welcome to the company presentation of nanofocus ag · 2007. 7. 4. · confocal microscope µsurf...
TRANSCRIPT
1
Alan Ong
Asia Pacific Ops
January 2007
Welcome to the Company Presentation ofNanofocus AG
Corporate Headquarters:
Lindnerstrasse 98,
46149 Oberhausen, Germany
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Alan Ong
Asia Pacific Ops
January 2007
Location
Oberhausen
Headquarter
Ettlingen
Sales Office
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Alan Ong
Asia Pacific Ops
January 2007
Organisation
DevelopmentJ. Valentin
Prod. & ApplicationM. Grigat
Marketing & SalesDr. R. Brodmann
NanoFocus AGBoard
CEO Dr. H.H. Schreier
• 1994 NanoFocus GmbH founded in Duisburg
• 1996 OM Engineering GmbH founded in Duisburg
• 1998 Introduction of the confocal System µSurf
• 1999 Introduction of the Laserprofilometer µScan
• 2000 Merger of NanoFocus and OM Engineering to NanoFocus AG
• 2001 Founded NanoFocus Inc. in USA
• 2002 Founded Sales Office in Singapore
• 2006 30 Employees, about 350 installed systems
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Alan Ong
Asia Pacific Ops
January 2007
Key Data of Nanofocus AG
Employees: 30Turnover in 2006 in Mio. €: 4.7Total assets in Mio. €: 10Systems installed: about 350Patents and Trademarks: 30
Sites:(Corporate Headquarters) (Sales Office)Lindnerstrasse 98 Nobelstr. 9-1346149 Oberhausen 76275 EttlingenGermany GermanyTel.: +49 (0) 208 62 000 0 Tel.: +49 (0) 7243 7158 3Fax: +49 (0) 208 62 000 99 Fax: +49 (0) 7243 7158 59Email: [email protected] Email: [email protected]
(Asia Pacific Operation)Alan Ong Showroom: 5012, Ang Mo Kio Avenue 5,
Techplace 2 #05-06F, Singapore 569876Mobile: +65 9684 9735Email: [email protected]
Co-operation Network: IVAM (MEMS), Zenith, OptoNet, BMBF
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Alan Ong
Asia Pacific Ops
January 2007
3D Measurement Systems
Confocal microscope µSurf
• area technique
• Nanometer resolution
• for MEMS, 3D surface analysis
Scanning profilometer µScan
• moving x/y-stages
• different z-probes(autofocus, confocal, chromatic)
• for profile, flatness co-planarity,
µScanµSurf
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Alan Ong
Asia Pacific Ops
January 2007
NanoFocus Customers
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Alan Ong
Asia Pacific Ops
January 2007
References and Applications
Selected References:
• Jenoptik MEMS Germany• Daimler Chrysler Automotive Germany• Thyssen Krupp Tribology Sheet Metal Germany• Siemens Electromechanical Parts Germany• Bosch Fuel Injection Germany• Qimonda (Formerly Infineon) IC-Packaging Malaysia• Qimonda (Formerly Infineon) Process-Control China• Rofin Baasel Laser marking Singapore• Motorola Electronic components USA• Lintec LCD coating Japan• Siemens Medical Solder Bumps Singapore• GemPlus Smart Cards France• TIT Micro-mechanics Japan• ITRI Electronic Parts Taiwan• KJIST MEMS Korea• Topcon MEMS & Microlens Japan• Huyck Fabric Australia
Total installed Systems: about 350
