sm rtline intelligent vacuum metrology - physics...

Intelligent Vacuum Metrology

V a c u u m I n s t r u m e n t s

Sm linert

Sm linertSm linert

IntelligentVacuum Transducers for

–101200 to 5 x 10 mbar

Durability That Pays Off

Stay Connected

Time Is Money

Further Smartline Advantages:

Joy in innovation is our main driving force for developing vacuum metrology at its best.The new generation of Smartline sets highest standards with regard to precision, functionality and reliability.

The THYRACONT Pirani with extended measuring range activates ionization sensors below a very low pressure threshold. This protects the sensors and improves gauge life.

The latest transducers offer an RS485 interface and an additional 0-10 V output or EtherCAT.

Smartline‘s intelligent microcontrollers manage sensor control automatically. This guarantees an optimal interplay between the Pirani and ionization sensors without operator intervention.

Optionally with largeLCD display Compact, metal sealedsensorsLow thermal and electricinterference with the vacuumprocessInsensitive to shockventingReplaceable sensor headsCorrect pressure readingsdue to separate gas correction factors for each sensor

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Application Example Solution Applications

Challenge

Brazing, sintering or annealing requires an Two VSH transducers that have the required Analysis instrumentsoxygen free atmosphere which means that wide measuring range and are used to Coating processesprocesses are carried out under vacuum measure the pressure at the furnaces gas inlet Controlling fine to ultrahighpartially using inert gas. and vacuum port with high precision. The vacuum applications

transducers are linked to the system PLC by Sputtering appliancestheir serial RS485 interfaces, so that both Process engineering

The vacuum level must be monitored and kept pressure levels can be directly visualized constantly low during the process to avoid graphically which allows easy monitoring of oxidation of the products. One of our clients the pressure gradient inside the furnace tube. needed to measure the pressure in their high Optionally a VD12 2 channel vacuum display vacuum tube furnace near the gas inlet as well and control unit can be used for pressure as at the vacuum port with high accuracy. reading in the panel.

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- 1 0V S H 1 0 0 0 t o 5 x 1 0 m b a r P i r a n i / H o t C a t h o d e

Application Example

ApplicationsChallenge

Solution

to avoid an overload of the turbo-molecular during the coating process. A VD10 Plastic components are provided with pump, e.g. by connecting it during multichannel vacuum display and control unit metallic coatings, either for aesthetic inapplicable system pressure, the pressure is used as a central control module. reasons or to shield sensitive components in the bypass line as well as the prevacuum from interferences. pressure of the turbo-molecular pump have

to be monitored.

Analysis instrumentsThe metallization is done in a PVD coating Vacuum furnacessystem. It is evacuated with a rotary vane The VSP Pirani Transmitter controls whether Coatingpump via a bypass line to a pressure of the vacuum via the bypass line is sufficient

-2 Prevacuum control10 mbar. Then a turbo-molecular pump is to connect the turbo-molecular pump. Safety switching in vacuum systemsconnected, which further evacuates to Another VSP monitors the necessary -5 10 mbar. The vacuum during the coating prevacuum pressure directly at the turbo-

-4process, that takes place at 2 x 10 mbar, molecular pump. A VSM wide-range must be monitored continuously to ensure transmitter measures the ultimate vacuum consistently high quality coatings. In order inside the system, as well as the pressure

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- 4V S P 1 0 0 0 t o 1 x 1 0 m b a r P i r a n i

- 9V S M 1 0 0 0 t o 5 x 1 0 m b a r P i r a n i / C o l d C a t h o d eApplication Example

Solution

Challenge Applications

-3operation above 10 mbar resulted in rapid For checking the pressure directly at the deterioration of the sensor. measurement location the integraded LCD of During the optical coating of mirrors for laser

the VSM can be used.resonators the typical process pressure lies -3above 2 x 10 mbar. In the VSM transducer a Pirani with extended

range operates the cold cathode only below very low pressures. Further the transition A suitable vacuum transducer must be able Analysis instrumentsbetween the two sensors can be configured to monitor both, process pressure during the Coating plantsto meet applications requirements. The coating as well as the available minimum Process engineeringentire coating process is now monitored by -6pressure of 10 mbar in the vacuum Controlling fine to highthe Pirani. The cold cathode is saved chamber. vacuum applicationsbecause it is active only when the system One of our customers used to work with a Sputtering appliancespumps down to minimum pressure. The Pirani/cold cathode combination gauge, the Vacuum furnacesavailability of the coating plant has improved cold cathode monitoring minimum and significantly.process vacuum. However, the continuous

