Springer Series in Electronics and Photonics 24 Edited by D. H. Auston

Springer Series in Electronics and Photonics Editors: D.H. Auston W. Engl T. Sugano

Volume 21 Picosecond Electronics and Optoelectronics Editors: G.A. Mourou, D.M. Bloom, C.-H. Lee

Volume 22 High-Speed Electronics Basic Physical Phenomena and Device Principles Editors: B. Kallback and H. Beneking

Volume 23 Gyided-Wave ACOllstOOptic Interactions, Divices, and Applications Editor: C. S. Tsai

Volume 24 Picosecond Electronics and Optoelectronics II Editors: EJ. Leonberger, C.H. Lee, E Capasso, and H. Morkoc

This series was originally published under the title Springer Series in Electrophysics and has been renamed starting with Volume 22.

Volumes 1-20 are listed on the back inside cover

Picosecond Electronics and Optoelectronics II Proceedings of the Second OSA-IEEE (LEOS) Incline Village, Nevada, January 14-16, 1987

Editors: F. J. Leonberger, C. H. Lee, F. Capasso, H. Morkoc

With 235 Figures

Springer-Verlag Berlin Heidelberg New York London Paris Tokyo

Dr. Frederick John Leonberger United Technologies Research Center, East Hartford, CT 06108, USA

Chi H. Lee University of Maryland, Dept. of Electrical Engineering, College Park, MD 20742, USA

Federico Capasso AT&T Bell Laboratories, Room 7A-209, 600 Mountain Avenue Murray Hill, NJ 07974, USA

Hadis Morkoc University of Illinois, Dept. of Electrical Engineering, Champaign Urbana, IL 61801, USA

Series Editors:. Dr. David H. Auston Columbia University, Dept. of Electrical Engineering, New York, NY 10027, USA

Professor Dr. Walter Engl Institut fUr Theoretische Elektrotechnik, Rhein.-Westf. Technische Hochschule, Templergraben 55, D-5100 Aachen, Fed. Rep. of Germany

Professor Takuo Sugano Department of Electronic Engineering, The Faculty of Engineering, The University of Tokyo, 7-3-1, Hongo, Bunkyo-ku, Tokyo, 113, Japan

ISBN-13:978-3-642-72972-0 e-ISBN-13:978-3-642-72970-6 DOl: 10.1007/978-3-642-72970-6

This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, re-use of illustrations, recitation, broadcasting, reproduction on microfilms or in other ways, and storage in data banks. Duplication of this publication or parts thereof is only permitted under the provisions of the German Copyright Law of September 9, 1965, in its version of June 24, 1985, and a copyright fee must always be paid. Violations fall under the prosecution act of the German Copyright Law.

© Springer -Verlag Berlin Heidelberg 1987 Softcoverreprint of the hardcover 1st edition 1987

The use of registered names, trademarks etc. in this publication does not imply, even in the.absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use.

2153/3150-543210

Preface

Over the past five years, there has been an enormous increase in the inter­est in and understanding of electronic and optoelectronic devices operating in the picosecond (multigigahertz) range. This has been fueled in a sig­nificant way by the spectacular advances in picosecond laser technology, electro optic sampling, III-V devices, and wideband fiber optic systems. Partly to address these advances, a new conference jointly sponsored by the IEEE Lasers and Electrooptics Society (IEEE (LEOS)) and the Op­tical Society of America (OSA) was founded and its first meeting held in March 1985. The purpose of this meeting was to bring together work­ers in the areas of electronics and optoelectronics who share a common interest in the physics and technology of picosecond solid-state electronic and optoelectronic devices, their multigigahertz applications, and ultrafast measurement techniques. Emphasis was placed on the interdisciplinary as­pects of these areas, since each area is covered by its own topical meeting. This meeting was quite successful and led to a second meeting, of which this volume forms the proceedings.

The Second Picosecond Electronics and Optoelectronics Meeting was held at Incline Village, Nevada, January 14-16, 1987. Subjects cov­ered at the meeting included picosecond and femtosecond optical prob­ing of electronic devices and integrated circuits, multi gigahertz digital and microwave electronic devices and circuits, cryogenic operation of elec­tronic circuits and striplines, high-speed lasers, detectors and integrated optic modulators, picosecond carrier transport, resonant tunneling and quantum-well devices, photoconductive switches, and optical microwave devices and applications. The meeting was attended by over 215 scientists and 65 papers were presented. The conference was co-sponsored by the IEEE Lasers and Electrooptics Society and the Optical Society of America in cooperation with the IEEE Electron Device and Microwave Theory and Techniques Societies.

