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ECE609 Physics of Semiconductor Devices M. Fischetti 201D Marcus Hall Department of Electrical and Computer Engineering University of Massachusetts Amherst, MA 01003 Spring 2010

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Page 1: Spring 2010 201D Marcus Hall ECE609 - ecs.umass.edu · Spring 2010. ClassicalMechanics: F = m a fromanunusualperspective Quantum Mechanics is the background of semiconductor physics:

ECE609Physics of Semiconductor Devices

M. Fischetti

201D Marcus Hall

Department of Electrical and Computer Engineering

University of Massachusetts

Amherst, MA 01003

Spring 2010

Page 2: Spring 2010 201D Marcus Hall ECE609 - ecs.umass.edu · Spring 2010. ClassicalMechanics: F = m a fromanunusualperspective Quantum Mechanics is the background of semiconductor physics:

Classical Mechanics:F = ma from an unusual perspective

Quantum Mechanics is the background of semiconductor physics: Semiconductors operate thanks to theexistence of ‘energy gaps’ whose existence stems from the wavelike nature of electrons; many modern devices, suchas junction (injection) lasers, quantum cascade lasers, resonant tunnel diodes principles of operation are based onbasic quantum properities of electrons; gate leakage-current mechanisms of present Si CMOS threten the successof future scaling and stem from quantum mechanical tunnneling.... Thus we must revisiti quantum mechanics.The needs for a nonclassical view of Nature will be reviewed in the next lecture. Here we want to start with apreamble, apparently disconnected: We want to see how Classical Mechanics can be reformulated in a very abstractway which will allow us to draw a close connection between the formalism of Classical Mechanics so reformulatedand the methematical foundations Quantum Mechanics.

• Define a physical system with N degrees of freedom via canonical coordinates qi and conjugate momentapi (i = 1, N).Examples:

1. q1, q2, q3 = x, y, zp1, p2, p3 = px = mvx, py = mvy, pz = mvz for a singke particle of mass m in 3D.

2. q1, q2, q3 = x1, y1, z1q4, q5, q6 = x2, y2, z2p1, p2, p3 = px,1, py,1, pz,1p4, p5, p6 = px,2, py,2, pz,2 for 2 particles in 3D

3. q1 = φ and p1 = Iωφ = φ for a rigid body in 2D

• Let’s define the Poisson brackets between two physical ‘observables’ A(q, p) and B(q, p) as follows:

A,B =N∑i=1

(∂A

∂qi

∂B

∂pi− ∂A

∂pi

∂B

∂qi

)(1)

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Note that qi, qj = 0 pi, pj = 0 qi, pj = δij .

• Let’s define the Hamiltonian function(al): H(q, p) = T (q, p) + V (q, p) whete T and V are, respectively,the kinetic and potential energy of the system.Examples:

1. For N particles (i = 1, N is now the particle index!) of mass m and charge e interacting via Coulomb force:

H(q, p) =N∑i=1

p2i2m

−N∑

j =i,j=1

e2

4πε0|qi − qj|2

. (2)

2. For a free rigid body in 2D:

H(φ,Lφ) =1

2Iω2φ =

L2φ

2I. (3)

• Equations of motion: It can be shown (starting from the Lagrangian formulation) the the time evolution ofthe dynamic variable A(q, p) is given by the equation:

dA

dt= A,H +

∂A

∂t. (4)

In particular (for the canonical coordinates):

dqi

dt= qi, H =

∂H

∂pi(5)

dpi

dt= pi,H = − ∂H

∂qi(6)

Example:For a particle in 1D:

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dx

dt=

∂x

∂x

∂H

∂p− ∂x

∂p

∂H

∂x=

∂H

∂p=

∂p

(p2

2m

)=

p

m(7)

so that p = mv, and:

dp

dt=

∂p

∂x

∂H

∂p− ∂p

∂p

∂H

∂x= − ∂H

∂x= − ∂V

∂x= F (8)

so that, using eq. above, ma = F ... finally!

• An important note on symmetry:If the Hamiltonian is invariant under a transformation, an associated conjugate momentum is a ‘constant ofmotion’ (that is, is conserved). Examples:

1. Hamiltonian independent of x (that is, invariant under translations along x) → momentum px is conserved2. Hamiltonian independent of p (that is, invariant under translations along px in momentum (Fourier) space)

→ coordinate x is conserved (rigid-body, it does not move by translation)3. Hamiltonian independent of φ (that is, invariant under rotations) → angular momentum Lφ is conserved4. Hamiltonian explicitly independent of t (that is, invariant under time-translations) → total energy E is

conserved

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The crisis of Classical Mechanics

At the end of the XIX century Physics were entirely (and apparently succesfully) based on Newtonian(classical) mechanics – CM – and the electromagnetic – EM – theory of Maxwell’s equations. The former hadbeen exceptionally succefull in explaining celestial phenomena occurring the Solar System, leading to calculationsof the orbit of planets and moons which had an unprecedented high degree of agreement with observations (thinkof Le Verrirer’s prediction of the existence of Neptune or of Delaunay’s explanations of several features of the verycomplicated lunar orbit). EM had reached its climax in Maxwell’s mathematical proof of Faraday’s ‘hunch’ thatligh was nothing but a Hertzian wave. So, CM and EM seemed to be able to make us predict the future: AsLaplace had stated, if a demon told us the position and velocity of all the particles in the Universe at a given time,nothing would prevent us from solving Newton’s and Maxwell’s equations up to the far distant future without anyuncertainty about the outcome. It was the pinnacle of the mechanistic ideal of the Scientific Revolution whichstarted in the XVII century. Yet, at the turn of the XX century there were several ‘small nagging’ issues which didnot quite fit the accepted theories: The spectrum emitted by a black body, the nature of the photoelectric effect,the structure of the just-discovered atoms, and a few more peculiar experimental observations, such a Comptonscattering between an electron and light. Let’s consider the first three, and see what sort of monumental changeshad to be made to the neat and cozy picture of CM and EM Physics.

• Black Body spectrum: The ultraviolet catastrophe.

– Classical electromagnetic theory and equipartition imply that the spectrum of a black-body should diverge atshort wavelength. That is: if n(ν) is density of modes with frequency in ν, ν+ dν, then n(ν) ∝ ν2 (Jeans’law)

– Experiments show, instead, n(ν) ∼ e−aν/(kBT )– Planck obtained the experimental spectrum assuming that:1. the energy in each mode proportional to the ν of mode: Eν = hν with h a new (Planck) constant of

nature2. energy is exchanged between waves and the walls of the black-body only via ‘chunks’ (‘quanta’) of size∆Eν = hν

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• The photoelectric effects: Nothing works correctly...!

– Hitting a solid with light, electrons should be emitted with energy proportional to the intensity of the light...– Instead, the electron energy grows with decreasing wavelength of the light. The light-intensity determines the

number of emitted electrons– Einstein explained experiments with Planck’s quanta (1905, Nobel prize in 1921)

• Structure and spectra of atoms: why don’t electrons fall into the nucleus?

– After Rutherford’s experiments, atoms were viewed as electrons orbiting the nucleus. But Maxwell equationspredicted that the electrons should radiate their energy and fall into the nucleus.

– Planck’s quanta can explain this as well, although more is needed to explain the spectra

• There’s more (Compton scattering, double-slit experiment,...). See any textbook on QM.

• Partial conclusion:Light behaves sometimes as wave (after all, Maxwell equations are valid in most cases), sometimes as a particle(photon)... Confusing...

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Quick review of Quantum Mechanics

• de Broglie’s assumption to explain atomic spectra (among other things):Why not assume that all forms of matter behave as particles or waves, depending on the situation? For aparticle of mass m the wavelength λ of the associated ‘pilot wave’ will be give by:

p = mv =h

λ(9)

This may explain discrete electron ‘orbits’ around the nucleus...

• Schrodinger equation: Explain structure of atom as a ‘boundary value’ problem.Start from the classical Hamiltonian:

H =p2

2m− e2

4πε0r, (10)

equate H to ih∂/∂t (time translations are generated by energy) and replace p with −ih∇ (space translationsare generated by momentum). Then solve the wave-equation for the ‘wavefunction’ Ψ(r, t):

HΨ(r, t) =

[− h2∇2

2m− e2

4πε0r

]Ψ(r, t) = i h

∂Ψ(r, t)

∂t. (11)

If H is time-independent, set Ψ(r, t) = ψ(r)e−iEt/h with:

− h2

2m∇2ψ(r) + V (r)ψ(r) = Eψ(r) (12)

(time independent Schrodinger equation)

• What’s the wavefunction?Copenhagen interpretation (Bohr, Born):

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|Ψ(r, t)|2dr = probability of finding an electron in a volume dr around r at time t. Of course:

∫ρ(r, t) dr =

∫|Ψ(r, t)|2 dr = 1 (13)

and from Schrodinger equation one can show that:

∂ρ

∂t+ ∇ · S = 0 , (14)

where S = ih2m[Ψ∇Ψ∗ −Ψ∗∇Ψ] is the ‘probability density current’

• A simple example: An 1D electron in a constant potential V (z) = V0:

− h2

2m

d2ψ(z)

dz2= (E − V0)ψ(z) . (15)

Put ψ(z) = eikz and find k = ±[2m(E−V0)]1/2/h or E = h2k2/(2m), so that hk is the z-component

of the electron momentum.

• Another simple example: Particle in a box.Potential of a ‘quantum well’:

V (z) =

∞ for z ≤ 00 for 0 < z < L∞ for z ≥ L

. (16)

Boundary conditions:

ψ(z) = 0 for z = 0 and z = L , (17)

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since the electron cannot be in the ‘forbidden’ regions. Schrodinger equation:

− h2

2m

d2ψ(z)

dz2= Eψ(z) for − L/2 < z < L/2 , (18)

with solutions sin(knz) only for discrete values of kn = πn/L:

ψ(z) =

(2

L

)1/2sin

(nπz

L

)(19)

with En =n2h2π2

2mL2.

The energy depends on the boundary conditions at L, like the note emitted by a vibrating violin string dependson where one places the finger.

• A tunneling problem: Potential of a ’barrier’:

V (z) =

0 for z ≤ 0V > 0 for 0 < z < L0 for z ≥ L

. (20)

General solution for electron of energy E < V coming from the left, partially reflected back and partiallytransmitted:

ψ(z) =

Aeikz + Be−ikz for z ≤ 0

Ceκz +De−κz for 0 < z < L

Feikz for z ≥ L

, (21)

with k = (2mE)1/2/h, κ = [2m(V − E)]1/2/h.Using continuity of ψ(z) and dψ(z)/dz at z = 0 and z = L one can find the coefficients A, B, C, D, andF .The ratio T = |F |2/|A|2 is the ‘transmission coefficient’, the ratio R = |B|2/|A|2 is the ‘reflectioncoefficient’. Note that, classically, one would expect T = 0.

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• A curiosity: Heisenberg matrices vs Schrodinger wavefunctions.

– Only ‘expectation values’ of observables A matter:

< A > = < ψ|A|ψ > =

∫ψ∗(r) A(r) ψ(r) dr (22)

– In Schrodinger ‘representation’ wavefunctions evolve in time, observables stay put...

< A(t) >S = < ψ(t)|A|ψ(t) > =

∫ψ∗(r, t) A(r) ψ(r, t) dr (23)

For H not explicitly dependent on time the solution of Schrodinger eq. is:

|ψ(t) > = e−iHt/h |ψ(0) > (24)

– In Heisenberg’s ‘representation wavefunctions (or ‘states’) stay put, observables (‘operators’ which are matricesin infinite-dimension spaces) evolve with time with equations of motion which are just the Hamilton equationsof classical mechanics, but with ‘commutators’ replacing the Poisson brackets: for an observable not explicitlydependent on time

dA

dt= − i

h[A,H] , (25)

where [A,B] = AB − BA (in general not zero, see rotations about two orthogonal axes, for example).Then:

< A(t) >H = < ψ)|A(t)|ψ) > =

∫ψ∗(r) A(r, t) ψ(r) dr (26)

For H not explicitly dependent on time the solution of Heisenberg eq. is:

A(t) = eiHt/h A(0) e−iHt/h (27)

– It can be shown that the two representations are fully equivalent.

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– Canonical quantization: Note how the Heisenberg equation of motion for the operator A can be obtainedfrom the classical Hamilton equation of motion by replacing the Poisson bracket ..., ... with −i/h timesthe commutator [..., ...].

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• More on the Copenhagen interpretation.

1. To each physical system we associate a Hamiltonian and a linear (vector) space of ‘states’ (or wavefunctions)called ‘Hilbert space’.

2. Dynamic variables (observables such as energy, linear momentum angular momentum, etc.) are operators (likematrices) on this linear space.

3. If a state |ψ > is such that A |ψ > = a |ψ >, (i.e., the state |ψ > is an eigenvector of A with eigenvaluea) a measurement of the observable A on the system in the state |ψ > will give the reading a. For example,Schrodinger equation H |ψ > = E |ψ > says that the state |ψ > has energy E.

4. If the system is in a linear superposition of eigenvectors |ψ >= c1|ψ1 > +c2|ψ2 >, with A|ψ1 >=a1|ψ1 > and A|ψ2 >= a2|ψ2 > then a measurement of A will give:

< ψ|A|ψ > = |c1|2a1 + |c2|2a2 (28)

i.e. the result ai will occur with probability |ci|2.Note: We cannot predict with certainty which result we will obtain from the measurement. Even if werepeat the same measurements on many systems identically ‘prepared’, we shall not obtain always the sameresult. But after the measurement, the system will have ‘collapsed’ into one of the eigenstates. In a way, themeasurement perturbs the system.

5. A system cannot be in an eigenstate of two non-commuting observables A and B (that is, [A,B] = 0). Inthis case A and B are said to be ‘complementary’ observables. They cannot be measured simultaneously.More precisely,

∆ < A > ∆ < B > = 0 , (29)

where ∆ < A >= [< ψ|A2|ψ > − < ψ|A|ψ >2]1/2.In particular,

[qi, pj] = ihδij → ∆ < qi > ∆ < pi > ≥ h/2 (30)

(Heisenberg uncertainty principle).Note: A system cannot be thought of having property A and property B at he same time, since only our actof measuring will determine which property the system will have...(!?)

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• Perturbation theory I: Stationary (that is, time-independent).

– We must solve the problem

(H0 + αH) |φn > = Wn |φn > (31)

which is too complicated. However, α is small and we know how to solve H0|ψn >= En|ψn >.– Then, one can show that the perturbed eigenvalues are:

Wm = Em + α Hmm + α2∑n =m

|Hnm|2Em − En

+ o(α3) , (32)

(where Hmn =< ψn|H|ψm >=∫ψ∗n(r)Hψ(r)dr) and the perturbed eigenfunctions are:

|φm > = |ψm > + α∑n =m

Hnm

Em − En|ψn > (33)

Partial proof. Write |φn >= |ψn > +α|φ(1)n > +α2|φ(2)n > +... and Wn = En + αE(1)n + α2E

(2)n + ... and insert

into the initial Schrodinger eq.:

(H0 + αH) (|ψn > +α|φ(1)n > +α2|φ(2)n > +...) = (En+αE

(1)n +α

2E(2)n +...) (|ψn > +α|φ(1)n > +α

2|ψ(2)n > +...)(34)

Equating terms of the same order in α we get:

H0|ψn >= En|ψn > to order α0; this is the unperturbed problem (35)

H|ψn > +H0|φ(1)n > = E

(1)n |ψn > +En|φ(1)n > to order α . (36)

Now put |φ(1)n >=∑i ani|ψi > so that this equation becomes:

H|ψn > +H0∑i

ani|ψi > = E(1)n |ψn > +En

∑i

ani|ψi > . (37)

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Now multiply by < ψl| and integrate:

Hln + Elanl = E(1)n δln + Enanl (38)

For l = n we get immediately E(1)n = Hnn. For l = n we get

anl =Hln

En − El(39)

• Perturbation theory II: Time-dependent.

