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Cy E.L.I. sprl

Technical manual for Orion 6 (PCI)

Ultra high resolution,32 bits Image grabbing system for

Windows(TM) 2000, XP

- Orion board release 6.1--

Wiring and connection to SEMBoard Configuration

Software installation and setup

-Release 3 software 6.6x

February 2005 E.L.I. sprl Belgium

Orion 6 for PCI Page

This document has a restricted access and has to be used by trained peoples only. No warranty is given in any way by E.L.I. on the connection and system useage.

In some particular SEMs, some differences may exist between the technical sheets and the actual electronics configuration; the described connection points may have to be

adapted to the current electronic equipment and/or software version.We, at E.L.I. Belgium, have no responsibility regarding the quality of the connection to

the SEM and potential damage on the SEM electronics.Please check chapter 17 about computer system requirements.

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Index

1. BOARD CONNECTION AND INSTALLATION ( QUICK GUIDE ).....................................................71.1 CONNECT THE CABLE TO THE SEM ELECTRONICS...........................................................................................71.2 INSERT THE BOARD IN A FREE PCI SLOT............................................................................................................. 71.3 SOFTWARE PACKAGES INSTALLATION.................................................................................................................. 71.4 OPEN AN SEM DRIVER........................................................................................................................................ 71.5 ADJUST POTENTIOMETERS ON THE BOARD AND PARAMETERS IN THE SOFTWARE................................................7

2. INSTALLING THE WINDOWS DRIVERS...................................................................................................82.1. UNDER WINDOWS 95, 98 AND ME.................................................................................................................. 82.2 UNDER WINDOWS 2000 AND XP...................................................................................................................... 8

3. INSTALLATION OF THE ORION SOFTWARE PACKAGE.................................................................123.1. DESCRIPTION OF THE DISTRIBUTION FILES........................................................................................................ 123.2. DESCRIPTION AND INSTALLATION OF THE WING LIBRARY................................................................................123.3. INSTALLATION OF ORION SOFTWARE PACKAGE VERSION 6..............................................................................123.4. ACCESS RIGHTS UNDER WINDOWS 2000 / XP...............................................................................................123.5. ONE MORE REMARK ON XP.............................................................................................................................. 12

4. CONFIGURATION OF THE ORION SOFTWARE..................................................................................134.1. OPENING A SEM DRIVER FILE.......................................................................................................................... 134.2. CREATING A NEW, BLANK SEM DRIVER...........................................................................................................144.3. IMPORTANT REMARK ABOUT GROUNDS AND ELECTRICAL ISOLATION.................................................................164.4. VERIFYING THE FRAME- AND LINE PULSES: USE OF SOFTWARE OSCILLOSCOPES...............................................174.5. VIDEO SIGNAL (CONTRAST AND BRIGHTNESS) AND IMAGE TIMING (DISTORTION) ADJUSTMENTS......................194.6 IMPORTANT REMARKS........................................................................................................................................ 194.7. DESCRIPTION OF THE TECHNICAL SETUP UTILITY..............................................................................................20

4.7.1. System Information and Options.................................................................................................................. 204.7.2. Visual mode parameters............................................................................................................................... 204.7.3. SEM synchronization page (photo mode).....................................................................................................214.7.4. Scanning Analysis........................................................................................................................................ 23

4.8. USING THE INTEGRATED SCAN ANALYZER........................................................................................................24

5. ADJUSTING IMAGE SIZES AND TIMINGS ..........................................................................................265.1. GENERAL.......................................................................................................................................................... 265.2 GENERAL VIEW OF THE IMAGE FORMATS STORED IN A DRIVER..........................................................................265.3 THE VISUAL SPEED EDITOR.............................................................................................................................. 275.4 THE NEW IMAGE SIZE EDITOR.......................................................................................................................... 28

5.4.1. Introduction and line averaging................................................................................................................... 285.4.2 Layout when editing an image size in slow scan (visual) mode:.....................................................................295.4.3 Layout when editing an image size in record mode.......................................................................................30

5.5. NOTE ON THE HORIZONTAL AVERAGING LEVEL................................................................................................305.6. DEFINING AND MODIFYING THE DWELL FACTOR................................................................................................31

6. SEM CONNECTION CABLE AND SUB-D CONNECTOR PIN OUT.................................................326.1. CABLE AND 15-PINS SUB-D CONNECTOR PIN OUT.........................................................................................326.2. MORE DETAILS ON THE PINS OF THE DB15 CONNECTOR................................................................................33

7. CABLING............................................................................................................................................................. 357.1.TOOLS AND OPERATING PRECAUTIONS..............................................................................................................357.2. DESCRIPTION OF THE AVAILABLE CABLES......................................................................................................... 35

7.2.1 Cable type OR6CA (standard cable shipped by default)................................................................................357.2.1.1. Description:..................................................................................................................................................... 35

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Orion 6 for PCI Page7.2.1.2. Use with SEM types:......................................................................................................................................367.2.1.3. Note:.................................................................................................................................................................. 36

7.2.2 Cable type OR6CB....................................................................................................................................... 367.2.2.1. Description:..................................................................................................................................................... 367.2.2.2. Use with SEM types:......................................................................................................................................367.2.2.3. Schematic:.......................................................................................................................................................367.2.2.4. SEM connection..............................................................................................................................................37

7.2.3 Cable type OR6CC................................................................................................................................ 377.2.3.1. Description:..................................................................................................................................................... 377.2.3.2. Use with SEM type:........................................................................................................................................377.2.3.3. Internal cable connections:.........................................................................................................................377.2.3.4. Notes:................................................................................................................................................................ 37

7.2.4 Cable type OR6CD....................................................................................................................................... 387.2.4.1. Description:..................................................................................................................................................... 387.2.4.2. Use with SEM types:......................................................................................................................................387.2.4.3. Cable connections:........................................................................................................................................387.2.4.4. Note:.................................................................................................................................................................. 38

8. CONNECTION INFORMATION – WHERE TO CONNECT INSIDE SEMS?...................................398.1. REQUIRED SIGNALS.......................................................................................................................................... 398.2. LEO S90, S90B, S100, S120, S200, S240.............................................................................................398.3. LEO S360...................................................................................................................................................... 408.4. LEO 250......................................................................................................................................................... 408.5. LEO 435, 435I, 440.................................................................................................................................... 408.6. JEOL JSM 35, 35C, 35 CF........................................................................................................................... 408.7. JEOL JSM 840, 840A................................................................................................................................... 418.8. JEOL JSM 5200, 5300, 5400..................................................................................................................... 418.9. JEOL JSM 6300, 6300F, 6400, 6400F.....................................................................................................418.10 TOPCON SM510 , ABT-32........................................................................................................................ 418.11 HITACHI S4000............................................................................................................................................. 428.12 PHILIPS 5X5.................................................................................................................................................... 43

FIG A. FIG. B..................................................................................................................................................... 43

9. DSM SPECIALS................................................................................................................................................ 459.1. SETUP OF THE RS232 PARAMETERS FOR THE LEO DSMS.............................................................................469.2. DSM USER OPTIONS........................................................................................................................................ 479.3. OTHER FIELDS.................................................................................................................................................. 47

10. IMPORTANT REMARK ABOUT GROUNDS.........................................................................................48

11. INSTALLING SOFTWARE OPTIONS IN ORION RELEASES 6.XX..............................................4911.1. INTRODUCTION............................................................................................................................................... 4911.2. OPENING A NEW OPTION KEY FILE.................................................................................................................. 49

11.2.1. From the technical setup utility.................................................................................................................. 4911.2.2. From the main toolbar............................................................................................................................... 50

12. ORION BOARD LAYOUT............................................................................................................................ 51

13. BOARD CONNECTORS AND TEST POINTS.......................................................................................52

14. OTHER USER TEST POINTS.................................................................................................................... 53

