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Short Introduction Course in Systems Engineeringby Gerrit Muller Buskerud University College

e-mail: [email protected]

Abstract

A course in Systems Engineering that can be taught in a few hours. It uses a caseto set the stage and to show what SE principles and methods can be applied.

Distribution

This article or presentation is written as part of the Gaudí project. The Gaudí projectphilosophy is to improve by obtaining frequent feedback. Frequent feedback is pursued by anopen creation process. This document is published as intermediate or nearly mature versionto get feedback. Further distribution is allowed as long as the document remains completeand unchanged.

October 20, 2017status: preliminarydraftversion: 0

Figure Of ContentsTM

case introduction magic SE words

Some words in systems engineering are used very

often and play a crucial role. These words are highlighted and

explained in the presentation

SE process

product creation

SE in case

SE techniques

life cycle

summary

Short Introduction Course in Systems Engineering2 Gerrit Muller

version: 0October 20, 2017

SICSElogo

Solar Cell Wafer Fab

solar cell fab

expose wafer

stepper

expose wafer

stepper

metallization doping

anti- reflection coating

advanced process control

logistics & automation

power chemicals

climate infrastructure

computing & networking

infrastructure

metrology

empty wafer

power, chemicals consumables, waste

wafer with solar cells



SCSEfab

Metallization Cell

metallization cell

wafers in

wafers out

measure

pre- process

metallization post- process

measure

wafer handler

metallization

transport



SCSEcell

Value Chain

metallization cell (system integrator)

wafer handler measurement

metallization process

pre- and post-process

solar cell manufacturer (fab)

solar energy system (panel+)

retailers

consumers

energy providers

parts, e.g.: engines, belts,

sensors, controller, control software


version: 0October 20, 2017SCSEvalueChain

Trends of past Decades

technology disciplines

rate of change

transportation

operation

process control

process complexity

contamination and climate

manual

manual

expert

medium

strict

automated

automated

advanced

high

very strict

microclimates

semi-manual

remote

statistical

medium-high

stricter

>2010 2000-2010 2000<

chemical, mechanical dominant

much more electronical, software

number of people in development tens hundreds

years months

integration loosely tight; also at fab



SCSEtrends

Key Drivers and Parameters


wafer handler


solar cell manufacturer (fab) yield productivity cost per wafer

process quality throughput reliability cost of operation

speed of operation avoid contamination reliability avoid wafer damage


version: 0October 20, 2017SCSEkeyDrivers

Process and Organization

case introduction

SE process

product creation

SE in case

SE techniques

life cycle

summary

Typical SE processes and organization at

large system integrators



SICSElogoProcess

Phase Gate Process

0.

feasibility

1.

definition

2.

system

design

3.

engineering

4.

integration

& test

5.

field

monitoring

sales

logistics

production

service

development & engineering: marketing, project management, design



PCPbusinessPhases

Magic Words

0. feasibility

1. definition

2. system design

3. engineering

4. integration

& test

5. field

monitoring

sales

logistics

production

service

development & engineering: marketing, project management, design

define objectives , analyze , and mitigate risks



SICSEbusinessPhases

Phased Project Approach

needs

design

verification

engineering

core information

in draft50%

most information

available in

concept

information is stable

enough to use

heavier change control

Legend:

specification

preparing or updating workfull under development

0.

feasibility

1.

definition

2.

system

design

3.

engineering

4.

integration

& test

5.

field

monitoring



PCPdesignPhases

V-Model

needs

specification

system design

subsystem design

component design

component realization

component test

subsystem test

system test

verification

validation



TPSEPvModel

More Magic Words

needs

specification

system design

subsystem design

component design

component realization

component test

subsystem test

system test

verification

validation

requirements specification as input to the

design, documented SMART

Specific, Measurable, Acceptable, Realistic,

Traceable

requirements engineering the flow down of the requirements through the V.

verification of result against

specification



SICSEvModel

Simplified Process View

strategyprocess

customer

supplying business

value

product creationprocess

customer oriented (sales,

service, production) process

people, process and technologymanagement process



RSPprocessDecomposition

Simplified Process; Money and Feedback

strategyprocess

supplying business

value

people, process and technology

long termknow how

(soft) assets

feed

back

product creation

customer oriented

customer

short term;cashflow!

mid term;cashflow

next year!