– Now we must solve the following problem in which the perturbation term is time-dependent:

[H0 + H(t)] |Φ > = ih∂|Φ >

∂t(40)

and we know that H0|ψn >= En|ψn > and |Ψn(t) >= e−iEnt/h|ψn >.– Write |Φ(t) > ∑

an(t)|Ψn > so that ∂|Φ(t) > /∂t =∑

n[an − (i/h)Enan]|Ψn >. Inserting intooriginal equation we get:

[H0 +H(t)]∑n

an(t)|Ψn > =∑n

[ihan + Enan]|Ψn > , (41)

or ∑an(t)(H0 − En)|Ψn > +

∑n

[anH(t)− ihan]|Ψn > = 0 . (42)

The first term vanishes. Multiplying by < Ψl| and integrating (recalling that < Ψl(t)|Ψn(t) >= δln):∑n

[an(t)Hln(t)ei(El−En)t/h − ihanδln] = 0 . (43)

Put hωln = El − En, so this equation becomes:

ihal =∑n

an(t) Hln eiωlnt . (44)

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Now assume 1. that at t = 0 the system was in the state |ψj > (so that aj(0) = 1, all other a(0)’svanish) 2. the term H is weak so that the coefficients an in the rhs can be taken as constant. Then:

aj(t) ≈ 1 − i

h

∫ t

0Hjj(t) dt → 1 − i

hHjj t for constant H turned on at t = 0 (45)

ak(t) ≈ − i

h

∫ t

0Hkj(t) e

iωkjt dt → Hkj

hωkj(1 − e

iωkjt) for k = j . (46)

Now the probability of finding the system in the state k = j at time t will be Pk(t) = |ak(t)|2. The‘transition rate’ (that is, probability per unit time) will be Pk(t)/t, which is:

1

t

∣∣∣∣∣ Hkj

hωkj( 1 − e

iωkjt)

∣∣∣∣∣2

=

∣∣∣∣∣ 2Hkj

Ek − Ej

∣∣∣∣∣21

tsin

2(Ek − Ej

2ht

)= |Hkj|2

4 sin2[(Ek − Ej)t/(2h)]

[Ek − Ej]2t.

(47)Now

limt→∞

4 sin2[(Ek − Ej)t/(2h)]

[Ek − Ej]2t=

hδ(Ek − Ej) , (48)

so that:

transition rate j → k =2π

h|Hkj|2 δ(Ek − Ej) , (49)

which is the famous Fermi Golden Rule. For a harmonic perturbation, H(t) = H(0)e−iωt, one gets asimilar expression:

S(j → k) =2π

h|Hkj|2 δ(Ek − Ej − ω) , (50)

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Crystals

• Definitions

– Crystals are regular arrangements of atoms which look identical when viewed from 2 points

r and r′ = r+ Rl , (51)

whereRl = l1 a + l2 b + l3 c (52)

is a ‘translation operation’ with integers l1, l2, and l3 and with ‘fundamental translation vectors’ a, b, andc. The vector Rl is also called a lattice vector.

– A cell is the parallelepiped formed by the fundamental translation vectors. Note that the repetition of a cellobtained by applying a translation operation fills the entire space.

– The primitive or Wigner-Seitz cell is the cell having the smallest possible volume, given by Vcell = |a×b·c|.It can generated by connecting all lattice points with straight lines, bisecting these lines with planes normal tothe lines, and considering the volume enclosed by these planes.

– A lattice is the set of all points r′ generated by translation operations. The symmetry properties of a latticeallow the existence of 14 types of Bravais lattices (those generated by Wigner-Seitz cells).

– A basis is the set of the coordinates of all atoms within a primitive cell.Logically the crystal structure is given by:

crystal structure = lattice + basis (53)

– An arbitrary plane will intersects the axes a, b, and c at distances (A,B,C) (in units of the lengths(a,b,c), the lattice constants). Take the reciprocal numbers (1/A, 1/B, 1/C) and find the smallest integers(l,m, n) having the same ratios as the reciprocals. The integers l,m, n are the Miller indices of the plane.

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a

bca

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4 a

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• Cubic and zinc-blend lattices

– Most semiconductors of interest have a ‘tetragonal’ coordination (resulting from the sp3 hybridization of thebonding orbitals). This yields a face centered cubic (fcc) lattice.

– The WS cell of fcc lattices is generated by the fundamental vectors

a =a

2(x+ y) , b =

a

2(y + z) , c =

a

2(z+ x) . (54)

– Point Group.There are 24 fundamental symmetry transformation which map the cubic lattice onto itself (the so-calledTd sub-group): All permutations of the 3 coordinates (6 operations) times sign-swapping two of them (4operations).Accounting for inversions, there are 48 symmetry operations in all (the so-called Oh group).

• Translation invariance

– Because of the translational symmetry of the crystal, any of its physical property, described for example bysome function f(r), must not change under translation:

f(r+ Rl) = f(r) , (55)

for any Rl.– The periodicity of f suggests that Fourier transforms may be useful:

f(r) =∑Kh

AKheiKh·r, (56)

where the Fourier coefficients AKhare given by:

AKh=

1

Ω

∫Ωf(r)e−iKh·r dr, (57)

The volume Ω is the volume of the WS-cell and h is an integer labeling the wavevectors K.

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– Now let’s use the periodicity:

f(r+ Rl) =∑

Kh AKheiKh·(r+Rl) = f(r) , (58)

so we must have eiKh·Rl = 1 or

Kh · Rl = 2π times an integer (59)

– Any vector of the form:

Kh = h1A + h2B + h3C , (60)

with

A =2π

Ωa × b B =

Ωb × c C =

Ωc × a , (61)

satisfies the conditions. The vectors A, B, and C are called reciprocal lattice vectors and they define thereciprocal lattice. They are usually labeled as G-vectors.

– The WS-cell of the reciprocal lattice is called the Brillouin Zone (BZ) of the lattice.– fcc lattices have bcc reciprocal lattices (and vice-versa).– Bloch theorem:

The wavefunction of electrons in the (periodic) crystal potential can be labeled by a vector-index k andsatisfies the condition:

ψ(k, r+ Rl) = eik·Rl ψ(k, r) , (62)

which is equivalent to the condition:

ψ(k, r) = eik·r

uk(r) , (63)

where uk(r) is periodic:

uk(r+ Rl) = uk(r) . (64)

Look at this expression as of a plane-wave (a free electron) modulating a periodic function describing the effectof the (periodic) ionic potential. However, since replacing k with k+G leaves the wavefunction unchanged,k is a crystal momentum, not necessarily directly related to the ‘real’ electron momentum.

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Note that while ψ(r) is not periodic, the only physically meaningful quantities we can derive from it areperiodic. For example, the charge density, e|ψ(k, r)|2 is periodic:

|ψ(k, r+Rl)|2 = ψ∗(k, r+Rl) ψ(k, r+Rl) = e

−ik·(r+Rl) u∗k(r+Rl) e

ik·(r+Rl) uk(r+Rl) =(65)

u∗k(r) uk(r) = e−ik·r u∗k(r) eik·r uk(r) = |ψ(k, r)|2 . (66)

– Bragg reflections:Let’s discuss a little bit the meaning of the vector k. Let’s Fourier transform the crystal potential:

Vlat(r) =∑G

VG eiG·r . (67)

Let’s assume that a free electron (characterized by a plane wave of wavevector k)‘enters’ the crystal and feelsthe lattice potential as a perturbation. The effect of this perturbation on the wavefunction |k > = |ψk >above will be that of ‘scattering’ the wave to a new direction and wavelength, so to a new wavevector k′. Thematrix element for this process is:

< k′|V |k > =∑G

VG δk−k′−G , (68)

which vanishes unless k + G = k′. Assuming that the collision between electron and lattice is elastic (therecoil of the lattice, much much heavier, will be ignored), we can assume k = k′, so that, squaring theequation above:

G2= −2 k · G , (69)

which is the condition for Bragg reflection. It also determines the edge of the BZ. Therefore, the electronwavevector k can be treated as a ‘quasi-momentum’, but it is restricted to be inside the BZ: As soon as theelectron wavelength approaches the BZ boundary, Bragg reflections will ‘destroy’ the wave.

– From the Bloch theorem and the condition for Bragg reflections, we also saw that waves with crystalmomentum hk and hk+ hG are equivalent. We can view this as due to the fact that the propagating wave

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carries with it all the diffracted components eiG·r as well.However, the energy of the wave will depend on which G we are considering, as it will be seen when dealingwith energy bands in solids.

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Energy bands in crystals

• Coupling atoms.Read ”intuitive approach” (example with Li atoms) in Colinge-Colinge text

• The Kronig-Penney model.

1. Assume a periodic potential constituted by many wells of width a and depth U0 separated by barriers of widthb. This is a ‘crystal’ with cell of size a+ b.Let’s choose x = −b and x = a as cell boundaries, the well occupying the region 0 < x < a, the barrierthe region −b < x < 0.

2. The Schrodinger equation we must solve takes the form:

d2ψa

dx2+ α

2ψa = 0 for 0 < x < a (70)

andd2ψbdx2

+ β2ψb = 0 for − b < x < 0 (71)

with α = (2mE)1/2/h and

β =

iβ−; β− = [2m(U0 − E)]1/2 0 < E < U0β+; β+ = [2m(E − U0)]

1/2 E > U0. (72)

3. It’s convenient to write the solutions as:

ψa(x) = Aa sin(αx) + Ba cos(αx) (73)

ψb(x) = Ab sin(βx) + Bb cos(βx) (74)

(later replacing sin and cos with sinh and cosh if necessary).

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4. To find the coefficients Aa, Ba, Ab, and Bb we have four boundary conditions:

continuity

ψa(0) = ψb(0)dψadx

∣∣∣0=

dψbdx

∣∣∣0

. (75)

periodicity

ψa(a) = eik(a+b) ψb(−b)dψadx

∣∣∣a= eik(a+b)

dψbdx

∣∣∣−b . (76)

which implyBa = Bb (77)

αAa = βAb (78)

Aa sin(αa) + Ba cos(αa) = eik(a+b) [−Ab sin(βb) + Bb cos(βb)] (79)

αAa cos(αa) − αBa sin(αa) = eik(a+b) [βAb cos(βb) + βBb sin(βb)] (80)

Using the first two equations we can eliminate Ab and Bb from the last two:

Aa[sin(αa) + (α/β)eik(a+b)

sin(βb)] + Ba[cos(αa) − eik(a+b)

cos(βb)] = 0 (81)

Aa[α cos(αa) − αeik(a+b)

cos(βb)] + Ba[−α sin(αa) − β eik(a+b)

sin(βb)] = 0 (82)

5. We have reduced the problem to the solution of a linear homogeneous system in two unknowns. A non-zerosolution exists only if the determinant of the matrix above vanishes. This simplifies to:

− α2 + β2

2αβsin(αa) sin(βb) + cos(αa) cos(βb) = cos[k(a+ b)] (83)

6. This equation provides implicitly the ‘dispersion’ E(k).‘Energy gaps’ arise whenever the magnitude of the lhs exceeds unity.The dispersion can be analyzed inside the BZ (i.e. for −π/(a + b) < k ≤ π/(a + b) since a + b is the

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fundamental translation ‘vector’ and Gn = 2πn/(a + b) are the reciprocal lattice ‘vectors’. Alternatively,one can plot it in an ‘extended zone’ picture.

7. Some general considerations:1. The dispersion is quasi-parabolic near the zone center (electron- or hole-like).2. The dispersion is ‘flat’ (zero slope) at the zone-edge.3. The dispersion is more and more free-electron like at higher energies (why?).

• General formulation.

– We want to solve the Schrodinger equation

− h2∇2

2mψ(r) + Vlat(r)ψ(r) = E ψ(r) . (84)

– Since the lattice potential Vlat(r) is periodic, we use Bloch theorem and consider the wavefunction

ψ(k, r) = eik·r∑G

ukG eiG·r (85)

– Inserting into the Schrodinger equation:

h2

2m

∑G

|k+G|2ukGei(k+G)·r

+ Vlat(r)∑G

ukG ei(k+G)·r

= E(k)∑G

ukG ei(k+G)·r

(86)

– Now use a ‘standard technique’ to solve equations in Fourier-transformed form: Multiply by e−i(k+G′)·r andintegrate over the whole volume of the crystal:

[h2

2m|k+G|2 − E(k)

]ukG +

∑G′

VGG′ ukG′ = 0 . (87)

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This linear homogeneous problem has nontrivial solutions only if the determinant of the coefficients vanishes:

Det

∣∣∣∣∣∣∑G′

[h2

2m|k+G|2 − E(k)

]δGG′ + VGG′

∣∣∣∣∣∣ = 0 . (88)

– The term VGG′ can be simplified using its periodicity:

VGG′ =1

V

∫Ve−iG·r

Vlat(r) eiG′·r

dr , (89)

assuming the wavefunctions have been properly normalized to the volume V of the crystal.Now Vlat is the sum of the ionic potentials in the WS cell. If the ions in the WS cell are at τα (α = 1, Nions),then:

Vlat(r) =∑l,α

ω(r − Rl − τα) . (90)

Then, putting G′′ = G − G′:

VGG′ =1

V

∑l,α

∫Ve−iG′′·r

ω(r−Rl−τα) dr =1

V

∑l,α

e−iG′′·Rl

∫Vω(r−Rl−τα) e−iG

′′·(r−Rl) dr .

(91)Now let’s put r′ = r − Rl − τα as dummy integration variable:

VGG′ =1

V

∑l,α

e−iG′′·Rl

∫Vω(r′) e−iG

′′·(r′+τα) dr′ = (92)

∑α

e−iG′′·τα 1

∑l

e−iG′′·Rl

∫Vω(r′) e−iG

′′·r′dr′ . (93)

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Since the ionic potential ω(r) is short-range, it dacays very quickly at large distances and we can neglect thecontribution to the integral coming from points r′ outside the WS cell:∫

Vω(r′) e−iG

′′·r′dr′ ≈

∫Ωω(r′) e−iG

′′·r′dr′ . (94)

Since∑

l,α e−iG′′·Rl = N , the number of cells in the volume V , we finally get:

VGG′ =∑α

e−i(G−G′)·τα 1

Ω

∫Ωω(r) e−i(G−G′)·r dr = S(G − G′) ωG−G′ . (95)

The factor S(G) depends only on the location of the ions within the WS cell and it’s called ‘structure factor’.The factor ωG is the Fourier transform of the atomic potential within the WS cell and it’s called ‘form factor’.

– A numerical solution of this problem can be obtained by considering a large-enough number, NG, of G-vectors.The NG eigenvalues, En(k) give the dispersion in NG bands, the NG eigenvectors the wavefunctions.

– The problem is: What is Vlat (or, equivalently, ω(r))? Even for the 2-electron He atom, the self-consistentpotential (modified by the electron charge which is modified by the potential...) requires approximations(Hartree-Fock).Also, numerically one needs as many as 106 G-vectors to account for the core of the ions.