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Alterations reserved (SLA03)

Application Example

Solution

ApplicationsChallenge

process. At last the processed wafer is as the exact moment when atmospheric Silicon nitride is used in the semiconductor returned to the load-lock. After venting back pressure is reached after venting. The fast industry as an insulating material or for to atmospheric pressure and release of the response time and the precise pressure masking. It is deposited by PECVD (plasma- lock door, the wafer can be removed. For reading of the VSR allow for rapid door enhanced CVD) or LPCVD (low pressure CVD). short lead times, a fast reaction of the release, so very short lock cycles are possible. The feeding of the coating system is done via pressure reading is important. Due to outstanding long-term stability, the a load-lock to continuously keep the vacuum transmitter is essentially maintenance-free.

-2in the process chamber at 10 to 1 mbar.The pressure in the load-lock is monitored by a VSR vacuum transmitter with Piezo / Pirani

Analysis instrumentsThe pressure must be measured accurately combination sensor, which measures 1200 to

Vacuum furnaces-4while evacuating the air lock, in order to take 1 x 10 mbar with high accuracy. Thus, the Coating plants

in the wafer into the process chamber at the lock-pressure for the opening of the process Test of roughing pumps

earliest possible moment to start the coating chamber can be measured accurately, as well Safety switching in vacuum systems

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- 4V S R 1 2 0 0 t o 1 x 1 0 m b a r P i e z o / P i r a n i

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Smartline Vacuum Transducer-4Absolute Pressure 1200 to 1 x 10 mbar

The combination of piezo and Pirani sensor in the digital VSR vacuum transducer offers high precision and excellent resolution in the rough and fine vacuum range.

Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors.

Smartline represents cutting edge technology providing safe, precise and cost effective process control.

Typical Applications

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Load locks

Analysis technology

Coating plants

Vacuum furnaces

Leakage tests

Operational control of roughing pumps

Process engineering

Mass spectrometers

Safety circuits in vacuum systems

Benefits

Wide measuring range due to Digital RS485 interface and combination sensor piezo / Pirani additional analog output signal

1.5-8.58 V or EtherCATHigh accuracy and optimalresolution over the whole Digital adjustment of zero and measuring range atmospheric pressure via

pushbutton or interfaceTwo independent, potential-free relay switch points Large, integrated LCD display with

background illumination Short response time (VSR53DL, VSR54DL)

Excellent reproducibility and long Display flashes in bright red color in term stability case of error, compared to green

ligthing in the normal modeSmall measuring cell volume (VSR53DL, VSR54DL)

3e. g. 2 cm for VSR53D

Easy connection with PLCsMetal sealed stainless steel sensor, suitable for UHV The digital output signalapplications can be transmitted error-free

over long distances (up to 500 m)Filament is protected against oil and solvent vapors by a metal Baud rate 9.6 kBd to 115 kBdscreen

Rugged, EMI-proof metal housingStable measurements due tooptimized temperature Protection class IP54 compensation (VSR53E, VSR54E)

Easily replaceable sensor heads Suitable for Thyracont with stored calibration data 2 and 4 channel display

and control units VD12 / VD10Measurements independent ofgas type above 20 mbar and Vacuum connection using stainlessadjustable gas type correction steel small flange DN 16 ISO-KF orfactors for Pirani sensor conflat flange DN 16 CF-F

LEDs for device status and switch points

VSR

Technical Data

_______________________________________________________________________________________

Measuring Principle Diaphragm piezo resistive / Pirani_______________________________________________________________________________________

Materials In Contact With Vacuum Stainless steel 1.4307, nickel, gold, silicon oxide, tungsten, glass_______________________________________________________________________________________

-4 -4Measurement Range 1200 - 1 x 10 mbar (900 - 1 x 10 Torr), max. overpressure 4 bar abs. _______________________________________________________________________________________

Accuracy 1200 - 10 mbar: ±0.3% full scale-310 - 2 x 10 mbar: ±10% from reading

_______________________________________________________________________________________

Repeatability 1200-10 mbar: ±0.1 % full scale,-310-2x10 mbar: ±2% from reading

_______________________________________________________________________________________

Reaction Time 1200 - 10 mbar: < 30ms (piezo)-310 - 2 x 10 mbar: < 100 ms (Pirani)

_______________________________________________________________________________________

Voltage Supply 20 - 30 VDC_______________________________________________________________________________________

Electrical Connection VSR53D/DL, VSR54D/DL: SubD 15pol., male, lockable

VSR53E, VSR54E: M12 circular connector, female, lockable,

1x A standard, 5pol., 2x D coded, 4 pol._______________________________________________________________________________________