RSPprocessDecompositionAnnotated

Simplified process diagram for project business

systems architecting

tenderproject

execution

product creation

deploymentcontract systems

products or

components

policy and

planning

people, process, and technology management



PPSprojectProcess

Product Creation

case introduction

SE process

product creation

SE in case

SE techniques

life cycle

summary

Zoom in at development and engineering



SICSElogoProductCreation

Decomposition of the Product Creation Process

Product Creation Process

Operational

Management

Design

ControlMarketing

specification

budget

time

technical profitability

saleability

needs

specification

design

engineering

what is needed

what will be realized

how to realize

how to produce

and to maintain

customer input

customer expectations

market introduction

introduction at customer

feedback

product pricing

commercial structureplanning

progress control

resource

management

risk management

project log

verification

meeting specs

following design



PCPDecomposition

Operational Organization of the PCP

subsystem

singleproduct

productfamily

entireportfolio

developersmodule

portfolio

operational

manager

family

operational

manager

(single product)

project

leader

subsystem

project

leader

operational

portfolio

architect

family

architect

product

architect

subsystem

architect

technical

portfolio

marketing

manager

family

marketing

manager

product

manager

commercial



PCPoperationalOrganization

Prime Responsibilities of the Operational Leader

Resources Time

Specification

Quality



PCPoperationalTriangle

Operational Teams

Operational Leader

(project leader)

Operational Support

(project manager)

Marketing or

Product Manager

Architect

Application

Manager

Test Engineer

Service Manufacturing

LogisticsSales

Manager Quality

Assurance

Requirements

AnalystSubsystem

Operational

Leaders

Subsystem

ArchitectsTechnology-

Specific

Architects

Development

support



PCPconcentricTeams

Role of SE in the Case

case introduction

SE process

product creation

SE in case

SE techniques

life cycle

summary

What does SE contribute in this case?



SICSElogoRoleSE

From Engineering Disciplines to System Qualities

mec

hani

cal

engi

neer

ing

elec

trica

l en

gine

erin

g

optic

s

mea

sure

men

ts

mec

hatro

nics

softw

are

engi

neer

ing

embe

dded

co

ntro

l

reliability

process quality

throughput

Systems Engineering: responsible for customer key drivers and key performance parameters of system



SCSEsystemsEngineering

More Magic Words

mec

hani

cal

engi

neer

ing

elec

trica

l en

gine

erin

g

optic

s

mea

sure

men

ts

mec

hatro

nics

softw

are

engi

neer

ing

embe

dded

co

ntro

l

reliability

process quality

throughput

Systems Engineering: responsible for customer key drivers and key performance parameters of system

Systems Engineering is multi-disciplinary and is responsible for integration of the

parts. It takes a holistic perspective.


version: 0October 20, 2017SICSEintegration

Stakeholders, Needs, Concerns


wafer handler measurement


pre- and post-process

solar cell manufacturer (fab)

solar energy system (panel+)

retailers

consumers

energy providers

parts, e.g.: engines, belts,

sensors, controller, control software

stakeholders

everyone with a stake in the system, e.g.

decision makers,managers, sales, service, purchasing,

engineers, operators, cleaners, regulation,

standards, quality assurance, ...

stakeholders have

needs and concerns



SCSEstakeholders

Suppliers involved in Wafer Handler


wafer handler system design

mechanical eng.

software eng. PCB manufacturing

assembly and test

system project manager

systems engineer

wafer handler segment leader

manufacturing system assembly

and test

service trouble shoot and

maintenance



SCSEsuppliersWH

and Even More Magic Words


wafer handler system design

mechanical eng.