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• A practical approach: Empirical pseudopotentials.

– The full ionic potential is too complicated. But do we need it all? After all, the core electrons are (to a largeextent) unaffected by the presence of the crystal. And we care only about the bonding states describing thevalence electrons and the excited states just ‘above’ (in energy) them.

– Since the core electrons feel the short-distance (i.e., short wavelength, large G) features of the ionic potentialnear the core, we can consider ωG only for the first, smallest G vectors. This will represent correctly thepotential and the wavefunctions outside the ionic cores.This approximated potential is called pseudopotential and the wavefunctions pseudo-wavefunctions.In principle, we should find form factors such that the wavefunction and its radial derivative at the coreinterface matches the ‘exact’ wavefunction and its derivative. In practice, one can treat the form factors ωGas fitting parameters, calibrated to experimental data about the band structure.

– For semiconductors of the diamond structure (as Si, Ge, C) symmetry considerations imply that ωG dependsonly on the magnitude G of G. Only G =

√3,

√8, and

√11 are required to obtain excellent fits to

experimental data. For ionic compound semiconductors of the group-III and group-V elements (GaAs, InAs,GaP, etc.) require also ω√

4and the presence of two different ions in the cell renders the form factors complex

numbers, so that 8 real numbers are required.

• Equations of motion for electrons in a crystal.

– How do electrons move in these complicated energy bands when we add an external potential Vext(r, t) tothe lattice potential?

– Envelope approximation: By the Bloch theorem, we know that

ψ(k, r) = eik·r∑G

ukG eiG·r (96)

It can be shown that if we stick to one band only, with dispersion E(k), if the external potential is not too

strong, and if we ignore changes to the Bloch component u(r) =∑

G ukG eiG·r, the wavefunction in a

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small-enough neighborhood of k0 can be approximated as

ψ(k, r) = ψ(r)∑G

uk0G eiG·r (97)

and the ‘envelope’ ψ(r) satisfies the wave equation

[E(−i∇) + eVext(r)] ψ(r) = E ψ(r) . (98)

– Semiconductors are characterized by full valence bands, empty conduction bands, and a relatively small energygap between the valence and conduction bands. ‘Doping’ results in the introduction of excess electronoccupying the bottom of the conduction band, or the elimination of some electrons from the valence bands(which is viewed as the introduction of holes occupying the top of the valence band). Thus, the ‘action’happens at the top of the valence band and/or at the bottom of the conduction band. At these extrema ofthe bands we can expand the dispersion as:

E(k) = E(k0) +1

2(k − k0) · ∇2

kE(k)∣∣∣k0 · (k − k0) + ... (99)

(the first-order term in ∇E vanishes since we are at an extremum of the band). Thus, replacing the‘momentum’ (measured from the band extremum k0)

k − k0 → −i∇ (100)

thanks to the envelope approximation,

E(−i∇) = E(k0) +1

2(−i∇)·∇2

kE(k)∣∣∣k0 ·(−i∇) + ... = E(k0)−

1

2

∑ij

∂E

∂ki∂kj

∣∣∣k0 ∂

∂xi

∂xj+ ...

(101)

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– Effective mass: Let’s set E(k0) = 0 by a suitable choice of the reference energy and let’s measure k fromk0. Let’s ignore higher-order terms in the expansion above. Let’s define the inverse ‘effective mass’ tensor1/m∗

ij via:1

m∗ij

=1

h2∂E

∂ki∂kj

∣∣∣k0 (102)

Then

E(k) ≈∑ij

h2kikj

2m∗ij

(103)

and the envelope wave equation becomes:−

∑ij

h2

2m∗ij

∂xi

∂xj+ eVext(r)

ψ(r) = E ψ(r) , (104)

which is beginning to look like a ‘conventional’ Schrodinger equation.For GaAs, the effective mass in the CB is actually a scalar (since the first CB is formed by s-type orbitals),m∗ ≈ 0.063 m0. For Si, the first CB has ellipsoidal equienergy surfaces, so that the effective mass tensoris diagonal along the [100] crystal direction:

m =

mL 0 0

0 mT 00 0 mT

, (105)

where mL ≈ 0.91 m0 and mT ≈ 0.19 m0

– By the ‘correspondence principle’ of Quantum Mechanics we know that the center of motion of a wave packetcan be obtained from classical mechanics by considering the quantum Hamiltonian and rendering ‘classical’ byreplacing −ih∇ with the momentum hk. Thus, we can consider the classical Hamiltonian

H(p, r) = E(p/h) + eVext(r). (106)

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From the Hamilton equations of motion:

v =drdt

=1

h∇kE(k) , (107)

anddkdt

=e

h∇Vext(r) = −e F . (108)

– Note: We have been able to eliminate completely a very complicated potential, Vlat, simply by replacing thefree electron mass m0 with an effective mass tensor. This is an extremely powerful results, but its limitationsshould be kept in mind.

– For holes the picture is the same: The top of the VB has a ‘negative’ effective mass. However, talking about’missing electrons’ (‘holes’) is more convenient and this is accomplished by considering these fictitious particlesas positively charged (that is, moving in the opposite directions as electrons under an external field), and by‘flipping’ all signs in the equations of motion, thus recovering a positive mass. Unfortunately, the structureof the valence bands is more complicated: The parabolic approximation breaks down very early, the effectivemass is highly anisotropic, and three bands are energetically very close (degenerate at the center of the BZ,spin-orbit coupling reducing the degeneracy to two bands). Thus, one needs to consider always at two bands(so called ‘heavy’ and ‘light’ hole bands), often three (the ‘split-off’ band).

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Doping and Statistical Mechanics of Electrons and Holes

• Doping.

– The technological importance of semiconductors stems from the fact that we can make them decent insulatorsor excellent conductors by adding ‘free carriers’ (electrons in thr CB, holes in VB).

– This is achieved by introducing ‘substitutional’ impurities. In Si (a group IV element, with 4 electrons in thebonding sp3 valence orbitals) the substitution of a group III element (‘acceptors’ such B, Ga, In, having only3 valence electrons) causes the absence of one electron in the valence band for each acceptor atom. Si sodoped is said to be p-type, since current will be carried by holes, which can be viewed as positively charged‘particles’. By ’accepting’ an extra electron (that is, giving away the ‘hole’), acceptors become negativelycharged ionic impurities. The substitution of a group V element (’donors’ such as P, As, Sb, having 5 valenceelectrons) causes the presence of one extra electron in the CB for each donor impurity. Si so doped is saidto be n-type, since negatively charged electrons carry the electric current. By ’donating’ an extra electronacceptors become positively charged ionic impurities.

– The external potential caused by the substitutional ionized impurity is a ‘screened’ Coulomb potential: It isscreened by:

1. the valence electrons and by some lattice rearrangement, which is accounted for by the macroscopic dielectricconstant εs of the semiconductor

2. the free carrier (holes in the VB, electrons in the CB)Ignoring for now the second screening effect, the potential will be

Vdop(r) = − e2

4πεsr(109)

Thanks to the envelope approximation, we can treat this potential as an hydrogen-like problem. Assuming ascalar effective mass, the energy levels (measured from the band extremum) will be:

En = − m∗e4

32π3n2h2ε2s. (110)

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Note how the magnitude of these energies is reduced by a factor m∗ε20/(m0ε2s) with respect to the hydrogen

atom. Since for most semiconductors m∗/m0 < 1 and ε0/εs ∼ 0.1, the ionization energy is very small.Indeed dopants are almost always ionized. ‘Freezout’ (that is, the condition in which free carriers are trappedinto impurity states and the semiconductor actually becomes an insulator) occurs at very low temperatures.Similarly, the Bohr radius of the n-th excited state,

an = − 4πn2h2εs

m∗e2, (111)

is much larger than that of the H atom, being typically of the order of tens of nanometers. This justifies theuse of the macroscopic dielectric constant.

• Density of States.

– A free particle in a 3D box.Let’s write the Schrodinger equation for a free electron in a cubic box of side L:

∂2ψ

∂x2+

∂2ψ

∂y2+∂2ψ

∂z2+ k2ψ = 0 , (112)

with k2 = 2mE/h2.Let’s separate the problem: We look for a solution of the formψ(x, y, z) = ψx(x)ψy(y)ψz(z). Substitutingthis into the Schrodinger equation and diving by ψ, one gets:

1

ψx

d2ψx

dx2+

1

ψy

d2ψy

dy2+

1

ψz

d2ψz

dz2+ k

2= 0 . (113)

Since this is true for any x, y, and z, we must have

1

ψx

d2ψx

dx2= some constant = − k2x . (114)

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Thus, accounting for the boundary condition (wavefunction must vanish at the wall of the cube):

ψ(x, y, z) = A sin(kxx) sin(kyy) sin(kzz) (115)

k2x + k

2y + k

2z = k

2(116)

kx =nxπ

L, ky =

nyπ

L, kz =

nzπ

L, (117)

with nx, ny, nz = ±1, ±2, ±3, ....The number of solutions per unit volume of k-space will be (obviously?) L3/π3. But since solutions differingonly for an overall sign are identical and there are 8 possible permutations of this type, the number of allowedk-states per unit volume in k-space will be 8 times smaller. Finally, accounting for the electronic spin (ignoredso far) the number of states will be twice as large. Thus, the density of k-states will be L3/4π3.

– Density of states at a given energy.The density of k-states with energy between E and E + dE can be obtained by multiplying the density ink-space by the volume of the spherical shell with wavevector between k and k + dk, that is

4πk2dkL3

4π3. (118)

(Recall Jean’s law n(ν) ∝ ν2? Since for photons 2πν = ck, where c is the speed of light, the expressionabove is just Jean’s law for the black-body spectrum). Now use E(k) = h2k2/(2m∗), change variable andobtain the number of states per unit volume (recall that L3 is the volume of the crystal) with energy betweenE and E + dE, ρ(E), as:

ρ(E) dE =m∗(2m∗E)1/2

h3π2dE , (119)

where E is measured from the band extremum.– A useful trick.

Suppose we must perform a sum over all k-states in k-space. Since the states are very dense, it makes senseto replace the sum with an integral (and it also makes our life easier, since integrals are in general easier

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to do that sums). This can be done by noticing that summing over k-points in a given volume of k-spaceis equivalent to integrating over the same volume and dividing by the volume of each k-point, which is theinverse of the density. Thus

∑k

→ 2L3

(2π)3

∫dk or

1

V

∑k

→ 2

(2π)3

∫dk (120)

– Another way to get the density of states (DOS).One can show that the density of states at energy E can be obtained as:

ρ(E) =2

(2π)3

∫dk δ[E − E(k)] , (121)

keeping in mind the following general property of the delta-function:If xi (for i = 1, ..., N) are the zeros of the function f(x), then:∫

δ[f(x)] g(x) dx =∑i

∫1

|f ′(xi|δ(x− xi) g(x) dx =

∑i

g(xi)

|f ′)xi)|(122)

where we have used the notation f ′(x) = df(x)/dx. This makes it easier to calculate the DOS for arbitrarydispersions E(k).

– DOS for the Si CB:Consider the ellipsoid

E100(k) =h2

2

[k2xmL

+k2y + k2z

mT

]. (123)

with the longitudinal axis along the kx axis. Using the Herring-Vogt transformation

k∗x =(m0

mL

)1/2kx , k∗y =

(m0

mT

)1/2ky , k∗z =

(m0

mT

)1/2kz , (124)

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one can show that the DOS in the CB of Si is

ρ(E) =md(2mdE)

1/2

h3π2. (125)

where the ‘density of states effective mass’ is md = (mLm2T )1/3.

• The Fermi-Dirac distribution function.

– Let’s consider how a system of Ne ‘indistinguishable’ electrons at thermal equilibrium with the environmentwill be distributed over N energy levels, each with energy Ei and containing gi (i = 1, ..., N) available

states, by placing ni electrons in each energy level i. The total energy of the system is Etot =∑N

i=1Eini.The number gi is called the ‘degeneracy’ of the level i.Pauli’s principle tells us that we cannot put more than one electron in each state, so ni ≤ gi.

– The number Wi of different ways in which ni electrons can be placed into the gi available states in the ith

level is:

Wi =gi!

(gi − ni)!ni!. (126)

(Think of gi bins in which we can put a ball or leave it empty, having ni balls in total. We can put the first ball in any of the gibins, the second ball in any of the remaining gi − 1 bins, etc., for a total of gi! possible ways. But, since neither the balls nor the

’voids’ can be distinguished, we must divide this number by the ni! equivalent ways we can place the ni balls into the bins and by

the (gi − ni)! equivalent ways we can arrange the gi − ni voids.)

– Thus, the total number of possible arrangements is just

W =∏i

Wi =∏i

gi!

(gi − ni)!ni!. (127)

– The most likely distribution should be determined by maximizing W under the constraints of energy andparticle conservation. It’s convenient to maximize lnW instead. Let’s write

lnW =∑i

[ln gi! − ln(gi − ni)! − lnni!] . (128)

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Let’s use Stirling’s approximation, valid for large x:

lnx! ≈ x lnx − x , (129)

and write

lnW ≈∑i

[ gi ln gi − gi − (gi− ni) ln(gi− ni) + (gi− ni) − ni lnni + ni ] = (130)

=∑i

[ gi ln gi − (gi − ni) ln(gi − ni) − ni lnni ] . (131)

Then

d(lnW ) =∑i

∂ lnW

∂nidni ≈

∑i

[ ln(gi−ni) + 1 − lnni − 1 ] dni =∑i

ln(gi/ni−1) dni .

(132)Our solution now comes from solving d(lnW ) = 0 subject to the conditions

∑i dni = 0 (the total number

of particles cannot change) and∑

i Eidni = 0 (the total energy should not change). This requires the useof the ‘method of Lagrange multipliers’: We multiply each equation describing a constraint by a constant (a‘multiplier’) and add these equations to the original equation:∑

i

[ ln(gi/ni − 1)− α − βEi ] dni = 0 . (133)

Since this must be valid for each i, a solution will be given by:

ln(gi/ni − 1)− α − βEi = 0 for all i. (134)

Therefore, the density of electrons in the ith energy level Ei will be:

f(Ei) =ni

gi=

1

1 + eα+βEi. (135)

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For closely spaced levels we can go to the continuum. Moreover, more complex arguments of statisticalmechanics imply α = −EF/(kBT ) and β = 1/(kBT ), where T is the temperature, kB is Boltzmannconstant, and EF the Fermi energy. Thus:

f(E) =1

1 + e(E−EF )/(kBT ). (136)

Here we should recall that the Fermi energy (or ‘Fermi level’, or the ‘chemical potential’ of the grand-canonicalensemble), the total electron density, and the temperature are related, as we’ll see below.

– Some useful approximations to the Fermi-Dirac distribution are the following:

f(E) ≈

θ(E − EF ) for kBT << EF

e(E−EF )/(kBT ) for kBT >> EF (Maxwell-Boltzmann distribuition)

, (137)

where θ(x) is the Heavyside step function, θ(x) = 1 for x < 0, θ(x) = 0 otherwise.

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• The electron (hole) density in the CB (VB).

