What does the EUV and thin film What does the EUV and thin film group do?group do?

1.1. Optical properties of matter in Optical properties of matter in the EUV and the EUV and Soft X-raysSoft X-rays

2.2. Thin film preparation and characterizationThin film preparation and characterization Allred N265 2-3489 Meeting M 1600- N288 ESC Allred N265 2-3489 Meeting M 1600- N288 ESC

Thin Films for MirrorsThin Films for Mirrors Turley N308 2-3095 Meeting F 1600- N308 ESC- Turley N308 2-3095 Meeting F 1600- N308 ESC-

VUV and EUV SpectrometersVUV and EUV Spectrometers L V Knight N373 2-2450 Tues C389 BNSN (Linford)L V Knight N373 2-2450 Tues C389 BNSN (Linford) EUV SpectrometerEUV Spectrometer

Roentgen discovers x raysRoentgen discovers x rays

http://wave.xray.mpe.mpg.de/roentgen/roentgen-1.gifhttp://wave.xray.mpe.mpg.de/roentgen/roentgen-1.gif

http://library.tedankara.k12.tr/chemistry/vol1/period/trans43.jpghttp://library.tedankara.k12.tr/chemistry/vol1/period/trans43.jpg

http://users.zoominternet.net/~matto/M.C.A.S/electromagnetic_spectrum.gifhttp://users.zoominternet.net/~matto/M.C.A.S/electromagnetic_spectrum.gif

Where do the EUV and Soft X-rays fit?Where do the EUV and Soft X-rays fit?

CharacteristicsCharacteristics– interact strongly with all matterinteract strongly with all matter– Human hair is 100 micron. Human hair is 100 micron. – Characteristic absorption length is 0.01 Characteristic absorption length is 0.01

to 0.1 micronto 0.1 micron– Refractive index is ~1Refractive index is ~1

How do you make optical elements How do you make optical elements to focus and direct light?to focus and direct light?

Why Extreme Ultraviolet (EUV) and Soft X-Rays?Why Extreme Ultraviolet (EUV) and Soft X-Rays?

Images from www.schott.com/magazine/english/info99/ and www.lbl.gov/Science-Articles/Archive/xray-inside-cells.html.

EUV Lithography(making really small computer chips)

Thin Film or Multilayer Mirrors

EUV Astronomy

The Earth’s magnetosphere in the EUV

Soft X-Ray Microscopes

BYU EUV Optics

April 19, 2004

Other Applications Other Applications

Astrophysics Astrophysics http://euv.lpl.arizona.edu/euv/http://euv.lpl.arizona.edu/euv/

Surface studies. Surface studies.

Plasma studies- matter under Plasma studies- matter under extreme conditions extreme conditions

MicroelectronicsMicroelectronics

Soft x-ray microscopySoft x-ray microscopy

BYU Work Applications BYU Work Applications Astrophysics: Astrophysics: – Image satellite Image satellite http://euv.lpl.arizona.edu/euv/http://euv.lpl.arizona.edu/euv/ – Uranium and Thorium for the EUV. Uranium and Thorium for the EUV.

Microelectronics: Stabilizing Mo/Si Microelectronics: Stabilizing Mo/Si Also Ru, Also Ru,

Soft x-ray microscopy:Soft x-ray microscopy: Sc and others. Sc and others.

Surface and Nanofabrication studies. Surface and Nanofabrication studies. – How to be clean in an unclean world. How to be clean in an unclean world. – Ambient temperature oxidation of materialsAmbient temperature oxidation of materials

Group meetings: Monday @1300 N209Group meetings: Monday @1300 N209– Sub: Wednesday @1300 N308 (Turley) BYU Sub: Wednesday @1300 N308 (Turley) BYU

Spectrometer.Spectrometer.