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    Introduction

    MOS Transistor

    Cutoff Frequency Evolution

    0

    1020

    30

    40

    50

    60

    0 0.1 0.2 0.3 0.4 0.5

    L/um

    ft/GHz

    0

    50

    100150

    200

    250

    300

    350

    1960 1970 1980 1990 2000

    wafer diameter/mm

    year

    25mm

    300mm

    Silicon Substrate

    Evolution

    Silicon Devices:

    An Affordable Technology Gets Ready For RF

    Agilent Technologies

    With the trend to even smaller MOS transistor geometries, the silicon technology is heading strongly

    into the RF frequency application. This trend comes along with increasing wafer diameters. Compared

    to the rather expensive Gallium-Arsenide (GaAs) technology, silicon allows to manufacture high

    performance and high frequency chipset with affordable cost. Besides these technical and cost aspects,the possibility of MOS-RF circuits to be combined with digital circuits (memory circuits and, thus

    programmability of the whole chip set depending on its custom application), makes MOS technology

    especially interesting and effective.

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    Silicon Device Modeling compared to GaAs

    GaAs Silicon

    non-linear RF modeling

    distortion effects

    load pull

    small signal modeling

    RF noise

    non-linear DC

    CV space charge

    linear S-parameter

    1/f noise

    This means that aspects and challenges related to RF, and mainlyapplied in the GaAs world, commence to play a more and more

    important role also for silicon measurement and modeling !

    Comparing further the existing GaAs RF and microwave technology with the upcoming silicon RF, and

    relating it to modeling, many techniques developed in GaAs device modeling can be applied to silicon

    too. The main issue hereby is to keep in mind that usually GaAs substrates exhibit RF-wise a much

    higher impedance and are thus much more ideal than the more lossy silicon substrates.

    Typically, GaAs modeling can be considered to move from fixed operating point high frequency

    characterization (small signal modeling, RF noise modeling, as well as non-linear RF, distortion effectsetc.) towards RF modeling based on large signal DC characterization. Silicon modeling, on the other

    hand, usually starts from large signal DC characterization via capacitor modeling and goes until linear

    S-parameter modeling, including 1/f noise.

    However, related to the previously mentioned shooting for complete RF MOS chipsets, the non-linear

    RF modeling aspects become more and more important also for silicon. This comes along with the need

    to bring the modeling world and the RF designer world much closer together, by offering both groups

    access to the same tools: nonlinear RF simulators (harmonic balance) as well as nonlinear network

    analyzers (to characterize the possible distortions of components and circuits).

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    BASIC DEVICE MODELING MEASUREMENTS

    in outtransmit

    DC

    in out

    transmit

    DUT

    s11

    RF R A B

    85046AS-PARAMETER TESTSET

    TF & total fitNWA

    DUT

    cvCVDUT12.05pF

    Agilent Technologies

    The Device Modeling Process

    MEASUREMENTS

    DC

    C(v)AC (S-parameters)

    1/f Noise

    MEASUREMENTS

    DC

    C(v)AC (S-parameters)

    1/f Noise

    SELECTED

    SIMULATORSELECTED

    SIMULATOR

    MODEL PARAMETER EXTRACTION

    solving the model equations for the parametersMODEL PARAMETER EXTRACTION

    solving the model equations for the parameters

    DESIGN KIT

    DOCUMENTATIONDESIGN KIT

    DOCUMENTATIONPARAMETER OPTIMIZATION,

    TUNINGPARAMETER OPTIMIZATION,

    TUNING

    MODEL SELECTIONMODEL SELECTION

    PHYSICAL DEVICEPHYSICAL DEVICE

    determines

    Agilent Technologies

    To begin with, the previous slide depicts a standard modeling scheme for today's silicon components.

    For a given device, and related to the circuit designer's simulator of choice, a model is selected out of

    the available simulator models. In many cases, custom models are selected for house-internal modeling,

    while for external designer customers, industry-standard models like the BSIM3, EKV for MOS or the

    VBIC, HiCum models for bipolar transistors are applied. Passive components are most often modeled

    by sub-circuit models, i.e. a combination of ideal R, L, C, representing the non-ideal high-frequency

    behavior of the measured device.

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    RF Measurements

    In this chapter, we will concentrate on the interpretation and understanding of S-parameter plots

    S-Parameter Analogy

    incident reference

    R

    Areflected

    Btransmitted

    Agilent Technologies

    To help with better understanding S-parameters, they can be considered as a mean to characterize the

    input and throughput characteristics of a pair of spectacles. Like with an optician who can characterizethe lenses of your spectacles, S-parameters allow to characterize a circuit in a well-defined

    environment, the characteristic impedance Z0.

