Overview of Vacuum SystemsTejas Deshpande24 July, 2014IntroductionPumpsPositive displacement pumpsMomentum transfer pumpsEntrapment pumpsPressure gaugesVacuum sealsManipulation and motion under vacuumOutlineIntroductionIntroduction: definitionsKinetic Theory of GasesIdeal gas equationVelocity of molecules hitting chamber wallsPumpingRate of mass flowMass conductanceIntroduction: definitionshttp!!fisica"ufpr"br!sharipov!tubefm"htmlPumpingPump capacity # effective pumping speedIntroduction: definitionsRate of evacuationE$ample Pfeiffer %ena&'( pump ) cylindrical chamber*inite C with a hosePumping+onductance of ,* -. hose /L 0 1.23 D 0 '"14(25Introduction: definitions[1 http!!www"vacuumlab"com!6rticles!,nowing7'.Eff7'.Pump7'.8peed"pdf91:!otary vane pumpsPrinciple of operationPositive displacement pumps"croll pumpsPrinciple of operationPositive displacement pumps#iaphragm pumpsPositive displacement pumpsPrinciple of operation!oots $%lo&er'Positive displacement pumpsPrinciple of operation#iffusion pumps6ir diffuses to vapor stream;affles condense vaporood compression ratioPoor pumping speed?urbo pumpMomentum transfer pumpsTur%omolecular pumpsMomentum transfer pumpsPrinciple of operationIon pumpsPenning cellMagnetic field acts as electron trap cyclotron orbitsIons deposit on +athode(ntrapment pumpsTitanium su%limation pumps?itanium as evaporatable getter material+hemical sorption-.&(. 6mpere current evaporates ?i(ntrapment pumps)i*uid Manometers8implest @&tube manometerPressure gauges6tmospheric pressure 0 1 barThe #iaphragm Manometer+apacitive sensor6+ vs" A+ A+ capacitance bridge 6+ resonant circuit tuned to diaphragm vibrationThermal +onductivity Gauges Convection of heat through the gasPressure gaugesrid potential 1E. V +athode filament D. V8creen . /ground5O,ring sealElastomers3 Viton&63 PolyimideFuic= and reusableGimited ba=ing range /H '(. I+5Vacuum "eals+on-lat flange sealGea=&tight /H 1.&1' Pa mDs&15Metal gas=ets /typically copper5;a=able to -(. I+.ot reusableMetal %ello&sMechanical feedthroughs;a=able to -(. I+Gimited linear!angular stro=eManipulation and motion under vacuum+ontinuous rotation8peeds up to '... RPM%igh torque bellowsGow torque magnetsGate ValveManipulation and motion under vacuum!ight,angled valveGarge bore8ample transfer8mall bore6ir evacuationTransfer armManipulation and motion under vacuum8ignificantly greater stro=e than bellow&sealed manipulatorMagnetic power transmissionIntroductionPumpsPositive displacement pumpsMomentum transfer pumpsEntrapment pumpsPressure gaugesVacuum sealsManipulation and motion under vacuum"ummary