vortex gas flowmeter for process measurement

3
The MVF series of Micro Flow vortex gas flowmeters make use of our proprietary μF (Micro Flow) sensor, which has high sensitivity and quick response. As a result, MVF flowmeters achieve a wide measurement range of 100:1. In addition, a temperature and pressure compensation function is built in, so there is no need for a temperature sensor, pressure sensor, or compensation device, contributing to the reduction in total cost. Model No. configuration Ex.: MVF0500CUN0110000 Basic model No. MVF Gas type N S C G P B Connection U D A Power supply 1 Communi- cation 1 Output 0 Pipe size 050 080 100 150 Micro Flow vortex gas flowmeter 50 A (2B) 80 A (3B) 100 A (4B) 150 A (6B) With temperature & pressure compensation Without pressure compensation, with temperature compensation Low pressure range (0 to 0.1 Mpa), with temperature & pressure compensation Medium pressure range (0 to 0.3 Mpa), with temperature & pressure compensation Main unit material SCS13A Wafer connection (with spacer for JIS 10K flange) Wafer connection (with spacer for DIN PN10 flange) Wafer connection (with spacer for ANSI 150 flange) Air/nitrogen, argon Oxygen (degreasing must be selected) * 1 Carbon dioxide gas City gas 13 A (LNG base), methane Propane Butane With 4 to 20 mA output + pulse output 24 Vdc power supply RS-485 communication Horizontal left to right flow, converter on top * 2 Horizontal left to right flow, converter on bottom * 2 Horizontal right to left flow, converter on top * 2 Horizontal right to left flow, converter on bottom * 2 Vertical below to above flow, converter on left * 2 Vertical above to below flow, converter on left * 2 None Degreasing of gas-contacting parts (necessary if fluid is oxygen) * 1 None Mill sheet for main unit and vortex generator Product version Model 0 L 1 3 Material C Description Direction 0 1 2 3 4 5 Option 1 0 1 Option 2 0 C Appended No. 0 *1. If oxygen (“S”) is selected, be sure to select “1” (Degreasing of gas-contacting parts) for Option 1. *2. Explanation of flow direction Specifications Model No. Pipe size Gas types Operating temperature range Operating pressure range, pressure sensor accuracy Rated power supply voltage Output signal (1) Integrated pulse output (1) Communication function Gas-contacting material Connection type Pipe size Protective structure Weight MVF050 MVF080 MVF100 MVF150 50 A 80 A 100 A 150 A Air, nitrogen, argon, oxygen, carbon dioxide (CO2), city gas (13 A), methane, propane, butane, and other inert gases and mixed gases outside the explosion limit range -15 to +60 °C Model No.: MVF 1C 011 00: 0.0–0.1 MPa, ±2% FS @23 °C Model No.: MVF 3C 011 00: 0.0–0.3 MPa, ±2% FS @23 °C Model No.: MVF 0C 011 00: 0.0–1.0 MPa, ±1% FS @23 °C 24 Vdc. Operating range: 24 Vdc±10%, 100 mA or less Instantaneous flow rate output: 4 to 20 mAdc (allowable load resistance 600 Ω max.), maximum current: 23.2 mA, approx. 3.5 mA downscale output during burnout Open collector output, contact rating: 10 to 30 Vdc, 20 mA or less, pulse weight: selectable from 0.1, 1, and 10 m 3 /pulse RS-485 interface, 3-wire system Flow passage: SCS13A, SUS304. μF sensor: silicon, gold, etc. O-ring: type 4D (Viton). JIS 10K wafer connection 50 A (2B) 80 A (3B) 100 A (4B) 150 A (6B) IP67 (by JIS C 0920 and IEC 529 standards, watertight structure for the assumed outdoor installation) 6.3 kg 6.6 kg 9 kg 17 kg Left to right flow Flow direction: below to above Right to left flow Flow direction: above to below Converter is above Code 0 Converter is below Code 1 Converter is on the left Code 4 Converter is above Code 2 Converter is below Code 3 Converter is on the left Code 5 [Explanation of terms] % rdg: percentage of the reading. m 3 /h (normal): indicates a value converted to volumetric flow per hour at 0 °C and 101.325 kPa (1 atmosphere). Specification method (1) 4 to 20 mA span After checking the measurement range for each pressure, specify the model. Maximum span specifications m 3 /h (normal) (2) Pulse weight 50 A: 0.01, 0.1, 1, 10 m 3 /pulse Other than 50 A: select from 0.1, 1, 10, and 100 m 3 /pulse. Sample specification Model No. MVF0800CUN0112000 Range 0 to 500 m 3 /h (normal) Pulse weight 1 m 3 /pulse 50 A 80 A 100 A 150 A 8000 m 3 /h (normal) 16000 m 3 /h (normal) 24000 m 3 /h (normal) 48000 m 3 /h (normal) The minimum span specification is 1% of the maximum span specification. Micro Flow Vortex Gas Flowmeter MVF Series 7-15 1 DIGITAL CONTROLLERS 2 RECORDERS, INDICATORES 3 CONVERTERS 4 FLAME SAFEGUARD SYSTEM 5 ACTUATORS 6 SENSORS 7 GAS FLOW MEASUREMENT AND CONTROL PRODUCTS GAS FLOW MEASUREMENT AND CONTROL PRODUCTS