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Alan Ong
Asia Pacific Ops
January 2007
Software representation and analysis
Example: Micropump
measurement with µScan
Micro pump
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Alan Ong
Asia Pacific Ops
January 2007
0.0 2000.0 4000.0 6000.0 8000.0 10000.0[ ]탆
60.00
-20.00
100.00
220.00
340.00
460.00
580.00
[ ]탆
OM Engineering GmbH
Y = 506,698
Y = 387,265
Y = 500,721
w3=540,5w4=968,3a5=0,42
a6=0,46a7=0,00
Example: Micropump
Geometrical calculation
Data analysis
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Alan Ong
Asia Pacific Ops
January 2007
Example: Micropump
Zoom function
Data Analysis
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Alan Ong
Asia Pacific Ops
January 2007
Example: Micropump
Radius measurement
Data Analysis
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Alan Ong
Asia Pacific Ops
January 2007
Example: Micropump
Roughness calculation
Data Analysis
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Alan Ong
Asia Pacific Ops
January 2007
Applications MEMS
Silicon Technology
Laser structures Micro injection molding
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Alan Ong
Asia Pacific Ops
January 2007
Optical waveguides
53.3 탆
0.699 mm
0.659 mm
Alpha = 309 Beta = 25
µm
-50
-40
-30
-20
-10
0
10
20
30
40
0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 0.5 0.55 0.6 0.65 mm
0 1
0-1Horizontal distance : 0.038 mmVariation in height : 49.8 µm
38 µ
50 µ
optical star coupler
µSurf 3D result
SEM pictureIMM, Mainz
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Alan Ong
Asia Pacific Ops
January 2007
Microfluidic
Measurement of small injection molded channels
Automatic productioncontrol with µSurf Pro
0 . 0 0 0
70 µm
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Alan Ong
Asia Pacific Ops
January 2007
Bio Science
Measurement of coating thickness on stents
20
10
µm
30
0
µm
Thickness
Topography
0,3 mm
Courtesy Boston Scientific
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Alan Ong
Asia Pacific Ops
January 2007
Hot Embossing 1
0.0 276.0 552.0 828.0 1104.0 1380.0[ ]탆
4.00 탆
-32.00
-24.00
-16.00
-8.00
0.00
8.00
[ ]탆
NanoFocus AG
Profil
w0=49,0
h1=-20,021
Width = 49.0 µm
Depth = 20.021 µm
Courtesy Jenoptik, Jena
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Alan Ong
Asia Pacific Ops
January 2007
Hot Embossing 2
0.0 402.0 804.0 1206.0 1608.0 2010.0[ ]탆
40.00 탆
-280.00
-200.00
-120.00
-40.00
40.00
120.00
[ ]탆
NanoFocus AG
Profil
h0=-79,772
h1=-199,373
w2=980,5
Courtesy Jenoptik, Jena
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Alan Ong
Asia Pacific Ops
January 2007
Hot Embossing 3
0.0 372.0 744.0 1116.0 1488.0 1860.0[ ]탆
2.00 탆
-10.00
-6.00
-2.00
2.00
6.00
10.00
[ ]탆
NanoFocus AG
Rauheit
Filter = DIN EN ISO 11562LC (CutOff) = 0,800 mmLr (Einzelstrecke) = 0,800 mmNeedle Filter = 0,000 mmAnzahl Lr N = 2
Conform with DIN EN ISO 4288Ra = 0,770 µmRz = 5,540 µmRt = 6,239 µmRq = 1,009 µmRmax = 6,220 µm
SEP 1940II (prEN 10049 C1=C2=0,5µm)Rpc = 156,318 1/cm