We gratefully aclmowledge the generous grants from the Air Force Office of Scientific Research (AFOSR), the National Science Foundation (NSF) and the Office of Naval Research (ONR) which provided funding for the meeting. Finally, we would specially like to thank Joan Carlisle of the Optical Society of America for her personal and thoroughly professional management of this meeting. East Hartford, June 1987 The Editors

V

Contents

Introduction By F.J. Leonberger, C.H. Lee, F. Capasso, and H. Morkoc

Part I High-Speed Probing Techniques

A Non-contact Electro-optic Prober for High Speed Integrated Circuits

1

By J.A. Valdmanis and S.S. Pei (With 6 Figures) ............ 4

Photoconductive Generation of Subpicosecond Electrical Pulses and Their Measurement Applications By D. Grischkowsky, C.-C. Chi, LN. Duling III, W.J. Gallagher, N.H. Halas, J.-M. Halbout, and M.B. Ketchen (With 7 Figures) 11

Picosecond Sampling of GaAs Integrated Circuits By K.J. Weingarten, M.J.W. Rodwell, and D.M. Bloom (With 10 Figures) ................................... 18

Electro-optic Sampling of High-Speed, InP-Based Integrated Circuits By J.M. Wiesenfeld, R.S. Tucker, A. Antreasyan, C.A. Burrus, and A.J. Taylor (With 4 Figures) . . . . . . . . . . . . . . . . . . . . . . . . 25

Electro-optic Sampling Analysis of Timing Patterns at Critical Internal Nodes in Gigabit GaAs Multiplexers/Demultiplexers By X.-C. Zhang, R.K. Jain, and R. Hickling (With 6 Figures) 29

A Technique for Wing Suppressed IR Sampling By J. Nees and S. Williamson (With 3 Figures) ............. 33

Picosecond Electrical Pulse for VLSI Electronics Characterization By J.-M. Halbout, P. May, M.B. Ketchen, H. Jackel, G.P. Li, C.-C. Chi, M. Scheuermann, and M. Smyth (With 3 Figures) ... 36

Ultrafast Optics Applied to Modern Device Research By G. Mourou, K. Meyer, J. Whitalcer, M. Pessot, R. Grondin, and C. Caruso (With 8 Figures) ........................ 40

VII

An Optically Strobed Sample and Hold Circuit By C. McConaghy (With 4 Figures) . . . . . . . . . . . . . . . . . . . . . . 49

Laser Pulsed E-Beam System for High Speed I.C. Testing By P. May, J.-M. Halbout, and G. Chiu (With 2 Figures) ...... 53

Photo emissive Testing of High-Speed Electrical Waveforms By A.M. Weiner, P.S.D. Lin, and RB. Marcus (With 5 Figures) 56

High-Speed Optical Logic Using GaAs By H.M. Gibbs, N. Peyghambarian, Y.H. Lee, J.L. Jewell, A. Migus, A. Antonetti, D. Hulin, and A. Mysyrowicz . . . . . . . . . 61

Comparison of Sampling Oscilloscopes with ~35 ps Transition Durations. By J.R Andrews (With 2 Figures) .............. 64

Picosecond Optoelectronic Study of a Thin Film Transmission Line Structure. By G. Arjavalingam, J.-M. Halbout, G.V. Kopcsay, and M.B. Ketchen (With 2 Figures) ...................... 67

Part II Transient Transport

Direct Subpicosecond Measurement of Carrier Mobility of Photo excited Electrons in GaAs By M.C. Nuss and D.H. Auston (With 4 Figures) ........... 72

Nonstationary Transport in MODFETs and Heterojunction Devices. By K. Hess (With 3 Figures) .................... 79

Monte Carlo Investigation of Hot Photo excited Electron Relaxation in GaAs. By M.A. Osman, H.L. Grubin, P. Lugli, M.J. Kann, and D.K. Ferry (With 5 Figures) ........................ 82

Longitudinally Localized Optical Carrier Injection for Femtosecond Transport Studies By D.H. Reitze, T.R Nuss, and M. Downer (With 5 Figures) ... 86

