thermalprocess-oxidationhome.konkuk.ac.kr/~keechan/thermalprocess-oxidation.pdf · descžtbe...
TRANSCRIPT
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(660 oC)
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RegulatorMFC (mas flow controller)
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(Green)
(Grey)
(Red)
(無水) hydrogen chloride HCl
(C2HCl3) (C2H3Cl3)
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Burn Box + Scrubber Scrubber
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Susceptor
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Thermocouple
NiAl
NiCrNiCr
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(失透)
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Susceptor
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etches way contaminant.
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Susceptor
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of
its
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CVD Precursor SiH4, SiH2Cl2, SiHCl3, and SiCl4
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(~ 5000Å)
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prevents channeling of ions and contamination from sputtered PR(100Å ~ 200Å)
Pad oxide prevents tensile stress on Si from thick nitride.
Barrier oxide prevents contamination from CVD USG.
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SC: Standard Cleaning
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ed
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+ 1 atm.
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He‐Ne laser 633nm
Film thickness & refractive index
Various wavelength
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