15. POTENTIOMETERS...................................................................................................................................... 54

16. INSTALLATION FLOWCHARTS...............................................................................................................5516.1. OVERALL SYSTEM INSTALLATION.................................................................................................................... 5516.2 CONNECTING THE CABLE TO THE SEM........................................................................................................... 56

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Orion 6 for PCI Page16.3 INSTALLATION OF THE SOFTWARE PACKAGES..................................................................................................5716.4 OPENING OR CREATING A SEM DRIVER.......................................................................................................... 5816.5 VERIFYING SEM DRIVER DATA IN VISUAL MODES........................................................................................5916.6 VERIFYING SEM DRIVER DATA IN RECORD MODES......................................................................................60

17. PC SYSTEM REQUIREMENTS.................................................................................................................. 61

18. IMPORTANT NOTE...................................................................................................................................... 61

19. TECHNICAL SUPPORT DURING INSTALLATION............................................................................62

20. CDROM............................................................................................................................................................. 63

21. HOW TO CONTACT US ?........................................................................................................................... 64

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1. Board connection and installation ( quick guide )

1.1 Connect the cable to the SEM electronics

1. turn SEM OFF2. locate required signals : frame blanking pulse, line blanking pulse, video mixed with

micron marker data, electronic (signal) ground. Connect cable wires (for the color description, please refer to par. 5). Please note that the Orion board is preadjusted for a connection to 5V signals, like CMOS or TTL. So if you connect to this type of signals, you do not need to adjust P5…P7.

3. turn SEM ON4. verify SEM signals on 15-pins DB connector at the end of the cable (see cable pinout in

par. 5).

1.2 Insert the board in a free PCI slot

1. Power off computer2. put the board in an empty PCI slot (the board measures 260 mm x 115 mm)3. secure the board with a screw. Check that the board is correctly inserted in slot.4. start the computer5. configure the “Plug and Play” Windows section: see chapter 2 for details.

1.3 Software packages installation

1. install WinG library ( see chapter 2.2 )2. install Orion software ( see chapter 2.3 )3. run Orion software by double-clicking the new icon

1.4 Open an SEM driver

1. open the appropriate SEM driver file : see chapter 5 , par. 5.12. quit. Run Orion again. Install the ordered options from the .OPT file : see § 10

1.5 Adjust potentiometers on the board and parameters in the software

1. enter the technical configuration : see par. 52. display the oscilloscope, adjust the vertical and horizontal syncs : see par. 5.3.3. grab an image and adjust the video with P10 and P8 (video input #1) : see par. 5.4.4. quit and run the software again, in order to force a complete configuration.

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2. Installing the Windows drivers

Very important points

Before doing anything else, please verify that :

- The BIOS settings indicate that a non-plug and play OS is installed (and reset the DPMI and/or BIOS configuration data after inserting the board)

- You won’t install in a Compaq computer- You won’t use NT4.

2.1. Under Windows 95, 98 and ME

When Windows starts, it automatically prompts you for a dedicated driver (message “new hardware detected”). You must follow these steps: click “next” until Windows asks for a driver location. Specify for example the “A:” drive and remove any diskette from the drive. Then click “next” again until Windows says that no driver was found.

At this stage, the PCI Orion board is already configured. There is no need to open any Windows ( !) driver because no software package other than Orion will use the board hardware.

2.2 Under Windows 2000 and XP

Note : the image on the left is from win2K, the one on the right is from XP.

Step 1. Turn computer off, insert Orion board in a empty slotStep 2. Turn computer on. When Windows detects the new hardware, it shows the following window. Hit the “next” button.

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Step 3. Select the second option for locating the proper Orion driver, then hit “next” in the new window below:

Step 4.In the new window below, select “Imaging Devices” in the list and hit “next”

Step 5. This displays the following step. Hit the “Have Disk” button for opening the appropriate Windows driver. This driver is located in folder “\Win2k&XP Drivers” on the CDROM delivered with the system (the driver name is TvicPCI.sys, associated with TvicPCI.inf and TVicPCI.DLL).

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Note : if the line “E.L.I. sprl Belgium” os not displayed in the list on the left, please proceed normally.

Step 6 : now hit “next” in the following window:

Step 7 Hit “Yes” … You can ignore this useless message :

Step 8 : and hit “next” in this one:

Step 9 : better to say “yes”:

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Step 10 : this is the final step: - click “Finish”.

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3. Installation of the Orion software package

3.1. Description of the distribution files

The files of version 6, as well as the Microsoft WinG library, are distributed on a CDROM. There is a setup.exe file for the Orion program, and one for the WinG library. The Orion files are located on the CDROM in the \Orion6xx directory, and the WinG library is located in \WinGlib. A Readme.doc file explains the major differences between the current version and the previous one.

3.2. Description and installation of the WinG library

The WinG library is a special library designed by Microsoft, which optimizes the speed of the screen-accesses routines (it is used to display the scan lines at very high speed during grabbing).

To install the WinG library, follow these steps:

1. browse the CDROM, run \WinGlib\setup.exe2. follow the instructions, install ONLY the DLLs; the development kit is NOT required3. you do NOT have to restart Windows.

3.3. Installation of Orion software package version 6

The setup program installs Orion in several steps, as follows: 1. select the installation language, French or English2. select and/or create the installation folder3. check if you want the user’s manuals and demo images installed on your hard disk4. the setup utility copies the required files into the different folders5. setup creates a new program icon and folder on your desktop, from the ORION32.EXE file.6. you do have to restart Windows.

3.4. Access rights under Windows 2000 / XP

You MUST have the full Administrator rights to correctly install the Orion software. Please note that version 6.03 and below won’t run under 2000 or XP.

3.5. One more remark on XP

XP has a different toolbar layout and it is recommended that you open the desktop properties and change the windows layout to the “Classic” mode. This will display the windows axactly like 98 or 2000.

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4. Configuration of the Orion software

The whole SEM configuration (including image sizes and timings, synchronization methods, etc) is stored in a dedicated driver file. The extension of the driver file is .SEM, and all drivers are stored in the “…\Drivers\” folder in order to be accessible from the software.

It is also possible to import a driver from a version 5 Orion system (which was using .$NT files).

To enter the technical setup utility, go, in the main toolbar, to

Options / System setup / Technical configuration / SEM Interface.

The required password is install. This gives access to the technical configuration menu, which is the heart of the system. Using a password prevents users from making mistakes or unwanted changes in the driver file.

The Orion software is unlocked when it detects an Orion board. If the board is not properly detected, a warning message is displayed and the system enters the demo mode.

4.1. Opening a SEM driver file

In the technical setup utility, select the « Drivers» page. Hit the “Open” button to display the list of the drivers available in the “…\drivers” folder. Single-click to display information on the driver author, origin, etc . Or double-click in the driver list to open the driver.

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Use this button to create a new, blank driver

Open a driver from disk

Import a version 5 driver and convert to format of version 6

This allows you to store personal and configuration info in the driver file itself

Displays all available image formats and sizes in the opened driver


Opening a SEM driver will change the grabbing parameters: this means that most of the time, opening the appropriate SEM driver will allow you to grab right after opening it. There are however remarks on this point:

1. There are some differences between the 50 Hz and 60 Hz settings in the image sizes (the SEMs are set up differently and the scan times can be different, as well as the number of lines). So the timings have to be checked.

2. On some older SEMs there can be some drifts because of leaky caps or unstable resistors, or temperature, which cause changes in the scan timing. The driver must be adapted to these changes.

4.2. Creating a new, blank SEM driver

When no driver exists for the SEM, it is necessary to create a new one. Follow these steps (please refer to the screen dump above):

a. open the technical setup utilityb. select the “Drivers” pagec. click button “New …”d. enter a name for the new driver.

