the nascent center’s r2r nanofabrication research and … · 2019-10-14 · gao, ying, et al....

Larry Dunn, Ph.D., NASCENT Asst. Director, Industry & Innovation ProgramsOctober 7, 2019

The NASCENT Center’s R2R Nanofabrication Research and Capabilities

NASCENT

Talk Outline• Introduction to NASCENT & Why Nano?

• NASCENT facilities

• Data Collection, and Physical Data Analytics

• Working with NASCENT & Accessing Facilities2NASCENT Intro - AIMCAL R2R Conference

NASCENT

NSF Engineering Research Center (ERC) Program

• Flagship NSF funding mechanism• Multi-university research centers collaborating with

industry & government• Focus areas:

– Biotech & Health Care– Energy, Sustainability & Infrastructure– Microelectronics, Sensing & Information Technology– Advanced Manufacturing

• http://erc-assoc.org/

3NASCENT Intro - AIMCAL R2R Conference

http://erc-assoc.org/

NASCENT

NASCENT Background• Established in 2012 with NSF award to UT Austin.• Annual budget: ~$5 million, >100 people: grad students,

undergrads, postdocs, staff & faculty.• Headquartered at UT Austin

• NASCENT’s partner Universities: UC Berkeley, Univ. of Houston, and Univ. of New Mexico


NASCENT

NASCENT’s Vision


To create and validate a scalable and cost-effective nanomanufacturing infrastructure.

To enable future nanotech factories for deploying promising nanoscience concepts to address societal needs.

NASCENT

"The Valley of Death"


Promising nanoscience funded by NSF and other

federal agencies

1D and 2D NanomaterialsOptical, Electronic, Magnetic and Bio

NanomaterialsMolecular Precision

Patterning and etchingNanoscale Precision SystemsSub-wavelength Optical and Tip-based Characterization

High value products developed and commercialized by our Industrial

Partners to address major societal needs

Energy-efficient Mobile ElectronicsEnergy-efficient Mobile Displays

including Wearables (AR/MR)IOTs: Low-cost Flexible electronics

Modeling, computational intelligence & physical analytics

Customized Cell Therapies for Cancer and Autoimmune Diseases

Res

ourc

es ($

)

Level of Development (e.g., Technology Readiness Level)

$$$$

¢

Science to Scalability

Bridging the Gap by Creating

NASCENT 7NASCENT Intro - AIMCAL R2R Conference

Res

ourc

es

High value products commercialized by our Industrial Partners to address

major societal needs

Promising nanoscience funded by NSF and other

federal agencies


Level of Development (e.g., Technology Readiness Level)

$$$$

¢


Industry Partners

NASCENT

Why Nano?• At the nanoscale materials and phenomena are different.


https://www.nano.gov/nanotech-101/special

Reactivity Increases with Surface Area (e.g., catalysts)

> Football field!

1000 nm = 1 µm

https://www.nano.gov/nanotech-101/special

NASCENT

Why Nano?• Nanomanufacturing can allow dramatically better performance


Ahn, Se Hyun, et al. "High-performance wire-grid polarizers using jet and Flash™ imprint lithography." Journal of Micro/Nanolithography, MEMS, and MOEMS 12.3 (2013): 031104. https://doi.org/10.1117/1.JMM.12.3.031104 https://doi.org/10.1117/1.JMM.12.3.031104

Wire-grid Polarizer

Contrast Ratio: ~10k:1

https://www.lg.com/us/business/video-walls/lg-49VL5B

Conventional LCD contrast ratio (chemical-based polarizer films)

Amimori, Ichiro, et al. "24.3: Optical and Mechanical Properties of Stretched PDLC Films for Scattering Polarizers." SID Symposium Digest of Technical Papers. Vol. 33. No. 1. Oxford, UK: Blackwell Publishing Ltd, 2002. https://doi.org/10.1889/1.1830911

