×
Log in
Upload File
Most Popular
Study
Business
Design
Technology
Travel
Explore all categories
The top documents tagged [mask cost design]
Toward Performance-Driven Reduction of the Cost of RET-Based Lithography Control Dennis Sylvester (
[email protected]
), Jie Yang (Univ. of Michigan,
213 views
A Cost-Driven Lithographic Correction Methodology Based on Off-the-Shelf Sizing Tools
218 views