    Staying with the pair of spectacles examples for a moment, i.e. power-wise, the S-parameters are

    defined as:

    =

    2

    2

    2

    1

    2

    22

    2

    21

    2

    12

    2

    11

    2

    2

    2

    1

    a

    a*

    SS

    SS

    b

    b

    with

    | ai|

    2

    power wave travelling towards the twoport gate| b

    i|

    2

    power wave reflected back from the twoport gate

    and

    | S11|

    2

    power reflected from port1

    | S12|

    2

    power transmitted from port1 to port2

    | S21|

    2

    power transmitted from port2 to port1

    | S22|

    2

    power reflected from port2

    This means that S-parameters relate traveling waves (power) to a twoport's reflection and transmission

    behavior. Since the twoport is imbedded in a characteristic impedance of Z0, these 'waves' can also be

    interpreted in terms of normalized voltages or currents. This is explained below.

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    |S11|2

    |a1|2

    |b1|2

    Z0 Z0

    |a2|2

    |b2|2

    |S21|2

    |S12|2

    |S22|2

    0Zv*vi*vP ==

    Starting with normalized gives normalized amplitudes

    power to Z0 for voltage and current

    00

    Z*iZVP ==

    Power

    Domain|a1|

    2 Voltage

    Domaina1

    S-Parameters and Characteristic Impedance Z0

    Agilent Technologies

    Looking at the S-parameter coefficients individually, we have:

    0a

    v

    v

    a

    bS

    2

    1porttowards

    1portatreflected

    1

    111

    =

    ==

    0a

    v

    v

    a

    bS

    1

    2porttowards

    1portofout

    2

    112

    =

    ==

    0a

    v

    v

    a

    bS

    2

    1porttowards

    2portofout

    1

    221

    =

    ==

    0a

    v

    v

    a

    bS

    1

    2porttowards

    2portatreflected

    2

    222

    =

    ==

    (3)

    Let's now discuss some characteristic S-parameter values.

    | S11, S22 .

    -1 | all voltage amplitudes towards the twoport are inverted and reflected (0)

    0 | impedance matching, no reflections at all (50 ) +1 | voltage amplitudes are reflected (infinite )

    Note: The magnitudes of S11 and S22 are always 1

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    On the other hand, the magnitude of S21 (transfer characteristics) resp. S12 (reverse) can exceed the

    value of 1 in the case of amplification within a Z0 impedance system:

    | S21, S12 .

    < -1 | input signal is amplified in the Z0 environment, the phase is inverted (transistor)

    -1 | input signal is transmitted (unity gain), but the phase is inverted 0 | no signal transmission at all

    +1 | unity gain signal transmission

    > +1 | input signal is amplified in the Z0 environment

    To perform an accurate device modeling, it is very important to first understand S-parameter plots.

    This is the topic of the following slides.

    Considering S11 in equation (3) and introducing equations (1) and (2), we can relate the signal

    towards the twoport to its reflections at the twoport input like:

    )tcoefficien_reflection(

    towards

    refl

    1

    1

    02a11

    v

    v

    a

    bS ===

    =

    What makes Sxx

    -parameters especially interesting for modeling, is that S11 and S22 can be interpreted

    as complex input or output resistance of the twoport (including the termination at the opposite side of

    the twoport with Z0!!). That's why they are usually plotted in a Smith chart.

    The Smith chart is a transformation of the complex impedance plane R into the complex reflectioncoefficient (rho) following:

    0ZR

    0ZR

    +

    =

    with the system's reference impedance Z0 = 50 .

    This means that the right half of the complex impedance plane R is transformed into a circle in the

    -domain with radius '1'

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    Interpreting the Smith Chart for S11 and S22

    R

    j50

    50

    1

    4 3

    2

    -1 1

    -j

    j

    1 2

    3

    4

    R - Z0S11 = -----------

    R + Z0

    for e.g. Z0=50

    Agilent Technologies

    The slide above consolidates this context a little further: it shows a square with the corners (0/0),

    (50/0), (50/j50)and (0/j50)in the complex impedance plane and its equivalent in the Smith chart

    for Z0=50. Please watch the angel-preserving property of this transform (rectangles stay rectangles

    close to their origins). Also watch how the positive and negative imaginary axis of the R plane is

    transformed into the Smith chart domain ( ), and where (50/j50) is located in the Smith chart.