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Page 1: Vortex Gas Flowmeter for Process Measurement

The MVF series of Micro Flow vortex gas flowmeters make use of

our proprietary μF (Micro Flow) sensor, which has high sensitivity

and quick response. As a result, MVF flowmeters achieve a wide

measurement range of 100:1.

In addition, a temperature and pressure compensation function is built

in, so there is no need for a temperature sensor, pressure sensor, or

compensation device, contributing to the reduction in total cost.

Model No. configuration Ex.: MVF0500CUN0110000

Basic

model No.

MVF

Gas type

N

S

C

G

P

B

Connection

U

D

A

Power

supply

1

Communi-

cation

1

Output

0

Pipe size

050

080

100

150

Micro Flow vortex gas flowmeter

50 A (2B)

80 A (3B)

100 A (4B)

150 A (6B)

With temperature & pressure compensation

Without pressure compensation, with temperature compensation

Low pressure range (0 to 0.1 Mpa),

with temperature & pressure compensation

Medium pressure range (0 to 0.3 Mpa),

with temperature & pressure compensation

Main unit material SCS13A

Wafer connection (with spacer for JIS 10K flange)

Wafer connection (with spacer for DIN PN10 flange)

Wafer connection (with spacer for ANSI 150 flange)

Air/nitrogen, argon

Oxygen (degreasing must be selected)*1

Carbon dioxide gas

City gas 13 A (LNG base), methane

Propane

Butane

With 4 to 20 mA output + pulse output

24 Vdc power supply

RS-485 communication

Horizontal left to right flow, converter on top*2

Horizontal left to right flow, converter on bottom*2

Horizontal right to left flow, converter on top*2

Horizontal right to left flow, converter on bottom*2

Vertical below to above flow, converter on left*2

Vertical above to below flow, converter on left*2

None

Degreasing of gas-contacting parts (necessary if fluid is oxygen)*1

None

Mill sheet for main unit and vortex generator

Product version

Model

0

L

1

3

Material

C

DescriptionDirection

0

1

2

3

4

5

Option 1

0

1

Option 2

0

C

Appended

No.

0

*1. If oxygen (“S”) is selected, be sure to select “1” (Degreasing of gas-contacting parts) for Option 1.

*2. Explanation of flow direction

Specifications

Model No.

