resistance capacitance

24
Dr. Ahmed H. Madian-VLSI 1 Very Large Scale Integration ((VLSI Dr. Ahmed H. Madian [email protected] Lecture 3

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Page 1: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 1

Very Large Scale Integration ((VLSI

Dr. Ahmed H. [email protected]

Lecture 3

Page 2: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 2

Contents Wiring tracks Latch-up Circuit characterization & performance Resistance estimation Capacitance estimation Inductance estimation Delay estimation

Simple RC model Penfield-Rubenstein Model

Delay minimization techniques Transistor sizing Distributed drivers Large driver

Wiring techniques

Page 3: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 3

Wiring Tracks A wiring track space required for a wire

4λ width, 4λ spacing from the neighbor=8 λ Transistor consumes one wiring track

4λ4λ

Page 4: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 4

Area Estimation Estimate Area by Counting wiring tracks

Multiply by 8 (4Width + 4Spacing) to express in λ

40λ

32λ

Page 5: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 5

Latch up Latch up is a condition that can occur in a circuit

fabricated in a bulk CMOS technology.

+N +N +P +P

VDDGND

N-well

P

N

P

N

VDD

Page 6: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 6

P-substrate

Latch up Prevention This could be corrected by:

Include an N-well contact every time a pFET is connected to VDD

Include an p-substrate contact every time a NFET is connected to GND

+N +N +P +P

VDDGND

N-well

VDDGND

Page 7: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 7

Circuit characterization &performance

Resistance estimation Capacitance estimation Inductance estimation Delay estimation

Page 8: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 8

Resistance estimation Resistance of uniform slab

can be given as,

Where ρ = resistivity t= thickness

l= conductor length w=conductor widthor,

Rs is the sheet resistance Ω/ð

ohmsw

l

tR .

ρ=

ohmsw

lRR s .=

I

l

t

w

Page 9: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 9

(.Resistance estimation (cont Resistance of certain layers

1K 5KN-well24Silicide 35Diffusion n80Diffusion p

15100Poly0.03metal

Rs (Ω/ð)Material

Page 10: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 10

Resistance estimation For MOSFET channel resistance

Rchannel = RSheet (L/W)

where Rsheet = 1/µCOX(Vgs-Vt)

For P and n channels

Rsheet = 1000 ->30,000 Ω/ð

+N + NL

channel

L

W

Page 11: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 11

(.Resistance estimation (cont Resistance of non rectangular regions

W1

W2

W2

W1

W2

W1

L

Ratio = 2L/(L+2W1)

L

WRatio =L/W Ratio =L/W

W2

W1

L

Ratio =W1/W2

W2 W2

W1

W1

Ratio =W2/W1

Page 12: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 12

Inverter resistance estimation CMOS inverter (no static

current) Switching current

VDD

Vin

VGS

VOUT = VDSIL

IDS

MP

MN

Vin Vout

VDD

Rs,p (L/W)

Rs,n (L/W)

351025

1

,,max

,,

max

DDDD

nsps

DD

nsps

DD

total

DD

VV

RR

VI

WLforW

LR

W

LR

V

R

VI

=+

=+

=

==

+==

35.

2

maxDDV

VIlosspowerswitching DD ==

Page 13: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 13

Circuit characterization &performance

Resistance estimation Capacitance estimation

Transistor capacitance Routing capacitance

Inductance estimation Delay estimation

Page 14: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 14

Capacitance estimation

The dynamic response of MOS systems strongly depends on the parasitic capacitances associated with the MOS device. The total load capacitance on the output of a CMOS gate is the sum of: gate capacitance (of other inputs connected to out) diffusion capacitance (of drain/source regions) routing capacitances (output to other inputs)

gate

drain

source

substrate

CGD

CGS CSB

CDB

CGB

Page 15: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 15

(.Capacitance estimation (cont

Gate capacitance Diffusion capacitance Routing capacitance

Cdiff >Cpoly>Cm1>Cm2

+nsubstrate

gate

insulatorCgate

C.diff

gate

+nsubstrate

Metal layer

Crouting

Page 16: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 16

Capacitance estimation

In general, capacitance could be calculated using

d

A

d

AC ro ... εεε ==

oxro

areaunit Cd

C == εε ./ d

Page 17: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 17

Gate Capacitance

Cg = Cgs + Cgd + Cgb

Page 18: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 18

(.Capacitance estimation (cont Diffusion capacitance (source/drain)

SourceDiffusion

Area

DrainDiffusion

Area

b

a

Gateinsulator

CJP

Side wall capacitance

CJa

area capacitance

PCACC sidewallsdAreaddiffs .. ,,, +=

Where A = area and p = perimeters

Page 19: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 19

Routing capacitance

single conductor capacitance multiple conductor capacitance

Page 20: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 20

(.Capacitance estimation (cont

Metal 1

substrate

Fringing capacitance

+++

Π+−

=

2222

1ln

22

t

h

t

h

t

hh

tw

Ctotal ε

Routing capacitance: a) single conductor capacitance

w h

t

Half cylinders

Page 21: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 21

(.Capacitance estimation (cont

Metal 2

Metal 1

substrate

C12C2

C1

C1C2

C12

Metal 2Metal 1Vin Vout

122

12.CC

CVV inout

+∆=∆

Routing capacitance: b) multiple conductor capacitance

Page 22: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 22

Multilayer capacitance calculations

Example: given the layout shown in the figure calculate the total capacitance at source and gate given that:

Cmetal/Area = 0.025µF/µm2

Cpoly/Area = 0.045µF/µm2

CGate/A = 0.7 fF/µm2

Cd,a/A = 0.33fF/µm2

Cd,side/L = 2.6fF/µm

λ = 5.1µm

100λ

3λ CM

4λ4λ 2λ

CMP

CP1

Cgate

CP1

Page 23: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 23

Solution100λ

3λ CM

4λ4λ 2λ

CMP

CP1

Cgate

CP1

Source capacitance

CS,diff = Cd,A . A + Cd,side walls . P

A = 4λ * 3λ = 12 λ2

P = 2*(4λ + 3λ)=14 λ

So, CS, diff = 0.33* 12 λ2+2.6* 14 λ=63.51fF

Cs

S D

G

CG

CD

Page 24: Resistance Capacitance

Dr. Ahmed H. Madian-VLSI 24

(.Solution (cont100λ

3λ CM

4λ4λ 2λ

CMP

CP1

Cgate

CP1

Gate capacitance

CG,total = CM + CMP+CP1+CG+CP2

CM = 0.025 * 100λ*3 λ=7.5λ2

CMP = 0.045 * 4λ* 4 λ = 0.72λ2

CP1 = 0.045 * 2λ* 2λ = 0.18λ2

CP2 = 0.045 * 2λ* 2λ = 0.18λ2

CG = 0.7 * 2λ* 3λ = 4.2λ2

CM CMP CP1 Cgate CP1