(A new driver a now been added to the list in the …\Drivers folder. It doesn’t contain any image size and the signal polarity is not verified). You must now:

e. verify and set the correct polarity of the horizontal and vertical blanking signals (see §. 4.3)

f. evaluate which scanning modes will be useable, in both visual and record modes (see note hereunder)

g. for each of the visual modes, define the approximate image size “manually” or with the help of the software scan analyzer. Define also a new speed in the driver (see §. 5.3)

h. for each of the record modes, define an approximate image size or get help from the internal scan analyzer.

Note on the evaluation of the useable scanning modes

As the Orion system has been designed to be high-resolution oriented, there is a maximum speed above which grabbing is not possible. The approximate limits are:

- the line time must be 1 ms or greater- the time per sample must be 0.5 s or above- the duration of the line blanking and the frame blanking pulses must be greater or

equal to 100 s

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It is relatively easy to evaluate the image size that corresponds to a particular scan mode:

1. measure the frame time, in secs2. measure the line time, in ms3. divide the frame time by the line time (after adapting the units); this gives the

number of scan lines Y

4. if the screen ratio is for example 5/4, you get the horizontal definition by multiplying Y by 1.25.

Practically, version 6.03 includes a scan analyzer utility, which scans a complete frame, checks the line time, and displays an image size that should be appropriate for grabbing.

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4.3. Important remark about grounds and electrical isolation

The Orion board has a very important feature for reducing the sensitivity to the noise and ground loops: it provides an electrical isolation between the computer and the SEM. This means that there are two ground potentials, and that you must connect your oscilloscope ground correctly for measuring signals.

Basically, the structure of the synchronization inputs is as follows (extremely simplified):

From left to right: the signal generated by the SEM (3 different signals: frame or “Y” blanking, line or “X” blanking, photo mode start pulse when used) use the same type of input circuitry. The signal is compared by a Schmitt-Trigger to a reference voltage set by a pot (P5, P6 or P7) so that at the ouput of the comparator, we have a digital signal. This signal is applied to an opto-isolator.

So on the left side of the isolator, the electronics is at the SEM ground potential; on the right side, we are on the PC ground potential.

After the isolator, the polarity is controlled by software for further processing.

It is important to note that in the drawing above, TPA is a test point that shows signals right from the cable, TPB shows if your Schmitt trigger is correctly set, and TPC shows the final pulses as they are seen by the software – and by the software oscilloscopes. TPA is representing J1 and J2 on the board, TPB is Test Row 1, and TPC is J7 (please read also chapter 13).

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TPCTPBTPA

To Proc

Software

Progr. InverterISOLATOR

POT

From SEM

Comparator


4.4. verifying the frame- and line pulses: use of software oscilloscopes.

For simplifying the installation procedure, a “software” oscilloscope has been integrated in the package. It displays the Hsync, Vsync and photo pulse signals as they are seen by the software after polarity correction. This tests the cable, trigger level adjustments and board addressing. Select the “Scanning” page in the technical setup utility.

A. Traditional design

Select “Traditional Design” on the right and hit “Software Oscilloscope”. Hit « Start ». This starts the scanning. The upper trace is the horizontal sync (pin 2); the trace in the middle is the frame sync (pin 1); the lower trace is the photo mode pulse signal (pin 9). See also the Orion board layout for testing these signals on test points with a real oscilloscope. I remind you chapter 3.3 above.

Put the SEM in a slow scan mode (around 1…3 frames per second). Check the displayed signals. If they don’t toggle, change P7 ( for adjusting the frame sync until it toggles; change P6 to set the triggering point for the horizontal sync. When connecting to TTL or CMOS signals, the triggering level should be around 2.0 V (middle of signal voltage excursion). The triggering point can be measured on a test point with a DVM. Please read chapter 12 for a description of the test points.

Check the polarity of these signals. They must be “negative”, i.e. must stay at high level most of the time, with pulses going down (to zero volt) during synchronization. These signals can also be checked with an external oscilloscope on test point J7 on the board (connect the oscilloscope ground to the PC chassis for example). If the polarity is not correct, close the oscilloscope, go to the “Scanning” page (par. 3.7.4), and check/uncheck the “invert line sync” / “invert frame sync” check boxes. SEM driver update is automatic.

This is the layout of this oscilloscope:

Remark

The oscilloscope samples the signals every 18 or 36 ms at the fastest, so some short horizontal pulses may not be detected. The important point is to be able to see a general view of the pulses, not to see them all. It is also important to see that there are negative (zero volt) during the sync period. If not, change their polarity (par. 4.7.4).

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You can also check these signals with a “real” oscilloscope. These signals are available on J7. For a description of the available signals, please refer to paragraph 12. It is important to note that sync signals available on test point 2 (on the upper edge of the board) have a “raw” polarity that is not, at this stage, influenced by the software polarity driver. But signals available on J7 are driven by software.

B. New design

I have included a new layout for this oscilloscope, as the previous one had some obvious limitations. The goal was to be able to get more info about the scanning mode, and to be able to control the signal polarity from the oscilloscope window itself.

The time base is not guaranteed to be stable, as again the sampling is done by software, and Windows is everything but a rela-time OS. So it can happen that you see instabilities in the displayed signals. This is normal.

As you can see, this window is divided into two parts: the oscilloscope at the top, and the scanning measurement area at the bottom.

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Exactly like a « real » oscilloscope.

This inverts the blanking pulses, in order to get the correct polarity (must be negative !)

This buttons displays the duration of a scan line, in ms

This displays the duration of the high AND low-states of the line blanking signal, in ms.

And this one counts the number of lines in the current scan mode. From this value, you can deduct the horizontal image size (usually 1.25 times the number of lines).


4.5. Video signal (contrast and brightness) and image timing (distortion) adjustments

When the horizontal- and vertical syncs are properly adjusted and verified on J7 or with the software oscilloscope, it is probably possible to grab an image if the correct driver is loaded. It is now necessary to adjust the image brightness and contrast, but also to verify the timing, in order to get a distortion-free image ... and square pixels.

Put the SEM in slow scan mode. From the main toolbar, display the slow scan grabbing window. Click « sync » to measure the current scanning speed.

If OK, the speed is displayed in a green area in the middle of the window. Select the image format you want to use for grabbing (on a LEO 360, the image size in slow scan is around 768 x 560 pixels). If you get a red area above the sync button, then the current scanning speed was not properly set up in the driver. You need to check the speed (i.e. the line time) again, and modify or add an entry in the speed list (please refer to chapter 4).

Click OK to start grabbing. Wait for the beginning of the next frame, adjust the SEM brightness and contrast levels to their standard levels.

Adjust now the brightness with P2. When you get the image on screen, adjust P2 to correct the contrast. repeat the process until you get a correct image (check the brightness and contrast levels of the screen display itself before).

Press “F2” (stop at end of frame) or “F3” (stop immediately) to stop grabbing (please refer to the user manual).

4.6 Important remarks

Initial SEM image adjustment

Since the Orion system connects in parallel to the photo device, it is required, for proper operation, to set its sensitivity (contrast and brightness) at the same level as the photo device. This means that it is required to first adjust the SEM before adjusting the board contrast and brightness.

Red and blue colors

During grabbing the Orion software replaces the ‘extreme” gray levels by red and blue. By default, black is replaced by red and white by blue. This is a very efficient way to correctly evaluate the image contrast and brightness adjustments.If any of these colors covers too much of the image, then this means that you have too much contrast, or that the brightness is not correctly adjusted. The best is to get just a bit of blue and red – which indicates you have the maximum contrast.

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4.7. Description of the technical setup utility

4.7.1. System Information and Options

4.7.2. Visual mode parameters

4.7.3. SEM synchronization page (photo mode)

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Displays parameters of the Plug and Pray section (for debugging only)

This button opens the system information window, which shows firmware revision level and which options have been installed.

