titanium nitride

7/25/2019 Titanium Nitride

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d!r d!r%e

(enit 5/22 )&m3

+e%tin) !int 2*30 C 65310 3200 9:

S!%ubi%it in "ater in!%ub%e

Structure

Crta% tru&ture Cubi&&8

Sa&e )r!u m3m N!/ 225

C!!rdinati!n )e!metr &tahedra%

E;&et "here !ther"ie n!ted data are )i'en !r materia% in

their tandard tate6at 25 C [77 # 100


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23eferences

Characteristics*edit+

4ummary of characteristics*+*+

5ickers hardness0

6odulus of elasticity' 78a

Thermal conducti!ity9# W:(m;2emu:mol

TiN will oxidiBe at A


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TiN%coated drill it


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Cark gray Ti-N coating on a 7ererpocketknife

$ well%known use for TiN coating is for edge retention and corrosion resistance on machine tooling,such as drill itsand milling cutters,often impro!ing their lifetime y a factor of three or more# *'+

ecause of TiN"s metallic gold color, it is used to coatcostume Gewelryand automoti!e trim fordecorati!e purposes# TiN is also widely used as a top%layer coating, usually with nickel(Ni)or chromium(-r) plated sustrates, on consumer pluming fixtures and door hardware# $s a coatingit is used inaerospaceand military applications and to protect the sliding surfacesof suspensionforks oficyclesand motorcyclesas well as the shock shafts of radio controlled cars#TiN is non%toxic, meets FC$guidelines and has seen use inmedical de!icessuch asscalpelladesand orthopedicone sawlades where sharpness and edge retention are important#*2+TiN coatingsha!e also een used in implantedprostheses(especiallyhip replacementimplants) and othermedical implants#

Though less !isile, thin filmsof TiN are also used in microelectronics, where they ser!e asa conducti!earrieretween the acti!e de!ice and the metal contacts used to operate the circuit#The film locks thediffusionof metal of the conductor into the silicon, ut it is conducti!e enough(/HI JK;cm) to allow a good electrical connection# &n this context, TiN is classified as a Larrier

metalL, e!en though it is clearly a ceramicfrom the perspecti!e of chemistryor mechanical eha!ior#3ecent chip design in the 0' nm technology and eyond also makes use of TiN as a metalmaterialfor impro!ed transistorperformance# &n comination with gate dielectrics(e#g# Mf4i1) that ha!e ahigher permitti!itycompared to standard 4i1the gate length can e scaled down with low leakage,higher dri!e current and the same or etter threshold !oltage#*I+

Cue to their high iostaility, TiN layers may also e used as electrodes inioelectronicapplications*A+like in intelligent implantsor in%!i!oiosensorsthat ha!e to withstand the se!ere
https://en.wikipedia.org/wiki/Gerber_Legendary_Bladeshttps://en.wikipedia.org/wiki/Drill_bithttps://en.wikipedia.org/wiki/Milling_cutterhttps://en.wikipedia.org/wiki/Milling_cutterhttps://en.wikipedia.org/wiki/Titanium_nitride#cite_note-5https://en.wikipedia.org/wiki/Costume_jewelryhttps://en.wikipedia.org/wiki/Costume_jewelryhttps://en.wikipedia.org/wiki/Nickelhttps://en.wikipedia.org/wiki/Chromiumhttps://en.wikipedia.org/wiki/Chromiumhttps://en.wikipedia.org/wiki/Aerospacehttps://en.wikipedia.org/wiki/Aerospacehttps://en.wikipedia.org/wiki/Suspension_(vehicle)https://en.wikipedia.org/wiki/Bicyclehttps://en.wikipedia.org/wiki/Motorcyclehttps://en.wikipedia.org/wiki/Radio_controlled_carhttps://en.wikipedia.org/wiki/Food_and_Drug_Administrationhttps://en.wikipedia.org/wiki/Food_and_Drug_Administrationhttps://en.wikipedia.org/wiki/Medical_devicehttps://en.wikipedia.org/wiki/Medical_devicehttps://en.wikipedia.org/wiki/Scalpelhttps://en.wikipedia.org/wiki/Bone_cutterhttps://en.wikipedia.org/wiki/Bone_cutterhttps://en.wikipedia.org/wiki/Bone_cutterhttps://en.wikipedia.org/wiki/Titanium_nitride#cite_note-6https://en.wikipedia.org/wiki/Prosthesishttps://en.wikipedia.org/wiki/Hip_replacementhttps://en.wikipedia.org/wiki/Hip_replacementhttps://en.wikipedia.org/wiki/Thin_filmhttps://en.wikipedia.org/wiki/Microelectronicshttps://en.wikipedia.org/wiki/Electrical_conductivityhttps://en.wikipedia.org/wiki/Copper_interconnect#Barrier_metalhttps://en.wikipedia.org/wiki/Copper_interconnect#Barrier_metalhttps://en.wikipedia.org/wiki/Diffusionhttps://en.wikipedia.org/wiki/Diffusionhttps://en.wikipedia.org/wiki/Diffusionhttps://en.wikipedia.org/wiki/Ohmhttps://en.wikipedia.org/wiki/Barrier_metalhttps://en.wikipedia.org/wiki/Barrier_metalhttps://en.wikipedia.org/wiki/Ceramichttps://en.wikipedia.org/wiki/Chemistryhttps://en.wikipedia.org/wiki/Transistorhttps://en.wikipedia.org/wiki/Gate_dielectrichttps://en.wikipedia.org/wiki/Permittivityhttps://en.wikipedia.org/wiki/Permittivityhttps://en.wikipedia.org/wiki/Silicon_dioxidehttps://en.wikipedia.org/wiki/Silicon_dioxidehttps://en.wikipedia.org/wiki/Subthreshold_leakagehttps://en.wikipedia.org/wiki/Threshold_voltagehttps://en.wikipedia.org/wiki/Titanium_nitride#cite_note-7https://en.wikipedia.org/wiki/Bioelectronicshttps://en.wikipedia.org/wiki/Bioelectronicshttps://en.wikipedia.org/wiki/Bioelectronicshttps://en.wikipedia.org/wiki/Titanium_nitride#cite_note-SCT2010-8https://en.wikipedia.org/wiki/Titanium_nitride#cite_note-SCT2010-8https://en.wikipedia.org/wiki/Implant_(medicine)https://en.wikipedia.org/wiki/Biosensorshttps://en.wikipedia.org/wiki/Biosensorshttps://en.wikipedia.org/wiki/Biosensorshttps://en.wikipedia.org/wiki/Gerber_Legendary_Bladeshttps://en.wikipedia.org/wiki/Drill_bithttps://en.wikipedia.org/wiki/Milling_cutterhttps://en.wikipedia.org/wiki/Titanium_nitride#cite_note-5https://en.wikipedia.org/wiki/Costume_jewelryhttps://en.wikipedia.org/wiki/Nickelhttps://en.wikipedia.org/wiki/Chromiumhttps://en.wikipedia.org/wiki/Aerospacehttps://en.wikipedia.org/wiki/Suspension_(vehicle)https://en.wikipedia.org/wiki/Bicyclehttps://en.wikipedia.org/wiki/Motorcyclehttps://en.wikipedia.org/wiki/Radio_controlled_carhttps://en.wikipedia.org/wiki/Food_and_Drug_Administrationhttps://en.wikipedia.org/wiki/Medical_devicehttps://en.wikipedia.org/wiki/Scalpelhttps://en.wikipedia.org/wiki/Bone_cutterhttps://en.wikipedia.org/wiki/Titanium_nitride#cite_note-6https://en.wikipedia.org/wiki/Prosthesishttps://en.wikipedia.org/wiki/Hip_replacementhttps://en.wikipedia.org/wiki/Thin_filmhttps://en.wikipedia.org/wiki/Microelectronicshttps://en.wikipedia.org/wiki/Electrical_conductivityhttps://en.wikipedia.org/wiki/Copper_interconnect#Barrier_metalhttps://en.wikipedia.org/wiki/Diffusionhttps://en.wikipedia.org/wiki/Ohmhttps://en.wikipedia.org/wiki/Barrier_metalhttps://en.wikipedia.org/wiki/Barrier_metalhttps://en.wikipedia.org/wiki/Ceramichttps://en.wikipedia.org/wiki/Chemistryhttps://en.wikipedia.org/wiki/Transistorhttps://en.wikipedia.org/wiki/Gate_dielectrichttps://en.wikipedia.org/wiki/Permittivityhttps://en.wikipedia.org/wiki/Silicon_dioxidehttps://en.wikipedia.org/wiki/Subthreshold_leakagehttps://en.wikipedia.org/wiki/Threshold_voltagehttps://en.wikipedia.org/wiki/Titanium_nitride#cite_note-7https://en.wikipedia.org/wiki/Bioelectronicshttps://en.wikipedia.org/wiki/Bioelectronicshttps://en.wikipedia.org/wiki/Titanium_nitride#cite_note-SCT2010-8https://en.wikipedia.org/wiki/Implant_(medicine)https://en.wikipedia.org/wiki/Biosensors


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corrosion caused y theody fluid#TiN electrodes ha!e already een applied in the suretinalprosthesis proGect*9+as well as in iomedical microelectromechanical systems (io664)#*+

Fabrication*edit+

Titanium nitride (TiN) coated punches using cathodic arc deposition techniOue

The most common methods of TiN thin film creation are physical !apor deposition(85C,usuallysputter deposition, cathodic arc depositionor electron eam heating) and chemical !apordeposition(-5C)#*+&n oth methods, pure titanium is sulimedand reacted with nitrogen in a high%energy, !acuumen!ironment# TiN film may also e produced on Ti workpieces y reacti!e growth(for example, annealing) in anitrogenatmosphere# 85C is preferred for steel parts ecause the

deposition temperatures exceeds the austenitiBingtemperature of steel# TiN layers are alsosputtered on a !ariety of higher melting point materials such as stainless steels,titaniumand titaniumalloys#*+&ts highPoung"s modulus(!alues etween 0' and '978aha!e een reported in theliterature */+) means that thick coatings tend to flake away, making them much less durale than thinones# Titanium nitride coatings can also e deposited y thermal sprayingwhereas TiN powders areproduced y nitridation of titanium with nitrogen or ammonia at


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titanium nitride

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