– The total density of free electrons in the lowest-energy CB of a semiconductor will be given by:

n =1

V

∑k

f [E(k)] =2

(2π)3

∫f [E(k)] dk . (138)

Going to spherical coordinates in k-space:

n =1

4π3

∫ 2π

0dφ

∫ π

0dθ sin θ

∫ ∞

0dk k

2f [E(k)] =

1

π2

∫ ∞

0dk k

2f [E(k)] . (139)

For an isotropic effective mass m∗, E(k) = h2k2/(2m∗), so that k = (2m∗E)1/2/h and dE =(h2/m∗)kdk. So:

n =1

2π2

(2m∗

h2

)3/2 ∫ ∞

0dE E

1/2f(E) =

∫ ∞

0dE ρ(E) f(E) , (140)

recalling the definition of the DOS at energy E we have obtained earlier.Note that the upper integration limit extends to ∞. Of course, this is incorrect, strictly speaking, since we arelimiting ourselves to the low-energy region of the lowest-energy CB. Yet, the Fermi-Dirac distribution decaysso quickly (exponentially) at high energies, that the error we make is negligible.Three limits are noteworthy:

1. Low-temperature, degenerate limit. At low T , recalling that F (E) is unity for E < EF but it vanishesfor E > EF , we have the degenerate limit:

nlow T ≈ 1

2π2

(2m∗

h2

)3/2 ∫ EF

0dE E

1/2=

1

3π2

(2m∗EFh2

)3/2=

k3F3π2

, (141)

where kF = (2m∗EF )1/2/h is the Fermi wavevector.

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2. High-temperature, non-degenerate limit. On the contrary, at high temperature we have the non-

degenerate limit f(E) ≈ e−(E−EF )/(kBT ) and

nhigh T ≈ 1

2π2

(2m∗

h2

)3/2eEF /(kBT )

∫ ∞

0dE E1/2 e−E/(kBT ) = (142)

=1

2π2

(2m∗kBT

h2

)3/2eEF /(kBT )

∫ ∞

0dx x

1/2e−x

, (143)

having set x = E/(kBT ) in the last step. Now we should recall the definition of the ‘Gamma’ function:

Γ(s) =

∫ ∞

0dx x

s−1e−x

. (144)

Knowing thatΓ(1/2) =

√π , Γ(s+ 1) = s Γ(s) , (145)

we get:

nhigh T ≈ 1

4

(2m∗kBTπh2

)3/2eEF /(kBT ) = Nc e

−(EC−EF )/(kBT ) . (146)

In the case of the ‘ellipsoidal’ CB of Si we should replace the isotropic mass m∗ with md =

62/3(mLm2T )1/3, the factor of 6 stemming from the 6-fold degeneracy of the CB minima. For holes we

get, similarly,

phigh T ≈ 1

4

(2m∗

hkBT

πh2

)3/2e(−EG−EF )/(kBT ) = Nv e

−(EF−Ev)/(kBT ) , (147)

so that the product pn at equilibrium in the non-degenerate limit is

pn =1

2

(kBT

πh2

)3(mdm

∗h)3/2

e−EG/(kBT ) = n

2i , (148)

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the square of the ‘intrinsic carrier concentration’, ni ≈ 1.4× 1010 cm−3 in Si.Other useful forms are:

n ≈ ni e(EF−Ei)/(kBT ) , p ≈ ni e

(Ei−EF )/(kBT ) , (149)

where Ei is the Fermi level in undoped (intrinsic) Si, which we shall derive shortly.3. General case. In general, we have:

n =1

2π2

(2m∗

h2

)3/2 ∫ ∞

0dE E1/2 f [E(k)] =

1

4

(2m∗kBTπh2

)3/22√π

∫ ∞

0

x1/2

1 + ex−ηdx ,

(150)where, as before, we have changed the integration variable to x = E/(kBT ), we have set η = EF/(kBT ),and we have multiplied and divided by 2/

√π to obtain the same prefactor Nc defined above. The integral

cannot be solved in closed form, but it is a well-know integral (appropriately called Fermi-Dirac integral oforder 1/2 and labeled by F1/2(η)). So, the electron density is usually written in terms of this integral as:

n =1

4

(2m∗kBTπh2

)3/2F1/2(η) = Nc F1/2(η) . (151)

– Fermi level in intrinsic Si: Set charge neutrality condition:

n = p → Nc e−(Ec−EF )/(kBT ) = Nv e

−(EF+Ev)/(kBT ) , (152)

so

EF = Ei = Emg − kBT

2ln

(Nc

Nv

), (153)

which can be safely approximated with the ‘mid-gap’ Emg = (Ev + Ec)/2.– Fermi level in extrinsic (doped) Si: Set charge neutrality condition:

n = p + N+d , (154)

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where N+d

is the density of ionized donors. But the probability that an electron will occupy the energy levelEd associated to the H-like impurity potential will be

f(Ed) =1

1 + gd e(Ed−EF )/(kBT )

, (155)

where gd is a degeneracy factor dependent on the microscopic structure of the impurity, typically taken as1/2 since only one electron can occupy the impurity state while we have derived the Fermi function assuming2 electrons with opposite spins per state. Therefore: N+

d= Nd [1− f(Ed)] ≈ Nd and:

n ≈ p + Nd → EF ≈ Ec − kBT ln

(Nc

Nd

)= Ei + kBT ln

(Ndni

). (156)

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Dielectric properties of semiconductors

.• When we’ll deal with scattering, we shall have to face the complication that an external perturbation will

cause not only a perturbation to the single electron we are interested in, but also a global rearrangement of allother electrons in the crystal. This rearrangement, in turn, modifies the original perturbation. Therefore thetotal perturbing potential will be the sum of the original perturbation plus a ‘polarization’ potential due to therearrangement of the charges.

• Let’s assume that ψk,µ(r) (µ is a band index) are the wavefunction of the unperturbed crystal and suppose thatwe apply to a crystal an external perturbing potential dependent on both time and space. We can always Fouriertransform such a function (both with respect to r as well as t), so we consider just one Fourier component (wewill be able to add all components at the end):

Vext(r, t) = Vext(q, ω) eiq·r

e−iωt

. (157)

Similarly, we shall consider the Fourier transform Vpol(q, ω) of the potential due to the polarization chargeδρ(q, ω). Our goal is to find the ‘dielectric function’ ε(q, ω) such that:

Vext(q, ω) = Vtot(q, ω) − Vpol(q, ω) = ε(q, ω) Vtot(q, ω) , (158)

or Vtot = Vext/ε and so ε/ε0 ∼ 1− Vpol/Vtot.

• Now, in the ’linear response approximation’ of a small external potential, the potential Vext will act as aperturbation to the wavefunctions. Let’s write the perturbed wavefunctions φk,µ in terms of the unperturbedwavefunctions. Since we have only one perturbing wavevector q and we shall restrict our analysis to 2 bands(the lowest-energy conduction and the highest-energy valence bands), ignoring the possibility that many differentwavevectors may interact (this is called the ‘Random Phase Approximation’ and it relies on the assumption thatthe phases of perturbations of different wavelengths will interfere destructively), we can write:

φk,µ(r, t) = ψk,µ(r, t) + δψk,µ(r, t) . (159)

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The change δψk,µ can be obtained from time-dependent perturbation theory. Assuming (for mathematical

convenience) that the external potential has been turned on slowly with a ‘switching-on factor’ eηt, this changecan be expressed as:

δψk,µ(r, t) = −e∑qλ

< k+ q, λ|Vtot|k, µ >Eµ(k) − Eλ(k+ q) + hω − ihη

ψk+q,λ(r, t) . (160)

• The perturbed charge density, to first order, will be given by summing the contributions from all occupied statesk (described by an occupation number p(k, µ):

δρ(r, t) = e2∑kµ

p(k, µ) [ |φk,µ(r, t)|2 − |φk,µ(r, t) − δψk,µ(r, t)|2 ] (161)

or:

δρ(r, t) = e2∑kµ

p(k, µ)∑qGλ

ψ∗k,µ(r, t)

< k+ q|Vtot|k >< k+ q+G, λ|eiq·r|k, µ >Eµ(k) − Eλ(k+ q) + hω − ihη

ψk+q,λ(r, t) + c

(162)Since < k+ q|Vtot|k > = Vq

∑G < k+ q+G, λ|eiq·r|k, µ >,

δρ(r, t) = e2∑

qkGµλ

[p(k, µ) − p(k+ q, λ)] | < k+ q+G, λ|eiq·r|k, µ > |2Eµ(k) − Eλ(k+ q) + hω − ihη

Vq e−iq·r . (163)

We see from this equation that, if we consider the Fourier transform

δρ(r, t) =∑q

δρq e−iq·r−iωt

, (164)

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we can identify the Fourier coefficients δρq with

δρq = e2

∑kGµλ

[p(k, µ) − p(k+ q, λ)] | < k+ q+G, λ|eiq·r|k, µ > |2Eµ(k) − Eλ(k+ q) + hω − ihη

Vq . (165)

• Now, from Poisson equation:

∇2Vpol = −δρε0

(166)

going to Fourier transforms we have

Vpolq =δρq

q2ε0, (167)

so that, finally, we see that

ε(q, ω) = ε0

1− e2

q2ε0

∑kGµλ

[p(k, µ) − p(k+ q, λ)] | < k+ q+G, λ|eiq·r|k, µ > |2Eµ(k) − Eλ(k+ q) + hω − ihη

.

(168)

• Some very useful limiting cases:

1. Static dielectric constant.Let’s consider the crystal near its ground state near zero temperature. The occupation of a state k in band µwill be the equilibrium (Fermi-Dirac) occupation at T = 0 plus a small perturbation representing free carriers:

p(k, µ) = fFD(k, µ) + f(k, µ) . (169)

Let’s consider now only the effect of the zero-T , equilibrium populations in the valence and conductionbands. Free carriers (which we are mostly interested on) will be considered separately below. Thus we havefFD(k, µ) = 1 if µ labels one of the filled valence bands, fFD(k, µ) = 0 for the empty conduction bands.Since the term Eµ(k) − Eλ(k+q) in the denominator is very large for states in bands µ and λ respectively

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very low and high in energy, we can restrict the sum only over the top VB and the bottom CB. So, µ = vand λ = c. Let’s use the ‘sum rule’

∑fin

(Efin − Ein) | < fin|eiq·r|in > |2 =h2q2

2m∗ . (170)

Thus: ∑G

< k+ q+G, c|eiq·r|k, v >2 = h2q2

2m∗EG. (171)

In the denominator let’s approximate

Ev(k) − Ec(k+ q) ≈ −EG , (172)

if q is small enough (thus, considering screening of long-wavelength perturbations). Note that EG is the‘direct’ gap of the crystal averaged over the BZ. Then if we also assume that the frequency of the perturbationis small enough, hω << EG and we have:

ε(q → 0, ω → 0)

ε0≈ 1 +

e2h2

2m∗ε0E2G

∑k

fFD(k, v) = 1 +e2nv

m∗ε0E2G= 1 +

h2ω2PE2G

=εs

ε0,

(173)

having defined the ‘VB Plasma frequency’ ωP = (e2nv/(m∗ε0)1/2.

Note how the static (bulk) dielectric constant scales with the inverse of the squared gap.2. Static screening by free carriers.

In dealing with perturbations of the free carriers we shall almost always encounter scattering potentials whichare spatially ‘slowly varying’. This means that q << G and we can set∑

G

| < k+ q+G, c|eiq·r|k, v > |2 ≈ 1 . (174)

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Therefore, considering only a single band (conduction for n-type semiconductors, valence for p-type), thedielectric response of the free carriers can be written as:

ε(q, ω) = εs +e2

q2

∑k

f(k)− f(k+ q)

E(k)− E(k+ q) + hω − ihη. (175)

For a static perturbation (like the potential of an ionized impurity), ω = 0. Moreover let’s assume that thefree carriers are in equilibrium, so that f = fFD. Now, for long wavelengths we can use the expansions:

E(k+ q)− E(k) ≈ q · ∇kE(k) , (176)

and

f(k + q)− f(k) ≈ q · ∇kE(k)∂f

∂E. (177)

Then:

ε(q, ω) = εs+e2

q2

∫dE ρ(E)

(−∂fFD

∂E

)= εs+

e2

q2

∫dE ρ(E)

(∂fFD

∂EF

)= εs+

e2

q2

(∂n

∂EF

).

(178)Defining the ‘screening wavevector’ (or ‘screening parameter’ or ‘inverse screening length’)

β2 =e2

εs

(∂n

∂EF

), (179)

we can write:

ε(q, ω) = εs

(1 +

β2

q2

). (180)

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Note:

β2 →

e2nεskBT

nondegenerate limit, Debye-Huckel limit

3e2n2εsEF

degenerate limit, Thomas-Fermi limit

. (181)

Note that these expressions tend to εs at very large q. This means that free carriers do not screen perturbationswhich vary too fast spatially.

3. Long-wavelength, dynamic screening by free carriers (Plasma oscillations).Now let’s consider the opposite limit of nonzero ω but in the limit of q → 0. For hω >> |E(k)−E(k+q)|for all k of interest, let’s rewrite the RPA expression for the dielectric function of free carriers as:

ε(q, ω) = εs +e2

q2

∑k

2f(k) [E(k)− E(k+ q)]

h2ω2 − |E(k)− E(k+ q)|2 . (182)

Now let’s expand the numerator in powers of q:

E(k)− E(k+ q) ≈ −12q · ∇2

kE · q = −h2q2

2m∗ (183)

(having recalled the definition of the effective mass) and retain only h2ω2 in the denominator. Thus

ε(q → 0, ω) ≈ εs

(1 − 1

ω2e2n

εsm∗

)= εs

(1 −

ω2p

ω2

), (184)

where ωp = [e2n/(εsm∗)]1/2 is the ‘free-carrier plasma frequency’.

Note that this expression tends to εs at very large ω. This means that free carriers do not screen perturbationswhich vary too fast in time.

4. An important example.We have seen before that the Coulomb potential of an ionized impurity is screened by valence electrons simply

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by replacing the vacuum dielectric constant ε0, with the static, bulk dielectric constant of the (intrinsic)semiconductor, εs:

Vimp(r) =e

4πεsr. (185)

By going to Fourier transforms one can show that the potential screened also by free carriers will have thefollowing ‘Yukawa-like’ form:

V(screened)imp (r) =

ee−βr

4πεsr. (186)

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Lattice vibrations (phonons)

• Phonons are small lattice vibrations. As for all vibrations, they are better analyzed when decomposed into their‘normal modes’ (the equivalent of Fourier components), which are plane waves describing a small displacementof each ion from its equilibrium position.Like all waves in quantum mechanics (such as photons or electrons) they are ‘quantized’. However, since ions areheavy and large (at least when compared to electrons) the basic feature of lattice vibrations are well understoodby studying them with classical mechanics. At the end, however, we must recall that the energy of phononscomes in ‘chunks’ (or ‘quanta’) hωq, multiple of the phonon frequency ωq of a phonons with wavevector q.Also, their occupation at thermal equilibrium is characterized by the Bose-Einstein distribution function:

fBE(q) =1

ehωq/(kBT ) − 1, (187)

which is for Bosons (particles or quasi-particles with integer spin) what the Fermi-Dirac distribution is forFermions (particles or quasi-particles with half-integer spin).