Pipe size

Gas types

Operating temperature range

Operating pressure range,

pressure sensor accuracy

Rated power supply voltage

Output signal (1)

Integrated pulse output (1)

Communication function

Gas-contacting material

Connection type

Pipe size

Protective structure

Weight

MVF050 MVF080 MVF100 MVF150

50 A 80 A 100 A 150 A

Air, nitrogen, argon, oxygen, carbon dioxide (CO2), city gas (13 A), methane, propane, butane, and other inert gases and mixed gases outside the explosion limit range

-15 to +60 °C

Model No.: MVF 1C 011 00: 0.0–0.1 MPa, ±2% FS @23 °C

Model No.: MVF 3C 011 00: 0.0–0.3 MPa, ±2% FS @23 °C

Model No.: MVF 0C 011 00: 0.0–1.0 MPa, ±1% FS @23 °C

24 Vdc. Operating range: 24 Vdc±10%, 100 mA or less

Instantaneous flow rate output: 4 to 20 mAdc (allowable load resistance 600 Ω max.), maximum current: 23.2 mA, approx. 3.5 mA downscale output during burnout

Open collector output, contact rating: 10 to 30 Vdc, 20 mA or less, pulse weight: selectable from 0.1, 1, and 10 m3/pulse

RS-485 interface, 3-wire system

Flow passage: SCS13A, SUS304. μF sensor: silicon, gold, etc. O-ring: type 4D (Viton).

JIS 10K wafer connection

50 A (2B) 80 A (3B) 100 A (4B) 150 A (6B)

IP67 (by JIS C 0920 and IEC 529 standards, watertight structure for the assumed outdoor installation)

6.3 kg 6.6 kg 9 kg 17 kg

Left to right flow Flow direction: below to above Right to left flow Flow direction: above to below

Converter is aboveCode 0

Converter is belowCode 1

Converter is on the left Code 4

Converter is aboveCode 2

Converter is belowCode 3

Converter is on the leftCode 5

[Explanation of terms] % rdg: percentage of the reading. m3/h (normal): indicates a value converted to volumetric flow per hour at 0 °C and 101.325 kPa (1 atmosphere).

Specification method(1) 4 to 20 mA span

After checking the measurement range for each pressure,specify the model.Maximum span specifications m3/h (normal)

(2) Pulse weight50 A: 0.01, 0.1, 1, 10 m3/pulseOther than 50 A: select from 0.1, 1, 10, and 100 m3/pulse.

Sample specification

Model No. MVF0800CUN0112000

Range 0 to 500 m3/h (normal)

Pulse weight 1 m3/pulse

50 A

80 A

100 A

150 A

8000 m3/h (normal)

16000 m3/h (normal)

24000 m3/h (normal)

48000 m3/h (normal)

The minimum span specification is 1% of the maximum spanspecification.

Micro Flow Vortex Gas Flowmeter MVF Series

7-15

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GAS FLOW MEASUREMENT AND CONTROL PRODUCTS

Page 2: Vortex Gas Flowmeter for Process Measurement

(1) Pressure range 0 to 0.1 MPa: MVF 1

MVF0501 (port size 50A)

Operating

pressure

(MPa)

Minimum

measurable flow rate

Qmin

Accuracy

0.01 7.4±Qmin ±4.8%RD ±3.4%RD

7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 237

0.02 7.4±Qmin ±4.8%RD ±3.3%RD

7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 258

0.03 7.4±Qmin ±4.7%RD ±3.2%RD

7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 279

0.05 7.4±Qmin ±4.7%RD ±3.1%RD

7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 322

0.1 7.4±Qmin ±4.6%RD ±3.0%RD

7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 428

MVF1001 (port size 100A)

Operating

pressure

(MPa)

Minimum

measurable flow rate

Qmin

Accuracy

0.01 13.7±Qmin ±4.8%RD ±3.4%RD

13.7 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 805

0.02 13.7±Qmin ±4.8%RD ±3.3%RD

13.7 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 878

0.03 13.7±Qmin ±4.7%RD ±3.2%RD

13.7 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 950

0.05 13.7±Qmin ±4.7%RD ±3.1%RD

13.7 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 1095

0.1 14.6±Qmin ±4.6%RD ±3.0%RD

14.6 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 1457

(2) Pressure range 0 to 0.3 MPa: MVF 3

MVF0503 (port size 50A)