This one displays a square window that can be used to adjust the screen ratio of your monitor and suppress visual distortion due to the monitor.

Sets the default video input for the visual modes.

Sets how to start grabbing in visual mode: either wait for a new frame, or start on the fly, i.e. where the scanning is at the time you press “OK”.


This important paragraph defines how to detect the photo mode transition when you have to grab a photo (one-scan) image.

Please remember that the user must first prepare the Orion system for the photo mode (select the appropriate image size and speed and click OK in the photo mode grabbing window), then he has to press the photo button on the SEM. This is the same way of working as with the photo device: first prepare the photo device, make it ready for a new photograph and then press the photo button. Please read also the cable description in paragraph 5 for more explanations.

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This selects which default video input to use in photo mode

These are the remote drive parameters. If you wire the dry contacts to the SEM photo button (in parallel), you can remote start the SEM from the computer. Press “Pulse relay” to test pulse it.

This defines which synchronization mode has to be used for the record mode.


Explanations on the synchronization modes 1. do not wait – grab directly

The Orion system starts grabbing immediately when the user clicks “OK” in the photo grabbing window. There is no synchronization with the SEM scanning (grabs “on the fly”).

2. wait specified SEM scanning speed

In this case obviously the photo speed has to be different than the one used in slow scan, otherwise a wrong synchronization will happen. This is the only restriction on the user side. The Orion system tracks the SEM speed and starts grabbing as soon as it detects that the SEM speed falls within the range that was set up in the driver (see paragraph 4.4.2). The driver stores up 8 different photo speeds. It’s the user’s responsibility to select the appropriate entry in the list and start the SEM with the correct speed.

3. wait for photo signal to go low

The Orion system will wait here for a negative transition on the photo pulse (from the high to the low level). The input has to be correctly set up with P5 (i.e. the triggering level must be adjusted properly) as described here above in paragraph 5.3. Check with the software oscilloscope that the pulse is correctly decoded by the hardware and the software, on connector J7A1 (PC ground)

4. wait for photo signal to go high

In this case, the Orion system will wait for a positive transition on the photo pulse (from the low to the high level). The input has to be correctly set up with P5 (i.e. the triggering level must be adjusted properly) as described here above in paragraph 5.3. Check with the software oscilloscope that the pulse is correctly decoded by the hardware and the software, on connector J7A1 (PC ground)

5. Leo 90… series, Amray 1000b, 1200b, 1645

This setting is required when connecting to any of the SEMs above. The sync mode is different because the user has to press two buttons to start the photo mode. In this case, the SEM first changes its scanning speed, then it produces a frame sync pulse.

6. ISI-SX40

This SEM scans from right to left in photo mode, so the software automatically flips the image horizontally right after the photo scan. During the image acquisition the image is temporarily flipped.

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7. Philips PSEM 501

This setting has an effect on the synchronization in the record mode.

4.7.4. Scanning Analysis

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Opens a utility which tracks the scanning speed and displays informations about speed and driver setup

Displays a software oscilloscope that shows the SEM digital signals. A new type has been added in this version.

Changing the state of these check boxes inverts the corresponding signal (pls refer to chapter 12, connector J7 for testing the horizontal- (“Hsneg”) and vertical (“Vsneg”) blanking signals with an oscilloscope. If you get a negative image during grabbing, change the state of the third check box.

This is an internal software adjustment. Should be left on mode C.


4.8. Using the integrated scan analyzer

The scan analyzer is a utility that checks the SEM scanning and computes an approximate image size that can be used for grabbing. This new image size can be stored in the driver. It can be edited with the Image Size Editor.

It is important to note that this utility waits for the next top of frame to start the analysis. If you need to check a record scan, then you need to select a slow visual speed, in order to give you the time to start the record mode well before the end of the correct scan.

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This button analyzes the next scan and displays the results, like the ones you can see at the left.

The screen X/Y form factor is used to compute the horizontal image size from the number of lines.

When checking a record scan, the system also computes a scanning time range for synchronization.

Click this button to accept the scanning results and store them in an appropriate location in the SEM driver.

This is the scanning results display area.


After the scan analysis, the system shows in the report if the driver already supports the current scanning speed. If yes, then the following question is displayed :

You have the choice of overwriting an existing image format, or storing the new one in an empty position in the list. The comment associated with the new format is « Computed format ». It is recommended to test it because it generally requires a « fine tuning » with a calibration grid.

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This list displays which image sizes exist for this speed

This is the current speed range that can be used for grabbing


5. Adjusting image sizes and timings ...

5.1. General

There are several ways to open the image data editor. This editor allows you to modify or set up an image record (i.e. a new image size).

When you open the technical setup utility, Orion automatically enters the “installer mode”, which unlocks hidden buttons in many windows.

When in the installer mode, these installer-specific buttons are visible in the following windows:

1. Slow scan grabbing window (you may have to close this window and open it again)2. Photo mode grabbing window (same remark)3. DSM special photo mode grabbing window.

You can also edit speed ranges and images sizes from the technical setup utility.

5.2 General view of the image formats stored in a driver

This is the “formats” page, which gives you a general view of the visual and record modes set up in the current driver. You can open it, for example, from the technical setup utility (go to “Drivers”, click “Formats”).

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Speed range #1, contains up to 5 possible image sizes (configurations)Same as ranges 2 to 8.

Speed range #2Speed range #3

Speed range #4

Speed range #6

Speed range #5

Speed range #7

Speed range #8

Set of 8 possible image formats for grabbing in PHOTO modes (one scan) only

opens the time range window (defines the lowest and highest acceptable scanning speeds for the selected speed range). The time range is valid for a set of 5 image sizes in slow scan, and one photo entry in the photo modes.

Opens the image size editor, which displays and edits all characteristics of the selected image entry (speed 4 shown).

Orion 6 for PCI PageThe window above displays all available image formats. They are all distributed in 9 zones, from 1 to 9, as follows:

zone 1 to 8 define slow scan, or “visual” speeds 1 to 8 (8 formats each) zone 9 displays photo mode formats (8 possible sizes)

This means that up to 8 different slow scan (recurrent, continuous scan) speeds or modes can be programmed in one driver file. Each speed range must have its max. and min. allowed speeds entered by clicking the small button at the bottom of the list. Enter the speeds in multiple of hundreds microseconds; i.e. a scanning speed of 8 ms per line should have a scanning range defined between 7 ms (70 units) and 9 ms (90 units). The comment at the bottom is displayed in the slow scan grabbing window as a user comment. Click this button to open the following window.

5.3 The Visual Speed Editor

As a SEM driver can detect up to 8 visual scanning speeds, it is important to properly set up the ones you plan to use for grabbing. As said before, the highest acceptable speed is around 1 ms per line. Each scanning speed must be defined by a range, i.e. a maximum- and a minimum scan speed.

Example: you need to define a visual speed of 3.3 ms per line (let suppose you measured it with a scope). If there is no other speed close to this one, you can consider a time range between 2.8 and 3.8 ms per line (-500μs, +500μs). Another way of measuring a visual speed is by clicking the “Measure” button on the bottom left of the Visual Speed Editor.

The Visual Speed Editor can be opened from the “formats” page, or when you are editing a record formats, from the Image Size Editor.

5.4 The New Image Size Editor

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lowest limit of the scan speed (here= 2.0 ms)

high limit of the scan speed (here = 4.0 ms).

comment displayed to the user in the slow scan grabbing window

This measures the current scanning speed and proposes an acceptable range for synchronizing the Orion software.

Accept the data displayed and store them in the opened driver.


5.4.1. Introduction and line averaging

The New Image Size Editor allows you to edit any of 8x8=64 visual formats, as well as any of the 8 record mode formats – as in the past. It can be called only in “installer mode” from the slow scan grabbing window, the record mode grabbing window, the “formats” page, or from the technical setup utility. The difference is that you can now integrate lines during grabbing. For example a line integration factor of two means that the Orion system will grab two scanning lines, compute the average of the two and put the result in one image line. This means that the line integration factor divides the effective number of scan lines produced by the SEM, and the result is the vertical image size.

