tutorial software as integrating technology in complex systems
TRANSCRIPT
www.gaudisite.nl
Abstract
This tutorial describes the integrating value of software in complex systems. The extensive use of software technology to integrate other technologies has a signif- icant impact on the product characteristics and on the product creation organi- zation and process. This tutorial provides insight in the relation between software and the system, and it provides insight in the consequences for the product and the organization. Some recommendations are provided to cope with these conse- quences.
Distribution
This article or presentation is written as part of the Gaudí project. The Gaudí project philosophy is to improve by obtaining frequent feedback. Frequent feedback is pursued by an open creation process. This document is published as intermediate or nearly mature version to get feedback. Further distribution is allowed as long as the document remains complete and unchanged.
October 28, 2018 status: concept version: 0.1
logo TBD
• The role of software in general
• Levels of abstraction
• Requirements perspective
• Conclusion
Tutorial Software as Integrating Technology in Complex Systems 2 Gerrit Muller
version: 0.1 October 28, 2018
Twinscan AT1100
Tutorial Software as Integrating Technology in Complex Systems 3 Gerrit Muller
version: 0.1 October 28, 2018
ASMLtwinscanPhoto
source
reticle
lens
wafer
Tutorial Software as Integrating Technology in Complex Systems 4 Gerrit Muller
version: 0.1 October 28, 2018
ASMLlithographyPrinciple
p
Tutorial Software as Integrating Technology in Complex Systems 5 Gerrit Muller
version: 0.1 October 28, 2018
ASMLstepperVsScanner
imaging alignment
Tutorial Software as Integrating Technology in Complex Systems 6 Gerrit Muller
version: 0.1 October 28, 2018
ASMLkeySpecifications
lin e
w id
m
100
1000
10
Tutorial Software as Integrating Technology in Complex Systems 7 Gerrit Muller
version: 0.1 October 28, 2018 ASMLmooresLaw
Overlay budget (1999)
error RS
1 nm
Tutorial Software as Integrating Technology in Complex Systems 8 Gerrit Muller
version: 0.1 October 28, 2018
ASMLoverlayBudget
RS Chuck
Compartment
mirrors and IF's
ATHENA Measurement Accuracy
ATHENA Mounting Accuracy/Stability
LS setpoints
Lens Heating
Inaccurate Lens acceleration Feedforward
Wafer Expansion by Exposure
Wafer Expansion by input temperature
offset
coolplates)
Sound
Reticle Errors
Reticle Heating
Fiducial Calibration
TIS Measurement
Fiducial Stability
Fiducial Calibration
Metrology inaccuracy
Metrology Errors
HP Inaccuracy
Servo error
Chuck expansion
Chuck deformation
Illumination settings (NA )
T stability in LS lightpath
Lens Dynamics
P&T correction of Lens
Tutorial Software as Integrating Technology in Complex Systems 9 Gerrit Muller
version: 0.1 October 28, 2018
ASMLoverlayInfluenceDiagram
Exercise 1, 10 minutes
Make a 3 picture description (What, How, biggest challenge) of your own system.