Operating

pressure

(MPa)

Minimum

measurable flow rate

Qmin

Accuracy

0.1 7.4±Qmin ±5.4%RD ±4.1%RD

7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 428

0.15 7.4±Qmin ±5.1%RD ±3.7%RD

7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 535

0.2 7.4±Qmin ±4.9%RD ±3.5%RD

7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 641

0.3 8.5±Qmin ±4.7%RD ±3.2%RD

8.5 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 854

MVF1003 (port size 100A)

Operating

pressure

(MPa)

Minimum

measurable flow rate

Qmin

Accuracy

0.1 14.6±Qmin ±5.4%RD ±5.7%RD

14.6 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 1457

0.15 18.2±Qmin ±5.1%RD ±4.9%RD

18.2 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 1819

0.2 21.8±Qmin ±4.9%RD ±4.4%RD

21.8 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 2180

0.3 29.0±Qmin ±4.7%RD ±3.8%RD

29.0 ≤ Q ≤ 48 48 < Q < 156 156 ≤ Q ≤ 2904

MVF0801 (port size 80A)

Operating

pressure

(MPa)

Minimum

measurable flow rate

Qmin

Accuracy

0.01 11.0±Qmin ±4.8%RD ±3.4%RD

11.0 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 523

0.02 11.0±Qmin ±4.8%RD ±3.3%RD

11.0 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 570

0.03 11.0±Qmin ±4.7%RD ±3.2%RD

11.0 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 617

0.05 11.0±Qmin ±4.7%RD ±3.1%RD

11.0 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 711

0.1 11.0±Qmin ±4.6%RD ±3.0%RD

11.0 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 946

MVF1501 (port size 150A)

Operating

pressure

(MPa)

Minimum

measurable flow rate

Qmin

Accuracy

0.01 20.0±Qmin ±4.8%RD ±3.4%RD

20.0 ≤ Q ≤ 57 57 < Q < 286 286 ≤ Q ≤ 1733

0.02 20.0±Qmin ±4.8%RD ±3.3%RD

20.0 ≤ Q ≤ 57 57 < Q < 286 286 ≤ Q ≤ 1889

0.03 20.4±Qmin ±4.7%RD ±3.2%RD

20.4 ≤ Q ≤ 57 57 < Q < 286 286 ≤ Q ≤ 2045

0.05 23.6±Qmin ±4.7%RD ±3.1%RD

23.6 ≤ Q ≤ 57 57 < Q < 286 286 ≤ Q ≤ 2356

0.1 31.3±Qmin ±4.6%RD ±3.0%RD

31.3 ≤ Q ≤ 57 57 < Q < 286 286 ≤ Q ≤ 3135

MVF0803 (port size 80A)

Operating

pressure

(MPa)

Minimum

measurable flow rate

Qmin

Accuracy

0.1 11.0±Qmin ±5.4%RD ±4.1%RD

11.0 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 946

0.15 11.8±Qmin ±5.1%RD ±3.7%RD

11.8 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 1181

0.2 14.2±Qmin ±4.9%RD ±3.5%RD

14.2 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 1416

0.3 18.9±Qmin ±4.7%RD ±3.2%RD

18.9 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 1886

MVF1503 (port size 150A)

Operating

pressure

(MPa)

Minimum

measurable flow rate

Qmin

Accuracy

0.1 31.3±Qmin ±5.4%RD ±4.1%RD

31.3 ≤ Q ≤ 57 57 < Q < 286 286 ≤ Q ≤ 3135

0.15 39.1±Qmin ±5.1%RD ±3.7%RD

39.1 ≤ Q ≤ 65 65 < Q < 286 286 ≤ Q ≤ 3913

0.2 46.9±Qmin ±4.9%RD ±3.5%RD

46.9 ≤ Q ≤ 78 78 < Q < 286 286 ≤ Q ≤ 4692

0.3 62.5±Qmin ±4.7%RD ±3.2%RD

62.5 ≤ Q ≤ 104 104 < Q < 286 286 ≤ Q ≤ 6249

Table for specifying overall accuracy (for air, after temperature and pressure compensation)

Flow rate unit: m3/h (normal)

Accuracy differs according to operating pressure and flow rate range.