Example: the SEM produces 4000 lines in a record mode. If you use a line integration factor of two, then the image size you would have to use in this case would be around 2500x2000 pixels (a line integration factor of one (i.e. one scanning line corresponds to one image line) would give you a useable image size of 5000x4000 pixels.

Why using a line integration factor of two or four, instead of one? Obviously, if you choose a factor of two vs one, you are dividing the number of lines by two, but also the number of pixels per line, This means that the sampling time per pixel is doubled. And so the dwell value is doubled, which will give you twice the accuracy when defining the X/Y ratio.

Whenever required, the Image Size Editor can make image size rounding, so values of the horizontal- or vertical images sizes can be adapted when closing the editor.

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5.4.2 Layout when editing an image size in slow scan (visual) mode:

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These two parameters are the image size, in the X (pixels) and Y (lines) directions.

the dwell factor defines the pixel timing, i.e. how many microseconds the system will allocate per pixel during grabbing. The image is compressed or expanded horizontally (distorted) when this value is not correct. The top value indicates how many times each pixel is measured ; the bottom value is used to compute the time slice between two pixels.these parameters locate the

grabbing area (i.e. the image) in the SEM scanning area. In other words, they represent the horizontal offset from the left SEM screen border, and the vertical offset from the top of the SEM screen or scanning area.

this note is displayed to the user before grabbing. It has to be carefully chosen, to help him select the appropriate formats from others (if any).

This opens the Scan Analyzer, which checks a complete SEM

scan and compute defaults parameters for grabbingUse this button to analyze the

current scanning speed and set a speed range for synchronizing

This sets the number of SEM scan lines per image line (it reduces the size of the grabbed image)


5.4.3 Layout when editing an image size in record mode

The following window shows the Image Size Editor, when editing a photo mode.

5.5. Note on the horizontal averaging level

In the above window, the horizontal averaging level is 8, and the X image size is 768 pixels. This causes Orion to grab 768x8 = 6144 in each SEM line, average them by 8 (by groups of 8 measures) and store the resulting mean in every 768 pixel of the line. Everything is done transparently to the user and has the big advantage of reducing the noise in the image in real time.

It is important to note that they are two limitations to the horizontal averaging level:

each measure takes roughly 1 μs to execute, so the product may not be bigger than the line time itself. In the above example, we have 6144 measures. They will require 6.1 ms. Since the expected scanning speed is around 13 ms per line, there is no problem because Orion needs only half of the line time to grab and process the pixels.

the number of measures per pixel can only be 1, 2, 4, 8, 16, 32, 64 or 128.

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the difference with the previous window is that the photo mode requires the definition of the speed range used for grabbing (here between 8 ms and 15 ms per line). Remember that the photo mode sync procedure may require Orion to track the SEM speed (see the settings in the photo page of the technical setup utility).

This button opens a utility that will measure the line time, and compute an acceptable time range (+15%, -15% of the computed value). Practically, you must start the photo mode, wait for the scan to stabilize, and measure the scanning speed.


5.6. Defining and modifying the dwell factor

The dwell factor is used internally to compute and generate the pixels timing. Since all SEMs are different, it is nearly impossible to predict its exact value. So it will have to be defined – or refined - during grabbing, by pressing dedicated keys on the numeric keypad., or by using the dedicated utility displayed while grabbing.

The function keys are locked during normal execution of the Orion software. However, they are unlocked as soon as you enter the « installer mode » by entering the correct password in the main menu (Windows 95/98/ME only).

Here are the keys to use and their function (all on the numeric keypad on the right):

modify the sampling frequency (dwell factor): « F9 » and « F10 »modify the horizontal image position by 100 pixels to the left: « F5 »

by 100 pixels to the right: « F8 »by 10 pixels to the left: « F6 »by 10 pixels to the right: « F7 »

During grabbing, press these keys until you get a correct image with no distortion. Place a reference grid in the SEM chamber to be sure what you get on screen.

You can also use the mouse and the following utility to modify the grabbing parameters:

! Important note !Immediately after stopping the grabbing process, the modified parameters

are automatically stored in the SEM driver file on the hard disk drive, except if you abort the grabbing process with the “Trash” button.

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This is the current value of the dwell factor. It is the same parameter displayed in the Image Size Editor.

Use these buttons to modify the value on the left

This is the horizontal position of the grabbing area inside the SEM scanning area. It is the same parameter displayed in the Image Size Editor.

This is the current line number. The maximum value reached is on the right.


6. SEM connection cable and SUB-D connector pin out

6.1. Cable and 15-pins SUB-D connector pin out

The cable is an important device in the grabbing chain. ELI provides cables that are optimized for SEM connection and double tested. This reduces the installation time on-site and simplifies the job of the system installer. A “minimum” connection requires four wires (frame blanking, line blanking, video signal and electronic ground).

Please refer to the corresponding cable description manual for more information on these special cables « Cabling and connection to SEM electronics ».

The Orion board is equipped with a male, double-row, 15-pins connector. This connector groups all SEMs connections signals. They are:

Orion cable signal description

Pin #

Name Description Wire color

Direction

1 Vsync Frame blanking pulse

Yellow > Orion

2 Hsync Line blanking pulse Green > Orion3 Photo

startRelay output (pole 1)

Red > SEM

5 Video 2 Video input 2 Grey > Orion6 Video 1 Video input 1 Pink > Orion7 -12V +12V, 50 mA

outputNc Output

8 +12V -12V, 50 mA output Nc Output9 Photo

pulsePhoto pulse detection

Blue > Orion

10 Photo start

Relay output (pole 2)

Brown > SEM

15 GND SEM ground signal White

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Orion 6 for PCI


6.2. More details on the pins of the DB15 connector

pin 1 - vertical sync signal – yellow wire

Produced by the SEM scan generator. Can be a square or a sweep ramp (it’s much easier and highly recommended, whenever possible, to connect to a square, TTL or CMOS signal). Pot P7 (marked “FR”) on the Orion board adjusts the triggering point (check the triggered signal with an oscilloscope on TP2, pin 2 – polarity is no defined here). The signal MUST be negative on J7A5, i.e. must be a pulse to zero during the sync period. The polarity on J7A5 is controlled by software, so it is required to run the Orion software to be able to change the polarity. Acceptable amplitude: from –8v TO +8v. 10k input impedance.

pin 2 - horizontal sync signal – green wire

produced by the SEM scan generator. Can be a square or a sweep ramp (same remark as for pin1). Pot P6 (marked “LI”) on the Orion board adjusts the triggering point of this signal (check the triggered signal with an oscilloscope on TP2, pin 1 – polarity is no defined here). The signal MUST be negative on J7B3, i.e. must be a pulse to zero during the sync period. The polarity on J7B3 is controlled by software, so it is required to run the Orion software to be able to change the polarity. Acceptable amplitude: from –8v TO +8v. 10k input impedance.

pins 3 and 10 - photostart signal – red and brown wires

This is a pair of « dry », relay contacts. The relay is on the Orion board and is driven by software. When it is connected in parallel with the SEM « photo » button, it allows you to remote drive the photo mode from the PC, like if the user had pressed the button. Normally open. Closes during some hundreds of milliseconds, depending on the software setup (go to technical setup, select “photo” sheet).

pins 6 and 5 - video inputs (input 1 : pink; input 2 : gray)

These two pins are the Orion board video inputs. pin 6 is input #1. Each input is controlled by two pots for brightness and contrast:

pin 6 (video input 1) is controlled by P1 (contrast) and P2 (brightness) pin 5 (video input 2) is controlled by P3 (contrast) and P4 (brightness)

The video A/D conversion range is 2Vptp; 0.6V is the lowest convertible voltage; 2.6V is the highest convertible voltage. The input amplifiers include an amplification of 3x. The digitized video can be measured on TP1, pin 7 (relative to the SEM ground). Before checking the video signal on this test point with an oscilloscope, you must select the proper video entry by software (for example, display the visual grabbing utility and use the drop-down menu to select the right video input).