Roughness calculation
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Alan Ong
Asia Pacific Ops
January 2007
MEMS Structure
0.0 58.0 116.0 174.0 232.0 290.0[ ]탆
0.20 탆
-1.00
-0.60
-0.20
0.20
0.60
1.00
[ ]탆
NanoFocus AG
Profile
Y = 0,363Y = 0,404
h2=0,188
0.0 56.0 112.0 168.0 224.0 280.0[ ]탆
0.20 탆
-1.00
-0.60
-0.20
0.20
0.60
1.00
[ ]탆
NanoFocus AG
Profile
h0=-0,302
h1=0,080h2=0,086w3=66,7
Height Evaluation / uSurf
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Alan Ong
Asia Pacific Ops
January 2007
Microlens (pitch calculation)
0.0 31.9 63.9 95.8 127.8 159.7[ ]탆
0.20 탆
-1.00
-0.60
-0.20
0.20
0.60
1.00
[ ]탆
NanoFocus Messtechnik
Prof ile
27.6
Width = 27.6 µm
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Alan Ong
Asia Pacific Ops
January 2007
Microlens (zoom function)
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Alan Ong
Asia Pacific Ops
January 2007
Microlens (radius calculation)
material: polymer and silicon
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Alan Ong
Asia Pacific Ops
January 2007
Silicon Test structures
Measured with µSurf
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Alan Ong
Asia Pacific Ops
January 2007
Silicon Test structures
Measured with µSurf
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Alan Ong
Asia Pacific Ops
January 2007
DVD Laser
0.0 139.7 279.5 419.2 558.9 698.6[ ]탆
25.00 탆
-10.00
40.00
90.00
140.00
190.00
240.00
[ ]탆
NanoFocus AG
Profile
a0=-0,50
geometry of chip and packaging
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Alan Ong
Asia Pacific Ops
January 2007
DVD Laser
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Alan Ong
Asia Pacific Ops
January 2007
Textured Carbody Sheet Metal
EBT structure measured with µSurf stitching procedure
4199.8
3359.8
2519.9
1679.9
840.0
0.0
[µm]
0.0 840.0 1680.0 2520.0 3360.0 4200.0
[µm]
0.0 95.7 191.5 287.2 382.9 478.6[µm]
0
-3.00
-1.80
-0.60
0.60
1.80
3.00
[µm]
g g
20,63°
0.000
384.0
[µm]
Courtesy Neudecker, Popp, LFT Erlangen
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Alan Ong
Asia Pacific Ops
January 2007
Wafer Backside grinding
Confocal System µSurf 100x optics
Ra = 0.005 µmRz = 0.038 µm
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Alan Ong
Asia Pacific Ops
January 2007
IC-Packaging
• Bump/Ball Coplanarity
• Glue top height
• Warpage of substrate
• Laser marking depth
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Alan Ong
Asia Pacific Ops
January 2007
BGA Packaging
3D measurement of a BGA package module.
Yellow area: 150 µm
Green area: 70 µm
Blue area: 40 µm
Co-planarity evaluation in an Excel sheet by ASCII export
Left: touchplane
Right: mean plane
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Alan Ong
Asia Pacific Ops
January 2007 Courtesy Celestica, Italy
SMT Solderpaste
FR4 board with ultra fine pitch solder bumps
Automatic program for measurement and volume evaluation
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Alan Ong
Asia Pacific Ops
January 2007 Courtesy Infineon, Dresden
Measurement of ...