Micro Flow Vortex Gas Flowmeter MVF Series

7-16

GAS FLOW MEASUREMENT AND CONTROL PRODUCTS

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Page 3: Vortex Gas Flowmeter for Process Measurement

(3) Pressure range 0 to 1.0 MPa: MVF 0

MVF0500 (port size 50A)

Operating

pressure

(kPa)

Minimum

measurable flow rate

Qmin

Accuracy

100 7.4±Qmin ±6.7% rdg ±5.7% rdg

7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 428

150 7.4±Qmin ±6.0% rdg ±4.9% rdg

7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 535

200 7.4±Qmin ±5.6% rdg ±4.4% rdg

7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 641

300 8.5±Qmin ±5.1% rdg ±3.8% rdg

8.5 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 854

400 10.7±Qmin ±4.9% rdg ±3.5% rdg

10.7 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 1067

500 12.8±Qmin ±4.8% rdg ±3.3% rdg

12.8 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 1280

600 14.9±Qmin ±4.7% rdg ±3.2% rdg

14.9 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 1493

700 17.1±Qmin ±4.6% rdg ±3.1% rdg

17.1 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 1706

800 19.2±Qmin ±4.6% rdg ±3.0% rdg

19.2 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 1919

900 21.3±Qmin ±4.6% rdg ±3.0% rdg

21.3 ≤ Q ≤ 36 36 < Q < 74 74 ≤ Q ≤ 2131

980 23.0±Qmin ±4.6% rdg ±3.0% rdg

23.0 ≤ Q ≤ 38 38 < Q < 74 74 ≤ Q ≤ 2302

MVF1000 (port size 100A)

Operating

pressure

(kPa)

Minimum

measurable flow rate

Qmin

Accuracy

100 14.6±Qmin ±6.7% rdg ±5.7% rdg

14.6 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 1457

150 18.2±Qmin ±6.0% rdg ±4.9% rdg

18.2 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 1819

200 21.8±Qmin ±5.6% rdg ±4.4% rdg

21.8 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 2180

300 29.0±Qmin ±5.1% rdg ±3.8% rdg

29.0 ≤ Q ≤ 48 48 < Q < 156 156 ≤ Q ≤ 2904

400 36.3±Qmin ±4.9% rdg ±3.5% rdg

36.3 ≤ Q ≤ 60 60 < Q < 156 156 ≤ Q ≤ 3628

500 43.5±Qmin ±4.8% rdg ±3.3% rdg

43.5 ≤ Q ≤ 73 73 < Q < 156 156 ≤ Q ≤ 4351

600 50.7±Qmin ±4.7% rdg ±3.2% rdg

50.7 ≤ Q ≤ 85 85 < Q < 156 156 ≤ Q ≤ 5075

700 58.0±Qmin ±4.6% rdg ±3.1% rdg

58.0 ≤ Q ≤ 97 97 < Q < 156 156 ≤ Q ≤ 5799

800 65.2±Qmin ±4.6% rdg ±3.0% rdg

65.2 ≤ Q ≤ 109 109 < Q < 156 156 ≤ Q ≤ 6522

900 72.5±Qmin ±4.6% rdg ±3.0% rdg

72.5 ≤ Q ≤ 121 121 < Q < 156 156 ≤ Q ≤ 7246

980 78.2±Qmin ±4.6% rdg ±3.0% rdg

78.2 ≤ Q ≤ 130 130 < Q < 156 156 ≤ Q ≤ 7825

MVF0800 (port size 80A)

Operating

pressure

(kPa)

