EX5 Mini Excimer Laser w

ith Type II Superchamber

The EX5 laser is an all metal/ceramic device and uses the most advanced design of a n y c o m m e r c i a l excimer laser.

Ultra Compact package Long gas lifetime Corona PreIonization On-Board Vacuum Pump Long Life Optics

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EX5/500

Mini Excim

er EX5

Performance benefits

The EX5 air cooled mini excimer laser brings state of the art total/metal ceramic design and corona preionization to a minimal cost, ultra compact package. The EX5 is now available in 250Hz, 500Hz and 100Hz versions. The EX5A SUPERCHAMBER produces higher average power output with 50% longer gas lifetime. F2 operation in the VUV is also standard with up to 650mW output power. A new broadband optics set allows operation from 157nm to 351nm with full specifications simply by changing the gas. The light and portable EX5 is packaged in a single 18” X 10” X 10” table top unit, weighing 15kg, air cooled package with 15.0W at 248nm and 10W at 193nm and up to 1000Hz repetition rate. The laser design features include an internal Faraday cage for ultra low electrical noise and a total metal/ceramic laser chamber. The computer controlled EX5 offers exceptionally long dynamic and static gas lifetime. The laser includes an internal vacuum pump and halogen filter, there is no requirement for an external vacuum system. The EX5 requires only a small cylinder of premix gas to run for many billions of pulses. The laser is controlled from a windows software package. External trigger input and sync out signals are located on BNC connections. Trigger jitter in external trigger mode is 2nS standard deviation.

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EX5/250

Copyright © 2009 GAM Laser Inc.,

2.5W OF DEEP UV AT 193nm IN A

1.2 CUBIC FEET VOLUME

EX5 Laser ArF 193nm 250Hz and 500Hz Typical Performance

0

2

4

6

8

10

12

14

16

1100 1150 1200 1250 1300 1350 1400 1450 1500

Voltage

0

0.5

1

1.5

2

2.5

3

3.5

4

4.5

Energy 250

Energy 500

Stability 250

Stability 500

Typical EX5 Pow er output @250Hz, 500Hz, 1000Hz @193nm

0

2

4

6

8

10

12

1100 1150 1200 1250 1300 1350 1400 1450 1500

Voltage

Ave

rage

Pow

er W

250Hz 500Hz 1000Hz

Mini Excim

er Laser EX5

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PARAMETER F2 ArF KrF XeCl XeF

Wavelength nm 157 193 248 308 351

Energy Max. mJ 1.5/2* 12 20 8 6

Peak Power, MW 0.25 1.75 2.5 1.0 0.75

Average Power @ 250 Hz 0.4 2.5 4 1.4 1.3

Average Power @ 500 Hz 0.65 5 8 2.5 2.4

Dynamic gas lifetime Pulses to

50% energy 10E7 12E6 18E6 20E6 15E6

Shelf life approx. to 50% energy 10 days 15 days 30 days 3

months 30

Days

Pulse Length 8 nS b

Beam Size 6 X 3 mm V x H

Stability < 3% Standard Deviation c

Divergence 2 X 1 mRad d V x H

Cooling Air

Tube Service Approx. 5 Billion Pulses

Repetition Rate 250/ 500 / 1000 aHz

Dimensions and electrical service

The EX5 gives high performance in a lightweight compact package. The laser is only 47 cm long. The entire laser including the vacuum pump is packaged in one table top unit..

Dimensions: 47 X 25 X 25cm (L X W X H) Power Requirements: 95-135 and 185-240 VAC, 2.5A/5A, 47/63Hz. Weight 15Kg

Copyright © 2009 GAM Laser Inc.,

Specifications

The most powerful mini excimer laser available anywhere

Single package

Low trigger jitter

High reliability long life laser chamber

Excellent Pulse to Pulse stability

Very long shelf life

250Hz, 500Hz and 750Hz Version

Latest in material science, Type II Superchamber

K e y B e n e f i t s

a 1000Hz specifications given in next page b At Max. Voltage c typical d Full Width Half Max. *2mJ for F2 optimized version

EX5/250IN *Industrial Version

HIGH TECHNOLOGY IN A LOW COST

ULTRA COMPACT PACKAGE

Mini Excim

er Laser EX5

EX5A/1000Hz Specifications

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The new chamber features include: Improved chamber construction materials for longer gas lifetime and reduced optics contamination Improved corona preionization Improved electrode design Increased window replacement interval to > 1000 million Reduced component count in gas handling system

The EX5/1000 is a new version of the EX5 Laser which includes the EX5A la-ser chamber. The EX5A chamberoffers higher repetition rate, pulse to pulse sta-bility, higher power and much improved gas and optics lifetime. The Type III laser has improved repeti-tion rate performance and substantially increased system lifetime up to 5 Billion pulses.

Specifications

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a At Max. Voltage b Full Width Half Max

GAM LASER INC. 6901 TPC Drive #300 ORLANDO, FL 32822 Phone : 407-851-8999 Fax : 407-850-0700

Email : Sales@ gamlaser.com Web : www.gamlaser.com

MADE IN USA

Copyright © 2009 GAM Laser Inc.,

PARAMETER ArF KrF XeCl XeF Wavelength nm 193 248 308 351

Energy Max. mJ 12 20 8 5

Repetition Rate Max Hz

Max. Average Power, W 10 14 5 4

Static Gas lifetime 15 days 20 days 30 days 20 days

Dynamic gas lifetime Pulses to 50% energy 12E6 20E6 15E6 10E6

Optics service 500 Million

1 Billion

150 Million

150 Million

Pulse to Pulse stability < 3% Standard Deviation

Pointing Stability < 20 microradians

Pulse Length 8nS a

Beam Size 6 X 3 mm V x H

Divergence 2 X 1 mRad b V x H

Jitter 2nS

Cooling Air

1000

F2

157

2

1.5

10 days

10E6

1 Billion

EX5 C02 TEA Laser *25mJ @ 10.6 microns