Who are we?

Charged Particle Optics Group

What we want

1. pattern dimensions: nm-scale

single atom!

2. any material

Electron beam induced deposition

Muller, 1971Urban 1997

Koops

What do people do with EBID?

Intel, 2005

Our approach(nm-sized patterns & any material)

simulation

EBID experiments

surface science

Rutgers Univ.

Howard Fairbrother, Johns Hopkins Univ.

Our approach(nm-sized patterns & any material)

modelling

EBID experiments

surface science

Rutgers Univ.

Howard Fairbrother, Johns Hopkins Univ.

our simulation: <1 nm!

literature: >15 nm

EBID resolution

transmissionelectron

microscope

W(CO)6

dr. Peter Crozier, Arizona State University

Results

of 9

Smallest dots: 0.7 nm in diameter

Poisson distributions

0.0

0.1

0.2

0.3

0.4

-5 0 5 10 15 20Deposit mass (arb. units)

Num

ber

of o

ccur

ance

s (n

orm

aliz

ed)

0.250 s0.125 s0.060 s0.030 s

Dwell time

Deposit mass distributions

Volume per λ: 0.4 nm3

Volume of W(CO)6 molecule: 0.22 nm3

Our approach(nm-sized patterns & any material)

modelling

EBID experiments

surface science

Rutgers Univ.

Howard Fairbrother, Johns Hopkins Univ.

our simulation: <1 nm!

literature: 15 nm

EBID resolution

transmissionelectron

microscope

TPD experiments

XPS, RAIRS, MS

Better understanding:

dissociation mechanism

methylcyclopentadienyl – platinum - trimethyl

Step 1. Cool Au sample to ~120 K and expose

to precursor gas.

gas nozzle

Step 2. Heat in front of QMS while the QMS

monitors m/z = 289

0

2

4

6

8

10

-150 -100 -50 0 50 100 150Temperature (C)

Inte

nsity

m/z

= 2

89 (

a. u

.)

7260483630241812642

gas exposure

x 10-9Torr x 100s

0

2

4

6

8

10

-150 -100 -50 0 50 100 150Temperature (C)

Inte

nsity

m/z

= 2

89 (

a. u

.) 5448423630241812 6 4 3 1

gas exposure

x 10-9Torr x 100s

Step 1. Cool Au sample to ~120 K and expose

to precursor gas.

gas nozzle

Step 2. Heat in front of QMS while the QMS

monitors m/z = 289

0.0

0.5

1.0

1.5

2.0

2.5

-200 -100 0 100 200 300Temperature (C)

Inte

nsity

(ar

b. u

nits

) 0s20s40s60s80s100s180s 0

0.20.40.60.8

1

0 4 8 12

e- dose (x1015 cm2)

A/A

0

Step 1. Cool Au sample to ~120 K and expose

to precursor gas.

gas nozzle

Step 3. Heat in front of QMS while the QMS

monitors m/z = 289

Step 2. Irradiate with electrons (broad beam)

e-gun

0.0

0.5

1.0

1.5

2.0

2.5

3.0

3.5

4.0

1 10 100 1000Electron energy (eV)

Cro

ss s

ect

ion

(x

1016

cm

2 )

0.0

0.5

1.0

1.5

2.0

2.5

3.0

3.5

4.0

1 10 100 1000Electron energy (eV)

Cro

ss s

ect

ion

(x

1016

cm

2 )

Dissociative electron

attachment

Dipolardissociation

Directionization

Thanks!