research article measurements of the characteristics of...
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Hindawi Publishing CorporationAdvances in Materials Science and EngineeringVolume 2013 Article ID 598737 7 pageshttpdxdoiorg1011552013598737
Research ArticleMeasurements of the Characteristics ofTransparent Material Using Digital Holography
Ding Yu1 Shang Wenbin2 Yang Hong3 and Yang Yan2
1 Chongqing City Management College Shapingba District Chongqing 401331 China2Mechanical Engineering Chongqing University of Technology No 69 Hongguang Road Banan District Chongqing 400054 China3 Key Laboratory of Advanced Manufacturing Technology for Automobile Parts Ministry of Education No 69 Hongguang RoadBanan District Chongqing 400054 China
Correspondence should be addressed to Yang Yan 40129784qqcom
Received 31 July 2013 Revised 28 September 2013 Accepted 28 September 2013
Academic Editor Xing Chen
Copyright copy 2013 Ding Yu et alThis is an open access article distributed under the Creative Commons Attribution License whichpermits unrestricted use distribution and reproduction in any medium provided the original work is properly cited
Digital holography is applied tomeasure the characteristics of transparentmaterial A digital hologram recording system tomeasurethe surface of transparent material was established and the digital holograms of transparent object were obtained in high qualityFor postprocessing of hologram the least-squares phase unwrapping algorithm was used in phase unwrapping and the phasereconstruction image of transparent object was obtainedThe information of material surfaces was measured and the characteristicwas presented in 3D visualization The validation experiment was conducted by NanoMap 500LS system the results of validationexperiment are well satisfied with the measurement by digital holography which proved the feasibility of digital holographictechnology as a good measurement tool for transparent material
1 Introduction
In 1948 Gabor [1 2] proposed holography which can beused for reconstructing amplitude and phase of wave fieldWith the fast development of computer technology recordingand reconstruction are made possible by means of computerSubsequently Goodman and Lawrence [3] developed digitalholography in 1960s
Digital holography is a new image processing technologythat uses a high-resolution charge-coupled device (CCD)camera for hologram recording and image reconstructionwith a numerical method by a computer [4] Comparedwith traditional holography which uses a photographic platesas recording media digital holography has a significantimprovement that is to say it does not need complicatedchemical processing [5] thus adding more flexibility andimproving the efficiency of the holographic process Inthe past few years with modern computer technology andCCD technology developing rapidly digital holography hasbeen established as an important scientific means applied in
metrology [6] surface measurement deformation measure-ment [7] and more recently biological microscopy [8ndash10]
In general the objects in applications of digital holog-raphy are not transparent so the holograms were cap-tured by the reflection of the object [11ndash13] In this paperwe adopt the method of transmission to generate thehologram
Noncontact surface measurement techniques are veryimportant in many fields such as science and engineeringIt is very helpful to control the products quality and makethe appropriate diagnosis Digital holographic imaging asa new image processing technology combined with opticalholography and digital image processing of computer iswidely used in the field of surface measurements of objectsIn addition to classical roughness values 119877
119886 119877119905 and so forth
digital holography can also make full-field measurementsof 3D surface material Digital holographic measurementcan measure the surface of the object with some importantcharacteristics such as no damage high resolution andnoncontact fast processing
2 Advances in Materials Science and Engineering
Reflector
Laser
Lens Collimating lens
Beam splitter prismTesting field
ObjectCCD
Computer
Reflector
Lens Collimating lens
Beam splitter prism
Figure 1 Off-line recording of digital hologram
Compared with other image processing and measuringtechniques digital holography has a number of importantadvantages [4] Firstly it does not requiremuch optical equip-ment especially changing the hologram plates Secondly itcaptures the image with noncontact nondestructive andfast height accuracy sensitivity and resolutionThirdly thereis no complex chemical processing in digital holographyso reproducing hologram and reconstructing the hologramare quicker than traditional optical holography Fourthlycomputer image processing allows to process the errors andnoise so as to revise additional optical phase for improvingthe quality of the reconstructed image
Holographic interferometry (HI) is a procedure whichenables static and dynamic displacements of objects withoptically rough surfaces to be measured with optical interfer-ometer accuracy [4 14] Then in digital holography we canaccurately measure the slight deformation of the objects bycalculating the change of the information recorded by digitalholograms [4] In this paper through digital holographyand image processing we can measure the height of thematerial surface Otherwise by recording the hologram thephase diagram can be obtained and the surface of materialcan be measured quickly and accurately making the three-dimensional visualization possible
2 General Principles of Digital Holography
21 Recording of Digital Hologram Digital holographicrecording optical path and the traditional optical holographyare consistent only replace holographic plate with a CCDcamera as the recording medium The concept of outlinedigital hologram recording is shown in Figure 1
The object wave 119874(119909 119910) and the reference wave 119877(119909 119910)
interference occur to form a hologram on the CCD surfaceIn the hologram plane the recorded intensity distribution119868119867(119909 119910) can be printed as follows [4]
119867(119909 119910) = |119874|2
+ |119877|2
+ 119877119874lowast
+ 119877lowast
119874 (1)
where119877119874lowast and119877
lowast
119874 represent the conjugation image and theoriginal image respectively
So the intensity distribution of the recorded hologram byCCD is written as
119867(119898 119899) = 119867 (119909 119910) rect( 119909
119871119909
119910
119871119910
) comb(119909
Δ119909
119910
Δ119910
) (2)
Object plane
Laser beam
Recording
Reconstruction plane
Reconstruction
y
x
d
120585998400120585120588
120578998400120578
CCD
d
120588
Figure 2 Coordinate system for image reconstruction
The light intensity is collected by the data acquisition cardand quantity The 3D information of object is saved by thecomputer and formed as a digital hologram
22 Reconstruction of Digital Hologram In traditional holog-raphy the reconstruction is carried out by means of illumi-nation of the hologram intensity with the reference wave Avirtual image and a real image of the object are reconstructedThe digital hologram simulates the traditional optical repro-duction processes and its numerical reconstruction can begained by computer
The laser beam goes through the object and the part ofthe beam diffracted by objects and reaching the recordingsurface is considered the object beam while the beam fromthe laser arriving without any distortion is considered asthe reference beam Two beams superposition create aninterference pattern on the CCD sensor This diffraction canbe described by the Fresnel-Kirchhoff integral as [4]
119877 (1205851015840
1205781015840
)
=119894
120582∬
infin
minusinfin
ℎ (119909 119910) 119864119877(119909 119910)
exp (minus119894 (2120587120582) 120588)
120588119889119909 119889119910
(3)
with
120588 = radic(1205851015840 minus 119909)2
+ (1205781015840 minus 119910)2
+ 1198892 (4)
The coordinates in (3) and (4) are illustrated in Figure 2119877(1205851015840
1205781015840
) is the wave fields of the reconstruction image andℎ(119909 119910) is the hologram function The 120588 is the distancebetween a point in the hologramplane and the correspondingpoint in the reconstruction plane 119889 is the distance betweentwo adjacent planes and 120582 is the wavelength
Different numerical reconstruction algorithms have beenproposed such as Fresnel approximation algorithm and
Advances in Materials Science and Engineering 3
convolution approach algorithm [4] The resolution of thereconstruction image by convolution approach algorithms ismuch better than that by the Fresnel approximation algo-rithm in [10] Therefore the convolution approach algorithmis adopted in this paper and the mathematical expression ofthe convolution approach algorithm is defined as follows
119877 (1205851015840
1205781015840
)
= 119865minus1
119865 [ℎ (119909 119910)]
sdot 119865 [119894
120582( exp[ minus 119894
2120587
120582
times radic1198892 + (119909 minus 1205851015840)2
+ (119910 minus 1205781015840)2
])
times (radic1198892 + (119909 minus 1205851015840)2
+ (119910 minus 1205781015840)2
)
minus1
]
(5)
where 119865[ ] and 119865minus1
[ ] are the Fourier transform and theinverse Fourier transform respectively
In this paper we use numerical simulation hologramto check the ability of our arithmetic for determination ofthe focal plane For numerical simulation reconstruction ofholograms the Fresnel and convolution arithmetic based onthe reconstruction equations has been used well in practiceThe convolution arithmetic producing good holograms andreconstruction images and high quality of holograms doesnot change with different object distances Therefore convo-lution arithmetic will be importantly explained in this paper
In Figure 2 the left and the right part are the same whichmeans the formula for reconstruction image from a hologramis the same as that for the generation of the hologram from theobject imageThus after change of some parameters in (3) wewill obtain the new hologram function as follows
ℎ (119909 119910) =119894
120582∬
infin
minusinfin
119874 (120585 120578) 119864119877(120585 120578)
exp (minus119894 (2120587120582) 120588)
120588119889120585 119889120578
(6)
Because the form of (6) is the same as that of (3)the convolution algorithm can also be used to obtain thehologram function ℎ(119909 119910) from the object function119874(120585 120578)Then the replacement of (3) and (6) can be rewritten in theform of the superposition integral as follows
ℎ (119909 119910) = ∬
infin
minusinfin
119874 (120585 120578) 119892 (120585 120578 119909 119910) 119889120585 119889120578 (7)
with
119892 (120585 120578 119909 119910)
=119894
120582
exp [minus119894 (2120587120582)radic1198892 + (120585 minus 119909)2
+ (120578 minus 119910)2
]
radic1198892 + (120585 minus 119909)2
+ (120578 minus 119910)2
(8)
This superposition integral can be considered as a convolu-tion So (7) will become
ℎ (119909 119910)
= 119865minus1
119865 [119874 (120585 120578)]
sdot 119865 [119894
120582(exp [minus119894
2120587
120582
radic1198892 + (120585 minus 119909)2
+ (120578 minus 119910)2
])
times (radic1198892 + (120585 minus 119909)2
+ (120578 minus 119910)2
)
minus1
]
(9)
Equation (9) is used for numerical simulation of hologramsby the convolution algorithm Based on this equation we canget the hologram function ℎ(119909 119910) equivalent to some objectimage function 119874(120585 120578) [4]
3 Theories of Surface Measurements byDigital Holography
31 General Principles As the material surfaces are unevenwhen irradiated by the laser there will appear a differentphase on the material surfaces In Section 2 after recordingand reconstruction of digital hologram the intensity andphase distribution of the reconstructed image can be obtainedby [4]
119868 (120585 120578) =1003816100381610038161003816119877 (120585 120578)
1003816100381610038161003816
2
= Re2 1003816100381610038161003816119877 (120585 120578)1003816100381610038161003816 + Im2 1003816100381610038161003816119877 (120585 120578)
1003816100381610038161003816 (10)
