Your ceramic-tooling partner for the front-end

semiconductor industry

Schunk SemiconductorAn international group of companies

SCHUNK INGENIEURKERAMIK GmbHHanns-Martin-Schleyer-Straße 5, 47877 Willich, Germany

Tel.: +49 2154 4970, fax: +49 2154 497 111

detlef.brands@schunk-group.com

SCHUNK KOHLENSTOFFTECHNIK GmbHRodheimer Straße 59, 35452 Heuchelheim, Germany

Tel.: +49 641 6080, fax: +49 641 608 1673

info@schunk-group.com

XYCARB CERAMICS B.V. Zuiddijk 4, 5705 CS Helmond, The Netherlands

Tel.: +31 492 548 345, fax: +31 492 578 787

info@xycarb.nl

XYCARB CERAMICS INC.101 Inner Loop Road, Georgetown, TX 78626, USA

Tel.: +1 800 989 9227, fax: +1 512 863 7376

info@xycarb.nl

visit us at >> www.schunk-semiconductor.com

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Your partner for complete packages

A division of the world-renowned Schunk group, Schunk

Semiconductor is a leading manufacturer of high-quality ceramic

products for the semiconductor wafer manufacturing and wafer

processing industry. Our specialities encompass the whole range of

ceramic products essential to the industry - including CVD-coated,

carbon-fiber-composite (CFC), graphite, quartz and ceramic products.

This combined capability gives us full command of all technologies needed to meet the demanding requirements of the

modern semiconductor manufacturing industry. Creating a world-class strategic partner ideally positioned to help you

capitalize on your own technical strengths. A partner who can fully support you with the innovative products you need to

meet the challenges of the new millennium and one, moreover, who can work and grow with you as this latest, exciting

chapter of the electronics age unfolds.

All Schunk Semiconductor products are manufactured with the prime objectives of increasing manufacturing yields, process

speeds and product quality.

Our products meet the semiconductor industry’s toughest demands for dimensions, purity and particle level. At every major

production step, measures are taken to prevent product contamination and to ensure that the required specifications are met.

Critical production steps, final inspection and packaging are done in ultra clean-room conditions and systems are in place that

enable full traceability from raw material to final product. All our activities are steered by the principles of ISO9001 (ISO/TS

16949 in process), providing an operational framework for achieving our quality goals and 100% customer satisfaction.

We also fully embrace the principles of Environmental Management according ISO14001 - ensuring that our products have

minimum impact on the environment and helping to preserve natural resources for future generations.

Specified by major manufacturers of wafer-processing equipment

worldwide, our products are also the first choice of wafer and

chip manufacturers themselves, for the high level of quality and

innovation they embody.

Combined capability

Schunk Semiconductor brings together

the expertise of several specialist companies,

each a major player in its own area.

The Schunk Group

The Schunk Group is a global technologies conglomerate

with an exceptionally wide spectrum of products in materials

as well as in systems engineering. The group comprises

many individual companies that operate independently in the

world’s markets. This guarantees a high degree of flexibility

as well as proximity to customers.

The Schunk Group currently employs over 7500 people

worldwide. The group’s headquarters are located in the

Frankfurt area, Germany. The group has subsidiaries

in 25 countries.

In addition, there are joint ventures and strategic alliances

with other companies, partners and research institutes.

More information on the Schunk Group can be found on

the internet at: www.schunk-group.com

Meeting the highest quality and environmental standards

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The operating company Xycarb Ceramics, plays a leading role in the development

and manufacture of silicon carbide coated susceptors (barrel and single-wafer) for

epitaxial processes. The coatings help to extend susceptor lifetime, improve process

uptimes and cut cost of ownership. Xycarb Ceramics’ capabilities encompass

a broad range of CVD coatings. These include aluminium nitride,

used as a fluorine-etch resistant coating for single-wafer

CVD applications, and tantalum carbide for very

high-temperature applications. The operating

company Schunk Kohlenstofftechnik also has

extensive capabilities in the application of silicon

carbide, pyrolytic carbon and boron carbide coatings.