• General formulation.Let R(0)

lγbe the equilibrium position of the ion (labeled by the index γ inside the unit cell l) and let δRlγ

its displacement from R(0)lγ

. Let also Rl be the coordinate-origin of the cell l. In terms of the momentum

coordinate of ion γ in cell l, Plγ =MγδRlγ , where Mγ is the mass of the ion, the ion Hamiltonian is:

Hion =1

2

∑lγ

P 2lγMγ

+∑l′l,γ′γ

∑ij

∂2V(lat)

γ′ (R(0)lγ

− R(0)

l′γ′)

∂Rlγi ∂Rl′γ′jδRlγi δRl′γ′j

, (188)

where V(lat)γ is the lattice potential of the ion γ. Note that here the indices i and j run over the spatial-

coordinate indices x, y, z. Using Bloch theorem we can now expand δRlγ in its spatial Fourier coefficients at

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wavevector q and assume a time dependence eiωt:

δRlγ =1

(NM)1/2

∑q

ξqγ eiq·Rl eiωt , (189)

where M is the mass of the unit cell and N is the number of cells in the crystal. It should be noted that theperiodicity of the lattice implies that ξqγ does not depend on the cell index l, the entire dependence on the cell

being absorbed by the phase eiq·Rl. We also define the “lattice Fourier transform” of the dynamic matrix as

Gijγγ′(q) =∑l′′

Gij γγ′(l′′) eiq·(Rl−Rl′) (190)

where

Gijγγ′(l′′) = −

∂2V(lat)

γ′ (R(0)lγ

− R(0)

l′γ′)

∂Rγi ∂Rγ′j, (191)

where Rl′′ = Rl − Rl′. Inserting the Fourier expansions for δRlγ into the equations of motion determined bythe Hamiltonian above, for each q we obtain the homogeneous linear system

∑jγγ′

[Gijγγ′(q) − Mγω

2 δij δγγ′]ξqγ′j = 0 . (192)

The associated secular equation determines the eigenfrequencies ωqη of oscillations labeled by a “branch index”η running over 3 (one LA and 2 TA) acoustic modes and over 3(Nions − 1) optical modes, Nions being thenumber of ions in the primitive cell.

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• A simple example: The linear chain.Let’s consider the simpler case of a 1D chain of atoms of mass M . We can drop the indices i, j (since we are in1D) as well as the indices γ (since we consider only one atom in eah 1cD cell). The ionic Hamiltonian becomes

Hion =1

2

∑l

P 2l2M

+∑l′

Gll′δRlδRl′

. (193)

Note that:Gl,l′ = Gl−l′,0 by translation symmetry (194)

and ∑l

G0,l = 0 since for equal shifts δRl the crystal energy does not change . (195)

The Hamilton equation for the ionic momentum will be:

Pl = − ∂Hion

∂δRl= −

∑l

Gll′δRl′ , (196)

or

Md2δRldt2

= −∑l

Gll′δRl′ , (197)

Let’s also make the simplifying assumption that each ion interacts only with its nearest neighbor (so that wecan solve the problem ‘by hand’ and not numerically). Then:

Md2δRldt2

= Gl,lδRl + Gl,l+1δRl+1 + Gl,l+1δRl−1 . (198)

By translation symmetry Gl,l = G0,0. Without loss of generality we can consider the case l = 0. So we canconsider only the elements G0,0, G0,±1, and G±1,0. Using again the translation symmetry we have

G0,1 = G−1,0, (199)

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but since Gll′ = Gl′l (it’s only a switch in the order of the derivatives), we also have

G0,1 = G1,0, (200)

so that G0,1 = G1,0 = G−1,0 = G0,−1.By the property

∑l G0,l = 0 above we have

G0,0 + G0,1 + G0,−1 = 0 → G0,0 = − 2 G1,0 . (201)

Let’s simply call G = G1,0 (the ‘spring’ constant of the inter-ionic force). Then the Hamilton equation ofmotion becomes simply:

Md2δRl

dt2= G [ − 2 δRl + δRl+1 + δRl−1 ] . (202)

Now let’s set

δRl = ξq eiqla eiωt , (203)

where a is the equilibrium distance between the ions in the chain (our ‘lattice constant’). Then:

− M ω2 = G [ 2 cos(qa)− 2 ] , (204)

becomes our trivial ‘secular equation’ from which we obtain the dispersion

ω = 2

∣∣∣∣sin(qa

2

)∣∣∣∣(G

M

)1/2. (205)

Note that the periodicity in 2πa for q defines the BZ of the 1D chain.

• Types of phonons.As noted, in a 3D cell having Nions ions, there will be 3 acoustic phonons (no relative motion between ions,

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the whole cell vibrates) and 3(Nions − 3) optical phonons (characterized by relative displacement among ionsin the same cell). The former are purely acoustic waves (like density waves) which effect electrons by modifying(linearly) the band structure with microscopic stress (they act like waves distorting the lattice constant as theytravel). This effect is called ‘deformation potential’ interaction after Bardeen and Shockley. Optical phonons inpolar materials (such as GaAs) carry an associated dipole field which scatters electrons in an obvious matter.Acoustic and optical phonons can be ‘transverse’ or ‘longitudinal’, depending on whether the displacement δR(also called ‘polarization’) is normal or parallel to the direction of travel q.

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Scattering Theory

• A simple model for transport/conductivity: Drude’s theory.

– Bloch oscillations in a perfect ballistic crystal. Band theory predicts that at the edge of the BZ (with asingle notable exception) ∇kE(k) = 0. So, moving across Brillouin Zones along a k-line we see a periodicfunction E(k). For example, let’s assume the simple 1D dispersion for 1D crystal and see how an electronmoves under the action of an external electric field F :

E(k) = E0 [1 + cos(ka+ π)] . (206)

The equations of motion imply:

v[k(t)] =1

h

dE

dk= − E0

ha sin[k(t)a+ π] , (207)

and

k(t) = k(0)− eFt

h. (208)

Thus

v(t) =E0

ha sin(eaFt/h+ π)] . (209)

The current, j = env, oscillates in time under the action of a d.c. field. These oscillations, called ‘Blochoscillations’, are not seen experimentally because of the effect of scattering: The frequency of these oscillationsis larger than the scattering rate for electrons. In other words, collisions prevent electrons from exiting one BZand entering the next without scattering.It follows that scattering is crucial in explaining the conductivity of solids.

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– Complications about scattering. There are three main reasons why a theory of current conduction in solidsis complicated:

1. Scattering, as shown by the structure of Fermi Golden Rule, depends on the initial and final crystal momentaof the scattering carrier

2. Many electrons participate in the conduction, so that complicated ‘many-body, collective’ effects enter thepicture

3. The electron (and hole) dispersion is given by a complicated band structure– Drude’s model. Before diving into more rigorous formulation of electronic transport, let’s start with a simple

model proposed by Drude. Let’s assume that when crossing a device an electron suffers so many collisionsthat it is enough to lump their collective effect into a ‘frictional force’, Ff = mv/τ such that:

hk = mv = F0 + Ff = −eF − mv/τ , (210)

where F is the external field and τ is the relaxation time constant of the frictional force. To see this, note thatif we set F = 0 and assume that at t = 0 the electron moves with velocity v0, then from the equation ofmotion mv = −mv/τ we get v ∝ exp(−t/τ), that is, the velocity decays to zero exponentially with timeconstant τ if ”damped” by the frictional force. The fact that we can assume the existence of a frictional force(bypassing all the difficulties related to the k − k′ dependence of scattering) and that all electrons move atthe same velocity v clearly simplifies the picture. The only justification for these drastic simplifications stemsfrom the fact that Drude’s theory can explain many low-energy, low-field, low-frequency transport phenomena.The current density j is given by

j = −env . (211)

The equation of motion for v under the action of an electric field F and a magnetic field B will be:

hk = mv = F0 + Ff = −e(F+ v × B)− mv/τ . (212)

Let’s see 3 examples:1. F independent of time, B = 0.

Then the steady-state solution implies v = 0 and mv = −eFτ . This corresponds to a dc current (no

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Bloch oscillations) with:

j = −env =e2τn

mF . (213)

The proportionality constant between j and field F is the conductivity σ, while the proportionality constantbetween velocity and electric field is the mobility µ, so

µ =eτ

m, σ = enµ . (214)

2. F is a low-frequency electric field and B = 0.Let’s consider the Fourier component

F = F0 eiωt + cc . (215)

For the equation of motion let’s try a solution of the form v = v0eiωt + cc. This gives:

iωmv0 eiωt = −eF0 eiωt − mv0/τ e

iωt , (216)

so that:

−v0 =eF0

imω + mτ

=µF0

1 + iωτ. (217)

So, for small frequencies the velocity is just µF0, as in a dc situation. But as soon as the frequency beginsto approach the ‘relaxation frequency’ 1/τ , the semiconductor ceases to be only a resistor and it begins topresent an inductive delay.

3. F independent of time, B = 0 and B = (0, 0, Bz).We have:

mvτ

= −e(F + v × B) . (218)

The presence of the Lorentz force makes it impossible to have F and v parallel. Indeed, if we assumeF = (0, 0, Fx) and v = (0, 0, vx), for example, we run into troubles. Indeed we see that the Lorentzforce causes a force in the y direction. Electrons flow along that direction and, since there are no current

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channels along that direction, they pile up at the sample boundary, building an electric field also along they direction, to block – at steady state – the flow of more electrons. Thus, we may rewrite the equation ofmotion in the form:

m(vx, 0, 0)

τ= − e[(Fx, Fy, 0)− (0,−vxBz, 0)] , (219)

with solution

−vx = µFx , (220)

and

Fy = vx Bz . (221)

Since we can measure Fx, Fy, and Bz, so we can derive vx and µ. Since we know the current densityjx = −envx, we can aso determine the carrier concentration, n. This is called the ‘Hall effect’, Fy the‘Hall field’, and this experimental arrangement is one of the most commonly used method to extract thecarrier mobility experimentally.

Our goal is to extend Drude theory to cases where it does not apply, considering in particular how to reassessthe role of the relaxation time τ , definitely over-simplified by the Drude model, and how to account forthe complicated band-structure of the semiconductor. We shall also justify Drude’s theory in the cases inwhich it is valid and, in so doing, understand how to improve it. In order to put Drude’s theory on firmerground, we shall have to look at the basic, microscopic physics of scattering processes in semiconductors,calculate ‘ensemble averages’ of the relaxation rates and derive simplified transport equations starting frommore rigorous formulations of transport (namely, the Boltzmann Transport Equation). Our first next step is alook at some microscopic scattering rates.

• Some important scattering rates using the Fermi Golden Rule.Here we consider the scattering rates for the most important collision processes in semiconductors: 1. withionized (dopant) impurities, and 2. with phonons. Other collision processes are often crucial (scattering amongcarriers, impact ionization, scattering with rough interfaces between layers, etc.), but scattering with phononsand impurities are almost always important.First, let’s consider the general formulation. Using Bloch theorem, let’s consider an electron in band n described

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by the wavefunction

Ψ(k, n, r, t) =1

V 1/2eik·r

u(n)k (r) e−iEn(k)t/h = |kn > , (222)

where u(n)k (r) is the periodic Bloch component and En(k) is the energy of the electron of crystal momentum

hk in band n. Ψ is a solution of the Schrodinger equation for the lattice:

HlatΨ = ih∂Ψ

∂t, (223)

where Hlat = h2∇2/(2m)+Vlat(r). Let’s add to Hlat a perturbation H′ (the static Coulomb potential ofthe impurity or the oscillating – in space and time – scattering potential of a phonon). From the Fermi GoldenRule we know that the probability per unit time, P (k′n′, kn) for the electron to make a transition to anotherstate k′ in band n′ characterized by the wavefunction

Ψ(k′, n′, r, t) =1

V 1/2eik

′·r u(n′)

k′ (r) e−iEn′(k′)t/h

= |k′n′ >, (224)

is:

P (k′n′, kn) =

h| < k′n′|H′|kn > |2 δ[En′(k′)− En(k)± hω] , (225)

where ω is the energy exchanged (gained with the ’minus’ sign, lost with the ’plus’ sign) during the collision.The ‘matrix element’ | < k′n′|H′|kn > | is:

| < k′n′|H′|kn > | = 1

V

∫Vdr e−ik

′·ru(n′)∗k′ (r) H′

(r) eik·r u(n)k (r) = (226)

=1

V

∑G′G

u(n′)∗G′k′ u

(n)Gk

∫Vdr ei(G−G′)·r

e−ik′·r

H′(r) eik·r , (227)

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having used the Fourier transform of the Bloch components in the last step. Most of the perturbationHamiltonians we shall consider have ‘smooth’ spatial behavior; that is: H′(r) does not vary appreciably over asingle cell. In this case the spatial integral will be significantly different from zero only when the short-wavelength

oscillations ei(G−G′)·r disappear, that is, when G′ = G. Therefore we can write:

| < k′n′|H′|kn > | ≈ 1

V

∑G′=G

u(n′)∗G′k′ u

(n)Gk

∫Vdr e−ik

′·rH′(r) eik·r = I(k′k, n′n) < k′|H′|k >

(228)where the term

I(k′k, n′n) =

∑G

u(n′)∗Gk′ u

(n)Gk (229)

represents the ‘overlap integral’ between two Bloch functions. Limiting our analysis to a single band (so assumingn = n′), we shall ignore this term since when k and k′ are not too distant, compared to the length of theG-vectors, this overlap factor is not too different from unity. Since we have limited our attention to a singleband, we shall drop the band-index n in the following. The matrix element

| < k′|H′|k > | = =1

V

∫Vdr e−ik

′·rH

′(r) eik·r (230)

is the matrix element of the perturbation Hamiltonian on ‘envelope’ plane waves, as we would have in the caseof free electrons in vacuum.The total scattering rate, 1/τ(k) will be obtained by summing the transition rates for all final states |k′ >:

1

τ(k)=

h

∑k′

| < k′|H′|k > |2 δ[E(k′)− Ek)± hω] . (231)

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1. Scattering with ionized impurities.Let’s start by considering as perturbation Hamiltonian the Coulomb potential of an impurity located at r = 0:

H′(r) =e2

4πε0r. (232)

This potential will be screened by both valence electrons and by free carriers. The effect of valence electrons isaccounted for by simply replacing the vacuum dielectric constant ε0 with the static, long-wavelength dielectricconstant of the semiconductor, εs. In order to account for the more complicated dielectric response of the freecarries, let’s note that the Coulomb potential does not change with time and that its effect will be mostly feltat large distances. Therefore we can employ the static, long-wavelength expression for ε(q, ω) (see Eq.(180)page 50):

ε(q, ω = 0) = εs

(1 +

β2

q2

). (233)

So, let’s take the Fourier transform of the Coulomb potential. As done in the Homework Assignment 1,Problem 5, the derivation is a little ‘tricky’:

H′q =

1

V

∫Vdr

e

4πε0reiq·r =

e2

2ε0

1

V

∫ R

0dr r

∫ π

0dθ eiqr cos θ = − e

V ε0q2, (234)

where the last step requires some ‘creativity’... Alternatively, we can start from Poisson equation for a chargee located at r = 0:

∇2V (r) = − e

ε0δ(r) . (235)

In order to take Fourier transforms, note that:

∇2V (r) = ∇2

∑q

Vq eiq·r

= −∑q

Vq q2eiq·r

, (236)

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and

δ(r) =1

V ol

∑q

eiq·r , (237)

where we have written V ol for the normalization volume to avoid confusion with the potential V . Then,from Poisson equation and the two previous equations:

Vq = − e

V ol ε0q2, (238)

as before. The Hamiltonian screened by both valence and free electrons will be:

H(s)(r) =ε0

εs

∑q

H′q

1 + β2

q2

=1

V ol

∑q

e2

εs

1

q2 + β2=

e2

4πεsre−βr . (239)

So, finally,

| < k′|H(s)|k > | = e2

V ol εs

1

|k′ − k|2 + β2. (240)

So, the scattering rate will be (using again V instead of V ol):

1

τimp(k)=

h

e4

V 2 ε2s

∑k′

1

(|k′ − k|2 + β2)2δ[E(k′)− E(k)] . (241)

Now let’s assume a semiconductor with isotropic effective mass m∗ and ‘parabolic’ dispersion E(k) =E(k) = h2k2/(2m∗). Let’s transform the sum over final wavevectors k′ to an integral:

1

τimp(k)=

h

e4

V ε2s

1

(2π)3

∫dk′

1

(|k′ − k|2 + β2)2δ[E(k′)− E(k)] . (242)

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Now let’s consider polar coordinates with the z-axis along k so that |k′ − k|2 = k′2 + k2 − 2k′k cos θ,let’s change the integration variable k′ to E′ = h2k′2/(2m∗) and get:

1

τimp(E)=e4m∗(2m∗E)1/2

2πh4ε2sV

∫ π

0dθ sin θ

1[4m∗Eh2

(1− cos θ) + β2]2 , (243)

where E = E(k), the initial energy. We have also used the fact that the scattering rate depends only on theinitial energy (not on the direction of k).The wavevector hq = h(k′ −k) is the ‘momentum transfer’ and the polar angle θ is the ‘scattering angle’. Alarge momentum transfer corresponds to a large scattering angle. Note, however, that the momentum transferhq enters the denominator of the integrand above with a high power (for small β the integrand behaves likeq−4). Therefore, this scattering process is mainly a ‘forward scattering’ (or ‘small-angle scattering’) process:For small β compared to k, (that is, for weak screening or high electron energy), electrons will not be deflectedvery much from their trajectory. On the contrary, at low electron energy or for strong screening (so thatk = k′ << β), the term cos θ in the denominator does not play much of a role and scattering is almost‘isotropic’.The expression for 1/τimp(E) we have just derived represents the rate for collisions with a single impurity ina volume V . If we assume that we have NI impurities per unit volume, we must replace 1/V above withNI . Performing the integral we have, finally:

1

τimp(E)=NIe

4m∗(2m∗E)1/2

πh4ε2s

1

β2(8m∗Eh2

+ β2) . (244)

Note that for large initial energies the scattering rate decreases as 1/τimp(E) ∼ E−1/2. Indeed an electronof energy much larger than the depth of the ‘Coulomb well’ will be largely unaffected by the scatteringpotential. This is a general properties of Coulomb scattering. Note also that, since β2 ∝ n, where n is thedensity of free carriers, as the density n increases the scattering rate decreases. This is due to the fact that

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more free carriers screen better the scattering potential. Finally, the scattering rate increases linearly with thedensity of scattering centers NI , as expected.

2. Scattering with phonons.We have seen that phonons are oscillations of the ions in the lattice around their equilibrium positions. Theybehave like sound waves traveling with wavevector q and possessing energy hωq. The oscillating displacementof an ion at the lattice site l and position τγ in the cell was derived semiclassically above as:

δRlγ =1

(NM)1/2

∑q

ξqγ eiq·Rl eiωqt , (245)

where M is the mass of the unit cell and N is the number of cells in the crystal and ξq is the ‘polarization’(transverse or longitudinal) of the phonon.Clearly, any distortion of the crystal will affect the electrons, so it is not surprising that phonons scatterelectrons. Two main differences between impurity scattering and phonon scattering are: 1. Phonon scatteringis not elastic: Electrons can absorb or emit phonons, thus losing or gaining energy. 2. Scattering with phononsis intrinsically a quantum mechanical process. In particular, following a semiclassical, phenomenologicalderivation outlined below, we can easily guess that phonon absorption must be proportional to the numbers ofphonons already present at the lattice temperature, given by the Bose-Einstein ‘occupation number’

nq = fBE(q) =1

ehωq/(kBT ) − 1, (246)

but we cannot derive the result the phonon emission is proportional to 1+nq, in analogy with the ‘stimulatedphoton emission’ (discovered by Einstein) which is the basic idea behind the principles of operation of masersand lasers. The derivation of this result can be followed only using a more advanced quantum mechanicaltechnique known as ‘second quantization’.Bardeen and Shockley have proposed a phenomenological, semiclassical way of deriving the strength of thescattering between electrons and acoustic phonons. When we compress or dilate a crystal, say by changingthe lattice constant a → a+u, the band structure changes. In particular, the energy of the conduction-band

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minimum moves by an amount

∆Ec = Ec(a+ u)− Ec(a) ≈ dEc

dau . (247)

In 3D, ∆Ec is proportional to the change of the volume ∆V which, for a lattice displacement u is given by∆V = V∇ · u, so that

∆Ec = VdEc

dV∇ · u . (248)

The constant V dEc/dV is called ‘deformation potential’ for the conduction band and denoted by ∆ac.If we consider phonons of wavelength sufficiently long (that is, spanning many cells), we can approximatethe effect of the density-wave associated with acoustic phonons (consisting of alternating crests/troughsof compression/dilation/compression/dilation....) as having locally the same effect of a uniform, globalcompression or dilation of the crystal. So we can identify the uniform displacement u above with the ionicdisplacement δRlγ and we can express the local shift of the CB-edge by the polarization ξq. This ‘fluctuating’CB-edge is what causes the electrons to scatter. Skipping the derivation (which requires second-quantizationtechniques), the squared matrix element for electron/acoustic-phonon scattering has the form:

| < k′|Hac|k > |2 =∆2achωq

2V ρc2s

(nq +

1

2± 1

2

), (249)

where ρ is the density of the crystal, cs is the sound velocity, the ‘plus’ sign refers to emissions, the ‘minus’sign to absorption processes. Note that the frequency of acoustic phonons (in Si there are 2 transverse modes– TA – and a single longitudinal mode – LA) can be well approximated by a linear relation ωq ≈ csq.Therefore the matrix element grows with momentum transfer and we see that scattering with acoustic phononsis a ‘large-angle scattering’, very effective in ‘randomizing’ the electron direction and momentum. This has agreat effect on the mobility.A similar expression holds for optical phonons simply replacing the frequency ωq and deformation potential∆ac with their ‘optical’ counterparts ωop and ∆op. However, in the literature usually one finds ‘optical

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deformation potential’ usually denoted by (DtK)op which is defined as ∆op(ωop/cs), so that:

| < k′|Hop|k > |2 =(DtK)

2oph

2V ρωop

(nop +

1

2± 1

2

). (250)

The calculation of the scattering rates for emission and absorption of optical phonons is relatively simple, sincethe frequency of optical phonons is roughly independent of q, and so in the occupation number nop. Thus,proceeding as we did for impurity scattering:

1

τop(E)=

(DtK)2opm

∗3/2

21/2πh3ρωop

[nop(E + hωop)

1/2 + (1 + nop)(E − hωop)1/2

], (251)

where, of course, emission should be included only if E > hωop.For acoustic phonons things are more complicated, since the phonon energy depends on the phonon wavevectorq and so does the Bose factor nq. A common approximation embraced to simplify the problem is to assumethat the phonon energy is smaller that the thermal energy kBT (at sufficiently low T and for sufficientlysmall q), so that nq ≈ kBT/(hω) = kBT/(hcsq) and to ignore also the energy lost or gained in acollision, if the phonon energy is much smaller then the electron energy. These two approximations are calledthe ‘equipartition’ and the ‘elastic’ approximations, respectively. Having made these approximations one has:

1

τac(E)=

21/2∆2acm

∗3/2kBTπh4ρc2s

E1/2 . (252)

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The Boltzmann Transport Equation.

• Assumptions.We are now ready to deal with the equation which describes the way free carriers (electrons in the CB, holes inthe VB) move in a semiconductor under the action of an electric field.In general, such an equation should be derived starting from the Schrodinger equation for a many particle (thefree carriers) system, including the lattice potential as well as the perturbations which represent scattering. Theproblem is daunting and still largely unsolved. Instead, we shall make the following approximations:

1. Plane waves of the form eik·r (or the corresponding plane-wave ‘envelopes’ times a Bloch factor in asemiconductor) describe an electron with well-defined momentum but uniformly distributed in space. Instead,an electron localized in space must be described by a ‘wave packet’ which consists of a linear superpositionof plane waves. Thus, as a consequence of Heisenberg principle, we must have some uncertainty about theelectron position as well as about its momentum. We shall assume that the size of the device is much largerthan the size of the electron wave-packet and that the energy scales of interest (mainly, the applied bias) ismuch larger then the uncertainty implied by the ‘spread’ of the electron momentum. Therefore, we can assumethat the electron can be described by its well-defined position r and its well defined (crystal) momentum hk,as it if were a classical particle.

2. The electric field and all other perturbations are weak enough so that we can use the envelope approximationto describe the motion of electrons (or holes) in a semiconductor.

3. All collision processes are independent, instantaneous, local in space, and are perturbations weak enough tojustify the use of the first-order (in perturbation theory) Fermi Golden Rule.

4. As a consequence, all collision processes depend only on the local, instantaneous electron variables, withoutretaining memory of where and when the previous collision happened. This is the equivalent of Boltzmann’sassumption of ‘molecular chaos’ which is essential to arrive at an irreversible dynamics.

5. An unrelated assumption we shall need consists in assuming that the time-dependence of the system is slowenough to justify the use of electrostatics – rather than the full set of Maxwell equations of electrodynamics– and so the electric field will be determined only by the instantaneous distributions of the charge carriers viaPoisson equation.

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• Formulation.Let’s define the distribution function f(r, k, t) as a function in phase space (r, k) such that f(r, k, t)drdkis the number of particles which at time t are in a spatial volume dr around the position r and have (crystal)momentum in a volume dhk around the point hk in (crystal) momentum space.The equation controlling the time evolution of the distribution function is:

∂f(r, k, t)

∂t= −dr

dt·∇rf(r, k, t)−−dk

dt·∇kf(r, k, t) +

∑k′

[P (k, k′)f(r, k′, t)− P (k′, k)f(r, k, t) ] ,

(253)which, using the equations of motion and introducing the electrostatic potential φ(r) such that −∇rφ(r) = F(F is the electric field), becomes:

∂f(r, k, t)

∂t= −1

h∇kE(k) · ∇rf(r, k, t) + e∇rφ(r, t) · ∇kf(r, k, t) + (254)

+∑k′

[ P (k,k′)f(r, k′, t) − P (k′, k)f(r, k, t) ] . (255)

This is the famous ‘Boltzmann transport equation’ (BTE). It’s a most difficult equation to deal with and severalmethods of solutions have been devised during its 150-year old history:

– Direct solution: The BTE is transformed into a gigantic linear problem by discretizing real-space and k-space.The method, however, requires enormous computing power, even by today’s standard, and can be used onlyin highly symmetric situations.

– Iterative technique: The BTE is transformed into a purely integral equation (Chamber’s path formulation) andthis equation is solved by iterations. The process is slow, often not converging, and it has been used only in alimited range of applications.

– Monte Carlo technique: This method – first used in Los Alamos to simulate neutron transport for the A-bomb– is nowadays the most widely used when a full solution of the BTE is required. Particles are simulated alongtheir paths – solution of the ballistic equations of motion – occasionally interrupted by collisions.

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– Expansions: The unknown f is expanded into suitable basis functions (spherical harmonics, Legendre orHermite polynomials) and a hierarchy of equations is obtained. The expansion – and so the hierarchy – istruncated at some suitable order. The resulting equations are partial differential equations (PDEs) which aresolved numerically.

– Moment methods: The BTE is multiplied by powers of k (or of the velocity v(k)), the resulting equationis integrated over k-space to obtain PDEs for the ‘moments’ Qn(r, t) =

∫dk/(2π)3 knf(r, k, t). This

method will be discussed below up to the third moment (n = 0, 1, and 2), since it leads to the drift-and-diffusion equations (DDE) which, with Poisson equation, constitute the ‘basic semiconductor equations’.

– Linearization. The unknown is assumed to be of the form f = feq + f1, where feq is the Fermi Diracequilibrium function, and f1 is a small correction to leading order in the electric field. Clearly, this method islimited to near-equilibrium situations and it is manly used to derive an expression for the ohmic mobility ofthe charge carriers.

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• Method of moments.We now derive the equations for the first two moments of the BTE, thus obtaining the ‘drift-diffusion’ equations(DDE). In the following we shall assume steady-state, that is we assume no explicit time dependenceof the distribution function, so that we assume ∂f/∂t = 0 in the BTE.Let’s define the ‘ensemble average’ of a dynamic variable Q(k) as

〈Q(r, t)〉 =2

n(r, t)

∫dk

(2π)3Q(k) f(r, k, t) . (256)

As stated above, the nth moment of the distribution function is the ensemble average of the dynamic variableQ(k) = kn, where the notation kn denotes the tensor kikj...kl of rank n.

1. First moment: Charge continuity.If Q(k) = 1, all we have to do is to simply integrate the BTE over k-space. Note that:∫

dk

(2π)3∂f(r, k, t)

∂t=

∂t

∫dk

(2π)3f(r, k, t) =

∂n

∂t, (257)

where n is the carrier density. Also:∫dk

(2π)3dr

dt· ∇rf(r, k, t) = ∇r ·

∫dk

(2π)3v(k) f(r, k, t) =

1

e∇r · j(r, t) , (258)

where the current density j(r, t) has been defined as

j(r, t) = e

∫dk

(2π)3v(k) f(r, k, t) . (259)

Moreover:∫dk

(2π)3dk

dt· ∇kf(r, k, t) =

dk

dt·∫

dk

(2π)3∇kf(r, k, t) =

dk

dt·∫Σf n dσ = 0 , (260)

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(having used Green’s identity) where the surface integral in k-space is performed over a surface Σ infinitelyfar away and the distribution function is assumed to vanish at infinity. Finally,∫

dk

(2π)3

∫dk′

(2π)3[ P (k, k′)f(r, k′, t) − P (k′, k)f(r, k, t) ] = 0 . (261)

Therefore, by integrating the BTE over k-space we get:

∂n

∂t=

1

e∇ · j , (262)

which expresses conservation of mass (or particle density). It is the continuity equation for charge (or density).2. Second moment: Current continuity.