Φ(120585 120578) = arctanIm 1003816100381610038161003816119877 (120585 120578)
1003816100381610038161003816
Re 1003816100381610038161003816119877 (120585 120578)1003816100381610038161003816
(11)
where Re |119877(120585 120578)| and Im |119877(120585 120578)| denote the real and imag-inary parts of the object complex amplitude respectively
32 Phase Unwrapping Phase distribution value obtainedby (11) is limited in the range of (minus120587 +120587) for the theoryof the arctan function so also through phase unwrappingthe accurate phase information can be obtained [4] Phaseunwrapping is a method applied to wrapped phase imagesto remove the 2120587 incoherence embedded within the phasediagram It detects a 2120587 phase jump and adds or subtracts aninteger offset of 2120587 to adjoining pixels following that phasejump based on a tolerance mechanism thus retrieving thecontinuous form of the phase map The simulation of phaseunwrapping process is illustrated in Figures 3(a) and 3(b)
Phase unwrapping is a technique which can generate acontinuously phase distribution It constitutes essential partsof optical metrology by heterodyne techniques In surfacemeasurement by digital holographic the phase unwrappingis a key technique Numerous phase unwrapping algorithmshave been proposed in the past several years [15 16]Two types of strategy have been developed to solve the
4 Advances in Materials Science and Engineering
The wrapped phase
Sample index
Wra
pped
pha
se in
radi
ans
4
3
2
1
0
minus1
minus2
minus3
minus40 100 200 300 400 500 600
(a)
The unwrapped phase
Sample index
Unw
rapp
ed p
hase
in ra
dian
s
6
4
2
0
minus2
minus4
minus60 100 200 300 400 500 600
(b)
Figure 3 Phase unwrapping (a) wrapped phase and (b) continuous phase
phase unwrapping problem path-following and minimum-norm methods Path-following methods include Goldsteinrsquosbranch cut algorithm [17] and minimum spanning tree algo-rithm [18] Minimum-norm methods contain least-squaresphase unwrapping algorithm [19] minimum Lp-norm phaseunwrapping algorithm [16] and so on
In this paper the continuous phase image is acquired byleast-squares phase unwrapping algorithmwithout weighingThe discrete cosine transforms (DCT) is used to solve thediscrete Poisson equation in this method The least-squaresolution of the unwrapped phase and the expanded phase isobtained
33 The Height Distribution of Surface As mentioned aboveafter the phase unwrapping with computer the phase distri-butionΦ(120585 120578) can be simply converted into the height distri-bution ℎ(120585 120578) on the material surface Then the continuousphase distribution can be used for measurements of materialsurface So the height of the material surface ℎ(120585 120578) can becalculated by [4]
ℎ (120585 120578) =120582
4120587Φ (120585 120578) (12)
where 120582 is the wavelengthThe surface of homogenous optical properties was mea-
sured in the light of the reconstructed phase-contrast image[19] which showed the phase changes corresponding tooptical path was less than 10 nm In this paper the target wechoose is much bigger than 10 nm
4 Experiments and Results
41 Optical Experiment Since the height of the target surfaceis uniformly distributed in this experiment a test target isused as the target surface The optical experimental setupfor recording test target (USFA 1950) holograms is shown in
CCDMirror
Beam splitterObjectBeam expander Laser source
MirrorBeam splitter
Figure 4 Experimental setup for recording test target holograms
Figure 4 The experimental conditions are listed as followsthe pixel number119873 is equal to 1024 the pixel size of the CCDcamera is 52120583m the wavelength 120582 is equal to 6328 nm Thelaser with a maximum output power of 6W is adopted
As shown in Figure 4 the input He-Ne laser is dividedinto two parts by a beam splitter (BS) one beam goes throughthe test target as the object beam and another beam isexpanded as the reference beam The object and referencebeams have an interference with BS the hologram is recordedby a CCD detector and then the image information is sent tothe computer by a collection
Figure 5 shows the recording of digital hologram bycomputer The recording distance between the object andthe CCD sensors is set to be 78mm Figure 6 shows thereconstruction intensity image of the test target Then theheight distribution ℎ(120585 120578) can be obtained from (11) and (12)Through the powerful drawing function of MATLAB theheight distribution of the material surface can be displayedin the form of 3D it was shown in Figure 7 1002 points onmaterial surfaceweremeasured in experiment and the heightdistribution information is illustrated in Figure 8 and Table 1
42 Validation Experiment The verification experimentalequipment uses NanoMap 500LS which is produced by AEP
Advances in Materials Science and Engineering 5
Figure 5 Recording of digital hologram
Figure 6 Reconstruction of digital hologram
technology and the composition of the equipment is the sameas the one in Figure 9 [20] NanoMap has many features(a) seamless integration of conventional contact profilemeterand scanning probe microscope (SPM) technology (b) dualmode operation (tip scan and stage scan) optimized forsmall areas (c) 3D mapping as well as long range profilingand 3D long scan range up to 150mm times 150mm (d)stage scan by using high grade optical reference flat (e)wide vertical range with high accuracy as a result of thedual optical and up to 01 nm vertical resolution with finesensor (f) constant contact forces suitable by software andautomatic sample positioning with 119883119884 motorized stageThe NanoMap 500LS measurement flow chart is shown inFigure 10
After loading the test target onto the stage and setting upscan parameters we can get the scan curve shown in Figure 11We process the data and curve fitting using MATLAB andobtain the result shown in Figure 12 The height distributioninformation is illustrated in Figure 13 and the height dates inTable 2 From Figures 12 and 13 we can see so many morenumbers whose values are smaller than zero the reason forwhich is that the protruding part is less than the hollow onein the part we scan In Figure 13 and Table 2 the averagemeasurement result of the target surface by NanoMap 500LSis 699 nm
05
0
1
08
06
04
02
0
Hei
ght (
mm
)
1
0
02
04
06
08
1
Figure 7 The reconstructed height distribution
Poin
t num
el
Height (nm)
1000
900
800
700
600
500
400
300
200
100
072 73 74 75 76 77 78 79 80
Figure 8 Height distribution
Table 1 Data of heights
Height Min Max AverageValue (nm) 727 791 788
Table 2 Data of heights
Height Min Max AverageValue (nm) 604 876 699
43 Experimental Results Tables 1 and 2 show the mea-surement results of the target surface by digital holographyand NanoMap500Ls The comparison of two methods isshown in Table 3 The relative error can be obtain as follows89699 = 127 The digital holography can serve as aneffective measurement method used in engineering
6 Advances in Materials Science and Engineering
Table 3 Comparison of the measurement results by two methods
Methods Digital holography (nm) NanoMap 500Ls (nm) Difference (nm) Relative error ()Value 788 699 89 127
Figure 9 NanoMap 500LS
FlowLoad sample onto XY stage and move to the XY stage to center
Lower the Z stage to sample
Move the XY stage to locate themeasurement location
Run scan
Save and analyze data
Unload sample
Figure 10 Flow chart for taking a profile measurement
5 Conclusions
In this paper we have presented the digital holography formeasuring the material surface as an important techniqueThe principle of surface measurement by digital holographyis analyzed In this paper we use a target as a test targetBy recording and reconstruction hologram we obtain thephase and height distribution of the object surface by noisephase unwrapping and so forth Then we use NanoMap500LS 3D profilometer as validation experiment Comprised
100
80
60
40
20
0
minus20
minus40
minus60
minus80
minus100minus1500 minus1000 minus500 0 500 1000 1500 2000
60
50
40
30
20
10
y(n
m)
x (120583m)
Figure 11 The scan curve
60
40
20
0
minus20
minus40
minus60
minus1500 minus1000 minus500 0 500 1000 1500 2000
y(n
m)
x(120583m)
minus80
Figure 12 The fitting curve
of contact profilometer the results of two measurementmethods do not make much difference However digitalholography measurement method has the larger advantageDigital holographic measurement can obtain the surface ofobjects with no damage high resolution noncontact andfast processing characteristics And also any measurementsystem has measuring error Future research direction is tosolve the measurement errors which exist
Advances in Materials Science and Engineering 7N
umel
Height (nm)
250
200
150
100
50
0minus60 minus40 minus20 0 20 40 60
Figure 13 Height distribution
Acknowledgments
This work was supported by the National Natural ScienceFoundation of China (11272368) and the Natural ScienceFoundation of CSTC (cstc2013yykfB0198)
References
[1] D Gabor ldquoA new microscopic principlerdquo Nature vol 161 no4098 pp 777ndash778 1948
[2] D Gabor ldquoMicroscopy by reconstructed wavefronts 2rdquo Pro-ceedings of the Royal Society vol 64 pp 449ndash469 1951
[3] J W Goodman and R W Lawrence ldquoDigital image formationfromelectronically detected hologramsrdquoApplied Physics Lettersvol 11 no 3 pp 77ndash79 1967
[4] Y Yang B-S Kang and Y-J Choo ldquoApplication of the corre-lation coefficient method for determination of the focal planeto digital particle holographyrdquo Applied Optics vol 47 no 6 pp817ndash824 2008
[5] Y Yang and B-S Kang ldquoExperimental validation for thedetermination of particle positions by the correlation coefficientmethod in digital particle holographyrdquo Applied Optics vol 47no 32 pp 5953ndash5960 2008
[6] L Xu X Peng J Miao and A K Asundi ldquoStudies of digitalmicroscopic holography with applications to microstructuretestingrdquo Applied Optics vol 40 no 28 pp 5046ndash5051 2001
[7] G Pedrini and H J Tiziani ldquoQuantitative evaluation of two-dimensional dynamic deformations using digital holographyrdquoOptics and Laser Technology vol 29 no 5 pp 249ndash256 1997
[8] Y Yang and B Kang ldquoMeasurements of the characteristics ofspray droplets using in-line digital particle holographyrdquo Journalof Mechanical Science and Technology vol 23 no 6 pp 1670ndash1679 2009
[9] G Popescu L P Deflores J C Vaughan et al ldquoFourierphase microscopy for investigation of biological structures anddynamicsrdquo Optics Letters vol 29 no 21 pp 2503ndash2505 2004
[10] P Marquet B Rappaz P J Magistretti et al ldquoDigital holo-graphic microscopy a noninvasive contrast imaging technique
allowing quantitative visualization of living cells with subwave-length axial accuracyrdquoOptics Letters vol 30 no 5 pp 468ndash4702005
[11] A Ettemeyer ldquoApplications of digital holography tomicrostruc-turesrdquo in Proceedings of the SAE World Congress 2009 DetroitMich USA April 2009
[12] S Seebacher W Osten andW P O Juptner ldquoMeasuring shapeand deformation of small objects using digital holographyrdquo inProceedings of SPIE pp 104ndash115 July 1998
[13] B Bowe and V Toal ldquoWhite light interferometric surfaceprofilerrdquo Optical Engineering vol 37 no 6 pp 1796ndash1799 1998
[14] T Kreis Handbook of Holographic Interferometry Wiley-VCH2005
[15] RM Goldstein H A Zebker and C LWerner ldquoSatellite radarinterferometry two-dimensional phase unwrappingrdquo RadioScience vol 23 no 4 pp 713ndash720 1988
[16] D C Ghiglia and M D Pritt Two-Dimensional Phase Unwrap-ping Theory Algorithms and Software John Wiley amp SonsHoboken NJ USA 1998
[17] RM Goldstein H A Zebker and C LWerner ldquoSatellite radarinterferometry two-dimensional phase unwrappingrdquo RadioScience vol 23 no 4 pp 713ndash720 1988
[18] J Schoner A Ettemeyer U Neupert H Rottenkolber CWinter and P Obermeier ldquoNew approaches in interpretingholographic imagesrdquo Optics and Lasers in Engineering vol 14no 4-5 pp 283ndash291 1991
[19] D Kerr G H Kaufmann and G E Galizzi ldquoUnwrappingof interferometric phase-fringe maps by the discrete cosinetransformrdquo Applied Optics vol 35 no 5 pp 810ndash816 1996
