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The top documents tagged [inverse lithography]
ITRS Summer Public Conference, July 15, San Francisco, CA, USA 1 Modeling and Simulation ITWG Jürgen Lorenz – Fraunhofer IISB – Chairperson M&S ITWG ITWG/TWG
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ITRS Winter Public Conference, December3, Makuhari Messe, Japan 1 ITRS Summer Conference, July 12, 2012, San Francisco, CA, USA Modeling and Simulation
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ITRS Summer Public Conference, July 14, 2010, San Francisco, CA, USA 1 Modeling and Simulation ITWG Bert Huizing – NXP – European M&S ITWG and IRC member
215 views
Benchmarking of Mask Fracturing Heuristics Tuck Boon Chan, Puneet Gupta, Kwangsoo Han, Abde Ali Kagalwalla, Andrew B. Kahng and Emile Sahouria
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