Power Consumption 2.5 W, additionally 0.8 W for EtherCAT / relays /LCD_______________________________________________________________________________________

Operating Temperature +5...+60°C (rel. humidity max . 80% at 30°C noncondensing)_______________________________________________________________________________________

Storage Temperature -40...+65°C_______________________________________________________________________________________

Max. Bake Out Temperature 125°C at the flange_______________________________________________________________________________________

Output Signal 0-10 VDC, measuring range 1.5 to 8.58 VDC, logarithmic,

1V / decade, load resistor > 10 k W (VSR53D/DL, VSR54D/DL)_______________________________________________________________________________________

Serial Interface RS485: 9.6 kBd to 115 kBd, address switch 1 - 16_______________________________________________________________________________________

Switch Points 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA_______________________________________________________________________________________

Vacuum Connection DN 16 ISO-KF (VSR53), DN 16 CF-F (VSR54)_______________________________________________________________________________________

Protection Class IP54 (VSR53E, VSR54E), IP40 (VSR53D/DL, VSR54D/DL)_______________________________________________________________________________________

Weight 220 g (VSR53D)_______________________________________________________________________________________

Product Codes

VSR53D

VSR53DL

VSR53E

VSR54D

VSR54DL

VSR54E

Accessories:

SLN4

SLKUSB

VGR

W1515002

W1515006

W1515020

Replacement sensor heads

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Combi transducer piezo-Pirani, -41200 - 1 x 10 mbar,

DN16 ISO-KF connection, output RS485 and 0-10V

As VSR53D, with LCD display

As VSR53D,output RS485 and EtherCAT

Combi transducer piezo-Pirani, -41200 - 1 x 10 mbar,

DN16 CF-F connection, output RS485 and 0-10V

As VSR54D, with LCD display

As VSR54D,output RS485 and EtherCAT

Plug-in power supply 24 V

Interface converter RS485-USB

TMVacuGraph software for Windows

Measuring cable for VD12 and VD10, shielded, 2 m

As W1515002, 6 m

As W1515002, 20 m

B_VSR53, B_VSR54

Alterations reserved (VSRA03)

99

99

30 69

48

C

VSR53 VSR54

Dimensions in mm

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1,0E-04 1,0E-03 1,0E-02 1,0E-01 1,0E+00 1,0E+01 1,0E+02 1,0E+03

Pressure (hPa)

Outp

ut

(V)

V (V) = log (p(hPa)) + 5.5out

p (hPa) = 10 (V (V) - 5.5)out

Sm linert

Smartline Vacuum Transducer-4Absolute Pressure 1000 to 1 x 10 mbar

The processor controlled VSP with robust helix filament is ideal for precise measurements in the fine vacuum range.



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Benefits

Analysis instruments

Operational control of roughingpumps and vacuum plants

Safety circuits in vacuum systems

Vacuum furnaces

Leakage tests

Freeze drying

Process engineering

Vacuum centrifuges

Durable Pirani helix filament Digital RS485 interface and additional analog output signal

High resolution 1.5-8.5 V or EtherCAT

Good accuracy and excellent Digital adjustment of zero and reproducibility atmospheric pressure via

pushbutton or interfaceTwo independent, potential-free relay switch points Large, integrated LCD display with

background illumination Short response time (VSP63DL, VSP64DL)

Filament is protected against oil Display flashes in bright red color in and solvent vapors by a metal case of error, compared to green screen ligthing in the normal mode

(VSP63DL, VSP64DL)Stable measurements due tooptimized temperature Easy connection with PLCscompensation

The digital output signalSmall volume of the measuring cell can be transmitted error-free

3e. g. 1,8 cm for VSP63D over long distances (up to 500 m)

Metal sealed stainless steel Baud rate 9.6 kBd to 115 kBdsensor, suitable for UHV applications Rugged, EMI-proof metal housing

Easily replaceable sensor heads Protection class IP54 with stored calibration data (VSP63E/VSP64E)

LEDs for device status and Vacuum connection by stainlessswitch points steel small flange DN 16 ISO-KF or

conflat flange DN 16 CF-FSuitable for Thyracont 2 and 4 channel display and control units VD12 / VD10

VSP

Technical Data

_______________________________________________________________________________________

Measuring Principle Pirani_______________________________________________________________________________________

Materials In Contact With Vacuum Stainless steel 1.4307, nickel, tungsten, glass_______________________________________________________________________________________

-4 -4Measurement Range 1000 - 1 x 10 mbar (750 - 1 x 10 Torr), max. overpressure 4 bar abs._______________________________________________________________________________________

