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Page 1: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...robotics.eecs.berkeley.edu/~pister/147fa15/Resources/TangNguyen... · Both the average residual Stress in the polysilicon

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W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, “Laterally driven polysilicon resonant microstructures,” Proceedings, IEEE Micro Electromechanical Systems Workshop, Salt Lake City, Utah, Feb. 1989, pp. 53-59.

Page 2: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...robotics.eecs.berkeley.edu/~pister/147fa15/Resources/TangNguyen... · Both the average residual Stress in the polysilicon

Page 3: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...robotics.eecs.berkeley.edu/~pister/147fa15/Resources/TangNguyen... · Both the average residual Stress in the polysilicon

Page 4: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...robotics.eecs.berkeley.edu/~pister/147fa15/Resources/TangNguyen... · Both the average residual Stress in the polysilicon

Page 5: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...robotics.eecs.berkeley.edu/~pister/147fa15/Resources/TangNguyen... · Both the average residual Stress in the polysilicon

Page 6: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...robotics.eecs.berkeley.edu/~pister/147fa15/Resources/TangNguyen... · Both the average residual Stress in the polysilicon

Page 7: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...robotics.eecs.berkeley.edu/~pister/147fa15/Resources/TangNguyen... · Both the average residual Stress in the polysilicon

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robotics.eecs.berkeley.edurobotics.eecs.berkeley.edu/~pister/SmartDust/SmartDustBAA97-43... · Created Date: 3/26/2012 12:34:41 PM

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EECS 122 “Communications Networks”robotics.eecs.berkeley.edu/~wlr/122S04/01.pdfStudy protocols through simulation experiments OPNET environment provided; Minimize learning curve

UNIVERSITY OF CALIFORNIA - Berkeley Robotics and ...robotics.eecs.berkeley.edu/.../Homework/hw9_rubric.docx · Web viewSolution: 1 pt. for each of species, energy, dose, temperature,

Nonlinear Control Design for Slightly Non- minimum …robotics.eecs.berkeley.edu/~sastry/pubs/OldSastryALL/HauserVSTOL... · Nonlinear control of slightly non-minimum phase systems

TRIBOLOGY LETTERS 1 Adhesion-RelatedFailure …robotics.eecs.berkeley.edu/~pister/245/papers/MastrangeloTrib97.pdfTRIBOLOGY LETTERS 1 Adhesion-RelatedFailure Mechanisms in Micromechanical

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Message-In-a-Bottle: User-Friendly and Secure Key ...robotics.eecs.berkeley.edu/~pister/290Q/Papers/Security...Message-In-a-Bottle: User-Friendly and Secure Key Deployment for Sensor

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6LoWPAN Tutorial IP on IEEE 802.15.4 Low-Power Wireless ...robotics.eecs.berkeley.edu/~pister/290Q/Handouts/6LoWPAN-tutorial.… · 6LoWPAN – Example Fragmented / Compressed / Compressed

SMART DUST K. Pister, J. Kahn, B. Boser (UCB) S. Morris (MLB) MEMSMTO DARPA