[20] AEP Technology ldquoNanoMap 500LS 3D profilometer UserrsquosManualrdquo Revision B 2009
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2 Advances in Materials Science and Engineering
Reflector
Laser
Lens Collimating lens
Beam splitter prismTesting field
ObjectCCD
Computer
Reflector
Lens Collimating lens
Beam splitter prism
Figure 1 Off-line recording of digital hologram
Compared with other image processing and measuringtechniques digital holography has a number of importantadvantages [4] Firstly it does not requiremuch optical equip-ment especially changing the hologram plates Secondly itcaptures the image with noncontact nondestructive andfast height accuracy sensitivity and resolutionThirdly thereis no complex chemical processing in digital holographyso reproducing hologram and reconstructing the hologramare quicker than traditional optical holography Fourthlycomputer image processing allows to process the errors andnoise so as to revise additional optical phase for improvingthe quality of the reconstructed image
Holographic interferometry (HI) is a procedure whichenables static and dynamic displacements of objects withoptically rough surfaces to be measured with optical interfer-ometer accuracy [4 14] Then in digital holography we canaccurately measure the slight deformation of the objects bycalculating the change of the information recorded by digitalholograms [4] In this paper through digital holographyand image processing we can measure the height of thematerial surface Otherwise by recording the hologram thephase diagram can be obtained and the surface of materialcan be measured quickly and accurately making the three-dimensional visualization possible
2 General Principles of Digital Holography
21 Recording of Digital Hologram Digital holographicrecording optical path and the traditional optical holographyare consistent only replace holographic plate with a CCDcamera as the recording medium The concept of outlinedigital hologram recording is shown in Figure 1
The object wave 119874(119909 119910) and the reference wave 119877(119909 119910)
interference occur to form a hologram on the CCD surfaceIn the hologram plane the recorded intensity distribution119868119867(119909 119910) can be printed as follows [4]
119867(119909 119910) = |119874|2
+ |119877|2
+ 119877119874lowast
+ 119877lowast
119874 (1)
where119877119874lowast and119877
lowast
119874 represent the conjugation image and theoriginal image respectively
So the intensity distribution of the recorded hologram byCCD is written as
119867(119898 119899) = 119867 (119909 119910) rect( 119909
119871119909
119910
119871119910
) comb(119909
Δ119909
119910
Δ119910
) (2)
Object plane
Laser beam
Recording
Reconstruction plane
Reconstruction
y
x
d
120585998400120585120588
120578998400120578
CCD
d
120588
Figure 2 Coordinate system for image reconstruction
The light intensity is collected by the data acquisition cardand quantity The 3D information of object is saved by thecomputer and formed as a digital hologram
22 Reconstruction of Digital Hologram In traditional holog-raphy the reconstruction is carried out by means of illumi-nation of the hologram intensity with the reference wave Avirtual image and a real image of the object are reconstructedThe digital hologram simulates the traditional optical repro-duction processes and its numerical reconstruction can begained by computer
The laser beam goes through the object and the part ofthe beam diffracted by objects and reaching the recordingsurface is considered the object beam while the beam fromthe laser arriving without any distortion is considered asthe reference beam Two beams superposition create aninterference pattern on the CCD sensor This diffraction canbe described by the Fresnel-Kirchhoff integral as [4]
119877 (1205851015840
1205781015840
)
=119894
120582∬
infin
minusinfin
ℎ (119909 119910) 119864119877(119909 119910)
exp (minus119894 (2120587120582) 120588)
120588119889119909 119889119910
(3)
with
120588 = radic(1205851015840 minus 119909)2
+ (1205781015840 minus 119910)2
+ 1198892 (4)
The coordinates in (3) and (4) are illustrated in Figure 2119877(1205851015840
1205781015840
) is the wave fields of the reconstruction image andℎ(119909 119910) is the hologram function The 120588 is the distancebetween a point in the hologramplane and the correspondingpoint in the reconstruction plane 119889 is the distance betweentwo adjacent planes and 120582 is the wavelength
Different numerical reconstruction algorithms have beenproposed such as Fresnel approximation algorithm and
Advances in Materials Science and Engineering 3
convolution approach algorithm [4] The resolution of thereconstruction image by convolution approach algorithms ismuch better than that by the Fresnel approximation algo-rithm in [10] Therefore the convolution approach algorithmis adopted in this paper and the mathematical expression ofthe convolution approach algorithm is defined as follows
119877 (1205851015840
1205781015840
)
= 119865minus1
119865 [ℎ (119909 119910)]
sdot 119865 [119894
120582( exp[ minus 119894
2120587
120582
times radic1198892 + (119909 minus 1205851015840)2
+ (119910 minus 1205781015840)2
])
times (radic1198892 + (119909 minus 1205851015840)2
+ (119910 minus 1205781015840)2
)
minus1
]
(5)
where 119865[ ] and 119865minus1
[ ] are the Fourier transform and theinverse Fourier transform respectively
In this paper we use numerical simulation hologramto check the ability of our arithmetic for determination ofthe focal plane For numerical simulation reconstruction ofholograms the Fresnel and convolution arithmetic based onthe reconstruction equations has been used well in practiceThe convolution arithmetic producing good holograms andreconstruction images and high quality of holograms doesnot change with different object distances Therefore convo-lution arithmetic will be importantly explained in this paper
In Figure 2 the left and the right part are the same whichmeans the formula for reconstruction image from a hologramis the same as that for the generation of the hologram from theobject imageThus after change of some parameters in (3) wewill obtain the new hologram function as follows
ℎ (119909 119910) =119894
120582∬
infin
minusinfin
119874 (120585 120578) 119864119877(120585 120578)
exp (minus119894 (2120587120582) 120588)
120588119889120585 119889120578
(6)
Because the form of (6) is the same as that of (3)the convolution algorithm can also be used to obtain thehologram function ℎ(119909 119910) from the object function119874(120585 120578)Then the replacement of (3) and (6) can be rewritten in theform of the superposition integral as follows
ℎ (119909 119910) = ∬
infin
minusinfin
119874 (120585 120578) 119892 (120585 120578 119909 119910) 119889120585 119889120578 (7)
with
119892 (120585 120578 119909 119910)
=119894
120582
exp [minus119894 (2120587120582)radic1198892 + (120585 minus 119909)2
+ (120578 minus 119910)2
]
radic1198892 + (120585 minus 119909)2
+ (120578 minus 119910)2
(8)
This superposition integral can be considered as a convolu-tion So (7) will become
ℎ (119909 119910)
= 119865minus1
119865 [119874 (120585 120578)]
sdot 119865 [119894
120582(exp [minus119894
2120587
120582
radic1198892 + (120585 minus 119909)2
+ (120578 minus 119910)2
])
times (radic1198892 + (120585 minus 119909)2
+ (120578 minus 119910)2
)
minus1
]
(9)
Equation (9) is used for numerical simulation of hologramsby the convolution algorithm Based on this equation we canget the hologram function ℎ(119909 119910) equivalent to some objectimage function 119874(120585 120578) [4]
3 Theories of Surface Measurements byDigital Holography
31 General Principles As the material surfaces are unevenwhen irradiated by the laser there will appear a differentphase on the material surfaces In Section 2 after recordingand reconstruction of digital hologram the intensity andphase distribution of the reconstructed image can be obtainedby [4]
119868 (120585 120578) =1003816100381610038161003816119877 (120585 120578)
1003816100381610038161003816
2
= Re2 1003816100381610038161003816119877 (120585 120578)1003816100381610038161003816 + Im2 1003816100381610038161003816119877 (120585 120578)
1003816100381610038161003816 (10)
Φ(120585 120578) = arctanIm 1003816100381610038161003816119877 (120585 120578)
1003816100381610038161003816
Re 1003816100381610038161003816119877 (120585 120578)1003816100381610038161003816
(11)
where Re |119877(120585 120578)| and Im |119877(120585 120578)| denote the real and imag-inary parts of the object complex amplitude respectively
32 Phase Unwrapping Phase distribution value obtainedby (11) is limited in the range of (minus120587 +120587) for the theoryof the arctan function so also through phase unwrappingthe accurate phase information can be obtained [4] Phaseunwrapping is a method applied to wrapped phase imagesto remove the 2120587 incoherence embedded within the phasediagram It detects a 2120587 phase jump and adds or subtracts aninteger offset of 2120587 to adjoining pixels following that phasejump based on a tolerance mechanism thus retrieving thecontinuous form of the phase map The simulation of phaseunwrapping process is illustrated in Figures 3(a) and 3(b)
Phase unwrapping is a technique which can generate acontinuously phase distribution It constitutes essential partsof optical metrology by heterodyne techniques In surfacemeasurement by digital holographic the phase unwrappingis a key technique Numerous phase unwrapping algorithmshave been proposed in the past several years [15 16]Two types of strategy have been developed to solve the
4 Advances in Materials Science and Engineering
The wrapped phase
Sample index
Wra
pped
pha
se in
radi
ans
4
3
2
1
0
minus1
minus2
minus3
minus40 100 200 300 400 500 600
(a)
The unwrapped phase
Sample index
Unw
rapp
ed p
hase
in ra
dian
s
6
4
2
0
minus2
minus4
minus60 100 200 300 400 500 600
(b)
Figure 3 Phase unwrapping (a) wrapped phase and (b) continuous phase
phase unwrapping problem path-following and minimum-norm methods Path-following methods include Goldsteinrsquosbranch cut algorithm [17] and minimum spanning tree algo-rithm [18] Minimum-norm methods contain least-squaresphase unwrapping algorithm [19] minimum Lp-norm phaseunwrapping algorithm [16] and so on
In this paper the continuous phase image is acquired byleast-squares phase unwrapping algorithmwithout weighingThe discrete cosine transforms (DCT) is used to solve thediscrete Poisson equation in this method The least-squaresolution of the unwrapped phase and the expanded phase isobtained
33 The Height Distribution of Surface As mentioned aboveafter the phase unwrapping with computer the phase distri-butionΦ(120585 120578) can be simply converted into the height distri-bution ℎ(120585 120578) on the material surface Then the continuousphase distribution can be used for measurements of materialsurface So the height of the material surface ℎ(120585 120578) can becalculated by [4]
ℎ (120585 120578) =120582
4120587Φ (120585 120578) (12)
where 120582 is the wavelengthThe surface of homogenous optical properties was mea-
sured in the light of the reconstructed phase-contrast image[19] which showed the phase changes corresponding tooptical path was less than 10 nm In this paper the target wechoose is much bigger than 10 nm
4 Experiments and Results
41 Optical Experiment Since the height of the target surfaceis uniformly distributed in this experiment a test target isused as the target surface The optical experimental setupfor recording test target (USFA 1950) holograms is shown in
CCDMirror
Beam splitterObjectBeam expander Laser source
MirrorBeam splitter
Figure 4 Experimental setup for recording test target holograms
Figure 4 The experimental conditions are listed as followsthe pixel number119873 is equal to 1024 the pixel size of the CCDcamera is 52120583m the wavelength 120582 is equal to 6328 nm Thelaser with a maximum output power of 6W is adopted
As shown in Figure 4 the input He-Ne laser is dividedinto two parts by a beam splitter (BS) one beam goes throughthe test target as the object beam and another beam isexpanded as the reference beam The object and referencebeams have an interference with BS the hologram is recordedby a CCD detector and then the image information is sent tothe computer by a collection