Tutorial Software as Integrating Technology in Complex Systems 10 Gerrit Muller
version: 0.1 October 28, 2018
Fab Context of Waferstepper
reticule logistics
reticule production
semiconductor design
Tutorial Software as Integrating Technology in Complex Systems 11 Gerrit Muller
version: 0.1 October 28, 2018
TSAITcontextWaferstepper
other players: equipments vendors system integrators lease companies fab designers consultants mask makers resist makers wafer makers OEM’s: laser intimate partners: lens business models of the customer:
design houses foundries vertical integration
Limited number of customers; Many systems per customer
Tutorial Software as Integrating Technology in Complex Systems 12 Gerrit Muller
version: 0.1 October 28, 2018
INSEbusinessContext
managers business manager marketing manager product manager operational manager project leader sales manager quality manager logistics manager line manager technology manager
customer purchaser decision maker user operator maintainer
suppliers component manufacturer outsourced design
engineers system engineers experts manufacturing engineers customer support
other government customer's customer banks, insurance
Tutorial Software as Integrating Technology in Complex Systems 13 Gerrit Muller
version: 0.1 October 28, 2018 INSEstakeholders
Multitude of Disciplines
reflection
Tutorial Software as Integrating Technology in Complex Systems 14 Gerrit Muller
version: 0.1 October 28, 2018 INSEtechnologies
Complexity of Waferstepper Context
managers business manager marketing manager product manager operational manager project leader sales manager quality manager logistics manager line manager technology manager
customer purchaser decision maker user operator maintainer
suppliers component manufacturer outsourced design
engineers system engineers experts manufacturing engineers customer support
other government customer's customer banks, insurance
waferstepper
other players: equipments vendors system integrators lease companies fab designers consultants mask makers resist makers wafer makers OEM’s: laser intimate partners: lens
business models of the customer: design houses foundries vertical integration
Limited number of customers; Many systems per customer
yield
value of performance
(MHz) CD control
key driver trade-off
Tutorial Software as Integrating Technology in Complex Systems 15 Gerrit Muller
version: 0.1 October 28, 2018
INSEcomplexity
component 1
component 4
component 3
component 2
realized
During integration numerous
problems become visible
Tutorial Software as Integrating Technology in Complex Systems 16 Gerrit Muller
version: 0.1 October 28, 2018
MSintegration
Exercise 2, 10 minutes
Make a 3 picture description (Application context, Value chain, technologies) of your own system.
Tutorial Software as Integrating Technology in Complex Systems 17 Gerrit Muller
version: 0.1 October 28, 2018
Relative Contribution of SW
physics/chemistry, etc.
1970 2000
Tutorial Software as Integrating Technology in Complex Systems 18 Gerrit Muller
version: 0.1 October 28, 2018 RSWrelativeEffort
Control Hierarchy along Technology axis
sensor optical
Fe ed
legend
Tutorial Software as Integrating Technology in Complex Systems 19 Gerrit Muller
version: 0.1 October 28, 2018
RSWcontrolHierarchy
Characterization of disciplines
Tutorial Software as Integrating Technology in Complex Systems 20 Gerrit Muller
version: 0.1 October 28, 2018
RSWdisciplineCharacterization
10 0
10 1
10 6
10 5
10 4
10 3
10 2
nu m
s
Tutorial Software as Integrating Technology in Complex Systems 21 Gerrit Muller
version: 0.1 October 28, 2018
IALApyramid
100Wph
Tutorial Software as Integrating Technology in Complex Systems 22 Gerrit Muller
version: 0.1 October 28, 2018
ATpyramidExamples
components
subsystems
functions
frames motors sensors robot bolts nuts
air mounts PCBs ICs cables cabinets
OS computer disks monitor drivers
database user interface TCP/IP comms package
laser
illuminator
electronics infra
overlay CD control productivity
Tutorial Software as Integrating Technology in Complex Systems 23 Gerrit Muller
version: 0.1 October 28, 2018
ATlayers
SW implements functionality
determines emerging qualities
Tutorial Software as Integrating Technology in Complex Systems 24 Gerrit Muller
version: 0.1 October 28, 2018
TSAITlayers
Exercise 3, 10 minutes
Make a toplevel decomposition of the software in your system and estimate the amount of software of the constituting parts
Tutorial Software as Integrating Technology in Complex Systems 25 Gerrit Muller
version: 0.1 October 28, 2018
System or Software?
to be used for
of the software
Tutorial Software as Integrating Technology in Complex Systems 26 Gerrit Muller
version: 0.1 October 28, 2018
VREQsystemOrSoftware
f de
ta ils
software requirements
system requirements
Tutorial Software as Integrating Technology in Complex Systems 27 Gerrit Muller
version: 0.1 October 28, 2018
VREQpyramid
software subsystem
operational choices synergy, tools, ...