    Also verify that the center of the Smith chart represents Z0.

    I.e. for Z0 = 50 in the impedance plane, this locus is transformed right into the center of the Smith

    chart at (50/j0) .

    WEB INFO:

    Agilent Technologies Interactive Application Note 95-1,

    S-Parameter Techniques for Faster, More Accurate Network Designs.

    The next slide gives Smith chart plots for different electrical components connected to a single port of a

    vector network analyzer (VNA). For an ohmic resistor, all measurement results are located on the x-

    axis, RZ0 to the right. From the scaling of the Smith chart, we cancalculate the value of the resistor as x*Z0.

    For inductors and capacitors, however, the measurement result is frequency dependent and follows the

    sketched traces. Note that the curves turn to the right with increasing frequency.

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    jL

    1/jC

    R

    inductive

    capacitive

    Z0

    Interpreting the Reflection S-Parameters

    S11 and S22

    Z

    Note: for TwoPorts,

    Sxx represents the

    input impedance

    at Sxx includingZ0

    of the opposite port!

    Example: 1-port

    Agilent Technologies

    Referring to the transfer parameters Sxy, we consider the next slide. For a capacitor inserted between

    both ports of a VNA, the Sxy trace starts at '0' for DC (the capacitor is an ideal OPEN), while it tends

    towards +1 for infinite frequency (the capacitor is an ideal SHORT, all power is transmitted).

    For transistors, with signal amplification in the Z0 environment, but (of course) phase inversion, thetrace starts at the negative x-axis, below -1. For infinite frequency, the transistor becomes a passive

    component with no gain any more. I.e. its capacitors short the energy flow to ground, and S21 tends to

    '0'.

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    freq

    Curve from 0 to +1 Curve from -1.9 to +0.2

    freq freq

    P2P1Passive DUT

    P2

    P1

    Active DUT

    Interpreting the Polar Plots of S12 and S21

    With this in mind, let's lead over to specific S-parameter device measurement and modeling aspects. A

    good model is able to cover both, the reflection (Sxx) and the transmit (Sxy) S-parameters, see the next

    slide.

    As a first and basic aspect, it must be noted that the starting point of all S-parameter traces is

    determined by the DC behavior of the component, and therefore completely dependent on the DC

    model fit! Only the course, the further trace of the S-parameters can be influenced by the RF modelparameters like the capacitors, the transit times (of transistors) etc. This is very important to consider.

    S-Parameter Device Modeling in General

    Sxx Sxy

    freq

    freq

    Agilent Technologies

    The following series of slides give examples for possible S-parameter measurement and modeling

    problems.

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    Considering transistor S-parameter modeling, the device has to be biased during the S-parameter

    measurements, see the following block diagram:

    DUT

    External

    Bias TEEs

    FS S F

    DC

    Source/

    Monitor

    Synthesized

    Sweeper

    RF

    DC

    S-parameter

    Test Set

    Vector

    Network

    Analyzer

    IC-CAP

    If there is a problem with the fitting of the simulated S-parameters and the measurement curves for

    lowest frequencies, especially for specific bias conditions, it must be considered if there is e.g. a DC

    bias voltage drop in the AC/DC bias TEE. If this occurs, the measured voltage drop is notincluded in a

    stand-alone simulation of the DUT. The simulation circuit must be enhanced with this resistor Rbias !

    The following slide shows this effect with a comparison of measured and simulated curves, with and

    without the additional resistor Rbias in the enhanced simulation test circuit. Note that in this example,

    the transit time has not yet been modeled, and therefore, the fit for higher frequencies is not yet

    obtained.

    DC Bias Voltage Drop in the VNA Bias TEEs

    DC

    AC

    transistor

    LbiasCbias

    Rbias

    Measurement

    DC bias

    voltage drop

    w/o Rbias with RbiasAgilent Technologies

    Another important aspect is the fact that using a conventionally network analyzer, the stimulus

    frequency and the measurement frequency are identical. Furthermore, the bandwidth of the received

    signal is typically extremely small-band (for higher resolution), around a few Hertz. Therefore, care

    must be taken to ensure that only small signal power be applied for the measurement. If the applied

    signal power is too high, signal distortion can occur. The next slides cover the problems which may

    arise.

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    AC Power Level during S-Parameter Measurements

    Due to the nonlinear

    transistor curves,

    a too big AC amplitude

    may become distorted.

    Unsymmetrical distortions

    include a DC part. This DC

    part will shift the DC

    operating point !

    iC

    vBEAgilent Technologies

    Therefore, it is very important to check the signal integrity when performing VNA measurements on

    non-linear components like transistors.