Accuracy 1000 - 20 mbar: ca. ±30 % from reading-3 20 - 2 x 10 mbar: < ±10 % from reading

-3< 2 x 10 mbar: < factor 2_______________________________________________________________________________________

Repeatability ±2% from reading_______________________________________________________________________________________

Reaction Time < 100 ms_______________________________________________________________________________________


Electrical Connection VSP63D/DL, VSP64D/DL: SubD 15pol., male, lockable

VSP63E, VSP64E: M12 circular connector, female, lockable,

1x A standard, 5pol., 2x D coded, 4 pol._______________________________________________________________________________________

Power Consumption 2.5W additonally 0.8 W for EtherCAT /relays / LCD_______________________________________________________________________________________

Operating Temperature +5...+60°C (rel. humidity max . 80% at 30°C noncondensing) _______________________________________________________________________________________


Max. Bake Out Temperature 125°C at the flange_______________________________________________________________________________________

Output Signal 0-10VDC, measuring range 1.5 to 8.5 VDC, logarithmic,

1V / decade, load resistor > 10k W (VSP63D/DL, VSP64D/DL)_______________________________________________________________________________________



Vacuum Connection DN 16 ISO-KF (VSP63), DN 16 CF-F (VSP64)_______________________________________________________________________________________

Protection Class IP54 (VSP63E, VSP64E), IP40 (VSP63D/DL, VSP64D/DL)_______________________________________________________________________________________

Weight 190 g_______________________________________________________________________________________

Product Codes

VSP63D

VSP63DL

VSP63E

VSP64D

VSP64DL

VSP64E

Accessories:

SLN4

SLKUSB

VGR

W1515002

W1515006

W1515020


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Pirani transducer -41000 - 1 x 10 mbar,

DN 16 ISO-KF connectionoutput RS485 and 0-10V

As VS63D, with LCD display

As VS63D, output RS485 and EtherCAT

Pirani transducer -41000 - 1 x 10 mbar,

DN 16 CF-F connection,output RS485 and 0-10V

As VSP64D, with LCD display

As VSP64D, output RS485 and EtherCAT




Measuring cable for VD12 and VD10, shielded 2 m

As W1515002, 6 m

As W1515002, 20 m

B_VSP63, B_VSP64

Alterations reserved (VSPA03)

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1,0E-04 1,0E-03 1,0E-02 1,0E-01 1,0E+00 1,0E+01 1,0E+02 1,0E+03

Pressure (hPa)

Outp

ut

(V)

V (V) = log (p(hPa)) + 5.5out

p (hPa) = 10 (V (V) - 5.5)out

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99

30 69

48

C

VSP63 VSP64

Dimensions in mm

Smartline Vacuum Transducer -9Absolute Pressure 1000 to 5 x 10 mbar

The digital combination transducer VSM (Pirani/cold cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.




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Analysis technology

Coating plants andvapor deposition

Vacuum furnaces

Process engineering

Measuring and controlling infine and ultrahigh vacuum

Sputtering plants

Benefits

Wide range sensor Digital RS485 interface and Pirani / cold cathode additional analog output signal

1.819-8.6 V or EtherCATThe cold cathode sensor is automatically controlled Digital adjustment of zero and by the Pirani atmospheric pressure via

pushbutton or interfacePirani with extended range allowsoperation of cold cathode at lower Large, integrated LCD display withpressure and increases lifetime background illumination

(VSM77DL, VSM79DL)Robust sensor design

Display flashes in bright red color in Small volume of the measuring cell case of error, compared to green

3e. g. 9 cm for VSM77D ligthing in the normal mode(VSM77DL, VSM79DL)

Excellent ignition behavior

Easy connection with PLCsInsensitive against inrush of air

The digital output signalTwo independent, potential-free can be transmitted error-freerelay switch points over long distances (up to 500 m)

LEDs for device status and Baud rate 9.6 kBd to 115 kBdswitch points

Rugged, EMI-proof metal housingEasily replaceable sensor heads with stored calibration data Vacuum connection by stainless

steel small flange DN 25 ISO-KF orCorrect pressure readings by conflat flange DN 40 CF-Fmeans of separate gas typecorrection factors for Pirani and cold cathode

Suitable for Thyracont 2 and 4 channel display andcontrol units VD12 / VD10

VSM

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Technical Data

_______________________________________________________________________________________

Measuring Principle Pirani / inverted magnetron, both depending on gas type_______________________________________________________________________________________

Material In Contact With Vacuum Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic_______________________________________________________________________________________