A crucial quality-determining factor of a product,

the coating, enhances the properties of the substrate material

and makes the products better tailored for applications in

the semiconductor industry.

Schunk Semiconductor also carries the full line of Philips

Semiconductor lamps for all your fab’s process requirements.

These include lamps for single wafer EPI, batch EPI,

ashing and RTP applications.

Schunk Semiconductor is also playing a leading role in

the development of next generation susceptor kits for

wafer-processing equipment. A key tool in developing better

products, our pre-production computer simulations provide

in-depth information on coating properties, enabling us to

manufacture very thin, stress- and temperature-optimized parts

to extremely close tolerances.

For the highest product purity, all our coated

products are manufactured in clean rooms with purity

monitoring and analysis methods that include

SEM, EDAX, XRD and GDMS.

epi/mocvdsetting the standard in susceptors

The operating company

Xycarb Ceramics also fabricates

coated and uncoated graphite

products for MOCVD applications.

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All our parts are supplied to the highest purity levels. The total

ash is lower than 10 ppm for parts up to 1300 mm in diameter.

For low particle release, all the graphite and carbon-carbon (C/C)

parts up to 1300 mm diameter can be coated with pyrolytic

carbon and SiC.

The C/C composite material can also be infiltrated with CVI-SiC

and CVI-PYC to protect the matrix and the fibers themselves from

methanisation in the H2 atmosphere used in the polysilicon produc-

tion stage. For the insulation package, we can supply high corrosion

resistant soft and rigid graphite felt or foam. This material can be

purified and infiltrated with PYC or SiC in the same way as the

C/C composites and graphite.

No doubt that the semiconductor market is quickly changing through continuous development (summarized in Moore’s law). Your problems

are challenges for our R&D team. With our experience and long history we can help you move forward with your developments. Product

developments have proven to be the most successful when organized in projects with our customers. The latest process developments resulted

in two new materials: T-SiC and C-SiC.

T-SiC

Parts are formed by a thick CVD SiC coating process on a machined carbon form (product negative). Removing the carbon leaves a pure

thick SiC final product, with exceptional clean bulk purity. Product configurations vary from small pins up to big plates. Product details and sur-

face finish can be machined to customer demands. A Schunk patented XClean process leaves an ultra high surface purity.

C-SiC

Parts are preformed in carbon fiber reinforced carbon of high purity. Through impregnation with molten silicon the material is converted

into SiC. Not all of the carbon reacts with the silicon, resulting in a composite structure. This C-SiC material is mechanically strong, has a high

thermal shock resistance and a high purity.

real innovationby process &

product development optimized for today’s

leading-edge processes

high-purity graphite and carbon composite

for crystal growing

2800o C PYC coated crucible for growing optical or detector crystals.

1500o C CFC and graphite componentsfor crystal growing units in the semiconductor industry.

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a wide range of critical workshop products

The operating company Xycarb Ceramics fabricates

precision-machined parts for major manufacturers and users

of ion implantation equipment.

Our graphite parts can be supplied uncoated, impregnated

or coated with pyrolytic carbon or silicon carbide CVD

to enhance their properties.

Schunk Semiconductor also supplies refractory metals and ceramic

products for, even the latest generation, ion implantation

equipment. This makes Schunk Semiconductor your ultimate

partner for ion implantation consumables. To fulfill process

improvement demands we also manufacture special products

tailored to customer requirements.

ion implant

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Our operating company Xycarb Ceramics is a long-standing

supplier to the semiconductor industry, well versed in working

with all semiconductor quartz grades. Our experience in this

area, our precision computer-controlled machining plus our

advanced thermal forming and treatments enable us to achieve

the high product quality essential for your current and future

production systems.

To manufacture quartzware

to the highest technical

specifications, our production

centers make widespread use

of robotic manufacturing

equipment, much of it designed

in-house. Our fully-automated quartz welders, for instance, give

reproducible, stress-free welds that are seamless and blemish-free.

Flame-polishing too is fully automated to create highly uniform,

high-purity, virtually stress-free products. We can supply quartzware

to any required customer specification including visual quality.

