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The top documents tagged [impurity implantation]
Chapter 2 Cmos Fabrication Technology and Design Rules
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1.Introduction and application. 2.Ion implantation tools. 3.Dopant distribution. 4.Mask thickness and lateral distribution. 5.Effect of channeling. 6.Damage
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Low Temperature Characteristics of ZnO Photoluminescence Spectra Matthew Xia Columbia University Advisor: Dr. Karl Johnston
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1 Overview of Fabrication Processes of MOSFETs and Layout Design Rules
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