-9 -9Measurement Range 1000 - 5 x 10 mbar (750 - 5 x 10 Torr), max. overpressure 4 bar abs._______________________________________________________________________________________

Accuracy 1000 - 10 mbar: < 30 % from reading-310 - 2 x 10 mbar: < 10 % from reading

-3 -82 x 10 mbar - 1 x 10 mbar: < 25% from reading_______________________________________________________________________________________

-2Repeatability 10 - 1 x 10 mbar: Approx. ±2% from reading-2 -81 x 10 -1 x 10 mbar: Approx. ±7% from reading

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Response Time 200 ms (1s for activating the cold cathode)_______________________________________________________________________________________

Cathode Voltage Max. 2.5 kV_______________________________________________________________________________________


Electrical Connection VSM77D/DL, VSM79D/DL: SubD, 15pol., male, lockable

VSM77E, VSM79E: M12 circular connector, female, lockable,

1x A standard, 5pol., 2x D coded, 4pol. _______________________________________________________________________________________

Power Consumption Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD_______________________________________________________________________________________

Operating Temperature +5...+60°C_______________________________________________________________________________________


Maximum Bake Out Temperature 160°C at flange (electronic detached)_______________________________________________________________________________________

Output Signal 0 - 10 VDC, measuring range 1.819 - 8.6 VDC, log., 0.6 V/decade

load resistor > 10k W (VSM77D/DL, VSM79D/DL)_______________________________________________________________________________________



Vacuum Connection DN 25 ISO-KF (VSM77), DN 40 CF-F (VSM79)_______________________________________________________________________________________

Protection Class IP54 (VSM77E, VSM79E), IP40 (VSM77D/DL, VSM79D/DL)_______________________________________________________________________________________

Weight Approx. 555 g_______________________________________________________________________________________

Product Codes

VSM77D

VSM77DL

VSM77E

VSM79D

VSM79DL

VSM79E

Accessories:

SLN4

SLKUSB

VGR

W1515002

W1515006

W1515020


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Combi transducer Pirani/inverted -9magnetron, 1000 - 5 x 10 mbar,

DN 25 ISO-KF connectionoutput 0 - 10 V and RS485

As VSM77D, with LCD display

As VSM77D, output RS485 and EtherCAT

Combi transducer Pirani/inverted -9Magnetron, 1000 - 5 x 10 mbar,

DN 40 CF-F connection output 0 - 10 V and RS485

As VSM79D, with LCD display

As VSM79D, output RS485 and EtherCAT





As W1515002, 6 m

As W1515002, 20 m

B_VSM77, B_VSM79

Vout /V = 0,6 log (p/mbar) + 6,8

p /mbar = 10 ( (Vout /V – 6,8) / 0,6 )

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1E-09 0,0000001 0,00001 0,001 0,1 10

Pressure (hPa)

Outp

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(V)

13

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13

9

40

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48

VSM77 VSM79

Dimensions in mm

Alterations reserved (VSMA02)

Sm linert

Smartline Vacuum Transducer -10Absolute Pressure 1000 to 5 x 10 mbar

The digital combination transducer VSH (Pirani/hot cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.




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Analysis technology

Coating plants andvapor deposition

Sputtering plants

Measuring and controlling inthe fine and ultrahigh vacuum range

Vacuum furnaces

Process engineering

Space simulation chambers

Benefits

Wide range sensor Digital RS485 interface and Pirani / Bayard Alpert additional analog output signal

1.219-8.6 V or EtherCATThe hot cathode sensor is automatically controlled Digital adjustment of zero and by the Pirani atmospheric pressure via

pushbutton or interfacePirani with extended range allowsoperation of hot cathode at lower Large, integrated LCD display withpressure and increases lifetime background illumination

(VSH88DL, VSH89DL)Excellent accuracy and repeatability Display flashes in bright red color in

case of error, compared to green Low thermal and electrical ligthing in the normal modeinterference with the vacuum (VSH88DL, VSH89DL)process

Easy connection with PLCsSmall volume of the measuring cell

3e. g. 20 cm for VSH88D The digital output signalcan be transmitted error-free

Bayard-Alpert with blowing over long distances (up to 500 m)resistant, yttrium coated double filament Baud rate 9.6 kBd to 115 kBd

Insensitive against inrush of air Rugged, EMI-proof metal housing

Two independent, potential-free Vacuum connection by stainless relay switch points steel small flange DN 40 ISO-KF or

conflat flange DN 40 CF-FLEDs for device status and switch points

Easily replaceable sensor heads with stored calibration data

Correct pressure readings bymeans of separate gas typecorrection factors for Pirani and hot cathode

