status of pre-production at tesla

22
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR 1 Václav Vrba Institute of Physics AS CR, Prague Status of pre-production at TESLA

Upload: nodin

Post on 31-Jan-2016

30 views

Category:

Documents


0 download

DESCRIPTION

Status of pre-production at TESLA. Václav Vrba Institute of Physics AS CR, Prague. Till the end of June Tesla shell provide 20 2-Tile and 20 3-Tile wafers; - PowerPoint PPT Presentation

TRANSCRIPT

Page 1: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR1

Václav Vrba

Institute of Physics AS CR, Prague

Status of pre-production at TESLA

Page 2: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR2

. Till the end of June Tesla shell provide 20 2-Tile and

20 3-Tile wafers;

More of 50% of this production was ready at the end of May, but but it appeared that for important part of wafers the “high”P-spray dose was missing (done just “low” dose have been done);

The clarification of the P-spray problem caused the delay in the preliminary announced delivery;

About 25% of the planned delivery was sent out on 5th June to the Sensor Labs some organizational problems with the redistribution of wafers via CERN;

Because the wafers did not reach the Sensors Labs in time, I asked Tesla provide me their measurements to be presented on the Pixel week;

Due to several accumulated obstacles as: significant bigger lead time for wafers, the regular maintenance of double side aligner, etc. Tesla will probably ask for delay of end of June term.

Page 3: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR3

Page 4: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR4

Page 5: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR5

Page 6: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR6

Page 7: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR7

Page 8: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR8

Page 9: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR9

Page 10: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR10

Conclusions

• TESLA finished 25% of second pre-production. The sensors conform with QA criteria on measurements performed by vendor.

Page 11: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR11

Page 12: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR12

Page 13: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR13

Page 14: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR14

New alignerHandling spots

Page 15: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR15

Basic characteristics

Ufd 80 V

Page 16: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR16

Basic characteristics (cont)

Iox @ 50 V 100 pA

Page 17: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR17

Basic characteristics (cont)

3-Tiles - New delivery

Good Tiles - Old delivery

Significant improvement of leakage current !

Page 18: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR18

Basic characteristics (cont)

Batch Waferp-spray-

new formula

p-spray - old

formula-/cm 2̂ -/cm 2̂

ATL-30 7 2.55E+12 2.06E+12ATL-31 7 3.12E+12 2.63E+12ATL-33 8 3.13E+12 2.45E+12ATL-34 4 3.22E+12 2.92E+12

Diode with Guard ring

P-spray doses

Page 19: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR19

DeliveryAccording contract:

11 3-tile wafers

2 2-tile wafers

1 2-tile wafer (Prague, replacement of nonconform.)

1 2-tile wafer (NM, broken)

Additionally available:

2 3-tile wafers

9 2-tile wafers

Page 20: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR20

Page 21: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR21

Page 22: Status of pre-production at TESLA

Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR22