Thin Films on Glass

Springer-Verlag Berlin Heidelberg GmbH

Schott Series on Glass and Glass Ceramics Science, Technology, and Applications

Low Thermal Expansion Glass Ceramics ISBN 3-540-58598-2

Fibre Optics and Glass Integrated Optics ISBN 3-540-58595-8

The Properties of Optical Glass ISBN 3-540-58357-2

Thin Films on Glass ISBN 3-540-58597-4

Electrochemistry of Glasses and Glass Melts, Including Glass Electrodes ISBN 3-540-58608-3

Surface Analysis of Glasses and Glass Ceramics, and Coatings ISBN 3-540-58609-1

Analysis of the Composition and Structure of Glass and Glass Ceramics ISBN 3-540-58610-5

Mathematical Simulation in Glass Technology ISBN 3-540-43204-3

Hans Bach Dieter Krause

Editors

Thin Films on Glass

With 217 Figures and 46 Tables

Springer

Editors Dr. Hans Bach Prof. Dr. Dieter Krause Schott Glas HattenbergstraBe 10 D-55122 Mainz, Germany

Library of Congress Cataloging-in-Publication Data Thin films on glass / Hans Bach, Dieter Krause, editors. p. cm. -- (Schott series on glass and glass ceramics) Includes bibliographical references and index. ISBN 978-3-642-08205-4 ISBN 978-3-662-03475-0 (eBook) DOI 10.1007/978-3-662-03475-0 1. Thinfilm devices--Design and construction. 2. Glass coatings. 3. Dielectric films. 4. Optical coatings. 5. Coating processes. 1. Bach, Hans, 1930- .II.Krause,Dieter, 1933- .II.Series. TK7872.T55T4561997 621.3815'2--dc21

2nd Corrected Printing 2003 Ist Edition 1997

ISBN 978-3-642-08205-4

97-29134 CIP

This work is subject to copyright. AlI rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting. reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted on1y under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer-Verlag. Violations are liable for prosecution under the German Copyright Law.

@ Springer-Verlag Berlin Heidelberg 2003 Originally published by Springer-Verlag Berlin Heidelberg New York in 2003 Softcover reprint of the hardcover lst edition 2003

The use of designations, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The following trademarks used in this book are registered trademarks of Schott Glaswerke or of Schott Group companies, respectively: Amiran, Calorex, Conturan, Fiolax, Irox, Mirogard, Schott BK 7, Schott Type 1 plus, Tempax. The following trademarks are registered trademarks of Cari Zeiss or of Cari Zeiss Group campanies, respectively: Carat, Carat Filter, Clarlet Cool Blue, Claret ET, Claret Gradal Top, Claret Hart, Claret Super ET, Punktal ET, Punktal SL Cool Blue, Punktal SL Super ET, Punktal Super ET, Super ET, Super Filter ET, Umbra Gold ET, Umbra Punktal. Other trademarks mentioned in this book (e.g., Ludox, Nimonic, Stellite) are registered trademarks of other companies.

7)pesetting: Computer to film from editors data Production: LE-TE.X Jelonek, Schmidt & Vtlckler GbR, Leipzig

Printed on acid-free paper 56/31411YL 5432 10

Foreword

This book, entitled Thin Films on Glass, is one of a series reporting on research and development activities on products and processes conducted by the Schott Group.

The scientifically founded development of new products and technical pro­cesses has traditionally been of vital importance to Schott and has always been performed on a scale determined by the prospects for application of our special glasses. Since the reconstruction of the Schott Glaswerke in Mainz, the scale has increased enormously. The range of expert knowledge required could never have been supplied by Schott alone. It is also a tradition in our company to cultivate collaboration with customers, universities, and research institutes. Publications in numerous technical journals, which since 1969 we have edited to a regular schedule as Forschungsberichte - 'research reports' - describe the results of these cooperations. They contain up-to-date infor­mation on various topics for the expert but are not suited as survey material for those whose standpoint is more remote.

This is the point where we would like to place our series, to stimulate the exchange of thoughts, so that we can consider from different points of view the possibilities offered by those incredibly versatile materials, glass and glass ceramics. We would like to share the knowledge won through our research and development at Schott in cooperation with the users of our materials with scientists and engineers, interested customers and friends, and with the employees of our firm.