TSOP Packaging
Lead co-planarity
Spread
Lead profile
Encapsulation warpage
Roughness
Wirebond
Die
Encapsulation
Die attach adhesiveLeadframe
Bond Pad
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Alan Ong
Asia Pacific Ops
January 2007 Courtesy Infineon, Dresden
Measurement of a TSOP package
Results
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Alan Ong
Asia Pacific Ops
January 2007
Lasermarking
Yellow area: +10 µm
Red area: -6 µm
Blue area: -40 µm
Measurement of lasermarking and warpage QFP
Profile selection shows warpand laser marking
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Alan Ong
Asia Pacific Ops
January 2007 Courtesy, University of Dresden
Laserprofilometer µScan CF 2001
Wafer Bumps
• Co-planarity
• Height
• Tilt after assembling
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Alan Ong
Asia Pacific Ops
January 2007
Laserprofilometer µScan in thethickfilm production
Courtesy TT Wellwyn AB Mikroelektronik
Automotive electronicsproduction at AB in Salzburg
Thickfilm production
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Alan Ong
Asia Pacific Ops
January 2007
Thickfilm production
3D Measurement for
development and failure analysis
Measured with µScan AF 2000
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Alan Ong
Asia Pacific Ops
January 2007
Hybridmaster Software Packagefor Production Environment
Automatic measurement of
printed resistors or conducting lines
• Height, width and pitch
• Teach in module
• SPC analysis
Thickfilm production
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Alan Ong
Asia Pacific Ops
January 2007
Assembling of GHz modules
Example SMT glue
to fix IC chips
0.000
5020.0
[µm]
5020.0
[µm]
0.0 1002.0 2004.0 3006.0 4008.0 5010[µm]
-10.00
30.00
70.00
110.00
150.00
190.00
[µm]
NanoFocus AG
Courtesy Marconi, Germany
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Alan Ong
Asia Pacific Ops
January 2007
3D Animation
Courtesy Marconi, Germany
Example SMT glue
For GHz modules
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Alan Ong
Asia Pacific Ops
January 2007
Micromechanics
0 0.1 0.2 mm
mm
0
0.05
0.1
0.15
0.2
0.25
탆
0
1
2
3
4
5
6
7
Master0 0.1 0.2 mm
mm
0
0.05
0.1
0.15
0.2
0.25
탆
0
1
2
3
4
5
6
7
Replica
Injection molding process
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Alan Ong
Asia Pacific Ops
January 2007
Micromechanics
Analysis of the molding process
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Alan Ong
Asia Pacific Ops
January 2007
Form measurement by µScan AF
0.0 1447.7 2895.5 4343.2 5791.0 7238.7[ ]탆
50.00 탆
-15.00
85.00
185.00
285.00
385.00
485.00
[ ]탆
NanoFocus AG
Profile
a0=10,21
w2=4556,9
Y = 392,547
3D measurement5.5 x 5.5 mm
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Alan Ong
Asia Pacific Ops
January 2007
Example wear measurement on a plastic part
ZUV Uni Basel
0.000
642.2
[µm]
619.7
[µm]
0.0 128.2 256.4 384.7 512.9 641.1[µm]
0.50 µm
-4.00
-3.00
-2.00
-1.00
0.00
1.00
[µm]
NanoFocus AG
Profile
56,8
Y = -2,949
Y = -1,423
Y = -1,021
Y = -0,005
Tribology Research
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Alan Ong
Asia Pacific Ops
January 2007
Tribology Research
Sheet Metal
Friction test
* Neudecker, Popp, LFT Erlangen
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Alan Ong
Asia Pacific Ops
January 2007
Razor blade
Ra = 0.009µm
Rz = 0.075µm
µSurf measurement
0.000
98.1
[µm]
95.2
[µm]
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Alan Ong
Asia Pacific Ops
January 2007
Motor Cylinder
Honing structure of a motor cylinder
Profile selection
3D Profile angle analysis
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Alan Ong
Asia Pacific Ops
January 2007
Sensors on µScan
3D technique by x/y-samplescanning and differentsensors for z-measurement
1. Autofocus Sensor AF2range: 1.5mmaccuracy: 0.1 microndata rate: 10 kHzstand-off: 2mm
2. Confocal Sensor CF4range: 1.0 mmaccuracy: 0.2 microndata rate: 0.8 kHzstand-off: 4mm
3. Chromatic Sensor CRTrange: 0.3 - 3 mm* accuracy: 0.1 micron*data rate: 1 - 30 kHz*stand-off: 5 - 16 mm*
•Depends on model used
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Alan Ong
Asia Pacific Ops
January 2007
Principle of Autofocus sensor
High precision measurement with 1 µm laser spot by means of a focus detector with nanometer resolution and a glass scale with an absolute accuracy of 0.025 µm
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Alan Ong
Asia Pacific Ops
January 2007
Principle of Confocal sensor
An illuminated pinhole is imaged onto the surface to be measured. The detector registered a surface signal only if the focal plane matches with a real surface point. The objective therefore has to be moved by small vertical steps. In case of a signal the position of the objective is measured with a displacement transducer. Based on special interpolation technique the accuarcy of the system could be better then 10nm.