Contrast Ratio: 1300:1

https://doi.org/10.1117/1.JMM.12.3.031104

https://www.lg.com/us/business/video-walls/lg-49VL5B

https://doi.org/10.1889/1.1830911

NASCENT

Why Nano?• Nanomanufacturing can allow completely new properties


3 µm

200 nm

1 µm

https://phys.org/news/2014-09-invisibility-cloaks-closer-digital-metamaterials.htmlhttps://www.knowablemagazine.org/article/physical-world/2018/invisibility-aside-metamaterials-are-making-waves

Invisibility

Super-lenses

Jiang, Zhi Hao, et al. "Tailoring dispersion for broadband low-loss optical metamaterials using deep-subwavelength inclusions." Scientific reports 3 (2013): 1571. https://doi.org/10.1038/srep01571

https://phys.org/news/2014-09-invisibility-cloaks-closer-digital-metamaterials.html

https://www.knowablemagazine.org/article/physical-world/2018/invisibility-aside-metamaterials-are-making-waves

https://doi.org/10.1038/srep01571

NASCENT

Nano has Already Changed the World


Enabling Moore's Law to Continue: Staggering Efforts/Investments!

https://phys.org/news/2018-12-law.html v

Curve shows transistor count doubling every two years.

"Intel Now Packs 100 Million Transistors in Each Square Millimeter"

https://spectrum.ieee.org/nanoclast/semiconductors/processors/intel-now-packs-100-million-transistors-in-each-square-millimeter

https://phys.org/news/2018-12-law.html

https://spectrum.ieee.org/nanoclast/semiconductors/processors/intel-now-packs-100-million-transistors-in-each-square-millimeter

NASCENT

Nano & the Semiconductor Industry


French, Roger H., and Hoang V. Tran. "Immersion lithography: photomask and wafer-level materials." Annual Review of Materials Research 39 (2009). https://doi.org/10.1146/annurev-matsci-082908-145350

ASML Photolithography Stepper: Avg. Cost > $100 Million?

Enabling Moore's Law to Continue: Staggering Efforts/Investments!

Malta, NY(Global Foundries' Fab8 -

$12B investment)

https://www.forbes.com/sites/patrickmoorhead/2018/02/04/the-u-s-already-has-bleeding-edge-technology-manufacturing-with-globalfoundries-fab-8-in-malta-ny/#606ae7f223af

https://doi.org/10.1146/annurev-matsci-082908-145350

https://www.forbes.com/sites/patrickmoorhead/2018/02/04/the-u-s-already-has-bleeding-edge-technology-manufacturing-with-globalfoundries-fab-8-in-malta-ny/#606ae7f223af

NASCENT

R2R Nanomanufacturing

• R2R Manufacturing - historically focused on micron scale features.


NASCENT's R2R GoalTo bring wafer-scale nanofabrication, data analysis, & metrology capabilities to roll-to-roll manufacturing, and

to make those capabilities available to industry

NASCENT

NASCENT Center Ten Year Deliverable:The Nanodevice Manufacturability Fab (nm-Fab)


Existing Centers

Novel Material Discovery Nano-Device Exploration

NASCENT nanodevice manufacturability Fab (nm-Fab):Demonstrate reliable scale-up of novel nanomanufacturing systems - fabricating hundreds to thousands of nano-devices.

Industry PartnersReducing industry partners' risk for fabricating millions to billions of nano-devices.

NASCENT

Reactive Ion Etch

Metal/Dielectric Deposition

2D Materials Transfer

NASCENT Unique Capabilities: R2R Nanomanufacturing Facility


Nanoshape Imprint

Nanoscale Coatings

Exemplar Applications:•Optical metamaterials for advanced displays•Flex Poly-silicon & Nano-material TFTs for IoT devices

Multiscale Modeling, Computational Intelligence &

Machine Learning

In-Line & At-Line Metrology

R2R Deposition of Nanomaterials & Growth of Poly-Si

NASCENT


• NASCENT facilities

• Data Collection, and Data Analytics

• Accessing NASCENT Facilities16NASCENT Intro - AIMCAL R2R Conference

NASCENT

Plasma/Wet Etch





Nanoscale Coatings



Machine Learning


R2R Deposition of Nanomaterials & Growth of Poly-Si Nanoshape Imprint

NASCENT

Nanoimprint Lithography Intro


Resist Dispense & Solvent Evaporation

Resist layer deposited on substrate

Template removed; pattern left behind.