Though the results documented in the volumes of the Schott Series are of course oriented to the tasks and targets of a company, we believe that readers can nevertheless - or just for that very reason - find demanding challenges for the development of process engineering, the characterization of measurement practice, and for applied research. Besides realizability, the profitability of solutions to customers' problems always plays a decisive role.

The first comprehensive presentation of research findings after the recon­struction ofthe factory in Mainz was edited by Prof. Dr. Dr. h.c. Erich Schott in 1959. It was entitled Beitriige zur angewandten Glasforschung - 'contribu­tions to applied glass research' (Wissenschaftliche Verlagsgesellschaft m.b.H., Stuttgart 1959). Since then, there has been an extraordinary worldwide in­crease in the application of glass and glass ceramic materials. Glass fibres and

VI Foreword

components manufactured from them for use in lighting and traffic engineer­ing or in telecommunications, high-purity and highly homogeneous glasses for masks and projection lenses in electronics, or glass ceramics with zero ex­pansion in astronomy and in household appliance technology are only some examples. In many of these fields Schott has made essential contributions.

Due to the breadth and complexity of the Schott activities, it takes several volumes to describe the company's research and development results. Oth­erwise it would be impossible to do full justice to the fundamental research work and technological innovation that is indispensable for product develop­ment, and to give an appropriate description of the methods of measurement and analysis needed for the development and manufacture of new products.

Apart from Thin Films on Glass, five volumes, entitled The Properties of Optical Glass, Low Thermal Expansion Glass Ceramics, Analysis of the Composition and Structure of Glass and Glass Ceramics, Electrochemistry of Glasses and Glass Melts, Including Glass Electrodes, and Mathematical Simulation in Glass Technology have already been published. Another two volumes, entitled Surface Analysis of Glasses and Glass Ceramics, and Coat­ings and Fibre Optics and Glass Integrated Optics, are in preparation and will be published in the next few years. Glasses for various applications in industry and science and their properties are being considered, and melting and processing technologies described.

With the presentation ~ in part detailed ~ of the work required for the development of successful products, Schott employees are giving all their in­terested colleagues working in the field of science and technology an insight into the special experiences and successes in material science, material de­velopment, and the application of materials at Schott. Contributions from scientists and engineers who work at universities and other research insti­tutes and who played an essential role in Schott developments complete the survey of what has been achieved and prove the usefulness of the collabora­tions mentioned above.

In all the volumes of the series the fundamental issues from chemistry, physics, and engineering are dealt with, or at least studies are cited that en­able or assist the reader to work his or her own way into the topics treated. Thus, the series may serve to fill gaps between the basic knowledge imparted by textbooks on material science and the product descriptions published by Schott. We see this as the best way to enable all our potential business part­ners who are not already familiar with glass and glass ceramics to compare these materials with alternatives on a thoroughly scientific basis. We hope that this will lead to intense technical discussions and collaborations on new fields of applications of our materials and products, to our mutual advantage.

Every volume of the Schott Series will begin with a chapter providing a general idea of the current problems, results, and trends relating to the subjects treated. These introductory chapters and the reviews of the basic principles are intended for readers dealing for the first time with the special

Foreword VII

properties of glass and glass ceramic materials and their surface treatment in engineering, science, and education.

Many of our German clients are accustomed to reading scientific and technical publications in English, and most of our foreign customers are better conversant with English than with German. We therefore decided to publish the Schott Series in English.

The publication of the Schott Series has been substantially supported by Springer-Verlag. We would like to express our thanks to Dr. H. K. V. Lotsch and Dr. H. J. K6lsch for advice and assistance in this project.

The investment of resources by Schott and its employees to produce the Schott Series is, as already stated, necessary for the interdisciplinary dia­logue and collaboration that are traditional at Schott. A model we still find exemplary today of a fruitful dialogue between fundamental research, glass research, and glass manufacture was achieved in the collaboration between Ernst Abbe, Otto Schott, and Carl Zeiss. It resulted in the manufacturing of optical microscopes that realized in practice the maximum theoretically achievable resolution. It was especially such experiences that shaped the for­mulation of the founding statute of the Carl Zeiss Foundation, and the ini­tiative for the Schott Series is in accord with the commitment expressed in the founding statute "to promote methodical scientific studies" .

Mainz, April 2003 Dieter Krause Vice President R&D (retd.)

Preface to the Second Corrected Printing

The second printing has been corrected and supplemented with three new sections: "Glass Ceramic Reflectors with Schott PI Coating®", "Coatings on Plastics with the PICVD Technology", and "Optical Multilayers for Ultra­Narrow Bandpass Filters Fabricated by PICVD". These contributions rep­resent fields of recent activities. Several corrections and additions have been made, wherever it was necessary.