software eng. PCB manufacturing

assembly and test

system project manager

systems engineer

wafer handler segment leader

manufacturing system assembly

and test

service trouble shoot and

maintenance

Systems Engineering and Engineering are reponsible

for development of the s upply chain



SICSEsupplyChain

Partnering is a Strategic Choice

Core

Key

Base

make outsource buy refer customer to 3rd party

Own value IP

Critical for final performance

Commodity

Technology life cycle

Partnering

Total Product


version: 0October 20, 2017SSScoreKeyBase

Systems Engineering Techniques

case introduction

SE process

product creation

SE in case

SE techniques

life cycle

summary

typical techniques used by systems engineers



SICSElogoTechniques

Engineering

engineeringsystem specification

system design

parts data base

production procedures

qualification procedures

system documentation

procurement

production

installation

lifecycle

support

quality

assurance

ERP PDMSCMCAD

mechanical

electrical

design

database

source

code

management

resource

planning,

e.g. SAP

product

data

management

doc

DB

project

documents

know-

ledge

DB

source data

engineering knowledge

past

experience



SPFengineering

Example Physical Decomposition

Fluidic

subsystem

chamber

bottom chuck

electronics

infrastructure

process

power

supply

1

3

2

4

5electronics

infrastructure1 5granite

ZUBA

stage

frame

base frame +

x, y, stage

stage

control

ZUBA

control

optics

stagescoop

cameravision

op

tics s

tag

e

co

ntr

ol

vision

control

6

7

8

9

10

cabling

covers and

hatches

ventilation

air flow

contamination

evacuation

sensors

measurement

frame

machine

control

"remote"

electronics rack

10

11

12

13

14

15

?

back side view front side view integrating



REPLIsubsystemsAll

Partitioning is Applied Recursively

system

subsystem 1

subsystem 2

subsub

system A

subsub

system B

subsub

system A

subsub

system B

subsub

system N

subsub

system N

atomic

part

atomic

part

atomic

part

subsystem n

subsub

system A

subsub

system B

subsub

system N



SPFrecursion

Decoupling via Interfaces

part

e.g. pressure

and flow

regulator

part

e.g. pipe

part

e.g. pipe

hydrocarbon

interface

power

interface

control

interface

e.g. CAN

mechanical

mounting interfaceother part with

same interfaces

can replace

original



SPFinterfaceDecoupling

Simplistic Functional SubSea Example

prevent

blow-outs

regulate

flow and

pressure

hydrocarbons

from well

increase

well

pressure

separate

gas, oil,

water, sand water

sand

transport to

top-side

measure

pressure,

temp, flow

control

pressure,

temp, flow

sensor

signals

sensor data

settings

hydro

carbons

combine

multiple

streams



SPFfunctionalExample

Quantification

Size

Weight

Cost

Reliability

Throughput

Response time

Accuracy

2.4m * 0.7m * 1.3m

1450 Kg

30000 NoK

MTBF 4000 hr

3000 l/hr

0.1 s

+/- 0.1%

many characteristics

of a system, function or part

can be quantified

Note that quantities

have unit


version: 0October 20, 2017SPFquantification

More and More Magic Words

partitioning facilitates the organization, logistics, production, and service

interfaces are used to decouple

functional models explain how the system and parts operate

quantification helps to achieve fact-based decision making



SICSEmagicWordsTechniques

Example Technical Budget

process

overlay

80 nm

reticule

15 nm

matched

machine

60 nm

process

dependency

sensor

5 nm

matching

accuracy

5 nm

single

machine

30 nm

lens

matching

25 nm

global

alignment

accuracy

6 nm

stage

overlay

12 nm

stage grid

accuracy

5 nm

system

adjustment

accuracy

2 nm

stage Al.

pos. meas.

accuracy

4 nm

off axis pos.

meas.