Figure 5 shows the recording of digital hologram bycomputer The recording distance between the object andthe CCD sensors is set to be 78mm Figure 6 shows thereconstruction intensity image of the test target Then theheight distribution ℎ(120585 120578) can be obtained from (11) and (12)Through the powerful drawing function of MATLAB theheight distribution of the material surface can be displayedin the form of 3D it was shown in Figure 7 1002 points onmaterial surfaceweremeasured in experiment and the heightdistribution information is illustrated in Figure 8 and Table 1
42 Validation Experiment The verification experimentalequipment uses NanoMap 500LS which is produced by AEP
Advances in Materials Science and Engineering 5
Figure 5 Recording of digital hologram
Figure 6 Reconstruction of digital hologram
technology and the composition of the equipment is the sameas the one in Figure 9 [20] NanoMap has many features(a) seamless integration of conventional contact profilemeterand scanning probe microscope (SPM) technology (b) dualmode operation (tip scan and stage scan) optimized forsmall areas (c) 3D mapping as well as long range profilingand 3D long scan range up to 150mm times 150mm (d)stage scan by using high grade optical reference flat (e)wide vertical range with high accuracy as a result of thedual optical and up to 01 nm vertical resolution with finesensor (f) constant contact forces suitable by software andautomatic sample positioning with 119883119884 motorized stageThe NanoMap 500LS measurement flow chart is shown inFigure 10
After loading the test target onto the stage and setting upscan parameters we can get the scan curve shown in Figure 11We process the data and curve fitting using MATLAB andobtain the result shown in Figure 12 The height distributioninformation is illustrated in Figure 13 and the height dates inTable 2 From Figures 12 and 13 we can see so many morenumbers whose values are smaller than zero the reason forwhich is that the protruding part is less than the hollow onein the part we scan In Figure 13 and Table 2 the averagemeasurement result of the target surface by NanoMap 500LSis 699 nm
05
0
1
08
06
04
02
0
Hei
ght (
mm
)
1
0
02
04
06
08
1
Figure 7 The reconstructed height distribution
Poin
t num
el
Height (nm)
1000
900
800
700
600
500
400
300
200
100
072 73 74 75 76 77 78 79 80
Figure 8 Height distribution
Table 1 Data of heights
Height Min Max AverageValue (nm) 727 791 788
Table 2 Data of heights
Height Min Max AverageValue (nm) 604 876 699
43 Experimental Results Tables 1 and 2 show the mea-surement results of the target surface by digital holographyand NanoMap500Ls The comparison of two methods isshown in Table 3 The relative error can be obtain as follows89699 = 127 The digital holography can serve as aneffective measurement method used in engineering
6 Advances in Materials Science and Engineering
Table 3 Comparison of the measurement results by two methods
Methods Digital holography (nm) NanoMap 500Ls (nm) Difference (nm) Relative error ()Value 788 699 89 127
Figure 9 NanoMap 500LS
FlowLoad sample onto XY stage and move to the XY stage to center
Lower the Z stage to sample
Move the XY stage to locate themeasurement location
Run scan
Save and analyze data
Unload sample
Figure 10 Flow chart for taking a profile measurement
5 Conclusions
In this paper we have presented the digital holography formeasuring the material surface as an important techniqueThe principle of surface measurement by digital holographyis analyzed In this paper we use a target as a test targetBy recording and reconstruction hologram we obtain thephase and height distribution of the object surface by noisephase unwrapping and so forth Then we use NanoMap500LS 3D profilometer as validation experiment Comprised
100
80
60
40
20
0
minus20
minus40
minus60
minus80
minus100minus1500 minus1000 minus500 0 500 1000 1500 2000
60
50
40
30
20
10
y(n
m)
x (120583m)
Figure 11 The scan curve
60
40
20
0
minus20
minus40
minus60
minus1500 minus1000 minus500 0 500 1000 1500 2000
y(n
m)
x(120583m)
minus80
Figure 12 The fitting curve
of contact profilometer the results of two measurementmethods do not make much difference However digitalholography measurement method has the larger advantageDigital holographic measurement can obtain the surface ofobjects with no damage high resolution noncontact andfast processing characteristics And also any measurementsystem has measuring error Future research direction is tosolve the measurement errors which exist
Advances in Materials Science and Engineering 7N
umel
Height (nm)
250
200
150
100
50
0minus60 minus40 minus20 0 20 40 60
Figure 13 Height distribution
Acknowledgments
This work was supported by the National Natural ScienceFoundation of China (11272368) and the Natural ScienceFoundation of CSTC (cstc2013yykfB0198)
References
[1] D Gabor ldquoA new microscopic principlerdquo Nature vol 161 no4098 pp 777ndash778 1948
[2] D Gabor ldquoMicroscopy by reconstructed wavefronts 2rdquo Pro-ceedings of the Royal Society vol 64 pp 449ndash469 1951
[3] J W Goodman and R W Lawrence ldquoDigital image formationfromelectronically detected hologramsrdquoApplied Physics Lettersvol 11 no 3 pp 77ndash79 1967
[4] Y Yang B-S Kang and Y-J Choo ldquoApplication of the corre-lation coefficient method for determination of the focal planeto digital particle holographyrdquo Applied Optics vol 47 no 6 pp817ndash824 2008
[5] Y Yang and B-S Kang ldquoExperimental validation for thedetermination of particle positions by the correlation coefficientmethod in digital particle holographyrdquo Applied Optics vol 47no 32 pp 5953ndash5960 2008
[6] L Xu X Peng J Miao and A K Asundi ldquoStudies of digitalmicroscopic holography with applications to microstructuretestingrdquo Applied Optics vol 40 no 28 pp 5046ndash5051 2001
[7] G Pedrini and H J Tiziani ldquoQuantitative evaluation of two-dimensional dynamic deformations using digital holographyrdquoOptics and Laser Technology vol 29 no 5 pp 249ndash256 1997
[8] Y Yang and B Kang ldquoMeasurements of the characteristics ofspray droplets using in-line digital particle holographyrdquo Journalof Mechanical Science and Technology vol 23 no 6 pp 1670ndash1679 2009
[9] G Popescu L P Deflores J C Vaughan et al ldquoFourierphase microscopy for investigation of biological structures anddynamicsrdquo Optics Letters vol 29 no 21 pp 2503ndash2505 2004
[10] P Marquet B Rappaz P J Magistretti et al ldquoDigital holo-graphic microscopy a noninvasive contrast imaging technique
allowing quantitative visualization of living cells with subwave-length axial accuracyrdquoOptics Letters vol 30 no 5 pp 468ndash4702005
[11] A Ettemeyer ldquoApplications of digital holography tomicrostruc-turesrdquo in Proceedings of the SAE World Congress 2009 DetroitMich USA April 2009
[12] S Seebacher W Osten andW P O Juptner ldquoMeasuring shapeand deformation of small objects using digital holographyrdquo inProceedings of SPIE pp 104ndash115 July 1998
[13] B Bowe and V Toal ldquoWhite light interferometric surfaceprofilerrdquo Optical Engineering vol 37 no 6 pp 1796ndash1799 1998
[14] T Kreis Handbook of Holographic Interferometry Wiley-VCH2005
[15] RM Goldstein H A Zebker and C LWerner ldquoSatellite radarinterferometry two-dimensional phase unwrappingrdquo RadioScience vol 23 no 4 pp 713ndash720 1988
[16] D C Ghiglia and M D Pritt Two-Dimensional Phase Unwrap-ping Theory Algorithms and Software John Wiley amp SonsHoboken NJ USA 1998
[17] RM Goldstein H A Zebker and C LWerner ldquoSatellite radarinterferometry two-dimensional phase unwrappingrdquo RadioScience vol 23 no 4 pp 713ndash720 1988
[18] J Schoner A Ettemeyer U Neupert H Rottenkolber CWinter and P Obermeier ldquoNew approaches in interpretingholographic imagesrdquo Optics and Lasers in Engineering vol 14no 4-5 pp 283ndash291 1991
[19] D Kerr G H Kaufmann and G E Galizzi ldquoUnwrappingof interferometric phase-fringe maps by the discrete cosinetransformrdquo Applied Optics vol 35 no 5 pp 810ndash816 1996
[20] AEP Technology ldquoNanoMap 500LS 3D profilometer UserrsquosManualrdquo Revision B 2009
Submit your manuscripts athttpwwwhindawicom
ScientificaHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CorrosionInternational Journal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Polymer ScienceInternational Journal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CeramicsJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CompositesJournal of
NanoparticlesJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
International Journal of
Biomaterials
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
NanoscienceJournal of
TextilesHindawi Publishing Corporation httpwwwhindawicom Volume 2014
Journal of
NanotechnologyHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Journal of
CrystallographyJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
The Scientific World JournalHindawi Publishing Corporation httpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CoatingsJournal of
Advances in
Materials Science and EngineeringHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Smart Materials Research
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
MetallurgyJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
BioMed Research International
MaterialsJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Nano
materials
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Journal ofNanomaterials
Advances in Materials Science and Engineering 3
convolution approach algorithm [4] The resolution of thereconstruction image by convolution approach algorithms ismuch better than that by the Fresnel approximation algo-rithm in [10] Therefore the convolution approach algorithmis adopted in this paper and the mathematical expression ofthe convolution approach algorithm is defined as follows
119877 (1205851015840
1205781015840
)
= 119865minus1
119865 [ℎ (119909 119910)]
sdot 119865 [119894
120582( exp[ minus 119894
2120587
120582
times radic1198892 + (119909 minus 1205851015840)2
+ (119910 minus 1205781015840)2
])
times (radic1198892 + (119909 minus 1205851015840)2
+ (119910 minus 1205781015840)2
)
minus1
]
(5)
where 119865[ ] and 119865minus1
[ ] are the Fourier transform and theinverse Fourier transform respectively
In this paper we use numerical simulation hologramto check the ability of our arithmetic for determination ofthe focal plane For numerical simulation reconstruction ofholograms the Fresnel and convolution arithmetic based onthe reconstruction equations has been used well in practiceThe convolution arithmetic producing good holograms andreconstruction images and high quality of holograms doesnot change with different object distances Therefore convo-lution arithmetic will be importantly explained in this paper
In Figure 2 the left and the right part are the same whichmeans the formula for reconstruction image from a hologramis the same as that for the generation of the hologram from theobject imageThus after change of some parameters in (3) wewill obtain the new hologram function as follows
ℎ (119909 119910) =119894
120582∬
infin
minusinfin
119874 (120585 120578) 119864119877(120585 120578)
exp (minus119894 (2120587120582) 120588)
120588119889120585 119889120578
(6)
Because the form of (6) is the same as that of (3)the convolution algorithm can also be used to obtain thehologram function ℎ(119909 119910) from the object function119874(120585 120578)Then the replacement of (3) and (6) can be rewritten in theform of the superposition integral as follows
ℎ (119909 119910) = ∬
infin
minusinfin
119874 (120585 120578) 119892 (120585 120578 119909 119910) 119889120585 119889120578 (7)
with
119892 (120585 120578 119909 119910)
=119894
120582
exp [minus119894 (2120587120582)radic1198892 + (120585 minus 119909)2
+ (120578 minus 119910)2
]
radic1198892 + (120585 minus 119909)2
+ (120578 minus 119910)2
(8)
This superposition integral can be considered as a convolu-tion So (7) will become