We thank the authors for reading, correcting and updating their contribu­tions, Mrs. Karin Langner-Bahmann for processing all the figures, and Mrs. Wiltrud Witan for revising the English. We also thank the Springer-Verlag for supporting this edition.

April 2003 Hans Bach, Dieter Krause

Preface to the First Edition

In a glass company, the core technologies are glass melting and hot or cold forming. Several branch technologies are necessary to finish the products or to add value by modifying the bare glass. One branch technology widely needed and used is thin-film coating for several quite different purposes.

The main aim of Thin Films on Glass is to describe the research, develop­ment, and scientific and technical background of thin films for selected prod­ucts as well as the specific processes used at Schott. The book is conceived as a monograph. However, the individual chapters have been written by differ­ent or several authors, who are themselves active in the corresponding fields of research or product and process development or manufacturing. Thus, the reader is given direct access to the expertise of these authors, some of whom are employees of our subsidiaries Deutsche Spezialglas AG, Grunenplan; AVER-SaG Glaswerke, Bad Gandersheim; or of our sister company Carl Zeiss, Oberkochen. Some authors, such as Prof. Dr. A. Thelen, Frankfurt/M., acted as consultants; others are employees of companies engaged with Schott as partners in development, such as the Institut fur Mikromechanik, Mainz, or of companies that are either business partners or potential customers, such as F. Hoffmann-La Roche AG, Basel, Switzerland.

To give the reader an idea of the extraordinarily broad range of coating materials, processes, applications, and products, the volume opens with a general survey of the subject 'thin films'. As a result of the high diversifi­cation and specialization prevailing in this field, however, the range of more substantially discussed topics had to be restricted to the narrower field of coatings on glass with special emphasis on optical coatings. Here, new de­velopments, limitations, the current state of the art, and general trends are described.

For more than six decades, Schott has significantly contributed to the development and production technologies of thin films on glass. The subse­quent chapters treat in detail the design strategies, coating technologies, and the characterization and application of thin films. In addition to outstanding functionality of the products, economical and ecological manufacturing has always been a major target of the Schott Group. Consequently, two processes are used at Schott: dip coating within the sol-gel route and plasma impulse chemical vapour deposition. Both have proved to be powerful but remained

XII Preface to the First Edition

singularities in the worldwide efforts in the field of coating. This book aims to impart a deeper understanding of these Schott-specific developments. We have therefore explained some basic tools in detail without striving, how­ever, for completeness by reproducing the excellent comprehensive literature available.

In Chap. 2 the basic modern design tools for optical coatings are described. In an open design contest, sophisticated solutions have been presented. The progress in this field triggered many initiatives for technical improvements to reproducibly realize such new designs.

Chapter 3 gives a short overview of major coating technologies. For many years, physical vapour deposition and sol-gel (dip) coating have been the ma­jor technologies within the Schott Group. The breakthrough is a merit of the late Prof. Dr. Hubert Schroder, who in the early 1960s provided the scientific foundations for a production process in cooperation with Dr. Helmut Dislich (chemistry) and Dr. Hans Bach (surface and thin-film analysis). At the end of the 1980s, chemical vapour deposition was ready for application in pro­duction thanks to the personal commitment of Dr. Johannes Segner, Schott Glaswerke, and Godehard Kaffrell, AUER-SOG. As a kind of supplement, thermal coating processes have been included, which Schott does not apply for the coating of glass but for the coating of moulding or pressing tools that are temporarily in contact with molten glass.

Chapter 4 is dedicated to the methods and results of thin-film charac­terization. The frequently observed strong deviations between the material properties of thin films and those of a bulk sample with nominally identi­cal composition are one reason for poor process stability and reproducibility, making strict process control very difficult. Moreover, the small materials volume of a thin film and its interaction with the ambient due to the large surface~to-volume ratio necessitate the application of sophisticated character­ization methods to yield reliable information. Such methods require expensive equipment and skilled personnel to run and evaluate the measurements. Un­expected results often took us by surprise and the permanent availability of these characterization methods has always proved highly advantageous be­cause it enabled immediate trouble-shooting and the realization of process improvements on a solid basis of knowledge instead of assumptions.