Tutorial Software as Integrating Technology in Complex Systems 28 Gerrit Muller
version: 0.1 October 28, 2018
VREQsoftwareSubsystem
10 0
10 1
10 6
10 5
10 4
10 3
10 2
10 7
problems av
al an
ch e
Tutorial Software as Integrating Technology in Complex Systems 29 Gerrit Muller
version: 0.1 October 28, 2018
VREQdynamics
How many pages are in your Software Requirements Specification?
Tutorial Software as Integrating Technology in Complex Systems 30 Gerrit Muller
version: 0.1 October 28, 2018
Block Diagram of a Waferstepper
laser light source
coordination
light
reticles
wafers
Tutorial Software as Integrating Technology in Complex Systems 31 Gerrit Muller
version: 0.1 October 28, 2018
FAIwaferstepperSubsystems
laser illumi-
nator lens
system
control
coordination
vertical
motion
hori-
zontal
motion
vertical
motion
hori-
zontal
motion
ethernet
VMEVME
Tutorial Software as Integrating Technology in Complex Systems 32 Gerrit Muller
version: 0.1 October 28, 2018
FAIcontrolHierarchy
performance requirements
Tutorial Software as Integrating Technology in Complex Systems 33 Gerrit Muller
version: 0.1 October 28, 2018
FAIcontrolFrequency
store
Tutorial Software as Integrating Technology in Complex Systems 34 Gerrit Muller
version: 0.1 October 28, 2018
FAIcontrolEvolution
loss of overview (150kloc fits in 1 mind, 2Mloc not)
(more than?) exponential increase of coupling
1:1 relation HW:SW becomes n:m relation
R e
lia b
ili ty
s
Tutorial Software as Integrating Technology in Complex Systems 35 Gerrit Muller
version: 0.1 October 28, 2018
FAIevolutionConsequences
Exercise 5, 10 minutes
Visualize the (SW) evolution of your system. What is your current phase?
Tutorial Software as Integrating Technology in Complex Systems 36 Gerrit Muller
version: 0.1 October 28, 2018
Different Focus of Software and System
SW engineering focus qualities functionality maintainability variability
concepts structure (generic) mechanisms
System engineering focus qualities productivity image quality reliability
concerns integral design (quality, balance) system context lifecycle operational processes
concepts domain requirements models
education principles heuristics analysis and synthesis processes
Tutorial Software as Integrating Technology in Complex Systems 37 Gerrit Muller
version: 0.1 October 28, 2018
TSAITfocus
Registry
Application
Tutorial Software as Integrating Technology in Complex Systems 38 Gerrit Muller
version: 0.1 October 28, 2018
MVmechanismArchitecture
illuminatorlaser
sensor
NA
abberations
transmission
Tutorial Software as Integrating Technology in Complex Systems 39 Gerrit Muller
version: 0.1 October 28, 2018
TSAITphysicsView
NA abberations transmission
Tutorial Software as Integrating Technology in Complex Systems 40 Gerrit Muller
version: 0.1 October 28, 2018
TSAITphysicsAndSW
symptoms
SW is alpha tested before system integration
SW team uses own specification and design process
SW specification is in SW jargon or formalism
colocation per function, subsystem or quality
higher level processes are shared
continuous system integration
interaction between SW, HW and system engineers
Tutorial Software as Integrating Technology in Complex Systems 41 Gerrit Muller
version: 0.1 October 28, 2018
TSAITisolationSymptoms
Exercise 6, 5 minutes
What is the degree of integration or isolation of SW in your organization?
Tutorial Software as Integrating Technology in Complex Systems 42 Gerrit Muller
version: 0.1 October 28, 2018
Different Mindsets and Characteristics
System
intangible abstract no goods flow costs "everything is possible"
HW engineering tangible concrete goods flow costs & lead times physics laws
product: sellable self-sustained entity operating in a broader context
inherent performance
reliability
Tutorial Software as Integrating Technology in Complex Systems 43 Gerrit Muller
version: 0.1 October 28, 2018 TSAITconclusion
Abstract
This tutorial describes the integrating value of software in complex systems. The extensive use of software technology to integrate other technologies has a signif- icant impact on the product characteristics and on the product creation organi- zation and process. This tutorial provides insight in the relation between software and the system, and it provides insight in the consequences for the product and the organization. Some recommendations are provided to cope with these conse- quences.
