rotating sputter magnetron assembly

1
tion of oxalic acid ion and hy- drofluoric acid ion; and a second step in which the film coat is re- moved by contacting with a sec- ond aqueous solution of a mixture of nitric acid and hydrofluoric acid. COMPOSITE PLATING APPARATUS U.S. Patent 6,183,610. Feb. 6, 2001 Y. Kataoka et al., assignors to Nihon Parkerizing Co. Ltd., Tokyo An apparatus for composite plat- ing the inner surface of a cylindri- cal body, SPUI"I'ERING CATHODE U.S. Patent 6,183,612. Feb. 6, 2001 R. Adam et al., assignors to Leybold Systems GmbH, Hanau, Germany A sputtering cathode with a flat plate-shaped target formed from at least one part comprising a tub- shaped yoke having a center ridge and a tub rim with end faces and being spaced apart from and be- hind a target. SPUTIrEH TARGET/BACKING PLATE ASSEMBLY U.S. Patent 6,183,613. Feb. 6, 2001 P.S. Gilman et al., assignors to Praxair S.T. Technology Inc., Danbury, Conn. A sputter target assembly com- prising a target member; a back- ing member; and a block member. ROTATING SPUTTER MAGNETRON ASSEMBLY U.S. Patent 6,183,614. Feb. 6, 2001 J. Fu, assignor to Applied Materials Inc., Santa Clara, Calif. A magnetron assembly position- able at a backside of a sputtering target and rotatable about a cen- ter position of the target. ELECTROCOAT BATH STABILIZATION U.S. Patent 6,183,616. Feb. 6, 2001 H. Sakamoto et al., assignors to Nippon Paint Co. Ltd., Osaka, Japan A method of stabilization of elec- trolyte bath in electrocoating for obtaining electrodeposition coat by immersing a substrate in the electrolyte bath filled with a cat- ionic electrocoating composition containing a basic resin and an amine compound and carrying out electrocoating. TIN PLATING PROCESS U.S. Patent 6,183,617. Feb. 6, 2001 D. Guhl and F. Honselmann, assignors to Th Goldschmidt AG, Essen, Germany A self-regulating, acidic electro- lyte for tin plating aluminum al- loys. SULFONIC ACID ELECTROPLATING BATHS U.S. Patent 6,183,619. Feb. 6, 2001 H.D. Gillman et al., assignors to Technic Inc., Cranston, R.I., and Special Chemical Systems Inc., Royersford, Pa. A method of improving the plat- ing performance of sulfonic acid based electroplating baths com- prising replacing at least a por- tion of the alkyl sulfonic acid elec- trolyte with a salt of an alkanol sulfonic acid or of a mixture of an alkyl sulfonic acid and an alkanol sulfonic acid, wherein the replace- ment salt is selected from the group consisting of alkali metal, alkaline earth metal, and ammo- nium or substituted ammonium salts. BASKETS! Meters Chem Feeders E • COST-EFFECnVE • LIGHTWEIGHT • POLYPROPYLENE * DURABLE COMPE3111VELY PRICED Polypro Baskets INTRODUCING BKT$' PATENTED PLATING BASKET WITH IMPROVED SUPPORT STRUCTURES A Poly/Stainless combination which adds durability at approximately 1/2 the weight of a stainless steel basket. "O'BOTTOM DESIGN FITS ALL DRYERS At your request, we can provide any style bottom, or speda] baskets BKTS, INC. 1347 South Main ,T~eet MNdvl~, PA 16335 E-m~: bkt~ooid~.net or Visit our w~l~lte: toolcfly,net/-bkts Toll Free 877-724-2587 Fax: 814-724-8277 Circle 094 on reader card or go to www.thru.to/webconnect Amp~Hour Meters JP Tech Amp/Hour meters offer an extensive feature set, unsurpassed reliability and economy. The dual peristaltic pump model includes every- thing necessary to start chemical adds immediately. Amp~Hour Systems $175.00 TotalizerSystems $300.00 Pump Controller Systems $575.00 Pump Controller Systems w/2 pumps Other Products • AMP/Hour * Time Based • Ripple • PH/ORP • Flow • Conductivity ° Peristaltic • Pulse Feed • Pnematic JP Tech, Inc. 2920 Main Street • P O Box 863 East Troy • WI 53120 Phone: 262o642-7671 • Fax: 262-642-7681 e-mail: [email protected] www)ptechinc.com Circle 075 on reader card or go to w~nN.thru.to/webconnect ADDITIVE FOR ELECTROREFINING AND ELECTROWINNING U.S. Patent 6,183,622. Feb. 6, 2001 R. Janik, assignor to Enthone-OMI Inc., Warren, Mich. A method for improving the duc- tility of copper produced by the electrowinning or electrorefining of copper from a copper electrolyte bath comprising adding an addi- tion agent consisting essentially of a bath-soluble adduct of a ter- tiary alkyl amine. ABRASIVE SHEET U.S. Patent 6,183,677. Feb. 6, 2001 A. Usui and Y. Yoshida, assignors to Kovax Corp., Tokyo A method of manufacturing an abrasive sheet comprising form- 94 Metal Finishing

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Page 1: Rotating sputter magnetron assembly

tion of oxalic acid ion and hy- drofluoric acid ion; and a second step in which the film coat is re- moved by contacting with a sec- ond aqueous solution of a mixture of nitric acid and hydrofluoric acid.