Following the recipe for getting moments, we could multiply the BTE by k and integrate over k. Rather, we’llfollow a slightly different procedure in close analogy with the linearization approach, since it will allow us todefine properly the carrier mobility. Let’s define implicitly the momentum relaxation time τp,i(k) along thedirection i (= x, y, z) via the integral equation:

1

τp,i(k)=

∫dk

(2π)3

[1 − vi(k

′)τp,i(k′)vi(k)τp,i(k)

]P (k′, k) . (263)

A few comments about this ‘momentum (or velocity) relaxation time’: If the scattering process is elastic andthe band-structure of the semiconductor is isotropic, then k = k′, vi(k) = vi(k

′), the relaxation time itselfdepends only on the magnitude of k, so that the term in square bracket becomes 1 − cos θ, where θ is theangle between k and the xi-axis. Thus the expression for τpi simplifies to:

1

τp,i(k)=

∫dk

(2π)3(1− cos θ) P (k′, k) . (264)

This is the scattering rate ‘weighted’ by change of the ith component of the velocity. For small-anglescattering (such as Coulomb scattering) small θ dominate inside P (k′, k), the term (1− cos θ) is small and

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the effect of the scattering process is weak. In words, even if scattering is frequent, each collision changesthe ith component of the velocity by such a small amount that the time required to relax the velocity to itsequilibrium value is very long. On the contrary, for large-angle scattering each collision is very effective. Forexample, for optical-phonon scattering P (k′, k) is isotropic (that is, P (k′, k) is the same for every anglebetween k′ and k, so P depends only on the magnitude of the wavevectors (i.e., P (k′, k) = P (k′, k)),the term cos θ vanishes after integration over the polar angle and the momentum relaxation time becomesidentical to the scattering rate:

1

τp,i(k)=

1

τ(k)=

∫dk

(2π)3P (k′, k) . (265)

Such an isotropic scattering process is thus called ‘randomizing’: A single collision is sufficient to relax themomentum. In general, for anisotropic and inelastic processes the momentum relaxation time should becalculated by solving the implicit definition above which is actually an integral equation. We shall not discussit here, but for some important processes – such as scattering with longitudinal optical phonons in GaAs –extensive additional work is required to compute τpi.Now let’s multiply the BTE by vi(k)τp,i(k) and integrate over k. We get:

ji = e∑j

〈τp,i∂

∂xj(nvivj)〉 − e2n

h

∑j

Fj〈viτpi∂f

∂kj

1

f〉 +

∂t〈jjτpi〉 . (266)

• The drift-diffusion equation.The equation above presents an obvious problem: The quantity 〈nvivj〉 is a third moment of the BTE. Theequations it obeys should be derived by taking the next moment of the BTE. In turn, as we shall see, theseequations (called ‘hydrodynamic equations’) contain a term which is a fourth moment, which in turn obeysequations containing the fifth moment, and so on. In order to be able to consider only a finite number ofmoments we need a ‘closure’, that is, a relation which, under realistic approximations, allow us to express ann+ 1st moment in terms of an nth moment.

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In order to do that, let’s define two important quantities: The mobility tensor:

µij = −e

h〈τp,ivi

∂f

∂kj

1

f〉 , (267)

and the diffusion tensor:Dij = 〈τp,ivivj〉 . (268)

Assuming that f is a Boltzmann function at equilibrium, so that f ≈ feq = exp−[E(k)− EF ]/(kBT ),we have ∂feq/∂kj = (∂feq/∂E) (∂E/∂kj) = −hvjfeq/(kBT ) so that

Dij =kBT

eµij , (269)

which is called the ‘Einstein relation’. This is the desired ‘closure’ relating an ‘unwanted’ third moment to asecond moment (the mobility tensor). (For degenerate semiconductors this relation can easily be extended.)Let’s now simplify our notation assuming that the mobility tensor is actually a scalar quantity (a diagonal tensorwith equal elements along the diagonal). Then, denoting by µ and D the scalar mobility and diffusion constant,we have from the second-moment equation:

j = e∇(nD) + enµF , (270)

which says that the current density j is the sum of a diffusion current, e∇(Dn), and a ‘drift’ term driven bythe electric field, enµF. A similar equation, which we shall write below, applies to hole transport as well. Notethat, by the way we have derived the moments of the BTE, ignored higher-order moments, and assumed theEinstein closure, the DDE equations are valid in the semiclassical limit, in the limit of small electricfields and of carriers close to thermal equilibrium.

• Ohmic mobility.Note that by definition of mobility (along the x-axis, without loss of generality in the isotropic limit) we have:

µ = −e

h〈τpvx

∂feq

∂kx

1

feq〉 = − 2e

3nm∗

∫ ∞

0dEρ(E) E τp(E)

∂feq

∂E= (271)

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=2e

3nm∗kBT

∫ ∞

0dEρ(E) E τp(E) feq(E) . (272)

In case of degenerate semiconductors this expression is trivially generalized to:

µ =2e

3nm∗kBT

∫ ∞

0dEρ(E) E τp(E) fFD(E)[1− fFD(E)] , (273)

where now fFD is the equilibrium Fermi-Dirac distribution. This expression is known as the ‘Kubo-Greenwood’equation.A simpler expression is useful, since it is related to the simpler Drude model of conduction. Note that:

µ = −e

h〈τpvx

∂f

∂kx

1

f〉 ≈ e

kBT〈τpvxvx〉 → e

m∗〈τpE〉〈E〉 . (274)

When discussing Drude’s models, we defined the mobility as eτ/m∗. We can recognize the same expressionabove, provided we define Drude’s τ as the ‘energy weighted average’ of the momentum relaxation time〈τpE〉/〈E〉.As an example, let’s compute the electron mobility in intrinsic Si assuming only scattering with acoustic phonons.Since this type of scattering has been calculated before in the elastic approximation and it is isotropic, themomentum relaxation rate will be equal to the scattering rate which, we recall, is:

1

τac(E)=

1

τp(E)=

21/2∆2acm

∗3/2kBTπh4ρc2s

E1/2

, (275)

where m∗ is the effective mass in a single valley of Si. Let’s also recall two more equations derived above whichwe need now: The electron density in the non-degenerate, high-T limit is

n =1

4

(2m∗kBTπh2

)3/2eEF /(kBT ) = Nc e

−(EC−EF )/(kBT ) , (276)

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and, finally, the density of states is given by:

ρ(E) =md(2mdE)

1/2

h3π2, (277)

where md = 62/3(mLm2T )

1/3 is the Si DOS effective mass. Putting it all together, we have

µ =2ehρc2sm

3/2d

eEF /(kBT )

3πm∗5/2∆2ac(kBT )

24

(πh2

2mdkBT

)3/2

e−EF/(kBT )

∫ ∞

0dE E e

−E/(kBT ) = (278)

=23/2π1/2eh4ρc2s

3m∗5/2∆2ac(kBT )

3/2. (279)

Clearly, other scattering processes should be considered to get an accurate estimate for the electron mobility inintrinsic Si (mainly, phonon scattering between various valleys, the so-called ‘intervalley scattering’). Yet, the

equations above already exhibits some correct trends, especially the T−3/2 dependence on temperature, whichis indeed observed experimentally.

• The drift-diffusion device equations.Let’s summarize what we have obtained so far by writing the set of equations which control the chargetransport and the electrostatic potential in semiconductors. Let’s denote by φ the electrostatic potential (sothat V = −eφ is the potential energy), n and p the electron and hole densities, by jn and jp the electron andhole current densities, and use similar subscripts for D, µ, etc. Then, accounting also for generation, G, andrecombination, R, processes which we shall discuss below:

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∂n∂t = 1

e ∇ · jn +Gn −Rn continuity equation for electrons

∂p∂t = − 1

e ∇ · jp +Gp −Rp continuity equation for holes

(280)

jn = e∇(nDn) + enµnF drift and diffusion for electrons

jp = − e∇(pDp) + epµpF drift and diffusion for holes(281)

−∇[εs∇φ] = e[p− n+ND −NA] Poisson equation (282)

• The third-moment: Hydrodynamic model and energy transport.For simplicity, let’s adopt from now on the effective mass approximation, even though it is possible to work onthe third-moment using an arbitrary band structure. Multiplying the BTE by the total ’kinetic energy tensor’,Eij(k) = h2kikj/(2m

∗) and integrating over k we have:

∂t(n〈Eij〉) = −

∑l

∂xl(n〈Eijvl〉) +

en

h

∑l

Fl〈Eij∂f

∂kl

1

f〉 − n〈Eij〉

τw,ij, (283)

where the ‘energy relaxation time’ tensor τw,ij is defined as:

1

τw,ij=

2

n〈Eij〉h2

2m∗

∫dk′

(2π)3

∫dk

(2π)3(kikj − k

′ik

′j)P (k

′, k) f(r, k, t) . (284)

This complicated equation (actually: It’s a tensor equation and so it represents 6 independent equations)is simplified by taking the trace, so obtaining an equation expressing conservation of kinetic energy E =

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h2k2/(2m∗):∂

∂t(n〈E〉) = − ∇ · (n〈Ev〉) + enF · 〈v〉 − n〈E〉

τw, (285)

where the trace of the energy relaxation time is:

1

τw=

2

n〈E〉∫

dk′

(2π)3

∫dk

(2π)3[E(k)− E(k′)] P (k′, k) f(r, k, t) . (286)

The third-moment equation can be rewritten in the form:

∂t(n〈E〉) = − ∇ · S + j · F − n〈E〉

τw, (287)

where the ‘energy flux’ S = n〈Ev〉 is the troublesome term involving fourth-moment terms (it is a product ofthree wavevectors kikjkl).In this form the equation has a clear physical meaning: The kinetic energy of the carriers in a unit volume of realspace, n〈E〉, grows with time because of the Joule-heating term j · F (the acceleration caused by the externalfield), decreases because of energy losses to the lattice, n〈E〉/τw and because of the flux of energy-density outof the unit volume, ∇ · S.We now have to find a ‘closure’ (similar to the Einstein relation between µ and D we found for the secondmoment equation). To do this, let’s decompose the kinetic energy 〈E〉 into a ‘drift’ and a ‘thermal’ component:

〈E〉 =1

2m

∗v2=

1

2m

∗ 〈v〉2 +1

2m

∗ 〈v2 − 〈v〉2〉 =1

2m

∗ 〈v〉2 +3

2kBTc , (288)

where what should have been a carrier temperature tensor, Tij = m∗〈(vi − 〈vi〉)(vj − 〈vj〉)〉/(3kB) hasbeen converted to a scalar, Tc, by taking its trace.Thus, the energy-flux vector can be decomposed into a ‘drift’ term – related only to a second moment – and a

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‘heat’ term, Q, still containg a third moment:

S =1

2nm

∗〈v〉2〈v〉 +3

2nkBTc 〈v〉 + Q , Q =

1

2nm

∗ 〈(v − 〈v〉) (v2 − 〈v〉2)〉 . (289)

The ‘heat flux’ Q is finally related to a second-moment (the carrier temperature) via the phenomenologicalFourier heat diffusion equation:

Q = − κ∇Tc , (290)

where κ is the (electronic) thermal conductivity given by the Wiedermann-Franz law:

κ =

(5

2+ c

) (kBTc

e

)2neµTc , (291)

where c is a constant whose value is still a subject of research.

• Hot electrons.Note that in the equations above Tc is the temperature of the carriers accelerated by the field, so it is in generalhigher than the lattice temperature T . The relaxation term n〈E〉/τw describes how fast the carrier-systemattempts to reach thermal equilibrium with the lattice. For Boltzmann statistics and fields not too strong, onecan show that 〈E〉

τw≈ 〈E〉 − (3/2)kBT

τw. (292)

In words, if left alone the energy of the carrier-system decays exponentially to the thermal energy at the latticetemperature with decay constant τw. If an external field drives the system, then, ignoring for simplicity theenergy-flux term ∇·S, and ignoring also the drift component of the energy (usually neglected, it matters only inquasi-ballistic transport in very short devices), so that 〈E〉 ≈ (3/2)kBTc, at steady-state we have the ‘energybalance’:

0 =∂

∂t(〈E〉) ≈ 1

nj · F − 〈E〉

τw→ 2

3kBnj · F =

Tc − T

τw, (293)

from which we see that electrons will always become ‘hot’ under the action of an electric field.One important side-effect of carrier-heating is the degradation of the mobility and the existence of a ‘saturated

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velocity’. We saw before that scattering with acoustic phonons yields an electron mobility in Si which decreases

as T−3/2 as the temperature increases. Looking back at the derivation of this result, we see that a factor T−1stems from the temperature dependence of the scattering rate, since the acoustic-phonon population grows as T

(in the high-T , equipartition limit) so that the frequency of the collisions grows with T . Another factor T−1/2,instead, comes from the integration of the DOS and Boltzmann factors in the Kubo-Greenwood formula. Thisis related to the electron distribution, so that this T will become Tc in the hot electron regime. Therefore, wecan see that the electron mobility decreases as

µ ≈ µth

(T

Tc

)1/2, (294)

where µth is the Ohmic mobility (cold, near equilibrium electrons). Similarly, considering optical phonons we

would obtain τw ∝ (T/Tc)1/2. Using now the energy-balance equation above,

2

3kBnj·F ≈ c (Tc−T )

(T

Tc

)1/2→ eµF

2= c (Tc−T )

(T

Tc

)1/2→ Tc ≈ T + c eµthF

2,

(295)where c is some constant. Therefore, as the electric field grows, the hot-electron mobility will decay as:

µ ≈ µth

(1

1 + ceµthF2/T

)1/2. (296)

For the electron ‘drift’ velocity (the velocity along the direction of the applied field) we have:

vdrift = µF ≈ µth F

(1

1 + ceµthF2/T

)1/2. (297)

For small F (Ohmic regime), vdrift ≈ µthF , as usual. But at large F the drift velocity saturates,

vdrift → (cµthT/e)1/2 = vsat. The physical reason behind the existence of a saturated velocity is that

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electrons scatter more at higher energies, their drift velocity decreases as they are pushed at higher energy, andthe mobility decreases.

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Generation and recombination processes

Generation and recombination processes are scattering processes like those we’ve considered before (withphonons and ionized impurities), but exhibit some important characteristics on their own:

• The number of particles is not conserved. For example, absorption of a photon excites an electron from VB toCB, resulting in the creation of an electron-hole pair.

• Two bands (and, often, two bands and an impurity state) are always involved. So, the single-band approximationfails, and, often, the effective mass approximation fails.

• Large energies are involved. This is another reason for the failure of simple models for the band structure andfor the effective mass or even envelope approximation. As a result, the calculation of the matrix elements isalmost always a daunting task. Almost always one has to proceed empirically and phenomenologically.

We shall now discuss three main classes of generation/recombination processes and consider mainly their dependenceon carrier density and temperature (if important):

1. Radiative: Absorption of light which creates electron-hole pairs, and recombination of electron-hole pairs viaemission of photons.

2. Auger: An electron-hole pairs recombine and the excess energy is transferred to another free carrier. Theopposite process (a free carrier transfer its energy to an electron in the VB, this generating an electron-holepair) is the ‘inverse Auger process’. It is often called ‘impact ionization’ in the device community and literature.

3. Shockley-Read-Hall (SRH): A trap (an impurity energy level deep in the gap) acts as a ‘catalyst’ forgeneration/recombination processes (usually non-radiative) of electron-hole pairs.

