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Control Engineering Laboratory

Microrobotics, Microtelemanipulation and Microassembly

Introduction to Microsystems TechnologyLecture N-1

Quan Zhou

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Table of Contents, Slide 2

Outline

Microrobotics Microtelemanipulation Microassembly

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Table of Contents, Slide 3

Definitions

Robot Word robot was coined by the Czech playwright Karel Capek in his play

Rossum's Universal Robots in 1920s, robota = forced labor, worker A reprogrammable, multifunctional manipulator designed to move

material, parts, tools, or specialized devices through various programmed motions for the performance of a variety of tasks, Robot Institute of America, 1979

Industrial robots vs. service robots

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Table of Contents, Slide 4

Definitions ...

Microrobot reprogrammable behavior (as in industrial robots) or adaptivity to unpredicted circumstances (as in advanced robots for

unstructured environments, service robots) or remote controllability (as in teleoperated robots)

Basically the only difference between a macro and microrobot is the scale of the application domain

Microbots extend human capabilities to the microscale

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Classification

With regard to size/capabilities miniature robots microrobots nanorobots

Functional classification fixed / mobile energy source on-board / not on-board wires / wireless

Task-specific classification

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Table of Contents, Slide 6

Classification with regard to size Miniature robots

size: few cubic centimeters workspace and forces

comparable to those of fine human manipulations

fabrication by assembling conventional miniature components and micromachines

majority of todays microrobots belong to this class

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Table of Contents, Slide 7

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Table of Contents, Slide 8

Classification with regard to size ...

Microrobots size: few hundred cubic micrometers fabricated by means of micromachining technologies (such as bulk or

surface micromachining or LIGA technology) consists of microactuators, sensors and signal processing circuits scaling effect should be taken into account when designing actuators, for

example applications: cell manipulation, assembly

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Table of Contents, Slide 9

Classification with regard to size ... Nanorobots

size: few hundred nanometers to a couple of micrometers, i.e. same as the scale of biological cells

conventional mechanical principles (for driving and manipulation) are not applicable here but electrochemical means could be used (mimicking biological organisms)

solid-state technology is not currently suitable for nano-scale fabrication but polymer chemistry techniques can provide a solution

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Table of Contents, Slide 10

Functional classification

CU - control unit

PS - power supply

AP - actuators for positioning

AO - actuators for operation

Classification criteria mobility autonomy control

(wires)

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Table of Contents, Slide 11

Task-specific classification Ratio C between the physical

dimensions of the microrobot and its workspace C >> 1: stationary

micromanipulation systems C

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Actuation principles for microrobots

Actuation principles Active materials

Piezoelectric actuators Shape memory alloy

Electrostatic forces Electromagnetic actuators Other principles

Drive principles: Direct actuation Impact principle

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Piezoelectric micropositioning device Yamagata et. al., Japan Steps in nanometer range Commercially available Speed 5 mm/s Positioning accuracy 0.1 m Transfer force 13 N

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Abalone a micro-crawling machine Codourey et. al., Switzerland Two legs: inner and outer leg Electromagnets fix the legs Operation sequence

fix outer leg move inner leg using piezos fix inner leg and free outer leg move outer leg using piezos

Motion resolution: 10 nm Maximum step: 5 m Dimensions: 60 x 60 mm2

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Table of Contents, Slide 16

Swimming microrobot Fukuda et. al., Japan Applications: to inspect industrial

pipelines or blood vessels A 8 m motion of piezoelectric stack

actuators is magnified 250 times to the motion of 2 mm

Swim motion by 32 mm long fins Dimensions: 34 mm x 19 mm One rot and and trans DOF Speed 30 mm/s

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Table of Contents, Slide 17

Levitation microrobots

To avoid the problems of friction, different levitation systems have been proposed electromagnetic actuation electrostatic actuation ultraviolet light

A platform typically levitates on an air cushion generated by small nozzles

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Table of Contents, Slide 18

Tools

Microknives Microneedles Microdosing tools Microlasers Microgrippers

grippers with moving parts (piezoelectric, shame memory alloy, electrostatic )

grippers without moving parts (vacuum, frozen gripper ) non-contact transportation (laser trap, ultrasonic systems )

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Table of Contents, Slide 19

Information transmission

With the present technology information transmission from the microworld is difficult

Visual information is only information that is currently available Optical stereo microscopes

do not require vacuum long working distance provides space for the micromanipulator low resolution small depth of field

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Table of Contents, Slide 20

Information transmission ...