    This can be done as follows: the VNA is calibrated for a very low signal power, e.g. 30..-40 dBm. An

    S-parameter measurement is performed and the result is considered as being linear. After that, the RF

    signal power is increased, a new calibration is performed and the new measurement checked against the

    previous one. When a deviation of the curves occurs, the applied signal power is too high. This allows

    to identify the max. applicable RF signal power for a specific transistor.

    Another method, applicable to MOS and also bipolar transistors, is to measure the DC output

    characteristic and to convert it into an Rout plot, see the next slide. The measurement is performed

    using the AC/DC bias TEE coupler. With the first measurement, the VNA is switched off, and the

    measurement result is regarded as non-distorted Rout curves. After that, the DC traces are re-measured,

    and the signal power of the VNA is increased manually, until a distortion on Rout becomes visible.

    This is, again, the max. applicable RF power level.

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    AC Power Level during S-Parameter Measurements

    RF power ok.

    too much RF power

    Rout /k

    Agilent Technologies

    In the next slide, a method to check the correct RF signal power is introduced for bipolar transistors. A

    flat trace of fT vs. iC for low iC might indicate the RF rectification effect, and thus again a too big

    value of the RF signal power.

    AC Power Level during S-Parameter Measurements

    log (fT)

    log (iC)

    vCEfT = ---------------2*PI*TFF

    1

    Agilent Technologies

    Finally, it must be mentioned that network analyzers offer best resolution for devices with impedances

    'around' Z0. Like depicted with the following slide, it is difficult to resolve the impedance for values

    greater than ~1kwith a Smith chart. However, since there are always inductors or capacitors

    associated with such impedances, their frequency dependence helps in modeling considerably. This is

    because these parasitic components will short the high impedances for higher frequencies. The S-

    parameter traces of both, the high impedance starting and the parasitics, will come closer to the center

    of the Smith chart. Since modeling means curve fitting, these starting points are covered automatically.

    As an example, see the RG modeling of MOS transistors further below.

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    Transistors and Network Analyzers:

    Obtainable Resolution Big Impedances

    Resolution

    is criticalfor resistances

    >1k

    Agilent Technologies

    Last not least, the next two slides give suggestions for the pad layout for measuring S-parameters.

    Probe Types and Transistor Pad Layout for DC to RF

    DC probes

    S

    G D

    B

    S

    B

    Ground-Signal-Ground

    Probes

    S

    G D

    BB

    S

    Source and Bulk are

    shorted by the probes!

    pitch

    All 4 terminals can be

    biased independently

    DC S-parameter

    Agilent Technologies

    Biasing the Bulk separately,

    using G-S probes

    B

    G D

    SS

    S

    Port1 Port2

    to Bulk DC power supply

    Agilent Technologies

    Publications:

    Cascade Microtech Application Note: Layout Rules for GHz Probing, 1992,Publication LAYOUT19

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    Special Aspects of VNA Calibration

    Generalized Block Diagram

    of a Vector Network Analyzer (VNA)

    INCIDENT (R)

    REFLECTED

    (A) TRANSMITTED(B)

    RECEIVER / DOWNCONVERTER

    PROCESSOR / DISPLAY

    SOURCE

    Incident

    Reflected

    Transmitted

    DUT

    small band IF (!)

    Agilent Technologies

    Publications:

    Agilent Technologies Application Notes

    1287-1: Understanding the Fundamental Principles of Vector Network Analyzers,

    Pub.No. 5965-7710E, 1997

    1287-2: Exploring the Architectures of Network Analyzers,

    Pub.No 5965-7708E, 1997

    1287-4: Network Analyzer Measurements: Filter and Amplifier Examples,

    Pub.No5965-7710E, 1997

    Hewlett-Packard 1997 Back to Basics Seminar, D.Ballo, Network Analyzer Basics,

    Pub.No. 5965-7917E

    Cascade Microtech Application Note: On Wafer Vector Network Analyzer Calibration and

    Measurements, 1997, Pub No. PYRPROBE-0597---------------------------------------------------------------------------------------------------------

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    As can be seen in the next slide, there are 6 error terms in forward direction:

    Directivity: cross-talk of the power coupler

    Crosstalk: cross-talk inside the S-parameter test set, overlying the DUT

    Source Mismatch: multiple reflections due to non-Z0 input and output

    impedance of the DUT

    Load Mismatch: the same for the opposite portReflection Tracking A/R: frequency dependence of signal path source ->R->A

    Transmission Tracking A/R: same for signal path source ->R->B

    For the reverse calibration, another 6 error terms add up to a total of 12 terms.

    directivity~

    AC

    source

    power

    splitter

    DUT

    R

    power

    coupler

    BAreference

    crosstalk

    source

    missmatch

    load

    mismatch

    frequency response:

    reflection tracking (A/R)

    transmission tracking (B/R)

    H(f)

    f

    .