COMPOSITE PLATING APPARATUS U.S. Patent 6,183,610. Feb. 6, 2001 Y. Kataoka et al., assignors to Nihon Parkerizing Co. Ltd., Tokyo

An apparatus for composite plat- ing the inner surface of a cylindri- cal body,

SPUI"I'ERING CATHODE U.S. Patent 6,183,612. Feb. 6, 2001 R. Adam et al., assignors to Leybold Systems GmbH, Hanau, Germany

A sputtering cathode with a flat plate-shaped target formed from at least one part comprising a tub- shaped yoke having a center ridge and a tub rim with end faces and being spaced apart from and be- hind a target.

SPUTIrEH TARGET/BACKING PLATE ASSEMBLY U.S. Patent 6,183,613. Feb. 6, 2001

P.S. Gilman et al., assignors to Praxair S.T. Technology Inc., Danbury, Conn.

A sputter target assembly com- prising a target member; a back- ing member; and a block member.

ROTATING SPUTTER MAGNETRON ASSEMBLY U.S. Patent 6,183,614. Feb. 6, 2001 J. Fu, assignor to Applied Materials Inc., Santa Clara, Calif.

A magnetron assembly position- able at a backside of a sputtering target and rotatable about a cen- ter position of the target.

ELECTROCOAT BATH STABILIZATION U.S. Patent 6,183,616. Feb. 6, 2001 H. Sakamoto et al., assignors to Nippon Paint Co. Ltd., Osaka, Japan

A method of stabilization of elec- trolyte bath in electrocoating for obtaining electrodeposition coat by immersing a substrate in the electrolyte bath filled with a cat- ionic electrocoating composition containing a basic resin and an

amine compound and carrying out electrocoating.

TIN PLATING PROCESS U.S. Patent 6,183,617. Feb. 6, 2001 D. Guhl and F. Honselmann, assignors to Th Goldschmidt AG, Essen, Germany

A self-regulating, acidic electro- lyte for tin plating aluminum al- loys.

SULFONIC ACID ELECTROPLATING BATHS U.S. Patent 6,183,619. Feb. 6, 2001 H.D. Gillman et al., assignors to Technic Inc., Cranston, R.I., and Special Chemical Systems Inc., Royersford, Pa.

A method of improving the plat- ing performance of sulfonic acid based electroplating baths com- prising replacing at least a por- tion of the alkyl sulfonic acid elec- trolyte with a salt of an alkanol sulfonic acid or of a mixture of an alkyl sulfonic acid and an alkanol sulfonic acid, wherein the replace- ment salt is selected from the group consisting of alkali metal, alkaline earth metal, and ammo- nium or substituted ammonium salts.

B A S K E T S ! Meters Chem Feeders

E • C O S T - E F F E C n V E • L I G H T W E I G H T • P O L Y P R O P Y L E N E * D U R A B L E

COMPE3111VELY P R I C E D P o l y p r o B a s k e t s

I N T R O D U C I N G B K T $ ' PATENTED PLATING BASKET WITH IMPROVED

SUPPORT STRUCTURES A Poly/Stainless combination which adds durability a t

approximately 1 /2 the weight of a s tainless steel basket. " O ' B O T T O M DESIGN FITS ALL DRYERS

At your request, we can provide any style bottom, or speda] baskets

BKTS, INC. 1347 South Main ,T~eet

M N d v l ~ , PA 16335 E-m~: b k t ~ o o i d ~ . n e t or

Visit our w~l~lte: t oo l c f l y , ne t / - bk t s

Toll Free 877-724-2587 Fax: 814-724-8277

Circle 094 on reader card or go to www.thru.to/webconnect

A m p ~ H o u r M e t e r s J P T e c h A m p / H o u r m e t e r s

offer an extensive feature set, unsurpassed reliability and economy. The dual peristaltic pump model includes every- thing necessary to start chemical adds immediately.

Amp~Hour Systems

$175.00 Totalizer Systems $ 3 0 0 . 0 0 Pump Contro l ler Systems

$ 5 7 5 . 0 0 Pump Contro l ler Systems w/2 pumps

Other Products • AMP/Hour * Time Based • Ripple • PH/ORP • F low • Conduct iv i ty ° Peristal t ic • Pulse Feed • Pnemat ic

JP T e c h , Inc. 2920 Main Street • P O Box 863 East Troy • WI 53120

Phone: 262o642-7671 • Fax: 262-642-7681 e-mail: [email protected] www)ptechinc.com

Circle 075 on reader card or go to w~nN.thru.to/webconnect

ADDITIVE FOR ELECTROREFINING AND ELECTROWINNING U.S. Patent 6,183,622. Feb. 6, 2001 R. Janik, assignor to Enthone-OMI Inc., Warren, Mich.

A method for improving the duc- tility of copper produced by the electrowinning or electrorefining of copper from a copper electrolyte bath comprising adding an addi- tion agent consisting essentially of a bath-soluble adduct of a ter- t iary alkyl amine.

ABRASIVE SHEET U.S. Patent 6,183,677. Feb. 6, 2001 A. Usui and Y. Yoshida, assignors to Kovax Corp., Tokyo

A method of manufactur ing an abrasive sheet comprising form-

94 Metal Finishing