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Page 1: Silicon Resonant Microsensors
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Microsensors - University of Southern Californiamspde.usc.edu/inspiring/resource/sensor/Microsensors.pdf · Pressure sensors First microsensors developed and used by industry

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Self-aligned silicon fins in metallic slits as a platform for ...dabm/420.pdfSelf-aligned silicon fins in metallic slits as a platform for planar wavelength-selective nanoscale resonant

High-sensitivity Silicon Resonant Strain Sensor High-sensitivity Silicon … · 2017-10-03 · High-sensitivity Silicon Resonant Strain Sensor 44 Yokogawa Technical Report English

All Optical Fiber Optofluidic or Ferrofluidic Microsensors ...link.springer.com/content/pdf/10.1007/978-981-10-1477-2_63-1.pdfAll Optical Fiber Optofluidic or Ferrofluidic Microsensors

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Lamb Waves and Resonant Modes in Rectangular Bar Silicon ......JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 19, NO. 4, AUGUST2010 827 Lamb Waves and Resonant Modes in Rectangular-Bar

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