We make extensive use of simulations to design out stresses in

our quartz products long before they enter production.

What’s more, optimal surface treatments completely eliminate

all risk of particle contamination during production.

quartz products

meeting all your current and future requirements

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Schunk Semiconductor has all the necessary know-how,

experience and equipment in-house to produce precision

ceramic products with tolerances within the micron range.

Modern products are geared, in particular, toward large size

capabilities for 300 mm technology and far beyond.

Each product is designed and manufactured with the

optimum mix of properties for the intended application

(e.g. purity, electrical conductivity, thermal capacitance

and corrosion resistance).

Well-controlled production processes, high-precision CNC

machining and product monitoring guarantee the highest quality

levels. And multi-stage cleaning ensures that all products meet

customers’ specified cleanness and visual appearance.

In addition, developments at our R&D centers are currently

setting the scene for a whole new range of innovative ceramic

materials meeting the present and future needs of the semicon-

ductor industry. We are currently involved in almost every major

innovation geared to your needs

Strict control exercised over both macroscopic features and

microstructure enables us to regulate and even alter many

of the material properties in order to meet rapidly changing

requirements for the latest generations of systems and

applications. It also means we can develop ceramic materials

with unique chemical, mechanical and electrical properties

precisely tailored to our customers’ requirements.

ceramic and silicon products

Main materials

available today:

Alumina (Al2O3)

Sapphire (Al2O3)

Aluminum nitride (AlN)

Boron carbide (B4C)

Quartz (SiO2)

Silicon nitride (Si3N4)

Silicon carbide (SiC-hotpressed)

Silicon carbide (SiC-CVD)

Silicon-infiltratedSiC (SiSiC)

Polycristalline silicon (Si)

Single cristalline silicon (Si)

All kinds of special composites

development in semiconductor ceramics, bringing to the field a

unique combination of material production know-how and

advanced machining capabilities.

New advanced ceramic sintering processes achieve purity levels

that are among the highest in the industry, and our advanced

coating processes are leading to unique combinations between

ceramics and CVD coatings.

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Serving your global needs

Wherever your production facilities are located, Schunk

Semiconductor will be close by. And our worldwide sales

and technical support network provides effective assistance

to customers throughout the semiconductor industry.

Visit our website at: www.schunk-semiconductor.com

to get the most up-to-date overview of our sales offices.

Schunk Semiconductor’s expertise and continuous investment in its business is the key to providing you with

a competitive edge in your own markets. With Schunk Semiconductor as your business partner, you’re guaranteed

unrivalled expertise and resources such as:

• High-precision ceramic tooling and machining meeting the most demanding specifications including those

for processing wafers of 300 mm and larger.

• Choice of several ceramic materials for every wafer process. Currently, we make use of over forty types of ceramic,

with new materials added regularly.

• Research facilities developing new materials with application-tailored chemical and physical properties.

• World-class CVD coatings and deposition technology.

• CNC equipment at all facilities.

• Proprietary, fully-automated equipment for seamless, blemish-free welding of quartzware.

Besides having excellent appearance, welds produced by

this equipment are highly reproducible and stress-free.

• Modern factories using advanced and efficient production

methods able to operate to any required quality standard.

• Traceabilty from raw material to final product.

• Clean-room cleaning and packaging that guarantees up

to Class 10 packed products.

• Well-controlled processes with quality monitoring

(using 3D CMM inspection equipment) at every major

stage of manufacture.

• Global sales and distribution network providing effective logistics.

• Dedicated and skilled workforce. On-going training programs ensure staff remain up-to-date and

qualified in their function.

• Continuous innovation and investment in new technologies and materials.

• Computer simulation (finite element analysis) for stress and temperature optimized designs.

• Supply of complementary products such as infrared lamps and refractory metal parts.

our services providing the competitive edge<< <<>>

• Custom engineering

• Co-production programs

• Task-force teams for efficient

operations and short time-to-market

• In-house design, development and

production

• Repair and refurbishment service

• Comprehensive suite of CAD tools

and precision computer-controlled

machining to any required standard

• World-wide customer support

• World-class logistics with various

on-time supply arrangements

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