In Chap. 5 we pay tribute to the pioneering work of Dr. Walter Geffcken, achieved under difficult conditions in that turbulent period, the 1930s and 1940s. He invented various antireflection coatings and realized early produc­tion processes for AR coatings on optical lenses. Ever since then, the coating of glass has been a field of competence of the Schott Group, a fact which is illustrated by some selected topics.

Finally, in Chap. 6, selected modern coated products from the Schott group are discussed. Here the successful teamwork between development, marketing, and production is reflected by the list of contributing authors.

Preface to the First Edition XIII

We were fortunate in also winning employees of (potential) Schott customers to write contributions to various sections.

In summary, all the information given in this book shows the successful transfer of research results via product and process development into produc­tion. In most cases this is no straightforward procedure, but often requires strong feedback and many fresh attempts at meeting a moving target. The literature cited should help the interested reader or teacher in finding access to more detailed presentations. Thus the content of this volume is placed be­tween classical textbooks on materials science or engineering and the product information on coating materials, equipment and coated products.

We wish, above all, to express our thanks to all the authors of this book for their steady and pleasing cooperation. We have received further valuable help from many colleagues whom we would like to thank for advice, critical reading of the manuscript, and technical support in dealing with computer hardware and software and the layout of the cover photograph.

We are also indebted to several employees and collaborators at Springer­Verlag, especially to Dr. Victoria Wicks and Dr. Angela Lahee for copy­editing this volume, to Jacqueline Lenz for the coordination of the publishing process, to Peter StraBer as the responsible production editor, and to Kurt Mattes for converting the manuscript into Springer TEX. We are grateful to Dr. Hans J. K6lsch for many helpful discussions in the early phases of this volume and in planning the Schott Series in general.

Very special thanks go to Wiltrud Witan, M.A., and Karin Langner­Bahmann, Schott Glaswerke, for all the translations and corrections of the manuscripts which were submitted either in German or English, for the cre­ation of numerous computer graphics and images from often very raw data or poor originals, and for their enthusiasm in doing all the hard work necessary to prepare manuscripts ready for printing.

August 1997 Hans Bach, Dieter Krause

Contents

1. Overview - Thin Films on Glass: an Established Technology .. . . . . . . . . . . . . . . . . . . . . . . . . . 1 Burkhard Danielzik, Martin Heming, Dieter Krause, Alfred Thelen 1.1 Introduction: Why Surface Coating? . . . . . . . . . . . . . . . . . . . . . . 1 1.2 Coating Materials ...................................... 2 1.3 Thin-Film Forming Processes. . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 1.4 Fabrication Issues for Coatings . . . . . . . . . . . . . . . . . . . . . . . . . .. 11 1.5 Product and Overall Process Design ...................... 13 1.6 Today's Situation and Trends . . . . . . . . . . . . . . . . . . . . . . . . . . .. 17 References ................................................. 19

2. Design Strategies for Thin Film Optical Coatings 23 Alfred Thelen 2.1 Optical Thin Film Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 24 2.2 Exact Methods. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 25

2.2.1 Equivalent Layers ................................ 25 2.2.2 Simulation of a Single Layer by a Multilayer. . . . . . . .. 29 2.2.3 Chebyshev Synthesis. . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 30 2.2.4 Effective Interfaces ............................... 32 2.2.5 Buffer Layers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 33 2.2.6 Absentee Layers ................................. , 34

2.3 Approximate Methods Based on Starting Designs. . . . . . . . . .. 35 2.4 Numerical Synthesis. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 37 2.5 Results of Recent Design Contests. . . . . . . . . . . . . . . . . . . . . . .. 40

2.5.1 Berlin Contest 1991. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 40 2.5.2 Tucson Contest 1995. . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 41

2.6 Design Strategies for the Different Deposition Technologies .. 45 2.7 Conclusion............................................ 47 References ................................................. 48

XVI Contents

3. Coating Technologies ................................. 51 3.1 Physical Vapour Deposition

Ulrich Jeschkowski, Hansjorg Niederwald. . . . . . . . . . . . . . . . .. 51 3.1.1 Non-Reactive Evaporation. . . . . . . . . . . . . . . . . . . . . . . .. 51 3.1.2 Reactive Evaporation . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 53 3.1.3 Energy-Enhanced Evaporation. . . . . . . . . . . . . . . . . . . .. 53 3.1.4 Sputtering....................................... 57

