151] Y.Zhang, H. Feng, X. Wu, L. Wang, A. Zhang, T. Xia, H. Dong, X. Li and L. Zhang,

International Journal of Hydrogen Energy 34, 4889 (2009).

[152] K. Imoto, K. Takahashi, T. Yamaguchi, T. Komura, J. Nakamura, K. Murata, Solar Energy

Materials and Solar Cells 79, 459 (2003).

[153] Z. Huang, X. Liu, K. Li, D. Li, Y. Luo, H. Li, W. Song, L. Chen, Q. Meng, Electrochem.

Comm. 9, 596 (2007).

[154] Y. Honda, T. Haramoto, M. Takeshige, H. Shiozaki, T. Kitamura and M. Ishikawa,

Electrochem. Solid-State Lett. 10, A106-10 (2007).

[155] J. J. Gooding, Electrochimica Acta 50, 3049 (2005).

[156] J. J. Yoo et al., Nano. Lett. 11, 1423 (2011).

[157] X. Wang, L. Zhi and K. Müllen, Nano. Lett. 8, 323 (2008).

[158] A. T. Valota, I. A. Kinloch, K. S. Novoselov, C. CASIRAGHI, a. Eckman, E. W. Hill and R. A.

W. Dryfe, ACS Nano 5, 8809 (2011).

[159] P. S. Toth, A. T. Valota, M. Velicky, I. A. Kinloch, K. S. Novoswlov, E. W. Hill and R. A. W.

Dryfe, Chem. Sci. 5, 582 (2014).

[160] A. C. Ferrari, J. C. Meyer et al., Phys. Rev. Lett. 97, 187401 (2006).

Page 119: Proton transport through two-dimensional materials

`

119