Suitable for Thyracont 2 and 4 channel display andcontrol units VD12 / VD10

VSH

Technical Data

_______________________________________________________________________________________

Measuring Principle Pirani / Bayard Alpert, depending on gas type_______________________________________________________________________________________

Materials In Contact With Vacuum Stainl. steel 1.4307, Ni, W, Pl, yttrium coated iridium, glass_______________________________________________________________________________________

-10 -10Measurement Range 1000 - 5 x10 mbar (750 - 5 x10 Torr), max. overpressure 4 bar abs._______________________________________________________________________________________

Accuracy 1000 - 10 mbar: < 30 % from reading-810 - 1 x 10 mbar: < 10 % from reading

_______________________________________________________________________________________-2 -2 -8Repeatability ±2 % (10 - 1 x 10 mbar), 5% (1 x10 - 1 x 10 mbar)

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Response Time < 200 ms (2 s while switching BA emission current)_______________________________________________________________________________________

Emission Current Automatic switching 10 µA, 100 µA, 1 mA, 2 mA_______________________________________________________________________________________

Degas Ohmic heating of the anode_______________________________________________________________________________________


Electrical Connection VSH88D/DL, VSH89D/DL: SubD, 15pol., male, lockable

VSH88E, VSH89E: M12 circular connector, female, lockable,

1x A standard, 5pol., 2x D coded, 4pol. _______________________________________________________________________________________

Power Consumption Max. 8 W, additional 1 W f. degas and 0.8 W f. EtherCAT/relays/LCD_______________________________________________________________________________________



Maximum Bake Out Temperature 180°C at the flange (electronic detached)_______________________________________________________________________________________

Output Signal 0 - 10 VDC, measuring range 1.219 - 8.6 VDC, log., 0.6 V/decade

load resistor > 10k W (VSH88D/DL, VSH89D/DL)_______________________________________________________________________________________

Serial Interface RS485: 9,6 kBd to 115 kBd, address switch 1 - 16_______________________________________________________________________________________


Vacuum Connection DN 40 ISO-KF (VSH88), DN 40 CF-F (VSH89)_______________________________________________________________________________________

Protection Class IP54 (VSH88E, VSH89E), IP40 (VSH88D/DL, VSH89D/DL)_______________________________________________________________________________________

Weight Approx. 555 g_______________________________________________________________________________________

Product Codes

VSH88D

VSH88DL

VSH88E

VSH89D

VSH89DL

VSH89E

Accessories

SLN4

SLKUSB

VGR

W1515002

W1515006

W1515020


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Combi transmitter Pirani/Bayert -10Alpert, 1000 - 5 x 10 mbar,

DN 40 ISO-KF connection, output 0 - 10 V log. and RS485

As VSH88D, with LCD display

As VSH88D, output RS485 and EtherCAT

Combi transmitter Pirani/Bayert -10Alpert, 1000 - 5 x 10 mbar,

DN 40 CF-F connection,output 0 - 10 V log. and RS485

As VSH89D, with LCD display

As VSH89D, output RS485 and EtherCAT





As W1515002, 6 m

As W1515002, 20 m

B_VSH88, B_VSH89

Vout /V = 0,6 log (p/mbar) + 6,8

p /mbar = 10 ( (Vout /V – 6,8) / 0,6 )

1,002,003,004,005,006,007,008,009,00

10,00

1,0E-09 1,0E-07 1,0E-05 1,0E-03 1,0E-01 1,0E+01

Pressure (hPa)

Outp

ut

(V)

14

1

141

55

69

48

70

VSH88 VSH89

Dimensions in mm

Alterations reserved (VSHA03)

2 Channel Vacuum Display And Control Unit-10Absolute Pressure 1400 to 5 x 10 mbar

VD12 is an intelligent control unit for applications in apparatus and plant engineering or special equipment construction.

It offers two relay switches, one common or two independent set points.

19inch cassette 14 HP x 3 RE.


