psu provost's challenge on line sc lab
TRANSCRIPT
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An On-Line Semiconductor Fabrication Laboratory CourseProvost’s Challenge 2013
James Morris, Electrical & Computer EngineeringLemmy Meekisho, Mechanical & Materials EngineeringRajendra Solanki, PhysicsPeter Phelps, MCECS Computer Action Team
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BackgroundOregon is the Silicon Forest, which means:Integrated Circuit (IC) Manufacturing• Intel drives Moore’s Law worldwide!
Does PSU support this IC manufacturing?Three lecture courses address IC fab• ECE 416/516 Introduction to IC technologies
(Morris)• MME 410/510 Introduction to MEMS
(Meekisho)• PH 545/546/547 Microelectronic device fabrication
(Solanki)
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Semiconductor Fab LabBut need laboratory reinforcement• Experiential learning component
University semiconductor fabrication labs• They exist, but are not common
Costs:• Capital equipment -> industry donations• Clean room -> µm not nm for education• Consumables -> alumni donations• Space• Power (mostly 3-phase)
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On-Line LaboratoryModern equipment• Computer controlled• Networked to central computer• Easy to interface to on-line• Space -> possibly off-campus if on-line
Manpower• Used to need close supervision for safety• No “wet” chemistry now• On-line -> mainly load wafers
Benefits• PSU and regional student• National & international enrollments
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Research