Scanning electron microscope better resolution larger depth of view workspace can be seen from different angles manipulators must be operable in vacuum and withstand electron radiation large-chamber SEMs presently available (2 m3)

Force and acoustic information currently not available solutions are being sought

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Table of Contents, Slide 21

Some Other examples of Mobile Microrobots

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Microrobot ExamplesNanowalker from MIT

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Microrobot ExamplesDesno Inpipe wireless mobile microrobot

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Table of Contents, Slide 24

Examples of MicrorobotUnderwater Microrobot (Fukuda)

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Table of Contents, Slide 25

Microrobots ExamplesFlying micro insects (UC Berkerly)

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Table of Contents, Slide 26

Microtelemanipulation

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Table of Contents, Slide 27

Telemanipulation

What is telemanipulation? a way for a human being to extend his operation capability to a remote

location telemanipulator

a machine which extends a persons sensing and/or manipulating capability to a remote location.

typically includes artificial sensors, a vehicle for moving, communication channels artificial arms and hands to apply forces and perform mechanical work

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Table of Contents, Slide 28

Application Areas Why telemanipulation?

To overcome the barrier to the world where direct human involvement is difficult or impossible

The traditional application areas of telemanipulation nuclear plants subsurface space

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Table of Contents, Slide 29

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Table of Contents, Slide 30

Microtelemanipulation Why microtelemanipulation?

To overcome the barrier of dimension and to reach the microworld

Why tele? computer assistance

accuracy and performance human involvement

robustness and intelligence

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Table of Contents, Slide 31

Micromanipulator? A micromanipulator is a device that

is capable of manipulating micro objects. micro object

an object having dimensions < 1mm

size of micromanipulator not necessary micro-sized

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Table of Contents, Slide 32

Concept of Microtelemanipulation

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Classification of Micromanipulation

Interaction type contact non-contact

Physical basis electrical mechanical magnetic optical

Environment dry wet

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Application Areas The application areas of

micromanipulation biotechnological operations microsurgery assembly of micro systems testing of micro chips and

components

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Applications in Biotechnology The applications in biotechnological

operations injections and aspirations

cell toxicology gene technology

measurement of electrical quantities inside a cell

e.g. patch clamp technique separation of particles

e.g. spores

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Applications in Microsurgery The applications in microsurgery

diagnostic surgery neurosurgery (brain surgery) micro vascular anastomosis

blood vessels nerves

ophthalmology (eye surgery) intracavity interventions (using

endoscopes and microcatheters)

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Applications in Microassembly The application areas in

microassembly optoelectronic devices wrist watches micro motors and gears micro robots ...

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Applications in Microchips The applications in microchips testing

electrical probing mechanical testing

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Table of Contents, Slide 39

Problems in Micromanipulation

The problems in microtelemanipulation scaling effect measurement difficulties external disturbances actuator non-linearity

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Scaling Laws Time: I0 van der Waals: I1/4 Diffusion: I1/2 Distance: I1 Velocity: I1 Surface tension: I1 Electrostatic force: I2 Muscle force: I2 Friction: I2 Thermal Losses: I2

Piezo-electricity: I2 Shape memory alloy: I2 Mass: I3 Gravity: I3 Magnetic: I3 Torque: I3 Power: I3

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Table of Contents, Slide 41

Scaling of Some ForcesM

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Other Effects

Other effects became significant in the micro world surface adhesions contact electrification micro/nano friction break down of continuum assumption

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Table of Contents, Slide 43

Summary of Scaling Effect

What is scaling effect? The change of dominant physical quantities between different scales is

called scaling effect gravitational, inertial forces become less effective van der Waals forces, electrostatic forces, surface tension forces become more

important other effects

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Table of Contents, Slide 44

Actuator Nonlinearity Properties

Hysteresis, drift and gain-nonlinearity

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Table of Contents, Slide 45

Classical Preisach Hysteresis Model for Piezo Actuator

Preisach model:

x(t): output m(a,b): weighting function a, b: up and down switching point gab[u(t)]: binary hysteresis

operator

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Table of Contents, Slide 46

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Table of Contents, Slide 47

The Micromanipulator

3 DOF tripod-like parallel manipulator

Joint-free structure Piezohydraulic actuation Workspace: 1.2 x 0.6 x

0.3 mm Resolution:

submicrometers

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Table of Contents, Slide 48

Actuation System

Tank diameter: 40 mm, Bellow length: 18.8 mm

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Table of Contents, Slide 49

Measurement Strain gages: deformation of the

piezoelectric actuators Hall sensors: movement of the

mobile platform Machine vision: movement of the

tool tip

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Table of Contents, Slide 50

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Table of Contents, Slide 51

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Table of Contents, Slide 52

Microassembly

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Microassembly Common definition:

Assembly of micro part with dimension less than 1 mm

Our definition: Assembly of miniaturized parts

where micro domain phenomena affect the performance and precision

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Two Types Serial microassembly

Parts are put together one-by-one Parallel microassembly

multiple parts are assembled simultaneously

deterministic microassembly stochastic microassembly

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Table of Contents, Slide 55

Serial Microassembly Serial microassembly

Traditional pick and place procedure

Capable of handling complicated hybrid micro devices

Techniques required Microscope Visual servoing High precision positioning Parts handling tools

Tweezers grippers

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Table of Contents, Slide 56

Parallel Microassembly I Deterministic parallel microassembly

Flip-chip wafer to wafer transfer Micro gripper array

Mechanical Thermal

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Table of Contents, Slide 57

Parallel Microassembly II Stochastic parallel microassembly

Destination unknown Self-assembly Techniques

Fluidic agitation and mating shape Vibratory agitation and electrostatic

forces Vibratory agitation and mating shape Mating patterns of self-assembly

monolayer

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Table of Contents, Slide 58

Applications Where microassembly is needed?

MEMS devices become increasingly complicated

The traditional assembly technology become less effective because of the scaling down

Application areas optoelectronic devices wrist watches micro motors and gears micro robots ...

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Table of Contents, Slide 59

Micro Assembly Examples I

University of Karlsruhe, Institute for Real-time Computer System & Robotics

Micro mobile robot solution

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Table of Contents, Slide 60

Micro Assembly Examples II

Sandia National LaboratoriesMicromanipulation lab

Assembly of MEMS components of size 10 to 100 microns

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Table of Contents, Slide 61

Micro Assembly Examples III

University KaiserslauternInstitute for production automation

3 stage assembly line, assembly precision betterthan 1 micron

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Table of Contents, Slide 62

Micro Assembly Examples IV

Technishe Universitat MunchenLaboratory for Process Control and Real-time Systems

Coarse-fine positioning system and vacuum micro gripper

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Table of Contents, Slide 63

Micro Assembly Examples V

Institute of Microengineering Production (IPM)Ecole Polytechnique Federale de Lausanne (EPFL)

Assembly of wrist watch and optical sensor, precision 0.5 micron

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Table of Contents, Slide 64

Micro Assembly Examples VI

Micro assembly station at Micro System Technology Group, TUT/HUT

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Table of Contents, Slide 65

Mini Factory

HolliosHollios

Hollis Hollis

Hollis Virtual mini factory for microphone assembly

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Table of Contents, Slide 66

Micro Factory

MEL

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Table of Contents, Slide 67

Tasks in Micro Assembly Tasks in microassembly

preparation of parts transportation of parts positioning and fixing of parts connecting the parts testing and measuring the finished

microsystem

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Table of Contents, Slide 68

Issues in Microassembly

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Table of Contents, Slide 69

Precision Positioning I Coarse-fine approach

A macro robot + a precision robot (micromanipulator)

A precision robot (micromanipulator) + coarse multi-axial stage

Micro robots

Microassembly Automation Laboratory, Lawrence Livermore

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Table of Contents, Slide 70

Precision Positioning II: Stages

Newport Piezosystem

MIT Nanotechnik

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Table of Contents, Slide 71

Precision Positioning III: More Stages and Actuators

X-Y stage from Nanotechnik

Ultrasonic motor by Nanomotion

X-Y-Z stages from Physik Instrumente X-Z stage from Newport Co.

Stepper motor from Newport Co.

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Table of Contents, Slide 72

Precision Positioning IV: Mobile Micro Robots

University of Karlsruhe, Institute for Real-time Computer System & Robotics

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Table of Contents, Slide 73

Micromanipulator

Nanotechnik

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Table of Contents, Slide 74

Position Measurement Measurement methods

Visual servoing Linear encoding Laser sensor Other sensors

Acceleration meter Hall sensor

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Visual ServoingM

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Table of Contents, Slide 76

Micro Griping Gripping methods

Grippers with moving part Various shape Actuation principle

Piezoelectric, SMA, electrostatic Grippers without moving part

Vacuum gripper adhesive gripper Frozen gripper Water drop gripper

Non-contact transportation system Laser trap gripper Dielectrophoretic transportation Ultrasonic system

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Table of Contents, Slide 77

Micro Grippers

EPFL Lawrence Livermore National Laboratory

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Table of Contents, Slide 78

Force Measurement Sensing methods

Piezoresistive Optic reflective

Installation Integrated Non-contact

Piezolever from Thermomicroscopes

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Table of Contents, Slide 79

Dispensing and Connection Micro dispensers Wire connection

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Table of Contents, Slide 80

Vibration Control I For vibration control, several aspect should be taken into account:

Construction of the building Location of site Away from heavy machinery

A cheap solution Vibration isolation table

There are several isolation principles used in vibration control: Passive isolation

Elastomeric Spring

Pneumatic Active

Electromagnetic Piezo

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Table of Contents, Slide 81

Vibration Control II

Passive Isolation No need for connections

electrical air preassure

Clean room and vacuum compatible

Elastomeric Isolator from Newport Co.