    Basic Components of a VNA

    and Corresponding Error Terms

    6 error terms to be corrected for each port,i.e. 12 error terms for both portsAgilent Technologies

    It should be noted that VNA calibration means error correction for vectors, because the measured

    signals represent magnitude and phase of voltages in a Z0 environment.

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    S-Parameter Error Correction

    means Vector Error Correction

    accounts for all major sources of systematic error

    Sxy Measured

    error vectors

    Sxy Device

    SxyC

    orrection

    Agilent Technologies

    The next slides shows the standards for a SHORT-OPEN-LOAD-THRU VNA calibration.

    SOLT Calibration Standardsfor Ground-Signal-Ground probes (G_S_G)

    OPEN

    SHORT

    50 LOAD

    THRU

    Probes in the air

    calibration

    All standard calkit data must be accurately entered into the VNA.

    Agilent Technologies

    Some notes about these calibration standards:

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    While in the case of the LCRZ meter for the characterization of the space charge capacitors, the

    calibration corrects for a single ideal offset capacitor, a NWA calibration uses cal standards(OPEN,

    SHORT, LOAD, THRU etc.) from a cal kit. These cal standards do notrepresent ideal standards. It

    means that a SHORT is not an ideal SHORT, but instead represents rather an inductance. The same

    applies to the THRU, which has a non-ideal delay time. The OPEN corresponds rather to a capacitor

    than to an ideal OPEN. Therefore, these non-idealities have to be entered into the NWA beforecalibration. This is called 'modifying the cal kit'. After that, the calibrationis performed and the

    correction terms (which include the 12 error contributions from above and also those of the cal kit

    components) are stored in the cal setof the NWA. Afterwards, when the measurementis performed,

    the raw measured dataarrays will be corrected using a correction technique related to the selected

    calibration method, and referring to the specific cal set. Finally, this corrected measurement result is

    displayed on the NWA monitor.

    Therefore, after the calibration, a re-measurement of the OPEN will not represent an ideal open, but

    instead exactly those parasitic components as described in the documentation of the OPEN. In the same

    way, a THROUGH shows up after calibration with its real delay time, and a SHORT represents its

    inductive behavior!

    Verifying NWA Calibration

    Since the NWA calibration has to be performed always very carefully, it is of particular interest to

    verify the quality of the applied calibration. This can be done easily, when using a modeling tool like

    IC-CAP. After a re-measurement of a calibration standard, we define a test circuit representing exactly

    the non-idealities of the standard. Calling a simulator, we can simulate the expected behavior of e.g. the

    OPEN probes. If the calibration was executed correctly, there is an excellent match between measured

    and simulated curves. This check is performed with all four SOLT calibration standards.

    Note: This procedure can also be applied to check the quality of an elder calibration.

    Verifying the Calibration

    THRU

    E.g.

    1psec

    OPEN SHORT LOAD

    E.g. -

    9fF

    E.g. 50W

    E.g.2.4pH

    re-measuring each standard after calibration

    should be identical to the simulation results

    of the standard, based on the calkit data

    The very best cal verification is, however,

    to measure an accurately known golden device

    Agilent Technologies

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    De-embedding and Required Test Structures

    When characterizing a device separately, test pads have to be added in order to be able to measure it.

    This means that parasitic components due to the test structure degrade the performance of the 'inner'DUT. If it is possible to measure those parasitics separately, without the 'inner' DUT, they can be

    'subtracted' from the total measurement.

    Why De-embedding ?

    /Hz

    /VAgilent Technologies

    In the case of a MOS transistor, we have the following situation:

    Measurement and De-embedding

    Source + Bulk

    Source + Bulk

    Reference

    plane of

    VNA port2

    /Hz

    Ground

    Ground

    Signal

    Ground

    Ground

    Signal

    Ground

    Ground

    Signal

    Ground

    Ground

    SignalGate Drain

    Reference

    plane of

    VNA port1

    Reference

    planes of

    DUTAgilent Technologies

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    And in the simplest case, where only capacitances of the test pads are just in parallel with the DUT, we

    have the following situation:

    In the simplest case ...