Laser Diode
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Alan Ong
Asia Pacific Ops
January 2007
Principle of Chromatic sensor
Similiar to laser confocal techniques however for this case it is using white light.
No moving parts inside sensor as it make use of an objective lens with extended axial chromatism on a series of monochromatic point images in the measurement space.
Due to the confocalconfiguration, only the focused wavelength will pass through the spatial filter.
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Alan Ong
Asia Pacific Ops
January 2007
Principle of Whitelight Confocal sensor
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Alan Ong
Asia Pacific Ops
January 2007
uSurf in Action
α
Δ z
Δ z
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Alan Ong
Asia Pacific Ops
January 2007
Specification
AutofocusAF 2
ConfocalCF 4
ChromaticCRT
µSurfx100
Working distance(d) mm 2 4 5 - 16 3.4
Vertical range (∆z) mm 1.5 1 0.3 – 3 0.35
Vertical resolution(z) µm 0.01 0.02 0.01 – 0.075 0.001
Lateral resolution(x/y) µm 1.5 1.5 4 - 8 0.3
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Alan Ong
Asia Pacific Ops
January 2007
Optic module 10x 20x 50x 100x
Measurement area(x/y) (µm) 1600 800 320 160
Working distance/ meas. range (d) mm
10 12 * 10 * 3.4 *
Vertical resolution(z) nm 20 5 ** 2 ** 1 **
Lateral resolution(x/y) µm 3 1.5 0.6 0.3
* With Long Distance Objective
** with piezo movement
Specification µSurf
57
Alan Ong
Asia Pacific Ops
January 2007
Stitching procedure
Software µSoft plus
Example: sheet metal
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Alan Ong
Asia Pacific Ops
January 2007
Software on Nanofocus Equipment
NanoFocus Software-Kernel
Standard-Software Application with VBA
• Manual measurement
• Manual evaluation
• Flexible visualisation
• Teach In
• Automatic measurementand evaluation
• Automatic documentation
Export to External analysis
59
Alan Ong
Asia Pacific Ops
January 2007
Statistical Process Control (SPC)
ProcessAdjustment
Design and development
Improving theprocess stepsand processredesign
Processknow-how
Off-line inspection
WarpageHeightVolumePosition
Stress analysis
Production
Process 2
Production
Process 3
Production
Process 1
60
Alan Ong
Asia Pacific Ops
January 2007
Failure Cost Analysis
100 %
Failed parts
Inspectioncosts
Inspection tools
Status now
Failed parts
Inspectioncosts
Cost Saving
Goal
Inspection machinefor SPC
Investment in quality control machines improves the yield and reduces total cost of inspection
61
Alan Ong
Asia Pacific Ops
January 2007
µSurf® Results
Lotus effect
self cleaning of surfacesby water
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Alan Ong
Asia Pacific Ops
January 2007
6262
µSurf® Results
Lotus effect
Measured with NanoFocus µSurf
2 µm
Lotus Effect
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Alan Ong
Asia Pacific Ops
January 2007
Wafer Level Hermetic Leak Detector
0 500 1000 1500 2000 2500-14-12-10-8-6-4-202
t0 t0+7 min t0+14 minm
embr
ane
defle
ctio
n in
arb
itrar
y un
its
Scan axis in 탆
64
Alan Ong
Asia Pacific Ops
January 2007
µSurf CyclinderInspector
Measurement of engine block
65
Alan Ong
Asia Pacific Ops
January 2007
µSurf Mobile
Measurement of sheet metal or bulky sample which cannot be bought into laboratory.
66
Alan Ong
Asia Pacific Ops
January 2007
Thank you for your attention
NanoFocus AG
Im Lipperfeld, 32
46047 Oberhausen, Germany