status of pre-production at tesla
DESCRIPTION
Status of pre-production at TESLA. Václav Vrba Institute of Physics AS CR, Prague. Till the end of June Tesla shell provide 20 2-Tile and 20 3-Tile wafers; - PowerPoint PPT PresentationTRANSCRIPT
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR1
Václav Vrba
Institute of Physics AS CR, Prague
Status of pre-production at TESLA
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR2
. Till the end of June Tesla shell provide 20 2-Tile and
20 3-Tile wafers;
More of 50% of this production was ready at the end of May, but but it appeared that for important part of wafers the “high”P-spray dose was missing (done just “low” dose have been done);
The clarification of the P-spray problem caused the delay in the preliminary announced delivery;
About 25% of the planned delivery was sent out on 5th June to the Sensor Labs some organizational problems with the redistribution of wafers via CERN;
Because the wafers did not reach the Sensors Labs in time, I asked Tesla provide me their measurements to be presented on the Pixel week;
Due to several accumulated obstacles as: significant bigger lead time for wafers, the regular maintenance of double side aligner, etc. Tesla will probably ask for delay of end of June term.
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR3
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR4
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR5
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR6
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR7
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR8
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR9
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR10
Conclusions
• TESLA finished 25% of second pre-production. The sensors conform with QA criteria on measurements performed by vendor.
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR11
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR12
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR13
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR14
New alignerHandling spots
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR15
Basic characteristics
Ufd 80 V
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR16
Basic characteristics (cont)
Iox @ 50 V 100 pA
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR17
Basic characteristics (cont)
3-Tiles - New delivery
Good Tiles - Old delivery
Significant improvement of leakage current !
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR18
Basic characteristics (cont)
Batch Waferp-spray-
new formula
p-spray - old
formula-/cm 2̂ -/cm 2̂
ATL-30 7 2.55E+12 2.06E+12ATL-31 7 3.12E+12 2.63E+12ATL-33 8 3.13E+12 2.45E+12ATL-34 4 3.22E+12 2.92E+12
Diode with Guard ring
P-spray doses
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR19
DeliveryAccording contract:
11 3-tile wafers
2 2-tile wafers
1 2-tile wafer (Prague, replacement of nonconform.)
1 2-tile wafer (NM, broken)
Additionally available:
2 3-tile wafers
9 2-tile wafers
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR20
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR21
Pixel week, Marseille, June 2002 Václav Vrba, Institute of Physics, AS CR22