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Industrial plant engineering

Process automation

Apparatus engineering, e. g.process control and documentationfor quality assurance

Mechanical engineering

Packaging technology

Chemical process engineering(vacuum mixers)

Benefits

Simultaneous control of Large graphic LCD display with2 measuring channels background illumination

Can be combined with all Comfortable operation by menu-Smartline and 0-10 V Analogline driven operator guidancetransducers

USB interface for process Pressure display in documentation and setpoint mbar, Torr, hPa programming

VacuGraph software: Documentation and evaluation of vacuum processes, programming

2 potential-free relay switches set points, remote control

Two- or three-step control On demand the controller can be configured ex works according to

Robust 19" metal cassette with the customer‘s requirementsfoil-protected front panel

Adjustable g

Universal switched modepower supply 95 - 265 VAC

EMI compatible

as type correctionfactor

VD12

Technical Data

_______________________________________________________________________________________

Suitable Vacuum Transducers All Smartline transducers,

VSC43MV, VSP63MV, VSP64MV, VCP63MV_______________________________________________________________________________________

Display LCD graphic display, background illumination,

resolution 128x64_______________________________________________________________________________________

Display Refresh Rate 2 Hz (0.5 s)_______________________________________________________________________________________

Sample Rate RS485: 12,5 Hz (80 ms) / channel

0-10V: 50 Hz (20 ms) /channel_______________________________________________________________________________________

Power Supply 95 - 265 VAC, 50/60 Hz_______________________________________________________________________________________

Power Consumption Max. 25 W incl. transducer_______________________________________________________________________________________

Fuse 0.8 A/T_______________________________________________________________________________________



Measuring Inputs 1 x RS485, SubD male, 15pole, for Smartline

2 x Amphenol C91E, 6pole, 0-10 V, female, for Analogline_______________________________________________________________________________________

Control Outputs 2 x relay contact, potential free change over switches,

Phoenix strip terminal 6-pole,

lifetime > 300.000 cycles,

4 A / 250 VAC, 2 A / 45 VDC_______________________________________________________________________________________

Serial Interface Mini-USB, Type B, 5pole, female, Virtual Com Port Protocol_______________________________________________________________________________________

Protection Class IP20_______________________________________________________________________________________

Weight 750 g_______________________________________________________________________________________

Product Codes

VD12S2

Complete Sets

VD1253P

VD1263P

VD1277P

VD1288P

Accessories:

W1515002

W1515006

VGR

WUSB0002

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19inch cassette 14 HP x 3 RU, USB, 95 - 265 VAC

-4(1200 - 1 x 10 mbar)VD12 + VSR53D + cable 2 m

-4(1000 - 1 x 10 mbar)VD12 + VSP63D + cable 2 m

-9(1000 - 5 x 10 mbar)VD12 + VSM77D + cable 2 m

-10(1000 - 5 x 10 mbar)VD12 + VSH88D + cable 2 m

Measuring cable RS485 for Smartline transducers,shielded, 2 m

As W1515002, 6 m

VacuGraph Windows software

Interface cable USB, shielded, 2 m

Alterations reserved (12A01)

178.

0

128.4

106.0

70.8

66.0

Dimensions in mm

Sm linert

4 Channel Vacuum Display And Control Unit-10Absolute Pressure 1000 to 5 x 10 mbar

VD10 is an intelligent control unit for application in apparatus and plant engineering or special equipment construction.

Eight potential free relay switches can be mapped to different measuring channels.

Compact metal 19inch cassette21 HP x 3 RU.


• • •

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Industrial plant engineering

Process automation

Coating plants

Vacuum furnaces

Apparatus engineering, e. g.process control anddocumentation for qualityassurance

Special equipment construction

Benefits

Simultaneous control of up to Large graphic LCD display with4 measuring channels background illumination

Can be combined with Comfortable operation by menu-Smartline transducers driven operator guidance

8 potential-free relay switches USB interface for process documentation

2 programmable function keysVacuGraph software:

Universal switched mode Documentation and evaluation ofpower supply 95 - 265 VAC vacuum processes, remote control

Pressure display in On demand the controller can be mbar, Torr, hPa configured ex works according to

the customer‘s requirementsFail safe operation due to theEMC compatible metal housing

Foil-protected front panel

VD10

Technical Data

_______________________________________________________________________________________

Suitable Vacuum Transducers All Smartline transducers,

VSP63MV, VSP64MV, VCP63MV_______________________________________________________________________________________

Display LCD graphic display, background illuminated,

57 x 35 mm, floating point: 2 - 4 digits,

exponential, 2 digits mantissa, 1 digit exponent_______________________________________________________________________________________

Display Refresh Rate 2 Hz (0.5 s)_______________________________________________________________________________________

Sample Rate 5 Hz (200 ms) per channel (RS485-serial interface, digital)

30 Hz (33 ms) per channel (0 - 10 V input, analog)_______________________________________________________________________________________

Power Supply 95 - 265 VAC, 50/60 Hz_______________________________________________________________________________________

Power Consumption Max. 45 W incl. transducer_______________________________________________________________________________________

Fuse 2.0 A / T_______________________________________________________________________________________



