Vacuum Coating Additional free information on any of these items can be obtained by circling the appropriate number on the reader service card.

Cryopumps Vertical In-Line Sputtering System CVI lnnotec Group Inc. Co/umbus, Ohio Simi Valley, Calif.

CV[‘s Torr Master line of IO- through 4X-in. cry- opumps operate with a minimum of moving parts in the cold head and scroll compressor. CVI units have high capacities for gasses requiring cryoadsorption, will ac- cept high heat loads, and have short cool-down and regeneration times. The TM 500 H2 has an expanded internal army that gives it three times the hydrogen capacity of standard cryopumps, which effectively dou- bles the time between pump and regeneration cycles.

Innotec introduces their ILS-14C vertical in-line sputtering system. The ILS- I4C is primarily designed for the manufacture of flat panel displays. solar cells. or any large-siLe substrate up to I4 in. X I4 in. Features can include RF or DC cathodes, RF etch cleaning, RF or DC bia\, substrate heating, ion beam cleaning, load-locks and exit-locks for complete in- line processing, and cathodes mounted on both sides of the system for simultaneous double-+ided deposi- tion. It can also include an infinite number OK process chambers, robotic loading and unloading. and ;I pallet return system to allow through-the-wall clean room installation.

Circle 150 on reader information card

Vacuum Equipment Remanufacturing Advanced Vacuum Co. Inc. Westminster, Md.

ADVACO is a capable, reliable, and comprehensive vac- uum equipment remanufacturing company. Built around ;I total commitment to quality and responsiveness. they arc ready to serve both large and small individual needs. A.D-

VACO provides a full one-year warranty from date of instal- lation. Their expert factory-trained technicians provide supe- rior quality refurbishments, as well as many additional services that meet or exceed OEM specifications.

Circle 151 on reader information card

Circle 152 on reader information card

Masking Tools Richcraft Designs Inc. Bay City, Mich.

Richcraft Designs Inc. designs and builds tooling that makes it possible during the vacuum coating process to seal off areas of the substrate from the finish, without a secondary process such as taping. An electroformed or fabricated plater reel can accommodate a variety of part sizes and maintain close tolerances. Cycle time is also kept to a minimum because tooling can be worked while still affixed to the carriage by means of individual pivoting panels. A combination of smooth electroforms and stainless steel construction speeds tool clean-up and keep:, downtime minimal.

Circle 153 on reader information card

18 0 Copyright Elsevier Science Inc. METAL FINISHING l APRIL 1998