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pins 11, 13, 15 - SEM GND – white wire

At least one of these pins must be connected to the SEM ground (preferably to the analog ground). The ground wire has to be shielded the same way as the video and sync signals in order to minimize differential EM influences in the cable. Shipped cable connects pin 15 to the white wire.

pins 8 and 7 - +12V and -12V (not connected to any wire)

These pins are reserved only for powering external modules. (available current : max. 50 mA per output).

pin 9 - Photo pulse – blue wire

There are two ways to detect the photo mode before grabbing and to synchronize Orion:

1. by detecting a scanning speed change; if the new speed has been set up in the driver (see Image Size Editor in photo mode, par. 4.4.2)

2. by monitoring a signal generated by the SEM, which pulses when the user presses the “photo” button. This is the job of this input.

This input allows Orion to detect such a signal change, either by detecting that is goes low, or high. This is fixed in the driver file in the technical configuration (in the technical setup utility, go to the “photo” page, and select the synchronization mode in the list).

The triggering point is set by pot P5 marked « PHO ». (verify the triggered signal with an oscilloscope on TP2, pin 3; SEM ground). Acceptable amplitude: from –8v TO +8v. 10k input impedance.

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7. Cabling

7.1.Tools and operating precautions

The following chapter describes how to connect the Orion board to the sync and video signals picked in the SEM electronics.

ELI for most SEMs proposes ready-to-connect cables. They all have been optimized for a type of SEM or connection. Please specify before ordering which SEM you have to connect to, in order to allow us to deliver the optimized cable.

The most important tools are an isolated soldering iron and a correct cable. The SEM electronics must be OFF before making any connection.

If an oscilloscope is required, care must be taken on the power supply and grounding; some SEMs are using special powering schemes. An isolated oscilloscope is recommended.

Standard grounding and static electricity protection techniques are recommended when handling the Orion board, in order to minimize static electricity discharges. The same rules apply when touching the SEM electronics. It is supposed here that these rules are known and followed during the installation steps.

7.2. Description of the available cables

Four different cables are available from E.L.I. They have been designed to reduce the time needed to make the connection to the SEM and are fully tested before shipment.

They are of type OR6CA, OR6CB, OR6CC or OR6CD, and function of the SEM to connect to. In any case, the length has been limited to 3.5 meters (around 11 feet), in order to limit noise sensitivity and spikes induction due to external disturbances and guarantee the high resolution that can be achieved with the Orion system.

7.2.1 Cable type OR6CA (standard cable shipped by default)

7.2.1.1. Description:

equipped with a DB15 connector on the Orion side length is 3.5 meters, about 11 feet made from 1 shielded, 8-wires cable. Type is LiYCY / 8x0.14, 300V cable shielding to be connected to the SEM chassis

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7.2.1.2. Use with SEM types:

LEO 90, 120, 200, 240, 260, 360, 430, 435(i), 440 JEOL 840, 840A, 845, 845IC, 845F, 860, 880 JEOL T100, T200, T220, T300, T330, 6100, 6300(F), 6400(F), 8600, 8800 AMRAY 1000b, 1200b, 1645 series PHILIPS XL series

7.2.1.3. Note:

Cable shielding has to be connected to the SEM chassis in order to protect the signals from electromagnetic influences. This cable is compatible with the playback option. When a playback board has to be connected and inserted in the SEM video chain, a special cable must be ordered.

7.2.2 Cable type OR6CB


equipped with a DB15 connector on the Orion side length is 3.5 meters, around 11 feet made from 3 separate RG58U cables equipped with three BNC connectors on the SEM side (video, hor. sync, vert. sync)


LEO 250

7.2.2.3. Schematic:

DB15 connector pin # wire name signal name

1 VS vertical (frame) sync2 HS horizontal (line) sync6 V1 video input #115 (connected to BNC casing)

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7.2.2.4. SEM connection

connect BNC marked « VS » to SEM termination # 132 connect BNC marked « HS » to SEM termination # 131 connect BNC marked « IN » to SEM termination # 140 (back of video monitor)

7.2.3 Cable type OR6CC


on the SEM side, they are two terminations (1 shielded cable for the video, 1 flat cable for the other signals)

length is 3.5 meters (around 11 feet)

7.2.3.2. Use with SEM type:

JEOL 5800

7.2.3.3. Internal cable connections:

DB15 connector pin # wire name signal name

1 flat cable # vertical (frame) sync2 flat cable # horizontal (line) sync6 IN video input #115 flat cable # GND

7.2.3.4. Notes:

Connect the Orion video input (« IN ») to TP1, on the PCB located on the right side of the SEM

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7.2.4 Cable type OR6CD


equipped with a DB15 connector on the Orion side length is 3.5 meters (around 11 feet)


Philips 505, 515, 525, 535

7.2.4.3. Cable connections:

DB15 connector pin # wire color signal name

1 yellow vertical (frame) sweep ramp2 green horizontal (line) sweep ramp6 red video input #115 blue SEM electronic ground

The vertical frame signal and ground are connected to the 9-pins connector. The video and micron bar signal are BNC connectors. The signal ground is picked up from the BNC connectors.

7.2.4.4. Note:

Cable shielding has to be connected to the SEM chassis in order to protect the signals from electromagnetic influences.

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8. Connection information – Where to connect inside SEMs?

8.1. Required signals

Priority 1 (absolutely required):

the horizontal (line) sync (green wire) the vertical (frame) sync (yellow wire) the slow scan video (input 1 : pink wire) the electronic (preferably) analog ground (white wire)

Priority 2:

the photo pulse detection signal: pulses every time you press the “photo” or “record” button on the SEM

the slow scan video input 2 – gray wire both relay outputs, for remote-driving the SEM record mode from the computer,

when you start grabbing

In nearly all SEMs, except on the Philips 5x5 series, it is possible to use the square pulses for synchronization. With the Philips 5x5, you must connect to the sweep ramps, which requires much more time for adjusting the grabbing parameters in the software.

8.2. LEO S90, S90b, S100, S120, S200, S240

video (plus data) Video system board Skt 24, R69vertical (frame or “Y”) blanking Scan generator board IC F8 pin 1horizontal (line or “X”) blanking Scan generator board IC F8 pin 2Signal from START button (when required) Scan generator board IC C8 pin 8electronic ground Scan generator boardorvideo (plus data) Video system board TP15vertical (frame or “Y”) blanking Scan generator board TP17horizontal (line or “X”) blanking Scan generator board TP7electronic ground Video system board TP1

You can also refer to the following pictures from our WEB site:

www.OrionMicroscopy.com/SEMpics/CZ/90-240/1.JPGwww.OrionMicroscopy.com/SEMpics/CZ/90-240/2.JPGwww.OrionMicroscopy.com/SEMpics/CZ/90-240/3.JPGwww.OrionMicroscopy.com/SEMpics/CZ/90-240/4.JPGwww.OrionMicroscopy.com/SEMpics/CZ/90-240/6.JPG

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http://www.OrionMicroscopy.com/SEMpics/CZ/360/1.JPG






8.3. LEO S360

on the « External Scan Interface » board ref 853378 :

video (plus data) IC H5a, pin 1vertical (frame or “Y”) blanking connector P6horizontal (line or “X”) blanking connector P6electronic ground connector P6