Measuring Inputs 1 x RS485, SubD, 15pole, male, for Smartline

2 x 0 - 10 V Amphenol C91E, 6pole, female, f. VSP63MV, VSP64MV_______________________________________________________________________________________

Control Outputs 8 x relay, normally open contact, SP assignable,

Phoenix strip terminal 16-pole,

lifetime > 1.000.000 cycles,

3 A, 250 VAC, 2 A 40 VD_______________________________________________________________________________________

Serial Interface Mini-USB, type B, 5pole, female, Virtual Com Port protocol_______________________________________________________________________________________

Protection Class IP20_______________________________________________________________________________________

Weight 1100 g_______________________________________________________________________________________

Product Codes

VD10S8

Accessories:

W1515002

W1515006

VGR

WUSB0002

•

•

•

•

•

4 channel display and control unit,19" cassette 21 HP x 3 RU,95 - 265 VAC

Measuring cable RS485 for Smartline transducers,shielded, 2 m

As W1515002, 6 m

VacuGraph Windows software

USB interface cable, shielded, 2 m

Dimensions in mm

172.0

12

8.4 10

6.0

106.5

101.6

Alterations reserved (10A02)

TMVacuGraph 11Windows -Software®

Together with Thyracont vacuum TMgauges, the advanced VacuGraph

software serves as the ultimate tool to visualize, analyze and save measurements on your PC in an efficient and easy way.

TMVacuGraph is self-explanatory and suited for all Thyracont instruments with either USB, RS232, RS485 or Bluetooth interface.

Operating Systems: Windows XP/Vista/7/8/10


� Visualize, analyze and document vacuum measurement data

� Automatic data logging of vacuum systems and pumps for quality assurance

� Tool for flexible parameter configuration of vacuum sensors (Smartline) for demanding vacuum applications

� Control software for the securing of production processes

� Support for preventive maintain-ance of vacuum plants

� Data management with export function to Windows applications (Excel, Access,..)

� Continuous leakage test by means of rate-of-rise method

Benefits

� Intuitively operated user interface

� Read out Thyracont measurement gauges and data loggers

� Measurement data exportable as CSV files, e. g. for Microsoft Excel

� Online measurement: track data in real time on your PC

� Several measurement curves can be overlapped, compared, dis-placed and zoomed in for detailed analysis

� Simultaneous communication with a random number of active gauges

� Wide choice of pressure units e. g. mbar, hPa, Torr, psi, atm, ...

� PC based regulation of control units by entering setpoints

� Remote control of vacuum controllers (e. g. keyboard lock/unlock of VD12, controller active/inactive)

� Various languages available

� Convenient leakage calculation: Simply select pressure range with the cursor, enter chamber volume and the leakage rate is automatically calculated

� Comfortable setting of all para-meters of Thyracont measurement gauges (e. g. units, output charac-teristics, gas type correction factors, switch and switchover points etc.)

� Curve illustration and graph headings are easily changeable e. g. for quality assurance records

� Curve parameters are adjustable (legend, grid etc.)

� Logarithmic or linear pressure scales

� Time line either absolute including date and time or relatively to the time of measurement

� Mark, comment and print measure-ment curves

� Either numerical or graphical illustration of measurement values

� Export graphs as pixel or vector graphics

� Firmware Update Assistant:Benefit immediately from newly developed features and update gauge firmware simply yourself

� Automatic VacuGraph updates

VGR

Product Codes

• VGRTMVacuGraph Windows software,

download version

Accessories:

• SLKUSBInterface converter RS485-USBfor Smartline active gauges

• SLKBTInterface converter RS485-Bluetooth, for Smartline active gauges

• WUSB0002 Measuring cable, 2m, for gauges with an USB interface (VD8, VD6, VD12 and VD10)

Features

VD8 VD6 VD12 VD10 VSR VSP VSM VSH

Electronic alignment ü

Adjustment output signal

Cathode control mode

Controller status

Degas

Display unit

Filament behaviour

Gas correction factors

Data logger mode

Maximum operation time

Keyboard lock

Relais configuration

Save/load profiles

Value adjustment

Alterations reserved (VGRA05)

Measurement data entry

* Only with digital transducers

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V a c u u m I n s t r u m e n t s

Vacuum Instruments GmbH

Max-Emanuel-Straße 10

94036 Passau, Germany

Tel.: +49 (0)851 95986 0

Fax: +49 (0)851 95986 40

Email: [email protected]

www.thyracont-vacuum.com

Expertise and Responsiveness: +49 (0)851 95986 28

THYRACONT

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