Distribution
This article or presentation is written as part of the Gaudí project. The Gaudí project philosophy is to improve by obtaining frequent feedback. Frequent feedback is pursued by an open creation process. This document is published as intermediate or nearly mature version to get feedback. Further distribution is allowed as long as the document remains complete and unchanged.
October 28, 2018 status: concept version: 0.1
logo TBD
• The role of software in general
• Levels of abstraction
• Requirements perspective
• Conclusion
Tutorial Software as Integrating Technology in Complex Systems 2 Gerrit Muller
version: 0.1 October 28, 2018
Twinscan AT1100
Tutorial Software as Integrating Technology in Complex Systems 3 Gerrit Muller
version: 0.1 October 28, 2018
ASMLtwinscanPhoto
source
reticle
lens
wafer
Tutorial Software as Integrating Technology in Complex Systems 4 Gerrit Muller
version: 0.1 October 28, 2018
ASMLlithographyPrinciple
p
Tutorial Software as Integrating Technology in Complex Systems 5 Gerrit Muller
version: 0.1 October 28, 2018
ASMLstepperVsScanner
imaging alignment
Tutorial Software as Integrating Technology in Complex Systems 6 Gerrit Muller
version: 0.1 October 28, 2018
ASMLkeySpecifications
lin e
w id
m
100
1000
10
Tutorial Software as Integrating Technology in Complex Systems 7 Gerrit Muller
version: 0.1 October 28, 2018 ASMLmooresLaw
Overlay budget (1999)
error RS
1 nm
Tutorial Software as Integrating Technology in Complex Systems 8 Gerrit Muller
version: 0.1 October 28, 2018
ASMLoverlayBudget
RS Chuck
Compartment
mirrors and IF's
ATHENA Measurement Accuracy
ATHENA Mounting Accuracy/Stability
LS setpoints
Lens Heating
Inaccurate Lens acceleration Feedforward
Wafer Expansion by Exposure
Wafer Expansion by input temperature
offset
coolplates)
Sound
Reticle Errors
Reticle Heating
Fiducial Calibration
TIS Measurement
Fiducial Stability
Fiducial Calibration
Metrology inaccuracy
Metrology Errors
HP Inaccuracy
Servo error
Chuck expansion
Chuck deformation
Illumination settings (NA )
T stability in LS lightpath
Lens Dynamics
P&T correction of Lens
Tutorial Software as Integrating Technology in Complex Systems 9 Gerrit Muller
version: 0.1 October 28, 2018
ASMLoverlayInfluenceDiagram
Exercise 1, 10 minutes
Make a 3 picture description (What, How, biggest challenge) of your own system.