3.2 Chemical Vapour Deposition Wolfgang Mohl. . ... . ... .. ..... . .... . . ... . .. . . ... . . . . . .. 59 3.2.1 Techniques of Chemical Vapour Deposition. . . . . . . . .. 59 3.2.2 Peculiarities of the Various Techniques. . . . . . . . . . . . .. 61 3.2.3 Variation of Processing Conditions and Properties. . .. 63

3.3 Sol-Gel Coating Processes Wolfram Beier. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 66 3.3.1 Sol-Gel Chemistry ............................... 66 3.3.2 Sol-Gel Fractals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 73 3.3.3 Dip Coating . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 75 3.3.4 Spin Coating .................................... 77 3.3.5 Heat Treatment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 80

3.4 Thermal Coating Processes Joachim Disam, Dirk Gohlke, Katharina Lubbers. . . . . . . . . .. 83 3.4.1 Processes and Materials. . . . . . . . . . . . . . . . . . . . . . . . . .. 83 3.4.2 Applications..................................... 89

References ................................................. 92

4. Properties and Characterization of Dielectric Thin Films .............................. 99 4.1 Surfaces of Substrate Glasses

Klaus Bange . .......................................... 101 4.2 Macroscopic Properties of Thin Films

Klaus Bange, Clemens Ottermann ........................ 104 4.2.1 Density ......................................... 104 4.2.2 Optical Properties of Coatings ..................... 106 4.2.3 Electrical Conductivity ............................ 113 4.2.4 Mechanical Properties ............................ 114

4.3 Microscopic Properties Klaus Bange . .......................................... 125 4.3.1 Composition ..................................... 125 4.3.2 Oxidation State .................................. 128 4.3.3 Structure of Oxide Films .......................... 130

Contents XVII

4.4 Examples of the Characterization of Thin Film Materials . . .. 135 4.4.1 Titanium Oxide

Olaf Anderson, Klaus Bange, Clemens Ottermann .... 135 4.4.2 Silicon Oxides

Olaf Anderson, Clemens Ottermann ................ 159 4.4.3 Tantalum Oxide Layers

Klaus Bange . .................................... 171 4.4.4 Nickel Oxide and Hydrous Nickel Oxide

Klaus Bange . .................................... 175 4.4.5 Tungsten Oxide

Klaus Bange . .................................... 189 4.5 Properties of Multilayer Systems

Clemens Ottermann .................................... 201 References ................................................. 203

5. Developments at Schott: Selected Topics .......... 225 5.1 The Pioneering Contributions of W. Geffcken to the

Field of Optical Coatings from 1935 to 1945 Alfred Thelen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225 5.1.1 How Thin Films Came to Schott ................... 226 5.1.2 Multilayer Antireflection Coatings .................. 227 5.1.3 Theory of Periodic Multilayers ..................... 230 5.1.4 Other Contributions .............................. 236 5.1.5 Conclusions ...................................... 236

5.2 Interference Filters Ulrich Jeschkowski . ..................................... 237 5.2.1 Coating Technology ............................... 237 5.2.2 Computer-Aided Design and Manufacturing ......... 239 5.2.3 Products ........................................ 240

5.3 Plasma Impulse Chemical Vapour Deposition (PICVD) Dieter Krause. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 243 5.3.1 Fundamentals of the PICVD Process. . . . . . . . . . . . . . . . 243 5.3.2 Impact of the Environment

on the Optical Performance of Thin Films . . . . . . . . . . . 247 5.3.3 Flip-Flop Layers and the "Design-to-Go" Concept .... 251 5.3.4 Multilayer Stacks and Rugate Filter ................ 253 5.3.5 Summary ........................................ 258

XVIII Contents

5.4 Electrochromic Devices Klaus Bange, Friedrich G.K. Baucke . ..................... 259 5.4.1 The Layer Components of Electrochromic Devices .... 261 5.4.2 Typical Examples of Electrochromic Devices ......... 264

5.5 Electron-Sensitive Coatings Frank- Thomas Lentes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 270 5.5.1 Physical/Chemical Principles for Generating

Optical Extinction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 272 5.5.2 Structural Aspects of Ag-Containing

Electron-Sensitive Layers . . . . . . . . . . . . . . . . . . . . . . . . . . 276 5.5.3 Experimental Determination of Properties ........... 278 5.5.4 Modelling of the Generation and the Stability

of Ag Colloids ................................... 285 References ................................................. 289