ℎ (119909 119910)
= 119865minus1
119865 [119874 (120585 120578)]
sdot 119865 [119894
120582(exp [minus119894
2120587
120582
radic1198892 + (120585 minus 119909)2
+ (120578 minus 119910)2
])
times (radic1198892 + (120585 minus 119909)2
+ (120578 minus 119910)2
)
minus1
]
(9)
Equation (9) is used for numerical simulation of hologramsby the convolution algorithm Based on this equation we canget the hologram function ℎ(119909 119910) equivalent to some objectimage function 119874(120585 120578) [4]
3 Theories of Surface Measurements byDigital Holography
31 General Principles As the material surfaces are unevenwhen irradiated by the laser there will appear a differentphase on the material surfaces In Section 2 after recordingand reconstruction of digital hologram the intensity andphase distribution of the reconstructed image can be obtainedby [4]
119868 (120585 120578) =1003816100381610038161003816119877 (120585 120578)
1003816100381610038161003816
2
= Re2 1003816100381610038161003816119877 (120585 120578)1003816100381610038161003816 + Im2 1003816100381610038161003816119877 (120585 120578)
1003816100381610038161003816 (10)
Φ(120585 120578) = arctanIm 1003816100381610038161003816119877 (120585 120578)
1003816100381610038161003816
Re 1003816100381610038161003816119877 (120585 120578)1003816100381610038161003816
(11)
where Re |119877(120585 120578)| and Im |119877(120585 120578)| denote the real and imag-inary parts of the object complex amplitude respectively
32 Phase Unwrapping Phase distribution value obtainedby (11) is limited in the range of (minus120587 +120587) for the theoryof the arctan function so also through phase unwrappingthe accurate phase information can be obtained [4] Phaseunwrapping is a method applied to wrapped phase imagesto remove the 2120587 incoherence embedded within the phasediagram It detects a 2120587 phase jump and adds or subtracts aninteger offset of 2120587 to adjoining pixels following that phasejump based on a tolerance mechanism thus retrieving thecontinuous form of the phase map The simulation of phaseunwrapping process is illustrated in Figures 3(a) and 3(b)
Phase unwrapping is a technique which can generate acontinuously phase distribution It constitutes essential partsof optical metrology by heterodyne techniques In surfacemeasurement by digital holographic the phase unwrappingis a key technique Numerous phase unwrapping algorithmshave been proposed in the past several years [15 16]Two types of strategy have been developed to solve the
4 Advances in Materials Science and Engineering
The wrapped phase
Sample index
Wra
pped
pha
se in
radi
ans
4
3
2
1
0
minus1
minus2
minus3
minus40 100 200 300 400 500 600
(a)
The unwrapped phase
Sample index
Unw
rapp
ed p
hase
in ra
dian
s
6
4
2
0
minus2
minus4
minus60 100 200 300 400 500 600
(b)
Figure 3 Phase unwrapping (a) wrapped phase and (b) continuous phase
phase unwrapping problem path-following and minimum-norm methods Path-following methods include Goldsteinrsquosbranch cut algorithm [17] and minimum spanning tree algo-rithm [18] Minimum-norm methods contain least-squaresphase unwrapping algorithm [19] minimum Lp-norm phaseunwrapping algorithm [16] and so on
In this paper the continuous phase image is acquired byleast-squares phase unwrapping algorithmwithout weighingThe discrete cosine transforms (DCT) is used to solve thediscrete Poisson equation in this method The least-squaresolution of the unwrapped phase and the expanded phase isobtained
33 The Height Distribution of Surface As mentioned aboveafter the phase unwrapping with computer the phase distri-butionΦ(120585 120578) can be simply converted into the height distri-bution ℎ(120585 120578) on the material surface Then the continuousphase distribution can be used for measurements of materialsurface So the height of the material surface ℎ(120585 120578) can becalculated by [4]
ℎ (120585 120578) =120582
4120587Φ (120585 120578) (12)
where 120582 is the wavelengthThe surface of homogenous optical properties was mea-
sured in the light of the reconstructed phase-contrast image[19] which showed the phase changes corresponding tooptical path was less than 10 nm In this paper the target wechoose is much bigger than 10 nm
4 Experiments and Results
41 Optical Experiment Since the height of the target surfaceis uniformly distributed in this experiment a test target isused as the target surface The optical experimental setupfor recording test target (USFA 1950) holograms is shown in
CCDMirror
Beam splitterObjectBeam expander Laser source
MirrorBeam splitter
Figure 4 Experimental setup for recording test target holograms
Figure 4 The experimental conditions are listed as followsthe pixel number119873 is equal to 1024 the pixel size of the CCDcamera is 52120583m the wavelength 120582 is equal to 6328 nm Thelaser with a maximum output power of 6W is adopted
As shown in Figure 4 the input He-Ne laser is dividedinto two parts by a beam splitter (BS) one beam goes throughthe test target as the object beam and another beam isexpanded as the reference beam The object and referencebeams have an interference with BS the hologram is recordedby a CCD detector and then the image information is sent tothe computer by a collection
Figure 5 shows the recording of digital hologram bycomputer The recording distance between the object andthe CCD sensors is set to be 78mm Figure 6 shows thereconstruction intensity image of the test target Then theheight distribution ℎ(120585 120578) can be obtained from (11) and (12)Through the powerful drawing function of MATLAB theheight distribution of the material surface can be displayedin the form of 3D it was shown in Figure 7 1002 points onmaterial surfaceweremeasured in experiment and the heightdistribution information is illustrated in Figure 8 and Table 1
42 Validation Experiment The verification experimentalequipment uses NanoMap 500LS which is produced by AEP
Advances in Materials Science and Engineering 5
Figure 5 Recording of digital hologram
Figure 6 Reconstruction of digital hologram
technology and the composition of the equipment is the sameas the one in Figure 9 [20] NanoMap has many features(a) seamless integration of conventional contact profilemeterand scanning probe microscope (SPM) technology (b) dualmode operation (tip scan and stage scan) optimized forsmall areas (c) 3D mapping as well as long range profilingand 3D long scan range up to 150mm times 150mm (d)stage scan by using high grade optical reference flat (e)wide vertical range with high accuracy as a result of thedual optical and up to 01 nm vertical resolution with finesensor (f) constant contact forces suitable by software andautomatic sample positioning with 119883119884 motorized stageThe NanoMap 500LS measurement flow chart is shown inFigure 10
After loading the test target onto the stage and setting upscan parameters we can get the scan curve shown in Figure 11We process the data and curve fitting using MATLAB andobtain the result shown in Figure 12 The height distributioninformation is illustrated in Figure 13 and the height dates inTable 2 From Figures 12 and 13 we can see so many morenumbers whose values are smaller than zero the reason forwhich is that the protruding part is less than the hollow onein the part we scan In Figure 13 and Table 2 the averagemeasurement result of the target surface by NanoMap 500LSis 699 nm
05
0
1
08
06
04
02
0
Hei
ght (
mm
)
1
0
02
04
06
08
1
Figure 7 The reconstructed height distribution
Poin
t num
el
Height (nm)
1000
900
800
700
600
500
400
300
200
100
072 73 74 75 76 77 78 79 80
Figure 8 Height distribution
Table 1 Data of heights
Height Min Max AverageValue (nm) 727 791 788
Table 2 Data of heights
Height Min Max AverageValue (nm) 604 876 699
43 Experimental Results Tables 1 and 2 show the mea-surement results of the target surface by digital holographyand NanoMap500Ls The comparison of two methods isshown in Table 3 The relative error can be obtain as follows89699 = 127 The digital holography can serve as aneffective measurement method used in engineering
6 Advances in Materials Science and Engineering
Table 3 Comparison of the measurement results by two methods
Methods Digital holography (nm) NanoMap 500Ls (nm) Difference (nm) Relative error ()Value 788 699 89 127
Figure 9 NanoMap 500LS
FlowLoad sample onto XY stage and move to the XY stage to center
Lower the Z stage to sample
Move the XY stage to locate themeasurement location
Run scan
Save and analyze data
Unload sample
Figure 10 Flow chart for taking a profile measurement
5 Conclusions
In this paper we have presented the digital holography formeasuring the material surface as an important techniqueThe principle of surface measurement by digital holographyis analyzed In this paper we use a target as a test targetBy recording and reconstruction hologram we obtain thephase and height distribution of the object surface by noisephase unwrapping and so forth Then we use NanoMap500LS 3D profilometer as validation experiment Comprised
100
80
60
40
20
0
minus20
minus40
minus60
minus80
minus100minus1500 minus1000 minus500 0 500 1000 1500 2000
60
50
40
30
20
10
y(n
m)
x (120583m)
Figure 11 The scan curve
60
40
20
0
minus20
minus40
minus60
minus1500 minus1000 minus500 0 500 1000 1500 2000
y(n
m)
x(120583m)
minus80
Figure 12 The fitting curve
of contact profilometer the results of two measurementmethods do not make much difference However digitalholography measurement method has the larger advantageDigital holographic measurement can obtain the surface ofobjects with no damage high resolution noncontact andfast processing characteristics And also any measurementsystem has measuring error Future research direction is tosolve the measurement errors which exist
Advances in Materials Science and Engineering 7N
umel
Height (nm)
250
200
150
100
50
0minus60 minus40 minus20 0 20 40 60
Figure 13 Height distribution
Acknowledgments
This work was supported by the National Natural ScienceFoundation of China (11272368) and the Natural ScienceFoundation of CSTC (cstc2013yykfB0198)
References
[1] D Gabor ldquoA new microscopic principlerdquo Nature vol 161 no4098 pp 777ndash778 1948
[2] D Gabor ldquoMicroscopy by reconstructed wavefronts 2rdquo Pro-ceedings of the Royal Society vol 64 pp 449ndash469 1951
[3] J W Goodman and R W Lawrence ldquoDigital image formationfromelectronically detected hologramsrdquoApplied Physics Lettersvol 11 no 3 pp 77ndash79 1967
[4] Y Yang B-S Kang and Y-J Choo ldquoApplication of the corre-lation coefficient method for determination of the focal planeto digital particle holographyrdquo Applied Optics vol 47 no 6 pp817ndash824 2008
[5] Y Yang and B-S Kang ldquoExperimental validation for thedetermination of particle positions by the correlation coefficientmethod in digital particle holographyrdquo Applied Optics vol 47no 32 pp 5953ndash5960 2008
[6] L Xu X Peng J Miao and A K Asundi ldquoStudies of digitalmicroscopic holography with applications to microstructuretestingrdquo Applied Optics vol 40 no 28 pp 5046ndash5051 2001
[7] G Pedrini and H J Tiziani ldquoQuantitative evaluation of two-dimensional dynamic deformations using digital holographyrdquoOptics and Laser Technology vol 29 no 5 pp 249ndash256 1997
[8] Y Yang and B Kang ldquoMeasurements of the characteristics ofspray droplets using in-line digital particle holographyrdquo Journalof Mechanical Science and Technology vol 23 no 6 pp 1670ndash1679 2009
[9] G Popescu L P Deflores J C Vaughan et al ldquoFourierphase microscopy for investigation of biological structures anddynamicsrdquo Optics Letters vol 29 no 21 pp 2503ndash2505 2004
[10] P Marquet B Rappaz P J Magistretti et al ldquoDigital holo-graphic microscopy a noninvasive contrast imaging technique
allowing quantitative visualization of living cells with subwave-length axial accuracyrdquoOptics Letters vol 30 no 5 pp 468ndash4702005
[11] A Ettemeyer ldquoApplications of digital holography tomicrostruc-turesrdquo in Proceedings of the SAE World Congress 2009 DetroitMich USA April 2009