Femtosecond Nonequilibrium Electronic Heat Transport in Thin Gold Films By S.D. Brorson, J.G. Fujimoto, and E.P. Ippen (With 4 Figures) 89

Part III Ballistic Transport and Resonant Tunneling

Ballistic Transport and Energy Spectroscopy of Hot Electrons in THETA Devices By M. Heiblum (With 7 Figures) . . . . . . . . . . . . . . . . . . . . . . . . 94

VIII

Microwave and Millimeter-Wave Resonant Tunneling Diodes By T.C.L.G. Sollner, E.R Brown, and W.D. Goodhue (With 7 Figures) ............................ . . . . . . .. 102

Quantum Transport Calculation of Resonant-Tunneling Response Time. By W.R Frensley (With 4 Figures) ................. 109

Resonant Tunneling Electron Spectroscopy. By F. Capasso, S. Sen, A.Y. Cho, and A.L. Hutchinson (With 2 Figures) ............ 113

Analysis of Transit Time Effects due to Spacer Layers in Quantum Well Oscillators. By V.P. Kesan, T.D. Linton, P.A. Blakey, D.P. Neikirk, and B.G. Streetman (With 4 Figures) .......... 116

Part IV Quantum Wells

High-Speed Phenomena in GaAs Multiple-Quantum-Well Structures. By A. Mysyrowicz, D. Hulin, A. Migus, A. Antonetti, H.M. Gibbs, N. Peyghambarian, and H. Morkoc (With 3 Figures) 122

Picosecond Carrier Transport in GaAs Quantum Wells By J. Shah and RA. Hopfel (With 8 Figures) .............. 127

Quantum-Confined Stark Effect in InGaAs/lnP Quantum Wells Grown by Metal-Organic Chemical Vapor Deposition By 1. Bar-Joseph, C. Klingshirn, D.A.B. Miller, D.S. Chemla, U. Koren, and B.1. Miller (With 2 Figures) ................ 135

Dynamics of Below-Gap Photo excitation in GaAs Quantum Wells By J.E. Zucker, D.S. Chemla, A. Von Lehmen, and J.P. Heritage (With 3 Figures) .................................... 139

Optical Reading of InGaAs Modulation Doped Field Effect Transistor. By 1. Bar-Joseph, D.S. Chemla, C. Klingshirn, D.A.B. Miller, J.M. Kuo, and T.Y. Chang (With 2 Figures) 143

Part V High-Speed Electronic Devices

Molecular Beam Epitaxy (MBE) for High-Speed Devices By A.Y. Cho ...................................... 148

Multigigahertz Logic Based on InP MISFETs Exhibiting Extremely High Transconductance. By A. Antreasyan, P.A. Garbinski, V.D. Mattera Jr., and H. Temkin (With 5 Figures) ........... 152

Millimeter-Wave Integrated Circuits By B.B. Spielman (With 2 Figures) ...................... 156

IX

Enhanced Performance Ultrabroadband Distributed Amplifiers By G. Zdasiuk, M. Riaziat, R. LaRue, C. Yuen, and S. Bandy (With 6 Figures) ......... . . . . . . . . . . . . . . . . . . . . . . . . . .. 160

High-Performance Quarter-Micron-Gate MODFET By J.J. Berenz (With 3 Figures) ........................ 165

Progress and Challenges in HEMT LSI Technology By M. Abe, T. Mimura, K. Kondo, and M. Kobayashi (With 8 Figures) ... . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 169

Picosecond Switching in Josephson Tunnel Junctions By R. Sobolewski, D.R. Dykaar; T.Y. Hsiang, and G. Mourou (With 4 Figures) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 177

Modulation Efficiency Limited High Frequency Performance of the MODFET. By M.C. Foisy, J.C. Huang, P.J. Tasker, and L.F.Eastman (With 2 Figures) ...................... 181

Development of 18 GHz GaAs Static Frequency Dividers and Their Evaluation by Electrooptic Sampling. By J.F. Jensen, K.J. Weingarten, and D.M. Bloom (With 5 Figures) .......... 184

Characteristics of Shielded Microstrip Lines on GaAs-Si at Millimeter-Wave Frequencies By M.l. Aksun and H. Morkoc (With 4 Figures) ............. 188

Part VI Fast Lasers and Detectors

Characteristics, Packaging and Physics of Ultra High Speed Diode Lasers and Detectors. By J.E. Bowers and C.A. Burrus. . . . . . .. 194