6. Products ................................................ 295 6.1 The Principle of Interference Filters

Klaus-Dieter Loosen . ................................... 295 6.1.1 Spectral Specification of Interference Filters ......... 296 6.1.2 All-Dielectric Filters .............................. 299 6.1.3 Metal Dielectric Filters. . . . . . . . . . . . . . . . . . . . . . . . . . . . 308 6.1.4 Induced-Transmission Filters ....................... 310

6.2 A Universal Transducer for Optical Interface Analytics: Transducer Design and Concepts for an Economical Mass Production Burkhard Danielzik, Wolfgang Ehrfeld, Christof Fattinger, Martin Heming, Holger Lowe, Andreas Michel, Frank Michel, Norbert Oranth, Jurgen Spinke ........................... 311 6.2.1 Optical Transducer ............................... 313 6.2.2 Materials and Processes ........................... 320

6.3 Laser Coatings Wolfgang Rupp. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 335 6.3.1 Lasers .......................................... 335 6.3.2 Laser Applications ................................ 336 6.3.3 Carl Zeiss Lasers ................................. 338 6.3.4 Requirements on Laser Coatings ................... 341

6.4 Cold-Light Reflectors Lars Bewig, Thomas Kupper, Roland Langfeld . ............. 344 6.4.1 Requirements and Design .......................... 344 6.4.2 Applications ..................................... 346 6.4.3 Processes ........................................ 346 6.4.4 Glass-Ceramic Reflectors with SCHOTT PI Coating®

Thomas Kupper, Christoph Moelle, Lars Bewig . ...... 348

Contents XIX

6.5 Automotive Rear-View Mirrors Falko v. Unger ......................................... 353 6.5.1 Specifications for Automotive Mirrors ............... 354 6.5.2 Manufacturing Process ............................ 356

6.6 Large Area Sol~Gel Dip Coatings Eckart K. Hussmann . ................................... 359 6.6.1 Historical Background ............................ 359 6.6.2 Sol~Gel Dip Coating Process ....................... 360 6.6.3 Dip Coating Facility .............................. 361 6.6.4 Influence of Process Parameters on Properties

of the Coatings .................................. 363 6.6.5 Accuracy of the Dip Coating Process ............... 365 6.6.6 Solar Control Coatings: Calorex® .................. 365 6.6.7 Antireflection Coatings ............................ 370 6.6.8 Dichroic Coatings ................................ 372

6.7 Schott Type I Plus® Containers for Pharmaceutical Packaging Marten Walther . ....................................... 373 6.7.1 Selection of Coating Technology .................... 374 6.7.2 Layer Structure .................................. 375 6.7.3 Process Control .................................. 375 6.7.4 Characterization ................................. 377 6.7.5 Formation of Glass Particles ....................... 379

6.8 Ophthalmic Coatings Michael Witzany ....................................... 380 6.8.1 Market Review ................................... 380 6.8.2 Layer Systems ............................... : ... 381 6.8.3 Processes ........................................ 382 6.8.4 Requirements on Ophthalmic Coatings .............. 386 6.8.5 Production of Eyeglasses at Carl Zeiss .............. 388

6.9 IR-Reflecting Multilayer Films for Energy-Efficient Lamps Hrabanus Hack, Torsten Holdmann ....................... 389 6.9.1 The Principle .................................... 389 6.9.2 Materials ........................................ 390 6.9.3 Deposition Processes .............................. 391 6.9.4 IR-Reflecting Coating by PICVD ................... 391 6.9.5 Possible Lamp Configurations ...................... 392

6.10 Coatings on Plastics with the PICVD Technology Markus Kuhr, Stefan Bauer, Uwe Rothhaar, Detlef Wolff . ... 393 6.10.1 General Experimental Procedure ................... 393 6.10.2 Substrate Cleaning ............................... 394 6.10.3 Preconditioning ~ Interaction of Plasma

with the PMMA Surface .......................... 395

XX Contents

6.10.4 Adhesion of the Layer System ...................... 399 6.10.5 Scratch Resistance ................................ 401

6.11 Optical Multilayers for Ultra-Narrow Bandpass Filters Fabricated by PICVD Stefan Bauer, Lutz Klippe, Uwe Rothhaar, Markus Kuhr .... 407 6.11.1 Experimental Procedure ........................... 409 6.11.2 Results and Discussion ............................ 410

References ................................................. 413

List of Contributors . ...................................... 421

Sources of Figures and Tables ........................... 425

Index ........................................................ 427