All internal surfaces of template filled

UV light cures resist:liquid solid

NASCENT

Examples of R2R Nanoimprint Lithography


Imprinted Pattern covering 10 m of polycarbonate substrate

100 nm 100 nm

Demonstration of 1012 Consecutive Imprints of a Wire Grid Polarizer Pattern

Ahn, Se Hyun, et al. "High volume nanoscale roll-based imprinting using jet and flash imprint lithography." Nanoengineering: Fabrication, Properties, Optics, and Devices X. Vol. 8816. International Society for Optics and Photonics, 2013. https://doi.org/10.1117/12.2027765

https://doi.org/10.1117/12.2027765

NASCENT

Imprint ModuleLarge area template

fabrication capability at NASCENT

Large Area R2R Nanoimprint Lithography (Q1, 2020)

NASCENT Intro - AIMCAL R2R Conference 20

Roll unwind module(Protective interleaf

Removed)

Roll Winding Module(Protective Interleaf

Reapplied)

Web

Resist Deposition & Solvent

Evaporation Module

Scatterometry and Spectral Imaging

Module

NASCENT

NASCENT R2R Nanoimprint Tool System Specifications

Category Metrics

Feature Size 50 nm pattern pitch

Aspect Ratio 2:1 aspect ratio

Patterning Width 300 mm

Throughput Up to 1 meters/min*


*System not optimized for throughput; instead its optimized for high quality nanofabrication.

Arriving at NASCENT Q1 of 2020

NASCENT




Nanoshape Imprint

Nanoscale Coatings



Machine Learning


R2R Deposition of Nanomaterials & Growth of Poly-Si

Plasma/Wet Etch


NASCENT

NASCENT R2R Physical Vapor Deposition (PVD) and Reactive Ion Etch (RIE) Tools


Example of NASCENT Industry Collaboration for Technology Transfer & Process Innovation

NASCENT

NASCENT R2R PVD Tool Specifications

Category Metrics

Deposition Zones Sputtering, Reactive Sputtering, e-beam

Materials Deposited Metals, Dielectrics (Oxides, Nitrides), Semiconductors (e.g., a-Si)

Deposition Width 300 mm (sputtering), 80 mm (e-beam)

Substrate Width 350 mm




NASCENT

NASCENT R2R RIE Tool Specifications

Category MetricsNumber of Etch

Zones Two

Materials Etched Dielectrics, Metals

Etch Width 300 mm

Substrate Width 350 mm




NASCENT

Plasma/Wet Etch





Nanoscale Coatings



Machine Learning



NASCENT

Large Area Functional Optical Metrology


Gawlik, Brian M., et al. "Structural coloration with hourglass-shaped vertical silicon nanopillar arrays." Optics express 26.23 (2018): 30952-30968. https://doi.org/10.1364/OE.26.030952

https://doi.org/10.1364/OE.26.030952

NASCENT

Spectral Imaging Allows Functional Optical Metrology


Optical metrology capability incorporated into R2R Nanoimprint Lithography ToolGawlik, Brian M., et al. "Structural coloration with hourglass-shaped vertical silicon nanopillar arrays." Optics express 26.23 (2018): 30952-30968. https://doi.org/10.1364/OE.26.030952

https://doi.org/10.1364/OE.26.030952

NASCENT

Optical Angular Scatterometry


TM Reflectivity curve for a silicon wafer with a thin oxide layer

Faria-Briceno, Juan J., et al. "Optical angular scatterometry: In-line metrology approach for roll-to-roll and nanoimprint fabrication." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 37.5 (2019): 052904. https://doi.org/10.1116/1.5119707

https://doi.org/10.1116/1.5119707

NASCENT

R2R Tip-Based Metrology• Enabled by collaboration with ICSPI Corp.• Leveraged silicon fabrication technologies to create monolithic AFM-

on-a-chip.