accuracy

4nm

metrology

stability

5 nm

alignment

repro

5 nm

position

accuracy

7 nm

frame

stability

2.5 nm

tracking

error phi

75 nrad

tracking

error X, Y

2.5 nm

interferometer

stability

1 nm

blue align

sensor

repro

3 nm

off axis

Sensor

repro

3 nm

tracking

error WS

2 nm

tracking

error RS

1 nm



ASMLoverlayBudget

Even More Magic Words

process overlay 80 nm

reticule 15 nm

matched machine

60 nm

process dependency

sensor 5 nm

matching accuracy

5 nm

single machine

30 nm

lens matching

25 nm

global alignment accuracy

6 nm

stage overlay 12 nm

stage grid accuracy

5 nm

system adjustment accuracy

2 nm

stage Al. pos. meas. accuracy

4 nm

off axis pos. meas.

accuracy 4 nm

metrology stability 5 nm

alignment repro

5 nm

position accuracy

7 nm

frame stability 2.5 nm

tracking error phi 75 nrad

tracking error X, Y 2.5 nm

interferometer

stability 1 nm

blue align sensor repro 3 nm

off axis Sensor repro 3 nm

tracking error WS

2 nm

tracking error RS

1 nm

models facilitate analysis and

help to obtain understanding ,

insight , and overview



SICSEmagicWordsModels

Example of A3 overview

A3 architecture overview of the Metal Printer (all numbers have been removed for competitive sensitivity)

process steps

metal printing cell

Fluidic

subsystem

chamber

bottom chuck

electronics

infrastructure

process

power

supply

1

3

2

4

5electronics

infrastructure1 5granite

ZUBA

stage

frame

base frame +

x, y, stage

stage

control

ZUBA

control

optics

stagescoop

cameravision

op

tics s

tag

e

co

ntr

ol

vision

control

6

7

8

9

1

0

cabling

covers and

hatches

ventilation

air flow

contamination

evacuation

sensors

measurement

frame

machine

control

"remote"

electronics rack

10

11

12

13

14

15

?

metal printer back side metal printer front sideintegrating

subsystems

metal printer subsystems

tprepare

= tclose doors

+ tmove to proximity

tprint

= tp,prepare

+ tp,align

+ tchamber

(thickness) + tp,finalize

tfinalize

= tmove to unload

+ topen doors

tprint

= tp,overhead

+ Ctransfer

*thickness

2. Align

3. Move to proximity

4. Process

6. Open doors

1. Close doors

5. Move substrate unloading position

talign

tchamber

note: original diagram was annotated with actual performance figures

for confidentiality reasons these numbers have been removed

metal printer

functional flow formula print cycle time

key performance parameters

metal printer subsystems, functions, and cycle time model

metal printing cell: systems and performance model

back-end factory: systems and process model

pattern quality

cost per layer

environmental

impact

design enablinge.g. CD, separation

pattern

resolution

X-section control

accuracy overlay

high MTBF

early delivery

vs

volume production

uptime

throughput

operational

costs

system cost

electric power

clean water

elyte

N2, air

disposal water, air, ...

reliability

integral costs

consumables

waste

contamination

and climate

partial graph

many nodes

and connections

are not shown

customer key drivers

Customer key-drivers and Key Performance Parameters

Document meta-information

author

version

date last update

scope

statusGerrit Muller

0.1

August 3, 2010

system and supersystem

preliminary draft

metal printing time-line

min. line width

overlay

throughput

MTBF

a m

b m

c WPH

d hr

wafer size

power

clean room class

floor vibration class

200, 300 mm

x kW

throughput

1. inspection

2. seed sputter

3. metal print

4. seed etch

wafer

waferseed

wafer

Cu

wafer

5. coat/develop dielectricswafer

6. exposure or CMP for polymer viaswafer

7. E-test

spin coated

polymer

per waferthroughput in minutes

1

t

1

3..4

1..2

dual layer only

robot

prefill

master

FOUP

wafer

FOUP

wafer

FOUPflip

prealignclean

wafer

clean

master

metal

printer

print

robot

prealign

clean

master

prefill

clean wafer

0 100b 200b

wafer

with

ICs

back-end factory

expose

wafer

stepper

expose

wafer

stepper

metal

printer

advanced

process

control

logistics &

automation

power

chemicals

climate

infrastructure

computing &

networking

infrastructure

metrologymask

power, chemicals

consumables, waste

ICs

REX

wafer fab

(front end)