Tutorial Software as Integrating Technology in Complex Systems 10 Gerrit Muller
version: 0.1 October 28, 2018
Fab Context of Waferstepper
reticule logistics
reticule production
semiconductor design
Tutorial Software as Integrating Technology in Complex Systems 11 Gerrit Muller
version: 0.1 October 28, 2018
TSAITcontextWaferstepper
other players: equipments vendors system integrators lease companies fab designers consultants mask makers resist makers wafer makers OEM’s: laser intimate partners: lens business models of the customer:
design houses foundries vertical integration
Limited number of customers; Many systems per customer
Tutorial Software as Integrating Technology in Complex Systems 12 Gerrit Muller
version: 0.1 October 28, 2018
INSEbusinessContext
managers business manager marketing manager product manager operational manager project leader sales manager quality manager logistics manager line manager technology manager
customer purchaser decision maker user operator maintainer
suppliers component manufacturer outsourced design
engineers system engineers experts manufacturing engineers customer support
other government customer's customer banks, insurance
Tutorial Software as Integrating Technology in Complex Systems 13 Gerrit Muller
version: 0.1 October 28, 2018 INSEstakeholders
Multitude of Disciplines
reflection
Tutorial Software as Integrating Technology in Complex Systems 14 Gerrit Muller
version: 0.1 October 28, 2018 INSEtechnologies
Complexity of Waferstepper Context
managers business manager marketing manager product manager operational manager project leader sales manager quality manager logistics manager line manager technology manager
customer purchaser decision maker user operator maintainer
suppliers component manufacturer outsourced design
engineers system engineers experts manufacturing engineers customer support
other government customer's customer banks, insurance
waferstepper
other players: equipments vendors system integrators lease companies fab designers consultants mask makers resist makers wafer makers OEM’s: laser intimate partners: lens
business models of the customer: design houses foundries vertical integration
Limited number of customers; Many systems per customer
yield
value of performance
(MHz) CD control
key driver trade-off
Tutorial Software as Integrating Technology in Complex Systems 15 Gerrit Muller
version: 0.1 October 28, 2018
INSEcomplexity
component 1
component 4
component 3
component 2
realized
During integration numerous
problems become visible
Tutorial Software as Integrating Technology in Complex Systems 16 Gerrit Muller
version: 0.1 October 28, 2018
MSintegration
Exercise 2, 10 minutes
Make a 3 picture description (Application context, Value chain, technologies) of your own system.
Tutorial Software as Integrating Technology in Complex Systems 17 Gerrit Muller
version: 0.1 October 28, 2018
Relative Contribution of SW
physics/chemistry, etc.
1970 2000
Tutorial Software as Integrating Technology in Complex Systems 18 Gerrit Muller
version: 0.1 October 28, 2018 RSWrelativeEffort
Control Hierarchy along Technology axis
sensor optical
Fe ed
legend
Tutorial Software as Integrating Technology in Complex Systems 19 Gerrit Muller
version: 0.1 October 28, 2018
RSWcontrolHierarchy
Characterization of disciplines
Tutorial Software as Integrating Technology in Complex Systems 20 Gerrit Muller
version: 0.1 October 28, 2018
RSWdisciplineCharacterization
10 0
10 1
10 6
10 5
10 4
10 3
10 2
nu m
s
Tutorial Software as Integrating Technology in Complex Systems 21 Gerrit Muller
version: 0.1 October 28, 2018
IALApyramid
100Wph
Tutorial Software as Integrating Technology in Complex Systems 22 Gerrit Muller
version: 0.1 October 28, 2018
ATpyramidExamples
components
subsystems
functions
frames motors sensors robot bolts nuts
air mounts PCBs ICs cables cabinets
OS computer disks monitor drivers
database user interface TCP/IP comms package
laser
illuminator
electronics infra
overlay CD control productivity
Tutorial Software as Integrating Technology in Complex Systems 23 Gerrit Muller
version: 0.1 October 28, 2018
ATlayers
SW implements functionality
determines emerging qualities
Tutorial Software as Integrating Technology in Complex Systems 24 Gerrit Muller
version: 0.1 October 28, 2018
TSAITlayers
Exercise 3, 10 minutes
Make a toplevel decomposition of the software in your system and estimate the amount of software of the constituting parts
Tutorial Software as Integrating Technology in Complex Systems 25 Gerrit Muller
version: 0.1 October 28, 2018
System or Software?
to be used for
of the software
Tutorial Software as Integrating Technology in Complex Systems 26 Gerrit Muller
version: 0.1 October 28, 2018
VREQsystemOrSoftware
f de
ta ils
software requirements
system requirements
Tutorial Software as Integrating Technology in Complex Systems 27 Gerrit Muller
version: 0.1 October 28, 2018
VREQpyramid
software subsystem
operational choices synergy, tools, ...