https://www.icspicorp.com/

https://www.icspicorp.com/

NASCENT

Plasma/Wet Etch




Nanoshape Imprint

Nanoscale Coatings



Machine Learning


R2R Deposition of Nanomaterials & Growth of Poly-Si 2D Materials Transfer

NASCENT

NASCENT's Prototype R2R 2D Material Transfer


Graphene Flexible Graphene Electronic Tattoos Sensors

Kabiri Ameri, Shideh, et al. "Graphene electronic tattoo sensors." ACS nano 11.8 (2017): 7634-7641. https://doi.org/10.1021/acsnano.7b02182Xin, Hao, et al. "Roll-to-roll mechanical peeling for dry transfer of chemical vapor deposition graphene." Journal of Micro and Nano-Manufacturing 6.3 (2018): 031004. https://doi.org/10.1115/1.4040449

NASCENT:'s R2R Tool

50 µm scale bar

https://doi.org/10.1021/acsnano.7b02182

https://doi.org/10.1115/1.4040449

NASCENT

Growth of R2R SiliconNASCENT Prof. Venkat Selvamanickam – University of Houston


http://selva.me.uh.edu/facilities/

Several roll-to-roll thin film deposition tools for semiconductor manufacturing

http://selva.me.uh.edu/facilities/

NASCENT

Growth of R2R SiliconNASCENT Prof. Venkat Selvamanickam – University of Houston


Gao, Ying, et al. "High-performance flexible thin-film transistors based on single-crystal-like silicon epitaxially grown on metal tape by roll-to-roll continuous deposition process." ACS applied materials & interfaces 8.43 (2016): 29565-29572. https://doi.org/10.1021/acsami.6b06770

https://doi.org/10.1021/acsami.6b06770

NASCENT


• NASCENT facilities (Current and Future)


• Accessing NASCENT Facilities35NASCENT Intro - AIMCAL R2R Conference

NASCENT

Plasma/Wet Etch





Nanoscale Coatings





Machine Learning

NASCENT

Physical Data Analytics• Data generated by industry quickly outpacing data generated by

human beings.• MASSIVE data sets generated by tools like this:


NASCENT

Questions

• How can we leverage huge data sets for:– tool predictive maintenance? – manufacturing excursions?

• How to handle 10s or 100s of TBs? Data curation? Data compression? Which data are important?

• Big data, machine learning, genetic algorithms –finding solutions to difficult problems?


NASCENT

Example of Computational Intelligence in Manufacturing: Automated Tuning of Piezoelectric Inkjets


NASCENT

Data Collection: Automated Tuning of Piezoelectric Inkjets


NASCENT

Complex Waveforms Explored by Algorithm


Snyder, Brent, et al. "Automated tuning of high-order waveforms for picoliter resolution jetting of rheologically challenging materials." Precision Engineering 56 (2019): 143-155. https://doi-org.ezproxy.lib.utexas.edu/10.1016/j.precisioneng.2018.11.009

https://doi-org.ezproxy.lib.utexas.edu/10.1016/j.precisioneng.2018.11.009

NASCENT

Actuation Waveform Tuning Results


Ethyl Acetate (Z = 51.0) 50 μm Inkjet Orifice

Target Drop Volume (pL)0 10 20 30 40

40

30

20

10

0Mea

sure

d D

rop

Volu

me

(pL)

Measured Drop Volume (pL)D

rop

Velo

city

(m/s

)

2.5

2.0

1.5

1.0

0.5

00 5 10 15 20 25 30 35

NASCENT

Talk on NASCENT's Physical Data Analytics Efforts


Prof. Dragan DjurdjanovicNASCENT Associate Director

NASCENT


• NASCENT facilities (Current and Future)


• Working with NASCENT & Accessing Facilities44NASCENT Intro - AIMCAL R2R Conference

NASCENT

Overview of NASCENT Industry Collaboration Programs


Description Brief Summary How to Access?