[12] S Seebacher W Osten andW P O Juptner ldquoMeasuring shapeand deformation of small objects using digital holographyrdquo inProceedings of SPIE pp 104ndash115 July 1998
[13] B Bowe and V Toal ldquoWhite light interferometric surfaceprofilerrdquo Optical Engineering vol 37 no 6 pp 1796ndash1799 1998
[14] T Kreis Handbook of Holographic Interferometry Wiley-VCH2005
[15] RM Goldstein H A Zebker and C LWerner ldquoSatellite radarinterferometry two-dimensional phase unwrappingrdquo RadioScience vol 23 no 4 pp 713ndash720 1988
[16] D C Ghiglia and M D Pritt Two-Dimensional Phase Unwrap-ping Theory Algorithms and Software John Wiley amp SonsHoboken NJ USA 1998
[17] RM Goldstein H A Zebker and C LWerner ldquoSatellite radarinterferometry two-dimensional phase unwrappingrdquo RadioScience vol 23 no 4 pp 713ndash720 1988
[18] J Schoner A Ettemeyer U Neupert H Rottenkolber CWinter and P Obermeier ldquoNew approaches in interpretingholographic imagesrdquo Optics and Lasers in Engineering vol 14no 4-5 pp 283ndash291 1991
[19] D Kerr G H Kaufmann and G E Galizzi ldquoUnwrappingof interferometric phase-fringe maps by the discrete cosinetransformrdquo Applied Optics vol 35 no 5 pp 810ndash816 1996
[20] AEP Technology ldquoNanoMap 500LS 3D profilometer UserrsquosManualrdquo Revision B 2009
Submit your manuscripts athttpwwwhindawicom
ScientificaHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CorrosionInternational Journal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Polymer ScienceInternational Journal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CeramicsJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CompositesJournal of
NanoparticlesJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
International Journal of
Biomaterials
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
NanoscienceJournal of
TextilesHindawi Publishing Corporation httpwwwhindawicom Volume 2014
Journal of
NanotechnologyHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Journal of
CrystallographyJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
The Scientific World JournalHindawi Publishing Corporation httpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CoatingsJournal of
Advances in
Materials Science and EngineeringHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Smart Materials Research
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
MetallurgyJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
BioMed Research International
MaterialsJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Nano
materials
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Journal ofNanomaterials
4 Advances in Materials Science and Engineering
The wrapped phase
Sample index
Wra
pped
pha
se in
radi
ans
4
3
2
1
0
minus1
minus2
minus3
minus40 100 200 300 400 500 600
(a)
The unwrapped phase
Sample index
Unw
rapp
ed p
hase
in ra
dian
s
6
4
2
0
minus2
minus4
minus60 100 200 300 400 500 600
(b)
Figure 3 Phase unwrapping (a) wrapped phase and (b) continuous phase
phase unwrapping problem path-following and minimum-norm methods Path-following methods include Goldsteinrsquosbranch cut algorithm [17] and minimum spanning tree algo-rithm [18] Minimum-norm methods contain least-squaresphase unwrapping algorithm [19] minimum Lp-norm phaseunwrapping algorithm [16] and so on
In this paper the continuous phase image is acquired byleast-squares phase unwrapping algorithmwithout weighingThe discrete cosine transforms (DCT) is used to solve thediscrete Poisson equation in this method The least-squaresolution of the unwrapped phase and the expanded phase isobtained
33 The Height Distribution of Surface As mentioned aboveafter the phase unwrapping with computer the phase distri-butionΦ(120585 120578) can be simply converted into the height distri-bution ℎ(120585 120578) on the material surface Then the continuousphase distribution can be used for measurements of materialsurface So the height of the material surface ℎ(120585 120578) can becalculated by [4]
ℎ (120585 120578) =120582
4120587Φ (120585 120578) (12)
where 120582 is the wavelengthThe surface of homogenous optical properties was mea-
sured in the light of the reconstructed phase-contrast image[19] which showed the phase changes corresponding tooptical path was less than 10 nm In this paper the target wechoose is much bigger than 10 nm
4 Experiments and Results
41 Optical Experiment Since the height of the target surfaceis uniformly distributed in this experiment a test target isused as the target surface The optical experimental setupfor recording test target (USFA 1950) holograms is shown in
CCDMirror
Beam splitterObjectBeam expander Laser source
MirrorBeam splitter
Figure 4 Experimental setup for recording test target holograms
Figure 4 The experimental conditions are listed as followsthe pixel number119873 is equal to 1024 the pixel size of the CCDcamera is 52120583m the wavelength 120582 is equal to 6328 nm Thelaser with a maximum output power of 6W is adopted
As shown in Figure 4 the input He-Ne laser is dividedinto two parts by a beam splitter (BS) one beam goes throughthe test target as the object beam and another beam isexpanded as the reference beam The object and referencebeams have an interference with BS the hologram is recordedby a CCD detector and then the image information is sent tothe computer by a collection
Figure 5 shows the recording of digital hologram bycomputer The recording distance between the object andthe CCD sensors is set to be 78mm Figure 6 shows thereconstruction intensity image of the test target Then theheight distribution ℎ(120585 120578) can be obtained from (11) and (12)Through the powerful drawing function of MATLAB theheight distribution of the material surface can be displayedin the form of 3D it was shown in Figure 7 1002 points onmaterial surfaceweremeasured in experiment and the heightdistribution information is illustrated in Figure 8 and Table 1
42 Validation Experiment The verification experimentalequipment uses NanoMap 500LS which is produced by AEP
Advances in Materials Science and Engineering 5
Figure 5 Recording of digital hologram
Figure 6 Reconstruction of digital hologram
technology and the composition of the equipment is the sameas the one in Figure 9 [20] NanoMap has many features(a) seamless integration of conventional contact profilemeterand scanning probe microscope (SPM) technology (b) dualmode operation (tip scan and stage scan) optimized forsmall areas (c) 3D mapping as well as long range profilingand 3D long scan range up to 150mm times 150mm (d)stage scan by using high grade optical reference flat (e)wide vertical range with high accuracy as a result of thedual optical and up to 01 nm vertical resolution with finesensor (f) constant contact forces suitable by software andautomatic sample positioning with 119883119884 motorized stageThe NanoMap 500LS measurement flow chart is shown inFigure 10
After loading the test target onto the stage and setting upscan parameters we can get the scan curve shown in Figure 11We process the data and curve fitting using MATLAB andobtain the result shown in Figure 12 The height distributioninformation is illustrated in Figure 13 and the height dates inTable 2 From Figures 12 and 13 we can see so many morenumbers whose values are smaller than zero the reason forwhich is that the protruding part is less than the hollow onein the part we scan In Figure 13 and Table 2 the averagemeasurement result of the target surface by NanoMap 500LSis 699 nm
05
0
1
08
06
04
02
0
Hei
ght (
mm
)
1
0
02
04
06
08
1
Figure 7 The reconstructed height distribution
Poin
t num
el
Height (nm)
1000
900
800
700
600
500
400
300
200
100
072 73 74 75 76 77 78 79 80
Figure 8 Height distribution
Table 1 Data of heights
Height Min Max AverageValue (nm) 727 791 788
Table 2 Data of heights
Height Min Max AverageValue (nm) 604 876 699
43 Experimental Results Tables 1 and 2 show the mea-surement results of the target surface by digital holographyand NanoMap500Ls The comparison of two methods isshown in Table 3 The relative error can be obtain as follows89699 = 127 The digital holography can serve as aneffective measurement method used in engineering
6 Advances in Materials Science and Engineering
Table 3 Comparison of the measurement results by two methods
Methods Digital holography (nm) NanoMap 500Ls (nm) Difference (nm) Relative error ()Value 788 699 89 127
Figure 9 NanoMap 500LS
FlowLoad sample onto XY stage and move to the XY stage to center
Lower the Z stage to sample
Move the XY stage to locate themeasurement location
Run scan
Save and analyze data
Unload sample
Figure 10 Flow chart for taking a profile measurement
5 Conclusions
In this paper we have presented the digital holography formeasuring the material surface as an important techniqueThe principle of surface measurement by digital holographyis analyzed In this paper we use a target as a test targetBy recording and reconstruction hologram we obtain thephase and height distribution of the object surface by noisephase unwrapping and so forth Then we use NanoMap500LS 3D profilometer as validation experiment Comprised
100
80
60
40
20
0
minus20
minus40
minus60
minus80
minus100minus1500 minus1000 minus500 0 500 1000 1500 2000
60
50
40
30
20
10
y(n
m)
x (120583m)
Figure 11 The scan curve
60
40
20
0
minus20
minus40
minus60
minus1500 minus1000 minus500 0 500 1000 1500 2000
y(n
m)
x(120583m)
minus80
Figure 12 The fitting curve
of contact profilometer the results of two measurementmethods do not make much difference However digitalholography measurement method has the larger advantageDigital holographic measurement can obtain the surface ofobjects with no damage high resolution noncontact andfast processing characteristics And also any measurementsystem has measuring error Future research direction is tosolve the measurement errors which exist
Advances in Materials Science and Engineering 7N
umel
Height (nm)
250
200
150
100
50
0minus60 minus40 minus20 0 20 40 60
Figure 13 Height distribution
Acknowledgments
This work was supported by the National Natural ScienceFoundation of China (11272368) and the Natural ScienceFoundation of CSTC (cstc2013yykfB0198)
References
[1] D Gabor ldquoA new microscopic principlerdquo Nature vol 161 no4098 pp 777ndash778 1948
[2] D Gabor ldquoMicroscopy by reconstructed wavefronts 2rdquo Pro-ceedings of the Royal Society vol 64 pp 449ndash469 1951
[3] J W Goodman and R W Lawrence ldquoDigital image formationfromelectronically detected hologramsrdquoApplied Physics Lettersvol 11 no 3 pp 77ndash79 1967
[4] Y Yang B-S Kang and Y-J Choo ldquoApplication of the corre-lation coefficient method for determination of the focal planeto digital particle holographyrdquo Applied Optics vol 47 no 6 pp817ndash824 2008
[5] Y Yang and B-S Kang ldquoExperimental validation for thedetermination of particle positions by the correlation coefficientmethod in digital particle holographyrdquo Applied Optics vol 47no 32 pp 5953ndash5960 2008
[6] L Xu X Peng J Miao and A K Asundi ldquoStudies of digitalmicroscopic holography with applications to microstructuretestingrdquo Applied Optics vol 40 no 28 pp 5046ndash5051 2001
[7] G Pedrini and H J Tiziani ldquoQuantitative evaluation of two-dimensional dynamic deformations using digital holographyrdquoOptics and Laser Technology vol 29 no 5 pp 249ndash256 1997
[8] Y Yang and B Kang ldquoMeasurements of the characteristics ofspray droplets using in-line digital particle holographyrdquo Journalof Mechanical Science and Technology vol 23 no 6 pp 1670ndash1679 2009
[9] G Popescu L P Deflores J C Vaughan et al ldquoFourierphase microscopy for investigation of biological structures anddynamicsrdquo Optics Letters vol 29 no 21 pp 2503ndash2505 2004
[10] P Marquet B Rappaz P J Magistretti et al ldquoDigital holo-graphic microscopy a noninvasive contrast imaging technique
allowing quantitative visualization of living cells with subwave-length axial accuracyrdquoOptics Letters vol 30 no 5 pp 468ndash4702005
[11] A Ettemeyer ldquoApplications of digital holography tomicrostruc-turesrdquo in Proceedings of the SAE World Congress 2009 DetroitMich USA April 2009