Energy Variations in Optical Pulses from Gain-Switched AIGaAs Diode Lasers By R.T. Hawkins, J.H. Goll, and N.C. Anheier (With 2 Figures) 198

Frequency Chirping in Pulse Modulated Gain and Index Guided Single Quantum Well Lasers By A. Larsson, P. Andersson, and A. Yariv (With 4 Figures) 201

InP fGaInAsfInP PIN Photodiode with FWHM < 18 ps By S.Y. Wang, K.W. Carey, and B.H. Kolner (With 4 Figures) 205

Fast GaAs Photoconductive Detectors with High Sensitivity Integrated in Coplanar Systems onto GaAs Substrates By H. Schumacher, U. Salz, and H. Beneking (With 4 Figures) 209

MESFET Compatible IMSM Detectors By D.L. Rogers (With 4 Figures) ........................ 214

x

Picosecond Optical Autocorrelation Experiments on Fast Photo detectors By T.F. Carruthers and J.F. Weller (With 3 Figures) ......... 220

Detection of 10 JLm Infrared Radiation via Intersubband Absorption in Doped GaAs Quantum Wells. By B.F. Levine, K.K. Choi, C.G. Bethea, J. Walker, and R.J. Malik (With 2 Figures) ...... 224

Part VII Photoconductive Switching Devices

Carrier Lifetime Dependence on Ion Implantation in Silicon By F.E. Doany, D. Grischkowsky, and C.-C. Chi (With 3 Figures) 228

An Investigation of Photoconductive Picosecond Microstripline Switches on Self-Implanted Silicon on Sapphire (SOS) By P.' Polak-Dingels, G. Burdge, C. H. Lee, A.C. Seabaugh, R.T. Brundage, M.l. Bell, and J. Albers (With 4 Figures) ...... 232

Picosecond Optoelectronic Switches Using Composite Electronic Materials. By E.A. Chauchard, C. H. Lee, V. Diadiuk, and G.W. Turner (With 2 Figures) ...................... 237

High Speed, High Repetition Rate, High Voltage Photoconductive Switching. By W.R. Donaldson (With 2 Figures) ............ 241

Generation and Forming of Ultrashort High Voltage Pulses By H.A. Sayadian, S.T. Feng, J. Goldhar, and C. H. Lee (With 5 Figures) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 245

Silicon Pulse Sharpening Diodes - Switching Kilovolts in Tens of Picoseconds. By M.D. Pocha, J.D. Wiedwald, C.G. Dease, and M.M. Contreras (With 5 Figures) .................... 248

Graphite as a Picosecond Laser Activated Opening Switch By E.A. Chauchard, C. H. Lee, C.Y. Huang, and A.M. Malvezzi (With 2 Figures) ....... . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 252

Part VIII Optical Microwave Techniques

Radar and Electronic Warfare Applications of Multigigahertz Optical Components and Systems. By H.F. Taylor (With 2 Figures) ... . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 256

Characteristics and Applications of Wideband Guided-Wave Devices. By C.M. Gee, R.J. Morrison, G.D. Thurmond, and H.W. Yen (With 4 Figures) ........ . . . . . . . . . . . . . . . .. 261

XI

A New Optoelectronic CW Microwave Source By C.J. Clark, E.A. Chauchard, K.J. Webb, K. Zaki, C.H. Lee, P. Polak-Dingels, H.A. Hung, and H.C. Huang (With 4 Figures) 269

Optical Intensity Modulation to 40 GHz Using a Waveguide Electrooptic Switch. By S.K. Korotky, G. Eisenstein, R.S. Tucker, J.J. Veselka, and G. Raybon (With 5 Figures) .............. 272

Picosecond Response of an Optically Controlled Millimeter Wave Phase Shifter By C.-K.C. Tzuang, D. Miller, T.-H. Wang, P. Cheung, T. Itoh, D.P. Neikirk, P. Williams, and M. Downer (With 3 Figures) .... 276

Picosecond Optoelectronic Transceivers By A.P. DeFonzo, C.R. Lutz, and M. Jarwala (With 4 Figures) .. 280

High Speed Opto-isolator for Radar Applications By J.P. Anthes, P. Garcia, K.Y. Lau, and 1. Ury (With 3 Figures) 285

Index of Contributors . . . . . . . . . . . . . . . . . . . . . . . . . .. 289

XII