Minimum

measurable flow rate

Qmin

Accuracy

100 11.0±Qmin ±6.7% rdg ±5.7% rdg

11.0 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 946

150 11.8±Qmin ±6.0% rdg ±4.9% rdg

11.8 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 1181

200 14.2±Qmin ±5.6% rdg ±4.4% rdg

14.2 ≤ Q ≤ 31 31< Q < 110 110 ≤ Q ≤ 1416

300 18.9±Qmin ±5.1% rdg ±3.8% rdg

18.9 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 1886

400 23.6±Qmin ±4.9% rdg ±3.5% rdg

23.6 ≤ Q ≤ 39 39 < Q < 110 110 ≤ Q ≤ 2355

500 28.3±Qmin ±4.8% rdg ±3.3% rdg

28.3 ≤ Q ≤ 47 47 < Q < 110 110 ≤ Q ≤ 2825

600 33.0±Qmin ±4.7% rdg ±3.2% rdg

33.0 ≤ Q ≤ 55 55 < Q < 110 110 ≤ Q ≤ 3295

700 37.6±Qmin ±4.6% rdg ±3.1% rdg

37.6 ≤ Q ≤ 63 63 < Q < 110 110 ≤ Q ≤ 3765

800 42.3±Qmin ±4.6% rdg ±3.0% rdg

42.3 ≤ Q ≤ 71 71 < Q < 110 110 ≤ Q ≤ 4235

900 47.0±Qmin ±4.6% rdg ±3.0% rdg

47.0 ≤ Q ≤ 78 78 < Q < 110 110 ≤ Q ≤ 4705

980 50.8±Qmin ±4.6% rdg ±3.0% rdg

50.8 ≤ Q ≤ 85 85 < Q < 110 110 ≤ Q ≤ 5081

MVF1500 (port size 150A)

Operating

pressure

(kPa)

Minimum

measurable flow rate

Qmin

Accuracy

100 31.3±Qmin ±6.7% rdg ±5.7% rdg

31.3 ≤ Q ≤ 57 57 < Q < 286 286 ≤ Q ≤ 3135

150 39.1±Qmin ±6.0% rdg ±4.9% rdg

39.1 ≤ Q ≤ 65 65 < Q < 286 286 ≤ Q ≤ 3913

200 46.9±Qmin ±5.6% rdg ±4.4% rdg

46.9 ≤ Q ≤ 78 78 < Q < 286 286 ≤ Q ≤ 4692

300 62.5±Qmin ±5.1% rdg ±3.8% rdg

62.5 ≤ Q ≤ 104 104 < Q < 286 286 ≤ Q ≤ 6249

400 78.1±Qmin ±4.9% rdg ±3.5% rdg

78.1 ≤ Q ≤ 130 130 < Q < 286 286 ≤ Q ≤ 7806

500 93.6±Qmin ±4.8% rdg ±3.3% rdg

93.6 ≤ Q ≤ 156 156 < Q < 286 286 ≤ Q ≤ 9364

600 109.2±Qmin ±4.7% rdg ±3.2% rdg

109.2 ≤ Q ≤ 182 182 < Q < 286 286 ≤ Q ≤ 10921

700 124.8±Qmin ±4.6% rdg ±3.1% rdg

124.8 ≤ Q ≤ 208 208 < Q < 286 286 ≤ Q ≤ 12478

800 140.4±Qmin ±4.6% rdg ±3.0% rdg

140.4 ≤ Q ≤ 234 234 < Q < 286 286 ≤ Q ≤ 14035

900 155.9±Qmin ±4.6% rdg ±3.0% rdg

155.9 ≤ Q ≤ 260 260 < Q < 286 286 ≤ Q ≤ 15593

980 168.4±Qmin ±4.6% rdg ±3.0% rdg

168.4 ≤ Q ≤ 281 281 < Q < 286 286 ≤ Q ≤ 16838

External dimensions

(Unit: mm)MVF050 MVF080

MVF100 MVF150

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14060

Micro Flow Vortex Gas Flowmeter MVF Series

7-17

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GAS FLOW MEASUREMENT AND CONTROL PRODUCTS