[12] S Seebacher W Osten andW P O Juptner ldquoMeasuring shapeand deformation of small objects using digital holographyrdquo inProceedings of SPIE pp 104ndash115 July 1998
[13] B Bowe and V Toal ldquoWhite light interferometric surfaceprofilerrdquo Optical Engineering vol 37 no 6 pp 1796ndash1799 1998
[14] T Kreis Handbook of Holographic Interferometry Wiley-VCH2005
[15] RM Goldstein H A Zebker and C LWerner ldquoSatellite radarinterferometry two-dimensional phase unwrappingrdquo RadioScience vol 23 no 4 pp 713ndash720 1988
[16] D C Ghiglia and M D Pritt Two-Dimensional Phase Unwrap-ping Theory Algorithms and Software John Wiley amp SonsHoboken NJ USA 1998
[17] RM Goldstein H A Zebker and C LWerner ldquoSatellite radarinterferometry two-dimensional phase unwrappingrdquo RadioScience vol 23 no 4 pp 713ndash720 1988
[18] J Schoner A Ettemeyer U Neupert H Rottenkolber CWinter and P Obermeier ldquoNew approaches in interpretingholographic imagesrdquo Optics and Lasers in Engineering vol 14no 4-5 pp 283ndash291 1991
[19] D Kerr G H Kaufmann and G E Galizzi ldquoUnwrappingof interferometric phase-fringe maps by the discrete cosinetransformrdquo Applied Optics vol 35 no 5 pp 810ndash816 1996
[20] AEP Technology ldquoNanoMap 500LS 3D profilometer UserrsquosManualrdquo Revision B 2009
Submit your manuscripts athttpwwwhindawicom
ScientificaHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CorrosionInternational Journal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Polymer ScienceInternational Journal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CeramicsJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CompositesJournal of
NanoparticlesJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
International Journal of
Biomaterials
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
NanoscienceJournal of
TextilesHindawi Publishing Corporation httpwwwhindawicom Volume 2014
Journal of
NanotechnologyHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Journal of
CrystallographyJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
The Scientific World JournalHindawi Publishing Corporation httpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CoatingsJournal of
Advances in
Materials Science and EngineeringHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Smart Materials Research
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
MetallurgyJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
BioMed Research International
MaterialsJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Nano
materials
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Journal ofNanomaterials
Advances in Materials Science and Engineering 5
Figure 5 Recording of digital hologram
Figure 6 Reconstruction of digital hologram
technology and the composition of the equipment is the sameas the one in Figure 9 [20] NanoMap has many features(a) seamless integration of conventional contact profilemeterand scanning probe microscope (SPM) technology (b) dualmode operation (tip scan and stage scan) optimized forsmall areas (c) 3D mapping as well as long range profilingand 3D long scan range up to 150mm times 150mm (d)stage scan by using high grade optical reference flat (e)wide vertical range with high accuracy as a result of thedual optical and up to 01 nm vertical resolution with finesensor (f) constant contact forces suitable by software andautomatic sample positioning with 119883119884 motorized stageThe NanoMap 500LS measurement flow chart is shown inFigure 10
After loading the test target onto the stage and setting upscan parameters we can get the scan curve shown in Figure 11We process the data and curve fitting using MATLAB andobtain the result shown in Figure 12 The height distributioninformation is illustrated in Figure 13 and the height dates inTable 2 From Figures 12 and 13 we can see so many morenumbers whose values are smaller than zero the reason forwhich is that the protruding part is less than the hollow onein the part we scan In Figure 13 and Table 2 the averagemeasurement result of the target surface by NanoMap 500LSis 699 nm
05
0
1
08
06
04
02
0
Hei
ght (
mm
)
1
0
02
04
06
08
1
Figure 7 The reconstructed height distribution
Poin
t num
el
Height (nm)
1000
900
800
700
600
500
400
300
200
100
072 73 74 75 76 77 78 79 80
Figure 8 Height distribution
Table 1 Data of heights
Height Min Max AverageValue (nm) 727 791 788
Table 2 Data of heights
Height Min Max AverageValue (nm) 604 876 699
43 Experimental Results Tables 1 and 2 show the mea-surement results of the target surface by digital holographyand NanoMap500Ls The comparison of two methods isshown in Table 3 The relative error can be obtain as follows89699 = 127 The digital holography can serve as aneffective measurement method used in engineering
6 Advances in Materials Science and Engineering
Table 3 Comparison of the measurement results by two methods
Methods Digital holography (nm) NanoMap 500Ls (nm) Difference (nm) Relative error ()Value 788 699 89 127
Figure 9 NanoMap 500LS
FlowLoad sample onto XY stage and move to the XY stage to center
Lower the Z stage to sample
Move the XY stage to locate themeasurement location
Run scan
Save and analyze data
Unload sample
Figure 10 Flow chart for taking a profile measurement
5 Conclusions
In this paper we have presented the digital holography formeasuring the material surface as an important techniqueThe principle of surface measurement by digital holographyis analyzed In this paper we use a target as a test targetBy recording and reconstruction hologram we obtain thephase and height distribution of the object surface by noisephase unwrapping and so forth Then we use NanoMap500LS 3D profilometer as validation experiment Comprised
100
80
60
40
20
0
minus20
minus40
minus60
minus80
minus100minus1500 minus1000 minus500 0 500 1000 1500 2000
60
50
40
30
20
10
y(n
m)
x (120583m)
Figure 11 The scan curve
60
40
20
0
minus20
minus40
minus60
minus1500 minus1000 minus500 0 500 1000 1500 2000
y(n
m)
x(120583m)
minus80
Figure 12 The fitting curve
of contact profilometer the results of two measurementmethods do not make much difference However digitalholography measurement method has the larger advantageDigital holographic measurement can obtain the surface ofobjects with no damage high resolution noncontact andfast processing characteristics And also any measurementsystem has measuring error Future research direction is tosolve the measurement errors which exist
Advances in Materials Science and Engineering 7N
umel
Height (nm)
250
200
150
100
50
0minus60 minus40 minus20 0 20 40 60
Figure 13 Height distribution
Acknowledgments
This work was supported by the National Natural ScienceFoundation of China (11272368) and the Natural ScienceFoundation of CSTC (cstc2013yykfB0198)
References
[1] D Gabor ldquoA new microscopic principlerdquo Nature vol 161 no4098 pp 777ndash778 1948
[2] D Gabor ldquoMicroscopy by reconstructed wavefronts 2rdquo Pro-ceedings of the Royal Society vol 64 pp 449ndash469 1951
[3] J W Goodman and R W Lawrence ldquoDigital image formationfromelectronically detected hologramsrdquoApplied Physics Lettersvol 11 no 3 pp 77ndash79 1967
[4] Y Yang B-S Kang and Y-J Choo ldquoApplication of the corre-lation coefficient method for determination of the focal planeto digital particle holographyrdquo Applied Optics vol 47 no 6 pp817ndash824 2008
[5] Y Yang and B-S Kang ldquoExperimental validation for thedetermination of particle positions by the correlation coefficientmethod in digital particle holographyrdquo Applied Optics vol 47no 32 pp 5953ndash5960 2008
[6] L Xu X Peng J Miao and A K Asundi ldquoStudies of digitalmicroscopic holography with applications to microstructuretestingrdquo Applied Optics vol 40 no 28 pp 5046ndash5051 2001
[7] G Pedrini and H J Tiziani ldquoQuantitative evaluation of two-dimensional dynamic deformations using digital holographyrdquoOptics and Laser Technology vol 29 no 5 pp 249ndash256 1997
[8] Y Yang and B Kang ldquoMeasurements of the characteristics ofspray droplets using in-line digital particle holographyrdquo Journalof Mechanical Science and Technology vol 23 no 6 pp 1670ndash1679 2009
[9] G Popescu L P Deflores J C Vaughan et al ldquoFourierphase microscopy for investigation of biological structures anddynamicsrdquo Optics Letters vol 29 no 21 pp 2503ndash2505 2004
[10] P Marquet B Rappaz P J Magistretti et al ldquoDigital holo-graphic microscopy a noninvasive contrast imaging technique
allowing quantitative visualization of living cells with subwave-length axial accuracyrdquoOptics Letters vol 30 no 5 pp 468ndash4702005
[11] A Ettemeyer ldquoApplications of digital holography tomicrostruc-turesrdquo in Proceedings of the SAE World Congress 2009 DetroitMich USA April 2009
[12] S Seebacher W Osten andW P O Juptner ldquoMeasuring shapeand deformation of small objects using digital holographyrdquo inProceedings of SPIE pp 104ndash115 July 1998
[13] B Bowe and V Toal ldquoWhite light interferometric surfaceprofilerrdquo Optical Engineering vol 37 no 6 pp 1796ndash1799 1998
[14] T Kreis Handbook of Holographic Interferometry Wiley-VCH2005
[15] RM Goldstein H A Zebker and C LWerner ldquoSatellite radarinterferometry two-dimensional phase unwrappingrdquo RadioScience vol 23 no 4 pp 713ndash720 1988
[16] D C Ghiglia and M D Pritt Two-Dimensional Phase Unwrap-ping Theory Algorithms and Software John Wiley amp SonsHoboken NJ USA 1998
[17] RM Goldstein H A Zebker and C LWerner ldquoSatellite radarinterferometry two-dimensional phase unwrappingrdquo RadioScience vol 23 no 4 pp 713ndash720 1988
[18] J Schoner A Ettemeyer U Neupert H Rottenkolber CWinter and P Obermeier ldquoNew approaches in interpretingholographic imagesrdquo Optics and Lasers in Engineering vol 14no 4-5 pp 283ndash291 1991
[19] D Kerr G H Kaufmann and G E Galizzi ldquoUnwrappingof interferometric phase-fringe maps by the discrete cosinetransformrdquo Applied Optics vol 35 no 5 pp 810ndash816 1996
[20] AEP Technology ldquoNanoMap 500LS 3D profilometer UserrsquosManualrdquo Revision B 2009
Submit your manuscripts athttpwwwhindawicom
ScientificaHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CorrosionInternational Journal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Polymer ScienceInternational Journal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CeramicsJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CompositesJournal of
NanoparticlesJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
International Journal of
Biomaterials
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
NanoscienceJournal of
TextilesHindawi Publishing Corporation httpwwwhindawicom Volume 2014
Journal of
NanotechnologyHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Journal of
CrystallographyJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
The Scientific World JournalHindawi Publishing Corporation httpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CoatingsJournal of
Advances in
Materials Science and EngineeringHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Smart Materials Research
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
MetallurgyJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
BioMed Research International
MaterialsJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Nano
materials
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Journal ofNanomaterials
6 Advances in Materials Science and Engineering
Table 3 Comparison of the measurement results by two methods
Methods Digital holography (nm) NanoMap 500Ls (nm) Difference (nm) Relative error ()Value 788 699 89 127
Figure 9 NanoMap 500LS
FlowLoad sample onto XY stage and move to the XY stage to center
Lower the Z stage to sample
Move the XY stage to locate themeasurement location
Run scan
Save and analyze data
Unload sample
Figure 10 Flow chart for taking a profile measurement
5 Conclusions
In this paper we have presented the digital holography formeasuring the material surface as an important techniqueThe principle of surface measurement by digital holographyis analyzed In this paper we use a target as a test targetBy recording and reconstruction hologram we obtain thephase and height distribution of the object surface by noisephase unwrapping and so forth Then we use NanoMap500LS 3D profilometer as validation experiment Comprised