version: 0October 20, 2017LEANoverviewA3

Life Cycle

case introduction

SE process

product creation

SE in case

SE techniques

life cycle

summary

the impact of life cycle on engineering



SICSElogoLifeCycle

Product Related Life Cycles

system

creation

system

productionsystem

sales

service

individual systems

disposalupgrades and options

productionupgrades and options

sales

upgrades and options

creation



MALCproductLifeCycle

Product Life Cycle Management Process

strategy process

customer

supplying business

valu

e

product creation process

customer oriented (sales, service, production) process

people, process and technology management process

Product Life Cycle Management



PLMprocessPositioning

System Life Cycle

system

order

using

local

changes, e.g.accounts

procedures

ma

inte

na

nce

up

gra

de

using

orde

ring

com

pone

nts

man

ufac

turin

g

shipping

installatio

n

shipping

installatio

n

refu

rbishing

shipping

secondary

use dis

po

se

ma

inte

na

ncead

d o

ptio

n

sales



MALCsystemLifeCycle

Multiple Life Cycles

component

requ

est

design production

feasibility system

definition system design

production sales

service upgrades integrate

and test

spec volume proto


wafer handler

solar cell manufacturer (fab) operation



SCSElifeCycles

Summary

case introduction

SE process

product creation

SE in case

SE techniques

life cycle

summary all magic words beyond introduction



SICSElogoSummary

All Magic Words

objectives

risk (analysis, mitigation)

requirements (engineering, management)

SMART

verification

multi-disciplinary

integration

holistic

stakeholders

needs and concerns

life cycle

supply chain

partitioning

interfaces

functional

fact based

model

analysis

understanding

insight

overview



SICSEmagicWords

HiBu Master in Systems Engineering

Stevens Institute of

Technology

Hoboken, NJ, USA

Systems Engineering

Høgskolen i Buskerud

Postboks 235

3603 Kongsberg, Norway

6 mandatory courses

SDOE 625/SEFS Fundamentals of Systems

Engineering

SDOE 650/SEDS System Architecture &

Design

SDOE 612/SEPM Project Management of

Complex Systems

SDOE 605/SESI System Integration

SERP Reflective Practice

SDOE 800/SETH Master Project

and elective courses

SDOE 640/SESL System Supportability and

Logistics

SDOE 684/SEST Systems Thinking

SEMA System Modelling & Analysis

SESA Advanced System Architecting

SEPD Product Design

SECE Control/Signal Engineering

SERE Robust Engineering

SDOE 680, SYS681, SDOE645, SDOE 678,

SDOE 660

Control Engineering, Product design,

Embedded Systems courses


version: 0October 20, 2017HIBUprogramSE

Some Links

HiBu Systems Engineering informationhttp://www.hibu.no/studietilbud/ingeniorutdanning/master_systems_engineering/

HiBu course dateshttp://www.hibu.no/studietilbud/ingeniorutdanning/master_systems_engineering/

enkeltkurs/

HiBu Se master information at Gaudí sitehttp://www.gaudisite.nl/BUCmasterSE.html

these slides http://www.gaudisite.nl/ShortIntroCourseSESlides.pdf

Gaudí website Systems Architecting http://www.gaudisite.nl/



http://www.hibu.no/studietilbud/ingeniorutdanning/master_systems_engineering/

http://www.hibu.no/studietilbud/ingeniorutdanning/master_systems_engineering/enkeltkurs/

http://www.hibu.no/studietilbud/ingeniorutdanning/master_systems_engineering/enkeltkurs/

http://www.gaudisite.nl/BUCmasterSE.html

http://www.gaudisite.nl/ShortIntroCourseSESlides.pdf

http://www.gaudisite.nl/

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