You can also refer to the following pictures from our WEB site:

www.OrionMicroscopy.com/SEMpics/CZ/360/1.JPGwww.OrionMicroscopy.com/SEMpics/CZ/360/2.JPGwww.OrionMicroscopy.com/SEMpics/CZ/360/3.JPGwww.OrionMicroscopy.com/SEMpics/CZ/360/4.JPG

8.4. LEO 250

The BNC connectors are available at the back of the SEM:

video (plus data) BNC connector, back panel no 140vertical (frame or “Y”) blanking BNC connector, back panel no 132horizontal (line or “X”) blanking BNC connector, back panel no 131electronic ground (from video BNC connector)

8.5. LEO 435, 435I, 440

on the big video board on the right side, below :

video (plus data) mini plug 22vertical (frame or “Y”) blanking IC 141 pin 9horizontal (line or “X”) blanking IC 141 pin 6electronic ground mini plug 22

8.6. JEOL JSM 35, 35C, 35 CF

The Amphenol connectors are located at the back of the user video monitor :

video (plus data) amphenol connector JC6 pin 6vertical (frame or “Y”) blanking amphenol connector JC4 pin 8horizontal (line or “X”) blanking amphenol connector JC4 pin 4electronic ground amphenol connector JC6 pin 7

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8.7. JEOL JSM 840, 840A

The Amphenol connectors are located at the back of the user video monitor :

video (plus data) amphenol connector JC6 pin 9vertical (frame or “Y”) blanking amphenol connector JC4 pin 10horizontal (line or “X”) blanking amphenol connector JC4 pin 4electronic ground amphenol connector JC6 pin 14

8.8. JEOL JSM 5200, 5300, 5400

On scanning board, below user work table :

video (plus data) CP4 (or “CP14”?)vertical (frame or “Y”) blanking EK19-2horizontal (line or “X”) blanking EK-19-4electronic ground EK-19-1

8.9. JEOL JSM 6300, 6300F, 6400, 6400F

On the video controller board, at the back of the left user screen :

video (plus data) R48 (bottom)vertical (frame or “Y”) blanking R145 (top)horizontal (line or “X”) blanking R146 (top)electronic ground IC 20, pin 7

8.10 TOPCON SM510 , ABT-32

Pick the required signals from connectors “Ext1” or “Ext2”, at the back of the SEM (use a DB25 male connector):

video (plus data) pin 2vertical (frame or “Y”) blanking pin 5horizontal (line or “X”) blanking pin 4electronic ground pin 1

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8.11 Hitachi S4000

Location

You will find the required sync and video signals on the scan generator board. The scan generator is located under the user work area.Remove the metal plate of the work areaRemove the 5 screws holding the vertical metal plate under the keyboardPull the keyboard. Watch the cables.In the electronic rack, you will find a big horizontal plate ref P/N 589-5504.

The connection points are:

- video + mumarker : on TP25- vertical blanking : on IC21 pin 2 (IC21 is a 74LS20)- horizontal blanking : on IC21 pin 9 or 6- ground (zero volt) : on IC21 pin 7.

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8.12 Philips 5x5

1. On the Orion board : set switch SW2-3 to the ON position2. connect the frame sync to signal OTFRAME (available for example on X12-4 on the

DSM module) – this is the vertical sweep ramp.3. connect the horizontal sync with a BNC cable to X31 on the RCM module (TTL signal)4. pick the video from BNC X7 on the RCM module – terminate with a 75 ohm resistor.5. Connect the photo input of the Orion board to the “Blank/Bright” control to X8 on the

RCM module (this is a BNC connector) – terminate with a 75 ohm resistor.6. Pick the ground from a BNC casing.7. Select the Philips 5x5 setting in the “SEM specifics” page in the technical setup.

Fig A. Fig. BFig. A shows where to pick the vertical- and the horizontal sweep ramps. Fig.B shows where to pick the video and BLKBRI signals.

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In the schematics above, you can see where to pick the vertical- and horizontal sweep ramps. This is only an example, as X11 and X12 are part of a « signal bus » that links modules together.

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9. DSM specials The DSM RS232 option allows reconstructing the micron bar after grabbing from a DSM.

It’s indeed impossible to digitize the micron bar as produced by these SEMs. To do this, it is necessary to make an RS232 connection between the computer (using COM1 or COM2) and the DSM; the DSM must be equipped with the RS232 option at the back.

When the RS232 option is installed in the Orion software, the user can choose between three possibilities:

Grab the image, without any micron bar Grab the image and automatically interrogate the DSM and draw the micron bar in the

image Grab the image and manually enter the current magnification factor, for constructing the

micron bar

In the technical setup utility, select the “SEM specifics” page, which has the following layout, and hit the button “LEO DSM series”. This button is active only if you set the SEM type in the bottom list accordingly.

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Opens the DSM setup utility, which is shown next page.

Select which DSM you have to interface to.


Some options that the installer has to set up are grouped in the following window, that you get on screen when you press the “LEO DSM series” button above. Here is this utility:

9.1. Setup of the RS232 parameters for the LEO DSMs

Hitting the “Configure computer COM port” button above displays the following window:

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These settings are for the COM port. Good values are 1200 baud, 2 stop bits, 8 databits, no parity. In the “Device” field, enter “Com1” or “Com2”.

This open the computer COM port.

When the COM port is set up, these buttons can be used to test the communication and set the DSM in remote mode (can be checked on the DSM display)

You can use this button to send any command to the DSM (try Q00, which asls for mag data)

This is the data reception box, for verification purposes.

This setting depends on the DSM version and has to be set if the DSM “hangs” when remote driven.

This utility allows you to set up the COM port parameters (speed, data bits…

Sets which fields have to be displayed in the grabbed image, and if the photo number can be used as a file name


9.2. DSM User options

You can choose the appropriate options by going in the main toolbar to Options / System setup / Orion technical configuration / LEO DSM specials. This displays the following window:

9.3. Other fields

With this utility you can set additional parameters used when working on a DSM with the RS232 option :

- the « Micron bar construction » list is for building the scale bar. If it is set to « automatic », the system will interrogate the DSM after the image is grabbed, and build the final image from the data given by the DSM.

- The « micron bar algorythm » and « DSM COM speed » selection list have to be set in accordance with our technical support. They depend on the DSM.

- The « Micron bar correction factor » has to be set for correcting a scale bar that has an incrorrect length. A reference grid must be used for checking the SEM calibration.

From the main toolbar, when the DSM option is installed, you can also decide to have a white scale bar area (with black characters) – this is useful when printing on a deskjet, as an economy measure for the ink – by going to Options / User Preferences / Miscellaneous :

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These are the data fields that the software can write in the image after grabbing. Select the fields you need. The two bottom fields are user-definable.

This defines the way the file name will be proposed by default to the user. If the file name ends with a number, it can be incremented automatically if required.


10. Important remark about grounds

The Orion board has a full internal isolation between the SEM ground and the PC ground. This feature is very important because it breaks the ground loop and lowers the level of the noise induced in the cable.

Because of that, it is important to know which signal you want to test with a voltmeter or an oscilloscope. If you are in the SEM side of the board, connect the ground to test point “SEM GND”, close to the regulators. Test points TP1 and TP2 are relative to the SEM ground (see layout for more on this subject).

Be always careful not to connect your oscilloscope ground or be sure that they are the same!

A good rule would be not to use and connect your probe ground,or to use an isolated oscilloscope.

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11. Installing software options in Orion releases 6.xx

11.1. Introduction

Orion releases 6.xx have five options that can be unlocked either when ordering the system, or anytime by opening a key file delivered by E.L.I. Belgium. These options are:

The macro commands editor and execution unit The graphic tools option, which groups graphical and measurement functions The EDX mapping grabbing and mixing utility (with color editor) The anaglyph (3D red/green stereo combined image) generation unit The RS232 link to LEO DSM series of scanning microscopes (for generation of the micron bar

data)

The key file has a small size (1k) and can easily be transferred on a diskette or attached to an email when new options or system upgrade are ordered. To validate the options, either go to Options / System Setup / InstallSystem Options in the main toolbar, or go in the main toolbar to Help / About/Options, and select where and which key file to open, as described in paragraph 2 of this chapter.