100
80
60
40
20
0
minus20
minus40
minus60
minus80
minus100minus1500 minus1000 minus500 0 500 1000 1500 2000
60
50
40
30
20
10
y(n
m)
x (120583m)
Figure 11 The scan curve
60
40
20
0
minus20
minus40
minus60
minus1500 minus1000 minus500 0 500 1000 1500 2000
y(n
m)
x(120583m)
minus80
Figure 12 The fitting curve
of contact profilometer the results of two measurementmethods do not make much difference However digitalholography measurement method has the larger advantageDigital holographic measurement can obtain the surface ofobjects with no damage high resolution noncontact andfast processing characteristics And also any measurementsystem has measuring error Future research direction is tosolve the measurement errors which exist
Advances in Materials Science and Engineering 7N
umel
Height (nm)
250
200
150
100
50
0minus60 minus40 minus20 0 20 40 60
Figure 13 Height distribution
Acknowledgments
This work was supported by the National Natural ScienceFoundation of China (11272368) and the Natural ScienceFoundation of CSTC (cstc2013yykfB0198)
References
[1] D Gabor ldquoA new microscopic principlerdquo Nature vol 161 no4098 pp 777ndash778 1948
[2] D Gabor ldquoMicroscopy by reconstructed wavefronts 2rdquo Pro-ceedings of the Royal Society vol 64 pp 449ndash469 1951
[3] J W Goodman and R W Lawrence ldquoDigital image formationfromelectronically detected hologramsrdquoApplied Physics Lettersvol 11 no 3 pp 77ndash79 1967
[4] Y Yang B-S Kang and Y-J Choo ldquoApplication of the corre-lation coefficient method for determination of the focal planeto digital particle holographyrdquo Applied Optics vol 47 no 6 pp817ndash824 2008
[5] Y Yang and B-S Kang ldquoExperimental validation for thedetermination of particle positions by the correlation coefficientmethod in digital particle holographyrdquo Applied Optics vol 47no 32 pp 5953ndash5960 2008
[6] L Xu X Peng J Miao and A K Asundi ldquoStudies of digitalmicroscopic holography with applications to microstructuretestingrdquo Applied Optics vol 40 no 28 pp 5046ndash5051 2001
[7] G Pedrini and H J Tiziani ldquoQuantitative evaluation of two-dimensional dynamic deformations using digital holographyrdquoOptics and Laser Technology vol 29 no 5 pp 249ndash256 1997
[8] Y Yang and B Kang ldquoMeasurements of the characteristics ofspray droplets using in-line digital particle holographyrdquo Journalof Mechanical Science and Technology vol 23 no 6 pp 1670ndash1679 2009
[9] G Popescu L P Deflores J C Vaughan et al ldquoFourierphase microscopy for investigation of biological structures anddynamicsrdquo Optics Letters vol 29 no 21 pp 2503ndash2505 2004
[10] P Marquet B Rappaz P J Magistretti et al ldquoDigital holo-graphic microscopy a noninvasive contrast imaging technique
allowing quantitative visualization of living cells with subwave-length axial accuracyrdquoOptics Letters vol 30 no 5 pp 468ndash4702005
[11] A Ettemeyer ldquoApplications of digital holography tomicrostruc-turesrdquo in Proceedings of the SAE World Congress 2009 DetroitMich USA April 2009
[12] S Seebacher W Osten andW P O Juptner ldquoMeasuring shapeand deformation of small objects using digital holographyrdquo inProceedings of SPIE pp 104ndash115 July 1998
[13] B Bowe and V Toal ldquoWhite light interferometric surfaceprofilerrdquo Optical Engineering vol 37 no 6 pp 1796ndash1799 1998
[14] T Kreis Handbook of Holographic Interferometry Wiley-VCH2005
[15] RM Goldstein H A Zebker and C LWerner ldquoSatellite radarinterferometry two-dimensional phase unwrappingrdquo RadioScience vol 23 no 4 pp 713ndash720 1988
[16] D C Ghiglia and M D Pritt Two-Dimensional Phase Unwrap-ping Theory Algorithms and Software John Wiley amp SonsHoboken NJ USA 1998
[17] RM Goldstein H A Zebker and C LWerner ldquoSatellite radarinterferometry two-dimensional phase unwrappingrdquo RadioScience vol 23 no 4 pp 713ndash720 1988
[18] J Schoner A Ettemeyer U Neupert H Rottenkolber CWinter and P Obermeier ldquoNew approaches in interpretingholographic imagesrdquo Optics and Lasers in Engineering vol 14no 4-5 pp 283ndash291 1991
[19] D Kerr G H Kaufmann and G E Galizzi ldquoUnwrappingof interferometric phase-fringe maps by the discrete cosinetransformrdquo Applied Optics vol 35 no 5 pp 810ndash816 1996
[20] AEP Technology ldquoNanoMap 500LS 3D profilometer UserrsquosManualrdquo Revision B 2009
Submit your manuscripts athttpwwwhindawicom
ScientificaHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CorrosionInternational Journal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Polymer ScienceInternational Journal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CeramicsJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CompositesJournal of
NanoparticlesJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
International Journal of
Biomaterials
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
NanoscienceJournal of
TextilesHindawi Publishing Corporation httpwwwhindawicom Volume 2014
Journal of
NanotechnologyHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Journal of
CrystallographyJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
The Scientific World JournalHindawi Publishing Corporation httpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CoatingsJournal of
Advances in
Materials Science and EngineeringHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Smart Materials Research
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
MetallurgyJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
BioMed Research International
MaterialsJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Nano
materials
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Journal ofNanomaterials
Advances in Materials Science and Engineering 7N
umel
Height (nm)
250
200
150
100
50
0minus60 minus40 minus20 0 20 40 60
Figure 13 Height distribution
Acknowledgments
This work was supported by the National Natural ScienceFoundation of China (11272368) and the Natural ScienceFoundation of CSTC (cstc2013yykfB0198)
References
[1] D Gabor ldquoA new microscopic principlerdquo Nature vol 161 no4098 pp 777ndash778 1948
[2] D Gabor ldquoMicroscopy by reconstructed wavefronts 2rdquo Pro-ceedings of the Royal Society vol 64 pp 449ndash469 1951
[3] J W Goodman and R W Lawrence ldquoDigital image formationfromelectronically detected hologramsrdquoApplied Physics Lettersvol 11 no 3 pp 77ndash79 1967
[4] Y Yang B-S Kang and Y-J Choo ldquoApplication of the corre-lation coefficient method for determination of the focal planeto digital particle holographyrdquo Applied Optics vol 47 no 6 pp817ndash824 2008
[5] Y Yang and B-S Kang ldquoExperimental validation for thedetermination of particle positions by the correlation coefficientmethod in digital particle holographyrdquo Applied Optics vol 47no 32 pp 5953ndash5960 2008
[6] L Xu X Peng J Miao and A K Asundi ldquoStudies of digitalmicroscopic holography with applications to microstructuretestingrdquo Applied Optics vol 40 no 28 pp 5046ndash5051 2001
[7] G Pedrini and H J Tiziani ldquoQuantitative evaluation of two-dimensional dynamic deformations using digital holographyrdquoOptics and Laser Technology vol 29 no 5 pp 249ndash256 1997
[8] Y Yang and B Kang ldquoMeasurements of the characteristics ofspray droplets using in-line digital particle holographyrdquo Journalof Mechanical Science and Technology vol 23 no 6 pp 1670ndash1679 2009
[9] G Popescu L P Deflores J C Vaughan et al ldquoFourierphase microscopy for investigation of biological structures anddynamicsrdquo Optics Letters vol 29 no 21 pp 2503ndash2505 2004
[10] P Marquet B Rappaz P J Magistretti et al ldquoDigital holo-graphic microscopy a noninvasive contrast imaging technique
allowing quantitative visualization of living cells with subwave-length axial accuracyrdquoOptics Letters vol 30 no 5 pp 468ndash4702005
[11] A Ettemeyer ldquoApplications of digital holography tomicrostruc-turesrdquo in Proceedings of the SAE World Congress 2009 DetroitMich USA April 2009
[12] S Seebacher W Osten andW P O Juptner ldquoMeasuring shapeand deformation of small objects using digital holographyrdquo inProceedings of SPIE pp 104ndash115 July 1998
[13] B Bowe and V Toal ldquoWhite light interferometric surfaceprofilerrdquo Optical Engineering vol 37 no 6 pp 1796ndash1799 1998
[14] T Kreis Handbook of Holographic Interferometry Wiley-VCH2005
[15] RM Goldstein H A Zebker and C LWerner ldquoSatellite radarinterferometry two-dimensional phase unwrappingrdquo RadioScience vol 23 no 4 pp 713ndash720 1988
[16] D C Ghiglia and M D Pritt Two-Dimensional Phase Unwrap-ping Theory Algorithms and Software John Wiley amp SonsHoboken NJ USA 1998
[17] RM Goldstein H A Zebker and C LWerner ldquoSatellite radarinterferometry two-dimensional phase unwrappingrdquo RadioScience vol 23 no 4 pp 713ndash720 1988
[18] J Schoner A Ettemeyer U Neupert H Rottenkolber CWinter and P Obermeier ldquoNew approaches in interpretingholographic imagesrdquo Optics and Lasers in Engineering vol 14no 4-5 pp 283ndash291 1991
[19] D Kerr G H Kaufmann and G E Galizzi ldquoUnwrappingof interferometric phase-fringe maps by the discrete cosinetransformrdquo Applied Optics vol 35 no 5 pp 810ndash816 1996
[20] AEP Technology ldquoNanoMap 500LS 3D profilometer UserrsquosManualrdquo Revision B 2009
Submit your manuscripts athttpwwwhindawicom
ScientificaHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CorrosionInternational Journal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Polymer ScienceInternational Journal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CeramicsJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CompositesJournal of
NanoparticlesJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
International Journal of
Biomaterials
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
NanoscienceJournal of
TextilesHindawi Publishing Corporation httpwwwhindawicom Volume 2014
Journal of
NanotechnologyHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Journal of
CrystallographyJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
The Scientific World JournalHindawi Publishing Corporation httpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CoatingsJournal of
Advances in
Materials Science and EngineeringHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Smart Materials Research
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
MetallurgyJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
BioMed Research International
MaterialsJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Nano
materials
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Journal ofNanomaterials
Submit your manuscripts athttpwwwhindawicom
ScientificaHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CorrosionInternational Journal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Polymer ScienceInternational Journal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CeramicsJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CompositesJournal of
NanoparticlesJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
International Journal of
Biomaterials
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
NanoscienceJournal of
TextilesHindawi Publishing Corporation httpwwwhindawicom Volume 2014
Journal of
NanotechnologyHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Journal of
CrystallographyJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
The Scientific World JournalHindawi Publishing Corporation httpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
CoatingsJournal of
Advances in
Materials Science and EngineeringHindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Smart Materials Research
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
MetallurgyJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
BioMed Research International
MaterialsJournal of
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Nano
materials
Hindawi Publishing Corporationhttpwwwhindawicom Volume 2014
Journal ofNanomaterials