vacuum gauge
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VACUUM COATING SYS'IDIS DynaVac, Hingham, Mass.
DynaVac offers a complete line of vacuum coating systems for a wide range of applications. Included are systems for physical vapor deposition of thin films, batch and in-line sputtering, and metallizing. Emphasis is put on industrial-grade designs for production and/or continuous use. All systems are offered with control system architecture ranging from basic logic to advanced supervisory control.
Circle 154 on reader information card
VACUUM GAUGE Vacuum Research Corp., Pittsburgh
Vacuum Research Corp.'s Big Digit series of vacuum gauges in dust-proof, splash-proof enclosures is easy to read from over 100 ft. Ranges of 1 to 2,000 mTorr, 0.1 to 20 Torr, and 1 to 1,500 Torr are available. Diaphragm gauges are available with ranges of 1 to 1,500 Torr or 30-in. Hg to 100 psig. Indicators have a 3¥2-digit display and linear analog output. Controllers have 2 adjustable set points with relays.
Circle 156 on reader information card
April 2000
EXHAUST 1HROnu VALVES MKS Instruments, Andover, Mass.
MKS Instruments announces heated pressure control subsystems for downstream pressure control in various vacuum thin-film coating processes. Technology from MKS HPS Series 45 heaters has been adapted to butterfly-design exhaust throttle valves to prevent condensation of exhaust byproducts from chemical vapor deposition. Heated versions are available for all MKS Type 253, 653, and 153 exhaust throttle valves.
Circle 155 on reader information card
CRYOPUMPS CVI, Columbus, Ohio
CVI's Torr Master line of 10- through 48-in. cryopumps operates with a minimum of moving parts in the cold head and scroll compressor. CVI units have high capacities for gasses requiring cryoadsorption, will accept high heat loads, and have short cool-down and regeneration times. The TM 500 H2 has an expanded internal array that gives it three times the hydrogen capacity of standard cryopumps, which effectively doubles the time between pump and regeneration cycles.
Circle 157 on reader information card
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