    YDUT = YTotal YOPEN-

    Agilent Technologies

    This means, a simple subtraction of the Y matrices gives the performance of the inner DUT.

    For higher frequencies, typically above 10GHz for Silicon, more test pad parasitics begin to play a role.

    This means that not only the parallel parasitics need to be subtracted (Y matrix), but also those in series

    with the inner DUT (Z matrix subtraction). In this case we not only need an OPEN dummy test

    structure, but also a SHORT, where the DUT is replaced by a metal 1 short.

    Note that before subtracting the Z matrix of the SHORT, the SHORT dummy has to be de-embedded

    firstfrom the OPEN dummy!

    The De-embedding Procedure

    For OPEN And SHORT De-embedding

    DUT

    subtract the Y matrix

    of the parallel parasitics

    subtract the Z matrix

    of the series parasitics

    DUT

    DUT

    The SHORT has to be

    de-embedded from the OPEN first!

    Agilent Technologies

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    For this commonly used method, it is an absolute prerequisitethat there are no series components

    hidden in the OPEN dummy measurement, and no parallel componentsin the SHORT dummy

    measurement. If such hidden components are present, the simple matrix subtractions will lead to a

    wrong de-embedding.

    Like with the calibration before, it is very important to verify the de-embedding quality, beforeapplying it finally to the inner DUT. This can be done easily if there is also a THRU dummy structure

    available.

    Provided the THRU has been de-embedded correctly, it can be modeled with a simple delay. If this is

    the case and the delay time and characteristic impedance represent physical parameter values, it can be

    assumed that the de-embedding is correct.

    measured

    deembedded

    TD(trace)

    De-embedding Verification

    with a THRU Dummy

    Z0(trace)

    deembedded

    measured

    Sxx

    Sxy

    Z0, TD

    equiv.schematic:

    (de-embedded from

    the OPEN and the SHORT)

    Agilent Technologies

    Last not least, for this chapter on de-embedding, how does a bad de-embedding look like?

    Basically, de-embedding shows up like a 'turning-back' of the non-de-embedded curves.

    As can be seen on the next slide, over-de-embedding appears as non-physical curves for higher

    frequencies, i.e.:curves no longer turn clock-wise

    Sxx traces tend out of the Smith chart

    the inner device cannot be modeled with physical model parameters

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    After a good and verified calibration, as well as an correct de-embedding, let's now look into

    RF Modeling Examples

    We will look at three RF modeling examples:

    S-parameter modeling for a MOS transistor based on the BSIM3v3 model

    small-signal S-parameter modeling for transistors

    modeling of passive components, example: spiral inductor

    Port1

    S-parameter Modeling

    Example: MOS TransistorPort2

    Example: BSIM3v3

    Cgs_ext

    Cgd_ext

    Djdb_areaDjdb_perim

    Djdb_area

    Djdb_perim

    Rsub1 .. Rsub3

    Agilent Technologies

    In this case, because the UCB BSIM3v3 model currently does not include a Gate resistor, and further

    needs some enhancements regarding the space charge modeling and the bulk resistor characteristics,

    the Berkeley BSIM3v3 model is imbedded into a sub-circuit covering the missing modeling features. In

    the case of the space charge capacitors, the BSIM3v3 capacitors are switched off (capacity value set

    to '0'), and replaced by extra diodes which allow better access to the RF diode parameters.

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    BSIM3v3 S-Parameter Modeling Result

    S11 S22

    Agilent Technologies

    As mentioned at the very beginning of this tutorial, the silicon modeling can also apply methods used

    much for the GaAs modeling. In the case of an RF power transistor with a fixed operating point, it

    might be an overkill to model that transistor for all DC bias conditions. A fixed operating point model

    might be sufficient, possibly extended to features more relevant for that application like RF power

    dependence etc.

    The next slide gives an idea on what to do.

    TAU)

    Operating Point RF Modeling for Transistors

    Ygd = -Y12

    Ygs = Y11 + Y12

    Yds = Y22 + Y12

    Ygm = Y21 - Y12 = gm * exp(-j

    Ygs

    Ygd

    YdsYgm

    Solved for the admittances:

    +

    +=

    YgdYdsYgdYgm

    YgdYgdYgs

    22Y21Y

    12Y11Y

    Agilent Technologies

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    For this application, a new method has been developed in order to determine the schematic of the

    components Ygs, Ygd and Yds. As can be seen on the next slide, the inverse of each of those

    admittances are calculated. The now available complex impedance is plotted as a locus on the real-

    imaginary impedance plane. From that domain, the accurate inner schematic of each of the Ygs, Ygd

    and Yds components can be developed easily. In other words, this method delivers both, the structure

    of the sub-circuits and the parameter values.

