ME119Fall 2013

Instructors:

Prof. Liwei Lin, Room 621E Sutardja Dai Hall, (510)643-5495, lwlin@me.berkeley.eduTeaching Assistants, Xining Zange-mail

Class Meetings:

Lecture, Tuesday and Thursday, 3108 Etcheverry, 9:30 - 11:00amOffice Hours, Monday & Thursday 1-2pmTA Office Hours, Monday 5-6pm, and Wed 4-5pm, 1113 Etcheverry

Course Descriptions:

Fundamentals of microelectromechanical systems including design, fabrication of microstructures; surface-micromachining, bulk-micromachining, LIGA, and other micro machining processes; fabrication principlesof integrated circuit device and their applications for making MEMS devices; high-aspect-ratiomicrostructures; scaling issues in the micro scale (heat transfer, fluid mechanics and solid mechanics); devicedesign, analysis, and mask layout

Prerequisite: Physics 7B,

Text Books:

R.C. Jaeger, "Introduction to Microelectronics Fabrication," 2nd edition, Addison-Wesley, 2000.(required)S. Senturia, "Microsystem Design," Kluwer Academic Publishers, 2000. (reference)M. Madou, "Fundamentals of Microfabrication," CRC Press, 1997. (reference)T.R. Hsu, "MEMS & Microsystems Design and Manufacture," McGraw Hill, 2001. (reference)G.T.A. Kovacs, "Micromachined Transducers - Sourcebook," McGraw-Hill, 1998. (reference)J.P. Uyemura, "Principle Desing of CMOS Integrated Circuits Using L-EDIT," PWS PublishingCompany, 1995. (reference)S.M. Sze, "Semiconductor Sensors," John Wiley & Sons, Inc, New York, 1994. (reference)

Projects:

An individual final project is required. The project proposal is due at the middle of the semester and an oralproject presentation is to be held at the end of the semester.

Grading:

25% homework and participation (paper reading)10% MUMPs Design30% 2 exams (10% Quiz I, 20% Quiz II)35% final project (concept 10%, oral presentation 10%, written report 15%)

http://www.me.berkeley.edu/~lwlin/me119/2013.html

1 of 2 11/11/2013 4:57 PM

Class Schedule

Selected Papers

Supplementary Webside

Projects

Last updated: May 10, 2013 by Liwei Lin

http://www.me.berkeley.edu/~lwlin/me119/2013.html

2 of 2 11/11/2013 4:57 PM