Tutorial Software as Integrating Technology in Complex Systems 28 Gerrit Muller
version: 0.1 October 28, 2018
VREQsoftwareSubsystem
10 0
10 1
10 6
10 5
10 4
10 3
10 2
10 7
problems av
al an
ch e
Tutorial Software as Integrating Technology in Complex Systems 29 Gerrit Muller
version: 0.1 October 28, 2018
VREQdynamics
How many pages are in your Software Requirements Specification?
Tutorial Software as Integrating Technology in Complex Systems 30 Gerrit Muller
version: 0.1 October 28, 2018
Block Diagram of a Waferstepper
laser light source
coordination
light
reticles
wafers
Tutorial Software as Integrating Technology in Complex Systems 31 Gerrit Muller
version: 0.1 October 28, 2018
FAIwaferstepperSubsystems
laser illumi-
nator lens
system
control
coordination
vertical
motion
hori-
zontal
motion
vertical
motion
hori-
zontal
motion
ethernet
VMEVME
Tutorial Software as Integrating Technology in Complex Systems 32 Gerrit Muller
version: 0.1 October 28, 2018
FAIcontrolHierarchy
performance requirements
Tutorial Software as Integrating Technology in Complex Systems 33 Gerrit Muller
version: 0.1 October 28, 2018
FAIcontrolFrequency
store
Tutorial Software as Integrating Technology in Complex Systems 34 Gerrit Muller
version: 0.1 October 28, 2018
FAIcontrolEvolution
loss of overview (150kloc fits in 1 mind, 2Mloc not)
(more than?) exponential increase of coupling
1:1 relation HW:SW becomes n:m relation
R e
lia b
ili ty
s
Tutorial Software as Integrating Technology in Complex Systems 35 Gerrit Muller
version: 0.1 October 28, 2018
FAIevolutionConsequences
Exercise 5, 10 minutes
Visualize the (SW) evolution of your system. What is your current phase?
Tutorial Software as Integrating Technology in Complex Systems 36 Gerrit Muller
version: 0.1 October 28, 2018
Different Focus of Software and System
SW engineering focus qualities functionality maintainability variability
concepts structure (generic) mechanisms
System engineering focus qualities productivity image quality reliability
concerns integral design (quality, balance) system context lifecycle operational processes
concepts domain requirements models
education principles heuristics analysis and synthesis processes
Tutorial Software as Integrating Technology in Complex Systems 37 Gerrit Muller
version: 0.1 October 28, 2018
TSAITfocus
Registry
Application
Tutorial Software as Integrating Technology in Complex Systems 38 Gerrit Muller
version: 0.1 October 28, 2018
MVmechanismArchitecture
illuminatorlaser
sensor
NA
abberations
transmission
Tutorial Software as Integrating Technology in Complex Systems 39 Gerrit Muller
version: 0.1 October 28, 2018
TSAITphysicsView
NA abberations transmission
Tutorial Software as Integrating Technology in Complex Systems 40 Gerrit Muller
version: 0.1 October 28, 2018
TSAITphysicsAndSW
symptoms
SW is alpha tested before system integration
SW team uses own specification and design process
SW specification is in SW jargon or formalism
colocation per function, subsystem or quality
higher level processes are shared
continuous system integration
interaction between SW, HW and system engineers
Tutorial Software as Integrating Technology in Complex Systems 41 Gerrit Muller
version: 0.1 October 28, 2018
TSAITisolationSymptoms
Exercise 6, 5 minutes
What is the degree of integration or isolation of SW in your organization?
Tutorial Software as Integrating Technology in Complex Systems 42 Gerrit Muller
version: 0.1 October 28, 2018
Different Mindsets and Characteristics
System
intangible abstract no goods flow costs "everything is possible"
HW engineering tangible concrete goods flow costs & lead times physics laws
product: sellable self-sustained entity operating in a broader context
inherent performance
reliability
Tutorial Software as Integrating Technology in Complex Systems 43 Gerrit Muller
version: 0.1 October 28, 2018 TSAITconclusion