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TOTAL SOLUTION FOR ADVANCED MATERIAL RESEARCH
ACKNOWLEDGMENT
BRANCH DETAILS
MTI CORPORATION, founded in 1994 by a group of material researchers from MIT and UC Berkeley, has now become the leading manufacturer of oxide crystals and substrates in the world, thanks to venture capital from Silicon Valley. MTI continues to develop new crystal substrates and maintain high quality of its single crystal substrates. MTI is equipped with the latest state of the art instruments, which allow achievement of the highest standard. We strive continuously to keep pace with customers’ increasing demands on super-smoothness, super-flatness, and super-cleanliness. In 2000, by popular demand, MTI started to manufacture precision bench-top machines for material processing, analysis, and crystal wafer containers.
MTI currently operates three production factories in China. This allows for the possibility of providing high quality and low cost precision machines for material research and R&D Labs, including: low speed cutting saw, wire diamond saw, auto polishing machine, high temperature oven, tube furnace, X-Ray crystal orientation machine, and Mini XRD, as well as complete set of equipments for research of rechargeable battery materials. Simple to operate, low cost, and commitment to our customers is our priority. MTI strives to become the world’s leader in bench-top machines for material lab.
MTI Corporation located nearby Richmond Inner Harbor
MTI engineering team has more than 15 years of experiences in manufacturing various type of rechargeable battery, and help many research institutes and R&D Company set up battery research lab worldwide. Now, MTI is the word leading supplier in providing desktop machines and tools for battery development; from battery powder preparation to electrode film coating, to test cell comprising.
MTI research equipments are specialized in: •Fuel Cell R&D •Thin Film R&D •Super-bright LED R&D •Advanced Ceramic R&D •New Metal R&D •Magnetic Material R&D •Crystal Growth R&D •Metallographic •Failure Analysis
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www.mtimalaysia.com || www.mti-indonesia.co.idPRODUCTS CATALOG
TABLE OF CONTENT
THERMAL PROCESSING 5VACUUM CHAMBER FURNACE 5
CRUCIBLE FURNACE 5
ATMOSPHERE BOX FURNACE 5
MUFFLE FURNACE 6
INDUSTRIAL MUFFLE FURNACE 8
CRYSTAL GROWTH CHAMBER 8
TUBE FURNACE 9
CLOSE SPACE SUBLIMATION FURNACE 19
HYDROTHERMAL REACTOR 19
CONVECTION OVEN 20
VACUUM OVEN 21
SURFACE TREATMENT 21
MELTING SYSTEM 22
HOT PLATES 24
TEMPERATURE CONTROL UNIT 24
SAMPLE PREPARATION 25HOT PRESS 25
COLD ISOSTATIC PRESS 26
HYDRAULIC PRESS 26
ROLLING PRESS 27
LABORATORY MILL/ MIXER 28
POLISHING MACHINE 30
CUTTING & DICING SAWS 31
DIAMOND WIRE SAWS 31
DISC CUTTERS 32
PLASMA SPUTTERING COATER 32
SCREEN PRINTING COATER 33
DIP COATER 33
DIP COATER WITH CHAMBER 34
DOCTOR BLADE FILM COATER 35
SPRAY PYROLYSIS COATING EQUIPMENT 35
ELECTROSPINNING STATION 36
THIN FILM ANALYZER 36
THERMAL EVAPORATION COATER 37
SPIN COATER 37
BATTERY R&D 38COIN CELL PREPARATION 38
POUCH CELL PREPARATION 38
CYLINDER CELL PREPARATION 39
OTHERS RELATED TO BATTERY PREPARATION 39
BATTERY SAFETY TESTING EQUIPMENT 40
SPLIT TEST CELL 42
ROLL TO ROLL COATER 43
SPOT & ULTRASONIC WELDER 43
BATTERY/CAPACITOR ANALYZER 44
MATERIAL ANALYSIS 45DEKSTOP X-RAY INSTRUMENT 45
DIGITAL MICROSCOPE 45
OTHER LAB EQUIPMENT 46VACUUM GLOVE BOX 46
FUME HOOD 47
VACUUM STORAGE BOX 47
DIGITAL LAB BALANCE 48
ULTRASONIC CLEANER 48
UV EQUIPMENT 48
PRECISION MILLING MACHINE 49
LATHE 49
LAB GENERATOR 49
MECHANICAL & MOLECULAR PUMP 50
VISCOSITY TESTER 50
RECIRCULATING WATER CHILLER 51
PLASMA CLEANER 51
GAS DELIVERY SYSTEM 52
MISCELLANEOUS 53
LAB WARES & ACCESSORIES 54HEATING ELEMENT 54
FURNACE HEATING MODULE 54
THERMAL BLOCKS 55
THERMAL ADAPTER 55
INSULATION TAPE 55
HIGH TEMPERATURE O-RING 56
HIGH TEMPERATURE COATING & ADHESIVE 56
REFRACTORY PLATE 57
RTP FURNACE TYPE ACCESSORIES 57
THERMOCOUPLE & CALIBRATION KIT 57
SOFTWARE FOR TEMPERATURE CONTROLLER 58
FLOWMETER & CONTROLLER 58
PRESSURE GAUGE & CONTROLLER 58
FITTINGS, PIPES & VALVES 59
SEALING FLANGES & ACCESSORIES 60
QUARTZ TUBE 61
OTHER TYPES OF PROCESSING TUBE 62
MOBILE CART 63
OIL TRAP & EXHAUST FILTER 63
PRESSING DIE 63
CUTTING & DICING BLADE 64
SAND PAPER DISC 65
DIAMOND LAPPING DISC 65
POLISHING PAD 65
MAGNETIC BUFFER PLATE 66
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DIAMOND POLISHING PASTE 66
SAMPLE MOUNTING ACCESSORIES 66
GRAPHITE BLOCKS & WAX 66
ACCESSORIES RELATED TO CUTTING SAW 67
ACCESSORIES RELATED POLISHING MACHINE 67
ACCESSORIES RELATED TO VACUUM GLOVE BOX 68
ACCESSORIES RELATED TO SPIN COATER 68
LIQUID SOLUTION HANDLING 68
MICROMETER ADJUSTABLE FILM APPLICATOR 68
DIAMOND SCRIBER 68
MILLING/MIXING JAR 69
MILLING/MIXING BALL 69
MISCELLANEOUS 69
CONSUMABLES FOR BATTERY R&D 70
SAMPLE HANDLING 74TWEEZER & VACUUM PEN 74
IC TRAY 74
MEMBRANE FILM BOXES 75
PLASTIC FOAM MODULE WAFER CARRIER 75
GEL STICKY BOXES 75
SINGLE WAFER CONTAINER 76
MULTI LAYER CONTAINER 76
PFA WASHING CONTAINER 76
BLUE WAFER WASHING CARRIER 76
MORTAR & PESTLE 76
GRAPHITE CRUCIBLE 76
ALUMINA CRUCIBLE 77
STATIC SHIELDING BAG 77
QUARTZ BOAT 78
DUST-FREE WIPER 78
BATTERY PACKS 79
APPENDICES 80LI-ION COIN CELL FABRICATION & EQUIPMENT 80
LI-ION CYLINDRICAL BATTERY FABRICATION & EQUIPMENT
81
LI-ION POUCH BATTERY FABRICATION & EQUIPMENT 82
METHOD SUMMARIZATION 83
LJ-UHV 84
TABLE OF CONTENT
BATTERY PRODUCTION LINE
MTI ENGINEERING TEAM has more than 15 years of experiences in manufacturing various type of rechargeable battery, and has been helping many research institutes and R&D Company into consulting battery research lab setup at the worldwide. Currently, MTI is the world leading supplier in providing desktop machines and tools for battery development; from battery powder preparation to electrode film coating. If you need anything for battery research, please let us know. We will help you to find a solution.
We can provide technology transfer and full production line for battery cells with production yield from 1000 Ah/day to 100,000 Ah/day. For additional information about research line process for coin cell, pouch cell, and cylinder cell, please refer to APPENDICES. If you are interested into battery production line, please send an email to us with the following information:
1. The expected daily production capability (Ah/day)2. Battery size and type
u u u u
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Model VBF-1200X-H8-UL
Quartz Tube Size 8” O.D x 7.5” I.D.x 13.4“ L
Volume 7.6 L
Working Temperature Maximum 1100°C for 30 minutes and 1000°C continuously
Features •PID automatic control and auto-tune function•Stainlesssteelvacuumflangewithoneneedlevalveasgasinlet•One port for vacuum pump connection •Digitalvacuumgaugeprovided
UL Recognition AllelectriccomponentsareULrecognized
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VACUUM CHAMBER FURNACE
CRUCIBLE FURNACEVBF-1200X
•Designedforsinteringceramicparts and component • The heating element isembeddedintheinsulationformaximumheattransfertothechamber•9litersvolumecapacitydouble
layer steel structure•Canbeusedupto1250ºC
VTF-1600X
• Designed for melting metalandcrystalgrowthviaTSSG• Consists of high qualityaluminafiberbrickandMoSi
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heatingelements•Canbeusedupto1600ºC•Doubleshellsteelcasingwithcoolingfantokeeplowsurfacetemperature
ATMOSPHERE BOX FURNACE
OTF-1200X-DT
•Maxworkingtemp:1250°C•Maxheatingrate:120°C/min•Maxvacuumpressure:20Torr• Max dwell time with vacuum: 60
min• Max dwell time without vacuum:
540 min•Insidecambersize:100mmdia.X
140mm H• Auto-lift and auto down sample
tray•Idle,dry,preheat,Rampup,dwell,Cooling down, 6 segments areprogrammable
VBF-1200X-E8
•Watercooledvacuumflange• Quartz chamber for clean
treatment•Automaticbottom loading for
easy operation• Max continuous workingtemperature:1100ºC• DC motor with remotecontroller drives the openingand closing operation of theflange•PID temperaturecontroller forprecisecontrolofheatingrate,coolingrateanddwelltime
KSL-1600XA6 KSL-1700XA6 KSL-1700X-GS KSL-1800X-GS KSL-1700X-H2
Workingtemperatureupto1500ºC
Working temperatureupto1600ºC
Working temperatureupto1600ºC
Working temperatureupto1700ºC
Workingtemperatureupto1600ºC
•5ºC/minmaximumheatingrate•Doubleskinnedsteelcontructionwithaircoolingconvection•Chambersizeof20”x20”x24”•157litervolumecapacity
•5ºC/minheatingrate• Vacuum-sealed steel case with watercooling jacket and vacuum & gas flowcontrol system•12litervolumecapacity
•5ºC/minheatingrate• Built in H
2 burning control system,
pressuregauge,vacuumvalvesandtwoflowmeters•12litervolumecapacity
www.mtimalaysia.com || www.mti-indonesia.co.id
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MUFFLE FURNACE
KSL-1100X-SKSL-1500X-S
KSL-1200X-M
General Features:•PIDautomaticcontrolandautotunefunctiontemperaturecontroller•Highpurityaluminafiberinsulation•Doubleshellsteelcase
Mufflefurnace(400°C-1800°C) stepsinasthenecessarypartoflaboratorythatrequiresextremeheatenvironment.MTIisprovidingthemufflefurnaceatanaffordablecost.Thesizesofthemufflefurnacearevariousfromthesmallerfurnaceswhichareconvenientlyplacedonaworkbench,tothelargerunitsthathasacovetedcapacityandcompetentforallduty.
KSL-1400X
ModelChamber Dimension
L x W x HVolume
Heating Rate
Working Temperature
Features
KSL-1100X-S 4” x 4” x 4“ 1 L Max:30°C/min Max:1200°C(<1hour)Cont:1100°C
•Energysaving(700Wmaxpowerusage)•Fe-Cr-AlAlloydopedbyMo
KSL-1100X-S-UL(UL Certified)
4” x 4” x 4“ 1 L Max:30°C/min Max:1200°C(<1hour)Cont:1100°C
•Energysaving(700Wmaxpowerusage)•Fe-Cr-AlAlloydopedbyMo
KSL-1100X-AC-80 16” x 16” x 16” 64 L Max:20°C/min Max:1200°C(<4hour)Cont:1100°C
•Watercoolingfrontdoorandaircoolingshell• Can stand at positive pressureup to 0.2MPa and vacuum upto - 0.1MP•Builtinpressuregauge,vacuumvalves, KF25 vacuum port, andtwogasflowmeters•Waterchillerisincluded
KSL-1200X 12”x8”x5” 7.2L Max:50°C/min Max:1200°C(<1hour)Cont:1100°C
•Resistancewirecoilon3sidesofinteriorchamber•Ventportinstalledontop•0.5”diaobservationwindow•Gasfilltubeisincluded
KSL-1200X-J 6” x 6” x 7” 4.2L Max:30°C/min Max:1200°C(<4hour)Cont:1100°C
•Resistancewirecoilon3sidesofinteriorchamber
KSL-1200X-J-UL(UL Certified)
6” x 6” x 7” 4.2L Max:30°C/min Max:1200°C(<4hour)Cont:1100°C
•Resistancewirecoilon3sidesofinteriorchamber
KSL-1200X-M 12”x12”x12” 27L Max:10°C/min Max:1200°C(<3hour)Cont:1100°C
•Resistancewirecoilon3sidesofinteriorchamber•Ventportinstalledontop
KSL-1200X-L 16” x 16” x 16” 64 L Max:20°C/min Max:1100°C(<1hour)Cont:1000°C
•Resistancewirecoilon3sidesofinteriorchamber•Ventportinstalledontop
KSL-1200X-L5-UL(UL Certified)
16” x 16” x 16” 64 L Max:20°C/min Max:1200°C(<1hour)Cont:1100°C
•Resistancewirecoilon5sidesofinteriorchamber•Ventportinstalledontop
KSL-1400X 10”x10”x12” 19L Max:10°C/min Max:1400°C(<3hour)Cont:1300°C
• Double door type with slidingrailsoneachdoor•Heatingelement:SiliconCarbide
KSL-1500X-S-UL(UL Certified)
4.7” x 4.7” x 4.7” 1.7 L Max:20°C/minCont:10°C/min
Max:1500°C(<1hour)Cont:1400°C
• Gas inlet and venting port areinstalled•Heatingelement:SiliconCarbide
KSL-1700X-S 4.7” x 4.7” x 4.7” 1.7 L Max:20°C/minCont:10°C/min
Max:1700°C(<3hour)Cont:1600°C
• Heating element: MolybdenumDisilicide
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KSL-1100X- AC-80
KSL-1200X
KSL-1700X-A4-DC
KSL-1200X-L
ModelChamber Dimension
L x W x HVolume
Heating Rate
Working Temperature
Features
KSL-1700X-A1P 6” x 6” x 6” 3.6 L Max:20°C/minCont:10°C/min
Max:1700°C(<3hour)Cont:1600°C
•Heating element:MolybdenumDisilicide
KSL-1700X-A1P-UL(UL Certified)
6” x 6” x 6” 3.6 L Max:20°C/minCont:10°C/min
Max:1700°C(<3hour)Cont:1600°C
•Heating element:MolybdenumDisilicide
KSL-1700X-A2 8” x 8” x 8“ 8.4 L Max:20°C/minCont:10°C/min
Max:1700°C(<3hour)Cont:1600°C
•Heating element:MolybdenumDisilicide
KSL-1700X-A3(UL Certified)
10”x10”x12” 19L Max:10°C/minCont:5°C/min
Max:1700°C(<3hour)Cont:1650°C
•Heating element:MolybdenumDisilicide
KSL-1700X-A4-DC 12”x12”x12” 36 L Max:5°C/min Max:1700°C(<3hour)Cont:1600°C
• Two sets of temperaturecontroller for safety features• Rotameter and gas ports are
installed•Heating element:Molybdenum
Disilicide
KSL-1700X-KA-S 4.7” x 4.7” x 4.7” 1.7 L Max:20°C/minCont:10°C/min
Max:1750°C(<2hour)Cont:1720°C
•Gas inlet and venting port areinstalledforusingatoxygenorinertgasatmospheres• Heating element: Kanthal type
Molybdenum Disilicide
KSL-1700X-KA 6.3”x5.9”x5.9” 3.6 L Max:20°C/minCont:10°C/min
Max:1750°C(<3hour)Cont:1700°C
• Heating element: Kanthal typeMolybdenum Disilicide
KSL-1700X-KA-UL(UL Certified)
6.3”x5.9”x5.9” 3.6 L Max:20°C/minCont:10°C/min
Max:1750°C(<3hour)Cont:1700°C
• Heating element: Kanthal typeMolybdenum Disilicide
KSL-1700X-KA2 8” x 8” x 8” 8.4 L Cont:5°C/min Cont:1750°C •ZrO2(YSZ)chambercoating• Heating element: Kanthal type
Molybdenum Disilicide
KSL-1700X-KA3 10”x10”x12” 19L Max:10°C/minCont:5°C/min
Max:1750°C(<3hour)Cont:1720°C
•ZrO2(YSZ)chambercoating• Heating element: Kanthal type
Molybdenum Disilicide
KSL-1800X-KA-S 4.7” x 4.7” x 4.7” 1.7 L Max:20°C/minCont:10°C/min
Max:1800°C(<2hour)Cont:1750°C
•YSZ liner thatcanstandup to2000°C• Heating element: Kanthal type
Molybdenum Disilicide
KSL-1800X-KA-S-UL(UL Certified)
4.7” x 4.7” x 4.7” 1.7 L Max:20°C/minCont:10°C/min
Max:1800°C(<2hour)Cont:1750°C
•YSZ liner thatcanstandup to2000°C• Heating element: Kanthal type
Molybdenum Disilicide
KSL-1800X-KA-UL(UL Certified)
6.3”x5.9”x5.9” 3.6 L Max:10°C/minCont:5°C/min
Max:1800°C(<1hour)Cont:1750°C
•YSZ liner thatcanstandup to2000°C• Heating element: Kanthal type
Molybdenum Disilicide
www.mtimalaysia.com || www.mti-indonesia.co.id
KSL-1100X-D KSL-1100X-BH
•Easyopentopcoverforsampleloading•Robustcasedesigns,fiberouslinerwithventilationport•6sidesheatingelementsinstalled(top,left,right,rearwall,door,
bottom) for maximum uniform temperature•Chamberdimension:1800Dx900Wx450Hmm(729L)•Continuousoperatingtemperature:400-1100°C•Maxheatingrate:10°C/min•PIDtemperaturecontrolunitisinseparatedbox
•Stablebogie-hearthwithsingleflangedrailwheels•Robustcasedesigns,fiberouslinerwithventilationport• 5 sides heating elements installed (left, right, rear wall, door,bogie-hearth)formaximumuniformtemperature•Chamberdimension:1200Dx600Wx450Hmm(324L)•Continuousoperatingtemperature:400-1200°C•Maxheatingrate:10°C/min•PIDtemperaturecontrolunitisinseparatedbox
KSL-1400X-BL KSL-1300X-BH
•Stablebogie-hearthwithsingleflangedrailwheels•Robustcasedesigns,fiberouslinerwithventilationport•4sidesheatingelementsinstalled(top,left,right,rearwall,bogie-hearth)formaximumuniformtemperature•Chamberdimension:800Dx800Wx800Hmm(512L)•Continuousoperatingtemperature:700-1300°C•Maxheatingrate:10°C/min•PIDtemperaturecontrolunitisinseparatedbox
•Stablebogie-hearthwithsingleflangedrailwheels•Robustcasedesigns,fiberouslinerwithventilationport• 4 sides heating elements installed (top, left, right, rear wall,bogie-hearth)formaximumuniformtemperature•Chamberdimension:1500Dx900Wx600Hmm(810L)•Continuousoperatingtemperature:700-1300°C•Maxheatingrate:10°C/min•PIDtemperaturecontrolunitisinseparatedbox
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EQ-SKJ-50CZ
CZCrystalGrowerSystemwithVacuumChamberforOxideSingleCrystals
•Pullingvariousoxidecrystalswithmeltingpointupto2100°C,includingSapphire,GGG,YAG,LaAlO3,Si,andGe,etc.withdiameterupto3”•Meltingpointupto2100°C•Vacuumchambersize:500Diameterx700Hmm•Electronicoperationforcontrolsofpulling,rotatingandtemperature•Maxseedrodtraveldistance:400mm•Maxcruciblerodtraveldistance:100mm•Watercoolingthroughchamberjacketandcrystalseedrod•PullerisdrivenbyconstanttorqueDCmotorwithpullingrate:0.1-20mm/h•Rotatingrate:0-40rpm•Electronicoperationforcontrolsofpulling,rotatingandtemperature•Cruciblerodraisingspeediscontrolledmanually
CRYSTAL GROWTH CHAMBER
Copyright © All Rights Reserved
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TUBE FURNACETherearemanytypesoftubefurnaceswhichareSingleZoneTubeFurnace,Multi-zoneTube Furnace, RotaryTube Furnace, CVD/PECVD/HydrogenTubeFurnace, Rapid Thermal Processing/Graphene Tube Furnace and VerticalTube Furnace to meet various applications for researchers and engineersworldwide.
ModelWorking Tube Dia.
Tube Rotating Speed
Working Temperature
Features
ROTARY TUBE FURNACE
OTF-1200X-4-R-UL 100 mm O.D 0 - 7 rpm Max:1200°C(<2hour)Cont:1100°C
•Heatingzonelength:400mm(Singlezone)• Fused quartz tube with four mixing blade is
installed•Thefurnacecanbetiltedupto35°byelectriclift•Onepairof60mmSSsealingflangewithneedlevalvesandrotablegasconnectorisincluded
OTF-1200X-4-R-II-UL
100 mm O.D 0 - 10 rpm Max:1200°C(<2hour)Cont:1100°C
•Heatingzonelength:800mm(Twozones)• Fused quartz tube with four mixing blade is
installed•Thefurnacecanbetiltedupto35°byelectriclift•Onepairof60mmSSsealingflangewithneedlevalvesandrotablegasconnectorisincluded
OTF-1200X-5L-R-III-UL
127mmO.D 0 - 7 rpm Cont:1100°C •Heatingzonelength:600mm(Threezones)• Fused quartz tube with four mixing blade is
installed•Thefurnacecanbetiltedupto30°electronically•Magnetofluidforsealingthetubeduringrotation•Onepairof60mmSSsealingflangewithneedlevalvesandrotablegasconnectorisincluded
OTF-1200X-R-60HG 100 mm O.D 0 - 7 rpm Cont:1100°C •Heatingzonelength:800mm(Twozones)•Fusedquartztubewithfourmixingblade,vacuumpump,hydrogengenerator,andhydrogendetectorsystemwithsolenoidvalveareinstalled•Thefurnacecanbetiltedupto30°electronically•Magnetofluidforsealingthetubeduringrotation•Onepairof60mmSSsealingflangewithneedlevalvesandrotablegasconnectorisincluded•Gasportsareinstalled
GSL-1500X-OTF-R60 60mm&100 mm O.D
0 - 7 rpm Max:1500°C(<1hour)Cont:1400°C
•Heatingzonelength:300mm(Onezone)•Twoprocessingtubesareincludedwhichareonealuminaworktubewithcentralblockzone&onequartz tubewith largercentralcontainerand60mmSSvacuumsealingflangesareincluded•Thefurnacecanbetiltedupto35°byelectriclift•Gasportsareinstalled
GSL-1600X-R60-II 60 mm O.D 0 - 7 rpm Max:1600°C •Heatingzonelength:800mm(Twozones)•Alumina tube & one pair of 60mmSS vacuumsealingflangewithneedlevalvesareincluded•Gasportsareinstalled•Thisfurnacecannotbetilted
OTF-1200X-R-60HG
OTF-1200X-5L-R-III-ULGSL-1600X-R60-II
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ModelWorking Tube Dia.
Plasma RF Power Supply
Working Temperature
Features
PECVD TUBE FURNACE
OTF-1200X-50S-PE-SL
2”O.D •5-300Woutputpower•13.56MHzRFfrequency•200Wmaxreflectionpower
Max:1200°C(<1hour)
Cont:1100°C
•A300WRFplasmagenerator,onepairSSvacuumsealing flanges with a KF25 port, two KF25 quickclamp,KF25bellowhose,flangesupport,slidingrails,needlevalves,digitalpiranigauge,andvacuumpumpare included
OTF-1200X-4CLV-PE-UL
2”or3.14” or 4” O.D
•5-500Woutputpower•13.56MHzRFfrequency•200Wmaxreflectionpower
Max:1200°C(<1hour)
Cont:1100°C
• 440 mm length single heating zone and 150 mmlengthconstanttemperatezone•A500WRFplasmagenerator,onepairSSvacuumsealing flanges with a KF25 port, two KF25 quickclamp, KF25 bellow hose, flange support, needlevalves,fourprecisionmassflowmeters,mixingtank,digitalpiranigauge,andvacuumpumpareincluded
OTF-1200X-80-II-4CV-PE-SL
2”or3.14” or 4” O.D
•5-500Woutputpower•13.56MHzRFfrequency•200Wmaxreflectionpower
Cont:1100°C • Two programmable precision digital temperaturecontrollerswith400mmtotal lengthof twoheatingzones•A500WRFplasmagenerator,onepairSSvacuumsealing flanges with a KF25 port, two KF25 quickclamp, KF25 bellow hose, flange support, slidingrails,needlevalves,fourprecisionmassflowmeters,mixingtank,digitalpiranigauge,andPfeiffervacuumpump are included
OTF-1500X-80-III-4CV-PE
80 mm O.D
•5-500Woutputpower•13.56MHzRFfrequency•200Wmaxreflectionpower
Max:1500°CCont:1400°C
• Three programmable precision digital temperaturecontrollerswith600mmtotallengthofthreeheatingzones•A500WRFplasmagenerator,onepairSSvacuumsealing flanges with a KF25 port, two KF25 quickclamp, KF25 bellow hose, flange support, slidingrails,needlevalves,fourprecisionmassflowmeters,mixingtank,digitalpiranigauge,andPfeiffervacuumpump are included
OTF-1200X-50-II-PE-MSL
2”O.D •5-500Woutputpower•13.56MHzRFfrequency•200Wmaxreflectionpower
Cont:1100°C • Two programmable precision digital temperaturecontrollerswith400mmtotal lengthof twoheatingzones•A500WRFplasmagenerator,onepairSSvacuumsealing flanges with a KF25 port, two KF25 quickclamp,KF25bellowhose,flangesupport,slidingrails,needle valves, pre-heater, digital pirani gauge, andPfeiffer vacuum pump are included
OTF-1200X-50S-PE-SL
OTF-1200X-4CLV-PE-UL
OTF-1200X-80-II-4CV-PE-SL
OTF-1200X-50-II-PE-MSL
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ModelWorking Tube Dia.
Max Heating Rate
Working Temperature
Features
RAPID THERMAL PROCESSING TUBE FURNACE
OTF-1200X-4-RTP-UL 4” I.D 50ºC/sec Max:1100°C(<10min)
Max:800°C(<120min)
Cont:600°C
•Heatingzone:12”with4”constanttemperaturezone•Maxcooling:60°C/min;Lowestcooling:10°C/min•Quartztube,sampleholder,vacuumflanges,flowmeter,andvacuumgaugeareincluded
EQ-OTF-1200X-4-RTP-HV 4” I.D 50ºC/sec Max:1100°C(<10min)
Max:800°C(<120min)
Cont:600°C
•Heatingzone:12”with4”constanttemperaturezone•Maxcooling:60°C/min;Lowestcooling:10°C/min• Quartz tube, sample holder, vacuum flanges, flow meter,vacuumgauge,andhighvacuumstationareincluded
EQ-RTP-1000-LV3C 4” I.D 50ºC/sec Max:1100°C(<10min)
Max:800°C(<120min)
Cont:600°C
•Heatingzone:12”with4”constanttemperaturezone•Maxcooling:60°C/min;Lowestcooling:10°C/min• Quartz tube, sample holder, vacuum flanges, flow meter,vacuumgauge, three channel gasmixer, and vacuumpumpare included
GSL-1500X-RTP50 2”O.D 10ºC/sec(forMullite)
30ºC/sec(forQuartz)
Max:1500°CCont:1400°C
•Oneslidingflangeisinstalledonrightsidefurnace•DigitalvacuumgaugeandoneSSvacuumsealingflangesare
included
OTF-1200X-4-RTP-SL 4” I.D 50ºC/sec Max:1100°C(<10min)
Max:800°C(<120min)
Cont:600°C
•Heatingzone:12”with4”constanttemperaturezone•Maxcooling:60°C/min;Lowestcooling:10°C/min•Quartztube,sampleholder,vacuumflanges,flowmeter,vacuumgauge,threechannelgasmixer,slidingrailDCmotorcontrolledand vacuum pump are included
OTF-1200X-80SL 80 mm O.D
15ºC/sec Max:1200°C(<1hour)
Cont:1100°C
•Heatingzone:440mm(singlezone)• Slidable rails, SS vacuum flanges, Omega temperaturecalibratoranddigitalvacuumgaugeareincluded
GSL-1500X-OTF-50SL 2”O.D(Mullite)
15ºC/sec Max:1500°CCont:1400°C
•Heatingzone:300mm(singlezone)•Slidablerails,SSvacuumflanges,anddigitalvacuumgauge
are included
OTF-1200X-50-SL-UL 2”O.D 15ºC/sec Max:1200°CCont:1100°C
•Heatingzone:200mm(singlezone)• Slidable rails with mechanism, SS vacuum flanges, dual aircoolingfans,anddialvacuumgaugeareincluded
OTF-1200X-4-II-C4OV-SL
100 mm &80mmO.D
15ºC/sec Max:1200°CCont:1100°C
•Heatingzone:400mm(twozones)•Slidablerails,dualtubedesign,SSvacuumflanges,fourmassflow controller, digital vacuum gauge, and Pfeiffer’s oillessvacuum pump are included
OTF-1200X-4-C4LVS 2”O.D 3ºC/sec Max:1100°CCont:1000°C
•Heatingzone:440mm(twozones)•Slidablerails,dualtubedesign,SSvacuumflanges,fourmassflow controller, digital vacuum gauge, and vacuum pump areincluded
OTF-1200X-50-SL-UL
OTF-1200X-4-RTP-UL
GSL-1500X-RTP50
EQ-RTP-1000-LV3C
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TUBE FURNACE
ModelWorking Tube Dia.
Heating RateWorking
TemperatureFeatures
HORIZONTAL TUBE FURNACE
GSL-1100X-50 2”O.D Max:20°C/min Max:1100°C(<1hour)Cont:1000°C
Smallquartztubefurnacewithstainlesssteelvacuumflangeswith valve, dial vacuum gauge and quartz tube installedwherethechambercanbesetup invertical,horizontal,oratanangle
GSL-1100X-NT 1” O.D.or 2”O.D.
Max:20°C/min Max:1100°C(<1hour)Cont:1000°C
Compact tube furnace designed for firing small sampleswithbuiltin30segmentstemperaturecontrollerwherethechambercanbesethorizontallyoratanangle
GSL-1100X-50-LVT 2”O.D. Max:20°C/min Max:1100°C(<1hour)Cont:1000°C
TherightsideofthefurnacesystemiscomposedofaKF25gasoutletwithdigitalvacuumgaugeconnectedtoa226l/mmechanicalpumpand1/4”barbedgas inlet on the left toinsertflowinggasorvacuum
OTF-1200X-S50-LVT
1” O.D.or 2”O.D.
Max:10°C/min Max:1200°C(<1hour)Cont:1100°C
Compact split tube furnace with insertable temperaturecalibrator and complete vacuum system and 1/4” barbedgasinletonthelefttoinsertflowinggasorvacuum
OTF-1200X-S50-2F 2”O.D. Max:10°C/min Max:1200°C(<1hour)Cont:1100°C
Mini CVD tube furnacewith 2 channel gasmixer, vacuumpump and anti-corrosive vacuum gauge which enablevacuummeasurementswithaggressivegas
OTF-1200X-S 1” O.D or 2”O.D
Max:20°C/min Max:1200°C(<1hour)Cont:1100°C
Compactandenergysavingsplittubefurnacewithapairofstainlesssteelvacuumsealingflangesand1/4”barbfittingfor rubber hose connection for vacuum or flowing gas inheatingsample
EQ-GSL-1100X-8.5-S-UL
8.5” O.D Max:20°C/min Max:1100°CCont:1050°C
CE certified single zone quartz tube furnace with vacuumflangesandtwoaircoolingfanstokeepflangetemperaturebelow70°Candtoachieve24”heatingzone
OTF-1200X-4-HNG-UL
4” O.D.Max:20°C/min
Max:1100°C(<1hour)Cont:1000°C
Pair of smart stainless steel vacuum sealing flange andvalve/gaugewhich allow to heat sample under vacuumorflowinggas
OTF-1200X-5L 5” O.D.Max:20°C/min
Max:1200°C(<1hour)Cont:1100°C
Splittablesinglezonetubefurnacewitha17”lengthconstanttemperatureheatingzone,onepairofvacuumsealingflanges,twovacuumvalvesandapressuregaugeforimmediateuse
OTF-1200X-60HV 60 mm O.DMax:40°C/min
Max:850°C(<1hour)Cont:800°C
CEcertifiedsuperalloytubefurnacewithCFflangeandKF-D25 adapter for ultra high vacuum application up to 10-6 Torr
OTF-1200X-80-III-F3L
80 mm O.D
Max:20°C/min
Max:1200°CCont:1100°C
CE certified splittable three zones tube furnace withmechanical vacuum pump & digital vacuum gauge, threechannels gas flowing system and anti-corrosive Piranicapacitancediaphragmgauge
OTF-1200X-5-III-SF 5” O.DMax:20°C/min
Max:1200°CCont:1100°C
Threezonessplittubefurnacewithslidingrail,threechannelgasmixer,vacuumpump,andanti-corrosivegauge
GSL-1100X-50
GSL-1100X-50-LVT
OTF-1200X-S
OTF-1200X-S50-2F
OTF-1200X-60HV
OTF-1200X-5-III-SF
Copyright © All Rights Reserved
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ModelWorking Tube Dia.
Heating RateWorking
TemperatureFeatures
HORIZONTAL TUBE FURNACE
OTF-1200X-HVC 80 mm O.D or 101 mm O.D
Max:20°C/minMax:1200°CCont:1100°C
WorkstationconsistsofanOTF-1200Xseriestubefurnace,a precisionmass flow gas control station, a high vacuumstation
OTF-1200X-HVC-UL 80 mm O.D or 101 mm O.D
Max:20°C/minMax:1200°CCont:1100°C
WorkstationconsistsofanOTF-1200Xseriestubefurnace,a precisionmass flow gas control station, a high vacuumstation
OTF-1200X-III-HVC 80 mm O.D or 101 mm O.D
Max:20°C/minMax:1200°CCont:1100°C
Workstationconsistsofthreezonestubefurnace,aprecisionmassflowgascontrolstation,ahighvacuumstationwithvacuumrategoesupto10-5 Torr
GSL-1700X-4-HVC 4” O.D.Max:5°C/min
Max:1650°CCont:1600°C
CE certified single zone alumina tube furnace with highvacuumpumpsystemand2channelprecisiondigitalmassflowcontrollers
GSL-1700X-80-HVC9
80 mm O.DMax:5°C/min
Max:1700°C(<1hour)Cont:1600°C
Alumina tube furnace with vacuum pump system and 9channelprecisiondigitalmassflowmeter
OTF-1200X-80-II 3.14” O.D Max:20°C/min Max:1200°C(<1hour)Cont:1000°C
CEcertifieddualsplit twozonestubefurnacewithvacuumflangesandvalvesforimmediateuseandtwo30segmentsprogrammabletemperaturecontrollerinstalled
OTF-1200X-4-II 4” O.D Max:20°C/min Max:1100°C(<1hour)Cont:1000°C
CE certified split two zones tube furnace with vacuumflangeswithvalvesforimmediateuseandtwo30segmentsprogrammabletemperaturecontrollerinstalled
OTF-1200X-III-S-UL 60mmO.D/80mmO.D/100mmO.D/130 mm O.D
Max:20°C/min Max:1200°CCont:1100°C
CE certified 24” long splittable three zone tube furnacewith conventional flange and 30 segments temperaturecontroller
OTF-1200X-III-SHG 60mmO.D/80mmO.D/100mmO.D/130 mm O.D
Max:20°C/min Max:1200°CCont:1100°C CEcertified24”longsplittablethreezonestubefurnacewith
hingedtypeflangeand30segmentstemperaturecontroller
OTF-1200X-III 60mmO.D/80mmO.D/100mmO.D/130 mm O.D
Max:20°C/min Max:1200°CCont:1100°C
CEcertified36”longsplittabletubefurnace,vacuumsealingflanges,pressuregauge,ballvalveandtwofiberousceramicblocksareincluded
GSL-1100X-8.5S-III 8.5” O.D Max:20°C/min Max:1100°C(<10min)Cont:600°C
Three zones tube furnace consists of 24” long heatingzones, three precision temperature controllers are built inwithhingedtypestainlesssteelvacuumflanges,onedigitalvacuumgauge, twoaircooling fansand twoquartzblocksequipped
OTF-1200X-HVC-UL
GSL-1700X-80-HVC9
OTF-1200X-III-S-UL
OTF-1200X-III-SHG
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TUBE FURNACE
ModelWorking Tube Dia.
Heating RateWorking
TemperatureFeatures
HORIZONTAL TUBE FURNACE
GSL-1100X-8.5-III 8.5” O.D Max:20°C/min Max:1100°CCont:1000°C
CE certified three zones tube furnace with hinged typevacuum flanges, needle valves, vacuum gauge, three 30segments temperaturecontrollerand twofiberousceramictubeblocksareincluded
GSL-1100X-8.5-III-SR
8.5” O.D Max:10°C/min Max:1100°CCont:1000°C
Threeheatingzonestubefurnacewithslidablevacuumflangeandmulti-gasfedthroughSStubeforLPCVDprocessing
GSL-1100X-11-III 11” O.D Max:20°C/min Max:1100°C(<1hour)Cont:1000°C
CEcertified three zones tube furnace consists of stainlesssteel vacuum flanges, needle valves, vacuum gauge, twofibrousceramictubeblockswithPIDautomaticcontrol
OTF-1500X-III-UL 60 mm O.D or 80 mm O.D
Max:5°C/min Max:1500°CCont:1400°C
Splitthreezonestubefurnacewithmullitetube,conventionalflangeandthree30segmentsPIDtemperaturecontrollers
GSL-1700X-60-III 60 mm O.D Max:10°C/min Max:1400°C(zone1)1700°C(zone2)1400°C(zone3)
CEcertifiedthreezonesaluminatubefurnacewithcompletevacuumsealingflange,dialvacuumgaugeandtwoporousceramicblocksareincluded
GSL-1700X-60-III-F3LV
60 mm O.D Max:10°C/min Max:1400°C(zone1)1700°C(zone2)1400°C(zone3)
Threezonesaluminatubefurnacewithmechanicalvacuumpump, three channels gas flowing system, stainless steelvacuumflanges,anti-corrosivePiranicapacitancediaphragmgaugeandtwoporousceramicblocksareincluded
OTF-1200X-80-V 80 mm O.D Max:20°C/min Max:1200°CCont:1100°C
CE certified five zones quartz tube furnace with stainlesssteel flanges, dial vacuumgauge, valves and two fiberousceramictubeblocksareincluded
OTF-1200X-V 1” to 5” O.D Max:20°C/min Max:1200°CCont:1100°C
Five zones split tube furnace with separated temperaturecontrolunittoallowremotecontrolfurnacefromadistanceandconstanttemperaturezoneupto25”length
OTF-1200X-VII 1” to 5” O.D Max:20°C/min Max:1200°CCont:1100°C
Sevenzonessplittubefurnacewithseparatedtemperaturecontrolunittoallowremotecontrolfurnacefromadistanceandconstanttemperaturezoneupto28”length
OTF-1200X-ML76-UL
3’’O.D Max:20°C/min Max:1250°CCont:1200°C
CEcertifiedsplittablemullitetubefurnaceconsistsofapairof smart stainless steel vacuum sealing flange and valve/gaugewithMTEcertifiedPIDautomaticcontrol
GSL-1500X-50-UL 2”O.DMax:10°C/min
Max:1500°CCont:1400°C
CEcertifiedcompacttubefurnacewithstainlesssteelvacuumflanges,hightemperaturesiliconeO-ring,vacuumgauge,valveandtwofiberousceramictubeblocksareincluded
GSL-1600X 60mmO.D/80mmO.D/100 mm O.D
Max:5°C/min(above1200°C)Max:10°C/min(below1200°C)
Max:1600°C
CEcertifiedbench-toptubefurnaceconsistsofdoublelayersteelcasingwithaircoolingfan,needlevalves,flangesandsealingO-ring, tube blocks, furnace handle hook, and two fiberousceramictubeblocksareincluded
GSL-1100X-8.5-III-SR
OTF-1500X-III-UL
OTF-1200X-VGSL-1500X-50-UL
Copyright © All Rights Reserved
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PRODUCTS CATALOG
ModelWorking Tube Dia.
Heating RateWorking
TemperatureFeatures
HORIZONTAL TUBE FURNACE
GSL-1600X-OTF 60 mm O.DMax:10°C/min
Max:1600°CCont:1500°C
CE certified splittable alumina tube furnace consists ofvacuum flanges, valve, pressure gauge and two porousceramicblocksareincludedwithPIDtemperaturecontrol
GSL-1700X-S60-UL 60 mm O.DMax:20°C/min
Max:1700ºC(<1hour)Cont:800~1600°C
CEcertifiedaluminatubefurnacecontrolledbySCRdigitalcontroller,vacuumflanges,needlevalve,dialvacuumgaugeandtwofiberousceramictubeblocksareincluded
GSL-1700X 80 mm O.DMax:5°C/min
Max:1700ºC(<1hour)Cont:1600°C
Bench-topvacuumandatmospheretubefurnaceconsistsofonepairsealingflangewithdoublesiliconehightemperatureO-ring,twoSSneedlevalvesandonedialvacuumgauge
GSL-1700X-80-HNG
3.25”O.D
Max:5°C/minMax:1700°C(<1hour)Cont:1600°C
Alumina tube furnacewith hinged type flanges for loadingand unloading samples at ease, SCR digital temperaturecontroller,builtintwocoolingfan,gasinletportandneedlevalve,KF25Dvacuumportandvacuumgaugeareinstalled
GSL-1700X-KS60-UL
60 mm O.D Max:10°C/min Max:1750°C(<3hour)Cont:1720°C
CE certified alumina tube furnace controlled by SCR digitalcontroller,twocoolingfan,vacuumflanges,dialvacuumgauge,valvesandfourfiberousceramictubeblocksareincluded
GSL-1700X-KS80 80 mm O.D Max:5°C/min Max:1750°C(<2hour)Cont:1700°C
CE certified alumina tube furnace controlled by SCR digitalcontroller,twocoolingfan,vacuumflanges,dialvacuumgauge,valvesandfourfiberousceramictubeblocksareincluded
GSL-1700X-KS100 100 mm O.D Max:5°C/min Max:1750°C(<2hour)Cont:1700°C
CE certified alumina tube furnace controlled by SCR digitalcontroller,twocoolingfan,vacuumflanges,dialvacuumgauge,valvesandfourfiberousceramictubeblocksareincluded
GSL-1700X-UL 80 mm O.D Max:5°C/min Max:1750°CCont:1700°C
UL recognized bench-top alumina tube furnace with twobuiltincoolingfan,METcertifiedPIDtemperaturecontroller,vacuum flanges, two pairs of SS tune support and twofiberousceramictubeblocksareincluded
GSL-1800X-S60-UL 60 mm O.D Max:5°C/min Max:1800°C(<1hour)Cont:1750°C
CE certified alumina tube furnace controlled by SCR digitalcontroller,twocoolingfan,vacuumflanges,dialvacuumgauge,valvesandfourfiberousceramictubeblocksareincluded
GSL-1800X-KS80 80 mm O.D Max:5°C/min Max:1800°C(<4hour)Cont:1700°C
CE certified alumina tube furnace controlled by SCR digitalcontroller,twocoolingfan,vacuumflanges,dialvacuumgauge,valvesandfourfiberousceramictubeblocksareincluded
GSL-1800X-KS80-UL
80 mm O.D Max:5°C/min Max:1800°CCont:1700°C
UL recognized bench-top alumina tube furnace with twobuiltincoolingfan,METcertifiedPIDtemperaturecontroller,vacuum flanges, two pairs of SS tune support and twofiberousceramictubeblocksareincluded
GSL-1800X-KS80-EU
80 mm O.D Max:5°C/min Max:1800°CCont:1700°C
Bench-top tube furnace with Kanthal Super-1900 MoSi2
heating element & consists of two cooling fans, vacuumflanges,&Eurotherm3504temperaturecontroller.
GSL-1600X-OTF
GSL-1700X-80-HNG
GSL-1700X-S60-UL
GSL-1800X-KS80-EU
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TUBE FURNACE
ModelWorking Tube Dia.
Heating RateWorking
TemperatureFeatures
HORIZONTAL TUBE FURNACE
OTF-1200X-4-NW 4.33” O.D(CVD)
1.2”O.D(Heater)
Max:20°C/min Cont:1000°C(CVD)
Cont:500°C(Heater)
Growingsubstrateupto3”diameter.Consistsoffourchannelsgasinlet(builtinatflanges),smallheateratleftflangetopreheatfeed-in gas, slidable sample holder, separated temperaturecontrolforCVDandheater,anddigitalvacuumgauge
OTF-1200X-III-D5-4 130 mm O.D(Outertube)102mmO.D(Innertube)
Max:20°C/min Max:1200°CCont:1100°C
Adual tubeand threezone tube furnace forgrowingfilmonmetallicfoilbyCVDwithonepairSSvacuumsealingflanges,threeprecisiontemperaturecontrollers,needlevalves,vacuumgauge,andtwofusedquartztubeareincluded
OTF-1200X-60HG 60 mm O.D Max:20°C/min Max:1100°C(<1hour)
Cont:1000°C
Consists of PID temperature controller, double layer steelcasing, twosetsofflanges,gas inletwithpressuregauge,flowmeter, hydrogen detector, hydrogen generator, andsolenoid valve.
OTF-1200X-60HG-SS
60 mm O.D Max:20°C/min Max:800°C(<1hour)
Cont:600°C
Consists of PID temperature controller, pressure sensorwhichisinstalledattheflange,hydrogendetector,hydrogengenerator, gas inlet with pressure gauge, needle valve,flowmeter.Canstandupto125atmat600°C
OTF-1200X-4-C4LVS
100 mm O.D(Outertube)
80 mm O.D(Innertube)
Max:20°C/min Max:1100°CCont:1000°C
Consistsofslidablerails,SSvacuumsealingflangesusingdualtube,watercoolingontheflanges,fourprecisionmassflowcontrollerwithdigitaldisplay,80mlmixingtank,needlevalve,vacuumpump,andPIDtemperaturecontroller
OTF-1200X 60mmO.D/80mmO.D/100 mm O.D
Max:20°C/min Max:1200°CCont:1100°C
Consistsofdoublelayersteelcasingwithaircoolingfan,needlevalves,flangesandsealingO-ring,tubeblocks,furnacehandlehook,andtwofiberousceramictubeblocks
GSL-1700X-60-II 60 mm O.D Max:20°C/min Zone1:1400°CZone2:1700°C
TwozonetubefurnacewithSSvacuumsealingflanges,1/4”barb fitting, built in precision temperature controller, anddigitalvacuumgauge
GSL-1700X-F3LV 60mmO.D/80mmO.D/100 mm O.D
Max:5°C/min Max:1700°C Consists ofmechanical vacuumpump and three channelsgasflowingsystem,anti-corrosivePiranigauge,flangesupport,rightanglevalve,SSbellow,andSSvacuumsealingflanges
GSL-1800X-80-III 80 mm O.D Max:5°C/min Max:1800°C(<2hour)
Cont:1750°C
Threezones tubefurnacewithrecirculatingwaterchiller&SSvacuumsealingflanges,YSZfibrousinsulation,aluminatube,anddigitalpressuregauge
GSL-1700X-KS80-UL
80 mm O.D Max:5°C/min Max:1750°CCont:1700°C
Consists of Kanthal type heating element, temperaturecontroller, SS vacuum sealing flanges, and dial vacuumgauge
GSL-1100X-6 6” O.D Max:20°C/min Max:1100°CCont:1050°C
ConsistsofSShingedtypevacuumflanges,dialpressuregauge,andonedigitaltemperaturecontroller
EQ-GSL-1100X-11-S2
11” O.D Max:20°C/min Max:1100°CCont:1050°C
Consists of SS hinged type vacuum flanges, digital pressuregauge,andtwodigitaltemperaturecontroller
GSL-1200X-4-NW
OTF-1200X-III-D5-4
OTF-1200X-60HG
GSL-1800X-80-III
GSL-1700X-F3LV
Copyright © All Rights Reserved
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PRODUCTS CATALOG
ModelWorking Tube Dia.
Heating RateWorking
TemperatureFeatures
HORIZONTAL TUBE FURNACE
OTF-1500X-II-UL 84 mm O.D Max:5°C/min Max:1500°CCont:1400°C
Splittable two zones tube furnace with mullite tube with SSvacuum sealing flanges, thermal blocks, and dial pressuregaugewithgasinlet
OTF-1600X-III-UL 82mmO.D Max:5°C/min Max:1600°C(<1hour)
Cont:1500°C
Splittable three zones tube furnacewithmullite tubewithSSvacuum sealing flanges, thermal blocks, and dial pressuregaugewithgasinlet
OTF-1200X-VI-2M 1 to 4” O.D Max:20°C/min Max:1600°C(<1hour)
Cont:1500°C
Six independent zones and ultra-long split tube furnacewith separated temperature control units. Consists of 6 PIDtemperature controller, high fiberous alumina insulation, 4”quartztubewithcoldwaterflangesareincluded
OTF-1200X-50-DSL 50 mm O.D Max:20°C/min Max:1100°C(<1hour)
Cont:1000°C
Horizontalsliding2”tubefurnacewithvariablespeedfrom1mm/sec-100mm/secandprogrammablerepeatingtime.Vacuumflangesanddigitalvacuumgaugeareinstalled
OTF-1200X-HP-30A 30 mm O.D Max:20°C/min
Max:1100°C
CompacthighpressurefurnacefeaturingNibasedalloytubevessel.Consistsofaluminumheatradiator,PIDtemperaturecontroller, pressure transducer controlled by pressuremonitor,highpressurevalves,andcoppergasket.37MPamax pressure at 800°C
OTF-1200X-HP-55 55 mm O.D Max:30°C/min Max:1100°C SplittabletubefurnacewithNibasedsuper-alloytube.Consistsofaluminumheatradiator,highpressurevalves,pressuresensorcontrolledbypressurecontroller,PIDtemperaturecontroller,andcoppergasket.60MPamaxpressureat600°C
OTF-1200X-HVHP-80-SS
80 mm O.D Max:30°C/min Max:900°C Splittable tube furnace with SS alloy tube. Consists of PIDtemperature controler, pressure alarm system, and CF-63flangeswithcoppergasket.1457PSImaxpressureat600°C
OTF-1200X-HVHP-60-SS
60 mm O.D Max:30°C/min Max:900°C Splittable tube furnace with SS alloy tube. Consists of PIDtemperature controler, pressure alarm system, and CF-63flangeswithcoppergasket.1457PSImaxpressureat600°C
OTF-1200X-HVHP-60-GH
60 mm O.D Max:20°C/min Max:1100°C SplittabletubefurnacewithNibasedsuper-alloytube.ConsistsofPIDtemperaturecontroler,pressurealarmsystem,andCF-63flangeswithcoppergasket.1460PSImaxpressureat800°C
OTF-1200X80-HPV-III
85 mm O.D Max:10°C/min Max:1100°C(<1hour)
Cont:1000°C
ThreezoneshighpressuresplittubefurnacewithNibasedsuper-alloytube.Consistsof threePIDtemperaturecontroller,digitalpressuregauge,CFtypeflange,coppergasketandvalves
OTF-1200X80-HPV-III-GF
85 mm O.D Max:10°C/min Max:1100°C(<1hour)
Cont:1000°C
Three zones high pressure split tube furnace with Ni basedsuper-alloy tube.Consistsof threePID temperaturecontroller,digital pressure gauge, CF type flange, copper gasket, watercoolingring,recirculatingwaterchiller,gascontrolsystem,heavydutymobiletable,safetyframe,andlaptopforremotecontrol
GSL-1200X-50-DSL
OTF-1200X80-HPV-IIIOTF-1200X-HP-30A OTF-1200X-HP-55
OTF-1200X80-HPV-III-GF
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ModelWorking Tube Dia.
Heating RateWorking
TemperatureFeatures
VERTICAL TUBE FURNACE
OTF-1200X-S-VT 1”or2”O.D Max:20°C/min Max:1100°CCont:1100°C
ConsistsofSSvacuumflangeswherebyhookringisweldedinsideofthetopflangeforhangingsamples,needlevalves,anddialpressuregauge
OTF-1200X-S-FB 1”or2”O.D Max:20°C/min Max:1100°CCont:1100°C
Consistsofabuilt-infilterrightinthelowermiddlesectionofthecentralheatingzone.Itsfilterisaporous(15~40microns)quartzfritthatallowsthecontrolledgasflowpassthrough.TopSSflangeisdesignedasgasinlet&exhaust
GSL-1100X2-VF 2”O.D Max:20°C/min Max:1100°CCont:1100°C
Threebuttonson thebackof the furnacecanbeadjustedtoflexiblychangethefurnacepositionwithintraveldistance4.5’’(withhangerandsupporter)~12’’(withouthangerandsupporter)
OTF-1200X-80-VT 80 mm O.D Max:20°C/min Max:1200°C(<1hour)Cont:1100°C
One heating zone split vertical tube furnace with vacuumsealedquartztubeinstalledinaheavydutymobilecartforeasymoving. SS top flange isweldedwith hook ring.Dialpressuregaugeisincluded
OTF-1200X-100-VT-II
4” O.D Max:20°C/min Max:1200°C(<1hour)Cont:1100°C
CEcertifiedtwozonessplitverticaltubefurnacewithvacuumsealedquartztube,stainlesssteelflangeswithvacuumgauge,valvesandahookringincluded
OTF-1200X-125-VT 130 mm O.D Max:20°C/min Max:1200°C(<1hour)Cont:1100°C
CEcertifiedsinglezonesplitverticaltubefurnacewithvacuumsealedquartztube,stainlesssteelflangeswithvacuumgauge,valvesandahookringincluded
OTF-1200X-5-VT-III 5” O.D Max:20°C/min Max:1200°CCont:1100°C
CE certified splittable vertical tube furnace, stainless steelflanges,ahookring,pressuregaugeandvalveareinstalledinaheavydutymobileforeasymoving
OTF-1200X-4-VT-V 4” O.D Max:20°C/min Max:1200°C(<1hour)Cont:1100°C
CEcertifiedfivezonessplitverticaltubefurnacewithvacuumsealedquartztube,stainlesssteelflangeswithvacuumgauge,valvesandahookringincluded
GSL-2000X-25 1” O.D Max:10°C/min Max:2000°C(<30min)Cont:1900°C
Ultra-hightemperaturefurnaceconsistsof6”lengthheatingchamber,tungstenwireasheatingelement,fiberouszirconialiner for process chamber and water cooling jacket withsampleholderdrivenbyelecticmotor
GSL-1700X-80VT 80 mm O.D Max:5°C/min Max:1700°C(<1hour)Cont:1600°C
High temperatureverticalalumina tube furnaceconsistsof150mmheating area,MoSi
2 as heating element, vacuum
flanges,dialvacuumgauges,valveandthermalblocksareincluded
GSL-1700X-100VT 4” O.D Max:5°C/min Max:1700°C(<1hour)Cont:1650°C
High temperatureverticalalumina tube furnaceconsistsof200mmheating area,MoSi
2 as heating element, vacuum
flanges,dialvacuumgauges,valveandthermalblocksareincluded
OTF-1200X-S-FBGSL-1100X2-VF
OTF-1200X-80-VT
GSL-2000X-25
OTF-1200X-5-VT-III
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CLOSE SPACE SUBLIMATION FURNACE
Model Features
OTF-1200X-RTP-II •3”roundwaferholderisbuiltinwithtopheatertoloadsubstratewithin11”O.Dquartztube•Heatedbytwogroupofhalogenheaters(TopandBottom)separatelywithmax.20ºC/sheatingrateupto650ºC•Two30segmentprecisiontemperaturecontrollersarebuiltinwith+/-1ºCaccuracy•TopFlangewithoneKFD-25vacuumportandtwogasoutletscanslideupordownmanually•BottomflangehasoneKFD-25vacuumportwithright-anglevalveandtwogasinletswithneedlevalves•Onedigitalvacuumgaugeisinstalledonthetopflange•Twoflowmetersareinstalledwiththerangeof16-160ml/minand400-4000ml/min•Thedistancebetweentwoheatersisadjustablefrom10-50mm•WatercoldjacketismadeofSS316withPTFEfitting•OnehighthermalconductiveAlNplate(3”Diax0.5mmThick)isincluded
OTF-1200X-RTP-II-5 •5”squarewaferholderisbuiltinwithtopheatertoloadsubstratewithin11”O.Dquartztube•Heatedbytwogroupofhalogenheaters(TopandBottom)separatelywithmax.20ºC/sheatingrateupto800ºC•Two30segmentprecisiontemperaturecontrollersarebuiltinwith+/-1ºCaccuracy•TopFlangewithoneKFD-25vacuumportandtwogasoutletscanslideupordownmanually•BottomflangehasoneKFD-25vacuumportwithright-anglevalveandtwogasinletswithneedlevalves•Onedigitalvacuumgaugeisinstalledonthetopflange•Twoflowmetersareinstalledwiththerangeof16-160ml/minand400-4000ml/min•Thedistancebetweentwoheatersisadjustablefrom2-50mmbyDCmotor•WatercoldjacketismadeofSS316withPTFEfitting•OnehighthermalconductiveAlNplate(5”Diax0.5mmThick)andonerecirculatingwaterchillerareincluded
OTF-1200X-RTP-IIVacuum Chamber
OTF-1200X-RTP-II-5
HYDROTHERMAL REACTOR
RC-NI100
•PressurevesselmadeofNi-basedSuper-alloy•Aircoldflangeviaaluminumheatradiator•Precisionhighpressuresensorupto250barinstalledonpressure
vessel• Pressure monitor can display pressure in Bar and the high
pressure alarm set point can be set•Workingtemperatureupto1100ºC•Digitaltemperaturecontrollerwith30segmentsprogrammable•36Mpamaxpressureat500ºC•100mlcapacitywith55mmODx20mmIDx214mmH
RC-TI100
•PressurevesselmadeofhighpurityTitaniummetal•Canreachpressureupto4MPa•Dialpressuregaugeisinstalledtomonitorthepressure•Workingtemperatureupto400ºC•Digitaltemperaturecontrollerwith30segmentsprogrammable•3MPamaxpressureat400ºC•Optional 30 segments programmable temperature controller &miniheaterwithbuiltinthermocouple•100mlcapacitywith55mmODx45mmIDx75mmH•Stainlesssteelneedlevalvewith1/4pipeconnector
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CONVECTION OVEN
ModelChamber Dimension
L x W x HVolume
Working Temperature
Features Power
DHG-9023Q 12”x12”x11“ 25L Max:250°C
28 segments temperature controller and 3”glasswool insulation topreventheat loss fromworkingchamber
500W
EQ-DHG-9070V
18” x 14” x 18” 71 L Max:300°C(<8hour)Cont:250°C
28 segments temperature controller andoverheat protection sensor automatically cutspowerifover-heated
1500W
EQ-DHG-9140V220
21.6”x21.6”x16” 122L Max:300°C(<8hour)Cont:250°C
28 segments temperature controller andoverheat protection sensor automatically cutspowerifover-heated
2300W
EQ-DHG-9440V220
28”x26”x35” 410 L Max:300°C(<8hour)Cont:250°C
28 segments temperature controller andoverheat protection sensor automatically cutspowerifover-heated
3500W
EQ-DHG-9000JB
14” x 14” x 14” 43 L Max:400°C 28 segments temperature controller andoverheat protection sensor automatically cutspowerifover-heated
2200W
EQ-DHG-9000J
14” x 18” x 18” 71 L Max:400°C 28 segments temperature controller andoverheat protection sensor automatically cutspowerifover-heated
3200W
EQ-DHG-9015-220
10” x 10” x 8” 12L Max:250°C Single point digital precision temperaturecontroller with one setting point and +/-1°Ctolerance
750W
DHG-9040 14” x 14” x 14” 30 L Max:250°C 3” glass wool insulation to prevent heat lossfrom working chamber and radiant warm wallheatingsystemprovidesoptimaluniformityandconserveschamberspacefordrying,curing,andplatingapplications
1000W
EQ-HC-27 12”x12”12” 27L Max:250°C Clean room compatible 100 grade ULPA filterincludedanddustparticlemorethan0.5micronwith 30 segments programmable temperaturecontroller
3000W
Convection oven from MTI is a CE CertifiedMechanical Convection Oven with digitaltemperature controller. It can achievedependable,uniformconditionsbyconvectingheat to the sample evenly. Such convectionoven can be widely used for drying, stoving,wax-meltingandsterilization.ItisidealheatingequipmentformaterialR&Dlaboratories.
DHG-9023Q DHG-9040
EQ-DHG-9440V220
EQ-DHG-9015
EQ-DHG-9070V
EQ-HC-27
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VACUUM OVEN
ModelChamber Dimension
L x W x HVolume
Working Temperature
Features Power
EQ-DZF-6020 12”x12”x11” 25L Max:250°C(<4hour)Cont:200°C
28SegmentsTemperatureController 1000W
EQ-DZF-6050 16.3” x 13.5” x 14.5”
53 L Max:250°C(<4hour)Cont:200°C
28SegmentsTemperatureController 1500W
EQ-DZF-6020-FP
12”x12”x11” 25L Max:250°C(<4hour)Cont:200°C
28SegmentsTemperatureController,FlowmeterandVacuumPumpSystem
1000W
EQ-DZF-6020-HT500P
12”x12”x11” 25L Max:500°C
30SegmentsTemperatureController,Flowmeter,ChillerandVacuumPumpSystem
2500W
EQ-DZF-6020-HT400P
12”x12”x11” 25L Max:400°C VacuumOvenWithClose-ableQuartzWindow,GasFlow-meter&WaterChiller
1600W
EQ-DZF-6050-HT
16.3” x 13.5” x 14.5”
53 L Max: 500°C 30SegmentsTemperatureController,Flowmeter,ChillerandVacuumPumpSystem
2200W
EQ-DZF-6090-HT
18” x 18” x 18” 91L Max: 550°C Floor-StandVacuumOvenwith30SegmentsTemperature,TwoheatingZonesandVacuumPump&WaterChiller
2600W
EQ-DZF-6210 22”x25”x24” 215L Max: 270°C Floor-StandLargeVacuumOvenwithVacuumPumpand3DigitalTemperatureControllers
2500W
General Features:•Thechamberisdesignedwithstainlesssteelandweldedwithbracingpieces•Agoodvacuumsealisachievedbysiliconedoorgasketandpositivelatchdoor•Vacuumportandgasinletareinstalledtocreateagasenvironmentinthechamber•PIDtemperaturecontrollerisinstalled
EQ-DZF-6050EQ-DZF-6020-HT500P
SURFACE TREATMENT
EQ-DZF-6210
GSL1100X-PJF
Atmospheric Plasma Jet Flow System (Plasma Pen)
•TwoplasmaBeamheadsareincluded:-roundhead(10-12mm)-rectangularhead(15-18mm)•Handheldorin-lineprocessingatlowcost•OutputfrequencyRFGenerator:20-23kHz,25kV•Highspeedsurfacetreatmentwithsimpleandsafeoperation
GSL1100X-PJF-A
Atmospheric Plasma Beam with Automatic Scanning System
•TwoplasmaBeamheadsareincluded:-roundhead(10-12mm)-rectangularhead(15-18mm)•X-YtwodimensionaredrivenbystepmotorsandcontrolledbySBCcontrollerbox•Zaxisisadjustablebymanual•OutputfrequencyRFGenerator:20-23kHz,25kV•Maxscanningarea:8”x9”•Onevacuumpumpandheavydutymobilecartareincluded
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MELTING SYSTEM
Model Specifications Features
EQ-VMCS-1200-LD
•Workingtemperature:1200°C•Flasksdiametersfrom2.5”-4”andupto9”high•Compactfootprint(18”x18”)
•Heatingiselectronicallycontrolledtominimizetemperatureovershoot,andtoholdtheset-pointtemperature•Fastcycletimesallowre-castinginjust6minutesaftereachpour•Large60mmgraphitecruciblehelpspreventoxideinclusions•Resistanceheatingcoil (long-lifedesign)surroundscrucibleformaximumheattransferandfastmelting•Animmersionthermocoupleplacedinthecenterofthemeltingpoolallowsusertocloselycontrolandmonitorthetemperaturewiththemostaccuratereadings
EQ-FMF-40 •Outputfrequency:50-200kHz•Maxoutputpower:40KW•Coppercrucible:3ml
•Oneheavydutymechanicalpumpwithexhaustfilter,inductionheater,onepairofvacuumsealingflangeswithsiliconeo-rings,andwaterchillerareintegratedintomovablesteelcase•Topflangeishingedtypeforeasysampleloading•Bottomflangecanbecontrolledautomaticallyforeasysampleloading•Watercoolinginsidecoppercrucible•20gmaxloadforferrometaloralloy
EQ-SP-15VIM •Outputfrequency:30-80kHz•Maxoutputpowerupto15kW•Dutycycle:80%•Inductioncoil:70mmO.Dx65
mm ID x 80 mm H
•Idealforsample’smeltingpoint<1900°Candquantity<100g•Completerefractoryassemblingmadeofalumina,includingbottomcruciblesupport,crucibleholderandcover•Automaticwaterpressure,overtemperature,andoverpowerprotection•Vacuumflangeswitho-ring, twovalves,vacuumgauge,halfopenquartztube (60O.Dx57 I.Dx250Lmm),KF25connector,SSbellow,vacuumpump,andrecirculatingwaterchilleraremountedontomobilecart
EQ-SP-25VIM •Outputfrequency:30-80kHz•Maxoutputpowerupto25kW•Dutycycle:80%•Inductioncoil:95mmO.Dx85
mm ID x 50 mm H
•Idealforsample’smeltingpoint<2000°Candquantity<500g•Completerefractoryassemblingmadeofalumina,includingbottomcruciblesupport,crucibleholderandcover•Automaticwaterpressure,overtemperature,andoverpowerprotection•Vacuumflangeswitho-ring, twovalves,vacuumgauge,halfopenquartztube (80O.Dx75 I.Dx300Lmm),KF25connector,SSbellow,vacuumpump,andrecirculatingwaterchilleraremountedontomobilecart
EQ-SP-15TC •Outputfrequency:30-80kHz•Maxoutputpowerupto15kW•Dutycycle:80%•Inductioncoil:90mmO.Dx82mmIDx90mmH
•Idealforsample’smeltingpoint<1700°C•PIDtemperaturecontroller,highpuritygraphitecruciblewithdouble layerrefractory liner,SShingedtypeflangewithfeedthroughandvacuumport,twoendopenquartztube(80O.Dx76I.Dx355Lmm),KF25rightanglevalve, clamps, SS bellow, anti-corrosive Pirani gauge, recirculating waterchiller,andvacuumpumpareincluded
EQ-SP-25TC •Outputfrequency:30-80kHz•Maxoutputpowerupto25kW•Dutycycle:80%•Inductioncoil:120mmO.Dx110mmIDx90mmH
•Idealforsample’smeltingpoint<1700°C•PIDtemperaturecontroller,highpuritygraphitecruciblewithdouble layerrefractory liner,SShingedtypeflangewithfeedthroughandvacuumport,twoendopenquartztube(100O.Dx92I.Dx355Lmm),KF25rightanglevalve, clamps, SS bellow, anti-corrosive Pirani gauge, recirculating waterchiller,andvacuumpumpareincluded
EQ-VMCS-1200-LD
EQ-FMF-40
EQ-SP-15VIM
EQ-SP-25TC
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Model Specifications Features
EQ-SPG-6-VMS •Outputfrequency:0.6-1.1MHzadjustable•Maxoutputpowerupto6kW•Inputcurrent:5-30A
•Multi-turnhelicalconicalheatingcoilisusedtobalancethethree-dimensional force•Canlevitateelectricallyconductivematerialupto10g•Singleendopenedquartztube:25mm(OD)x22mm(ID)x180mm(L)•Consistsofvacuumsealingflangeswithsiliconeo-ring,1/4”barbedhosefitting,KF25vacuumport,dialpressuregauge,andtwoneedlevalves•Inductionheater,waterchillerandvacuumpumpareintegratedonaheavydutymobilesteelcart•Motor-drivenmanipulatorprovidesrigidsupportandeasyheightadjustment
EQ-SPG-6A-I •Outputfrequency:100-500kHz•Maxoutputpowerupto6kW•Dutycycle:100%
•Tomeltandperformheattreatinglessthan100g•Automatictimercontrolormanualcontrolselectable•Overpressureandovertemperatureswitch•Usingrearfanforaircooling•Inductioncoilconsistsof20mmO.Dx45mmHisincluded
EQ-SPG-6A-III •Outputfrequency:600-1100kHz•Maxoutputpowerupto6kW•Dutycycle:100%
•Tomeltandperformheattreatinglessthan100g•Automatictimercontrolormanualcontrolselectable•Overpressureandovertemperatureswitch•Usingrearfanforaircooling•Inductioncoilconsistsof20mmO.Dx45mmHisincluded
EQ-SPG-10A-I •Outputfrequency:200-500kHz•Maxoutputpowerupto10kW•Dutycycle:100%
•Tomeltandperformheattreatinglessthan100g•Automatictimercontrolormanualcontrolselectable•Overpressureandovertemperatureswitch•Usingrearfanforaircooling•Inductioncoilconsistsof20mmO.Dx45mmHisincluded
EQ-SP-15AB •Outputfrequency:30-80kHz•Maxoutputpowerupto15kW•Heatingcurrent:200-600A•Dutycycle:80%
•Tomeltandperformheattreatingupto1kg•Overpressureandovertemperatureswitch•Automatictimercontrolormanualcontrolselectable•Overpressureandovertemperatureswitch•Digitaldisplayshowsoutputpowerandcurrent•Oneportisbuiltintoconnecttemperaturecontrollerandthermocouple•Threecoilswithdifferentouterdiameterwithfootpedalandwater
connector are included
EQ-SP-25A •Outputfrequency:30-80kHz•Maxoutputpowerupto25kW•Heatingcurrent:200-1000A•Dutycycle:80%
•Tomeltandperformheattreatingupto2kg•Overpressureandovertemperatureswitch•Automatictimercontrolormanualcontrolselectable•Overpressureandovertemperatureswitch•Digitaldisplayshowsoutputpowerandcurrent•Oneportisbuiltintoconnecttemperaturecontrollerandthermocouple•Threecoilswithdifferentouterdiameterwithfootpedalandwaterconnector
are included
EQ-SPG-6-VMS
EQ-SPG-6A-IIIEQ-SP-25VIM
EQ-SP-15AB
EQ-SP-25A
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HOT PLATES
EQ-SH-3 EQ-SP-131320Q-230V-LD EQ-HP-3040 EQ-HP-1515
•Flattopandhigh-wattageheatingelementsmaxworkingtemperature300°C•Integralring-standholderaccommodates0.5”(1.3cm)diameter support rod•Accommodatessamplevolume:1000ml•Adjustablespeedrangefrom
50 to 1600 rpm
•Easy-to-readdigitaldisplayindicates temperature settings,adjustablein5°Cincrements,from5°Cupto540°C•Adjustablespeedrangefrom50to1200rpm•StirTractechnologyoffersimprovedslowspeedstirringand consistent speed control
•ICdigitaltemperaturecontrolfrom35°C-280°Cwith+/-1°C accuracy•Extraflatsurfaceandidealforflatsubstratewaxmountingduringpolishing•Excellentforheatingandmountingbrittlecrystalmaterialsat uniform temperature•Heatingarea:373x273mm
•Maxtemperature:500°Cwithaccuracy+/-1°C•Extraflatsurfaceandidealforflatsubstratewaxmountingduringpolishing•SSsurfacewhichprovidesuniformheatdistributionandresists spills and corrosion•Heatingarea:150x150mm
TEMPERATURE CONTROL UNIT
Model Features
EQ-MTC-808
•PIDtemperaturecontrollerwithprecisecontrolofheatingrate,coolingrate,anddwelltime•Thermocoupleaccepted:K,J,S,B,andCtype•Overtemperatureprotectionandalarmallowsforoperationwithoutattendant(s)•Powercable,6pinconnectortoSP-25A/SP-15ABInductionHeater,andpinconnectortothermocouple
EQ-MTC-C4
•Maxpowerconsumptionupto5000W•Thermocoupleaccepted:J,K,T,E,N,B,RandStype•Overalldimension:295x190x90mm•Designedforprecisioncontrolofhightemperaturefurnacefrom500-1800°CwithheatingelementsofresistantwireorSiC•PIDviaSCRpowercontrolwith30segmentsprogrammable
EQ-MTC-A5
•Maxpowerconsumptionupto5000Wforsinglezoneprecision•Thermocoupleaccepted:K,S,R,J,B,C(W/Re-5/26)andD(W/Re-3/25)type•Overalldimension:533Lx431Wx165Hmm•Designedforprecisioncontrolofhightemperaturefurnacefrom1000-1500°CwithheatingelementsofresistantwireorSiC•PIDviaSCRpowercontrolwith30segmentsprogrammable
EQ-MTC-Z3
•Maxpowerconsumptionupto9000Wforthreezoneprecision•Thermocoupleaccepted:K,S,R,J,B,C(W/Re-5/26)andD(W/Re-3/25)type•OverallDimension:462Lx434Wx200Hmm•Compatiblewithfollowing3zonetubefurnaces:-MTIOTF-1200XSeriesTubeFurnace-ThermoFisherScientificLindberg/BlueMThree-Zone1200°CTubeFurnaces-Thermcraft1200°CThreeZoneTubeFurnace•PIDviaSCRpowercontrolwith30segmentsprogrammable
EQ-MTM-3•Threechannelstemperaturemonitoringsystemwithtemperaturealarmsystem•UsingBT119controller•Thermocoupleaccepted:K,S,andBtype
EQ-MTC-C4
EQ-MTC-A5
EQ-MTC-Z3
EQ-MTM-3
EQ-MTC-808
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HOT PRESS
EQ-HP-88V
EQ-HP-6T
EQ-HP-100
EQ-HC-1
VHP-5T-4
VHP-5T-4
Model Specifications Features
EQ-HP-88V •Maxworkingpressureupto250kN•200°Ccontinuouswithwatercooling•Maxtraveldistanceis140mm•Platenareais200mmx200
mm
•Consistsofamanualhydraulicpressoilpumpandtwoheatedplatens•Watercoolingjacketsareinstalledwithheatingplate•Thetemperatureofheatedplatensarecontrolledbytwodigitaltemperature
controllers•Pressuregaugeismountedtomonitorthepressureappliedontheplatens•PlatensmadeofheadensteelwithCrplatedandsurfaceflatingwithCNCgrinding
EQ-DIE12-HC •Workingtemperaturerange:50-250ºC
•1/2’’diameterheat-ablepressingdiewithdigitaltemperaturecontroller•HighstrengthtoolsteeldiematerialwithhardnessmorethanRC60•Dieoutsidediameter:73mm
EQ-HC-1
•Workingtemperaturerange:50-250ºC
•3’’diameterheatingjacketwithdigitaltemperaturecontrollerandPT100thermocouple•50mmheatingjacketwidth•Jacketholdingdiameter:3”
EQ-HC-2
•Workingtemperaturerange:50-250ºC
•5’’diameterheatingjacketwithdigitaltemperaturecontrollerandPT100thermocouple•50mmheatingjacketwidth•Jacketholdingdiameter:4.5”
EQ -HP-6T
•Maxworkingtemperatureupto1100ºC•Maxworkingpressureupto6T•Maxtraveldistanceis25mm•Platenareais50mmx50mm
•Integratedwithsplitverticaltubefurnacewithavacuum-sealed2”quartztubeand12Tmanualhydraulicpress•Digitalpressuregaugewithmaxpressuresettingandalarm•TemperaturecontrolunitisseparatedfromthemainframewithautotunePIDandoverheatprotection
VHP-5T-4
•Maxworkingtemperatureupto500ºC•Maxworkingpressureupto6T•Maxtraveldistanceis15mm•Platenareais150mmx150
mm
•Modified20Telectrichydraulicpressisconnectedtovacuumchamber•1000WHeatingtubeisinsertedintothecenteroftheheatingareaforfastheating•Two150mmx150mmflatheatingplatesmadeofhightemperatureCrsteel•Twoprecisiontemperaturecontrollerscontroltheheatingplatesseparatelywithmaxpressurecontrolledbydigitalpressuregauge•Onerecirculatingwaterchillerisincluded•Vacuumsealed150mmdiameterglasswindowisinstalledonthefrontdoor
OTF-1200X-VHP4
•Maxworkingtemperatureupto1100ºC•Maxworkingpressureupto6T•Maxtraveldistanceis15mm•Cylindersize:25mm
•Integratedwithsplitverticaltubefurnacewithavacuum-sealed4”quartztubeand20Telectrichydraulicpress•WatercooledflangesareinstalledontwoendswithKF25vacuumport&pressuregaugeaswellas1/4”gasinletportwithSSneedlevalve•Couldachieve10E^-5torrbacuumlevelbymolecularpump•Twographitepushingrodsarebuilinwithonesetof0.5”I.Dgraphitedie
are included•Automatedmaxpressurecontroller
EQ-HP-100
•Maxworkingtemperatureupto450ºC•Maxworkingpressureupto24T•Maxtraveldistanceis50mm•Platenareais90mmx90mm
•Consistsof24Tmanualhydraulicpresswithtwoheatedplatens•MaterialofheatedplatenareaisCr12MoValloywithsurfaceflatingwithCNCgrinding•Twowatercoolingjacketarebuiltonbackoftopandbottomheatingplateseparately•Heatedplatensarecontrolledbyseparatedtwodigitaltemperaturecontroller
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HYDRAULIC PRESS
CIP-15 CIP-20TA CIP-50A
MiniatureCIPwithProtectionCover ElectricCIPwithProtectionCover ElectricCIPMachine
•22mmIDx90mmhydraulicchambermadebyultrastrengthalloy•Hydraulicpressureupto15metrictone•Operatingtemperaturebetween10-
40°C•Maxpressureupto300MPa
•30mmIDx100mmhydraulicchambermadebyultrastrengthalloy•Hydraulicpressureupto20metrictone•Operatingtemperaturebetween10-
40°C•Maxpressureupto278MPa
•Operatedmanuallywith50mmIDx150mmHchamber•Hydrauliccylinderpressureupto50
metric tone•Chamberpressurerangein0-250MPa•1MPaper5minutespressurestability
Model Max Pressure Features
EQ-YLJ-12T 12T•Builtinhydraulicpumpwithautoreturnfunctionandtransparentprotectioncover•16.5”lengthofpressrockerwithnetweightof30kg•Maxliftingheightofbottomcylinderis25mm
EQ-YLJ-20TA 20T
•Builtinhydraulicpumpwithautoreturnfunctionandtransparentprotectioncover•Pressuregaugewithadjustablepressurelimitswitch•0-100secondstimersetting•Bottomhidrauliccylindertraveldistancerangesin0-20mm•Netweightof64kg
EQ-YLJ-24T 24T•Builtinhydraulicpumpwithautoreturnfunctionandtransparentprotectionshield•Netweightof34kg•Maxliftingheightofbottomcylinderis25mm
EQ-YLJ-20TA-H 20T•Builtinelectrichydraulicpumpwithautomaticpressurelimitswitchandwarningtimer•Pressuregaugewithbuiltinpre-stablepressureswitchandtimer•Pressureloadwillstopwhenpressurereachpre-settingpoint
EQ-YLJ-40TA 40T
•Builtinelectrichydraulicpumpwithautomaticpressurelimitswitchandwarningtimer•Pressuregaugewithbuiltinpre-stablepressureswitch•Pressureloadwillstopwhenpressurereachpre-settiingpoint•Bottomhydrauliccylindertraveldistancerangesin0-25mm•Netweightof55kg
EQ-YLJ-60TA 60T•Builtinhydraulicpumpwhichisdrivenbyelectricoilpumpwithlargepressuregauge•Bottomhidrauliccylindertraveldistancerangesin0-50mm•Netweightof209kg
EQ-YLJ-100G 100T•Builtinmanualoperatedhydraulicpumpwithautoreturn,whichisdesignformaterials/chemistryresearchlaboratoriestopreparelargersamples/targetsofcompoundceramics•180mmdiameterofpiston
EQ-YLJ-20TA-H EQ-YLJ-24TEQ-YLJ-12T EQ-YLJ-60TAEQ-YLJ-100G
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ROLLING PRESS
Model Features
MSK-HRP-MR100A •Power:Drivenby0.5HPhightorquegearACMotor•Constantrollingspeed:65mm/second•Dualmicrometerforaccuratethicknessadjustmentintherange0-1.8mmmaximum.•Dimensionrollers:100mmDia.x100mmW
MSK-HRP-MR100B •DualrollersmadefromhardenedtoolsteelwithCrelectroplatedcoating•Dualmicrometerforaccuratethicknessadjustmentintherange0-1.8mmmaximum•CeramiccoatedonhardenedtoolsteelwithHRC>72•Highresistancetocorrosion,acidandalkalinity,andreducingmetalliccontamination•Powerdrivenby0.5HPhightorquegearACmotor•Constantrollingspeed:65mm/second
MSK-HRP-01 •Max.heatingtemperature:125°C(<1hour)•Constantrollingspeed:0-40mm/secadjustable•Calenderingthickness:0-1.2mmadjustable•Dimensionrollers:100mmDia.x100mmW•Dialgaugeaccuracy:0.01mm
MSK-HRP-03 •Max.heatingtemperature:80°C•Max.powerconsumption:2000W•Constantrollingspeed:0-40mm/secadjustable•Rollersize:8”Dx10”WmadefromhighqualitytoolsteelwithCrplated•Pressingthickness:0-2mmadjustable•Surfacehardnessofrollers:HRC60-62
MSK-2150 •Powerofmotor:120W•Constantrollingspeed:35mm/second•Dualmicrometerforaccuratethicknessadjustmentintherange0-1.5mm•Dimensionrollers:94mmDia.x150mmW
MSK-E2300A •Rollerdimension:200Dx330Wmm•Material:HRC60-62•Effectiverollingwidth:<250mm•Pressuregap:0.05-1mmadjustablebydualmicrometerknobs•PressPlaneness+/-0.0025mm•Pressureload:2-20Tadjustablebydigitalcontrol•DigitalpressuregaugewithRS-232PCporttoshowandrecordpressurechange•Rollingspeed:0-3.5m/minadjustablebydigitalcontroller
MSK-E2300B •Rollerdimension:200Dx330Wmm•Material:HRC60-62•Effectiverollingwidth:<250mm•Pressuregap:0.05-1mmadjustablebydualmicrometerknobs•PressPlaneness+/-0.0025mm•Pressureload:2-20Tadjustablebydigitalcontrol•DigitalpressuregaugewithRS-232PCporttoshowandrecordpressurechange•Rollingspeed:1-6m/minadjustablebytouchscreencontrolpanel
MSK-MR-500-ROLL •Rollersize:2.5”Dx5”Wmadefromhardenedtoolsteel•Overalldimension:225mmLx530mmWx425mmH•Madefromheavydutysteelframe,gearsandhandle•Rollingthicknessisadjustablefrom0.1-1.5mm•Minthickness:0.1mm
MSK-HRP-MR100A
MSK-HRP-MR100A MSK-2150
MSK-E2300B
MSK-MR-500-ROLL
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LABORATORY MILL/MIXER
Model Speed (rpm) Features
MSK-SFM-1 Mainplate:30 -350Mixingtank:0 - 300
•Granularitycanbeassmallas0.1micron•Timercontrolsmajorplaten’srunningtimefrom1-999min•Timercontroltankrotationtimefromclockwisetoanticlockwisedirectionfrom1-99min•4500mlaluminajarswithvarioussizeofYSZmillballsareincluded
MSK-SFM-2 Mainplate:0 -100Mixingtank:0 - 300
•Granularitycanbeassmallerthan0.5micron•Threedimensionsrotation:majorplaten,individualtankandup-downgravity•Digitaldisplaythespeedoftankrotationinrpm•Runningtimecanbesetfrom1-999min•Theratioofmaincyclespeedandtankrotationspeed:1:3•Foursetsofagatemillingballsincluded(96ballsintotal)instandardpackagewithvarioussizes
MSK-SFM-3 1200 •Granularitycanbeassmallas0.1micron•Canbeusedineitherdryorwetmethodtomillmaterialsandmixallkindsofsolids,suspendedliquids,andpasteswithdifferentsizesandmaterials•Timingrangefrom0-120min•One50mlaluminajarwithonesetZirconiamillballsareincluded
MSK-SFM-5 0-1200 •Granularitycanbeassmallas1micron•5literstainlesssteelcontainerwithwatercoolingjacket•Programmablecontrollertosettime,speedandrotationdirection
MSK-SFM-6E RotorRod:0 - 1400CleanBlade:10 - 110
•AdvancedTtypesealingtokeepvacuumpressureupto12hours•5liter304stainlesssteelcontainerwithdoublelayerwatercoolingjacket•Multi-layerblendingbladehasvariablespeedfrom0-2800rpm•Arotatingbladeclosetocontainerwalltokeepcontainerconstantlycleaningduringmixing
MSK-SFM-7 320 •Builtinvacuumpumpwith-0.08-0.09MPa•Thevibrationplateislocatedatthebottomtoremovegasbubblebeforevacuummixinganddispersetheslurryaftermixing•Vibrationplatefrequencyat1kHz•One150mlstainlesssteelandone100mlaluminumcontainerareincluded
MSK-SFM-8 Mortar:0 -10Pestle:0 - 80
•Granularitycanbeassmallasnanometers•5”agatemortarandagateheadpestle•Grindingpressureisadjustedbyspring•Grindingtimecanbesetaccordingtousingtheautomatedcontroller•Themortarcanbetakenoffeasilyforcleaning.
MSK-SFM-9 Stirring:0-112Dispersing:0 - 6100
•5Litertri-shaftplanetaryvacuummixerwithvacuumpumpandPLCtouchpanelcontrol•Onedigitaltemperaturecontrolledrecirculatingwaterchillerincluded•Vacuumpumpbuiltin•Watercoolingjacketwithtemperaturemonitorandover-temperaturealarminstalled
MSK-SFM-11 20-90 •V-shapedmixingtankforseparatingandcombiningpowdergranules(madeofSS304)•Digitaldisplayandsimplecontrolinterfaceprovideseasyprogrammingofmixingoperations•TimerSettingRange1-900min•Mixingtankcapacity:2.5L
MSK-SFM-8
MSK-SFM-3MSK-SFM-2
MSK-SFM-12M
MSK-SFM-1
MSK-SFM-7
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Model Speed (rpm) Features
MSK-SFM-10M
Stirring:0-112rpmDispersing:0 - 3800 rpm
•2Litermulti-movementduringstiring,including,revolutionandrotation,doublestirringshaft,singlescatteredshaft&scrapingthewallstomakeslurrygas-bubblefreeandextremeuniformunder vacuum•Onedigitaltemperaturecontrolledrecirculatingwaterchillerincluded
MSK-SFM-12M
2700-4000 •Simultaneoushomogenizationofupto3samplesat2mltubetakesplace(oftenwithin45seconds)insidethedisposable2mlscrewcapmicrotubes•Timercanbesetwithin3secto3min•ThreetypesofPureHighImpactZirconiaBeadsareincludedforrapidmilling•6PrefilledTubeKitsand4emptytubekits(non-skirtedwithcaps)
MSK-SFM-ALO 500 •Compactelectricjawcrusherwithadjustabledigitalcrushingsizecontroller•Inputsize:5-20mmdiameter/thickness•Twohighpurityaluminaplateswhicheasytoberemovedforcleaning
MSK-SFM-14 60 - 600 •Maxdrivingloadis25kg•Canacceptmilltankwithmaxdiameterof250mmandmaxlengthof175mm•Runningtimecanbesetupfrom1-9999minutes
MSK-FT01 3l/m(PumpFlowRate)
•SlurryfiltrationsystemisdesignedforlaboratoryusewithSS304slurrycontainer•Toremoveparticlesizeswithdiametermorethan24micrometer•Absolutevacuumlevelof65kPa
MSK-FT02 8000 - 1000 GC(De-ironingfunction)
•De-ironingfiltrationsystemdesignedforoptimizingtheconditionofslurrybeforethecoatingprocess•StructuremadeofSS304withcapacity5liters•Optionalfilterfrom80-120meshuponrequest
MSK-VUSP-12 1200W(UltrasonicOutputPower)
•Theultrasonicprocessingrodismadeofhighpurityaluminatoavoidmetaliccontamination•AnidealtoolforpreparingnewgenerationofLEDphosphor,Li-ionbatteryslurryandqualitythinfilmbysol-gelmethod•Processorheadismadefromaluminaceramicwith12mmdiameter•Liquidhandling:100ml-2000ml•Adjustabledigitaltimerfrom1secto99hourwithtemperaturecontrolbuiltin
MSK-USP-12N 1200W(UltrasonicOutputPower)
•Onesound-proofboxisincludedtoputultrasonicprocessorintothechamber•Designedfordispersingnano-powderinliquid,homogenizingliquidphasefromco-precipitationandmixingmulti-chemicalinonesolution•ProcessorheadismadefromTimetalwith12mmdiameter•Liquidhandling:100ml-2000ml•Adjustabledigitaltimerfrom1secto99hourwithtemperaturecontrolbuiltin
MSK-USP-3N 300W(UltrasonicOutputPower)
•Onesound-proofboxisincludedtoputultrasonicprocessorintothechamber•Designedfordispersesnano-powderinliquidwithsmallerquantity,homogenizeliquidphasefromco-precipitationandmixmulti-chemicalinonesolution•ProcessorheadismadefromTimetalwith8mmdiameter•Liquidhandling:100ml-2000ml•Adjustabledigitaltimerfrom1secto99hourwithtemperaturecontrolbuiltin
MSK-SFM-6E
MSK-SFM-10M
MSK-USP-3N
MSK-VUSP-12
MSK-FT01
MSK-SFM-14
MSK-SFM-ALO
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POLISHING MACHINE
EQ-UNIPOL-800-LD
MTI’s polishing machine can be used as a high precision lapping machine for polishing crystal components,semiconductorwafers and ceramic substrates.They also can be adopted as a standard grinding and polishingmachineforpreparingmetallographicsamples.
EQ-UNIPOL-802 EQ-UNIPOL-810EQ-UNIPOL-820
EQ-PF-2-1
2”PolishingFixtureforPrecision/AutomaticThinningandPolishing
• 2” sample holder to take wafer orsubstrateupto2”• Thickness control screw fixture with
resolution of 0.005 mm • Two micrometers are included withresolutionof+/-1micron•CanfitwithUnipol801,Unipol802andany precision 8” polishing machinewithYorksupport
EQ-PF-4-1V
4”PolishingFixturewithVacuumChuckforFasterThinningandPolishing
• 4” sample holder vacuum chuck totakewaferorsubstrateupto4”•Vacuumchuckcansuckwaferthroughvacuumpumpwithoutwax•Onedigitalmicrometerisincludedwithresolutionof+/-1micron• Can fit with Unipol 1202 and Unipol1502andanyprecision12”or largerpolishingmachinewithYorksupport
Assembly Assembly
Model Speed Description
EQ-UNIPOL-300 0 - 160 rpm• One rubberpolishingbowlwithone3”glasslappingplates,two1”dia.sampleholdersare
included• Adjustablespeedandtimewithanalogcontrol
EQ-UNIPOL-800-LD 500 - 3000 rpm• Coolant reservoir (top black) with valve and drain container (bottom black) are included for
operating the machine anywhere• Adjustablespeedandtimewithanalogcontrol
EQ-UNIPOL-1210 50 - 600 rpm• 12” Aluminum mater plate with magnetic pad and steel buffer sheet to make replace
diamond plate and sand paper at easy• Digital control panel with touch button operation and water resistance
EQ-UNIPOL-820 0 -600 rpm
• Heavy duty grinding / polishing machine with two 8” lapping plates and independent speed control
• Upgraded magnetic plates were installed in the machine, which makes installing sand paper/polishing pad quickly and easily
EQ-UNIPOL-810 80 - 600 rpm• Automatic slurry feeder can realize automatic dropping grinding lubricant• Desk top installation, stepless speed adjustable, digital display rotary speed, convenient to
operate
EQ-UNIPOL-802 0-125rpm• Equipped with 8” super flat lapping plate and can be used as a high precision lapping
machine for polishing crystal components, semiconductor wafers, and ceramic substrates up to 3” in diameter
EQ-UNIPOL-1000S 20-350rpm• Adjustable pressing force for different polishing conditions and materials• Multiple sample polishing if sample size less than 50mm in diameter with adjustable speed
EQ-UNIPOL-1202 0-125rpm
• Two super flat lapping plate with flatness < 0.25 micron/inch2. One cast iron plate for lapping and one cast aluminum plate for polishing
• Two rocking work stations with wafer holders and condition rings, which can be controlled independently for polishing 2 pcs of 4” wafers in same time
EQ-UNIPOL-160D 0 - 1500 rpm• Can lap and polish 4 pieces of maximum 2” wafers in double sides at same time, and
achieves TTV less of one micron in 2” diameter area• Adjustablespeedanalogcontrol
EQ-UNIPOL-1502 0 - 80 rpm• Three rocking work stations with wafer holders and condition rings• Can be controlled independently for polishing 3 pcs of 4” wafers or 9 pieces of 2” wafers
in one running
EQ-UNIPOL-1000SEQ-UNIPOL-160D
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CUTTING AND DICING SAWS
Model Speed Description
SYJ-30 Upto2800rpm• Two 10” OD x 1.25” ( I.D) x 2 mm (Thick) SiC cutting blade included• Maximum cutting section: 30 mm x 30 mm
EQ-MT-5-LD Up to 7800 rpm• One 2” diameter high speed steel blade for cutting metallic sample and two SiC blade
for cutting non-ferrous metal and ceramic sample
SYJ-40-LD 400-3250rpm • 4 pieces cutting blade with the diameter of 4”
SYJ-150 0 - 600 rpm• Three 4” blades (SiC, Al
2O
3 and full sintered diamond type) are included for cutting
various materials• Adjustable speed with LED display
SYJ-160 0 - 600 rpm• Three 6” cutting blades (edge sintered diamond, SiC and Al
2O
3) are included for cutting
various materials• Water-proof LCD digital micrometer with reading of 0.001 mm and accuracy of 0.003 mm
SYJ-200 300 - 3500 rpm• Three 8” cutting blades (Sintered diamond, SiC and aluminum) are included for cutting
various materials• Re-circulating coolant system with adjustable nozzles
SYJ-400 Up to 3000 rpm• One 4” dia x 0.35 mm thick fully sintered diamond blade with two pairs of flanges of 62
mm dia. ( for dicing ) and 42 mm dia. (for deep cutting)
SYJ-800 Up to 3000 rpm• Two 4” cutting blades (Fully sintered diamond and edge sintered diamond) are included
for cutting various materials• Adjustable speed with digital controller
SYJ-30EQ-MT-5-LD
SYJ-160-LD
SYJ-800
SYJ-200
Model Wire Travelling Speed Description
STX-201 0-5mm/sec• Traveling position accuracy +/- 0.003 mm (3 microns) with a 2” Digital micrometer head• Stage traveling distance: Maximum 2” with 360° horizontal rotating and 30° tilt stage included
STX-202A 0-1.5m/sec• Stage traveling distance Y axis: 50 mm, Z axis: 60 mm, 360° horizontal rotating, and +/-10° tilting• Traveling position accuracy: +/- 0.01 mm
STX-402 0-2m/sec• 6” digital control panel with LCD touch screen to control moving speed of diamond wire, feeding
speed of sample stage, slicing thickness and diameter• Maximum cutting sample: 110 mm x 110 mm
STX-603 0-2m/sec• Z and Y axis maximum traveling distance: 160mm (±0.01mm accuracy)• 1 - 35mm/min adjustable cutting speed
STX-1202 0-4m/sec• 6” digital control panel with LCD touch screen to control moving speed of diamond wire, feeding
speed of sample stage, the slicing thickness and coolant pump operation• Maximum cutting dimensions: Ø 300 mm × 300 mm
STX-2401 0-4m/sec• 6” digital control panel with LCD touch screen to control moving speed of diamond wire, feeding
speed of sample stage, the slicing thickness and coolant pump operation• Maximum cutting dimensions: Ø 600 mm × 600 mm
STX-201STX-202
STX-402
STX-603
STX-1202
STX-2401
DIAMOND WIRE SAWS
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DISC CUTTERSMSK-T-06
MSK-T-07MSK-T-50
MSK-T-10
PLASMA SPUTTERING COATER
Model Description
GSL-1100X-SPC12-LD•Designedformakingmetalliccoatings,suchasgold,platinum,Indiumandsilveretcwhichcanbeappliedonasampleupto40mmdiameterwith300Angstromthickness•Maximumsampleof1.5”withgoldsputteringtargetandvacuumpump
GSL-1100X-SPC12H-LD
•Heatable plasma sputtering coater and designed formakingmetallic coatings, such as gold, platinum,Indiumandsilveretc,onasampleupto40mmdiameterwith300Angstromthickness•Builtin60mmdiametersubstrateheaterupto600°C
GSL-1100X-SPC-16-M-LD
•Singletargetcompactmagnetronplasmasputteringcoaterwithdoublesteprotaryvanevacuumpump•OnemagnetronwithPeltiercoolingdeviceisinstalledontopofmachine,whichwillprovidestrongsputteringenergyandproducebetterandfastercoatingformetallictarget,suchasAl.Zinc,andMgetc
GSL-1100X-SPC-15E-LD
•Compactevaporatingcoaterwithdoublesteprotaryvanevacuumpump,whichissuitableforcoatinglightmetal,Al.Mg,andLiaswellascarbonfilmtosampleupto2”wafer•45mmdiameterofmaxcoatingarea
VTC-16-3HD•Threerotarytargetplasmasputteringcoaterwith2”substrateheaterupto500°Candtouchscreendigital
controller•Cancoat1-3typeofmetallicmaterialtoonesampleupto50mmdiameter
VTC-600-2HD
•DualtargetpositionmagneticsputteringsystemwhichisRF/DCconvertiblesource• Equipped with film thickness tracker for user easily addressing coating progress and handling datarecording•Targetsize:2”dia.x0.5-1mmthicknesswithinupto20rpmrotation
GSL-1800X-SBC2•Integratesthermalevaporation,carboncoatingandplasmasputteringcoatingintoonemachine•Highspeedturbomolecularvacuumpumpareinstalledbottomofthecoater
VTC-2D•Acompact2“singleheadDCPlasmamagnetronsputteringsystemcoatingnon-metallic.Itintegratesallcomponentsintoonefloorstandcabinet,includingDC300powersource,quartzvacuumchamber,vacuumpump,recirculatingwaterchillerandfilmthicknessmonitoretc
VTC-2RF•Acompact2“singleheadRFPlasmamagnetronsputteringsystemcoatingnon-metallic.It integratesallcomponentsintoonefloorstandcabinet,includingRF300powersource,quartzvacuumchamber,vacuumpump,recirculatingwaterchillerandfilmthicknessmonitoretc
VTC-600-2HDGSL-1100X-SPC-16-M-LD
GSL-1800X-SBC2
VTC-16-3HD
MSK-T-09
ModelMax Cutting Thickness
Description
MSK-T-06 0.2mmPrecisiondisccutterwithstandard15,19,20&24mmandoptionalsizesof10,12,12.7(1/2’’),16,18mmavailablediametercuttingdie
MSK-T-07 0.5 mm Compactprecisiondisccutterwithstandard15,19,20&24mmdiametercuttingdie
MSK-T-09 1.29mm RoundDiscandRingCutterSetforMetallicSheetupto1.29mmThick
MSK-T50 0.5 mm Portable precision disc cutter for 48.5 mm round disc
MSK-T-10 0.5 mmCompact&precisiondisccutterwithstandard16,19,20(optionalsizesof3-24mmavailable)diametercuttingdie
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DIP COATER
Model Specifications Features
PTL-MMO1•Dippingspeedwithin1-200mm/minadjustable•Dippingtravellingwithin0-200mmadjustable•Maxsamplesizewithin50Lx25Wx2.5Hmm
Twoscrewsampleclipsandone150mlbeakerareincluded
PTL-MMO2•Dippingspeedwithin1-200mm/minadjustable•Dippingtravellingwithin0-75mmadjustable•Maxsamplesizewithin50Lx25Wx2.5Tmm
Programmable dip coater with color touch screencontrol. Two screw sample clips and one 150 mlbeakerareincluded
PTL-200
•Dippingspeedwithin1-200mm/minadjustable•Strokelengthmaxis300mm•Maxsamplesizewithin10”Lx12”Wx15mmT
Theballscrewpullingsystemand6”x4”ColorPLCcontrollerofferssmooth,vibration-freetravelinbothdirections.Pulling rate, immersion rate,dwell time,andcyclingtimearefullyprogrammable
PTL-SC-6•Dippingspeedwithin2-9000micron/secadjustable•Strokelengthmaxis75mm•Upto999dips
Has 6 positions sample holder for programmable.Thedippingspeed,dipduration,retrievalspeedanddrydurationcanbesetforeachbeaker
PTL-SC-6S-LD
•Dippingspeedwithin2-9000micron/secadjustable•Strokelengthmaxis75mm•Upto999dips•Workingtemperatureisupto350°Cfromambient
Hasamotorizedsubstrateholder.Thedippingspeed,dipduration,retrievalspeedanddrydurationcanbeset for each beaker. Each hot plate can be set atdifferent temperatures.
PTL-HT-2-LD
•Dippingspeedwithin2-9000micron/secadjustable•Strokelengthmaxis150mm•Upto999dips•Workingtemperatureisupto200°Cfromambient
MovementsachievedbyprecisionservomotorthatoffersvibrationandnoisefreewithdualmodeeithermanualorPCmode. Infraredheater is incoporatedwithittomanipulatetemperature
PTL-MMO2-8P
•Dippingspeedwithin1-200mm/minadjustable•Strokelengthmaxis65mm•Horizontalmovingspeed:50-500mm/minadjustable
Amultipositionprecisiondipcoater,whcihcancoat5pcssampleinonerowateachtime,anddipeachrowofsampleupto8positionasprogramtoachievemulti-samplecoatingupto40pcsateachtime
PTL-MMO1 PTL-200 PTL-SC-6S-LD PTL-HT-2-LD PTL-MMO2-8P
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SCREEN PRINTING COATER
EQ-SPC-1 EQ-SPC-2 EQ-SPC-32
•X,Y,andZpositionscanbeadjustedbythethreemicrometerswithvacuumchucktoload and unload substrate easily•Max70x50mmprintingarea•Vacuumchuck,100mmx80mm•ScreenFrameadjusting,±10ºadjustable• One 120L/min OilllessVacuum Pump is
included for immediate use
•Dia.150mmprecisionpositionadjustableatthreedimensionandvacuumchucktoloadand unload substrate easily•Max.155x255mmprintingarea•Vacuumchuck,150mmdiameter•ScreenFrameadjusting,±20ºadjustable• One 120L/min Oillless Vacuum Pump is
included for immediate use
•Max.Area:300mmx200mm•Max.substrateheight:30mm•Workingtablearea:400mmWx330mmD•Printingbladeisdrivenbycompressedair•Vacuumpumpisincluded•Linearmotionisdrivenbyprecisionmotorwihtlinearguidewithadjustablespeedcontroller•Resolutionofrepeatableprinting:<0.03mm
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DIP COATER WITH CHAMBER
Model Specifications Features
PTL-UMB
•Pullingspeed:1-500um/sec•Maxsamplesize:3”Lx2”W•Continuousworkingtemperature:50-200°C•Travellingdistance:0-60mmadjustable
Dipping rate, pulling rate, dwell time, and cycle lifecanbesetupbytouchscreencontrollerandrundipcoatingautomatically inthetemperaturecontrollableoven
PTL-HT
•Totalstokelength:620mm•PullingSpeed:1-200mm/min•Dwellingtime:1-999seconds•Continuousworkingtemperature:1000°C
Consists of 2” tube furnace and color touch screencontroller.Dippingrate,pullingrate,dwelltimeandlifecyclecanbesetupbytouchscreen.Solutionislocatedatthebottomofthesealedtubeatroomtemperature,andsamplecangothroughahotzoneupto800°C
PTL-MMB01
•Travellingdistance:0-200mmadjustable•Dipping/pullingspeed:1-200mm/min•Max.Samplesize:3”Lx2”W•Temperaturerange:50-200°C
ControlledbySBC,whichprovidesadjustabledippingspeed,pullingspeed,andtravellinglength.
PTL-MMB02
•Travellingdistance:0-60mmadjustable•Dipping/pullingspeed:1-200mm/min•Max.Samplesize:3”Lx2”W•Temperaturerange:50-200°C
CECertifiedMillimeterGradeDesktopProgrammableDip Coater (1-200 mm/min) with “touch-screen”digital control.Dipping rate, pulling rate, dwell time,andcyclelifecanbesetupbytouchscreencontrollerandrundipcoatingautomaticallyinthetemperaturecontrollable oven
PTL-NMB
•Travellingdistance:0-60mmadjustable•Dipping/pullingspeed:1-500nm/sec•Max.Samplesize:3”Lx2”W•Temperaturerange:50-200°C
CECertifiedNanometerGradeDesktopProgrammableDipCoater(1-500nm/sec)with“touch-screen”digitalcontrol. Dipping rate, pulling rate, dwell time, andcycle life can be setup by touch screen controllerandrundipcoatingautomaticallyinthetemperaturecontrollable oven
PTL-OV5P
•Travellingdistance:0-75mmadjustable•Dipping/pullingspeed:1-200mm/minprogrammablewithaccuracywithin+/-0.02%•Temperaturerange:50-200°C
CECertified Programmable Dip Coater (1-200mm/min) designed to preparingmultilayer coating up to5solutionsinsideatemperaturecontrolledovenwithtouch-screendigitalcontrol.Dippingrate,pullingrate,dwell time, and amount of cycles can be setup bytouchscreencontroller
PTL-OV6P
•Travellingdistance:0-80mmadjustable•Dipping/pullingspeed:1-40mm/minprogrammablewithaccuracywithin+/-0.02%•Temperaturerange:50-200°C(+/-1°caccuracy)
CE Certified Programmable Dip Coater (1-200mm/min) designed to preparingmultilayer coating up to6solutionsinsideatemperaturecontrolledovenwithtouch-screendigitalcontrol.Dippingrate,pullingrate,dwell time, and amount of cycles can be setup bytouchscreencontroller
PTL-MMB02-200
•Travellingdistance:0-250mmadjustable•Dipping/pullingspeed:1-200mm/minadjustable•Max.Samplesize:16”Lx9”W•Max.Workingtemperature:100°Cwith+/-1.5°C
accuracy
CECertifiedMillimeterGradeDesktopProgrammableDipCoater(1-200mm/min)with124Ldryingoven.It is designed to accommodate the substrates upto 16”x 9” with fully programmable dipping/pullingspeed, dwell time and amount of cycles. The ballscrew pulling system offers smooth vibration freetravellinginbothdirections
PTL-OV6P
PTL-MMB02-200PTL-HT
PTL-MMB02
PTL-OV5P
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DOCTOR BLADE FILM COATER
Model Max Coating Dimensions Features
MSK-AFA-II 12”Wx24”L •10-550mmadjustablebyusingadjustablepositionswitch•250mmadjustabledoctorbladeincluded
MSK-AFA-II-VC 12”Wx24”L •10-550mmadjustablebyusingadjustablepositionswitch•250mmadjustabledoctorbladeincluded•120L/moillessvacuumpumpincludedforimmediateuse
MSK-AFA-III 365mmLx200mmW •10-250mmadjustablebyusingadjustablepositionswitch•100mmadjustabledoctorbladeincluded•120L/moillessvacuumpumpincludedforimmediateuse
MSK-AFA-L800 800mmLx250mmW •800mmlongtapecastingcoaterwithvacuumchuck,oillessvacuumpump,andmicrometeradjustableapplicator.•10-800mmadjustablebyusingadjustablepositionswitch•250mmadjustabledoctorbladeincluded•120L/moillessvacuumpumpincludedforimmediateuse
MSK-AFA-IIMSK-AFA-II-VC
MSK-AFA-L800MSK-AFA-III
SPRAY PYROLYSIS COATING EQUIPMENT
MSK-USP-02-LD
•ThreeSprayheadsareincluded-Ultralsounicspayhead:forthinnerfilmcoating-Compressiveairspary:forthickfilm-20mlSyringepumpwithcompressiveair•Dispensingunitcapacity:50ml&250ml(twocontainers
included )•Dispensingrate:1-20ml/sec.adjustableviasoftware.•Onebrandnewlaptopcomputerwithpre-installedsoftwareis
included for immediate use •Ultrasonicatomizernozzle:40KHz,130W•Producingafinesprayofdropletsof50micronaveragesize.•Sprayertraverse:X-Y200mmmax.•DrivespeedXaxis(min-max):10-800mm/sec•DrivespeedYaxis(min-max):1-12mm/sec•Substrateplatedimension:150X150mm•Maxtemperature:500°C•PCconnectivity:RS232Port•OneCompactairompressorisincludedforimmediateuse
MSK-USP-04-LD
•ThreeSprayheadsareincluded-Ultralsounicspayhead:forthinnerfilmcoating-Compressiveairspary:forthickfilm-20mlSyringepumpwithcompressiveair•Dispensingunitcapacity:50ml&250ml(twocontainers
included )•Dispensingrate:1-20ml/sec.adjustableviasoftware.•Onebrandnewlaptopcomputerwithpre-installedsoftwareis
included for immediate use •Ultrasonicatomizernozzle:40KHz,130W•Producingafinesprayofdropletsof50micronaveragesize.•Sprayertraverse:X-Y200mmmax.•DrivespeedXaxis(min-max):10-800mm/sec•DrivespeedYaxis(min-max):1-12mm/sec•Substrateplatedimension:150X150mm•Maxtemperature:500°C•PCconnectivity:RS232Port•OneCompactaircompressorisincludedforimmediateuse•Digitaltemperaturecontrollerwith7segmentprogrammable
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ELECTROSPINNING STATION
MSK-NFES-3LD
•Digital control for various features like rotatingmandrel speed,spinduration,syringepumpflowrateetc•Rotatingmandrel targetsofvaryingdiameters,stationarytargetprovidedwiththesystem•Systemhoodhasfeatureslikeexhaustfan,halogenlightingandtransparentdoorformonitoringelectrospinningprocess•Built-inarkprotectioncircuit•Foursyringedispensingsystem•SSPlatewithgroundingfacility•Stationarytargetdimension:320mmx100mmx2mm•Drumcollectorrotationalspeed:300-4000rpm•MicroprocessorcontrolledBLDCmotorwithhallsensorfeedback•Drumcollectorspeedstability:+/-1%•Transparentglasswindowsonfoursidesforeasilymonitoringtheelectrospinningprocess
MSK-NFES-4LD
•PCcontrolforvariousfeatureslikerotatingmandrelspeed,spinduration,syringepumpflowrateetc•Rotatingmandrel targetsofvaryingdiameters,stationarytargetprovidedwiththesystem•Systemhoodhasfeatureslikeexhaustfan,halogenlightingandtransparentdoorformonitoringelectrospinningprocess•Built-inarkprotectioncircuit•Foursyringedispensingsystem•SSPlatewithgroundingfacility•Stationarytargetdimension:320mmx100mmx2mm•Drumcollectorrotationalspeed:300-4000rpm•MicroprocessorcontrolledBLDCmotorwithhallsensorfeedback•Drumcollectorspeedstability:+/-1%•Transparentglasswindowsonfoursidesforeasilymonitoringtheelectrospinningprocess•Centralizedsoftwarecontrolofalmostallof theelectrospinningparameters(laptopisincludedforimmediateusage)
EQ-TM106 EQ-TFCAS
CompactHighResolutionFilmThicknessMonitorandController ThinFilm&CoatingAnalysisSystemswithMeasurementCapability
•Basedontheprinciplethattheoscillatingfrequencyofaquartzcrystal ischangedbythemassofadepositedfilmonitsupperface•Electronicallymeasuringthiseffectallowsforadeterminationofthethicknessofadepositedfilm•Oncethedensityof theevaporatedmaterial isentered intothesystem,thethicknessismeasuredtoaresolutionof0.1AonadigitLEDdisplayhavingarangeof0-999.9nanometers•Crystalfrequencyof6MHzwithresolutionof0.03Hz•Probelength:120mmstandard•Probediameter:10mm•Builtinwatercoldjackettokeepprobetemperaturelowerthan
150°C•10piecesnewoscillatorscrystal(14mmdiameter)included•6digitalLEDdisplaywiththicknessterminationprogram
•Providesanon-contactsolutiontoanalyzethinfilmsandcoatingswiththicknessfrom5nmto200µminlessthanasecond• Capable of measuring the thickness and index of films andsupportbothsingleandmultiple(upto5+)layers•Filmmeasurement iscarriedout in twosteps:dataacquisition
and data analysis• Optical properties obtained from reflection and thickness ismeasured by detecting the sinusoidal fringe pattern from thesample’sspecularreflectance•Real-timeSpectralCaptureandInstrumentcontrolforReflectanceand/orTransmittance• Supports Parameterized materials: Cauchy, Sellmeir, EffectiveMedium Approximation, Harmonic Oscillator, Tauc-LorentzOscillator,Drude-Lorentzandmuchmore
THIN FILM ANALYZER
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PRODUCTS CATALOG
THERMAL EVAPORATION COATER
GSL-1800-ZF4
• Ultra-vacuum evaporation coater designed for coating oxygen sensitive metallicmaterials,suchasTi,AlandIretc,alsocanbeusedforcoatingallkindsofmaterials.whichhasfourevaporationheatersourcesandcoattwotypeofmaterialsinsametimeathighvacuumupto10E-6torr.•Stainlesssteelchamber:280mmID.x375mmHeight,(~23Liter)Sandblastingelectrolyticpolishingsurface•Hingedtypedoorforeasysampleloading•Vacuum,thicknessandpowercontrolareintegratedintoonecontrolbox•100mmdiameterrotatingsampleholderisontopofchamberwithdiameter260mm,whichcanbeheatedupto600°Cmax.viadigitaltemperaturecontrollerwith+/-1°Caccuracy• The distance between evaporation source and sample holder is 150-300 mmadjustable•Tungstenheatingboathasdimension70mmLx12mmWx3mmH
www.mtimalaysia.com || www.mti-indonesia.co.id
SPIN COATER
VTC-50 VTC-100A VTC-200
DesktopSpinCoaterwithCompleteAccessories
ProgrammableSpinCoaterwithVacuumChucks,OillessVacuumPump&Accessories
ProgrammableVacuumChuckSpinCoaterwithCompleteAccessories
•4”stainlesssteelspinplatesareincluded,whichcanholdoneormultiplesamplesbywaxordouble-sidedtape• The spinning speed is variable from
0-5100 rpm
•Liquiddiskmadeofpolypropelenetoresistmostofcorrosivesolutions(1”,2”,&4”)• The spinning speed is variable from500-8000 rpm with two programmablesegments• One oilless vacuum pump and one filter
are included
• One 6” vacuum chuck is included forholding6”and8”wafers•500-5000rpmadjustablespinningspeed•Digitalcontrolpanelwithtwoprogrammablesegments of different spin times andspeeds
VTC-100B-LD VTC-100C-LD
ProgrammableSpinCoaterwithVacuumChucks,NylonChamberandOptionalDigitalPipette
ProgrammableSpinCoaterwithFullNPPChamber,VacuumChucksandOptionalDiaphragmPump,DigitalPipette
•Nylonchamberforanti-crossiveoperation•Onegasinletportontopofcoverwhichcanfillinertgasduringcoating•5-8000rpmspiningspeedprogrammable•Digital control panel can store 9 programs and each programhas9segmentsprogrammableforspeed,acceleration,andspinduration
•Seamlessfull-PPchamberforanti-crossiveoperation• Storage of unlimited* programs of unlimited steps of ± 0.1secondsminimumeach•Speed1-10.000rpm±1rpmstepswith±0.1rpmaccuracy•SpinRotation:clockwise,counterclockwiseandpuddle•Detachablecontrolpanelwithfullsizetouchscreen•USBportforoutputtingthespinrecipe
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COIN CELL PREPARATION
Model Function Description
MSK-110 Crimping• One set of crimping die for CR2032, CR2025, and CR2016 • Optional die available from product option for crimping CR2325, CR2450, AG3, AG5• PTFE Anti-Corrosion Core prevents coin cells from being short circuited
MSK-110D Disassembling• One set of disassembling die for CR2032, CR2025, & CR2016• PTFE Anti-Corrosion Core prevents coin cells from being short circuited
MSK-160D2Crimping&Disassembling
• CE Certified electric crimper for the CR20XX series coin cells such as CR2016, CR2025, and CR2032
• Two sets of dies included in the standard package for enabling this machine’s crimping or de-crimping capabilities
MSK-E110 Crimping• CE Certified auto crimper for various types of coin cells, such as CR2016, CR2025 and CR2032• Crimping pressure is adjustable according to cell size with digital display on the front panel
MSK-PN110 Crimping• Precision electric crimper driven by compressed inert gas or compressed air for various types of
coin cells, such as CR2016, CR2025 and CR2032• Force Display: digital display force on crimping die: 600 - 1150 Kg adjustable
MSK-110 MSK-110D MSK-160D2MSK-E110 MSK-PN110
POUCH CELL PREPARATION
MSK-120 MSK-180 MSK-140
PouchCellCaseFormingMachine Semi-Automatic Die Cutter CompactHeatingSealer
•<6.0mmmaxpouchdepthtopunch•<8secondspertrialforstrokefrequency•Maxdiesizeisupto150Lx120Wx6Hmm
•300Lx250Wmmworkingtablearea•81Lx49Wmmwithcurrentcollectdie
set is included•+/-0.1mmcuttingaccuracy
•Maxsealingisupto190mm•Sealingwidthisupto3.2mm•Sealingthicknessisfrom0.19-0.3mm•50-300°Cadjustablesealingtemperature
MSK-115A MSK-111A MSK-112A-POUCH
CompactVacuumSealer Semi-AutomaticStackingMachine Semi-AutomaticWindingMachine
• Sealing pressure is up to 7 kg/cm2 adjustable•200Lx150Wmmmaxsealingdimension•50-250°Cadjustablesealingtemperature
•200mmmaxstackinglayerlength•400mmfixedtraveldistance•1-9999travelcycles
•Windingspeedupto250rpmadjustable•Windingbladetowinduppouchcell•Switchablebetweenclockwiseandcounterclockwise
Copyright © All Rights Reserved
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ERY
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PRODUCTS CATALOG
CYLINDER CELL PREPARATION
MSK-510M MSK-510L MSK-500 MSK-500L
HydraulicCrimpingMachine Semi-AutomaticGroovingMachine
•Sixstandarddieselectable:CR123/18650/26650/32650/AA/AAA•Manualhydraulicpressingupto5T
•StandardCrimpingDiefor50100CylindricalBattery•Manualhydraulicpressingupto5T
•UsedforgroovingvariouscylindricalcasesincludingCR123,1865026650,32650andAA•400groovingperhour
productivity
•Usedforgrooving50100cylindrical cases onl•400groovingperhour
productivity
MSK-CSE-300 MSK-112A-CYLINDER MSK-530
Semi-AutomaticSlittingMachine Semi-AutomaticWindingMachine CompactDisassemblingMachine
•4setsofslittingblades(58mm&56mm)•100-300micronscuttingthickness•0-4m/minadjustablespeed
•Windingspeedupto250rpmadjustable•Windingbladetowindupcylindercell•Switchablebetweenclockwiseandcounterclockwise
•Slicingmotorspeed:1000rpm•Dierotatingspeed:1000rpm•Micrometeraccuracy:0.05mm•Todisassemblecylindercases
OTHERS RELATED TO BATTERY PREPARATION
MSK-170 MSK-540 MSK-150
ElectrolyteDiffusionChamber RolltoRollEdgeSlittingMachine DesktopPrecisionElectrolyteFiller
• 326 L x 206 W x 148 H mm innerchambersize•0-99.99secairinflationtime•0-99.99secvacuumconditionholdtime•-20to40°C operation temperature•0-1MPaadjustableairpressure•Easyprogramsettingforspecificvacuum
condition
•Bladeengagement:Adjustable0.2-0.4mm•Max.Reeling/UnreelingDiameter:250mm•Burrcondition:≤25um•BladeMaterials:Ultrafinetungstenalloy•BladeDiameter:100mm•30~300mmadjustable•Steplessadjustable,manualadjustment,digitaldisplay
•Fillingvolumerange:0-2.5ml•IncrementDisplayed:5µl/Thou•DigitalScaleAccuracy:0.01g•MeteringPumpandRack:220x250x320mm•ControlBox:140x170x160mm
www.mtimalaysia.com || www.mti-indonesia.co.id
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BATTERY SAFETY TESTING EQUIPMENT
Model Description Features
MSK-TE903DualExplosion-Proof
Box
• Provides a safe enclosure for over-charging & forced discharging of all kinds of battery cells required by the UN38.3 standard (38.3.4.7 & 38.3.4.8)
• It is two separate compartments with a total of 4 feedthrough ports allow for testing multiple batteries at the same time
• One safety door is built in the back of each chamber. In the event of a battery explosion, the door will open to reduce pressure inside of the chamber
MSK-TE901-ULShortCircuitTestChamber
• Allows for testing rechargeable batteries & packs under a large current draw up to 1000A• This test system consists of two units: 1) a power control unit with high current switch and 2)
explosion proof chamber for meeting the UN38.3 standard• A remote control is included to allow the user to safely perform the short circuit test up to 7
meters away
EQ-DHG-9070V-TA
ThermalAbuseTestChamber
• An explosive-proof air circulating oven with max. working timperature 200°C and 71 Liter capacity
• The oven is designed for battery thermal abuse test under IEC62133-8.2.2. Digital temperature control will provides +/-1°C accuracy with over-heated alarm and finishing alert
EQ-TA-6050ThermalAbuseTest
Chamber
• An explosive-proof oven with 150°C max. working temperature and 53 Liter capacity• This oven is designed for battery thermal abuse test under IEC62133-8.3.4. Digital temperature
controller provides +/-2°C accuracy with over-heated alarm and completion alart• It also can be operated under vacuum or inert gas condition to avoid flame and firing
MSK-TE902GravityImpact(Free
Fall)Tester
• It is a Gravity Impact ( Free Fall ) Tester for impact testing of all kinds of lithium battery according UN38.3 standard ( 38.3.4.6 ) or IEC-62133-8.3.3 standard
• A safety door is built in the back of the chamber. In the event of a battery explosion, the door will open to reduce the pressure inside of the chamber
MSK-ISCBatteryForced
Internal-ShortCircuit(ISC)Tester
• A highly integrated 3-in-1 battery ISC testing system which is able to simulate the actual testing and performs cell voltage measurement with various enviromental conditions applied such as temperature & humidity and crushing pressure
• System is designed based on IEC 62133-2012 8.3.9 testing standards which helps ensure the battery safety and reliability
MSK-TE905Hydraulic Driven Crushing&NailPenetrationTester
• Combines crushing test and nail penetration into one machine with explosion-proof box and remote control panel for the IEC 62133.8.3.5 standard
• An electric hydraulic pump allows the machine to achieve the required force for crushing/ penetrating the battery cells
MSK-CT6045 CrushingTester
• A crushing test machine with explosion-proof box and remote control pannel for IEC 62133.8.3.5 standard, also meet the requirement of GB8897.4-2002, IEC60086-4:2000, SJ/T11170-1998, UL2054:1997
• Force 1000N ~13KN ( 1.5 TN)
MSK-TE903
MSK-TE901-ULEQ-DHG-9070V-TA EQ-TA-6050
MSK-TE902MSK-ISC
MSK-TE905
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BATT
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PRODUCTS CATALOG
Model Description Features
MSK-TE9002 NailPenetrationTester
• A professional nail penetration tester for all types of rechargeable battery, which meets international standards, such as UN 38.3, UL2054:1997, GB/T18287-2000, SJ/T11170-1998 etc
• The nail penetration is carried on a safe and vented stainless steel chamber using 2~8 mm diameter steel nail at variable speed from 10~40mm/s
• There is a fixture to tighten various type cells, pouches or cylinders in the safety chamber
MSK-TE906ProgrammableFastThermal
TestChamber
• A 150 liter Programmable Thermal Test Chamber for thermal test of Rechargeable Battery & Battery Pack according to UN38.3 ( 38.3.4.2 ) and other thermal test from -75ºC to + 150ºC at faster heating and cooling rate
• 6” touch-screen control panel to set up program, and display temperature profile
MSK-ES-4ComputerizedAutomaticVibrationSystem
• A compact computerized Vibration Testing System for Li-Ion battery and battery pack up to 200Hz based on UN38.3 standard (38.3.4.3), which integrates computer and all control units into one box with less stand foot
MSK-SS-10AutomatedPneumaticShock
Tester
• A computerized automatic shock tester designed for testing Li-Ion battery cells or packs according to the 38.3.4.4; Test T.4: Shock section of the UN38.3 standard
• This section tests batteries under the simulation of possible impacts during transportation with the pack or cell subjected to an acceleration of 150 gn with a duration of 6 milliseconds ( 50 gn with 11 milliseconds for larger packs or cells)
• The shock tester is capable of handling battery packs up to 10Kg (22 lbs)
MSK-SS-25 AutomaticShockTester
• A computerized automatic shock tester designed for testing Li-Ion battery cells or packs according to the 38.3.4.4; Test T.4: Shock section of the UN38.3 standard
• This section tests batteries under the simulation of possible impacts during transportation with the pack or cell subjected to an acceleration of 150 gn with a duration of 6 milliseconds (50 gn with 11 milliseconds for larger packs or cells
• The shock tester is capable of handling battery packs up to 15Kg
MSK-TE5068CompactNailPenetration
Tester
• A professional nail penetration tester for all types of rechargeable battery, which meets international standards, such as UL2054, UL1642, GB/T 18287-2000, GB/T2900.11-1988 idt IEC60086-4: 2000 etc
• The nail penetration is carried on a safe and vented stainless steel chamber using 2~8 mm diameter steel nail at variable speed from 10~40mm/s
• There is a manual fixture to tighten various type cells, pouches or cylinders in the safety chamber
MSK-TE910 ShortCircuitTestSystem
• Allows for testing pouch cell or its battery pack with adjustable temperature and pressure
• This machine tests insulation resistance precisely to recognize the micro circuit status of the battery in order to test the safety issue of the battery
MSK-TE9002
MSK-TE906
MSK-ES-4
MSK-SS-10MSK-SS-25
MSK-TE5068
MSK-TE910
www.mtimalaysia.com || www.mti-indonesia.co.id
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SPLIT TEST CELL
Model Features
EQ-SC-26650
•Designedfortesting26650batteries•Fullstainlesssteelendcaps•Eletrolytecorrosive-proofPTFEbodycansustainwithtemperatureupto250ºC•Sealedbyelectrolytecorrosive-proofPTFEO-rings•IDofPTFEbody:26mm;HeightofPTFEbody:65mm
EQ-SC-18650
•Designedfortesting18650batteries•Fullstainlesssteelendcaps•Eletrolytecorrosive-proofPTFEbodycansustainwithtemperatureupto250ºC•Sealedbyelectrolytecorrosive-proofPTFEO-rings•IDofPTFEbody:18mm;HeightofPTFEbody:65mm
STC-ZINCAIR-W
• SS316 structure ensures high electrical conductivity and good corrosionprotection•Internalcompressspringensuresagoodmetalcontactoftheelectrodes•Electrolytecorrosive-proofPTFEGuideSleeveandSealingO-rings•10mmDia.x1mmThickQuartzObservationWindowallowsX-Rayandinfrared
beam penetration•BottomRecessArea:16mmDia.•Max.WorkingTemperature:200°C
EQ-STC-LI-AIR
•StainlessSteelStructurewithinternalSilver-Cladsurfacetreatmentensureshighelectricalconductivityandgoodcorrosionprotection•Electrolytecorrosive-proofPTFEGuideSleeveandSealingO-rings•Cellthickness:1-3mm(cathode+separator+anode)•BottomRecessArea:20mmdia.•Maxworkingtemperature:250°C•Dialpressuregaugewithdisplayrangefrom-0.1-0.15MPa•TwoSSneedlevalveswith1/4”tubefittings
EQ-STC
•A6mmheightspacerinsidethetestcelltopressdownontheelectrodeandpreventtheelectrodefromcurling•Sealedbyelectrolytecorrosive-proofPTFEO-rings•Electrolytecorrosive-proofPTFEguidesleevecapableofwithstandingupto250ºC•Easytoseparateaftertesting•10,12,15,19,20,and24mmdiameterinserts
EQ-STC-QW
•A6mmheightspacerinsidethetestcelltopressdownontheelectrodeandpreventtheelectrodefromcurling•17mmdia.quartzobservationwindowensurestheX-Raybeampenetration•Sealedbyelectrolytecorrosive-proofPTFEO-rings•Electrolytecorrosive-proofPTFEguidesleevecapableofwithstandingupto250ºC•Maxcellthickness:6mm(Cathode+separator+anode)•19,20,and24mmdiameterinserts
EQ-3ESTC15
•FullSS304structure•24mmdiameterinsert•Sealedbyelectrolytecorrosive-proofPTFEO-rings• Electrolyte corrosive-proof PTFE Guide Sleeve capable of withstanding up to250ºC•Adjustablespringtensionontoptoacceptvariouselectrodethicknesses•Easytoseparateaftertesting•DesignedforR&Dofrechargeablebatterymaterialsbytestingthreeelectrodes
EQ-3ESTC15P
•A three-electrode split cell used for testing anode/cathode with a referenceelectrodeinbetween•24mmdiameterinsert•TheadditionofaDigitalPressureGaugemakes itpossible tomonitor theairpressureinsidethechemicalreactionchamber•A1/4’’inlet/outletbarbwithneedlevalveallowsforeasygasin/out• Electrolyte corrosive-proof PTFE Guide Sleeve capable of withstanding up to250ºC•Sealedbyelectrolytecorrosive-proofPTFEO-rings
EQ-SC-26650
STC-ZINCAIR-W
EQ-STC-LI-AIR
EQ-STC
EQ-STC-QW
EQ-3ESTC15P
Copyright © All Rights Reserved
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BATT
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PRODUCTS CATALOG
ROLL TO ROLL COATER
MSK-AFA-E300 MSK-AFA-E200
AutomaticRolltoRollBatteryElectrodeCoatingSystemwithDryingOven CompactRolltoRollTapeCastingMachinewithDryingOven
•Cancoatelectrodesheetsupto250mminwidthand600meterinlengthautomatically• Integrates the functions/features ofmetallic foil roll unwinding(reeling out), slurry feeder, coating blade, baking oven, andfinal electrode winding (reeling in) together with touch screenoperation
•Cancoatelectrodesheetsupto160mminwidthand500meterinlengthautomatically•Integratesthefunctions/featuresofreelingin&out,slurryfeeder,coatingblade,bakingoven,andfinalelectrodewinding(reelingin).
SPOT & ULTRASONIC WELDER
Model Description Specification
MSK-310A CompactACPulseSpotWelder(PneumaticType) •Inputairpressure:0.1-0.8MPa•Weldingcurrent:0-99%adjustable•Tabthicknessapplicable:0.03-0.2mmtab
MSK-330A PrecisePneumaticPointWeldingMachine •Inputairpressure:0.1-0.8MPa•Weldingcurrent:0-99%adjustable•Tabthicknessapplicable:0.03-0.25mmtab•Controlledbymicrocontroller,achievemonopulse,dipulse,mutiple-pulsewelding
MSK-320B Desk-TopMicro-computerControlCapacitiveDischargeSpotWelder(PedalType)
•Builtinoptoelectronicweldingswitch•Weldingcurrent:0-99%adjustable•Tabthicknessapplicable:0.03-0.5mmtab•SinglechipcontrolwithLCDcontrolpanel
MSK-360A HeavyDutySpotWelder(PneumaticType)withFlatWeldingHeadforThickTab&LargerBatteryPack
•Inputairpressure:0.1-0.8MPa•Weldingcurrent:0-99%adjustable•Tabthicknessapplicable:0.03-0.5mmtab•SinglechipcontrolwithLCDcontrolpanel
MSK-800 Desk-TopUltrasonicMetalWelder •Inputairpressure:0.1-0.8MPa•Ultrasonicfrequency:30-40kHzadjustable•Weldingarea:5.2mm(L)x5.2mm(W)•Pneumaticcontrolairpressureat85psig
MSK-800W
Desk-Top800WUltrasonicMetalWelderwithTouch-ScreenDigitalController
•UptofourrecipescanbestoredintheAlorCuweldingprograms•Ultrasonicfrequency:30-40kHzadjustable•Weldingarea:4mm(L)x4mm(W)•Pneumaticcontrolairpressureat85psig
MSK-320A Desk-TopCapacitiveDischargeSpotWelder(PneumaticType)
•Inputairpressure:0.1-0.8MPa•Weldingcurrent:0-99%adjustable•Tabthicknessapplicable:0.03-0.5mmtab•Builtinoptoelectronicweldingswitch
MSK-310A MSK-320BMSK-330A
MSK-360A MSK-800
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BATTERY/CAPACITOR ANALYZER
Model Description
BST8-WA
•Aneight-channelbatteryanalyzertoanalyzesmallcoincellsandcylindricalbatteriesfrom0.002mAto1mA,upto5V•Providesmostapplicationsinbatterytestingfieldssuchaselectrodematerialsresearch,batteryperformancetest,small-scalebatteryformation,capabilitygrading,batterypacktestingandetc
BST8-MA
•Aneight-channelbatteryanalyzertoanalyzesmallcoincellsandcylindricalbatteriesfrom0.1mAto10mA,upto5V•Providesmostapplicationsinbatterytestingfieldssuchaselectrodematerialsresearch,batteryperformancetest,small-scalebatteryformation,capabilitygrading,batterypacktestingandetc
BST8-3
•Aneight-channelbatteryanalyzertoanalyzesmallcoincellsandcylindricalbatteriesfrom6.0mAto3000mA,upto5V•Providesmostapplicationsinbatterytestingfieldssuchaselectrodematerialsresearch,batteryperformancetest,small-scalebatteryformation,capabilitygrading,batterypacktestingandetc
BST8-STAT-LD•Singlechannelpotentiostat/galvanostatwithlaptop&softwareforbattery/capacitoranalysis• Suited for electro-chemical -analysis, including cyclic voltammetry, chronoamperometry andchronopotentiometry
BST8-4C10A50V•4channelbatteryanalyzingsystemforLi-ion,LiFePO3,Ni-MH,Ni-Cd,andLeadacidbatterypackswithupto50Vand10Aperchannel•Intelligentpowerfailureprotection
BST8-5V40A-RT
•8channelbatteryanalyzingsystemforLi-ion,LiFePO3,Ni-MH,Ni-Cd,andLeadacidbatterypackswithupto5Vand40Aperchannel•BasedonnetworkcommunicationdesignandsoftwarecombinesaDCInternalResistanceAnalysisfunctionwhendoingcyclecharging/discharging,whichensuresastableconnectionandhighintegrationtestingplatform
BST8-16-10V2A-IR
•16-channelbatteryanalyzerusedfortestingallkindsofbattery includingLi-ionbattery,NiMH,NiCd,batterypack,andetc•Eachchannelisanindependentconstant-current(0.1-2A)andconstant-voltage(0-10V)sourcewhichcanbeprogrammedandcontrolledbytestingsoftware
BST8-10A30V•8channelbatteryanalyzingsystemforLi-ion,LiFePO3,Ni-MH,Ni-Cd,andLeadacidbatterypackswithupto30Vand10Aperchannel•Intelligentpowerfailureprotection
EQ-M9711•DCprogrammableelectronicloadwithPCcontrolsoftwareforBatteryandCapacitorDischargingTest:0-30A,0-150V,150W•Overcurrent,overvoltage,overpower,overheat,polarityreversedprotection
EQ-BVIR•BatteryinternalresistancetestercanbeusedformeasuringtheInternalResistanceandOpenCircuitVoltageofalmostallofthecommercialbatteriessuchasSecondarybattery,Leadacidbattery,Nicklecadmium,Nickle-metal Hydride and Li-ion battery
EQ-MSK-BK300•PrecisioninternalresistancemeterforR&Dorqualitycontrolofallrechargeablebattery,whichhasaccuracyupto1milli-ohmandcanmeasureanybatteryfrom0-19.99V•AdoptssinewaveACpowerwithfrequencyof1000Hztocarryouttestonthebatteryinternalresistance
EQ-IT9712•300WDCprogrammableelectronicloadforBatteryTest:120V/30A•Overcurrent,overvoltage,overpower,overheat,polarityreversedprotection
EQ-MSK-BK300
EQ-M9711
BST8-3
BST8-10A30V
EQ-BVIRBST8-16-10V2A-IR
BST8-STAT
Copyright © All Rights Reserved
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PRODUCTS CATALOG
DESKTOP X-RAY INSTRUMENT
DIGITAL MICROSCOPE
EQ-MD-10-LD EQ-DX-100G
PrecisionMiniX-RayDiffractometerwithSoftware&LaptopComputer
DesktopX-RayOrientationMachineforSingleCrystal Orientation Measurement
•Angular range of measurements: 16 -120° ( 2theta)•Angularaccuracyofpeakpositioning:+/-0.02° (2theta)•Peak-to-peakresolution(degrees):0.1°•Samplespinning:60rpm• One high purity Al
2O
3 powder sample and two
sampleholdersareincluded•X-raytubepower(W):10(at25kV,0.4mA)•Anodematerials:Cu
•X-RayTube:Cutarget,aircooling,Cu-Kaoutput•Max.TubeCurrent:35kV,5mA•X-RayDetector:Max.Voltageat1050V•MeasureRange:2Theta=10 -140° ; Theta
10 - 70°• Reading Display: Digital display with resolution
15”•HighVoltagePowerSupply:Includedinaseparatedunitwhichcanbeplacedundertabledesk
Model Description
EQ-MM500T-USB
• An up-right reflected and transmitted metallurgical microscopysystemwithaUSBdigitalimagecamera3.0Mpixelresolution•Comeswithaquintuplenosepiece, seven levelsof infinitiveplanobjectives 5X/0.12, 10X/0.25, 20X/0.4, 50X/0.75, 100X/0.9,40X/0.65,100X/1.25.
EQ-MS-XJM413H-3M
•Aninverted,metallurgicalmicroscopesystemthatprovidessuperboptics,built-inpolarizationcapabilities,colorfiltersandupto100XobjectivemagnificationwithaUSBdigitalimagecamera3.0Mpixelresolution•Five infinitivePlanAchromaticobjectives included.(4X,10X,20X,40X,100Xoil).
EQ-AS-SE304-PZ-LD
•Comeswiththreemagnificationpowersettings(20X,40X&80X)andanilluminationsystemthatprovidesbothincident(top)lighting.•45°inclinedbinocularheadensuresaneasyobservationandrubbereye-guardsprovidefurthercomfort.
EQ-MM500T-USB
EQ-MS-XJM413H-3M
EQ-AS-SE304-PZ-LD
EQ-MD-10-LD
EQ-DX-100G
Zero Diffraction Plate
SiZero24D10C1-cavity ZerodiffractionplateforXRDsample:24.6Dia.x1.0TmmwithCavity10IDx0.2mm,SiCrystal
Zero3030-cavityZerodiffractionplateforXRDsample:30x30mmx2.5mm(2sp)withCavity10mmIDx1.0mm,SiO2Crystal
SiO2Zero303025-cavity ZerodiffractionplateforXRDsample:30x30x2.5mm(2sp)withCavity20IDx1.0mm,SiO2Crystal
SiZero201815S2 ZerodiffractionplateforXRDsample:20x18x1.5mm(2sp),Sisinglecrystal
SiZero24D05C1 ZerodiffractionplateforXRDsample:24.6mmDia.x0.5mmT,Sisinglecrystal
SiZero24D10C1 ZerodiffractionplateforXRDsample:24.6mmDia.x1.0mmT,Sisinglecrystal
SOZero25 ZerodiffractionplateforXRDSample:25Dia.x2.5mm(2sp),SiO2singlecrystal
SiZero252520S1 ZerodiffractionplateforXRDsample:25x25x2.0mm(1sp),Sisinglecrystal
SoZero303025S1 ZerodiffractionplateforXRDsample:30x30x2.5mm,SiO2singlecrystal
SoZero303025S2 ZerodiffractionplateforXRDsample:30x30x2.5mm,SiO2singlecrystal
SiZero32D10C1 ZerodiffractionplateforXRDsample:32mmDia.x1.0mmT,Sisinglecrystal
SiZero32D20C1 ZerodiffractionplateforXRDsample:32mmDia.x2.0mmT,Sisinglecrystal
SiZero16D15C1 ZerodiffractionplateforXRDsample:16.1mmDia.x1.5mmT,Sisinglecrystal
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VACUUM GLOVE BOX
Model Features
EQ-VGB-1
•Stainlesssteelchamberscasingwithdimensions:555(L)x444W)x414(H)mmupto0.5Torrvacuumlevel•Air-lockchamberwithdimensions:200(ID)x270(L)mmupto0.05Torrvacuumlevel•Twovacuumflanges,oneKF-25vacuumfittingportswithquickclampareinstalled•OnepairofLatexGlovesareincludedforimmediateuse
EQ-VGB-2Y
•Transparentpolycarbonatemainchambercasingwithdimensions:875(L)x480(W)x500(H)mmupto675Torrvacuumlevel•Air-lockchamberwithdimensions:230(L)x220(W)x230(H)mmupto100Torrvacuumlevel•Onemechanicalvacuumgaugeandtwosolenoidvalvesareinstalledforpressurecontrol•Twoneedlevalvesformainchamberandair-lockchamberareinstalledforimmediateuse•OnepairofLatexGlovesareincludedforimmediateuse
EQ-VGB-3
•Stainlesssteelchamberscasingwithdimensions:780(L)x700(W)x650(H)mmupto0.5Torrvacuumlevel•Air-lockchamberwithdimensions:240(ID)x260(L)mmupto0.05Torrvacuumlevel•Twovacuumflanges,twoKF-25vacuumfittingportswithquickclampareinstalled•OnepairofLatexGlovesareincludedforimmediateuse
EQ-VGB-3P•EquippedwithEQ-VGB-3gloveboxandpurificationsystemtoautomaticallyremovemoisture<10ppm,precisionhumidityanalyzer,largecapacitymoisturefilter,regenerationtemperaturecontroller,automaticpressurecontrol,PLCtouchpanel,andextensionsocketareinstalled
EQ-VGB-4A
•Stainlesssteelchamberscasingwithdimensions:1120(L)x740(W)x900(H)mmupto0.5Torrvacuumlevel•Air-lockchamberwithdimensions:360(ID)x435(L)mmupto0.05Torrvacuumlevel•Airlifttransparentfrontpanelremovableforputtingindevices•Onevacuumgauge,1/2”barbedneedlevalve,threeKF-25vacuumportsandthreeKF-40areinstalled•Onepairof8’’Butadyl®Glovesareincludedforimmediateuse
EQ-VGB-7•EquippedwithEQ-VGB-4Aglovebox,heavydutyvacuumpumpwithfilter,stainlesssteelvacuumbellowandvalve,oneflowmeter,anautomatichumiditypurificationwithvacuumflangeforLi-IonBattery(H
2O<2ppm)
EQ-VGB-7HO•EquippedwithEQ-VGB-4Aglovebox,heavydutyvacuumpumpwithfilter,stainlesssteelvacuumbellowandvalve,oneflowmeter,anautomatichumiditypurificationwithvacuumflangeforLi-IonBattery(H
2O&O
2<5ppm)
EQ-VGB-6-LD
• Stainless steel chamber with dimensions of 1220(L)x760(W)x900(H) mm with built in fluorescent lamp insidechamber•Chambercondition: H
2O&O
2<1ppm
•Installedwithgaspurificationsystem,filtersystem,pressurecontrolsystem,automaticpurgingsystemwithSiemensPLCcontrolsystemandRV-8EDWARDSpumpareincluded•Apairof93/4”butylgloveisincludedforimmediateuse
EQ-VGB-10-II
•Stainlesssteelchamberwithdimensionsof2400(L)x800(W)x930(H)mmwithdoublelayerlaminatedsafetyglasswithbuiltinfluorescentlampandthreeslidableshelves•Chambercondition: H
2O&O
2<1ppm
•Installedwithgaspurificationsystem,filtersystem,pressurecontrolsystem,automaticpurgingsystemwithSiemensPLCcontrolsystemandEDWARDSpumpareincluded•ApairofNORTHbutylgloveisincludedforimmediateuse
EQ-VGB-10-II
EQ-VGB-4A
EQ-VGB-7
EQ-VGB-2Y
EQ-VGB-6-LD
EQ-VGB-6
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PRODUCTS CATALOG
FUME HOOD
EQ-FH-36
Bench-TopFumeHoodwithExplosionProofBlower&Lamp
•Explosionproofblowerwithairflowrate1900m3/min•Touchbuttonpowerpanelwithbuiltin30Wvaporprooflamp•Ductedtypefumehoodwithslidingdoorandsteelframe(temperedglasspanel)•Twopowerplugsareinstalledinsidefumehood•10”horsepipeport•Dimension:36”Wx22”Dx59”H•Anidealfume-hoodformaterialresearchlabtohandleflammableortoxicgases
VACUUM STORAGE BOX
SVC-6050 MSK-VA25 MSK-VA53
StainlessSteelVacuumChamber VacuumChamberwithAutomaticControl
•53litercapacitywithinsidedimensionof16”Lx13”Wx14”H•Safelysupportsvacuumuntil-0.1MPa•Double-wallstainlesssteelconstruction•Electricstripbuiltinsidechambertoallowelectricaldeviceusageundervacuum•Inertgascanbefilledinsidechamber
•25 litercapacitywith insidedimensionof12”Lx12”Wx11”H• Vacuum pressure until 7.5 Torr usingmechanicalpump•Builtinpressuresensortocutoffpumpat11.6kPa•6”touchscreenPLCpanelforautomation•226l/mvacuumpumpisbuiltin
•53litercapacitywith insidedimensionof16.3”Lx13.5”Wx14.5”H• Vacuum pressure until 7.5 Torr usingmechanicalpump•Builtinpressuresensortocutoffpumpat11.6kPa•6”touchscreenPLCpanelforautomation•226l/mvacuumpumpisbuiltin
EQ-SP-VC-3 HVC-SS
Vacuum-ableDessicatorwithInternalPump HighVacuumChamber
•11litercapacitywithinsidedimensionof320Wx240Dx260H mm•Delicateapperancewithsolidand rigidstructuremadeofhigh
intensity polycarbonate materials•Dust,mildew,andmoistureproof•Canbeoperatedwithoutapowersupplyanddesign is freeoffragilemoistureabsorptionreadingelectronics
•Vacuumchamberismadeof304stainlesssteelwithreinforcingrib •Insidevacuumchambersize:470L×445D×522Hmm(105L)• Round 380mm dia. hinged type doorwith 150mmDia glasswindow•Vacuumsealed150mmdiameterglasswindowisinstalledonthe
front door for easy observation•Pressurerange:1·10-6torrtoambientpressure•Temperaturerange:-15to150°C•Topplateisremovabletomadecustmizedportandfitting•FourKF25portsandoneKF40arebuiltinthechamber
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DIGITAL LAB BALANCE
EQ-BAL-IB601-LD BAL-IB101-LD EQ-BAL-VB
•Reads600gx0.01g•Rechargeablebatteryincluded•ReadsinGram,TroyOunce,andCaratWeight•Includedstainlesssteeltrayandwind
screen•Adjustableauto-zerotracking•Digitalautocalibration
•Reads100gx0.005g•F2calibrationweight,windscreenandAC
adaptor included•Operatingtemperature:0-40°C•Adjustableauto-zerotracking•Digitalautocalibration
•Threemodels:3000g,6000gand10,000gcanbeselected•Operatingtemperature:0-40°C•Adjustableauto-zerotracking•Digitalautocalibration•LargeLCDdisplaywithlowbattery
indication
ULTRASONIC CLEANER
EQ-UL-CD-3800C-LD EQ-VGT-1613QTD EQ-VGT-1620QTD EQ-VGT-1860QTD
•Ultrasonicfrequency:42kHz•Ultrasonicpower:35W•Stainlesssteel600mltank•5cyclesdigitaldisplaytimer
•Ultrasonicfrequency:40kHz•Ultrasonicpower:60W•Stainlesssteel1300mltank•Temperaturesetting:20-80°C•Timesetting:1-99minutes
•Ultrasonicfrequency:40kHz•Ultrasonicpower:60W•Stainlesssteel2000mltank•Temperaturesetting:20-80°C•Timesetting:1-99minutes
•Ultrasonicfrequency:40kHz•Ultrasonicpower:480W•Stainlesssteel6000mltank•Temperaturesetting:20-80°C•Timesetting:1-99minutes
UV EQUIPMENTS
EQ-UV-EC410-LD EQ-UV-81485-LD EQ-UV-EC500-LD
Electro-Cure410UVCuringSystem Fluor-TekUVBlackLightInspectionSystem UV/VisibleLightExposureChamber
•UVOutput:90mW/cm2@365nm•LampLife:1000hrs•Dimensions:10”Wx5.5”Hx9.5”D•Weight:5lbs,10oz
•UVOutput:10mW/cm2BlackLight•ExposureArea:5”x13/4”•Timer:1,2and3minutes•Dimentions:21/2”Wx12”Hx1”D•Weight:1lb8oz
•Perfectcuringatanexcellentprice•Versatile,compactanddurable•Excellentforassemblyandnon-destructivequalitytesting•Poweredbyfouruvalamps-350nm•Operatorsafe
Copyright © All Rights Reserved
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PRODUCTS CATALOG
PRECISION MILLING MACHINE
EQ-MT-115-LD EQ-MT-20K-LD EQ-SL5400-MILLING-LD
PrecisionMicroDrillingMachine PrecisionMicroMillingMachine PrecisionDesktopVerticalMillingMachine
• Flat belt provides 3 spindle speeds of1,800, 4,700 and 8,500 rpm allowingtripletorqueatlowspeeds.• The spindle has an extremely high
rotational accuracy and a 30 mm feed.•Maxheightisupto140mm
•Speed5,000-20,000rpmvariable•TableSize77/8”x23/4”(200x70mm)•X-Ytravelisupto134and46mm•Verticaltravelisupto70mm•Footprintsizeis130x225mm•Max.heightisupto340mm
•Hasspindlethatcantakesideloadsaswellas end loadsandanaccuratemethodofmovingtheworkinrelationtothespindleonallthreeaxes.• The deluxe mill features with: 12” basewith5” inchesofY-axis travel,adjustable‘zero’ handwheels, 1/4” drill chuck andlaser-engraved reference scales on thebase and table.
LATHE
EQ-SL4400-LATHE-LD
PrecisionDesktopLathe
•Theelectronicspeedcontrolallowscontinuouslyvariablespeedcontrolfrom70to2800rpmwithoutbeltchanges•Cosslide,pulleys,belt,faceplate,lathedog,twodeadcenters,threehexagonalkeys,sharpenedhigh-speedsteelcuttingtool,eight-foot,three-wirepowercordandinstructionbookletareincluded•90VDCmotorwithelectronicspeedcontrollerwithworldwidepowersupport(AC110-240V)•Has a24” (610mm)bed that has17” (431mm)between centers, a2.5”(63mm) resettable “zero” handwheel on the leadscrew, two 2” (51mm)resettable“zero”handwheelsonthecrosslideandfeedscrewandarockertoolpostsubstitutedforthestandardtoolpostusedontheshortbedlathes
LAB GENERATOR
QL-500 EQ-DFN-500 OTF-PECVD-RF
HydrogenGasGenerator NitrogenGasGenerator RFGenerator
•Outputvolumelessthan510liter/min•Outputpressurevariesfrom0.02-0.4
MPa•Hydrogenpuritymorethan<99.999%•3.2litertankvolume•24.10g/hwaterconsumption
•ProducingN2gas formairwithout liquidandchemical• Output nitrogen gas is of 99.99% highpurityandupto500ml/min•Output pressure is adjustable by a valve
from 0 - 0.4 Mpa•Built in oil-less compressing air pumpand
one button operation
•13.56MHzRFfrequency•200Wmaximumreflectionpower•50-80mmtubesizeinsertion•Generateupto500WforPECVDfunction•Noiselessthan50dB•Aircoolinginstalled
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MECHANICAL & MOLECULAR PUMP
ModelFlow Rate (Pressure)
Description
EQ-TW-3A 187liter/min(0.075torr)
Single Step Rotary Vane Vacuum Pump (6.6 CFM) with KF25 Adapter andAlternativeExhaustFilter
EQ-2XZ 120liter/min(0.004torr)
DoubleStageRotaryVaneVacuumPumpwithOilTrap,ExhaustFilter,Bellow&KF-D25Inlet
EQ-YTP-550-LD 220liter/min(0.003torr)
HeavyDutyDoubleStageRotaryVaneVacuumPumpwithExhaustFilter,KF25DAdaptor and Clamp
EQ-KY-SUITE 220liter/min(0.003torr)
KF-25seriesVacuumSuite(Vacuumpump,ExhaustFilter,Clamp,BellowsandValve)
EQ-ADIXEN-2015SD 250liter/min(0.0015torr)
Pfeiffer'sTwo-StageRotaryVaneVacuumPumpwithSSVacuumBellows,QuickClampsAndARightAngleValve
EQ-PT-35-LD 566liter/min(0.007torr)
Pfeiffer'sTwo-StageRotaryVaneVacuumPumpwithSSVacuumBellows,QuickClampsAndARightAngleValve
EQ-PV-HVS-LD 15liter/min(0.007mtorr)
CompactTurbo-molecularVacuumPumpSystemwithGauge,BallValve&SSBellows
EQ-PV-HVS2-LD 15liter/min(0.007mtorr)
Turbomolecular Vacuum Pump Station in Mobile Cart including SS VacuumBellowsWithKf40Port,&LcdDigitalDisplay
EQ-VBS-M1 220liter/m(0.5mtorr)
HeavyDutyDoubleStepRotaryVaneVacuumPumpwithExhaustFilter&KF-D25Inletisinstalledinsideaheavydutymobilecart
EQ-PAC-LD 2340L/minute(0.007mtorr)
ConsistsofaHighQualityDualStageEdwardsPumpasbackingpump(EdwardsRV8)andaturbo-molecularpump(Pfeiffer’s)inMobileCart
EQ-EDWARDS-RV8-LD 141liter/m(1.5mtorr)
EdwardsRV8HighPerformanceTwoStageRotaryVanePumpwithSSVacuumBellows,QuickClampsAndARightAngleValve
EQ-TW-3A
EQ-2XZ
EQ-PT-35-LD
EQ-Adixen-2015SD
EQ-PV-HVS-LD
EQ-VBS-M1
EQ-PV-HVS2
VISCOSITY TESTER
EQ-YTP-550-LD
EQ-OFP-14 EQ-ISP250C-LD EQ-ADIXEN-ACP15-LD EQ-ADIXEN-ACP15-LD
•120l/mpumpingspeed•80-100Torrultimate
pressure •KFD25vacuumpump
connection port•Lessthan60dBnoiselevel
•Maxvacuumleveltill20mTorr•250L/minfor50Hz(300L/minfor60Hz)displacement•Airflushsystemremoves
moisture
•3.7l/s(226l/m)pumpingspeedwithultimatepressureof2.2x10-2Torr•KF25flangeinandKF16flange
out
•3.38torrwithrotationspeedat 1500 rpm•0.50m3/hpumpingspeed•LongerrunninglifeandIdealforsmallgascirculatingsystem
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PRODUCTS CATALOG
VISCOSITY TESTER
MSK-SFM-VT-LD
DigitalSlurryViscosityTester
•Usedforfluidorpasteviscositytestingifwithintherange10mPa·s-10^5mPa·s•Steplessspeedadjustable•TestingAccuracy:±2%(Newtonianfluid)•4differentrotatorsareincluded•RS232portforcomputerdatacollection(softwareincluded)•Dimension:105mm×120mm×160mmSincetheviscosityofbatteryelectrodepaste/slurryplaysanimportantroleduringtheelectrodecoatingonthecurrentcollector,itisnecessarytouseatestertomonitorandthentoadjusttheviscosityduringthemixing
RECIRCULATING WATER CHILLER
EQ-KJ3000 EQ-KJ5000 EQ-KJ5300 EQ-KJ6200
•Waterflowrate:10lpm• 9 liters capacity with maxpumphead10m• Over-flow alarm installedwith digital temperaturedisplay• Cooling via radiator andcooling fan with capacity50W/°C
•Waterflowrate:16lpm• 6 liters capacity with maxpumphead10m•Over-flowalarminstalledwithdigitaltemperaturedisplay• Cooling via radiator andcooling fan with capacity2866BTU/h•Temperaturerange:2-35°C
•Waterflowrate:16lpm•12literscapacitywithmaxpumphead25m• Over-flow alarm installed withdigitaltemperaturedisplay•Coolingviaradiatorandcoolingfanwithcapacity7000BTU/h•Temperaturerange:5-35°C
•Waterflowrate:58lpm• 15 liters capacity with maxpumphead28m•Over-flowalarm installedwithdigitaltemperaturedisplay•Coolingviarotarycompressorwithcapacity17500BTU/h•Temperaturerange:5-35°C
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PLASMA CLEANER
Model Features
EQ-PDC-32-G-LD
•AdjustableRFpowerwhichisLow,Medium,andHigh•3”diameterx6.5”lengthhighpurityquartzchamberisincluded•Aremovablefrontcoverassemblyisincluded•Therateoforganicremovalisabout10nm/min
EQ-PDC-36G
•AdjustableRFpowerwhichisLow,Medium,andHigh•3”diameterx6.5”lengthmadeofhighpurityquartzchamber•Avacuumsensorisinstalledonthehingeddoorwithindicator•Therateoforganicremovalisabout10nm/min
EQ-PDC-001-LD
•AdjustableRFpowerwhichisLow,Medium,andHigh•Includesa6”diameterx6.5”lengthPyrexchamberandanintegralswitchfor
a vacuum pump•Itshingedcoverfeaturesamagneticclosureandaviewingwindow•Vacuumpumpisincludedforquickusage•Therateoforganicremovalisabout20nm/min
EQ-PCE-80
•RFpowerisadjustablewithin0-100W•8.5”O.Dx8.2”I.Dx12.5”Lhighpurityquartchamber•TotallyRFradiationshieldwithzeroRFleaking•6”colortouchscreentocontrolallparameterssuchasvacuumlevel,gasflowrate,RFpowerlevel,andcleaningtime•Vacuumpumpandmassflowmeterareincludedforquickusage•Therateoforganicremovalisabout20nm/min
EQ-PDC-32-G-LD
EQ-PDC-36G
EQ-PCE-80
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GAS DELIVERY SYSTEM
Model Features Gas/Fluid Flow Rate
EQ-CGM-2F
•Onestainlesssteelmixingtankforbettergasmixing•Includingdialpressuregauge(0-1.0MPa)•Compactsize:340Lx300Dx180Hmm
Two rotameter with flow raterangefrom16to160ml/min
EQ-CGM-2Z
•Fitting&Valves:316SSmaterial•Gasmixingtanksize:80diax120mm•Dimension:600Lx600x650mm
Two mass flow controller withdisplayand1%FSaccuracyController1:1~199SCCMController2:1~499SCCM
EQ-GSL-3F-SS
•Includingdialpressuregauge(0-0.15MPa)•Twochannelgasesflowintoagasmixercontainerandonegaschannelindependent•Compactsize:600Lx600Dx650Hmm
Three rotameter with variousflow rate range and 4% FSaccuracyA:10-100ml/minB:16-160ml/minC:25-250ml/min
EQ-CGM-3F-PTFE
•500mlgastankmadeofPTFE•Includingdialpressuregauge(0-1.0MPa)•Twochannelgasesflowintoagasmixercontainerandonegaschannelindependent•Compactsize:340Lx300Dx180Hmm
Three anti-corrosive rotameter made of PTFE material withflowing rates of 10 - 160mL/min
EQ-GSL-3F-PTFE
•1000mlgastankmadeofPTFE•Eachchannelgaswillflowintothetankformixingbeforeflow-out•Siize:600Lx600Dx650Hmm
Three anti-corrosive rotameter of PTFEmaterialwith flowingratesof10-1000mL/min
EQ-GSL-3Z
•Fitting&Valves:316SSmaterial•Gasmixingtanksize:80diax120mm•Dimension:600Lx600Dx650Hmm
Threemassflowcontrollerwithdisplayand1%FSaccuracyController1:0~100SCCMController2:1~199SCCMController2:1~499SCCM
EQ-GSL-3Z-103
•Onerotarymechanicalpumpasfirststagevacuumforachievingvacuumof10-2 torr•Onemolecularpumpassecondstageforachievingvacuumof5×10-7 tor•Installeddigitalvacuumgaugeandmonitor
Threemassflowcontrollerwithdisplayand1%FSaccuracyController1:0~100SCCMController2:20~200SCCMController2:50~500SCCM
EQ-GSL-4ZCC
•Computercontrolled(Laptopandsoftwareincluded)•Fitting&Valves:316SSmaterial•Gasmixingtanksize:80diax120mm•Dimension:600Lx600Dx650Hmm
Four mass flow controller withdisplayand1%FSaccuracyController1:0~100SCCMController2:1~199SCCMController3:1~199SCCMController4:1~499SCCM
EQ-GSL-4Z
•Fitting&Valves:316SSmaterial•Gasmixingtanksize:80diax120mm•Dimension:600Lx600Dx650Hmm
Four mass flow controller withdisplayand1%FSaccuracyController1:0~100SCCMController2:1~199SCCMController3:1~199SCCMController4:1~499SCCM
EQ-GSL-4Z-LCD
•PLCtouchpanelcontrol•Fitting&Valves:316SSmaterial•Gasmixingtanksize:80diax120mm•Dimension:600Lx600Dx650Hmm
Four mass flow controller withdisplayand1%FSaccuracyController1:0~100SCCMController2:1~199SCCMController3:1~199SCCMController4:1~499SCCM
EQ-GSL-6Z
•Fitting&Valves:316SSmaterial•Gasmixingtanksize:80diax120mm•Dimension:600Lx600Dx650Hmm
Four mass flow controller withdisplay and 1% FS accuracy(valuecanberequested)Controller1till6:0~100SCCM
EQ-CGM-3F-PTFE
EQ-GSL-6Z
EQ-GSL-4Z-LCD
EQ-GSL-4ZCC
EQ-GSL-3F-PTFE
Copyright © All Rights Reserved
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PRODUCTS CATALOG
MISCELLANEOUS
LVD- FI MSK-NMP-1 GF-20A
LiquidVaporizationSystem DualFiltrationSystemforNMP PPMGradeDualInertGasPurifier
•Precision digital controlwith+/- 0.01%FSaccuracy•Flowraterange:0-80ml/minadjustable•LiquidandcarryinggasaregothroughaSS316coil,which isheatedbyabuilt insmallfurnaceupto250ºC•OilMistReductionUnitwithKF-25AdapterandQuickClampareincluded
•Dualfiltrationlevel•NMPfiltering(N-Methyl-2-pyrrolidone)•Capacity:600mm³/h•Recycleratelessthan80%•Fillinggastemperature:150°C•Canbeusedtofilterthevaporformedfromthe process of coating and drying withdual-filtrationlevelinLi-lonbatteryR&D
•Inputgaspurityrequirement:<1000ppm(99.9%)•Output :Removalof impurities to<0.1
ppm • Can purify inert gas up to 6 standardtanks•Noheatersorpowerrequired
EQ-RMP-1 EQ-RMP-2-LD PF-02-PPM PF-H2O-PPM
AutoRecirculatingMoisturePurificationSystem
AutoRecirculatingMoisture&OxygenPurificationSystem
PPMGradeInertGasPurifierforDe-Oxygen
PPMGradeInertGasPurifierforDe-Humidity
•Automaticmoistureremoveto<2ppm• Precision Humidity Analyzeris installedonthePurificationSystem with accuracy of +/-0.1 ppm•Cansoakmoistureupto1.5kg• 6” color PLC touch panel is
included
•Automaticmoistureandoxygenremovalto<2ppm• Precision Humidity AnalyzerandoxygensensorareinstalledonthePurificationSystemwithaccuracyof+/-0.1ppm•Cansoakmoistureupto1.5kg• 6” color PLC touch panel is
included
•Inputgaspurityrequirement:<1000ppm(99.9%)•Output:Removalofimpuritiesto<0.1ppm• Can purify inert gas up to 3standardtanks•Noheatersorpowerrequired
•Inputgaspurityrequirement:<1000ppm(99.9%)•Output:Removalofhumidityto<0.1ppm• Can purify inert gas up to 3standardtanks•Noheatersorpowerrequired
EQ-OM-OS524E-LD EQ-W3000 EQ-RH-800 EQ-RH-606B
InfraredLaserThermometer TraceOxygenAnalyzer PrecisionHumidityAnalyzer Humidity&TemperatureMonitor
•Measurementrangefrom538°C-2482°C•Built-inLasersighting•100msresponsetime•Spectralresponsewithin2to2.5microns
•Threeauto-rangingscales:0.01 ppm - 3000 ppm•ZrO2fuel-cellastheoxygen
sensor•Up-limitandlow-limitalarmsignalprogrammable
•Humiditylevelupto999.9ppm•Workingpressurerangeis0.1
Pa - 30 MPa•Gasflowraterangeis1-5lpm•Alarmsignalwhenhigherthan20mAorlowerthan4mA
•Temperaturerange:0°C-80°C•Humidityrange:2%RHto95%RH•Accuracy:±3%RH•Alarmcanbeset
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TOTAL SOLUTION FOR ADVANCED MATERIAL RESEARCHLA
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HEATING ELEMENT
Model Dimension DescriptionMax Working Temperature
EQ-HEL1750-30x270 30mmx270mm Super 1750°C MoSi2HeatingElement 1700°C
EQ-HEL1750-30x300 30 mm x 300 mm Super 1750°C MoSi2HeatingElement 1700°C
EQ-HEL1750-30x330 30 mm x 330 mm Super 1750°C MoSi2HeatingElement 1700°C
EQ-HEL1750-40x300 40 mm x 300 mm Super 1750°C MoSi2HeatingElement 1700°C
EQ-HEL1750-30x360 30 mm x 360 mm Super 1750°C MoSi2HeatingElement 1700°C
EQ-HEL1800-30x270 30mmx270mm Super 1800°C MoSi2HeatingElement 1750°C
EQ-HEL1800-30x330 30 mm x 330 mm Super 1800°C MoSi2HeatingElement 1750°C
EQ-HEL1800-30x300 30 mm x 300 mm Super 1800°C MoSi2HeatingElement 1750°C
EQ-HEL1800-30x360 30 mm x 360 mm Super 1800°C MoSi2HeatingElement 1750°C
EQ-HEL1800-30x420 30mmx420mm Super 1800°C MoSi2HeatingElement 1750°C
EQ-HEL1800-40x300 40 mm x 300 mm Super 1800°C MoSi2HeatingElement 1750°C
EQ-KSKSL-1800-M-LD 30 mm x 330 mm KanthalSuper1800°CMoSi2HeatingElement 1750°C
EQ-KSKSL-1800-S-LD 30mmx270mm KanthalSuper-1800°CMoSi2HeatingElement 1750°C
EQ-KSKSL-1800-ML-LD 30 mm x330 mm KanthalSuper1800°CMoSi2HeatingElement 1750°C
EQ-KSKSL-1800-L-LD 30 mm x 360 mm KanthalSuper1800°CMoSi2HeatingElement 1750°C
EQ-KSKSL-1900-S-LD 30mmx270mm KanthalSuper-1900°CMoSi2HeatingElement 1850°C
EQ-KSKSL-1900-M-LD 30mmx290mm KanthalSuper-1900°CMoSi2HeatingElement 1850°C
EQ-KSKSL-1900-ML-LD 30 mm x 330 mm KanthalSuper-1900°CMoSi2HeatingElement 1850°C
EQ-KSKSL-1900-L-LD 30 mm x 360 mm KanthalSuper-1900°CMoSi2HeatingElement 1850°C
EQ-GSL1500-HEL 14 mm x 368 mm 1500°CSiCElectricHeatingElements 1500°C
EQ-OTF1500-HEL 12mmx520mm 1500°CSiCElectricHeatingElements 1500°C
EQ-1600sp-HEL-12-LD 12mmx520mm KanthalGLOBARSGSiCHeatingElement(1650°CGrade) 1650°C
EQ-1600sp-HEL-6-LD 12mmx381mm KanthalGLOBAR-SGSiCHeatingElement(1650°CGrade) 1650°C
EQ-KSL-1400A2B-HEL 42mmx360mm SiCHeatingelementforKSL-1400A2BMuffleFurnace 1400°C
EQ-KSL-1400A4-HEL 42mmx500mm SiCHeatingElementforKSL-1400A4MuffleFurnace 1400°C
EQ-KSL-1400X-HEL 42mmx410mm SiCHeatingelementforKSL-1400XMuffleFurnace 1400°C
EQ-KSL-1500XS-HEL 42mmx270mm SiCHeatingelementforKSL-1500X-SMuffleFurnace 1500°C
EQ-RTP-HALOGEN-LIGHT 10(dia.)x303(l)mm HalogenlightHeater(1KW)forCompactRTPTubeFurnace
EQ-MHEL - MoHeatingCoilforMTIHydrogenMuffleFurnace
EQ-RTP-HALOGEN-LIGHT
SiC Spiral Type
SiC U TypeMoSi2 U Type
FURNACE HEATING MODULE
Model Description
EQ-KSL-1100X-MODULE FurnaceHeatingModuleforKSL-1100X
EQ-KSL-1100X-S-MODULE FurnaceHeatingModuleforKSL-1100X-S
EQ-OTF-1200X-MODULE FurnaceHeatingModuleforOTF-1200X
EQ-OTF-1200X-S-MODULE FurnaceHeatingModuleforOTF-1200X-S
EQ-GSL-1100-MODULE FurnaceHeatingModuleforGSL-1100X-EQ-GSL1100
EQ-KSL-1100X-MODULE
EQ-OTF-1200X-MODULE
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THERMAL BLOCKS
www.mtimalaysia.com || www.mti-indonesia.co.id
EQ-F-ADAPTOR-D60
Model Description
EQ-2-1-ADAPTOR Refractoryceramicadaptorforfitting1’’processingtube
EQ-F-ADAPTOR-D2 FiberaluminatubeadaptorforOTF1200X2”processingtube
EQ-F-ADAPTOR-D60 FiberaluminatubeadaptorforOTF1200X60mmprocessingtube
EQ-F-ADAPTOR-D1 FiberaluminatubeadaptorforOTF1200X1”processingtube
EQ-RCS-D60 Refractoryceramicsheathfor60mmprocessingtube
EQ-RCS-D80 Refractoryceramicsheathfor80mmprocessingtube
EQ-RCSH-D100 Refractoryceramicsupportfor100mmprocessingtubeEQ-RCS-D80
ALUMINA FOAM BLOCK
Model Diameter (mm) Length (mm)
EQ-F-T-BLOCK-18 18 40
EQ-F-T-BLOCK-20 18 50
EQ-F-T-BLOCK-35 35 65
EQ-F-T-BLOCK-42 42 65
EQ-F-T-BLOCK-52 52 65
EQ-F-T-BLOCK-65 65 65
EQ-F-T-BLOCK-70 70 65
EQ-F-T-BLOCK-92 92 65
EQ-F-T-BLOCK-120 120 75
EQ-F-T-BLOCK-140 140 100
EQ-F-T-BLOCK-206 192 65
Model EQ-QTB-5 EQ-QTB-8 EQ-QTB-8-H EQ-QTB-11
Description QuartzblockwithhighpurityAl2O
3fiberceramicinside
QuartzThermalBlockfor8”quartztubeFurnace
QuartzblockwithhighpurityAl2O
3fiberceramicinside
QuartzblockwithhighpurityAl2O
3fiberceramicinside
Thickness (mm) 76.2 73.7 73.7 120
O.D (mm) 109.2 185.4 185.4 270
QUARTZ BLOCK
Model EQ-QBLOCK-40 EQ-QBLOCK-50 EQ-QBLOCK-70 EQ-QBLOCK-90
Diameter (mm) 40 50 70 90
Length (mm) 60 60 60 60
O.D (mm) 50 60 80 100
THERMAL ADAPTOR
INSULATION TAPE
Model EQ-ABT-2X50 EQ-ABT-3X50 EQ-WT-2X100 EQ-WT-3X100
Width 50.8 mm 76.2mm 50.8 mm 76.2mm
Thickness 1.6 mm 1.6 mm 1.6 mm 1.6 mm
Length 50 ft 50 ft 100 ft 100 ft
Continuous Temperature 800°C 800°C 800°C 800°C
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HIGH TEMPERATURE O-RING
SILICONE RUBBER O-RING
Model I.D (mm) O.D (mm) W (mm)
EQ-SOR-63 62 72 5
EQ-SOR-76 75 76 5
EQ-SOR-89 86 96 5
EQ-SOR-100 98 100 5
EQ-SOR-110 108 114 4.5
EQ-SOR-128 118 128 5
EQ-SOR-130 128 130 5
EQ-SOR-152 148 152 5
EQ-SOR-40 40 40 5
EQ-SOR-50 48 50 5
EQ-SOR-60 58 60 5
EQ-SOR-80 79 80 5
EQ-SOR-25 24 25 3.5
EQ-SOR-VBF190 200(2pcs)and195(1pcs) - 7(2pcs)and3.5(1pcs)
EQ-SOR-TCGASKET - 14 -
EQ-SOR-TCRING 7 - 3
EQ-SOR-GSL8-215 213 - 5.8
EQ-SOR-GSL8-230 230 - 5.3
HIGH TEMPERATURE COATING & ADHESIVE
Model Description
EQ-634-SIC-LD 1400°CSiliconeCarbiderefractorycoating
EQ-634-YO 1500°CYttriumOxideprotectivecoating
EQ-CAA-2-LD 1650°CHi-PurityAluminaAdhesiveforbonding&repairing
EQ-634-AL-LD 1760°CHi-PurityAluminacoating
EQ-634-ZO-LD 1800°CHi-PurityZirconiacoating
EQ-904-ZO-LD 2200°CZirconiaUltraHi-Tempceramicadhesive
EQ-SEAL-4030-LD 593°CSpecialcoatingforfiberousrefractory
COPPER O-RING
Model I.D (mm) O.D (mm) Thickness (mm)
EQ-ORING-CU27 20 27 2
EQ-ORING-OFCU27 20 27 2
EQ-ORING-CU48 36.5 48 2.4
EQ-ORING-CU82 64 81.9 2.2
EQ-ORING-CU98 80 98 2.2
OVEN SEALING O-RING
EQ-OR-DHG9015 HighTemperatureSealingO-RingforDHG-9015ASOven
EQ-OR-DHG9070 HighTemperatureSealingO-RingforDHG-9070ASOven
EQ-OR-DZF6020 HighTemperatureSealingO-RingforDZF-6020Oven
EQ-OR-DZF6050 HighTemperatureSealingO-RingforDZF-6050Oven
EQ-OR-DZF6210 HighTemperatureSealingO-RingforDZF-6210Oven
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REFRACTORY PLATE
Model Description
EQ-ALPLATE-25181 Mullitesampleplate(250x180x8mm)withmaxworkingtemperatureat1400°C
EQ-ALPLATE-1512 RefractoryAluminaboard(150x120x10mm)withmaxworkingtemperatureat1500°C
EQ-PMF-1600B PolycrystallineMulliteblankettypewithmaxworkingtemperatureat1600°C
EQ-RFZB-2200 Zirconiarefractoryboard(12”x12”x1”)withmaxworkingtemperatureat2200°C
EQ-RFAB-1800 Aluminarefractoryboard(35.5”x24”x2.5”)withmaxworkingtemperatureat1800°C
THERMOCOUPLE & CABLIBRATION KIT
Model Description
EQ-TC-K-17 Ktype(Ni-Cr/Ni-Al)170mm(6.7”)lengthwithceramicsheath
EQ-TC-K-22 Ktype(Ni-Cr/Ni-Al)220mm(8.7”)lengthwithceramicsheath
EQ-TC-K-S Ktype(Ni-Cr/Ni-Al)forOTF-1200X-S
EQ-TC-K-CALI-12S-LD Ktype1/4”ODx12”Lwithalloysheath,andmaleplugforcalibration
EQ-TC-K-CALI-12S-DT-LD Ktype1/4”ODx12”Lwithalloysheath,detectiveprobeandmaleplugforcalibration
EQ-TC-K-CALI-24S-LD Ktype1/4”ODx24”Lwithalloysheathandmaleplugforcalibration
EQ-TC-K-CALI-36S-LD Ktype1/4”ODx36”Lwithalloysheathandmaleplugforcalibration
EQ-TC-K-CALI-48S-LD Ktype1/4”ODx48”Lwithalloysheathandmaleplugforcalibration
EQ-TC-K-CALI-12S-3MM-LD Ktype3mmODx12”Lwithalloysheathandmaleplugforcalibration
EQ-TC-S-GSL-13 Stype(Pt-RhtoPt)5”lengthwithceramicsheath
EQ-TC-S-KSL-15 Stype(Pt-RhtoPt)8”lengthwithceramicsheath
EQ-TC-S-KSL-14 Stype(Pt-RhtoPt)9.5”lengthwithceramicsheath
EQ-TC-B-GSL-16 Btype(Pt-RhtoPt-Rh)9”lengthwithceramicsheath(Upto1700°C)
EQ-TC-B-GSL-18 Btype(Pt-RhtoPt-Rh)9”lengthwithZirconiasheath(Upto1800°C)
EQ-TC-K-22 Ktype(Ni-Cr/Ni-Al)220mm(8.7”)lengthwithceramicsheath
EQ-USB-TC 8channelscomputerizedtemperaturemonitorwithsoftware
EQ-TC-CALIBRATOR-WIRE-LD Ktypethermocoupleextensionwirewithminimaleplug
EQ-TC-CALIBRATOR-LD PortabledigitaltemperaturecalibratorwithusbandRS232interface&software
EQ-TC-C-16-LD Ctype(W-WLa)1/4"ODx16"LengthwithMolybdenumsheathupto2300°C
EQ-TC-C-10-LD Ctype(W-WLa)1/4”ODx10”LengthwithMolybdenumsheathupto2300°C
EQ-TC-K-22O KtypeforOTF-1200X-S
EQ-TC-C-20-LD Ctype(W-WLa)1/4”ODx20”LengthwithMolybdenumsheathupto2300°C
EQ-TC-K-17
EQ-TC-CALIBRATOR-WIRE
EQ-USB-TC
EQ-TC-CALIBRATOR
RTP FURNACE TYPE ACCESSORIES
EQ-AIN-HOLDER EQ-RTP-ACC-01 EQ-RTP-ACC-02
3’’AluminumNitrideSubstrateforRTPFurnace’sSampleHolder
SampleHolderforRTPfurnacewithQuartz,stabilityinuseunder1200ºC
OnepairofquartzinsulatingheatshielddisksforRTP-1000-D4
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SOFTWARE FOR TEMPERATURE CONTROLLER
Model Flow Rate Description
EQ-FM-1000CC 100-1000cc/min Compactdirectreadflowmeterwith5.35”heightscaleand0.32”outlet
EQ-FM-160CC 16-160cc/min Compactdirectreadflowmeterwithtwomalefittings
EQ-FM-100CC 10-100cc/min Compactdirectreadflowmeterwith4”heightscale,1/4”NPSconnectorandonehosebarbfor1/4’’I.Dtube
EQ-FM-60CC 0-60cc/min Compactdirectreadflowmeterwith4”heightscale,one1/4”NPSconnectorandonehosebarbfor1/4’’I.Dtube
EQ-MFC-1-LD 0-200cc/min Precisionmassflowcontrollerwithdigitaldisplay&stainless steel body EQ-FM-60CC
EQ-VPC-30D
EQ-VPC-30
Model Pressure Description
EQ-DVPG-LD Up to 100 psi •1/4”maleNPTwith4digitLCD(9Valkalinebatterypowered)
EQ-CVM-YZ60 -0.1 to 0.15 Mpa •3/8“NPSfittingwith50mmdiameterdialsize
EQ-PGC-554-LD 3.8x10-5to1125Torr •Fullyceramiccoatedsensorunitforhighlycorrosiveapplications•Fastatmosphericdetectioneliminateswaitingtimeandshortensprocesscycle
EQ-CVM-211-P-LD 10-4to1000Torr •ConvectionenhancedPiranivacuumgaugemodulewithon-boardcontroller
EQ-KJT-2V 0-230KPa •OnepressuretransducerwithM14maleport:0-230kPawith1%accuracy•Onecontrolboxwithdigitalpressuredisplayandcontroller
EQ-KJF-2V 10-4to1000Torr •Twosolenoidvalveswith1/4NPT(F)connectingports•Onedigitalpressuregaugewith1/8to1/4NPTadapter:10-4to1000Torr
EQ-SN-VALVE 0.15-0.8 Mpa •Solenoidvalveforautomaticgascontrolsystem•Cleangasmediacompatibility
EQ-DHPG Up to 60 Mpa •1/4”maleNPTwith4digitLCD(22VDCpoweradapter)
EQ-VPC-30D 0to800Torr •DualValvedigitalvacuumandpressuregauges/controllersforclosedsystem•Clean,dry,non-corrosive,inertgasesmediacompatibility
EQ-VPC-30-LD 0to800Torr •In-linedigitalvacuumpressurecontroller•Clean,dry,non-corrosive,inertgasesmediacompatibility
EQ-DVPG EQ-PGC-554EQ-CVM-211
EQ-KJF-2V
EQ-KJT-2V
FLOW METER & CONTROLLER
EQ-MFC-1-LD
PRESSURE GAUGE & CONTROLLER
EQ-MTS02
TemperatureControlSystemsetsupacommunicationlinkbetweenthecomputerandacompatibleMTIfurnacewiththe518/708PLCorBT119(pleaseselectthecorrectversionintheoptionalbar).ThissetupenablesthecustomertoefficientlycontrolandmonitorthefurnacetemperatureviaaGUI(GraphicalUserInterface) in real time
• Can be used for MTI furnaces with 518P controller except GSL-1100X-S, KSL-1200-S and OTF-1200X-S.•Onecontrolmodule,serialportcontrollercableandonediscofsoftwarepackageareincluded•Forcustomerswhoneedtoupgradetheirexistingfurnaceswiththissystem,adetailedoperationmanualforitsinstallationandapplicationisavailableForMTIfurnaceswith518PcontrollersuchasOTF-1200X,OTF-1500X,GSL-1600X,1700X&1800X,pleaseselectEQ-MTS02-Y• ForGSL-1100X,OTF-1200X-S, andKSL-1100-S furnaceswith BT119 controller, please select EQ-MTS02-B•ForMTIHighPressureFurnaces,pleaseselectmoduleEQ-MTS02-YP
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FITTINGS, PIPES & VALVES
VALVESEQ-KF-VALVE-D25 KF25VacuumRight-AngleValve
EQ-KF-VALVE-D40 KF-40VacuumRight-AngleValve
EQ-VALVE-ON/OFF On-offvalvewith1/4”BSPmale/femaleconnector
EQ-KF25-1/4VCR-V KF25Fittingto1/4’’Swagelok®TubeFittingwithSSNeedleValve
EQ-SN-VALVE SolenoidValveforAutomaticGasControlSystem,24VDC
HIP-RV10-MTI AdjustableHighPressureReliefValveinpressurerangeof1000-10,000PSI
6LVV-ALD3FR4-P-C ALDValve,1/4in.FemaleVCR,SC-01,NCActuator
6LVV-ALD3TC333P-C ALDValve,3-Port,CPattern,1/4in.FemaleVCRFittings
FITTINGSEQ-TPE SST-Piecewith1/4NPS&ExtendedBranchesFittingConnector
EQ-TP-14NPS SST-Piecewith1/4NPS&M14FittingConnector
EQ-TVF-1/4 TeeTypewithTwoSwagelok®Fittingfor1/4’’Tube
EQ-FIT-14-18P 304SS1/4”O.DTubeFittingx1/4”BSPPMaleConnector
EQ-UC-14NPS Stainlesssteel1/4NPSmaleunionconnector(1/4NSPmale-1/4npsmale)
EQ-FIT-14S18T 316SSHexBushing:1/4MX1/8F
EQ-FIT-3-8-BARBED 3/8’’BarbedHoseFitting
SUPPORTS, BELLOW & TUBEEQ-FLS-KF25 AdjustableTubeSupport(320-510mmH)forKF25Flanges
EQ-FLS-KF40 AdjustableTubeSupport(320-510mmH)forKF40Flanges
EQ-SWA-HOSE-1-LD 316LSS1/4”Swagelok®FlexibleHosewith1/4”NPTMaleConnector
EQ-KF-PIPE-D16-1000 KF-16flexibleStainlessSteelVacuumHose(Bellows)-1”diax1000mmLengthforhighvacuumfurnace
EQ-KF-PIPE-D25-600 KF-25flexibleStainlessSteelVacuumHose(Bellows)-1”diax600mmLengthforhighvacuumfurnace.
EQ-KF-PIPE-D40 KF-D40VacuumBellows-1MeterLengthforhighvacuumfurnace.
EQ-KF-PIPE-D25 KF-D25flexibleStainlessSteelVacuumHose(Bellows)-1”diax1MeterLengthforhighvacuumfurnace.
EQ-KF-PIPE-D40-600 KF-D40VacuumBellows-600mmLengthforhighvacuumfurnace.
QUICK CLAMP & ADAPTORKF16, 25 & 40 BlankFlangeofKFFittings
EQ-RU-KF40-25 KF40toKF25ReducerUnion
EQ-RT-KF-40-25-40 ReducingTPieceKF40-25with2KF40portsand1KF25portforPeifferPump
EQ-NPS-KF25-S 1/4NPStoKF-25Adapter
EQ-KF-CLAMP-D25 KF-25QuickClampwithRubberO-Ring
EQ-KF-CLAMP-D40 KF-40QuickClampwithRubberO-Ring
EQ-KF-CLAMP-D16 QuickClampwithRubberO-RingforKF-D16Vacuumadaptor
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SEALING FLANGES & ACCESSORIES
Model Description
EQ-FL-25 Vacuumsealingassemblyfor1"diametertubefurnacewithvalve/vacuummeter
EQ-FG-40WC Sealingflangewithwatercooljacketfor40-42mmdiametertube
EQ-FG-25WC SealingFlangewithWaterCoolJacketfor1”(25-26mm)dia.Tube
EQ-FG-76WC WaterColdSealingFlangefor3”dia.Tube
EQ-FL-50KF25-FT (D/M) Vacuumsealingassemblyfor50mmdiatubefurnacewithKF-25vacuumport&1/4feedthrough
EQ-FL-50 Sealingflangeassemblyfor50mmdiametertube
EQ-FG-50WC Watercooledsealingflangefor50mmdiameterprocessingtube
EQ-FL-80 VacuumSealingAssemblyfor80-82mmdiaTubeFurnacewithValve/VacuumMeter
EQ-FL-125-LV CVDspecial5”flangewith1/4”tubefittinginletandoutlet,watercoolingandflangesupport
EQ-HFR-50 Vacuumsealingassemblyforsingleend50mmdiameterwithvacuumvalves
EQ-HFL-50 Vacuumsealingassemblyforsingleend50mmdiametertubewithvacuummeter/valve
EQ-FL60-PTFE PTFEsealingflangewithdigitalpressuregauge,valves&fittingsfor60mmdiameterprocessingtube
EQ-FG-60WC Sealingflangewithwatercooltubingfor60mmdiametertube
EQ-FL-60KF25-FT (D/M) Vacuumsealingassemblyfor60mmdiatubefurnacewithKF-25vacuumport&1/4feedthrough
EQ-FL-60 Vacuumsealingassemblyfor57-60mmdiatubefurnacewithvalve/vacuummeter
EQ-FG-60TCV Sealingflangeforsingleend60mmdia.Tubewith1/4"fitting&vacuumvalve
EQ-HFL-60 Vacuumsealingassemblyforsingleend60mmdia.Tubewithvacuummeter/valve
EQ-HFR-60 Vacuumsealingassemblyforsingleend60mmdiawithvacuumvalves
EQ-FL-60K25-1/8NPT Vacuumflangewithdigitalvacuumgauge,ballvalveandKF25Dadaptorsfor60mmdiatube
EQ-HFL-76 Vacuumsealingassemblyforsingleend76mm(3")diametertubewithvacuummeter/valve
EQ-FL-75 Vacuumsealingassemblyfor3"diatubefurnacewithvalve/vacuummeter
EQ-FG-80PTFE PTFEsealingflangewithvalvesfor80mmdiameterprocessingtube
EQ-FL-80KF25-FT SealingFlangefor80mmdia.QuartzTubewith1/4”Feed-through,TwoValves&KF-25VacuumPorts
EQ-FG-80TCVF Sealingflangefor80mmdiameterquartztubewith1/4"feed-through,twovalves&KF-25vacuumports
EQ-HFR-80 Vacuumsealingassemblywithvacuumvalvesforsingleend80mmdiaprocessingtube
EQ-FG-80WC Watercoldsealingflangefor80mmdiametertube
EQ-HFL-80 Singleendvacuumsealingassemblyfor80mmdiameterquartztubewithvacuummeter/valve
EQ-HFL-80W30 Vacuumsealingflangewithviewwindowforsingleend80mmdiameterprocessingtube
EQ-FL-101KF25-HG Hingedvacuumsealingassemblywithflangesupportfor101mmdiatubefurnace
EQ-FL-101KF25-FT (D/M) Vacuumsealingassemblyfor101mmdiatubefurnacewithKF-25vacuumport&1/4feedthrough
EQ-FG-100WC Watercoldsealingflangewihvalves&vacuumguagefor100mmdiametertube
EQ-FG-100TCV Sealingflangeforsingleendtubewith1/4"thermocouplefeedthrough&vacuumvalve
EQ-RTP-KF25-16 KF-D25highvacuumflangefor4''diametertubeofRTPfurnace
EQ-FL-101 Vacuumsealingassembly(flangelipI.D.101mmforquartztube)withvacuumgaugeandvalves
EQ-FL-104 Vacuumsealingassembly(flangelipI.D.104mm)withvacuumgaugeandvalves
EQ-FL-114 Vacuumsealingassemblyfor4.5"(114mm)diatubefurnacewithvacuummeter/valves
EQ-FL-125 Vacuumsealingassembly(flangelipI.D.130mm)withKF-25Dadaptor&vacuumgaugefor5"processingtube
EQ-FL-152 Hingedtypevacuumsealingassemblyfor6"(152mm)diaprocessingtubewithKFD25vacuumport
EQ-FL-85 HingedtypevacuumsealingflangewithKF-25Dadaptorfor8.5"(216mm)processingtube
EQ-FL-80KF25-HG Hingedvacuumsealingassemblywithflangesupportfor80mmdiatubefurnace
EQ-FG-80PTFE-OE PTFEsealingflange(oneend)withKF-25portfor80mmdiameterprocessingtube
EQ-FL-279 HingedtypevacuumsealingflangewithKF-25Dadaptorfor11"processingtube
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QUARTZ TUBE
Model Dimension n(I.D x O.D x L) Description
EQ-QZTUBE-25GE-450 22x25x450mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-25GE-610 22x25x600mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-25GE-1000 22x25x1000mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-40GE 36x40x1219mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-HQT25 19.8x25x180mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-50GE-450 44 x 50 x 450 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-50-44-24-GE 44 x 50 x 600 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-50-46-24-GE 46 x 50 x 610 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-60GE-1200 55x60x1219mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-60GE-1400 55 x 60 x 1400 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-60G-1000 55 x 60 x 1000 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-HQT50 44 x 50 x 300 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-HQT60 54x60x250mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-75D 70x76.2x1000mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-80D40 72x80x1000mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-80D-48 75x80x1219mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-80D-1400 72x80x1400mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-80D-1540 72x80x1540mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-HQT80 73 x 80 x 300 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-100 92x101x1000mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-101D-1400 92x101x1400mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-101D-1480 92x101x1480mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-101D-1200 93x101x1200mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-RTP 103 x 110 x 411 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-DI-1540 94x102x1540mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-115-LD 110 x 115 x 1500 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-125GE-1400 120x130x1400mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-DE-1480 122x130x1480mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-6-1500 143x152x1500mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-R - 4”TubeforBothMTISingleZone&Dual-ZoneRotaryTubeFurnaces
EQ-QZTUBE-R5 - 5”TubeforMTIThreeZoneRotaryTubeFurnace-EQ-QZTube-R5
EQ-HQT100 92x100x300mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-6-1300 143x152x1300mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-216RF 206x216x1524mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-216GE 206x216x1295mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-279GE-1 269x279x1295mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-HQT200 192x203340mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-50GE-1219 44x50X1219mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-50GE-1000 46 x 50 x 1000 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-80D-1800 72x80x1800mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
EQ-QZTUBE-6-1500 143x152x1500mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC
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OTHER TYPES OF PROCESSING TUBE
ModelDimension
(I.D x O.D x L)Description
EQ-TG-60D-46L 50.8 x 63.5 x 1168 mm HighPurityGraphiteTubewithpurityof>99.999%
EQ-TG-60D-26L 50.8 x 63.5 x 660 mm HighPurityGraphiteTubewithpurityof>99.999%
TUBE-SS-60-4-12 52x60x1200mm HeatResistanceAlloySeamlessTubewithmaxtemperatureof1000°C
TUBE-SS-80-4-12 72x80x1200mm HeatResistanceAlloySeamlessTubewithmaxtemperatureof1000°C
TUBE-GH60-4-12 52x60x1200mm Ni-BasedSuperAlloySeamlessTubewithmaxtemperatureof1000°C
EQ-TA-40D-700 38x42x700mm HighpurityAlumina(Al2O
3)withmaxtemperature1750°C
EQ-TA-50D-M700 41.8 x 51.5 x 700 mm HighpurityAlumina(99.8%)CeramicTubewithmaxtemperature1800°C
EQ-TA-50D-M1000 44x50.2x1000mm HighpurityAlumina(99.8%)CeramicTubewithmaxtemperature1800°C
EQ-TA-50D-M1200 43.7x50.3x1200mm HighpurityAlumina(99.8%)CeramicTubewithmaxtemperature1800°C
EQ-TA-60D-M610 60.6 x 53.5 x 610 mm HighpurityAlumina(Al2O
3)withmaxtemperature1750°C
EQ-TA-60D-M800 60.6 x 53.5 x 800 mm HighpurityAlumina(Al2O
3)withmaxtemperature1750°C
EQ-TA-60D-M1000 60.6 x 53.5 x 1000 mm HighpurityAlumina(Al2O
3)withmaxtemperature1750°C
EQ-TA-60D-M1200 60.6x53.5x1200mm HighpurityAlumina(Al2O
3)withmaxtemperature1750°C
EQ-TA-80D-M1000 74.5 x 80.4 x 1000 mm HighpurityAlumina(Al2O
3)withmaxtemperature1750°C
EQ-TA-82D-M1000-LD 72x81.7x1000mm HighpurityAlumina(Al2O
3)withmaxtemperature1750°C
EQ-TA-82D-M1200-LD 72x81.7x1200mm HighpurityAlumina(Al2O
3)withmaxtemperature1750°C
EQ-TA-101D-M1000 92.3x101.7x1000mm HighpurityAlumina(Al2O
3)withmaxtemperature1750°C
EQ-MC-AXF1180-19-24-1-LD 1.57 x 6.35 x 631 mm 4HolesRoundFourBoreTube,Alumina99.8%
MC-AXF1180-19-24-2-LD 1.57 x 4.75 x 631 mm RoundDoubleBoreTube,Alumina99.8%
MC-AXF1180-19-24-3-LD 1.57 x 6.35 x 785 mm RoundDoubleBoreTube,Alumina99.8%
EQ-TM-40D-700 34.92x41.92x762mm MulliteCeramicTubewithmaxtemperatureof1500°C
EQ-TM-50D-762-LD 44.45x50.8x762mm MulliteCeramicTubewithmaxtemperatureof1500°C
EQ-TM-50D-12L-LD 44.45 x 50.8 x 304.8 mm MulliteRoundSingleBoreTubes(OneEndClosed)1500°C
EQ-TM-76D-42L-LD 69.85x76.2x1016mm MulliteCeramicTubewithmaxtemperatureof1500°C
EQ-TM-80D-42L-LD 73.02x84x1016mm MulliteCeramicTubewithmaxtemperatureof1500°C
EQ-TM-80D-55L-LD 73.02x84x1393mm MulliteCeramicTubewithmaxtemperatureof1650°C
EQ-TM-100D-42L-LD 92.07x104x1016mm MulliteCeramicTubewithmaxtemperatureof1650°C
TUBE-GH80-5-12 70X80X1200mm Ni-BasedSuperAlloySeamlessTubewithmaxtemperatureof1100°C
EQ-TA-62D-M790-LD 54x62x790mm HighpurityAlumina(Al2O
3)withmaxtemperature1750°C
EQ-TA-76D-M1000 67 x 76 x 1000 mm HighpurityAlumina(Al2O
3)withmaxtemperature1750°C
EQ-TA-101D-M1000-LD 92X101X1000mm HighpurityAlumina(Al2O
3)withmaxtemperature1750°C
EQ-TM-40D-760-LD 35 x 41 x 760 mm MulliteCeramicTubewithmaxtemperatureof1650°C
ALUMINA TUBE
MULLITE TUBE
GRAPHITE TUBE STAINLESS STEEL TUBE
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PRODUCTS CATALOG
MOBILE CART
www.mtimalaysia.com || www.mti-indonesia.co.id
EQ-FM-CART-66 EQ-FM-CART-68 EQ-FM-CART-2
•Steelframeshelfcart•Dimension:600Lx600Wx600Hmm
•Steelframeshelfcart•Dimension:600Lx800Wx600Hmm
•Steelframeshelfcart•Dimension:1200Lx600Wx600Hmm
EQ-OTS-KF25 EQ-SAT25A-LD EQ-VFS-25 EQ-CG-4L
OilTrappingSphere-PreventsOilBackstreaming
RechargeableIn-LineTraptoPreventBackstreaminginVacuumPump
SingleStageVacuumPumpOilMistReductionUnitwithKF-25Adaptor&QuickClamp
VacuumPumpExhaustFilterwithKF-D25Adaptor&QuickClamp
OIL TRAP & EXHAUST FILTER
Model Max Pressure Description
EQ-DIE-03D 1metricTone Onesetof1/8”Diameter(I.D.)DryPressingDie
EQ-DIE-06D 4metricTone Onesetof1/4”Diameter(I.D.)DryPressingDie
EQ-DIE-12D 20metricTone Onesetof1/2”Diameter(I.D.)DryPressingDie
EQ-DIE-15D 24metricTone Onesetof14.85mmDiameter(0.58”I.D.)DryPressingDie
EQ-DIE-18D 40metricTone Onesetof3/4”Diameter(I.D.)DryPressingDie
EQ-DIE-25S 30metricTone Onesetof1”SquareDryPressingDie
EQ-DIE-25D 40metricTone Onesetof1”Diameter(I.D.)DryPressingDie
EQ-DIE-38D 40metricTone Onesetof1.5”Diameter(I.D.)DryPressingDie
EQ-DIE-50D 200metricTone Onesetof2”Diameter(I.D.)DryPressingDie
EQ-DIE-75D 500metricTone Onesetof3”Diameter(I.D.)DryPressingDie
EQ-DIE-12D-GP 5metricTone OnesetofGraphiteDryPressingDieof1/2”I.D
EQ-DIE-10D 12metricTone Onesetof10mmDiameter(I.D.)DryPressingDie
EQ-DIE-105D-GP-4 5metricTone OnesetofGraphiteDryPressingDieof1/2”I.D
EQ-DIE-12DHT 6metricTone RefractoryAlloyDieupto400ºC,1/2”I.D.DryPressingDie
PRESSING DIE
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CUTTING & DICING BLADE
DIAMOND BLADEEQ-IPDB40305 3pieces4"dia.x0.35mmx0.5"arborimpregnateddiamondcuttingbladesforcuttingsaw(Finegrade40micron)
EQ-DF0403 4"dia.x0.35mmTx0.5"arborsinteredfulldiamondcuttingblades(Finegrade40micron)
EQ-DF0302 3"dia.x0.2mmTx0.5"arborfullysintereddiamondcuttingbladesforlowspeedsaw
EQ-DF0303 3"dia.x0.3mmTx0.5"arborfullysintereddiamondcuttingbladesforlowspeedsaw
EQ-DF0403C 4”dia.x0.35mmTx0.5”arborsinteredfulldiamondcuttingblades(Coarsegrade63micron)
EQ-DB-153742-LD 4”dia.x0.014”Tx0.5”arboredgesintereddiamondblade
EQ-IPDB6050505 Two6"dia.x0.5mmTx0.5"arborimpregnateddiamondcuttingblades
EQ-IPDB650505 Two6.5"dia.x0.5mmTx0.5"arborimpregnateddiamondcuttingblades
EQ-DB-153744-LD 6”dia.x0.014”Tx0.5”arboredgesintereddiamondblade
EQ-DB-153741-LD 8”dia.x0.025”Tx1.0”arborsintereddiamondblade
EQ-EC-422 86mmODx0.1mmthicknessdiamondcuttingbladeswith0.5”arborflange
EQ-EC-422-BLADE 86mmODx0.1mmthicknessdiamonddicingblades
EQ-MT-100-BSB One37.7”(96cm)loopdiamondbladeforMT-100minidiamondbandsaw
CUBIC BORON NITRIDE BLADEEQ-CBN40305 CBN(CubicBoronNitride)Blade4”diameterx0.35mmx0.5”arborforprecisioncutting
SILICONE CARBIDE BLADEEQ-MT-5-SiC SiCblade,2”diameterx3/8”arbor
EQ-SC0404 4”diameterx0.35mmx0.5”arborSiCabrasivecuttingbladesforlowspeed/trimsaw
EQ-SC0604 6”diameterx0.5mmx0.5”arborSiCabrasivecuttingbladesforlowspeed/trimsaw(SC0604)
EQ-SC0801 8”diameterx0.05”x1.25”arborSiCabrasivecuttingbladesforSYJ-200autosectionsaw
EQ-SC1075 10”diameterx0.075”x1.25”arborSiCabrasivecuttingbladesforcut-offsaw
ALUMINA BLADEEQ-AL0404 4"diameterx0.35mmx0.5"arboraluminaabrasivecuttingbladeforlowspeed/trimsaw
EQ-AL0605 6"diameterx0.5mmx0.5"arboraluminaabrasivecuttingbladeforlowspeed/trimsaw
EQ-AL0801 8"diameterx0.05"x1.25"arboraluminaabrasivecuttingbladeforSYJ-200autosectionsaw
DIAMOND CUTTING WIRESEQ-DW012x65 Diamondwireof0.12mmdiameterx65mL(215feet)forwiresawcutting
EQ-DW023x60 Diamondwireof0.23mmdiameterx65mL(215feet)forwiresawcutting
EQ-DW028x60 Diamondwireof0.28mmdiameterx65mL(215feet)forwiresawcutting
EQ-DW020x990 Diamondwireof0.20mmdiameterx300mL(0.008"Diax990'L)forwiresawcutting-MadeinUSA
EQ-DW025x100 Diamondwireof0.25mmdiameterx100Meter(333feet)forwiresawcutting-MadeinUSA
EQ-DW025x200 Diamondwireof0.25mmdiameterx200mL(666feet)forwiresawcutting-MadeinUSA
EQ-SXJ-PW3-LD One0.3mmdiameterdiamondloopwire(84cm)forSTX-201wiresaw
EQ-SXJO-PW2-LD One0.25mmthickplainsteelloopwireforcuttingalmostallmaterialsbyfeedingselectedslurry
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EQ-SD-8PB SiCsanddisc(Plainback),waterproof8"240-2000gritoptional,20pieces
EQ-SD-8PSA SiCsanddisc(PSA),waterproof,8"diameter240-2000gritoptional(10pieces/item)
EQ-SD-12PB SiCsanddisc(Plainback),waterproof,12"diameter240-2000gritoptional20pieces
EQ-SD-12PSA SiCsanddisc(PSA),waterproof,12"diameter240-2000gritoptional(10pieces/item)
www.mtimalaysia.com || www.mti-indonesia.co.id
SAND PAPER DISC
Model Description
EQ-DGP-6PB-320 Electro-plated6”dia.diamondgrindingplatewithPSA,320-mesh
EQ-DGP-6PB-600 Electro-plated6”dia.diamondgrindingplatewithPSA,600-mesh
EQ-DGP-6PB-800 Electro-plated6”dia.diamondgrindingplatewithPSA,800-mesh
EQ-DGP-6PB-1200 Electro-plated6”dia.diamondgrindingplatewithPSA,1200-mesh
EQ-DGP-6PB-1500 Electro-plated6”dia.diamondgrindingplatewithPSA,1500-mesh
EQ-DGP-8PB320 Electro-plated8”dia.diamondgrindingplatewithPSA,320mesh
EQ-DGP-8PB600 Electro-plated8”dia.diamondgrindingplatewithPSA,600mesh
EQ-DGP-8PB800 Electro-plated8”dia.diamondgrindingplatewithPSA,800mesh
EQ-DGP-8PB1200 Electro-plated8”dia.diamondgrindingplatewithPSA,1200mesh
EQ-DGP-8PB1500 Electro-plated8”dia.diamondgrindingplatewithPSA,1500mesh
EQ-DGP-8PB1800 Electro-plated8”dia.diamondgrindingplatewithPSA,1800mesh
EQ-DGP-8PB2000 Electro-plated8”dia.diamondgrindingplatewithPSA,2000mesh
EQ-DLF-8PSA-LD 8”dia.diamondlappingfilm(PSA)0.1-30micronsgritoptional
EQ-DGP-12PB320 Electro-plated12”dia.diamondgrinding/lappingplatewithPSAback,320mesh
EQ-DGP-12PB600 Electro-plated12”dia.diamondgrinding/lappingplatewithPSAback,600mesh
EQ-DGP-12PB800 Electro-plated12”dia.diamondgrinding/lappingplatewithPSAback,800mesh
EQ-DGP-12PB1200 Electro-plated12”dia.diamondgrinding/lappingplatewithPSAback,1200mesh
EQ-DGP-12PB1500 Electro-plated12”dia.diamondgrinding/lappingplatewithPSAback,1500mesh
EQ-DGP-12PB1800 Electro-plated12”dia.diamondgrinding/lappingplatewithPSAback,1800mesh
EQ-DGP-12PB2000 Electro-plated12”dia.diamondgrinding/lappingplatewithPSAback,2000mesh
Model Description
EQ-PP-8PSA-PC 8”poromericpolishingpad(PSA)forfinalpolishing
EQ-PP-12PSA-PC 12”poromericpolishingpad(PSA)forfinalpolishing
EQ-PP-15PSA 15”poromericpolishingpad(PSA)forFinalPolishing
EQ-PFP012 12”polyamidefoampolishingpad
EQ-PFP015 15”polyamidefoampolishingpad
EQ-PP-8FPB-SY 8”polymidefoampolishingpad
EQ-PP-3PSA-SY Three3”poromericpolishingpad(PSB)forfinalpolishing
EQ-MBP-8-2-LD Two8”masterplate(backingplate)forPSAdiamondplate,sandpaper,andpolishingpad
DIAMOND LAPPING DISC
POLISHING PAD
PRODUCTS CATALOG
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MAGNETIC BUFFER PLATE
EQ-SD-8PB SiCsanddisc(plainback),waterproof8"240-2000gritoptional(20pieces/item)
EQ-SD-8PSA SiCsanddisc(PSA),waterproof,8"diameter240-2000gritoptional(10pieces/item)
EQ-SD-12PB SiCsanddisc(Plainback),waterproof,12"diameter240-2000gritoptional(20pieces/item)
EQ-SD-12PSA SiCsanddisc(PSA),waterproof,12"diameter240-2000gritoptional(10pieces/item)
DIAMOND POLISHING PASTE
MAGNETIC BUFFER PLATE
Model Description
EQ-MW025 Diamond compound polishing paste, 0.25 micron, 10 gram syringe
EQ-MW05 Diamond compund polishing paste, 0.5 micron, 10 gram syringe
EQ-MW10 Diamond compund polishing paste, 1.0 micron, 10 grams syringe
EQ-MW25 Diamond compund polishing paste, 2.5 micron 10 grams syringe
EQ-MW30 Diamond compund polishing paste, 3.0 micron, 10 grams syringe
EQ-MW35 Diamond compund polishing paste, 3.5 micron 10 grams syringe
EQ-MW50 Diamond compund polishing paste, 5.0 micron 10 grams syringe
EQ-MW70 Diamond compund polishing paste, 7.0 micron 10 grams syringe
EQ-MW140 Diamond compund polishing paste, 14 micron 10 grams syringe
EQ-MW280 Diamond compund polishing paste, 28 micron 10 grams syringe
EQ-MW540 Diamond compund polishing paste, 54 micron 10 grams syringe
SAMPLE MOUNTING ACCESSORIESEQ-HM-POWDER5L-LD
EQ-CM-MOLD-SR-125-LD
EQ-160DT
EQ-CM-EP-FAST-32-LD
EQ-MP-300
EQ-MOUNTINGCLIP-LD
Model Description
EQ-HM-POWDER5L-LD Compression mounting powder (5 lb) optional color of black, red, green
EQ-CM-EP-FAST-32-LD Cold mounting fast-curing epoxy with hardener (32 oz epoxy 8 oz hardener)
EQ-CM-EP-LOWV-32-LD Cold mounting low viscosity epoxy with hardener ( 32 oz epoxy 8 oz hardener)
EQ-MP-300 Mounting press for metallographic samples
EQ-CM-MOLD-SR-125-LD Reuseable plastic mold for cold mounting, 1.25" Diameter
EQ-CM-MOLD-SR-150-LD Reuseable plastic mold for cold mounting, 1.5" Diameter
EQ-CM-MOLD-SR-1 Reuseable plastic mold for cold mounting, 1" diameter
EQ-MOUNTINGCLIP-LD Plastic sample clip for cold mounting
EQ-160DT Template for holding various size wafer
GRAPHITE BLOCKS & WAX
Model Description
EQ-GRAPHITEB-75X25 2 pcs of 75 x 25 high quality graphite blocks for samples holding
EQ-GRAPHITEB 2 pcs of 75 x 75mm high quality graphite blocks for samples holding
EQ-WAXB-1 2 pcs of high quality wax bulks for samples bonding
EQ-GRAPHITEB EQ-WAXB-1
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ACCESSORIES RELATED TO CUTTING SAW
www.mtimalaysia.com || www.mti-indonesia.co.id
Model Description
EQ-CCP-01-LD Coolant circulating pump for Precision Wire Saw STX Series
EQ-LUBECOOL-150 Smart solid lubricant and coolant for diamond saw cutting
EQ-LSSO11 Mini vise for low speed saw
EQ-EC-401 Precision cross mount vise for EC400 dicing and SYJ-150 low speed saw
EQ-SXJ-2-4 Precision cross mount vise for SXJ-2 diamond wire saw
EQ-ECO-430 Heavy duty coolant circulating tank with pump for MTI cutting saw
EQ-LSS-021 Diamond blade dressing stone
EQ-GP-1 Glass sample plate for SYJ-800
EQ-LSSO21 Multi-blade spacer 10 mm thickness for SYJ-150 low speed saw
EQ-LSSO23 Multi-blade spacer 1/4” thickness for SYJ-150 low speed saw
EQ-ECO-423 Water splash guard for covering 6” blade
EQ-ECO-402 4” vacuum chuck to mount sample
EQ-ECO-419-LD Water bonding tape for vacuum chuck in dicing saw
EQ-ECO-423
EQ-CCP-01-LD
EQ-LUBECOOL-150
EQ-LSSO11
EQ-LSSO22
EQ-ECO-430
ACCESSORIES RELATED TO POLISHING MACHINE
Model Description
EQ-SKZD-2 Automatic slurry feeder for any 8” to 15” polishing machine
EQ-SKCH-1 Precision thickness checker witth 0.001 dial indicator
EQ-PF-3H1W2 3” Polishing sample holder with three 1” holes/ Two dead weight for metallurgraphy
EQ-PF-1 Volumetric Feeder with built-in agitation paddles
EQ-MTI-50-CSO Colloidal Silica (SiO2) Slurry for CMP, 16 Oz/ bottle at 0.05 micron
EQ-MTI-1000CAO-LD Colloidal Alumina (Al2O3) Slurry, 16 OZ/ bottle 1.0 Micron
EQ-PF-1EQ-MTI-1000CAO-LD
EQ-SKCH-1EQ-PF-3H1W2EQ-SKZD-2
EQ-MHD-25C EQ-MHD-50C EQ-MH-250
DigitalMicrometerHead1”Travel0.003mm accuracy
DigitalMicrometerHead2”Travel0.005mmaccuracy
MicrometerDrive:1”0.005mmDivision
EQ-ECO-402
PRODUCTS CATALOG
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ACCESSORIES RELATED TO VACUUM GLOVE BOX
EQ-AGB-GLOVE-6-32-LD EQ-AGB-GLOVE-8-32-LD EQ-GB-GLOVE EQ-GB-VG
AntistaticButadyl®Glove AntistaticButadyl®Glove EconomyGloves HighVacuumSiliconeGrease
6”Dx32”LdimensionforLargerGloveBox(apair)
8”Dx32”LdimensionforLargerGloveBox(apair)
6”Dx32”Ldimension(apair) Forgloveboxsealing
ACCESSORIES RELATED TO SPIN COATER
Model Description
EQ-ECO-MSC Mini suction cup for VTC-100 spin coater for holding wafer less than 1”
EQ-ECO-519-LD Blue Adhesive Plastic Film (PVC) for vacuum chuck at spin coater
LIQUID SOLUTION HANDLING
BD-10ML BD-200UL VTC-1008-B
BottletopElectrolyteDigitalDispenser PrecisionElectronicSingleChannelPipette MiniCentrifugewith16Adaptors&8Tubes
•4PPbottleadapters•One1000mLstainlesssteelbottle
included•1-10mladjustablevolume
•20-200uLvolumerange•Easycalibrationadjustments•Rechargeablebatteryincluded
•1600rpmspinspeed•Eight-positionmicrotuberotorisincluded•Capacityupto8x0.2~2.0mltubes(8
tubes included)
MICROMETER ADJUSTABLE FILM APPLICATOR
Model Width (mm) Thickness (mm)
EQ-SE-KTQ-150 150 0.01-5
EQ-SE-KTQ-150A 150 4.5
EQ-SE-KTQ-150D 150 6
EQ-SE-KTQ-180 180 5
EQ-SE-KTQ-250 250 5
EQ-SE-KTQ-50 50 6
EQ-SE-KTQ-100 100 3.5
DIAMOND SCRIBER
EQ-DS-01
•Penstylediamondscriberforuseoncuttingthinsinglecrystalsubstrate•5.7”oflength,providedwithclip
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MILLING/MIXING JAR
www.mtimalaysia.com || www.mti-indonesia.co.id
MILLING/MIXING BALL
MISCELLANEOUS
Model Description
EQ-MC-A2 150mlStainlessSteelMixingContainerforDesk-TopVariableSpeedVacuumMixerSFM-7
EQ-MJ-500A AgateJar(500ml)withmillingballsforSFM-1MillingMachine
EQ-MJ-500 Al2O3jarofSFM-1millingmachine(3.2lbs500ml)
EQ-AJ-50 Al2O3JarwithSSJacketforSFM-3MillingMachine(50ml)
EQ-MJ-2-1000NL NylonjarofSFM-2millingmachine(1000ml,4pcs/package)
EQ-MJ-2-500NL NylonjarofSFM-2millingmachine(500ml,4pcs/package)
EQ-MJ-1-250SS StainlesssteeljarofSFM-1millingmachine(250ml)
EQ-MJ-500S StainlesssteeljarofSFM-1millingmachine(500ml)
EQ-MJ-3-80SS StainlessSteelJarofSFM-3millingmachine(80ml)
EQ-MJ-3-80VSS VacuumStainlesssteeljarofSFM-3millingmachine(80ml)
EQ-MJ-250 StainlessVacuumJarofSFM-1millingmachine(250ml)
EQ-MJ-1-500NL NylonjarofSFM-1millingmachine(500ml,4pcs/package)
EQ-MJ-80NL NylonJarofSFM-3millingmachine(80ml)
EQ-MC-A3 30mlstainlesssteelvacuummixingjarwithbladeforSFM-7vacuummixer
Model Description
EQ-SSBALL Stainlesssteel304millingballscombo:12pcswithvarioussize(6-19.5mmdiameter)
EQ-YSZBALL YSZmillingballcombo:8pcswithvarioussize(19.5-10mmdiameter)
EQ-YSZBALL-S YSZmillingball:samediameterfrom9-20mmselectable(1kg/quantity)
EQ-AGBALL Agatemillingballanysizefrom0-19mmdiameterselectable(20balls/quantity)
LEAD-TAPE EQ-EM-100 EQ-VO-SF EQ-FLG-KIT-2
LeadFoilTape:2”Wx0.0063”Thickx36Yardlength
RoundElectromagnetforholdingsamplebyitsmagnetism
VacuumOvenStainlessSteelSampleShelfandFourFixingHolder
FurnaceHandleHook(26’’L)
HD-11 EQ-GD-01 BL-200 EQ-SP-IHV
3MHydrogenGasDetectorwithSolenoidValve
LaboratoryGasDryingUnit EvaporatorforLiquidSources&ChemicalPrecursorsDelivery
VacuumMeltingVesselforInductionHeating
PRODUCTS CATALOG
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CONSUMABLES FOR BATTERY R&D
LI-ION BATTERY CATHODE POWDER
NP-SI-P100 100gSi(99.%,100nm)Nanopowder
EQ-LIB-LFPO-KJ2 High-Rate(Upto15C)LiFePO4PowderforLi-ionbatteryCathode,150g/bag
EQ-LIB-LCN Li2CO3(Carbonate)PowderforLi-ionBatteryCathode,200g/bottle
EQ-LIB-LCO LiCoO2(Cobalt)PowderforLi-ionBatteryCathode,200g/bag
EQ-LIB-LMO LiMn2O4(Manganese)PowderforLi-ionBatteryCathode,200g/bag
EQ-LIB-LFPO LiFePO4(Phosphate)PowderforLi-ionbatteryCathode,150g/bag
EQ-LIB-LNCM523 LiNiCoMnO2(NCM)PowderforLi-ionBatteryCathode200g/bottle
EQ-LIB-LNCM111 LiNiCoMnO2(NCM)PowderforHighCapacityLi-ionBatteryCathode,200g/bag
LI-ION BATTERY ANODE POWDER
EQ-LIB-LTO Li4Ti5O12(Titanate)PowderforLi-ionBatteryAnode,200g/bag
EQ-LIB-AB ConductiveAcetyleneBlackforLi-ionbatteryAnode/Cathode,25g/bag
EQ-LIB-CGP ConductiveGraphitePowderforLi-ionbatteryAnode/Cathode,80g/bag
EQ-LIB-SUPERC45
TIMCALSUPERC45ConductiveCarbonBlackasConductiveAdditiveforLithium-IonBatteries80g/bag
EQ-LIB-SUPERP TIMCALGraphite&CarbonSuperP®ConductiveCarbonBlack,100g/bag
EQ-LIB-SUPERC65
TIMICALSUPERC65ConductiveCarbonBlackasConductiveAdditiveforLithium-IonBatteries80g/bag
EQ-LIB-CMSG ArtificialGraphitePowderforLi-ionbatteryAnode,200g/bag
EQ-LIB-MCMB MCMB(MesoCarbonMicroBeads)GraphitePowderforLi-ionBatteryAnode,250g/bag
EQ-LIB-CMC CarboxymethylCellulose(CMC)forLi-ionBatteryAnode100g/bottle
EQ-AB-520 HighSurfaceActiveCarbonForSuper-CapacitorElectrode(70g/Bag)
BATTERY ELECTRODE/LI CHIPS
EQ-CC-CU-20 ConductiveCarbonCoatedCopperFoilforBatteryAnodeSubstrate(280mmwidthx11umthick,1.3kg/roll)
BC-AF-241LPF-DS Li-IonBatteryCathode-AluminumfoildoublesidecoatedbyLiFePO4(241mmLx200mmWx0.2mmT)5sheets/bag
BC-CF-241LPF-SS Li-IonBatteryCathode-AluminumfoilsinglesidecoatedbyLiFePO4(241mmLx200mmWx0.1mmT)5sheets/bag
BC-AF-267MN-DS Li-IonBatteryCathode-AluminumfoildoublesidecoatedbyLiMn2O4(267mmLx214mmWx0.2mmT)5sheets/bag
BC-AF-267CO-DS Li-IonBatteryCathode-AluminumfoildoublesidecoatedbyLiCoO2(241mmLx200mmWx94umT)5sheets/bag
BC-AF-241CO-SS Li-IonBatteryCathode-AluminumfoilsinglesidecoatedbyLiCoO2(241mmLx200mmWx0.1mmT)5sheets/bag
BC-CF-241-DS Li-IonBatteryAnode-CopperfoildoublesidecoatedbyCMSGraphite(241mmLx200mmWx0.2mmT)5sheets/bag
BC-CF-241-SS Li-IonBatteryAnode-CopperfoilsinglesidecoatedbyCMSGraphite(241mmLx200mmWx0.1mmT)5sheets/bag
BC-CF-241-SS-005
Li-IonBatteryAnode-CopperfoilsinglesidecoatedbyCMSGraphite(241mmLx200mmWx0.05mmT)5sheets/bag
BC-CF-750-DS 18650Li-IonBatteryAnodeStrip-CopperfoildoublesidecoatedbyCMSGraphite(750mmLx58mmWx0.11mmT)50pcs/roll
BC-AF-670MN-DS 18650Li-IonBatteryCathodeStrips-AluminumfoildoublesidecoatedbyLiMn2O4(670mmLx56mmWx0.15mmT)50pcs/roll
EQ-LIB-LIC45 LithiumChip15.6Diax0.45tmmforLi-ionBatteryR&D130g/bottle
EQ-LIB-LIC25 LithiumChip15.6Diax0.25tmmforLi-ionBatteryR&D100g/bottle(4000pcs)
LIB-LIF-30M Lithium(Li)Foil:30MeterLengthx35mmWidthx0.17mmThick
LIB-LIF-35M Lithium(Li)Foil:35MeterLengthx76.5mmWidthx0.06mmThick
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LI-ION BATTERY BINDERS
EQ-LIB-PVDF PVDFbinderforLi-ionbatteryelectrodes80g/bag
EQ-LIB-NMP N-Methyl-2-pyrrolidone(NMP)solventforPVDF250g/bottle
EQ-LIB-CMC CarboxymethylCellulose(CMC)forLi-ionBatteryAnode100g/bottle
EQ-LIB-SBR Styrene-ButadieneRubber(SBR)binderforLi-ionBatteryAnode260g/bottle
EQ-LIB-PTFE Polytetrafluoroethylene(PTFE)CondensedLiquidBinderforLi-ionBattery360g/bottle
EQ-LIB-520L Water-based(Aqueous)BinderPowderforLi-ionBatteryCathode120g/bottle
LI-ION BATTERY SEPARATOR
EQ-BSF-0016-500A CeramicCoatedMembrane(16umthickx60mmWx500mL)asSeparatorofLi-ionBattery
EQ-BSF-0025-400C Li-ionBatterySeparatorFilm(25umthickx60mmWx400mL,Celgard)
EQ-BSF-0025-60C Li-ionBatterySeparatorFilm(25umthickx85mmWx60mL,Celgard)
EQ-PTFE-02-47 PTFEMembraneasSeparatorforLithiumAirBattery100/pk
ELECTRODE SUBSTRATE (CURRENT COLLECTOR)
EQ-BCAF-15U-280 AluminumFoilforBatteryCathodeSubstrate(350mLengthx280mmwidthx15umthickness)
EQ-BCANF-45U AluminumMeshFoilforBatteryCathodeSubstrate(240mmwidthx45umthickx50MeterLength)
EQ-BCANF-20U AluminumMeshFoilforBatteryCathodeSubstrate(265mmwidthx20umthick)
EQ-CC-AL-20U-260 ConductiveCarbonCoatedAluminumFoilforBatteryCathodeSubstrate(260mmWx16umThick,80m/Roll)
EQ-CC-CU-20 ConductiveCarbonCoatedCopperFoilforBatteryAnodeSubstrate(280mmwidthx11umthick,1.3kg/roll)
EQ-BCCF-9U CopperFoilforBatteryAnodeSubstrate(190mLx280mmWx9umthick)
EQ-BCCF-25U CopperFoilforGrapheneGrowth(90mlengthx150mmwidthx25umthickness)
EQ-BCCNF-45U CopperMeshFoilforBatteryAnodeSubstrate(240mmwidthx45umthicknessx20MeterL)
EQ-BCCNF-55U CopperMeshFoilforBatteryAnodeSubstrate(240mmwidthx55umthicknessx20MeterL)
EQ-BCCF-2MM CopperFoamforBatteryCathodeSubstrate(500mmlengthx300mmwidthx1.6mmthickness)
EQ-BCGDL-1400S CarbonFoamasGasDiffusionLayer(225Wx270Lx0.454mmthick)forMetalAirBattery
MF-TA-FOIL-400L200W005TH
TantalumPolycrystallineMetallicFoil:0.05mmthickx200mmWidthx400mmLength
MF-TA-FOIL-252505SN TantalumPolycrystallineMetallicFoil:25x25x0.5mm,un-polished
MF-TI-FOIL-700L-105 Titanium(Ti)Foil:110mmWidthx0.1mmthickx700mmLength
MF-W-FOIL-200L CopperFoamforBatteryCathodeSubstrate(500mmlengthx300mmwidthx1.6mmthickness)
EQ-BCNF-16M NickelFoamforBatteryCathodeSubstrate(1000mmlengthx300mmwidthx1.6mmthickness)
EQ-BCNF-80UM NickelFoamforBatteryorSupercapacitorCathodeSubstrate(300mmlengthx80mmwidthx0.08mmthickness)
NFOIL-25U NickelFoil:(0.03mmthickx150mmwidthx5000mmlength)
SSF-316-300-01 StainlessSteelFoil:SS3160.1mmThickx300mmWx4000mmL
SF-316-100-1.6 StainlessSteelFoam:SS3161.6mmThickx100mmWx1000mmL
EQ-SSMD-304 304StainlessSteelMeshedDiscasElectrodeSubstrateforCR20XXCoinCell
MCMG-FOIL-18L-1000 Magnesium(Mg)Foil:100mmWidthx0.1tmmthickx1000mmLength
MF-V-FOIL-100L-0.25T VanadiumFoil(V)Foil:0.25mmtx50mmWx100mmL
PRODUCTS CATALOG
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CONSUMABLES FOR BATTERY R&D
COIN CELL CASES
EQ-CR2032-CASE CR2032coincellcases(20dx3.2tmm)withO-ringsforBatteryResearch-100pcs/pck
EQ-CR2032-CASE-316A Al-CladCR2032CoinCellCan(20dx3.2mm)forLi-ionBatteryupto5.5V-20Pcs/pck
EQ-CR2016-CASE-304 CR2016coincellcases(20dx1.6mm)withsealO-ringsforBatteryResearch-100pcs/pck
EQ-CR20-WS WaveSpringandSpacerforCR2032(100pairs/pck)
CR2016-KAPTON CR2016CasewithonesideKaptonWindow(10mm)forin-situX-RayAnalysis-5set/pck
EQ-CR2016-KAPTON-2S CR2016CasewithtwosidesKaptonWindowsforin-situNeutronDiffractionAnalysis-5pairs/pkg
CR2032-CASE-304-MESH MeshedCR2032CoinCellsCases(20dx3.2mm)withsealO-ringsforLithiumAirBatteryResearch-10pcs/pck
EQ-CR2325-CASE-316 StainlessSteel-CR2325buttoncellscases(23dx2.5tmm)withsealO-ringsforBatteryResearch-100pcs/pck
EQ-CR1220-CASE-304 CR1220StainlessSteelCoinCellcases(12.5dx2mm)withsealO-ringsforBatteryResearch-100pcs/pck
EQ-CR2025-CASE-304 CR2025ButtonCellCase(20dx2.5mm,304SS)withSealO-ringsforBatteryResearch-100pcs/pck
EQ-CR20WS-SPRING316 StainlessSteelWaveSpringforCR2032Case-100pcs/pck
EQ-CR2450-CASE-304 CR2450StainlessSteelbuttoncellcases(24dx5.0mm)withsealO-ringsforBatteryResearch-100pcs/pck
CR2032-CASE-304G Gold-CoatedSS304CR2032ButtonCellCases(20dx3.2mm)with(1pairwithO-ring)
CR2032-CASE-304PT Platinum-CoatedSS304CR2032ButtonCellCases(20dx3.2mm)withO-ring,1pair
EQ-CR20BW-SPRING304 StainlessSteelSpring(BellevilleWashers)forCR2032Cases-100pcs/pck
EQ-CR20-SPACER304-02 StainlessSteelSpacerforCR20XXCell(15.4mmDiax0.2mm)-100pcs/pck
EQ-CR20-SPACER304-05 StainlessSteelSpacerforCR20XXCell(15.8mmDiamx0.5mm)-100pcs/pck
EQ-CR2450-SPACER316 StainlessSteelSpacerforCR2450Cell(20mmDiax1mm)-100pcs/pck
EQ-AG3-CASE StainlessSteel-AG3/312buttoncellcases(7.9dx3.6tmm)withO-ringsforBatteryResearch-100pcs/pck
CYLINDER CELL CASE
EQ-LIB-18650 18650CylinderCellCasewithAnti-ExplosiveCapandInsulationO-ring-100Pcs/package
EQ-LIB-26650 26650CylinderCellCaseandAnti-ExplosiveCapwithInsulationO-ring-100Pcs/package
EQ-LIB-32650 32650CylinderCellCaseandAnti-ExplosiveCapwithInsulationO-ring-60Pcs/package
EQ-LIB-AA AASize(14500)CylinderCellCasewithAnti-ExplosiveCap(Built-inPTC)&InsulationO-ring-100Pcs/package
EQ-LIB-50100 CylindericalAluminumCasewithCapandTerminalsforSupperCapacitorandBatteryR&D5pcs/pack
EQ-LIB-AAA AAASize(10440)CylinderCellCasewithAnti-ExplosiveCap&InsulationO-ring-100Pcs/package
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POUCH CELL CASES
EQ-ALF-100-210 AluminumLaminatedFilmforPouchCellCase,100mmWx210mmL50pcs/Bag
EQ-ALF-400-7.5M AluminumLaminatedFilmforPouchCellCase,400mmWx7.5mL
EQ-PLIB-604694 FormedPouchCellCase-94x46x6.0tmm,50pcs/Bag
EQ-PLIB-302025 FormedPouchCellCasewithAirReceiver-20x25x3.0tmmL50pcs/Bag
EQ-PLIB-475075 FormedPouchCellCase,75x50x4.7tmm,50pcs/Bag
NICKEL TAB
EQ-PLIB-NTA3 3mmWidthNickelTabasNegativeTerminalforPolymerLi-ionBattery40pcs/Box
EQ-PLIB-NTA4 4mmWidthNickelTabasNegativeTerminalforPouchCell,50pcs/Box
EQ-PLIB-NTA8 8mmWidthNickelTabasNegativeTerminalforPouchCell,50pcs/Box
EQ-PLIB-ATC3 3mmWidthAluminumTabasPositiveTerminalforPouchLi-ionCell40pcs/Box
EQ-PLIB-ATC4 4mmwidthAluminumTabasPositiveTerminalforPouchCell,50pcs/Box
EQ-PLIB-ATC8 8mmWidthAluminumTabasPositiveTerminalforPouchCell,50pcs/Box
LIB-SSWT StainlessSteelBatteryWelderingLead/Tab/Terminal(27x6x0.2mm)10pcs/pck
STRAPPING TAPE
EQ-PLIB-HMA8 HotMeltAdhesive(PolymerTape)forHeatSealingPouchCellTabs(100mLx8mmWx0.1mmThickness)
EQ-PLIB-HMA4 HotMeltAdhesive(PolymerTape)forHeatSealingPouchCellTabs(100mLx4mmWx0.1mmThickness)
EQ-LIB-ST StrappingTape(200mLx10mmWx0.03mmThickness)forPouch/CylinderCell
ELECTROLYTE
EQ-Be-LiPF6 ElectrolyteLiPF6forLithium-ionbatteryR&D(LiPF6inOrganicSolventforImmediateUse)500g(10x50g)
EQ-LBC3015B ElectrolyteLiPF6forLiMn2O4/LiFePO4Lithium-ionbatteryR&D,1KginStainlessSteelContainer
EQ-LBC3051C ElectrolyteLiPF6forLiCoO2Lithium-ionbatteryR&D,1KginStainlessSteelContainer
PRODUCTS CATALOG
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TWEEZER & VACUUM PEN
Model Description
EQ-TZR-CF-5413 Highprecision&carbonfiberreinforcedtweezer(flattips)
EQ-TZR-CF-5412 Highprecision&carbonfiberreinforcedtweezer(sharppoints)
EQ-TZR-5-SA Highprecision&ultrafinetweezerwithtaperedmicrotips
EQ-TZR-2A-SA Highprecision&ultrafinestainlesssteeltweezerwithflat,roundedtips
EQ-TZR-2AB-SA Highprecision&ultrafinestainlesssteeltweezerwithcurvetips
EQ-TZR-OO-SA Highprecision&ultrafinestainlesssteeltweezerwithstrongthicktips
EQ-TZR-OOD-SA Highprecision&ultrafinestainlesssteeltweezerwithinsidetipserrations
EQ-EVP-V20 EQ-SMT-150C EQ-SMT-72-NORMAL EQ-SMT-72-ESD
ElectricVacuumPen PortableVacuumPen CompactVacuumPen Anti-StaticVacuumPen
• Continuous & stable suctionforce, generated by a smallbuilt in vacuum pump• Strong suction force up to1000 g with different cupuleapplied•Cupulematerial:rubber• Standard cupule sizes givenare3.4/6.4/12.5/16mm
• Continuous & stable suctionforce, generated by a smallbuilt in vacuum pump•Suctionupto500g•Cupulematerial:rubber• Standard cupule sizes givenare3.2/6.4/9.5/12.5/19mm
•4suctioncupsareincluded•Suctionupto150g• Cupule material: conductive
silicone or solvent resistant silicone• Standard cupule sizes givenare6.4/9.5/12.5/19mm
•4suctioncupsareincluded•Suctionupto150g• Cupule material: conductive
silicone• Standard cupule sizes givenare6.4/9.5/12.5/19mm
IC TRAY
NH20-COVER 2”x2”dimensioncoverforICtray(20pcs/box)
NH20-20-20-15 2”x2”dimension1600pocketsofsize(mil):L20xW20xD15(20pcs/box)
NH20-60-50-28 2”x2”dimension400pocketsofsize(mil):L60XW50XD28(20pcs/box)
NH20-48-46-22 2”x2”dimension500pocketsofsize(mil):L48xW46xD22(20pcs/box)
NH20-90-80-24 2”x2”dimension250pocketsofsize(mil):L90xW80xD24(20pcs/box)
NH20-105-110-28 2”x2”dimension200pocketsofsize(mil):L105xW110xD28(20pcs/box)
NH20-115-68-28 2”x2”dimension250pocketsofsize(mil):L115xW68xD28(20pcs/box)
NH20-265-195-22 2”x2”dimension48pocketsofsize(mil):L265xW195xD22(20pcs/box)
NH20-210-210-24 2”x2”dimension49pocketsofsize(mil):L210xW210xD24(20pcs/box)
NH20-280-280-30 2”x2”dimension36pocketsofsize(mil):L280xW280xD30(20pcs/box)
NH20-130-130-30 2”x2”dimension100pocketsofsize(mil):L130xW130xD30(20pcs/box)
NH20-300-300-30 2”x2”dimension25pocketsofsize(mil):L300xW300xD30(20pcs/box)
NH20-200-100-28 2”x2”dimension100pocketsofsize(mil):L200xW100xD28(20pcs/box)
NH20-411-411-30 2”x2”dimension16pocketsofsize(mil):L411xW411xD30(20pcs/box)
NH20-480-510-30 2”x2”dimension9pocketsofsize(mil):L480xW510xD30(20pcs/box)
Model Description
NH20-C5 Twoclampsof5layersof2”die/ICtray
NH20-CS Twoclampsofsinglelayerof2”die/ICtray
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MEMBRANE FILM BOXES
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Model Description
SP1-5510BK/BK-LH-P33 55mmx55mm(2.17”X2.17”)Gelstickycarrierbox-blackcolor
SP1-5510T/BK-LH-P33 55mmx55mm(2.17”X2.17”)Gelstickycarrierbox-transparentcover
SP1-5510T/T-LL-P33 55mmx55mm(2.17”x2.17”)Gelstickycarrierbox-transparent
SP1-7515BK/BK-LL 75mmx55mm(3”x2.17”)Gelstickycarrierbox-blackcolor
SP1-7515T/BK-LL 75mmx55mm(3”x2.17”)Gelstickycarrierbox-transparentcover
SP1-7515T/T-LL 75mmx55mm(3”x2.17”)Gelstickycarrierbox-transparent
SP1-8512T/BK-LL-P66 85mmx85mm(3.35”x3.35”)gelstickycarrierbox-transparentcover
SP1-8512T/T-LL 85mmx85mm(3.35”x3.35”)Gelstickycarrierbox-transparent
SP1-12012T/T-LL 120mmx120mm(4.72”x4.72”)Gelstickycarrierbox-transparentcover
SP1-12012T/BK-LL 85mmx85mm(3.35”x3.35”)Gelstickycarrierbox-transparentcover
SP2-5510BK/BK-LL-P33 55mmx55mm(2.17”x2.17”)Gelstickycarrierbox-blackcover
SP2-5510T/T-LL-P33 55mmx55mm(2.17”x2.17”)Gelstickyboxwithtray-Transparent
Model Description
SP3-5525 Membranearea:43x43x22mm
SP3-3818 Membranearea:28x28x10mm
SP3-4516 Membranearea:35mmdiameter
SP3-7512 Membranearea:60x60x10mm
SP3-8018 Membranearea:66x28x10mm
SP3-100 Membranearea:105(O.D)x24(H)mm
SP3-16030 Membranearea:140x30x15mm
SP3-7516 Membranearea:60x56x10mm
SP3-7530 Membranearea:66x66x25mm
SP3-10032 Membranearea:90x75x28mm
SP3-10050 Membranearea:81x81x45mm
SP3-10025 Membranearea:81x56x20mm
SP3-12525 Membranearea:106x56x20mm
SP3-17525 Membranearea:156x81x20mm
SP3-17550 Membranearea:156x106x45mm
SP3-150100 Membranearea:131x131x95mm
SP8-19038-T/BK Smartcarryingboxforlaserrodselectablefromdiameter3-8mmupto160mm
SMY-D3-D8 Siliconesupportkitforlaserrodbox,selectablefrom3-8mmdiameter
Model Description
SP4-8512T/BK-1 Carryupto3”diameterofsinglewafer
SP4-8512T/BK-H Carryupto3”diameteror3”squaresinglewafer
SP4-12012T/BK Carryupto4”diameterofsinglewafer
SP4-12030T/BK Carryupto4”diameterofmultiwafer
SP4-18060T/T Carryupto6”diameteror6”squaremultiwafer
PLASTIC FOAM MODULE WAFER CARRIER
GEL STICKY BOXES
PRODUCTS CATALOG
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SINGLE WAFER CONTAINERModel Description
SP5-S1 1”singlewafercontainerwithcoverandspring(10set/package)
SP5-S2 2”singlewafercontainerwithcoverandspring(20set/package)
SP5-S25 2.5”singlewafercontainerwithcoverandspring(10set/package)
SP5-S3 3”singlewafercontainerwithcoverandspring(10set/package)
SP5-S4 4”singlewafercontainerwithcoverandspring(10set/package)
SP5-S6 6”singlewafercontainerwithcoverandspring(10set/package)
SP5-S170 4”-6”singlewaferwithadjustablesiliconesupportrod
MULTI LAYER CONTAINER
Model Description
SP5-2-25 Onesetof2"diameter25groupwafersCarrierBox
SP5-3-25 Onesetof3"diameter25groupwafersCarrierBox
SP5-4-25 Onesetof4"diameter25groupwafersCarrierBox
PFA WASHING HANDLE
Model Description
SP5-2-25 2"diameterPFAwafercarrier(Capacity:25)forWaferCleaning
SP5-3-25 3"diameterPFAwafercarrier(Capacity:25)forWaferCleaning
SP5-4-25 4"diameterPFAwafercarrier(Capacity:25)forWaferCleaning
BLUE WAFER WASHING CARRIER
Model Description
Blue-PP-2-25 2"Diameterbluewafercarrierforwafercleaning(capacity:25)
Blue-PP-3-25 3"Diameterbluewafercarrierforwafercleaning(capacity:25)
Blue-PP-4-25 4"Bluewafercarrierforwafercleaning(capacity:25)
MORTAR & PESTLE
Model Outside diameter (mm) Inside diameter (mm) Size (inch)
MTA-2 50 40 2
MTA-3 75 60 3
MTA-4 100 80 4
MTA-5 125 110 5
MTA-6 150 130 6
MTA-7 175 160 7
MTA-8 200 190 8
GRAPHITE CRUCIBLE
EQ-G40
EQ-GR009G
Model EQ-G40 EQ-GR009G
O.D. 1.5” Top:2.285”Bottom:1.81”
I.D. 1.25” 1.415”
Depth 3.75” 3.06”
Height 3.96” 3.435”
Temperature 399°C to 2760°C
Compressive Strength 42.7MPa
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ALUMINA CRUCIBLE
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Alumina Crucible Low Form 99.6%
ModelTop diameter
(mm)Bottom
diameter (mm)Height (mm)
Capacity (ml)
AL-1020 35 24 42 20
AL-1050 48 30 54 50
AL-1100 58 35 68 100
AL-1150 66 40 80 150
AL-1250 79 42 93 250
AL-1500 100 60 110 500
Alumina Crucible Low Form Lid
ModelTop
diameter (mm)
Capacity (ml)
AL-1020-LID 35 20
AL-1050-LID 48 50
AL-1100-LID 58 100
AL-1150-LID 66 150
Alumina Crucible High Form
ModelTop diameter
(mm)Height (mm)
Capacity (ml)
AL-2010A 25 25 10
AL-2050A 45 35 50
AL-2050B 40 45 50
AL-2100 40 95 100
AL-2250 60 100 250
AL-2500 72 148 500
Alumina Boat Rectangular 99.8%
ModelLength (mm)
Width (mm)
Height (mm)
EQL54W38H20 54 38 20
EQL82W42H23 82 42 23
EQL50W40H20 50 40 20
EQL50W20H20 50 20 20
EQL82-W42H23 82 42 23
EQL65W88H28 65 88 28
EQL65W65H30 65 65 30
EQL100W40H18 100 20 20
EQL100W20H20 100 40 18
EQL90W65H30 90 65 30
EQL150W50H30 150 50 30
EQL300W40H20 300 40 20
Alumina Plate Rectangular 99.8%
ModelLength (mm)
Width (mm)
Thickness (mm)
AL-P220-220-6 220 220 6
AL-P150-80-6 150 80 6
AL-P102-25-6 102 25 6
AL-P90-65-6 90 65 6
Alumina Crucible Low Form
Alumina Crucible Lid
Alumina Crucible High Form
Alumina Plates
Alumina BoatRectangular
Highpurityaluminaproductscanwithstandveryhightemperatureunderreducing,inertorhighvacuumcondition.Theyremaingoodchemicalresistanceunderhightemperatures,andhaveexcellentwearandabrasionresistance.Aluminaproductscanwithstandupto1750°C.
STATIC SHEILDING BAG
EQ-DZQ300B-1
•VacuumsealPolymerLi-IonbatterywithDZQ-300VacuumSealingMachinebeforeshipping•3.1miltranslucentmetallicbagsforeasycontentidentification.•Metal“Faradaycage”layershieldsproductsfromelectricenergyinsideandpreventsstaticbuild-up.•4-layersprotectionguardsagainstchargesinsideandout.•Variablesizeavailablewhichare: -6” x 8”-8”x12”-9”x12”-18”x12”
PRODUCTS CATALOG
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QUARTZ BOAT
DUST-FREE WIPER
EQ-QB-0210
EQ-QB-4025S
EQ-QB-6025 EQ-QF-0806
Quartzboatismadefromhighpurityquartz(4Npurity)with1200°Cworkingtemperature.
Model Dimension Features
EQ-QB-0210 20x10x8mm CanfitinMTIGSL-1100XandOTF-1200X-S(1”O.Dtubefurnace)
EQ-QB-1017 100 x 17 x 10 mm CanfitinMTIGSL-1100XandOTF-1200X-S(1”O.Dtubefurnace)
EQ-QB-1042 100x42x20mm CanfitinMTI50-80mmO.Dtubefurnace
EQ-QB-1062 100x60x26mm CanfitinMTIOTF1200-80tubefurnace(3”-80mmO.Dtubefurnace)
EQ-QB-3062 300x60x28mm CanfitinMTIOTF1200-80tubefurnace(3”-80mmO.Dtubefurnace)
EQ-QB-4284 420x80x40mm CanfitinMTIOTF1200-100tubefurnace(1000O.Dtubefurnace)
EQ-QF-0806 218x162x50mm •Constructsaflatsurfaceinsidetheprocessingtubewherecanputsampleon •CanbefitinMTIVBF-1200X-H8BenchTopVacuumChamberFurnace
EQ-QB-1025 Diffusionof1”waferprocessing
•Designfordiffusion,oxidationandannealing1”Siwafer•CanfitinMTIOTF-1200X-S50tubefurnace(2”tubefurnace)
EQ-QB-8025 Diffusionof8”waferprocessing
•CanfitinMTIGSL1100X8tubefurnace•Cancarry25piecewafersof8”diameterineachboat
EQ-QB-2025 Diffusionof2”waferprocessing
•Cancarry25piecewafersof2”diameterx0.5mmthicknessineachboat•CanfitinMTIOTF1200-3tubefurnace(3”tubefurnace)
EQ-QB-3025 Diffusionof3”waferprocessing
•Cancarry25piecewafersof3”diameterx0.5mmthicknessineachboat•CanfitinMTIOTF1200-4tubefurnace
EQ-QB-4025 Diffusionof4”waferprocessing
•Cancarry25piecewafersof4”diameterx0.5mmthicknessineachboat•CanfitinMTIOTF1200X6tubefurnace
EQ-QB-6025 Diffusionof6”waferprocessing
•Cancarry25piecewafersof6”diameterineachboat•CanfitinMTIGSL1100X8tubefurnaceandCompactVacuumChamberFurnaceEQ-VBF-1200X
EQ-QB-4025S Diffusionof4”X4”waferprocessing
•Cancarry25piecewafersof4”x4”squarex0.5mmthicknessineachboat•CanfitinMTIOTF-1200X-5L,VBF-1200X-H8,andOTF-1100X-8.5tubefurnace
Model Specifications Features
WIPER-YX-2001
•Weight/gram:85-95g/m2•Thegradeofsuitability:
class 100• Thickness: 180-200
um• Composition: 75%polyester and 25%nylon•Size:4”x4”• Packing methods: 100pcs/bag• Sealed edge methods:lasersealededge
•Thedust freemicro-fiberclothwiper isknittedwith 100% complete continuous micro-fiber.Thefoursidesofwipecloth iscutbythe lasersealed-edge technology. It prevents fiber lossand sharply reduces micro-dust generation,idealforcleanwafer/substratesurface•Thedusk-freewiperiscleanedwiththeD.I.waterof grade of 18 M-ohm and packed under 10class clean room•Highlyefficientwatersuctionabilityandnoteasytocausechemicalreactions• Pre-cut 9”x18” wiper and sold in 60 pcs perbag•Itissoft,andwillnotscratchthesurfaceofany
material
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79
BATT
ERY
PACK
S
LiFePO4 BATTERIES
www.mtimalaysia.com || www.mti-indonesia.co.id
Lithium Iron Phosphate (LiFePO4, LFP) is one of Li-Ion rechargeable battery for high powerapplications,suchasEVcar,PowerToolandRChobby.LFPcellsfeaturewithhighdischargingcurrent,nonexplosive,longcyclelife(>[email protected],IECStandard),butitsenergydensityislowerthannormalLi-Ioncell(Li-Co)buthigherthanNiMHcell.LFPcellhas3.2Vnominalworkingvoltageandshallbecut-offpowerat3.6-3.8Vpercellduringcharging.TherangeoftheDCvoltageofferedfortheLFPcellis3.2V,6.4V,9.6V,12V,24V,48V,72V,and64V.
Voltage, V Capacity, mAh Energy, Wh Type Size
3.2
1,250 4.8 18650 65mmx23mm
13,200 42 26650 60 mm x 60 mm x 85 mm
60,000 192 40152SE 88mmx88mmx189mm
12
600 7.68 14505 60mmx60mmx22mm
6,000 72 MotorcycleBattery 125mmx68mmx97mm
40,000 512 PolymerBattery 208mmx126mmx88mm
48
20,000 1,024 PrismaticBattery 178 mm x76 mm x165 mm
40,000 2,048 PrismaticBattery 365mmx261mmx258mm
200,000 13,000 PrismaticBattery 88mmx88mmx189mm
96
40,000 4,100 PrismaticBattery 65mmx23mm
100,000 10,000 PrismaticBattery 60 mm x 60 mm x 85 mm
200,000 20,000 PrismaticBattery 88mmx88mmx189mm
LiFePO4 Prismatic Battery
LiFePO4 Polymer Battery
LiFePO4 18650 Battery
LiMnNi BATTERIESLow internal cell resistance is key to fast charging and high-current discharging. In an 18650 package, Li-manganesecanbedischargedatcurrentsof20–30Awithmoderateheatbuildup. It isalsopossible toapplyone-secondloadpulsesofupto50A.Acontinuoushighloadatthiscurrentwouldcauseheatbuildupandthecelltemperaturecannotexceed80°C(176°F).Li-manganeseisusedforpowertools,medicalinstruments,aswellashybridandelectricvehicles.
Voltage, V Capacity, mAh Energy, Wh Type Size
3.7 8,000 29.80 26650 67mmx53mmx26mm
7.4 4,000 29.60 26650 59mmx30mmx75mm
14.8 12,000 177.60 Polymer 65mmx95mmx150mm
18.5 12,000 222.00 26650 148 mm x 88 nmm x 84 mm
25.9 12,000 310.80 26650 190mmx84mmx84mm
88 7,200 259.20 26650 270mmx66mmx82mm
LiMnNi 26650 Battery
LiMnNi Polymer Battery
LiNiMnCo BATTERIESLithiumNickelManganeseCobaltOxidealsolithium-mananese-cobalt-oxide(LiNiMnCo,NMC,NCM),Li[NiMnCo]O2basedCathode&GraphitebasedAnode,isthenewestgenerationLi-Ionrechargeablebatteryforhighpowerapplications,suchasEVcar,E-scooterandE-bike.TheNMCcellscompromisebetweenhighcurrentrateandhighcapacityrate.ComparedwithLiCoO2seriesLi-Ioncell,theNMCcellsprovidehigherenergydensitywithlowercost,longcyclelife(>[email protected],IECstandard).NMCcellhas3.6+/-0.5Vnominalworkingvoltageandshallbecut-offpowerat4.15-4.20Vpercellduringcharging.
Voltage, V Capacity, mAh Energy, Wh Type Size
3.67,200 25.92 26650 58 mm x 30 mm x 85 mm
14,400 51.84 26650 114 mm x 30 mm x 85 mm
14.47,200 103.68 26650 144 mm x 56 mm x 70 mm
10,800 272.16 26650 190mmx84mmx98mm
50.414,400 518.4 26650 138 mm x 114 mm x 155 mm
30,000 1,080 26650 190mmx165mmx118mm
LiNiMnCo 26650 Battery
PRODUCTS CATALOG
All of the power packs come with the Battery Management System (BMS).We can provide BMS for customized Battery Power Packconfiguration
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TOTAL SOLUTION FOR ADVANCED MATERIAL RESEARCHAP
PEND
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LI-ION COIN CELL FABRICATION & EQUIPMENT
Furnacetosinterrawactivematerial(Cathode&Anode)
e.g:OTF-1200X-S
Milling Machinetogrindandnormalizethesinteredmaterial
e.g:MSK-SFM-1
Mixertomixactive,conductive,andbinder material into paste in vacuum
e.g:MSK-SFM-7
Coater to coat paste on current collector andattachedHeater used to dry it.
e.g:MSK-AFA-III
Rolling Press(Calendar)torolltheelectrodetodesiredthickness
e.g:MSK-HRP-01
Vacuum Oventobaketheelectrodetodriveawaymoistureinside
e.g:EQ-DZF-6050
Step 1: Electrode Sheet Preparation
Disc Cuttertocutsinglecoatedanode,cathode,andseparatorintodiscshape
e.g:MSK-T-10
SoakthemintoelectrolyteinGlove Box withH2O and O
2lowerthan1ppm
e.g:EQ-VGB-6
Stackthediscsbytheorderinthecoincellcase:Cathode+Separator+Anode+Spacer+Spring(Currentcollectorfrombothelectrodescontacttotheconcavesideoftheeachcasepart)
Electrode Fillertofillproperamountofelectrolyteintothecase
e.g:BD-10ML
Crimping Machinetocrimpthecoincellsothatthebatterycoreissealedinthecase
e.g:MSK-110
Step 2: Cell Assembly
Battery Analyzertotestthecoincell’sperformanceand Impedance Testertomeasurebattery’sinternalresistance
e.g:BST8-3
Step 3: Battery Testing
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81
LI-ION CYLINDRICAL BATTERY FABRICATION & EQUIPMENT
www.mtimalaysia.com || www.mti-indonesia.co.idPRODUCTS CATALOG
APPE
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Furnacetosinterrawactivematerial(Cathode&Anode)
e.g:OTF-1200X-S
Milling Machine togrindandnormalizethesinteredmaterial
e.g:MSK-SFM-1
Mixertomixactive,conductive,andbinder material into paste in vacuum
e.g:MSK-SFM-7
Coater to coat paste on current collector andattachedHeater used to dry it.
e.g:MSK-AFA-III
Rolling Press(Calendar)torolltheelectrodetodesiredthickness
e.g:MSK-HRP-01
Step 1: Electrode Sheet Preparation
Slitting Machine to cut electrode sheettostripsofdesiredsize
e.g:MSK-CSE-300
Ultrasonic Welding Machine tojoinmulti-layers of electrode and tabs to collectors
e.g:MSK-800
Step 2: Cell Assembly (Winding Method)
Battery Analyzertotestthebattery’sperformanceand Impedance Testertomeasurebattery’sinternalresistance
e.g:BST8-3
Step 4: Battery Testing
Winding MachinetoformlayersofAnode,Separator,andCathodeintoacellcore
e.g:MSK-112A
Short-Circuit Detectortotesttheintegrityofthecell
Vacuum Oven to remove anymoisturewithinthecell
e.g:EQ-DZF-6050
Spot Welding Machine to connect cell tothebottomofthecase(grounding)
e.g:MSK-330A
Grooving Machine to create indent on theneckofthecaseforpropersealing
e.g:MSK-500-18650
Step 3: Case Sealing
Spot Welding Machinetoattachthecelltocap(positive)
e.g:MSK-SFM-7
Electrolyte FillingtoinjectthecasewithelectrolytewithinGlove Box
e.g:BD-10ML
Crimping MachinetoalignthecapwithopenendoftheandsealitinsideGlove Box
e.g:MSK-510-18650
Battery Analyzertocharge/dischargetheassembled battery for cell activation
e.g:BST8-3
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TOTAL SOLUTION FOR ADVANCED MATERIAL RESEARCHAP
PEND
ICES
LI-ION POUCH BATTERY FABRICATION & EQUIPMENT
Step 1: Electrode Sheet Preparation
Step 2: Cell Assembly
Furnacetosinterrawactivematerial(Cathode&Anode)
e.g:OTF-1200X-S
Milling Machine togrindandnormalizethesinteredmaterial
e.g:MSK-SFM-1
Mixertomixactive,conductive,andbindermaterial into paste in vacuum
e.g:MSK-SFM-7
Coater to coat paste on currentcollectorandattachedHeater used to dry it.
e.g:MSK-AFA-III
Rolling Press(Calendar)torolltheelectrodetodesiredthickness
e.g:MSK-HRP-01
Electrode Mold Cutting Machine tocutoutelectrolytewithlead
e.g:MSK-180
Stacking Machine tostacklayersinformofAnode+Separator+Cathode+Separator+...
e.g:MSK-111A
Stacking Method
Winding Method
Slitting Machine to cut electrode sheettostripsofdesiredsize
e.g:MSK-CSE-300
Winding MachinetowindstripsofAnode+Separator+Cathode+Separator+...
e.g:MSK-112A
Ultrasonic Welding Machine to weldcurrentcollectorandtabtogether
e.g:MSK-800
Vacuum Oven to remove any moisturewithinthecell
e.g:EQ-DZF-6050
Cup Forming Machinetopunchpouchshapetoplacethecell
e.g:MSK-120
Top & Side Heat Sealing Machine to sealtopandshortersideafterdouble-up
e.g:MSK-140
Step 3: Case Formation & Sealing
Vacuum Primary-Sealing Machine to seallongersideundervacuum
e.g:MSK-115A
Battery Analyzertocharge/dischargetheassembled battery for cell activation
e.g:BST8-3
Electrolyte FillingtoinjectthecasewithelectrolytewithinGlove Box
e.g:BD-10ML
Battery Analyzertotestthebattery’sperformanceand Impedance Testertomeasurebattery’sinternalresistance
e.g:BST8-3
Step 4: Battery Testing
Short-Circuit Detector totesttheintegrityofthecell
Copyright © All Rights Reserved
83
METHOD SUMMARIZATION
www.mtimalaysia.com || www.mti-indonesia.co.idPRODUCTS CATALOG
APPE
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ES
Process Definition Diagram
Hydro-thermal Method Amethodtoproducedifferentchemicalcompounds and materials usingclosed-system physical and chemicalprocessesflowinginaqueoussolutionsat temperatures above 100°C and pressures above 1 atm
Hot Isostatic Pressing A manufacturing process used toreduce the porosity of metals andincrease the density ofmany ceramicmaterials.Thisimprovesthematerial'smechanicalpropertiesandworkability.
Chemical Vapor Deposi-tion
Chemical vapour deposition is atechnique whereby gaseous reactantscan be deposited onto a substrate.
Induction Heating A process which is used to bond,harden or soften metals or otherconductivematerials.Formanymodernmanufacturing processes, inductionheatingoffersanattractivecombinationofspeed,consistencyandcontrol.
Spray Pyrolysis A process in which a thin film isdepositedbysprayingasolutiononaheatedsurface,wheretheconstituentsreacttoformachemicalcompound
CSS Deposition The coating method that involvespurely physical processes such ashigh-temperature vacuum evaporationwith subsequent condensation, orplasma sputter bombardment ratherthan involving a chemical reaction atthesurfacetobecoatedasinchemicalvapor deposition.
Fluidized Bed CVD Synthesis
Acombustiontechnologyusedtoburnsolidfuels.Fuelparticlesaresuspendedin a hot, bubbling fluidity bed of ashand other particulate materials (sand,limestone etc.) through which jets ofair are blown to provide the oxygenrequired forcombustion.Theresultantfast and intimate mixing of gas andsolidspromotesrapidheattransferandchemicalreactionswithinthebed.
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THE ULTIMATE THIN FILM COATING SOLUTION PROVIDERAP
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ICES
LJ-UHV COMPANY PROFILE
Copyright © All Rights Reserved
Inorder tosupportourcustomer towardssophisticate researchespecially in theareaofNanomaterial,Semiconductor,MEMS,PV,LED,SurfaceAcousticWaveTechnology,ThinFilmCoating,andUltraHighVacuumTechnology;wearecurrentlyformingbusinessalliancewithLJ-UHVinprovidingthetechnologyknowhowandequipmentfortheaboveendeavor.Asidefromtheprecisionequipment,wearesupplyingacompletelineofpurematerial,compound,andsubstrateinvariouspurityforcompletionofourequipments.
Thecustomizedsystemsareinclusiveof:PulseLaserDepositionCoating,UltraHighVacuumMagnetronSputtering,ContinuousVacuumMagnetronSputtering,IonSputtering,ElectronBeamEvaporation,ThermalEvaporationwithPlasmaAssistedVaporDepositionEquipmentandInductionCoupledPlasma.LJ-UHVCustomizedSystemarefeaturedwithHuman-MachineInterface(HMI)controllerforuserconvenienceinhandlingtheirsystem.
LJ-UHV Site Work located in Taiwan
HIGH VACUUM CONFOCAL SPUTTERING SYSTEM
PROCESS CHAMBER• Single layered inner chamber made of SUS304; while outer chamber is electro-polished•Rectangulartypeofchamberconsistsoffrontdoorwith4”viewport•Dimension:380Dx420Hx380Wmm•Removabletopplateforconfocalsputteringsource•1”diameterofconfocalsputtercathodeinletattopplate•Mainhighvacuumport,lowvacuumgaugeport,capacitancepressuregaugeport,roughexhaustpumpingport,andRGAspareportareinstalledattherearplate•Rectangularexhaustpumpingportandspareviewportare installedat therightside
plate•Aluminumalloytypefontaccessdoorwithshuttershieldingtopermituncoatedviewingwindow•Rotationinletport,substrateup/downinletport,andthermaltestportareinstalledatthebaseplate
HIGH VACUUM PUMPING CONTROL• High vacuum turbo pump with flow rate up to 400 l/sec equipped with air cooling
function •Oilsealmechanicalpumpwithflowrateupto500l/sec•Pumpcontrolusingpneumaticsystem
VACUUM GAUGE CONTROLLER & DISPLAY•DualdigitalLEDdisplaywith5setpointsrelay(Lowvacuumgaugefrom760torr-10-3
torrwhilehighvacuumgaugeupto10-3 torr - 10-8 torr)•Digitaldisplayforload-lockchamber(Lowvacuumgaugefrom760torr-10-3 torr)
PRESSURE & FLOW CONTROL•Massflowcontrollertocontrolinertgasandworkinggas•Processpressurecontrollertoholdfunctionforplasmaignition
SPUTTER CATHODE & POWER SUPPLY•Watercoolingmagnetronsputtercathode•PlasmageneratorRF300W&automatchnetwork•PlasmageneratorDC1000W•Sputtershutterpneumaticcontrol
SUBSTRATE HEATER & TEMPERATURE CONTROL•4”dia.vacuumheatingpipe•Maxworkingtemperature:450°C•PIDtemperaturecontrollerwithdigitaldisplay
SYSTEM CONTROL•PLCcontrolwith7”LCDtouchscreen•Auto/manualoperation•Graphicuserinterface•Vacuumpumping/ventingcontrol•Facilitiesmonitor&safetycontrol•Processmanualcontrol•Alarmmessagedisplay•Safetyinterlock
RACK & FOOT PRINT•1250Lx1000Wx1800Hmm•Castorwheelwithadjusterpads
85
PECVD SYSTEM FOR DEPOSITION OF SiC, SiOx, SiNx
www.mtimalaysia.com || www.mti-indonesia.co.idPRODUCTS CATALOG
APPE
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DEPOSITION CHAMBER/LOAD-LOCK CHAMBER•MaterialmadefromaluminumalloyT6061• Interior and outer surface are anodized to prevent corrosion by plasmachemical•Embeddedheatingwaterflowisfabricatedintoaluminumchamberwalltocontrolthereactorenvironmenttemperature•3viewportsof2”dia.locatedatsidewallsforobservationanddiagnostics,withplasmashieldingtoavoidRFpowerleakage•Top/bottomdoorwithmanualopening/closingoperation•Doorsealisdesignedaselastomericseals•3viewportsof2”dia.locatedatsidewallsforobservationanddiagnostics,withplasmashieldingtoavoidRFpowerleakage•Top/bottomdoorwithmanualopening/closingoperation•Doorsealisdesignedaselastomericseals•Pumpingneckisdesignedformaximumpumpingefficiency
ThissystemisspecificallydesignedforthinfilmdepositionsolutionsofSiC,SiNx,SiO
x,andSiO
xN
ymaterialsusedinthemanufacturingof
IC’s,MMICs,LEDs,LDs,VCSELs,andwaveguidesandMEMSdevicesofSiandGaAssubstrates.ItutilizesacapacitivelyRFcouplingplasmatechnology to independently bias the upper electrode and/or substrate for controlling the plasma density and ion energy. Reproduciblethermaluniformityusingacalottoheaterwiththermocouplecalibrationwithoptimizeduniformgaslaminarflowstreamprovidedbyspeciallydesignedshowerheadandpumpingchannels.Thissystemiscustomizedtooptimizedepositionrate,refractiveindex,filmstresscontrol,yield,throughput,anddeviceperformance.
ETCHING CHAMBER PUMPING SYSTEM & VACUUM MEASUREMENT•Equippedwithdrypumpwithcorrosionresistant(800lpm)•Rootpumpsystem(250m3/h)• LJ APT-63, vacuum throttling valve, ISO 63 flange, with adaptive
pressure controller by stepper motor actuator•Capacitancemanometerwithfullscalerangeof10torrismountedonthereactorwallandwillbemonitoredonthesystem(10torr-10mtorr)•Piranivacuumgauge ismountedon thepumpingneckandwillbemonitoredonthesystem(1000torr-1torr)•Compressedairdistribution
ACCESSORIES FOR DUAL RF SOURCES’ SAMPLE STAGE & SHOWER HEAD•4”showerheadwithcapacitiveparallelupperandlowersamplestage
electrodes•Wafercarrierwhichismadefromgraphitewillbepositionedonthe3”dia.uniformlyconstanttemperaturestage•Pre-fabricatedcarriertoacceptupto3”wafer•Backsideresistiveheater(max350°C)withPIDautomaticcontrolonthesystemtoreachsamplestage’stemperatureuniformity•Thesamplestagetemperatureiscontrolledaccuratelyandconstantlyduring theprocessbetweenambient -350°Cwithin+/-3°Cof theset point•The sample stage is shielded for plasmaconfinement and stabilitythatwouldallowonlythecarriersurfacetobeexposedtotheplasma,enhancingtheplasmauniformityonthewafersurfaceandpreventingthedepositiononthechamberenvironment•Showerheadof theupperelectrode isdesignedtoprovideuniformlaminargasflowacrossthesurfaceofthewafertoachieveexcellentuniformmasstransfermechanism•Theareaoftheupperelectrodeislargeenoughsothatthesputteringoftheupperelectrodematerialisnegligible•ThebiasvoltageoftheupperelectrodeisdrivenbytheRFgeneratorwithaircoolingsystem•RFpowersupply (300Woutputat13.56MHz)with remotesetup/readoutdigitalcontrolpanel,coupledtoanautomaticmatchnetwork
PROCESS GASES DELIVERY SYSTEM•Gasenclosurepanelforallprocessingpipinglines•AllpipinglinesareconstructedfromelectropolishedSUS316Ltube,orbitalweldedandVCRfittings•Eachgaslinesconsistsofametalsealedmassflowcontrollerandbellowsealednormalclosedpneumaticactuator isolationvalvesonbothinletandoutlet
SYSTEM CONTROL/OPERATION MODE•Industrialcomputerisusedtocontrolthesystemtogetherwith
PLC• Graphic multi-tasking real time control/display softwareoperatingforallsensors•Multipleoperationmodes: 1) Manual 2)Automatic 3) Maintenance4)Automaticprocesssequencegeneratingandediting•Automaticprocesssequences: 1) Auto-pump2)Autovent3)Multi-stepsdepositionandin-situcleaningprocedures•Alarmhistoryandprocessparametershistorybackupabilities•Fullysafetyinterlockmechanismforbothhardware/software•Authoritiesenactment
PLC System
View ports at the side wall
86
THE ULTIMATE THIN FILM COATING SOLUTION PROVIDERAP
PEND
ICES
ELECTRON BEAM EVAPORATOR SYSTEM
Copyright © All Rights Reserved
Thissystemisspecificallydesignedformetal/non-metalfilmdepositionprocessofR&Dlaboratoryandpilotplantproductionapplications.Keyperformancefeaturesareincludingevaporationofuniformmetal,dielectric,andinsulatorfilmsonavarietyofsubstratematerials(metal,semiconductor,insulator).Additionalfeaturesareincludingversatility,easeofoperation,andlongtermreliabilityforevaporationofsingleandmulti-layerthin/thickfilms.
Substrate Stage
DEPOSITION CHAMBER•DtypechamberwithsinglelayermadeofSUS304,electropolished•Weldedonsemi-rectangularpipesforcooling•Frontopening/closingdoorwithautomaticelectro-magneticlock/unlock•Doorsealisdesignedaselastomericseal•Viewport4”dia.onthefrontdoorandopticalreflectortopermitunresistedviewingofallinstalleddepositionsourcesandsubstratefixturing•Highvoltagefittings,sweepsignal,crucibleindexdrive,E-Gunbodycoolingandshutterdrivefeedthroughareprovidedatthebaseplate• High vacuum valve, heating power feedthrough, thermocouple fittingfeedthrough,iongaugehead,fittingventvalve,vacuumgaugeheadandRGAfittingareprovidedatthesidewallofthechamber• Gas inlet feedthrough, rotation drive, and quartz sensor feedthrough areprovidedatthetopplate
VACUUM PUMPING SYSTEM•Highvacuumturbopumpwiththepumpingspeedupto600lpsand
ultimate pressure up to 5x10-10mbarisequipped•Water cooling to cool down the turbo pump, power supply and
controller are provided•LJAPT-63, vacuum throttling valve, ISO63flange,with adaptive
pressure controller by stepper motor actuator•Rotaryvanepumpupto800lpmwithroughingvalve,bellow-sealedopen/close by pneumatic actuator, venting valve, anti turbulencevalvefordelayedventing,forelinevalveareinstalled•Compressedairdistribution
VACUUM GAUGES & CONTROLLER•DualchanneldigitaldisplaycontrollerwithRS232interface;upto5
set point to 3 units of sensor connection•Measurementrangefrom1000to5x10-9mbar(1000to5x10-4 for lowvacuumPiranigaugeand5x10-3 to 5x10-9mbarforhighvacuumhotiongauge)•Pre-fabricatedcarriertoacceptupto3”wafer
ACCESSORIES FOR SUBSTRATE STAGE• Substrate carrier rotary driver with flange to connect the layerthicknessmeasuringsystem•Indirect-drivegearmotorviahighperformancerotarymotionferro-fluidfeedthrough•Rotationspeedfrom5-20rpmofsinglesubstratecarrier• Backside quartz radiant heater arrays with reflector, depositionshield(max320°C)•Vacuumstep-down/isolationtransformertominimizethepossibilityofthespuriousglowdischargesandfeedbackfromE-Beampowersupply
ACCESSORIES OF PROCESS SOURCES•Telemarkrotatablemulti-pocketsources•Electronbeamevaporator6kW•Sourcewith270°deflection•Anglegeardrivebaseplatefeedthroughforcrucibleindex•XandYsweepsignalfeedthrough•Rotatingcruciblewith4pocketsof7cc•Variablehighvoltageunitandbeampositioningcontrol
PROCESS CONTROLLER/LAYER THICKNESS MEASUREMENT• Telemark deposition controller for layer thickness, rate, andprocessmonitoring•Memoryspacefor9setsofmaterialparametersinconjunctionwith99processsequencesand999processsteps• Sequence routine for 100 sequence steps frommaterial and
process parameters•Upto99foldrepeatroutineforaprocess•ProcesscontrolbyRS-232interface•Quartzsensorwith6MHzoscillator•Withcoolingpipinglinessandsignalcables(adjustableheight)
SYSTEM CONTROL/OPERATION MODE• PLC based operation control with color touch screen HMI
interface•Graphicmulti-taskingrealtimecontrol/displaysoftwareoperating
for all sensors•Multipleoperationmodes:1)Manual;2)Automatic; 3) Maintenance •Vacuumpumping/ventingcontrol•Facilitiesmonitoringandsafetycontrol• Alarm message display. safety interlock and authorities
enactment
87
HIGH VACUUM REFLOW OVEN
www.mtimalaysia.com || www.mti-indonesia.co.idPRODUCTS CATALOG
APPE
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ES
This system consists of rapid thermal annealing capability, aremultipurpose “cold wall” process ovens. It is ideal for R & D, processdevelopment,andlowtohighvolumeproduction.Fullyautomaticproductioncapabilityisavailablebyin-lineintegrationwithdiebonders,bydirectsystemintegrationintothediebonder,bycassettetocassettewafertransfer,androboticsystemsubstratehandling.Themainapplicationisvoid-freesolderingandthegenerationofperfectflux-lesssolderjoints.Perfectsolderingbyuseofliquidfluxorsolderpasteisaccomplishedbytheoptionallyavailablesolderpastefeature,protectingtheoriginalprocesschamberwallsandvacuumsystem.
Duetotheleaktightchamberdesignandstainlesssteelpipingandfittings,a5x10-6mbar(Torr)vacuumcanbeachieved.TheHeliumleakrateisonlyabout5x10-9mbarl/s.Theinertgasatmospherescanbeasgoodas1ppmresidualOxygen.Processingundersteadystateorpulsingpressureupto2bar(30psi)ispossible.Theprocessingunderreactiveatmospheresenhancessignificantlythewettingpropertiesofnon-virginsurfaceswithoxideandorganiccontaminations.Thekeyforvoid-freesolderingistheperfectwetabilityassistedbyvacuumpriortoandduringreflowandbymechanicalimpacttotheliquidsolderbypulsedpressure.EventhebottomsideofanoxidizedcoppercoinplacedontheheatedplateisperfectlycleanwhenexposedtoNitrogen,enrichedwithFormicAcidvapor(HCOOH)forveryshorttimeperiodsatlowtemperaturesbetween150°Cuptoamaximumof200°C.SimilarresultsathighersurfacetemperaturescanbeobtainedbysafeprocessingunderpureHydrogenwiththededicatedHydrogensafetyfeature.ArH2plasmaistheidealsurfacecleaningmethodpriortoandduringfluxfreereflowofelectrolyticplatedwaferbumps.
Thealuminumprocesschamberwithpolishedinnerwallsisaccessedviaamanuallylockinglidwithviewingwindowmadeofsafetyglass.Theviewingwindowoptioncanbeanopticalglassusedeitherforlaserbasedsurfacemetrologyorforhighmagnificationmicroscopebasedprocessmonitoring.Lidandbottomarewatercooled.Theoptionofaprogramcontrolledmotorized lidopen/closeand locking isavailable.OnthebottomsideofprocesschamberthereisanIRquartz lampandcoolinggasnozzlearray.EachlampisplacedinsideaquartzglasstubesealingtheIRlampfromchamberatmosphere.AlsothelidcanbeequippedwithanIRlamparrayandcoolinggasnozzles.Byoffsettingtheupperlamparrayby90°fromthelowerlamparrayandmultipleheaterzonecontrolthebesttemperatureuniformitycanbeobtainedinboththeXandYdirectionsovertheheatedarea.Theheatedlowmassplate,availableinavarietyofdifferentmaterials,islocatedabovethelowerfield.ItisheatedbytheradiantenergyemittedbytheIRlampsandcooledbythecoolinggasflowagainstit.ThePIDcontrollerwithcontrolthermocouplelocatedinsidetheheatedplatecontrolspreciselytheIRlampenergyandcoolinggasflow.Thestandardmaterialforheatplatesisaluminum.Dependingontheapplication,othermaterialsareavailableincludingsurfacetreated,CVDSiCcoatedgraphite,SiC,PolySi,quartzglass,copper,metalmesh,etc.
Forrapidcooldownrequirementssuchassolidificationofthesolderundervacuumasusedtominimizethegrainstructureofthesolderjointorto“freeze”theperfectliquidsolderballshapeformedundervacuum,awatercooledheatedplatecanbeinstalled.Theheatedplateisattachedbyquickreleasefastenersforeasyreplacement.ForrapidrampingapplicationssuchasAuGealloyingonGaAsdirectradiantenergyheatingwithlowmass,wafercarriersandsusceptorareavailable.
Substrate Stage
CHAMBER & COVER• Rectangular SS304 chamber with double layer, water cooling
fabricated•Chambersize:230x230x25Hmm•Consistsofmainexhaustport, roughpumpingport,andvacuumgaugeport•20mmdia.holesforquartztubeinstallation•1”temperaturemeasurementhole•Basepoleconsistof200x200mm•Watercooliungtopliftcover:230x230x20Hmm•2”highvacuumviewport
VACUUM EXHAUST MODULE•Rotarymechanicalpumpupto500lpm•Consistsoffrontendpneumaticcontrolvalveandpneumaticcontrolvalveforexhaustbuffering• Digital vacuum gauge with pressure range from atmosphere
pressure to 10 x 10-3 torr
MASS FLOW CONTROLLER•Tocontrolinertgasandworkinggasintochamber•Equippedwithpneumaticcontrolisolationvalve•HardwaretoreadoutdataintoPLCprogramming
SYSTEM CONTROL/OPERATION MODE•PLCprogrammablecontrolwith10”colortouchscreenHMI•Vacuumexhaust/ventcontrol•Massflowcontrol/workingprocedurecontrol•Programmabletemperaturecontrol•Alarmdisplayandrecord;authoritycontrol,andinterlockforsafety
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THE ULTIMATE THIN FILM COATING SOLUTION PROVIDERAP
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ICES
ICP-RIE SYSTEM FOR METAL, DIELECTRIC & SEMICONDUCTOR
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Thissystemisspecificallydesignedfordryetchingsolutionsofawidevarietyofmetals,dielectrics,andsemiconductormaterials.ItutilizesanInductivelyCoupledPlasma(ICP)sourcetogenerateahigh-densityplasmawithaseparateRFpowersupplytoindependentlybiasthesubstrateforcontrollingtheionenergy.Reproducibleanduniformthermalcontrolisachievedwithactivecooling/heatingusingmechanicalclamping,(helium)backsidecooling,andarecirculatingfluidelectrode.Therobust,reliable,production-provenICP-100iscustomizedtooptimizesmoothsidewallprofilecontrol,yield,throughput,anddeviceperformance.
LOAD-LOCK CHAMBER, PUMPING SYSTEM & VACUUM MEASUREMENT•SinglelayerSUS304,electropolishedchamberwithmanualopen/closedoorwithaviewport•Chamberdimension:150dia.x100Hmm•Manualloadingofthewafercarrierontoloaderfingerstage•Linearautomaticmagnetic(withmanualoverride)vacuumtransfersystemforthetransferofthecarrierbetweentheload-lockchamberandmainvacuumchamber•Up/downwaferlifterforaccepting/releasingwaferfrom/ontocarrierfingerintoprocesschamber•Carriersformounting4”waferorsmallirregularpieces•3”diameterviewportforobservingsamplesonmanuallyopen/closelid•Roughingpumpupto300lpmwithvacuumlevellessthan5x10-4 torr•Pneumaticcontrolforroughingvalve,purge/ventvalve,forelinevalve•VacuumgaugecontrollerattachedwithPiranigaugeheadsrangesfromatmospherepressureto5x10-4
torrETCHING CHAMBER PUMPING SYSTEM•Fabricatedfromasolidbilletof6061-T6aluminumalloyandinteriorsurface anodized to prevent corrosion by chorine or bromine basedplasmachemical•Chamberdimension:200dia.x130Hmm•Doorsealisdesignedaselastomericseals•Embeddedheating/coolingwaterflow inaluminumchamberwall tocontrolthereactortemperature•Twoviewportswith2”dia.,atsidewallforobservationanddiagnostics,withplasmashieldtoavoidRFpowerleakage• Turbomolecularpump is corrosion resistant (400 lps)withnitrogengaspurge,watercooling,andpowersupply/readoutcontrolunitwithvacuumlessthan5x10-6 torr• Two stage rotary vane pump is corrosion resistant (660 lpm) withvacuumlevellessthan5x10-4 torr•Vacuumthrottlingvalvewithadaptivepressurecontrollerbystepper
motor actuator•Capacitormanometerismountedonthereactorwallanditismonitoredonthecomputersystem• Closed loop pressure control via throttling valve and capacitancemanometer,processpressurecontrollablerange0.2-10Pa•Vacuumgaugecontrollerwithrangesfromatmospherepressureto5
x 10-10 torr•Corrosionresistanceiongaugeheadwithrangesfrom1x10-2 to 1 x
10-9torrandisolationvalveareinstalledbetweenreactorandionizationgaugeheadtopreventcontaminationandcorrosion•Pneumaticcontrol consistsof roughingvalve,purge/vent valve,and
foreline valve
RF BIAS POWER SUPPLY•SERENRFpower supply (600Woutput at 13.56MHzwith remotesetup/readoutdigitalcontrolpanelandcoupledtointegratedautomaticmatchingnetwork•Outputpowerisremotelycontrolledbycomputersystem
SUBSTRATE STAGE COOLING•DirectliquidHeliumcoolingofthesubstratestagewithmanometerforpressuremonitoring•Substrateelectrodesurfacetemperatureiscontrolledbycoolingwaterjacket
ICP SOURCE CONSTRUCTION•Ceramictube,8”innerdia.andinductivecoilassemblytohigh
density plasma source• Forced air cooling for inductive coil assembly and ceramic
tube•Processgases injectedthroughgasshowerheadforuniform
plasma distribution
RF ETCHING POWER SUPPLY• SEREN RF power supply (1 kW output at 13.56 MHz) withremotesetup/readoutdigitalcontrolpanelcoupledtointegratedautomaticmatchingnetwork•Powerrangevariablebetween10Wto1kW• Plasma density is more than 10 x 1011 cm3, minimum ionenergy:10eV• Stable and uniform plasma over 4” wafer area, +/-5%
uniformity•Outputpowerremotelycontrolledbycomputersystem
PROCESS GAS DELIVERY SYSTEM•Gasenclosurepanelforallprocessinggaslines• Mass flow controllers integrated with data read out to PLCprogramming
SYSTEM CONTROL/OPERATION MODE•PLC/PCbasedindustrialcomputertocontrolcompletesystem• Graphic multi-tasking real time control/display software
operation for all sensors and drivers•Multipleoperationmodes: 1) Semi-auto 2)Auto 3) Maintenance•Automaticprocesssequence: 1) Auto-pump 2)Auto-vent 3)Auto-heat 4)Autotransferfromload-locktoreactorchamber 5)Multi-stepsetchingandin-situcleaningprocedure• Alarm history, process parameters, data logging, authoritiesenactment,andfullysafetyinterlockmechanismareprovided
Substrate Stage
Lab Scale PECVD
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IN LINE SPUTTER SYSTEM
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ESSputter System PLD+Sputter System
Lab Scale PECVD
Crystal PullerConfocal Sputter with Load-lock Chamber
Lab Scale Thermal Evaporation System
In Line Sputter for CIGS Solar Cell
CUSTOMIZED EQUIPMENT ACCORDING TO CLIENT REQUEST
CHARACTERISTIC•Designedforpilotscale,experimentalusage•SuitableforSolarCell,Laser,EMI•Horizontalsputteringdeposition•Uniformgasflowconductancedesign•Hightargetutilizationofmagnetroncathodedesign•Quickexchangingtargetdesign•19”TFTpanelHMI•Alarmhistoryrecord•DC&RFpowersafetyinterlock
90
THE ULTIMATE THIN FILM COATING SOLUTION PROVIDERAP
PEND
ICES
LINEAR/ROTARY FEEDTHROUGH
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ANGLE ADJUSTMENT AND LINEAR FEEDTHROUGH•StandardlengthFrom14”to40”35CFmountflange•Customersizeacceptable
ROTARY FEEDTHROUGH•16CF(short)torque:2.2kg/cm•16CF(long)torque:3.3kg/cm•35CFtorque:16kg/cm
SPUTTER CATHODE
•Bytype -Magnetic +Suitableforferrousmagneticmaterial -NonMagnetic +Generalpurposes(metallic,non-metallic,alloy) +DC/RFpowersupplysuitable•Byshape -Round +Smallproduction,research +Innerdia.:2”,3”,4”,6”…. -Rectangular +Bigvolumeproduction +Allsizesaresuitable -Flexmount +Canadjustthetargetangle +InnerDia.:2”,3”,4”,6”….
ION SOURCE
ROTATION SUBSTRATE HOLDER & HEATER
TYPES OF SUBSTRATE HEATER•QuartzInfraRedheater Commontype,easycontrolbutlimitationintemperature(600°C)•Alloyheatingelement -Tubularheatingelement +Cheap,lowtemperature,suitableforbigarea -Ultrahighvacuumheatingelement +Expensive,highvacuumheatingelementwithlowoutgas -Highresistanceoxidizeheatingelement +Expensive,coatingprocessrequiregasflowofoxygenair
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CHAMBER & HARDWARE
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ES
PROCESS CHAMBER•Type:Spherical,Cylinder,Box SUS304,Electropolished
LOAD-LOCK CHAMBER•Type:Spherical,Cylinder,Box….. SUS304,Electropolished Optional Suitableforultrahighvacuumusage
Providing the original equipment supply, consultation,calibrationservices,andequipment integrationforultrahighvacuum(1x10-8 ~1x10-9 torr) application in thin film coating, Molecular BeamEpitaxial,Nano-wiresynthesisandetc.
CHAMBER & HARDWARE