×
Log in
Upload File
Most Popular
Study
Business
Design
Technology
Travel
Explore all categories
The top documents tagged [polysilicon mems device]
Ksjp, 7/01 MEMS Design & Fab Introduction to MEMS Design and Fabrication Kristofer S.J. Pister Berkeley Sensor and Actuator Center UC Berkeley
221 views
HOW SMALL CAN WE TAKE THIS? - ART OF MINIATURIZATION
219 views