RANGE OF SERVICESQUALIFICATION (EXTRACT)

FRAUNHOFeR iNSTiTUTe FOR

MANUFACTURiNG eNGiNeeRiNG AND AUTOMATiON iPA

Measurements performed, testing equipment

Particle detection

• Airborne

–Opticalparticlecounter(OPC):0.1to25µm

–Condensationnuclearcounter:≥5nm

–Compressedgases:max.10bars:OPC0.1to25µm

• Directlyonsurfaces

–Waferinspectiondevices:67nmto63µm

–Surfacecontaminationcounter(SCC):0.5to100µm

–Lightmicroscope:≥1µm

–Scanningelectronmicroscope:≥5nm

–Laserscanningmicroscope,3-Dimagingofcontamination

• Indirectlyonsurfaces

• Onfrictionalpairs

–Atmospheric:materialpairings(independenceonnormal

forceandspeedoftravel):≥0.1µm

–Inavacuum:≥67nm

Particle analysis

• Energydispersivex-rayanalysis(EDX)

• AnalysisoforganicparticlesusingRamanspectrometer

1

1 Using an optical particle counter in the Fraunhofer IPA cleanroom.

2 Laboratory for analyzing particulate contamination.

Outgassing (ACC)

• Technical information on substances detected

• ThermodesorptionGC/MS

• Chambermeasurements

• Roommeasurements

• HeadspaceGC/MS

• Thermalextraction

Biocontamination

• Agarcontactmethod

• AirborneCFUs

•WaterborneCFUs

• Totalmicrobialcountviamicroscopiccounting

• Abilitytoresistmetabolism

Airflow

• Airflowvelocity,directionandvisualization

(DI/N2-fogger,smokewire,testtubes),

• Qualitative/quantitativeanalysis

• Flowrates(volumeflow)

• Recoverytime

• Pressuredifference

Climate

• Temperature

• Humidity

• Surfacequality

• Roughness

• Surfacefinish,EDX,AFM/STM,ESCA(XPS),AES,FTIR,TEM

ESD

• Dischargeresistance

• Volumeresistance

• Surfaceresistance

• E-fielddetermination

• Dischargetime

• Conductivity

Laminar cleanrooms Turbulent cleanrooms Media laboratory Heavy duty cleanroom

Air cleanliness class (as per ISO 14644-1) ISOClass1 ISOClass6 ISOClass8 ISOClass1

Airflow velocity 0.45m/s 0.45m/s – 0.45m/s

Airflow type Vertical,laminar Turbulent Turbulent Vertical,laminar

Temperature 22°C±0,5°C 22°C±0,5°C 22°C 22°C±0.5°C

Relative humidity 45%±5% 45%±5% 45%±5% 45%±5%

Surface area 125m2 80m2 50 m2 120m2

Other – – – Load:5t/m2,ceilingheight:6m

Testing environment: cleanrooms and laboratories

2

Laminar cleanrooms Turbulent cleanrooms Media laboratory Heavy duty cleanroom

Air cleanliness class (as per ISO 14644-1) ISOClass1 ISOClass6 ISOClass8 ISOClass1

Airflow velocity 0.45m/s 0.45m/s – 0.45m/s

Airflow type Vertical,laminar Turbulent Turbulent Vertical,laminar

Temperature 22°C±0,5°C 22°C±0,5°C 22°C 22°C±0.5°C

Relative humidity 45%±5% 45%±5% 45%±5% 45%±5%

Surface area 125m2 80m2 50 m2 120m2

Other – – – Load:5t/m2,ceilingheight:6m

Testing environment: cleanrooms and laboratories

Oscillation & Acoustics

• Vibration

• Soundmeasurements

Media supply for the laboratories

• Ultra-purewater(DIwaterinVLSIquality)

• Ultra-purecompressedair

• Vacuum

• UPSsystems,220/380Voltpowersupply

• Nitrogen5.0

• LiquidCO2supply6.0

Our services

Qualifying of operating utilities and materials for their cleanroom

suitability and cleanliness suitability

• Particleemissionbehavior

• PWPmeasurements

• Outgassingbehavior

• Particleanalysis

•Materialanalysis

• Easeofcleaninganddisinfection

• Resistancetochemicals

• Abilitytoresistmicrobialmetabolism

• ESDcharacteristics

• Surfacequality

• Airflowpatterns

• Leakprooftests

•Microbicidity

• Productcompatibility

• GMP/EHEDGdesignanalysis

TiTle Classification tests on

lighting systems.

Advantages of qualifications

• Internationally-recognizedtestlabel

• Independentinstitute

• OnlytestinginfrastructureofitskindintheworldwithClass1

cleanroomsaccordingtoISO14644-1

• Expertsoncleanroomsandcleanmanufacturingengineering

• Holisticapproach

• Standardizedprocedure:

– Test preparation

– Test bench

–Auxiliaryaids

–Parametersandgeneralconditions

–Objectiveandrepresentativeselectionoftest

samplesfromthetotalrangeavailable

–Documentedtestproceduresandresults

–Testscarriedoutincompliancewithinternationally

recognizednormsandstandards

• Statisticalanalysisoftestresults

• Representativeresults

• Customer/market-orientateddocumentsincluded

–Certificate

–Qualificationdocument

– Test report

– Test logo

Fraunhofer institute for

Manufacturing engineering und Automation iPA

Nobelstrasse12

70569Stuttgart|Germany

Director

Prof.Dr.-Ing.ThomasBauernhansl

www.ipa.fraunhofer.de

Ifyourequiremoreinformationaboutourrangeofservicesor

specificadvice,pleasegetintouchwithourcontactpartners.

Department

UltracleanTechnologyandMicromanufacturing

Contact

Dipl.-Ing.(FH)FrankBürger

Phone+49711970-1148

frank.buerger@ipa.fraunhofer.de

Dipl.-Ing.(FH)MarionSchweizer

Phone+49711970-1509

marion.schweizer@ipa.fraunhofer.de

www.cleanroom.fraunhofer.de

© Fraunhofer IPA | 352 / 002e | PDF 02.02 / 07.14