Industrial Affiliates Program

Research conceived by company; IP not needed (10% overhead).

Affiliates Program Membership

Sponsored Research Research conceived by company, IP protection possible (56.5% overhead)

Sponsored Research Agreement

NASCENT Service Center Access R2R or WS nanofab for a modest fee. Contact us

NSF Core Funds (until 9/1/2022)

~50 Ph.D. students, ~20 faculty working on NSF-funded nanofabrication projects.

Industry Advisory Board(IAB) Membership

NASCENT

Research Program #1: IAB Membership• ~50 grad students & ~20 faculty. • Projects are NSF-funded, directed by NASCENT

Leadership with input from IAB.• Two research thrusts (with example projects):


Thrust 1: Process TechnologiesR2R Nanofabrication of Display Photonics(5 students)R2R Fabrication of 2D Material Transfer-Based TransceiversR2R Nanofabrication of Poly- and Mono-Crystalline Silicon TFTs

Thrust 2: Metrology & Yield EnhancementR2R Optical Metrology for NanopatternedSubstratesComputational Infrastructure and Metrology for Novel Process Model ValidationR2R Tip Based Metrology for Nano-ShapedOptical Metamaterials

NASCENT

IAB Membership Benefits• With a nominal annual fee, leverage $4m NSF investment.• Recruit top nano-engineering Ph.D.'s• Keep up with latest nano developments.

– Student talks & posters, guest speakers, & short courses – all in person or online.


NASCENT

IAB Membership Benefits

• Access NASCENT IP (NSF core funded research).• Network with peers & partners at 2 meetings/year• Discounts on other NASCENT Industry & Education

Programs.


Company Size # of Employees Annual IAB Dues

Small ≤500 $15kMedium 501-4,999 $25kLarge ≥5,000 $55k

NASCENT

Research Program 2: NASCENT Industrial Affiliates Program (IAP)

• Standard UT Austin mechanism where projects defined by company & agreed to by faculty member.

• Regular 1-on-1 webinar updates with student/postdoc.• All research results can be used by company without

licensing/royalty payments (no IP protection).• Low university overhead (~10%)• 15% discount for IAB members.


NASCENT

NASCENT Industrial Affiliates Program (IAP) Fees

Personnel funded IAB Member Non-IAB Member

Grad student (9 months) $49,950 $60k

Grad student (12 months) $60k $70k

Postdoc $100k $115k


15 discount for IAB members; 10% university overhead

NASCENT

Research Program 3: Sponsored Research• Company determines research program, funds grad

student/postdoc.• “Sponsored Research Agreement” (SRA) can include IP terms.• SRAs can take effort to execute & requires the standard UT

Austin overhead rate (56.5%).• ~15% Discount for NASCENT IAB members.


Personnel Funded IAB Member Non-IAB Member

Grad student $76k (minimum) $90k (minimum)

Postdoc $135k (minimum) $160k (minimum)

NASCENT

NASCENT Service Center• Special legal structure approved by

state (economic development).• nm-Fab outputs accessible for fee.• Part of the NSF National

Nanotechnology Coordinated Infrastructure (NNCI) Program.

• IAB members receive 15% discount• Typical projects start around ~$5k-$10k.


Flex Exfoliated Si Wafer

R2R Optical Metamaterials

https://www.nnci.net/

https://www.nnci.net/

NASCENT

NASCENT Education Programs• Online 3-semester “Graduate Certificate in Hands-on

Nanotechnologies”– Nanofabrication & Nanomaterials; – Nanodevices; and – Nanometrology & Big Data

• Industry short courses online (~1 week).– Intro to Nanotechnology– Nanoimprint Lithography

• Portable nanotechnology labs shipped to students.• 15% discount for NASCENT IAB members


NASCENT

Thank You for Your Attention!

We would love to work with you! Please don't hesitate to reach out!


[email protected]://nascent.utexas.edu

Questions?

mailto:[email protected]

https://nascent.utexas.edu/

the nascent center’s r2r nanofabrication research and … · 2019-10-14 · gao, ying, et al....

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