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Page 1: Volumetric Interferometry Using Spherical Wave Interference for Three-dimensional Coordinate Metrology

Page 2: Volumetric Interferometry Using Spherical Wave Interference for Three-dimensional Coordinate Metrology

Page 3: Volumetric Interferometry Using Spherical Wave Interference for Three-dimensional Coordinate Metrology

Page 4: Volumetric Interferometry Using Spherical Wave Interference for Three-dimensional Coordinate Metrology

Page 5: Volumetric Interferometry Using Spherical Wave Interference for Three-dimensional Coordinate Metrology

Page 6: Volumetric Interferometry Using Spherical Wave Interference for Three-dimensional Coordinate Metrology

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