    Modeling the Impedances

    12Y11Y

    1gsZ

    +=

    Rgs

    Cgs

    freq

    complex impedance plane

    Operating Point RF Modeling for Transistors (contd)

    Agilent Technologies

    The same method of developing both, the schematic and the schematic component parameter values,

    can also be applied to passive components. Since these components are often very much depending on

    technology, the presented method offers an accurate way for modeling. Even overlays of TEE and PI

    structures can be taken into account for an accurate modeling of e.g. spiral inductors, varactor diodes

    etc.

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    Spiral Inductor Modeling

    L = 1. 5n

    R L = 1 0. 9

    R = 1.6k

    C = 25f

    L = 1.3n

    R L = 7.2

    R = 600

    C = 35f

    C = 255f

    RC = 600

    C = 15f

    Qmeasured

    simulated

    Agilent Technologies

    Finally, like with the calibration and the de-embedding before, and now also for the device itself, a

    verification of the modeling result is a must. In the case of transistors, RF characteristics can be used to

    do this. Here, we can calculate for both, the measured and simulated S-parameters, the stability factor

    K which refers to all four S-parameters and then calculate the maximum available gain MAG. If,

    besides a good fit for the Sxx and Sxy parameters, there is also a good fit between measured and

    simulated data for MAG, the model quality is good.

    = 1KK*

    S

    SMAG 2

    12

    21

    Verifying the Modeling Quality

    Since these

    formulas includeall S-parameters,

    they can be used

    to check the fitting

    Max Available Gain

    {MAG(S21)}2

    Agilent Technologies

    with the stability factor K

    including all 4 S-parameters

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    Non-linear Harmonic Balance Modeling

    For a proper design and a good production yield, RF modeling engineers should start thinking in terms

    of how the RF designers will use their model parameters in the final circuit design. Therefore, besidesthe classical SPICE-like S-parameter modeling, also large signal RF modeling (harmonic balance)

    including checking the non-linear signal behavior in the time domain comes into play.

    Beyond S-Parameters ...

    s11

    RF R A B

    85046AS-PARAMETERTESTSET

    DUT

    cvCVDUT12.05pF

    in out

    transmit in outtransmit

    DCDUT

    DC input, transfer, output

    CV curves, w/o TF, Ls etc

    S-par, linear (no harmonics),

    op.pt. dependent, imbedded in Z0

    Nonlinear frequency analysis, harmonics, etc...

    Time domain

    Agilent Technologies

    For this type of modeling, simulators such as ADS including harmonic balance features are required to

    characterize the non-linear RF performance of devices and circuits, depending on operating point and

    RF signal level.

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    What is Harmonic Balance (HB) Simulation ?

    IIRRIICC IILL IIDD

    Error is notError is not

    zero !!!zero !!!

    Iterate again.Iterate again.

    Test (Kirchoffs law):Test (Kirchoffs law):

    IIDDIIRR IICC IILLIn i t i a l Esti mate:In i t i a l Esti mate:spectr alspectr al vo l tage vo l tage

    Start in theStart in the

    Frequency DomainFrequency Domain Convert: ts -> fsConvert: ts -> fsCalculate currentsCalculate currents

    With inWi th in

    tolerancetolerance

    Last Estim ateLast Estim ate

    wi th least err orwi th least err or

    IIRR IICC IILL IIDD

    spectrum of harmonics available for all nodes/branches in the circuit

    Agilent Technologies

    Harmonic balance (HB) is a frequency-domain simulation technique. Signals are treated as

    summations of finite numbers of sine waves, i.e. as periodic signals. This approach is valid for most

    signals that might be analyzed using a network analyzer or a spectrum analyzer. It is well suited to

    stimulus-response and swept-parameter simulations. Harmonic balance simulations use one or two

    sine-wave stimuli to determine (for example) conversion loss vs. drive level, distortion vs. frequency,and gain compression. Harmonic balance is also well suited to analyzing high-Q, reverberant, and

    frequency conversion circuits.

    Harmonic Balance and Time-Domain Simulation

    Harmonic balance calculates voltages and currents in much the same way as time-domain simulators

    such as SPICE do. But harmonic balance must solve for the magnitudes and phases of all spectral lines

    simultaneously. In effect, the entire waveform is being solved for at once. Harmonic balance is

    extremely efficient if the signals are simple in the frequency domain-as they are, for example, when an

    amplifier is driven by a sine wave.