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• Radiative processes.Radiative processes consist either in the absorption of light (a photon of energy hω > Egap, where Egap is thedirect gap of the semiconductor), resulting in the generation of an electron-hole pair, or in the recombination ofan electron-hole pair with the emission of a photon.To first order in the electromagnetic field, the Hamiltonian describing the interaction of an electron with the

electromagnetic field is, written in terms of the vector potential, A(r, t) = A0ei(q·r−ωt):

Hphot =ieh

mcA · ∇ . (298)

The matrix element between two states in the valence and conduction bands thus has the form:

< k, c|Hphot|k, v > ≈ ieh

mc

∫Vdr e−ikc·r uc∗kc(r) e

−q·r A0 · ∇ eikv·r uvkv(r) . (299)

If the wavelength of the photon is much longer than the electron wavelength, we can set e−iq·r ≈ 1 and

< k, c|Hphot|k, v > ≈ ieh

mcA0 ·

∫Vdr e−ikc·r uc∗kc(r) ∇ eikv·r uvkv(r) . (300)

This is called the ‘dipole approximation’. Now:

∫Vdr e−ikc·r uc∗kc(r) ∇ e

ikv·r uv∗kv(r) = (301)

=

∫Vdr eikv−kc)·r uc∗kc(r) ∇ u

vkv(r) +

∫Vdr e−ikc·r uc∗kc(r) u

vkv(r)∇e

ikv·r . (302)

The Bloch functions uckc(r) and uvkv(r) are orthogonal and the exponential is slowly varying. Therefore the

second integral is usually neglected. Now notice that the product uc∗kc(r)∇ uvkv(r) is the same in each unit

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cell and it is multiplied by a slowly varying function which we can take outside the integral. Thus:

< k, c|Hphot|k, v > ≈ ieh

mcA0 ·

∑allcells

ei(kv−kc)·r∫Ωdr uc∗kc(r)∇ uvkv(r) = (303)

ieh

mcA0 ·

∫Vdr ei(kv−kc)·r 1

Ω

∫Ωdr uc∗kc(r)∇ u

vkv(r) . (304)

Now let’s define the ‘momentum matrix element’ between two Bloch functions:

< c|p|v > = −ihΩ

∫Ωdr uc∗kc(r)∇ u

vkv(r) . (305)

Then:

< k, c|Hphot|k, v > ≈ − e

mcA0· < c|p|v >

∫Vdr ei(kv−kc)·r . (306)

From this we see that the optical matrix element vanishes unless kc = kv. Only ‘vertical (or direct) transitions’can happen.Transitions which involve a change in (crystal) momentum can only happen at higher orders in perturbationtheory, requiring extra momentum which must be provided by phonons, traps, etc.

• Auger (and inverse Auger) processes.An Auger process is a process in which an electron and a hole recombine transferring the excess energy toanother free carrier (rather than to a photon, as in radiative processes). The inverse process, ‘impact ionization’,consists of an electron or hole with kinetic energy larger than EG (the indirect gap), transferring its energy toan electron in the valence band, exciting it across the gap, thus generating an electron-hole pair.The matrix elements for these processes are rather complicated expressions involving the the Coulomb interactionsbetween carriers. We shall only note that – as shown in the figures – the ‘impact ionization rate’ has a thresholdat (or slightly above) EG, and it grows very fast with electron or hole energy. In device physics, in the spiritof the drift-diffusion approximation, usually we refer to an ‘ionization coefficient’ α(F ), function of the electricfield. It expresses the number of pairs generated per unit length by a carrier at steady-state in a uniform electric

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field F . It is usually approximated by the expression:

α(F ) =eFthEth

e−Fth/F , (307)

where Eth is some empirical threshold energy and Fth (with dimensions of an electric field) is an empiricalconstant. Given the high kinetic energy involved in this process, calculations of the inverse Auger processmust go beyond the effective-mass, parabolic-band approximation and must be performed solving the full BTE,often using Monte Carlo techniques. Notice that phonon scattering is reduced at lower lattice temperatures.Therefore, carriers will get hotter and impact-ionize more easily at lower temperatures.

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• Shockley-Read-Hall (SRH) processes.SRH process are processes in which a trap (that is: an ionic impurity with an electronic state whose energy liesin the band-gap) can capture a free electron in the CB and the trapped electron may later recombine with ahole in VB. The opposite process (a hole is captured by the trap and later recombines with an electron in theCB) can also occur.The capture rate at which each free carrier is captured by one trap can be expressed in terms of the capturecoefficients, cn and cp, for electrons and holes, respectively, as:

electron capture rate per trap per electron = n cn = n v(n)th

σn

hole capture rate per trap per hole = p cp = p v(p)th

σp

(308)

where vth = (3kBT/m∗)1/2 is the thermal velocity of the carriers and σ the ‘capture cross section’ (in cm2)

of the trap.The ‘emission rate’ is usually denoted by en and ep and it depends exponentially on the energy ET of the trapstate:

en,p ∝ eET /(kBT ) . (309)

• Generation and recombination rates.Generation and recombination rates must be dealt with as additional ‘scattering’ terms in the collision termof the BTE. Note, however, that so far we have written this term in the non-degenerate limit. Now we mustpay attention to Pauli’s exclusion principle and write (in the limit of continuous k, so converting

∑k′ to an

integral):

∂f

∂t

∣∣∣∣GR

=V

(2π)3

∫dk′ P (k, k′)f(r, k′, t)[1− f(r, k, t)] − P (k′, k)f(r, k, t)[1− f(r, k′, t)] .

(310)Let’s simplify our lives by assuming that all functions depend only on the energy instead of on the k-vectors,and introduce the DOS in the calculations.

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1. Recombination rate.If we have free electrons in the CB, the density of full states in the energy interval (Ec, Ec + dEc) will be:

full states in the CB = fc(Ec) ρc(Ec) dEc . (311)

Similarly, the density of empty states (that is: full hole states) in the energy interval (Ev,Ev + dEv) in theVB will be:

full states in the VB = [1− fv(Ev)] ρv(Ev) dEv . (312)

Therefore, denoting by E0v the top of the VB, the electron recombination term in the collisional term abovewill be: ∫ E0v

−∞dEv fc(Ec) [1− fv(Ev)] ρv(Ev) P (Ev,Ec) . (313)

Let’s rewrite this term as follows: Note that the product of the electron and hole density can be written as:

n p =

∫ ∞

E0c

dEc

∫ E0v

−∞dEv fc(Ec) [1− fv(Ev)] ρv(Ev) ρc(Ec) . (314)

Thus the recombination rate can be written as:

R = n p 〈P (Ev,Ec)〉 , (315)

where the ‘average recombination rate’ is defined as:

〈P (Ev,Ec)〉 =

∫ ∞E0c

dEc∫ E0v−∞ dEv fc(Ec) [1− fv(Ev)] ρv(Ev) ρc(Ec) P (Ev,Ec)

∫ ∞E0c

dEc∫ E0v−∞ dEv fc(Ec) [1− fv(Ev)] ρv(Ev) ρc(Ec)

. (316)

We see that the Fermi levels in fc and fv cancel, so that this average does not depend on n or p.

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2. Generation rate.Let’s now consider the opposite process, the generation of an electron-hole pair by the same physicalmechanism. All we have to do is to exchange Ec and Ev in the previous discussion, so that:

G =

∫ ∞

E0c

dEc

∫ E0v

−∞dEv fv(Ev) [1− fc(Ec)] ρv(Ev) ρc(Ec) P (Ec, Ev) . (317)

Usually one can neglect fc compared to 1 and assume fv(Ev) ≈ 1, so that

G ≈∫ ∞

E0c

dEc

∫ E0v

−∞dEv ρv(Ev) ρc(Ec) P (Ec,Ev) , (318)

which does not depend on carrier density (unless we are dealing with Auger processes for which P itselfdepends on the density!). At equilibrium G = R, so that, since G does not depend on density, its value mustbe equal to its equilibrium value:

G = n2i 〈P (Ev,Ec)〉 . (319)

3. SRH rates.Let’s consider NTT traps, identical and non-interacting. At equilibrium we have nT = NTTfT full traps,where fT is the probability of having a full trap.The recombination (capture) term in the collision piece of the BTE will be:

∑traps

fc(Ec)(1− fT )P (ET,Ec) = NTTfc(Ec)(1− fT )P (ET,Ec) . (320)

Thus, summing over all full electron states in CB:

R = NTT

∫ ∞

E0c

dEc fc(Ec) (1− fT ) ρc(Ec) P (ET,Ec) = (321)

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= NTT (1− fT )n〈P (ET,Ec)〉 = NTT (1− fT )ncn , (322)

having taken the average

〈P (ET,Ec)〉 =

∫ ∞E0c

dEc fc(Ec) ρc(Ec) P (ET,Ec)∫ ∞E0c

dEc fc(Ec) ρc(Ec). (323)

as before and having defined the ‘capture coefficient’ cn = 〈P (ET,Ec)〉. We can finally rewrite R as

R = (NTT − nT )ncn . (324)

Similarly, we can write for the generation rate:

G = NTT

∫ ∞

E0c

dEc fT [1− fc(Ec)] ρc(Ec) P (Ec,ET ) , (325)

and, assuming as usual fc << 1,

G = nTen , (326)

where en is independent of density.4. Rate equations.

Finally, we are ready to derive the SRH rate equations.The net generation/recombination rate will be:

Net GR rate = nTen − (NTT − nT )ncn = Gn − Rn . (327)

Including also holes – so far neglected but obeying similar equations – the total change in the density of fulltraps will be:

∂nT

∂t= Rn − Gn − Rp + Gp . (328)

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At steady state

cnn(NTT − nT )− nTen = cppnT − (NTT − nT )ep . (329)

Solving this equation for nT we get:

nT =NTT (cnn+ ep)

cnn+ en + cpp + ep. (330)

So, the net electron recombination at steady state will be:

Us = Rn −Gn =cncpNTTnp− enepNTT

cnn+ en + cpp + ep. (331)

At equilibrium when the net rate vanishes,

cncpnp = enep → enep

cncp= n2i , (332)

and, if we can assume that en, ep, cn, and cp assume always the equilibrium values (not always true!), then:

Us = cncpNTTnp− n2i

cnn+ en + cpp+ ep. (333)

Using the equilibrium carrier densities n0 and p0 in the denominator, we can define a constant c as follows:

c = cncpNTT1

cnn0 + en + cpp0 + ep, (334)

so that

Us = c (np− n2i ) . (335)

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The constant τn = cp0 is called the ‘electron lifetime’. Indeed, if we generate a small perturbation of theelectron density, n = n0 + δn, then np0 = (n0 + δn)p0 = n0p0 + p0δn and

Us = c p0δn =δn

τn. (336)

Several alternative equivalent expressions can be found for the net recombination rate Us. For example, notingthat at equilibrium

cnn(NTT − nT ) = σnv(n)thNTT [1− fT (ET )] = enNTTfT (ET ) , (337)

that whenever the trap occupation is dictated by a Fermi function

fT (ET ) =1

1 + e(ET−EF )/(kBT ), (338)

and using the Boltzmann approximation n = ni exp[(EF − Ei)/(kBT )], we get

en = v(n)thσnni e

(ET−Ei)/(kBT ) , (339)

and similarly for ep, so that, assuming that v(n)th

≈ v(p)th

= vth:

Us =σnσpvthNTT (pn− n2i )

σn[n+ nie(ET−Ei)/(kBT )] + σp[p + nie

(Ei−ET )/(kBT )]. (340)

This expression shows that traps whose energy is close to mid-gap ET ≈ Ei are the most efficientrecombination centers (since the denominator is minimized for ET = Ei). Colinge and Colinge list the manypossible simplifications one can produce from this expression.

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• Four examples.

1. Decay of photoexcited carriers.In p-type Si, light of energy larger than the gap excites electron-hole pairs uniformly distributed throughoutthe illuminated sample. Let G be the generation rate due to the light. Let’s assume that the light source isweak enough so that the hole concentration, p, remains essentially the concentration p0 in the absence oflight. Thus the electric field, mainy due to the hole charge, vanishes (F = 0) and we have a uniform electrondistribution, ∂n/∂x = 0. The continuity equation (the first of Eqns. (280), page 83) now reads:

∂n

∂t= G − Us , (341)

since in a uniform situation the divergence of the current vanishes. Using

Us =δn

τn=

n− n0

τn(342)

above, we see that the steady-state solution is

n = n0 + τnG , (343)

where n0 is the electron concentration in the sample in the absence of light. Let’s now turn off the lightsource at t = 0. Then:

∂n

∂t= − n− n0

τn, (344)

The solution is:

n = n0 + τn G e−t/τn . (345)

2. Steady-state injection from one side.Let’s consider now the steady-state injection of carriers from one side at x = 0 (as if we were illuminating the

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sample from the left). The continuity equation (the first of Eqns. (280), page 83) now reads:

∂n

∂t=

1

e

∂ jn

∂x− n− n0

τn, (346)

while electron current continuity (the first of Eqns. (281), page 83) reads:

jn = e Dn∂n

∂x, (347)

having taken the diffusion constant Dn outside the gradient, since it is independent of position. Combiningthese two equations we get a ‘diffusion equation’:

∂n

∂t= Dn

∂2n

∂x2− n− n0

τn, (348)

with boundary conditions n(x = 0) = n(0) (some constant, the steady-state electron concentration at theilluminated side) while n(x → ∞) = n0, the (minority) electron concentration in the sample in the absenceof external generation. At steady state (∂n/∂t = 0) the solutions is:

n(x) = n0 + [n(0)− n0] e−x/Ln , (349)

where Ln = (Dnτn)1/2 is the ‘diffusion length’.

If now we extract the electrons from a contact at x = W , then we must replace the boundary conditionn(x → ∞) = n0 with n(W ) = n0 and the solution becomes:

n(x) = n0 + [n(0)− n0]sinh

(W−xLn

)sinh(W/Ln)

. (350)

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The current density at W will be

jn(W ) = e Dn∂n

∂x

∣∣∣∣W

= −e[n(0)− n0]Dn

Ln

1

sinh(W/Ln). (351)

3. Transient and steady-state diffusion.When shining a laser pulse on a sample, carriers are generated optically in a small region of the sample. Theirtransport after the short pulse is described by the following diffusion equation which can be derived from theDDEs (drift-diffusion equations, Eqns. (280) and (281) on page 83 coupled to the GR terms) as done above:

∂n

∂t= −n− n0

τn+ µnF

∂n

∂x+ Dn

∂2n

∂x2. (352)

If no external field is applied to the sample, then the solution is:

n(x, t) =N

(4πDnt)1/2exp

(− x2

4Dnt− t

τn

)+ n0 , (353)

where N is the total number of pairs per unit area generated by the pulse. If an external field is applied,then the solution is given by the same expression but with x replaced by (x + µnFt): The whole Gaussian‘packet’ of carriers simply shifts along the negative x-axis with velocity µnF .

4. Surface recombination.We have described above generation and recombination processes occurring in the bulk of the semiconductor,often mediated by traps states. Surfaces, however, usually present a higher density of defects – and so of trapstates – because the termination of the crystal often leaves broken ionic bonds with electronic states whoseenergy may fall within the gap. The SRH processes mediated by these surface traps can be described in a waycompletely analogous to what we have done for bulk SRH states.Let’s now consider our p-type sample and assume that at the left edge (x = 0) we have a density Nst (per

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unit area) surface traps with an associated ‘electron surface recombination velocity’

Sn = σnv(n)thNst . (354)

This means that carriers reaching the left edge will recombine there, that is

eDn∂n

∂x= eSn[n(0)− n0] . (355)

In words: The in-flux of electrons carried by the diffusion current at the left-edge must be equal to carrierout-flux due to their recombination. Then we expect that as we approach the left-edge of the sample theelectron density will begin to drop from its bulk value n0 as electrons disappear at the edge. The equationdescribing this situation is

∂n

∂t= G − n− n0

τn+ Dn

∂2n

∂x2, (356)

whose solutions, with the boundary condition above, is:

n(x) = n0 + τnG

[1 − τnSne

−x/LnLn + Sn

]. (357)

For Sn → 0 this expression tends to n0 + τnG, result we have already obtained above. When the surfacerecombination velocity is very fast, then n(x) → n0+τNG[1−exp(−x/Ln)], so that the minority carrierconcentration at the surface, n(0), approaches its equilibrium value as if the optical generation did not occur.

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