Passive spring Isolation

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Table of Contents, Slide 82

Vibration Control III

Pneumatic Isolation Consists of a sealed air chamber Platform floats in a cushion of air

Need for air preassure Difficult to install in clean room and vacuum environment

VH-isostation from Newport Co.

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Table of Contents, Slide 83

Vibration Control IV

Active Isolation Pneumatic with electromegnetic sensors and

actuators

AD500 activator from Newport Co.

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Table of Contents, Slide 84

Vibration Control V

Active Isolation An active vibration isolation system measures the vibrations from the floor

and the table itself, and produces a mechanical force contrary to the vibration.

Piezo actuators from Newport Co Elite 3 Workstation from Newport Co.

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Table of Contents, Slide 85

Environmental Issues Environmental control takes

care of issues like: Temperature control Humidity control Air flow Dust participles

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Table of Contents, Slide 86

The Environmental Chamber (Design)Double layer polycarbonate wall

Air duct

Air buffer

Diffuse plate

Aluminum frame

Access Orifices

Vibration Isolation table

Cable passing point

Air inlet (from environmental controller)

Bottom thermal isolation layer

Air outlet (to environmental controller)

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Table of Contents, Slide 87

The Environmental Chamber: the Controller ARCTEST Environmental equipment Temperature

Range: 10 to +40 C Accuracy:

+/- 0.1 C Humidity

Range: 5 to 80 %RH Accuracy: +/- 0.1 %

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Table of Contents, Slide 88

Benders TestsTesting Results

Displacement of the benders Important influence both of T

and humidity could be noticed. Apart from temperature and

humidity influence, the amplitude of the movement was higher with the lower frequency (0.2 Hz)

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Table of Contents, Slide 89

Initial results of environment effects to microassembly, IV

Displacement and angular error of pick and place operation of a miniaturized gear at different temperature and humidity settings

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Table of Contents, Slide 90

Modularization

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Table of Contents, Slide 91

Special Phenomena in Microassembly Scaling effects:

The change of dominant physical quantities between different scales gravitational, inertial forces become less effective van der Waals forces, electrostatic forces, surface tension forces become more

important other effects

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Table of Contents, Slide 92

Assembly and Task Planning

Assembly planning (high level) Assembly representation Work cell planning Sequence planning

Task planning (low level, planning of handling operations) Gross motion planning (path planning) Fine motion planning Grasp planning

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Table of Contents, Slide 93

Differences Between Macro and Micro Assembly and Task Planning I

The technologies developed for conventional assembly planning are largely valid

To be developed in Fine motion planning Grasp planning Feeding

To take into account of Micro domain forces Special uncertainties

Assembly planning Assembly representation Work cell planning Sequence planning

Task planning Gross motion planning (path

planning) Fine motion planning Grasp planning

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Table of Contents, Slide 94

Differences Between Macro and Micro Assembly and Task Planning II

Traditional assembly and task planning Geometric model is sufficient in

many cases No special adhesion forces

Many planning methods are based on disassembly

Reversible operations Assembly can be based on

common sense Can use expert experiences

Assembly and task planning in micro assembly Physics-based simulation model is

required Special adhesion forces

Assembly based on disassembly does not work

Many operations not reversible Common senses do not always

work Many experiences expired

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Table of Contents, Slide 95

Model-based Handling and Planning

A potential powerful method in assembly and task planning in micro assembly is physical model-based virtual reality environment Benefits

can help task planning: fine motion and grasp planning can help assembly planning: assembly sequence planning Model can help design of new tools: model-based design

Drawbacks computational intensive require numerical micro domain force models verification difficulties

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Table of Contents, Slide 96

Modeling of Micro Operations Global model: rigid body contact

dynamics + micro domain forces Contact dynamics Friction van der Waals forces electrostatic forces Dry environment Simple-shape objects

Fast, real-time simulation capableunit in micro meter

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Table of Contents, Slide 97

Summary

Microrobotics Microtelemanipulation Microassembly