    Circuits that have non-repeating transient behavior are best analyzed using a time-domain (transient)

    simulator which, in contrary to SPICE, also includes accurate RF models. In general, harmonic balance

    is not very useful for analyzing signals that might be analyzed using an arbitrary waveform generator or

    a wide- bandwidth oscilloscope. Therefore, it is best to use a tool which offers a wide range of RF

    simulation techniques in a single user environment.

    What happens when an harmonic balance simulation is executed?

    When a harmonic balance simulation is run, the following steps occur, in this order:

    1. The DC operating point of the circuit is calculated.

    2. A linear AC analysis is used to analyze linear and passive components in the frequency domain.

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    3. Nonlinear devices (only) are analyzed in the time domain. The Fourier transform is then used to

    include these results in the analysis.

    4. The estimated voltage spectrum is refined until Kirchhoff's current and voltage laws (KCL and

    KVL) are both satisfied for the circuit. Iterative, matrix-driven techniques are used.

    5. The solution is a voltage spectrum which is the same at all nodes in the circuit. The mathematical

    analysis has converged. The harmonics are now balanced.

    In general, all S-parameters vary as a function of input power. For transistors, usually up to 30dBm,

    they can nevertheless be considered as linear, without harmonics. However, keep in mind that when the

    RF signal power increases, also harmonic frequencies show up. In this case, we can no longer talk of

    (linear) S-parameters.

    freq freq

    DC bias DC bias

    signalpower

    Publications:

    HP-EEsof symposium Advanced Techniques for Communication Signal Path Design, 1997, available

    from Agilent-EEsof.

    With respect to todays digital modulation schemes in communications systems, the operating

    conditions of transistors cannot be considered as linear any more. We have to consider the magnitude

    and phase of the DC bias, the base frequency and the harmonics.

    For simulations, harmonic balance type simulators come into play, as said above. Regarding

    measurements, non-linear network analyzers must be consider, which allow to measure the magnitude

    and phase of the base frequencyplusall harmonics.

    Let's now look at two examples of what can be modeled when using such measurement systems and RFsimulators.

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    Example: HB Modeling of a Transistor

    Pin -20dBm -10dBm

    Pin -10dBm

    Pin -20dBm

    Agilent Technologies

    In the example above, the input RF signal is swept for fixed DC operating points, and the harmonics

    are analyzed as a function of the input RF power. This gives the compression plot vs. RF input power

    for the base frequency and the harmonics (level-wise below) as given to the left. From these signal

    levels, corresponding sine functions can be derived (magnitude and phase) and the real-world, time-

    domain signal can be calculated (plots to the right). This finally allows the modeling engineer to check

    the performance of its models with respect to its application in the real-world design, and not only for

    the case where the component is inserted in a fixed Z0 impedance environment, and linear operating

    conditions.

    Since in real-world, for maximum power transmission, impedance matching has to be applied to the

    device input and output, another harmonic balance simulation result is given below for the dynamic

    loadline. In case of impedance matching, and no longer Z0=50matching like for the linear S-

    parameter measurements in the previous chapter, current and voltage at each port can be out of phase,

    and the static (DC) loadline of a transistor can change.

    This is given in the slide below: For low frequencies, the output current can follow the output voltageswing, and we measure the well-known DC loadline. For high frequencies, in the GHz range, this is no

    longer the case. Besides the mentioned impedance matching, also the non-quasistatic transistor

    behavior shows up, delaying the amplified signal further, and the previous straight DC loadline

    degrades to an ellipse or a similar distortion. Check also the dot, indicating the operating point bias for

    the AC analysis.

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    Example: HB Dynamic Loadline Modeling

    DC output characteristic

    static loadline

    dynamic loadline

    operating point AC

    Agilent Technologies

    Note:

    for non-linear S-parameter measurements, a specific non-linear vector network analyzer system

    (NNWA) has to be applied.

    Publications on NNWAs:

    Marc Vanden Bossche, Agilent Technologies NMDG, 'Accurate and Traceable High Frequency Large

    Signal Measurements of TwoPorts', European Microwave Conference, Oct. 4-8, 1999, Munich

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    Summary

    Agilent Technologies

    >> For successfull RF MOS designs with high yield,accurate device models for all circuit components

    are a must.

    >> Basic understanding of S-parameters is essential

    for modeling

    >> Verification of all RF modeling steps is a must

    >> Modeling engineers need to understand the

    application conditions for their components