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Page 1: uran.rui.uran.ru/webcab/system/files/journalspdf/applied-surface-science/applied-surface...Effect of reactive magnetron sputtering parameters on structural and electrical properties
Page 2: uran.rui.uran.ru/webcab/system/files/journalspdf/applied-surface-science/applied-surface...Effect of reactive magnetron sputtering parameters on structural and electrical properties
Page 3: uran.rui.uran.ru/webcab/system/files/journalspdf/applied-surface-science/applied-surface...Effect of reactive magnetron sputtering parameters on structural and electrical properties
Page 4: uran.rui.uran.ru/webcab/system/files/journalspdf/applied-surface-science/applied-surface...Effect of reactive magnetron sputtering parameters on structural and electrical properties

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