11.2. Opening a new option key file

11.2.1. From the technical setup utility

When the technical setup utility is open you can select the “system” page and hit the “Board Information and System Options” button. The layout of the utility for updating system options is as follows:

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These fields show which options are currently available to the user.

These fields display basic system information that can be requested for technical support.

Click here to open the key file you have received for your system. The colored fields will be updated after opening.


11.2.2. From the main toolbar

Go to Help and hit “About”. This displays the About Box which shows the main Orion configuration. At the bottom of the About Box, hit “Options”. This displays your current options settings. Hit “Update Options” for opening an option update file (.opt) and change your options.

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12. Orion board layout

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DB-15 connector to SEM

Contrast and brightness adjustments (from top to bottom: contrast input1, brightness input1, contrast input 2, brightness input 2

SW1 selects a high- or low impedance for the two video inputs

Test point 1 groups video signals and pots levels, as well as SEM ground

These three pots adjust the triggering levels of the three sync inputs (line- and frame blanking, and photo pulse)

SW2 changes the characteristics of digital inputs (impedance, max. signal amplitude)

Test point 2 groups all digital signals (SEM ground levels)

SW3 usage is reserved in version 6.0x

J7 groups digital sync signals adapted to the PC ground (after the isolation opto couplers). See next paragraph for details.

Pots are numbered from 1 to 7, from top to bottom: P1 adjust the contrast of video input #1… P7 contols the triggering level of the frame blanking.


13. Board connectors and test points

Note: “HS raw” and “VS raw” refer to the sync signals available after the hardware input stages (Schmitt triggers), before their polarity is controlled by software. They are at the computer level (after the optocouplers; use PC ground). Please read also paragraph 3.3.

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These are raw signals – directly from the SEM (except +12V and –12V, which are generated by the Orion board). Ground is SEM ground.

Raw signals from SEM (some are replicated on J2)

The really important signals are “Hsneg” and “Vsneg”, which are processed signals. They must be negative (i.e. active low) for the system to work properly (refer to par. 3.3 and 3.6.4 for more details). For J7, the ground is the PC ground !


14. Other user test points

There are two rows of test points, called “Test point 1” and “Test point 2”. They are located on the upper edge of the Orion board. Several other signals are available on connectors.

Test point 1 and test point 2, as well as connector J2, are at the SEM level (ground). Connector J7 is referenced to the computer ground.

Signals available on test point 1 (TP1)

1. Video input 1 (raw) – same signal as DB-15, pin 62. Video input 2 (raw) – same signal as DB-15, pin 53. DC voltage on cursor of pot P14. DC voltage on cursor of pot P25. DC voltage on cursor of pot P36. DC voltage on cursor of pot P47. Video signal after video multiplexer, just before the video A/D converter8. SEM ground

Signals available on test point 2 (TP2)

1. Line blanking (after Schmitt Trigger)2. Frame blanking (after Schmitt Trigger)3. Photo pulse (after Schmitt Trigger)4. BLKBRI signal (used only with Philips 5x5 SEMs)5. DC voltage on cursor of pot P7 (frame blanking)6. DC voltage on cursor of pot P6 (line blanking)7. DC voltage on cursor of pot P5 (photo sync)8. SEM ground

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15. Potentiometers

There are 7 potentiometers on the board, from P1 to P7. P1 is the pot closest to the cable DB-15 connector (back of the computer).

P1Adjusts the contrast of video input 1 (pin 6 of DB15). Cursor voltage is available on TP1, pin 3.

P2Adjusts the brightness of video input 1 (pin 6 of DB15). Cursor voltage is available on TP1, pin 4.

P3Adjusts the contrast of video input 2 (pin 5 of DB15). Cursor voltage is available on TP1, pin 5.

P4Adjusts the brightness of video input 2 (pin 5 of DB15). Cursor voltage is available on TP1, pin 6.

P5Adjusts the triggering level of the photo input (pin 6 of DB15). Cursor voltage is available on TP2, pin 7.

P6Adjusts the triggering level of the line blanking pulse (pin 2 of DB15). Cursor voltage is available on TP2, pin 6.

P7Adjusts the triggering level of the frame blanking pulse (pin 1 of DB15). Cursor voltage is available on TP2, pin 5.

Measuring the pot cursor voltage after adjusting a board can be useful when repeating the installation procedure on the same SEM: you can make a pre-adjustment very easily.

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16. Installation flowcharts

This new section describes, step by step, how to install and configure the Orion system. The paragraph numbers are referring to paragraphs in this manual, which give you more information on the selected topic.

16.1. Overall system installation

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16.2 Connecting the cable to the SEM

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16.3 Installation of the software packages

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16.4 Opening or creating a SEM driver

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16.5 Verifying SEM driver data in VISUAL modes

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16.6 Verifying SEM driver data in RECORD modes

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Orion 6 for PCI


17. PC system requirements

Since grabbing is essentially a real-time process (SEM scanning data must be grabbed and stored as they are produced by the scanning, otherwise they are lost), it is required to fulfill the following minimum requirements:

the processor must be at least a Pentium or AMD 500 MHz, with 128 Mbytes RAM (256 and even 512 Mbytes minimum are required when using 2000 and XP, and for some SEMs producing a higher number of lines)

MS-Windows version 95, 98, ME, 2000 or XP is required supported Windows graphic modes are 1024 x 768, 1152x864, 1280x1024 and 1600

x 1200 pixels (any number of colors; the best setting is 16,7 Mcolors in order to get 256 true grey levels on screen)

a graphic board with minimum 8 megs is required with PCI or AGP bus interface hard disk and storage capacity in relation with the expected storage requirements

and compression factor used, if any (optical disks and CD ROM can also be used for storage). Storage cost can be dramatically reduced by using a CD-ROM writer.

AMI BIOS is now supported. Compaq computers may cause compatibility problems. BIOS must be set for an non-plug-and-Play operating system. When installing the

board, it can be required for force the BIOS to reset its configuration data (see your BIOS for details and availability of this function).

18. Important note

Grabbing is a real-time process: this means that the Orion software must grab line pixels at the same speed as the SEM scanning speed.

So it is the user’s responsibility to cancel any background task running in parallel, that could prevent the processor from grabbing images correctly.

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19. Technical support during installation Technical support is available during on-site installations to trained and registered

technicians only. The condition to get this assistance is to send us the planned date of the installation at the latest two weeks before it has to take place. The time allowed for technical support should be limited to roughly 2 hours, call made from customer’s phone.

The following data are required to get assistance:

SEM-related data

SEM type Orion board configuration and type description of the connection

PC configuration

processor type and speed, amount of installed RAM computer type and brand additional cards (SCSI, network ...) type of graphic card and screen monitor network card type Windows version

Please send your request by fax or email to reserve time for technical support.

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20. CDROM We have put on this CDROM any file that we have available for installing an Orion

system.

The contents are:

- the technical manual in Word 97 format, in both A4 and Letter sizes- pictures taken from different SEMs, showing connections that were made- a copy of the latest software revision- Windows drivers for the Orion board.

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21. How to contact us ?

We are at your disposal for more information on sales and support:

E.L.I. sprl - sales services45, rue de l’Eglise de Sart

B-1490 – Court-St-Etienne - Belgium Tel: (32) 10 611384 - Fax: (32) 10 611966 - Email: [email protected]

E.L.I. sprl - technical servicesBoulevard Audent, 13

B – 6000 - Charleroi - BelgiumTel: (32) 71 30 98 17 - Fax: (32) 10 611966 - Email:

[email protected]

Visit our WEB site

http://www.OrionMicroscopy.com

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